CN201326036Y - Silicon nitride film baking device of quartz crucible for polysilicon solar battery cast ingot - Google Patents
Silicon nitride film baking device of quartz crucible for polysilicon solar battery cast ingot Download PDFInfo
- Publication number
- CN201326036Y CN201326036Y CNU200820215103XU CN200820215103U CN201326036Y CN 201326036 Y CN201326036 Y CN 201326036Y CN U200820215103X U CNU200820215103X U CN U200820215103XU CN 200820215103 U CN200820215103 U CN 200820215103U CN 201326036 Y CN201326036 Y CN 201326036Y
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- Prior art keywords
- quartz crucible
- silicon nitride
- nitride film
- solar battery
- pipeline
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Abstract
The utility model relates to a silicon nitride film baking device of a quartz crucible for a polysilicon solar battery cast ingot, which comprises the quartz crucible (1), a clean baking oven (2), a vacuum pump (3), a vacuum meter (4), a heating rod (5), a valve (6), a pipeline (7) and an Ar gas station (8). The quartz crucible (1) is arranged in the airtight clean baking oven (2), the clean baking oven (2) is connected with the vacuum pump (3), the vacuum meter (4) is arranged on the clean baking oven (2), the heating rod (5) is arranged in the clean baking oven (2), the clean baking oven (2) is connected with the Ar gas station (8) by the pipeline (7), and the valve (6) is arranged on the pipeline (7). The silicon nitride film of the baking device of the quartz crucible is reasonable, clean and economical.
Description
(1) technical field
The utility model relates to a kind of silicon nitride film apparatus for baking that is used for quartz crucible for polysilicon solar battery casting ingot.The quartz crucible that is mainly used in scribbling silicon nitride film toasts.Belong to technical field of solar batteries.
(2) background technology
Polycrystalline silicon ingot casting adopts quartz crucible as container, polysilicon fusion therein, cooling, annealing crystallization.Because common quartz crucible foreign matter content is big, high-purity crucible cost is too high again, and crucible can produce following reaction with molten silicon:
SiO
2+Si＝2SiO
Cause that sticking crucible phenomenon takes place, and also can sneak in the ingot disadvantageous oxygen element of finished product battery sheet electrical property and impurity element simultaneously.So the method that adopts is at common inner wall of quartz crucible spraying one deck silicon nitride.
Before the utility model is made, the silicon nitride spray finishing technology of the quartz crucible for polysilicon solar battery casting ingot of Cai Yonging was in the past: powder silicon nitride and deionized water are made pulpous state according to certain proportioning, under normal pressure, be sprayed on the crucible inwall, in a conventional oven, dry.It mainly has the following disadvantages: the demand of not noting cleanliness factor in spraying and the drying course.
(3) summary of the invention
The purpose of this utility model is to overcome above-mentioned deficiency, provide a kind of rationally, the silicon nitride film apparatus for baking of clean and economic quartz crucible for polysilicon solar battery casting ingot.
The purpose of this utility model is achieved in that a kind of silicon nitride film apparatus for baking of quartz crucible for polysilicon solar battery casting ingot, comprise quartz crucible, cleaning oven, vacuum pump, vacuumometer, heating rod, valve, pipeline and Ar gas station, described quartz crucible places in the airtight cleaning oven, described cleaning oven links to each other with vacuum pump, vacuumometer is installed on the cleaning oven, be provided with heating rod in the cleaning oven, cleaning oven links to each other with Ar gas station by pipeline, and pipeline is provided with valve.
The utility model has following characteristics:
1, silicon nitride film can stop the silicon liquid and the quartz crucible reaction of high-temperature fusion, avoids occurring sticking crucible phenomenon.
2, the appearance of silicon nitride film has simultaneously substituted the use of high-purity silica pot, can save cost, reduces investment.
3, can also at utmost stop the sneaking into of disadvantageous oxygen element of finished product battery sheet electrical property and impurity element, for the quality of battery sheet provides guarantee.
