CN201326029Y - Electrode gap adjusting device - Google Patents
Electrode gap adjusting device Download PDFInfo
- Publication number
- CN201326029Y CN201326029Y CNU2008200730095U CN200820073009U CN201326029Y CN 201326029 Y CN201326029 Y CN 201326029Y CN U2008200730095 U CNU2008200730095 U CN U2008200730095U CN 200820073009 U CN200820073009 U CN 200820073009U CN 201326029 Y CN201326029 Y CN 201326029Y
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- China
- Prior art keywords
- guide rail
- electrode gap
- graduated scale
- base
- retaining screw
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to a deposition device used in solar battery production, particularly to an electrode gap adjusting device convenient for altering the electrode gap in plasma-enhanced chemical vapor deposition (PECVD) so as to adjust the deposition rate. The device comprises a plate electrode, a base, a guide rail, a retaining screw and a graduated scale, wherein the plate electrode is fixed on the base, which is provided with the retaining screw and arranged on the guide rail and can slide along a groove on the guide rail; and the graduated scale is arranged on one side of the guide rail. Due to adoption of the structure, the utility model has simple structure and convenient adjustment, and enables the electrode gap to be adjusted freely and appropriately in production so as to find out the minimum electrode gap and ensure the best deposition effect, and the electrode gap can be read from the graduated scale after the adjustment. Moreover, the reading and the recording are convenient for finding out the minimum electrode gap.
Description
Technical field
The utility model relates to the depositing device in a kind of manufacture of solar cells, a kind of specifically convenient interelectrode distance that changes in the plasma activated chemical vapour deposition (PECVD), the interelectrode distance setting device of adjustment sedimentation rate.
Background technology
Plasma activated chemical vapour deposition (PECVD) is a major equipment in the preparation of amorphous silicon membrane solar cell, the production of solar cell is to feed reactant gases in the PECVD vacuum chamber, ultra-clear glasses after cleaning is placed between two parallel electrode plates, on two battery lead plates, connect power supply, thereby produce solar battery sheet with certain radio frequency power.Wherein, the distance between two battery lead plates is called interelectrode distance.
In the manufacture of solar cells process, sedimentation rate reduces and increases with interelectrode distance, but little behind certain value in interelectrode distance, continues to reduce interelectrode distance and then can cause deposition effect bad.Under certain air pressure, there is the interelectrode distance an of the best, is referred to as the minimum electrode spacing.In actual production, need make interelectrode distance little as far as possible, but can not be less than the minimum electrode spacing.
So when producing, need the frequent interelectrode distance of adjusting, find the minimum electrode spacing.And electrode is fixed on the equipment in the existing installation, electrode need be disassembled when adjusting spacing, seek suitable position and install again, and the process complexity, and damage battery lead plate easily.Be badly in need of seeking a kind of convenient method of regulating interelectrode distance.
Summary of the invention
The purpose of this utility model is that a kind of device that can conveniently adjust the PECVD interelectrode distance in solar battery sheet production will be provided.
The purpose of this utility model is achieved in that this device comprises battery lead plate, base, guide rail, retaining screw, graduated scale, described battery lead plate is fixed on the base, the base that has retaining screw on it is arranged on the guide rail, and can slide along the groove on the guide rail, graduated scale is arranged on the side of guide rail.
The utility model is owing to adopt said structure to make that interelectrode distance is free to adjust, and simple in structure, the counter electrode spacing is suitably regulated aborning, find the minimum electrode spacing, guarantee best deposition effect, easy to adjust, and can on graduated scale, read interelectrode distance after adjusting.Conveniently read, the line item of going forward side by side is sought the minimum electrode spacing.
Description of drawings
Fig. 1 is an interelectrode distance setting device one-piece construction synoptic diagram.
Fig. 2 is that the utility model A is to perspective view.
Fig. 3 is that the utility model B is to perspective view.
Embodiment
Shown in accompanying drawing 1,2,3: this device comprises battery lead plate 1, base 2, guide rail 3, retaining screw 4, graduated scale 5, described battery lead plate 1 is fixed on the base 2, the base 2 that has retaining screw 4 on it is arranged on the guide rail 3, and can slide along the groove on the guide rail 36, graduated scale 5 is arranged on the side of guide rail 3.
