CN201273814Y - On-line thickness measurement apparatus for aluminum film - Google Patents

On-line thickness measurement apparatus for aluminum film Download PDF

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Publication number
CN201273814Y
CN201273814Y CNU2008201505376U CN200820150537U CN201273814Y CN 201273814 Y CN201273814 Y CN 201273814Y CN U2008201505376 U CNU2008201505376 U CN U2008201505376U CN 200820150537 U CN200820150537 U CN 200820150537U CN 201273814 Y CN201273814 Y CN 201273814Y
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CN
China
Prior art keywords
data processing
processing module
thickness
computer data
aluminium film
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Expired - Fee Related
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CNU2008201505376U
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Chinese (zh)
Inventor
夏积祥
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SHANGHAI SHUGUANG MACHINERY WORKS CO Ltd
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SHANGHAI SHUGUANG MACHINERY WORKS CO Ltd
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Priority to CNU2008201505376U priority Critical patent/CN201273814Y/en
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Abstract

The utility model discloses an online aluminum membrane thickness measuring device, which comprises a detection sensor module, a computer data processing module and a data display module; the output end of the detection sensor module outputs electric signals to the input end of the computer data processing module; the output end of the computer data processing module outputs thickness data to the input end of the computer data processing module; and the detection sensor module comprises a plurality of groups of infrared transmitting heads and infrared receiving heads which are corresponding to each other. While the aluminum membrane is plated, the utility model can realize the online measurement of the thickness of the plating coat and the online display of the measured value of the thickness, thereby controlling the evaporation of the aluminum and satisfying the uniformity and thickness requirements for the membrane.

Description

Online aluminium film measuring thickness device
Technical field
The utility model relates to measurement mechanism, particularly a kind of online aluminium film measuring thickness device.
Background technology
Devices of coiled vacuum coating machine is plated the layer of aluminum film on transparent plastic film, physical thickness is between 200A °~500A °, also available indirect method is expressed thickness, promptly expresses thickness (also claiming square resistance) in the resistance value of every square centimeter of aluminium film surface, generally at 0.5 ~ 4 Ω/cm 2In the scope.
Concrete film plating process is in vacuum environment, rolling is arranged and unreel roller, and film is approximately with the speed of 300 meters/S, be wound up on the wind-up roll from let off roll, the heating evaporation source that a metallic aluminium is arranged below in the middle of two rollers, to film, crimping plating in limit has been plated until whole volume film like this with aluminium-vapour deposition.
The width of film is from 1 meter ~ 2 meters, for the homogeneity and the specific thickness of the coating that guarantees whole breadth, so need a thickness measurement online instrument that quantizes thickness.
The utility model content
For overcoming the deficiency of above-mentioned prior art, the technical problems to be solved in the utility model provides a kind of online aluminium film measuring thickness device, and this device can be in aluminizer, and the thickness of on-line measurement coating shows the measured value of thickness in real time.
The principle of work of the online aluminium film of the utility model measuring thickness device is:
Film thick-layer square resistance is at 0.5 ~ 4 Ω/cm 2Between the time, film has certain penetrability.Coating is thick, and penetrability is low, and square resistance is just little, and coating approaches the penetrability height, and square resistance is just big, and the light penetration of MEASUREMENTS OF THIN is known the thickness of coating.
The technical solution of the utility model is:
A kind of online aluminium film measuring thickness device comprises detecting sensor module, computer data processing module, data disaply moudle;
The output terminal of this detecting sensor module exports electric signal the input end of this computer data processing module to, and the output terminal of described computer data processing module exports thickness data to the input end of described data disaply moudle;
Described detecting sensor module comprises that infrared light emitting head and infrared light that many groups are corresponding in twos receive head.
Described computer data processing module links to each other by the RS232 serial port with described data disaply moudle.
Described every group of infrared light emitting head is relative with infrared light reception two, apart from 10mm.
Described infrared light receives a use frequency-selecting amplifier and the logical filter of band, converts light signal to electric signal output.
The CPU of described computer data processing module is AM89S52, also comprises A/D converter, ROM and RAM.
Described data disaply moudle is a HITECH PWS6600C-P LCD.
The histogrammic mode of described data disaply moudle is presented at the thickness data of a breadth on the screen.
Compared with prior art, the beneficial effects of the utility model are:
This novel online aluminium film measuring thickness device can be in takeup type coating machine aluminizer, and the thickness of on-line measurement coating shows the measured value of thickness in real time, thereby controls homogeneity and the thickness requirement that the aluminum evaporation amount reaches rete.
This novel online aluminium film measuring thickness device comprises that many group emitting and receiving heads form delegation, can measure whole breadth, and corresponding with delegation a plurality of evaporation sources.
For making this novel online aluminium film measuring thickness device have antijamming capability, not influenced by other light, so use infrared pulse light modulated emission principle, receiving end uses frequency-selecting amplifier and the logical filter of band, to reduce interference of stray light, obtains thickness signal.
Description of drawings
Fig. 1 is the structural representation of this novel online aluminium film measuring thickness device.
Embodiment
Below in conjunction with drawings and Examples embodiment of the present utility model is further described in detail, but should limit protection domain of the present utility model with this.
See also the structural representation of this novel online aluminium film measuring thickness device of Fig. 1.This novel online aluminium film measuring thickness device is made up of three parts:
(1) detecting sensor module: this part is installed in the vacuum chamber, and the output terminal of this detecting sensor module exports electric signal the input end of this computer data processing module to, thereby after converting light signal to the thickness electric signal, is sent to outside the vacuum chamber.
This detecting sensor module comprises that infrared light emitting head and infrared light that many groups are corresponding in twos receive head.Every group of infrared light emitting head is relative with infrared light reception two, the about 10mm of distance.
(2) computer data processing module: the thickness electrical signal conversion that spreads out of in the vacuum chamber is become digital quantity, with mathematical model in the computing machine degree data are handled then, obtain thickness data.
The output terminal of this computer data processing module exports thickness data to the input end of described data disaply moudle; Described computer data processing module links to each other by the RS232 serial port with described data disaply moudle.
The CPU of described computer data processing module is AM89S52, also comprises A/D converter, ROM, RAM and I/O mouth.
(3) data disaply moudle:
Obtain thickness data, change LCDs over to, use histogrammic mode, the thickness data of a breadth is presented on the screen through serial RS232 mouth.
Described data disaply moudle can adopt HITECH PWS6600C-P LCD.
The concrete method of work of this novel online aluminium film measuring thickness device is:
Online aluminium film measuring thickness device has an infrared light emitting head and an infrared light to receive head, and two is relative, the about 10mm of distance.Film passes through from the centre, and the infrared light of infrared light emitting head emission passes film, is received head by infrared light and receives.The variation in thickness of coating can cause the variation of light penetration, and infrared light receives the also variation thereupon of infrared light that head is received, receives head at last and converts light signal to electric signal output.
A pair of measuring head can only be measured a point, for whole breadth is measured,, can measure whole breadth so form delegation with many group emitting and receiving heads, and corresponding with delegation a plurality of evaporation sources.
For making online aluminium film measuring thickness device have antijamming capability, not influenced by other light, so use infrared pulse light modulated emission principle, receiving end uses frequency-selecting amplifier and the logical filter of band, to reduce interference of stray light, obtains thickness signal.
Owing between light transmission rate and the thickness vast scale non-linear phenomena is arranged, in the computer program of instrument, the thickness signal of gathering is carried out data processing for this reason, promptly tens road signals are carried out the thickness data that computing obtains revising with mathematical model of the computer, pass through the computing machine communication port again, on LCD, show the histogram of each road thickness.
The above is preferred embodiment of the present utility model only, is not to be used for limiting practical range of the present utility model.Be that all equivalences of doing according to the content of the utility model claim change and modification, all should be technology category of the present utility model.

Claims (6)

1, a kind of online aluminium film measuring thickness device is characterized in that comprising detecting sensor module, computer data processing module, data disaply moudle,
The output terminal of this detecting sensor module exports electric signal the input end of this computer data processing module to, and the output terminal of described computer data processing module exports thickness data to the input end of described data disaply moudle;
Described detecting sensor module comprises that infrared light emitting head and infrared light that many groups are corresponding in twos receive head.
2, online aluminium film measuring thickness device according to claim 1 is characterized in that described computer data processing module links to each other by the RS232 serial port with described data disaply moudle.
3, online aluminium film measuring thickness device according to claim 1, it is relative to it is characterized in that described every group of infrared light emitting head and infrared light receive two, apart from 10mm.
4,, it is characterized in that described infrared light receives a use frequency-selecting amplifier and the logical filter of band, converts light signal to electric signal output according to claim 1 or 4 described online aluminium film measuring thickness devices.
5, online aluminium film measuring thickness device according to claim 1, the CPU that it is characterized in that described computer data processing module is AM89S52, also comprises A/D converter, ROM and RAM.
6, online aluminium film measuring thickness device according to claim 1 is characterized in that described data disaply moudle is a HITECH PWS6600C-P LCD.
CNU2008201505376U 2008-07-04 2008-07-04 On-line thickness measurement apparatus for aluminum film Expired - Fee Related CN201273814Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2008201505376U CN201273814Y (en) 2008-07-04 2008-07-04 On-line thickness measurement apparatus for aluminum film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2008201505376U CN201273814Y (en) 2008-07-04 2008-07-04 On-line thickness measurement apparatus for aluminum film

Publications (1)

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CN201273814Y true CN201273814Y (en) 2009-07-15

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101839695A (en) * 2010-06-24 2010-09-22 哈尔滨工业大学 Method for measuring thickness of LED type solid infrared thin film
CN102650588A (en) * 2012-03-16 2012-08-29 京东方科技集团股份有限公司 Method and device for monitoring processing capacity of solution as well as etching system
CN102980521A (en) * 2012-10-25 2013-03-20 上海宏昊企业发展有限公司 Thick-thin dual-purpose plating thickness measurer
CN103673902A (en) * 2013-11-29 2014-03-26 天津麦世科尔科技咨询有限公司 Device capable of precisely adjusting position of infrared measuring head
CN103802442A (en) * 2012-11-14 2014-05-21 上海微创医疗器械(集团)有限公司 Film-laminating thickness control system, film laminating machine comprising same, and film-laminating thickness control method
CN105444683A (en) * 2014-08-26 2016-03-30 达观科技有限公司 Light-transmitting film detection system and detection method thereof
CN105783743A (en) * 2016-03-30 2016-07-20 南通大学 Sheet metal printing wet film thickness online detection system based on infrared reflection method
CN105895547A (en) * 2016-02-25 2016-08-24 深圳市众诚达应用材料科技有限公司 System for detection CdS film thickness online based on transmittance
CN108827164A (en) * 2018-04-18 2018-11-16 钱立文 Metallized film sheet resistance in-service monitoring device
CN109489569A (en) * 2018-11-13 2019-03-19 安徽松泰包装材料有限公司 CPP film production multiple quality detection system

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101839695A (en) * 2010-06-24 2010-09-22 哈尔滨工业大学 Method for measuring thickness of LED type solid infrared thin film
CN102650588A (en) * 2012-03-16 2012-08-29 京东方科技集团股份有限公司 Method and device for monitoring processing capacity of solution as well as etching system
CN102980521A (en) * 2012-10-25 2013-03-20 上海宏昊企业发展有限公司 Thick-thin dual-purpose plating thickness measurer
CN102980521B (en) * 2012-10-25 2015-04-22 上海宏昊企业发展有限公司 Thick-thin dual-purpose plating thickness measurer
CN103802442A (en) * 2012-11-14 2014-05-21 上海微创医疗器械(集团)有限公司 Film-laminating thickness control system, film laminating machine comprising same, and film-laminating thickness control method
CN103802442B (en) * 2012-11-14 2016-03-23 微创神通医疗科技(上海)有限公司 Overlay film thickness control system, the laminating machine comprising it and overlay film method for controlling thickness
CN103673902A (en) * 2013-11-29 2014-03-26 天津麦世科尔科技咨询有限公司 Device capable of precisely adjusting position of infrared measuring head
CN103673902B (en) * 2013-11-29 2016-08-31 天津麦世科尔科技咨询有限公司 One can chase after row fine setting location means to infrared gauge head
CN105444683B (en) * 2014-08-26 2018-07-03 达观科技有限公司 The detecting system and its detection method of light-transmissive film
CN105444683A (en) * 2014-08-26 2016-03-30 达观科技有限公司 Light-transmitting film detection system and detection method thereof
CN105895547A (en) * 2016-02-25 2016-08-24 深圳市众诚达应用材料科技有限公司 System for detection CdS film thickness online based on transmittance
CN105783743A (en) * 2016-03-30 2016-07-20 南通大学 Sheet metal printing wet film thickness online detection system based on infrared reflection method
CN108168445A (en) * 2016-03-30 2018-06-15 南通大学 Sheet metal print easy to use applies wet-film thickness on-line detecting system
CN108168446A (en) * 2016-03-30 2018-06-15 南通大学 Sheet metal print based on infrared reflection method applies wet-film thickness online test method
CN105783743B (en) * 2016-03-30 2018-03-02 南通大学 Sheet metal print based on infrared reflection method applies wet-film thickness on-line detecting system
CN108168446B (en) * 2016-03-30 2019-12-17 南通大学 Infrared reflection method based online detection method for thickness of metal sheet printing wet film
CN108168445B (en) * 2016-03-30 2019-12-17 南通大学 Convenient to use's metal sheet printing is scribbled wet film thickness on-line measuring system
CN108827164A (en) * 2018-04-18 2018-11-16 钱立文 Metallized film sheet resistance in-service monitoring device
CN109489569A (en) * 2018-11-13 2019-03-19 安徽松泰包装材料有限公司 CPP film production multiple quality detection system

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