(4) description of drawings
Fig. 1 is the silicon nitride film apparatus for baking synoptic diagram of the utility model quartz crucible for polysilicon solar battery casting ingot.
Description of reference numerals among the figure:
Quartz crucible 1
Cleaning oven 2
Valve 6
Pipeline 7
Ar gas station 8.
(5) embodiment
Referring to Fig. 1, the silicon nitride film apparatus for baking of the quartz crucible for polysilicon solar battery casting ingot that the utility model is related mainly is made up of quartz crucible 1, cleaning oven 2, vacuum pump 3, vacuumometer 4, heating rod 5, valve 6, pipeline 7 and Ar gas station 8.Described quartz crucible 1 places in the airtight cleaning oven 2, described cleaning oven 2 links to each other with vacuum pump 3, and vacuumometer 4 is installed on the cleaning oven 2, is provided with heating rod 5 in the cleaning oven 2, cleaning oven 2 links to each other with Ar gas station 8 by pipeline 7, and pipeline 7 is provided with valve 6.
Claims (1)
1, a kind of silicon nitride film apparatus for baking of quartz crucible for polysilicon solar battery casting ingot, it is characterized in that: described device comprises quartz crucible (1), cleaning oven (2), vacuum pump (3), vacuumometer (4), heating rod (5), valve (6), pipeline (7) and Ar gas station (8), described quartz crucible (1) places in the airtight cleaning oven (2), described cleaning oven (2) links to each other with vacuum pump (3), cleaning oven (2) is gone up vacuumometer (4) is installed, be provided with heating rod (5) in the cleaning oven (2), cleaning oven (2) links to each other with Ar gas station (8) by pipeline (7), and pipeline (7) is provided with valve (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200820215103XU CN201326036Y (en) | 2008-12-05 | 2008-12-05 | Silicon nitride film baking device of quartz crucible for polysilicon solar battery cast ingot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200820215103XU CN201326036Y (en) | 2008-12-05 | 2008-12-05 | Silicon nitride film baking device of quartz crucible for polysilicon solar battery cast ingot |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201326036Y true CN201326036Y (en) | 2009-10-14 |
Family
ID=41178011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU200820215103XU Expired - Fee Related CN201326036Y (en) | 2008-12-05 | 2008-12-05 | Silicon nitride film baking device of quartz crucible for polysilicon solar battery cast ingot |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201326036Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102185017A (en) * | 2011-03-16 | 2011-09-14 | 常州市万阳光伏有限公司 | Method for preparing solar-battery-level polycrystalline silicon product |
| CN102925970A (en) * | 2012-11-20 | 2013-02-13 | 天津英利新能源有限公司 | Crucible spraying and drying device, and method of crucible spraying and drying device |
| CN102983782A (en) * | 2011-09-06 | 2013-03-20 | 吉富新能源科技(上海)有限公司 | Oven with thin film solar cells |
-
2008
- 2008-12-05 CN CNU200820215103XU patent/CN201326036Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102185017A (en) * | 2011-03-16 | 2011-09-14 | 常州市万阳光伏有限公司 | Method for preparing solar-battery-level polycrystalline silicon product |
| CN102983782A (en) * | 2011-09-06 | 2013-03-20 | 吉富新能源科技(上海)有限公司 | Oven with thin film solar cells |
| CN102925970A (en) * | 2012-11-20 | 2013-02-13 | 天津英利新能源有限公司 | Crucible spraying and drying device, and method of crucible spraying and drying device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Atamps dimensional energy (Taicang) Co. Ltd. Assignor: Jiangyin Hairun Solar Energy Power Co., Ltd. Contract record no.: 2010320001127 Denomination of utility model: Silicon nitride film baking device of quartz crucible for polysilicon solar battery cast ingot Granted publication date: 20091014 License type: Exclusive License Record date: 20100914 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091014 Termination date: 20171205 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |