CN201302583Y - Vertical probe card provided with reinforcing device - Google Patents
Vertical probe card provided with reinforcing device Download PDFInfo
- Publication number
- CN201302583Y CN201302583Y CNU200820175763XU CN200820175763U CN201302583Y CN 201302583 Y CN201302583 Y CN 201302583Y CN U200820175763X U CNU200820175763X U CN U200820175763XU CN 200820175763 U CN200820175763 U CN 200820175763U CN 201302583 Y CN201302583 Y CN 201302583Y
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- CN
- China
- Prior art keywords
- reinforcing device
- vertical probe
- orifice plate
- colloid
- described vertical
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
The utility model discloses a vertical probe card provided with a reinforcing device. The reinforcing device is combined with a permanent seat provided with a vertical probe; when the acting force of the probe generated by contact test is transmitted to the permanent seat, the reinforcing device can effectively avoid the permanent seat from being deformed, thus further improving the test stability.
Description
Technical field
The utility model is relevant with vertical probe carb, especially a kind of vertical probe carb with reinforcing device.
Background technology
Along with semiconductor science and technology is constantly progressive, die size heals under the little trend, the I/O joint configuration of chip distributes towards being high-density matrix, and use the test of multi-tiling large tracts of land in order to save testing cost, therefore cooperate actual testing requirement, with in the test probe card, be applicable to that the vertical probe carb of multiprobe and large tracts of land test then becomes even more important in wafer sort.
See also Fig. 1, existing vertical probe carb 1 comprises a circuit board 2, a holder 3, colloid 4, plurality of transmission lines 5 and a plurality of probe 6.The test contacts 2b of circuit board 2 is laid in around the opening 2a of circuit board 2, and holder 3 is made up of a pedestal 3a and an orifice plate 3b, and by both in conjunction with forming an accommodation space 3c, wherein pedestal 3a is located at the opening 2a place of circuit board 2, one end of described transmission line 5 is electrically connected to the test contacts 2b of circuit board 2, via accommodation space 3c, the other end is arranged in the perforation 3d of this orifice plate 3b, by colloid 4 is poured among the accommodation space 3c, transmission line 5 can be fixed in the colloid 4, generally be to make colloid 4 moulding by the heat curing mode.Described probe 6 is arranged on orifice plate 3b below and electrically connects with described transmission line 5.
As shown in Figure 1, can find known vertical probe carb 1,5 of colloid 4 and described transmission lines there is no other structure and exist in the accommodation space 3c of pedestal 3a.In the process of carrying out chip testing, the reacting force that all probes 6 are produced on when the engaged test chip can act on orifice plate 3b and the colloid 4, makes orifice plate 3b and colloid 4 produce stress, can produce many harmful effects when especially stress is excessive.Under the situation that the quantity of test chip increases, probe 6 quantity of engaged test chip heighten, therefore whole stressed greatly increasing, the laying that adds transmission line 5 also needs corresponding increasing, this can make relatively, and the amount in order to fixed transmission lines 5 required perfusion colloids 4 reduces among the accommodation space 3c, and colloid 4 solidifies inside, back and then is easy to generate pore and reduces its stress tolerances, and it is not good to the stability of integrated testability therefore to cause orifice plate 3b and this colloid 4 to produce deformation effect.
The utility model content
In view of the above problems, the utility model mainly proposes the vertical probe carb of a tool reinforced structure.Its objective is that promoting existing vertical probe is stuck in the ability that can resist stress deformation in the test process, and then promote stable testing.
In order to reach above-mentioned purpose, the utility model proposes a kind of vertical probe card architecture, it comprises a circuit board, a holder, a reinforcing device, plurality of transmission lines and a plurality of probe; This circuit board is to have an opening for this holder setting and this transmission line of a plurality of test contacts power supply property connection, this holder is provided with ccontaining described transmission line and is fixed, the other end with this transmission line electrically connects in this holder bottom to make described probe, this reinforcing device is in conjunction with this holder, by the design that increases reinforcing device, can bear the stress deformation of being resisted this holder from the acting force of probe in test process, and then promote stable testing.
The beneficial effects of the utility model are:
The vertical probe carb of tool reinforced structure of the present utility model, its effect are to promote existing vertical probe to be stuck in the ability that can resist stress deformation in the test process, and then promote stable testing.
