CN201341127Y - Temperature-compensating crystal resonator based on stress compensation of metal film - Google Patents

Temperature-compensating crystal resonator based on stress compensation of metal film Download PDF

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Publication number
CN201341127Y
CN201341127Y CNU2009200318235U CN200920031823U CN201341127Y CN 201341127 Y CN201341127 Y CN 201341127Y CN U2009200318235 U CNU2009200318235 U CN U2009200318235U CN 200920031823 U CN200920031823 U CN 200920031823U CN 201341127 Y CN201341127 Y CN 201341127Y
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temperature
crystal
frequency
crystal wafer
utility
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CNU2009200318235U
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Chinese (zh)
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周渭
贾兆旻
关兴水
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XI'AN HUAWEI POWER&ELECTRONIC TECH Co Ltd
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XI'AN HUAWEI POWER&ELECTRONIC TECH Co Ltd
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Abstract

The utility model discloses a temperature-compensating crystal resonator based on stress compensation of metal film, which comprises a crystal wafer and an electrode on the crystal wafer; and plated film temperature sensing material is disposed on both sides of the circumference of the crystal wafer or on the electrode. The utility model utilizes the complementary relation of the force-frequency characters and the temperature-frequency characteristic of the crystal wafer to compensate the frequency of crystal resonator; when the temperature varies, it generates a stress on the crystal wafer by the deformation of the temperature sensing material to compensate the frequency variation of the crystal wafer itself along with the temperature. The compensation method of the utility model can enable the frequency-temperature characters of the crystal wafer to reach +/- 1ppm in a wider temperature range, therefore, can meet the requirement of crystal oscillator with higher accuracy, improves the starting line and overall level of the temperature-compensating crystal resonator, greatly simplifies, even omits, the temperature-compensating lines, achieves the advantages of small volume and low cost.

Description

Temperature compensating crystal resonator based on the stress compensation of metallic film
Technical field
The utility model relates to a kind of crystal resonator, specifically is a kind of crystal resonator based on temperature sensing material stress compensation crystal temperature effect frequency characteristic.
Background technology
Crystal resonator has been widely used in technical fields such as communication, post and telecommunications, Aero-Space, defence and military, electronic technology and instrument and meter.Main clock or the standard frequency source that is used as numerous equipment of these aspects.Along with the continuous progress of science and technology, people are more and more higher to the requirement of the frequency-temperature characterisitic of crystal resonator and volume, power consumption, cost.Frequency-the temperature compensation of existing temperature compensating crystal resonator almost is the frequency-temperature characterisitic according to quartz crystal device entirely, the method of handling with circuit compensates, promptly handle, produce the variation that the bucking voltage of crystal resonator is come compensating frequency with simulation, numeral or microcomputer.Generally speaking, with the method for analog compensation, in-50 ℃ ~+85 ℃ scope, can obtain the crystal resonator of frequency-temperature stability for ± 1-2ppm, its precision is lower; Though and frequency-temperature stability high price height, the power consumption of the crystal resonator of employing numeral and computer compensation are big.The AT of present domestic employing computer compensation cuts crystal resonator, in-50 ℃ ~+85 ℃ scope frequency-temperature stability can reach ± more than the 0.5ppm.Because adopt the crystal oscillator structure more complicated of above-mentioned line build-out method compensation, volume is big, power consumption is high, cost is high, be difficult to satisfy the especially needs of mobile phone and the development of other moving communicating field of development in science and technology in recent years; Also be difficult to adapt to the competition in compensation crystal resonator market.The compensation crystal resonator of using as the present mobile phone of China is 100% solve by import almost.Especially it is to be noted that existing temperature compensating crystal oscillator has almost all adopted fundamental crystal rather than overtone crystal to carry out frequency compensation.Its reason is but that the stimulating of fundamental crystal is good.But its stability and aging characteristics are poor.Though overtone crystal stability and aging index are significantly better than fundamental crystal, the frequency of overtone crystal is difficult to carry out the pulling of broad frequency with the method for prior art, so be difficult to be used in voltage-controlled and the temperature compensating crystal oscillator.The at present external best temperature compensating crystal oscillator of performance all is to adopt good stability and temperature compensating crystal oscillator that crystal such as (as overtone) of stimulating difference is made.Because but the stable fine and stimulating of this crystal is very poor, its output frequency is that the method by frequency synthesis obtains.Such oscillator is generally used on the military products, and prices are rather stiff for it, can't resolve its performance and the conflicting difficult problem of price with the line build-out method of prior art at all.
The utility model content
The purpose of this utility model is to overcome the deficiency of prior art, a kind of temperature compensating crystal resonator of the stress compensation based on metallic film is provided, the utility model is regulated crystal temperature effect-frequency characteristic based on the stress of metallic film, the characteristics of utilizing the frequency of quartz crystal device to change with the stress that adds thereon, come compensation temperature to the influence that frequency produced, to constitute the temperature compensating crystal resonator of a new generation.
The technical scheme that the utility model adopted is: based on the temperature compensating crystal resonator of the stress compensation of metallic film, comprise the electrode (1) on crystal wafer (2) and the crystal wafer, crystal wafer (1) along the circumference both sides or electrode (2) be provided with coating temperature sensing material (3).
The utility model adopts the method for vacuum coating, thermally sensitive sensing material is plated on the crystal wafer of crystal resonator or is plated on the electrode of crystal, when variations in temperature, distortion by temperature sensing material, generation puts on the stress of crystal, and self varies with temperature the frequency change that is produced compensated crystal.
Compared with prior art, the utility model utilizes the power-frequency characteristic of crystal and the relation that temperature-the frequency characteristic compensates mutually, creates new high performance temperature compensated resonator.The pattern of the line build-out that the stress compensation method that the utility model adopted fundamentally is different from prior art on the principle and is adopted is a kind of brand-new compensation method.It simplifies even has omitted the various circuits of temperature-compensating greatly, the crystal oscillator designs simplification that is constituted, and precision height, volume are little, and cost is low and power consumption is little.Adopt the method that stress of the present utility model handles and obtain based on temperature sensing material stress compensation crystal resonator, therefore can solve the pulling that overtone crystal carries out the broad frequency satisfactorily, thus overtone crystal can be used in voltage-controlled and temperature compensating crystal oscillator in.Can't resolve the conflicting difficult problem of its performance and price simultaneously.And obtain than the better frequency-temperature characterisitic of the temperature compensating crystal oscillator of prior art, phase noise characteristic, frequency stability and aging characteristics.Exactly because crystal such as the overtone of high stable still have the characteristic that can spur adjusting in narrower frequency range, when the higher precision of needs, can be on the basis that applied stress is handled, only in very narrow frequency range, the method that adopts simple circuit to handle is again regulated, and just can realize further obtaining more high-precision effect.The utility model is with simple stress compensation method, can obtain the effect of good temperature-compensating, so be particularly suitable in enormous quantities, high-precision production to temperature compensating crystal oscillator, combine with simple line build-out technology again, can further improve the starting point and the aggregate level of this class oscillator.For the sizable ordinary temp compensated crystal oscillator of proportion, owing to removed the circuit control section, its short steady index and phase noise characteristic are better.Will obtain huge economic benefit in this application.