Working process is: when needs regulate between the battery lead plate 1 apart from the time because battery lead plate 1 and base 2 link together, so only need movable base 2 to get final product.Loosening retaining screw 4, then base 2 can be along guide rail 3 move left and right, move to need apart from the time, tighten retaining screw 4,2 of bases are fixed, this moment, PECVD carried out work, and detected deposition effect.Up to the optimum value of finding out interelectrode distance.And on graduated scale 5, read the numerical value of this optimum distance.
Claims (1)
1, a kind of interelectrode distance setting device, it is characterized in that: this device comprises battery lead plate (1), base (2), guide rail (3), retaining screw (4), graduated scale (5), described battery lead plate (1) is fixed on the base (2), the base (2) that has retaining screw (4) on it is arranged on the guide rail (3), and can slide along the groove (6) on the guide rail (3), graduated scale (5) is arranged on the side of guide rail (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200730095U CN201326029Y (en) | 2008-12-30 | 2008-12-30 | Electrode gap adjusting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200730095U CN201326029Y (en) | 2008-12-30 | 2008-12-30 | Electrode gap adjusting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201326029Y true CN201326029Y (en) | 2009-10-14 |
Family
ID=41178004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200730095U Expired - Lifetime CN201326029Y (en) | 2008-12-30 | 2008-12-30 | Electrode gap adjusting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201326029Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102128581A (en) * | 2010-12-28 | 2011-07-20 | 广州珠江钢琴集团股份有限公司 | Device for measuring striking point at string of trigon |
| CN102185217A (en) * | 2011-03-04 | 2011-09-14 | 深圳市创益科技发展有限公司 | Connecting member and method for radio-frequency power supply in silicon-based film battery deposition clamp |
| WO2011131137A1 (en) * | 2010-04-21 | 2011-10-27 | 北京京东方光电科技有限公司 | Magnetron sputtering apparatus |
| CN105352382A (en) * | 2015-11-11 | 2016-02-24 | 浙江工业大学 | Magnitude-variable solar electrochromic calibrated scale |
| CN105699456A (en) * | 2016-03-31 | 2016-06-22 | 成都国珈星际固态锂电科技有限公司 | Three-electrode testing device and three-electrode testing method |
| CN113560150A (en) * | 2021-07-15 | 2021-10-29 | 南京工业大学 | Plasma modification device for agricultural film material dustproof coating deposition |
-
2008
- 2008-12-30 CN CNU2008200730095U patent/CN201326029Y/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011131137A1 (en) * | 2010-04-21 | 2011-10-27 | 北京京东方光电科技有限公司 | Magnetron sputtering apparatus |
| US8808514B2 (en) | 2010-04-21 | 2014-08-19 | Beijing Boe Optoelectronics Technology Co., Ltd. | Magnetron sputtering apparatus |
| CN102128581A (en) * | 2010-12-28 | 2011-07-20 | 广州珠江钢琴集团股份有限公司 | Device for measuring striking point at string of trigon |
| CN102185217A (en) * | 2011-03-04 | 2011-09-14 | 深圳市创益科技发展有限公司 | Connecting member and method for radio-frequency power supply in silicon-based film battery deposition clamp |
| CN102185217B (en) * | 2011-03-04 | 2013-02-06 | 深圳市创益科技发展有限公司 | Connecting member and method for radio-frequency power supply in silicon-based film battery deposition clamp |
| CN105352382A (en) * | 2015-11-11 | 2016-02-24 | 浙江工业大学 | Magnitude-variable solar electrochromic calibrated scale |
| CN105352382B (en) * | 2015-11-11 | 2018-11-02 | 浙江工业大学 | The variable solar-electricity mutagens color scale of measurement |
| CN105699456A (en) * | 2016-03-31 | 2016-06-22 | 成都国珈星际固态锂电科技有限公司 | Three-electrode testing device and three-electrode testing method |
| CN113560150A (en) * | 2021-07-15 | 2021-10-29 | 南京工业大学 | Plasma modification device for agricultural film material dustproof coating deposition |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20091014 |