Description of drawings
For the utility model further is described, enumerate preferred embodiment of the present utility model and cooperate following accompanying drawing to describe it in detail, wherein:
Fig. 1 is existing vertical probe carb cut-open view;
Fig. 2 is the cut-open view of the utility model first vertical probe carb that preferred embodiment provides;
Fig. 3 is the cut-open view of the utility model second vertical probe carb that preferred embodiment provides;
Fig. 4 is the cut-open view of the utility model the 3rd vertical probe carb that preferred embodiment provides;
Fig. 5 is the cut-open view of the utility model the 4th vertical probe carb that preferred embodiment provides;
Fig. 6 is the cut-open view of the utility model the 5th vertical probe carb that preferred embodiment provides;
Fig. 7 is the cut-open view of the utility model the 6th vertical probe carb that preferred embodiment provides.
Embodiment
See also a kind of vertical probe carb 100 that first preferred embodiment of Fig. 2 the utility model is provided with reinforcing device, be the electrical functionality that is provided with the engaged test chip, it includes a circuit board 20, a holder 30, a reinforcing device 40, plurality of transmission lines 50 and a plurality of probe 60.
This reinforcing device 40 is tabular rigid structure, is provided in a side of on this pedestal 31 and is incorporated into the upper surface 323 of this orifice plate 32, and that this reinforcing device 40 can be is netted, palisade or radial distributed architecture, therefore is formed with a plurality of holes 41 and passes through for described transmission line 50.
Described transmission line 50 is to have one first relative end 51 and one second end 52, this first end 51 electrically connects the described test contacts 22 of this circuit board 20, this second end 52 then prolongs the open end 311 that stretches to this pedestal 31 and supports the lower surface 324 that terminates in this orifice plate 32 so that pass the perforation 322 of this orifice plate 32, therefore in a single day being provided with 52 welderings of described second end than these 322 apertures of boring a hole is big metal coupling 53, then can makes this second end 52 be fixed in this orifice plate 32.
Described probe 60 has a syringe needle 61 and a backshank 62; Described syringe needle 61 is in order to electrically connecting with test chip, and described backshank 62 is to electrically connect by second end 52 of this metal coupling 53 with described transmission line 50.
When this vertical probe carb 100 carries out chip testing, the syringe needle 61 of described probe 60 is to contact with chip, and because the acting force that the test contact is produced reaches this backshank 62 from this syringe needle 61 and acts on to orifice plate 32 to described metal coupling 53, in the present embodiment, this reinforcing device 40 is incorporated into 32 of this orifice plates enough meeting with stresses can be provided; This measure will limit the deflection of this orifice plate 32, makes that the existing vertical probe carb of stable testing is stable.
The above is the vertical probe carb with reinforcing device 100 of the utility model first preferred embodiment, and under same creation purpose and effect demand, part member of the present utility model also can be done the different structural designs or the setting of diverse location.
Seeing also Fig. 3 is the vertical probe carb with reinforcing device 200 of the utility model second embodiment, and this reinforcing device 40 also comprises a stiffening ring 45; This stiffening ring 45 is incorporated into this circuit board 20, and the pedestal 31 of this holder 30 is in conjunction with the open end 311 of this stiffening ring 45 at this pedestal 31; That this stiffening ring 45 can be is netted, palisade or radial distributed architecture, therefore is formed with a plurality of holes and passes through for described transmission line 50; This stiffening ring 45 covers this accommodation space 313, can prevent foreign matter to enter wherein; In addition, in the test chip process, the reacting force that is produced during all probe 60 engaged test chips can act on orifice plate 32 and be passed to this stiffening ring 45 through this pedestal 31 again; This stiffening ring 45 can be limited the stress deformation of this orifice plate 32 by itself intensity, reaches the effect that reduces these orifice plate 32 deflections.
Seeing also Fig. 4 is the vertical probe carb with reinforcing device 300 of the utility model the 3rd embodiment, and they are different with first embodiment, are to set up colloid 70 in this accommodation space 313; This colloid 70 can be filled this accommodation space 313 and part is touched this orifice plate 32 via the hole 41 of this reinforcing device 40, through fixing the position of described transmission line 50 behind the baking-curing, so match down with respectively bore a hole 322 aperture of this orifice plate 32 in the line footpath of described transmission line 50, also can save needs with the making step of metal coupling 53 these transmission line 50 second ends 52 of welding with fixing described transmission line 50, and can strengthen the deflection that this reinforcing device 40 limits this orifice plate 32, reach the effect that reduces these orifice plate 32 deflections.