Description of drawings
Fig. 1 is the utility model embodiment 1 structural representation.
Fig. 2 is the utility model embodiment 2 structural representations.
Fig. 3 is the frequency-temperature characteristics figure of different corner cut crystal wafers.
Fig. 4 is the frequency-temperature characteristics figure of the crystal oscillator of the utility model embodiment 1.
Fig. 5 is the frequency-temperature characteristics figure of the crystal oscillator of the utility model embodiment 2.
Fig. 6 is the schematic block circuit diagram that the utility model is used for temperature compensating crystal oscillator.
Fig. 7 is the temperature compensating crystal oscillator schematic block circuit diagram of prior art.
Embodiment
Below in conjunction with accompanying drawing the utility model is elaborated.
The utility model along with the characteristics that the variation of the stress that is applied thereto changes, adopts the temperature sensor influence to be added on stress intensity on the crystal resonator according to the frequency of oscillator, and the frequency of coming compensated crystal oscillator is with variation of temperature.And the power of crystal and crystal oscillator-frequency effect is exactly when resonator is subjected to stress, and its resonance frequency can change thereupon.This stress can be by the support of external force, acceleration and vibration, electrode deformation, crystal or other factor and is caused.Along with the increase that applies power, the variation of the frequency of oscillation of crystal also increases, and the variation that power reduces frequency also reduces thereupon.Be the relational expression of concrete crystal frequency increment STRESS VARIATION suffered below with it:
Δf = K f f 2 nD ΔF - - - ( 1 )
The frequency increment of Δ f-resonator in the formula;
K fThe Laplace coefficient of-resonator;
The resonance frequency of f-resonator;
N-resonance overtone number of times;
The diameter of D-resonator;
Δ F-STRESS VARIATION.
From (1) formula as can be seen the frequency change of crystal be subjected to the influence of the factors such as frequency, diameter and resonance times of resonator.But concerning same crystal, K f, f, n, D be constant, this moment, the variation of frequency change stress suffered with it of crystal was linear in theory.Though also have some frequency change of expressing crystal with add with its on expression formula and (1) formula of STRESS VARIATION have difference, the linear changing relation between power-frequency is the same.
The electrode (1) that comprises crystal wafer (2) and crystal wafer based on the temperature compensating crystal resonator of the stress compensation of metallic film, as shown in Figure 1, 2, the crystal wafer (2) that temperature sensing material (3) directly is plated in crystal resonator perhaps is plated on the electrode (1) of crystal wafer along the circumference both sides.When temperature changes, total body frequency-temperature characterisitic of crystal and crystal oscillator can change according to the frequency-temperature characterisitic of crystal itself and the comprehensive function result of Qi Li-frequency characteristic, just, variations in temperature produces deformation along with making temperature sensing material earlier, because being tightly linked of this material and crystal, making crystal itself meet with stresses to change and cause that its frequency changes.The purpose of compensation is to make by caused frequency change of stress and crystal itself to cancel out each other with the frequency change that temperature produces.
When the frequency of crystal resonator being compensated with temperature sensing material stress, zero stress point temperature with temperature sensing material is a reference point, select the pairing frequency-temperature characterisitic frequency band of crystal wafer corner cut to compensate near linearity, when temperature departure zero stress point descends, the sensing material distortion produces the stress that is applied on the crystal and increases thereupon, the frequency that causes crystal reduces, thereby the pulling crystal improves characteristic using temperature-frequency.Described temperature sensing material can be selected the responsive metal material that expands with heat and contract with cold.
In Fig. 1, the utility model is plated in the method for the temperature sensing material (3) that produces the deformation of significantly expanding with heat and contract with cold along with variations in temperature with plated film on the crystal wafer (2).In Fig. 2, temperature sensing material (3) is plated on the electrode (1) of crystal with the method for plated film.By the deformation of temperature sensing material (3), produce the stress that acts on crystal wafer (2) or electrode (1) corresponding site.The utility model is selected with bimetallic materials such as the deformation of the temperature silver comparatively sensitive with respect to the crystal material of crystal, gold, copper-nickel, aluminium-Yin, Jin-Yin, copper-aluminium as temperature sensing material (3).Adopt the secondary vacuum coating method that metal temperature sensing material (3) directly is plated on the crystal wafer (2).If temperature sensing material (3) is plated on the crystalline electrode (1), because crystalline electrode of the present utility model (1) is generally metal aluminium electrode or gold electrode, the tangible single metal material of the distortion of can selecting to expand with heat and contract with cold is plated on the crystalline electrode (1), forms bi-metal temperature sensing material (3).
As shown in Figure 3, the frequency-temperature characterisitic of crystal and crystal oscillator is different and different according to the machining angle of crystal, mainly is cubic curve or characteristic similarly.
Curve from Fig. 3 draws, and when the corner cut difference of crystal, with the rising of temperature, can make the frequency-temperature characteristics of crystal two kinds of variations of positive slope and negative slope occur in most of temperature ranges.
The utility model stress compensation crystal frequency-temperature characterisitic embodiment:
It is that the crystal corner cut condition of negative characteristic is carried out frequency compensation that the utility model is typically selected frequency-temperature characteristics section.Under temperature is vacuum condition about 85 ℃, argent, aluminium directly are plated in the both sides edge of crystal wafer (2) along circumference, tow sides all are coated with the silver-colored temperature sensing material (3) of semi-ring type, as shown in Figure 1.Or at last layer of copper or the steel membrane temperature sensing material (3) of plating of the aluminium electrode (1) of crystal.Coating is shaped as along the long strip type of x axle (perhaps conversely, copper or steel are interior, and aluminium outside) as shown in Figure 2.In this way, the bimetallic Solder for Al-Cu Joint Welding or the aluminium-steel electrode of crystal wafer (2) have been formed.When temperature drops to-50 ℃ process from 85 ℃ of the zero stress point temperature of bi-metal temperature sensing material (3), crystal wafer (2) is gone up or temperature sensing material (3) silver, Solder for Al-Cu Joint Welding or the aluminium-steel of electrode (1) are out of shape, generation puts on the stress of crystal wafer (2), make the frequency-temperature characteristics of this crystal oscillator in Fig. 3 be rotated counterclockwise variation, frequency deviation is reduced, frequency trend standard value.Obtained as shown in Figure 4 near the compensated curve of linear change.1# among Fig. 4 and 4# are the compensated curve of the frequency-temperature characteristics figure of the crystal oscillator behind the utility model embodiment 1 stress compensation, than other not the compensated crystal performance improve significantly, Fig. 5 is the compensated curve of the frequency-temperature characteristics figure of the crystal oscillator behind the utility model embodiment 2 stress compensations.
Through compensation deals of the present utility model, do not need to increase any circuit, just can obviously improve the frequency-temperature characterisitic of crystal and crystal oscillator.This needs that do not need process can satisfy most products such as mobile phone with the technical indicator of the temperature compensating crystal oscillator that processing method obtained of circuit.Can only reach with the frequency stability of temperature of most of crystal in same temperature range ± tens ppm compare, and its technical indicator is greatly improved.The utility model also provides compensation method for producing high precision temperature compensation crystal oscillator.Be exactly on the basis of the frequency-temperature characterisitic that obtains above-mentioned compensation, only in very narrow temperature range, be aided with simple, conventional line build-out method, just be easy to obtain the compensation precision of frequency-temperature characterisitic up to ± 0.2ppm.
Also can cut the crystal plated film with above-mentioned temperature sensing material (3) and constitute the compensation effect that electrode produces overtone AT, additional simpler compensated line on the basis of just adopting stress compensation method compensation of the present utility model, can obtain better compensation effect effectively in the frequency that spurs overtone crystal among a small circle.For example, be 38.88MH to frequency ZOvertone crystal, the stress compensation method can produce and be not less than-1KH ZFrequency change.But with the method that traditional circuit is regulated, above-mentioned overtone crystal frequency can only produce several H ZTo tens H ZFrequency change.The difficult problem that this overtone crystal frequency that has just solved good stability preferably is difficult to regulate with circuit of the prior art compensation is for bright prospects have been opened up in the application of temperature-compensating class overtone crystal.
Fig. 1, Fig. 2 and Fig. 6 and Fig. 7 are compared, and as can be seen, in prior art shown in Figure 7, temperature compensating crystal oscillator mainly is made up of temperature sensor, temperature compensation circuit and VCXO three parts, and this three part is indispensable.And form in the temperature compensating crystal oscillator temperature sensor and temperature compensation circuit two large divisions structure that the frame of broken lines of the utility model in can alternate figures 7 goes out using the utility model.Even in Fig. 4, use the temperature compensating crystal oscillator that the utility model is formed, also only outside the utility model, added a simple oscillator circuit, its general structure, volume also are significantly smaller than Fig. 7 and form temperature compensating crystal oscillator.
What be worth proposition is that crystal wafer (2) usually negative frequency difference can occur after meeting with stresses.So, to preset positive frequency difference to the processing of crystal wafer (2).The technology of this respect guarantees the overall frequency-temperature characterisitic of the crystal that obtains in the batch process is improved greatly.The qualification rate that satisfies one-pass finished reaches more than 80%.
By the evidence to a large amount of crystal, on the high and low temperature both direction of the zero stress point of crystal (expand and shrink, crooked direction is different), the variation of frequency all is to change to low direction.Can form with the zero stress point be all downward compensation that is bordering on broken line of the both direction at center near linear temperature-compensated frequency characteristic.So just, obtain wideer compensation range.

Claims (1)

1, based on the temperature compensating crystal resonator of the stress compensation of metallic film, comprise the electrode (1) on crystal wafer (2) and the crystal wafer, it is characterized in that: crystal wafer (1) along the circumference both sides or electrode (2) be provided with coating temperature sensing material (3).
CNU2009200318235U 2009-01-23 2009-01-23 Temperature-compensating crystal resonator based on stress compensation of metal film Expired - Fee Related CN201341127Y (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109818592A (en) * 2019-01-17 2019-05-28 西安电子科技大学 A kind of ring-type compensation film stress compensation crystal resonator
CN111404507A (en) * 2020-03-30 2020-07-10 西安电子科技大学 Crystal resonator adopting strip-shaped compensation film for stress compensation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109818592A (en) * 2019-01-17 2019-05-28 西安电子科技大学 A kind of ring-type compensation film stress compensation crystal resonator
CN111404507A (en) * 2020-03-30 2020-07-10 西安电子科技大学 Crystal resonator adopting strip-shaped compensation film for stress compensation
CN111404507B (en) * 2020-03-30 2024-04-02 西安电子科技大学 Crystal resonator adopting bar-shaped compensation film stress compensation

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