Seeing also Fig. 5 is the vertical probe carb with reinforcing device 400 of the utility model the 4th embodiment, they are different with the 3rd embodiment, be that a reinforcing device 40 that originally combines with this orifice plate 32 moves to the predetermined height in this accommodation space 313, and between this orifice plate 32 and reinforcing device 40, fill this colloid 70, allow reinforcing device 40 and this colloid 70 mutually combine in a plane, when this orifice plate 32 meets with stresses, can limit this orifice plate 32 stress deformations simultaneously by this colloid 70 that solidifies and with this reinforcing device 40 of the direct adjacency of these colloid 70 upsides, and because the rigidity of this reinforcing device 40 is bigger than this colloid 70, can effectively avoid this colloid 70 with these orifice plate 32 stress deformations pull this transmission line 50 cause the consequence to should probe 60 being electrically insulated.
Seeing also Fig. 6 is the vertical probe carb with reinforcing device 500 of the utility model the 5th embodiment, the reinforcing device 80 that provides that is that they are different with the 4th embodiment includes a backboard 42 and a projection 43, and this projection 43 is provided in a side of the nearly center of this backboard 42; This backboard 42 is incorporated into the open end 311 of this pedestal 31, and there is the predetermined degree of depth these projection 43 these colloid 70 inside of embedding; The acting force that bears from described probe 60 when this orifice plate 32 begins towards the distortion of this accommodation space 313 indents, and this colloid 70 can limit the distortion of this orifice plate 32; Simultaneously because this projection 43 combines with this colloid 70, this backboard 42 is strengthened this colloid 70 by this projection 43 and is limited this orifice plate 32 distortion, also can resist the effect of these orifice plate 32 distortion, certainly set not influencing the cloth of described transmission line 50 in accommodation space 313, for reaching best restrained deformation effect, present embodiment provides this reinforcing device 80 not limit the quantity of set projection 43 on the backboard 42.
Seeing also Fig. 7 is the vertical probe carb with reinforcing device 600 of the utility model the 6th embodiment, its different persons with the 5th embodiment are that a reinforcing device 90 that provides includes this backboard 42 and a projection 44, this projection 44 has at least one ditch 441, in order to strengthen the chimeric intensity of 70 in this projection 44 and this colloid, to allow this backboard 42 strengthen the effect that this colloid 70 limits these orifice plate 32 distortion by this projection 44, certainly set not influencing the cloth of described transmission line 50 in accommodation space 313, for reaching best restrained deformation effect, present embodiment provides this reinforcing device 90 also not limit the quantity of set projection 44 on the backboard 42.
In sum as can be known, vertical probe carb with reinforcing device provided by the utility model is the stress deformation amount that can limit this orifice plate 32, makes vertical probe carb and the electric connection between this test chip of carrying out test chip more stable than known technology.
Claims (11)
1, a kind of vertical probe carb with reinforcing device is characterized in that it includes:
One circuit board has an opening and a plurality of test contacts is laid in this around openings;
One holder comprises a pedestal and an orifice plate, and this pedestal is located at the opening of this circuit board, has a relative open end and an abutting end, has an accommodation space between this open end and the abutting end, and this orifice plate is located at this abutting end;
One reinforcing device is in conjunction with this holder;
Plurality of transmission lines, first end of described transmission line electrically connects the described test contacts of this circuit board respectively, and second end of this transmission line then extends and wears this accommodation space and this reinforcing device so that in the perforation of this orifice plate; And
A plurality of probes, described probe electrically connect with second end of described transmission line respectively.
2, according to the described vertical probe carb of claim 1, it is characterized in that this reinforcing device also comprises a stiffening ring with reinforcing device; This stiffening ring is incorporated into the open end of this circuit board and this pedestal.
3, according to the described vertical probe carb of claim 1, it is characterized in that, also comprise colloid, be located in this accommodation space and in conjunction with this orifice plate, this reinforcing device and described transmission line with reinforcing device.
According to the described vertical probe carb of claim 3, it is characterized in that 4, wherein, this colloid is located between this reinforcing device and this orifice plate with reinforcing device.
5, according to the described vertical probe carb of claim 4 with reinforcing device, it is characterized in that wherein, this reinforcing device comprises a backboard and at least one projection, this backboard is located at the open end of this pedestal, and this projection is located at this backboard and in this accommodation space in conjunction with this colloid.
According to the described vertical probe carb of claim 5, it is characterized in that 6, wherein, this projection has at least one ditch, this colloid and this at least one ditch tabling with reinforcing device.
According to the described vertical probe carb of claim 4, it is characterized in that 7, wherein, this reinforcing device is located in this accommodation space and is incorporated into a plane mutually with this colloid with reinforcing device.
According to the described vertical probe carb with reinforcing device of claim 3, it is characterized in that 8, wherein, a side of this reinforcing device combines with this colloid, opposite side combines with this orifice plate.
According to the described vertical probe carb of claim 1, it is characterized in that 9, wherein, this reinforcing device is incorporated between this orifice plate and this pedestal with reinforcing device.
10, according to claim 1 or 9 described vertical probe carbs with reinforcing device, it is characterized in that, wherein, this orifice plate has relative a upper surface and a lower surface, this upper surface is provided with this reinforcing device, and this lower surface is provided with second end that a plurality of metal couplings electrically connect described transmission line respectively.
According to the described vertical probe carb with reinforcing device of claim 9, it is characterized in that 11, wherein, colloid is located at this accommodation space, this reinforcing device one side combines with this colloid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200820175763XU CN201302583Y (en) | 2008-10-28 | 2008-10-28 | Vertical probe card provided with reinforcing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200820175763XU CN201302583Y (en) | 2008-10-28 | 2008-10-28 | Vertical probe card provided with reinforcing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201302583Y true CN201302583Y (en) | 2009-09-02 |
Family
ID=41086210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU200820175763XU Expired - Lifetime CN201302583Y (en) | 2008-10-28 | 2008-10-28 | Vertical probe card provided with reinforcing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201302583Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102156206A (en) * | 2010-12-03 | 2011-08-17 | 日月光半导体制造股份有限公司 | Detection pin and detection device using same |
| CN102478590A (en) * | 2010-11-22 | 2012-05-30 | 旺矽科技股份有限公司 | Direct probe-testing type probe testing device |
| CN103163445A (en) * | 2011-12-08 | 2013-06-19 | 旺矽科技股份有限公司 | Chip electrical property detection device and forming method thereof |
| CN104950148A (en) * | 2014-03-25 | 2015-09-30 | 旺矽科技股份有限公司 | Vertical probe device and support pillar used for same |
| CN105319400A (en) * | 2014-07-29 | 2016-02-10 | 中华大学 | Vertical probe card and technology method thereof |
| US9651578B2 (en) | 2011-04-21 | 2017-05-16 | Mpi Corporation | Assembly method of direct-docking probing device |
-
2008
- 2008-10-28 CN CNU200820175763XU patent/CN201302583Y/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102478590A (en) * | 2010-11-22 | 2012-05-30 | 旺矽科技股份有限公司 | Direct probe-testing type probe testing device |
| CN102478590B (en) * | 2010-11-22 | 2014-03-05 | 旺矽科技股份有限公司 | Direct probe-testing type probe testing device |
| CN102156206A (en) * | 2010-12-03 | 2011-08-17 | 日月光半导体制造股份有限公司 | Detection pin and detection device using same |
| CN102156206B (en) * | 2010-12-03 | 2013-10-09 | 日月光半导体制造股份有限公司 | Detection pin and detection device using same |
| US9651578B2 (en) | 2011-04-21 | 2017-05-16 | Mpi Corporation | Assembly method of direct-docking probing device |
| CN103163445A (en) * | 2011-12-08 | 2013-06-19 | 旺矽科技股份有限公司 | Chip electrical property detection device and forming method thereof |
| CN103163445B (en) * | 2011-12-08 | 2016-02-10 | 旺矽科技股份有限公司 | Chip electrical property detection device and forming method thereof |
| CN104950148A (en) * | 2014-03-25 | 2015-09-30 | 旺矽科技股份有限公司 | Vertical probe device and support pillar used for same |
| CN104950148B (en) * | 2014-03-25 | 2017-10-27 | 旺矽科技股份有限公司 | Vertical probe device and support pillar used for same |
| CN105319400A (en) * | 2014-07-29 | 2016-02-10 | 中华大学 | Vertical probe card and technology method thereof |
| CN105319400B (en) * | 2014-07-29 | 2018-03-23 | 中华大学 | Vertical probe carb and its process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20090902 |