CN201205488Y - Waste gas treatment device - Google Patents
Waste gas treatment device Download PDFInfo
- Publication number
- CN201205488Y CN201205488Y CNU2008201141651U CN200820114165U CN201205488Y CN 201205488 Y CN201205488 Y CN 201205488Y CN U2008201141651 U CNU2008201141651 U CN U2008201141651U CN 200820114165 U CN200820114165 U CN 200820114165U CN 201205488 Y CN201205488 Y CN 201205488Y
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- Prior art keywords
- high temperature
- temperature channel
- emission
- gas
- control equipment
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Abstract
The utility model discloses a waste gas treatment device, which comprises a furnace body. A high temperature channel defined by a heating component is arranged in the furnace body; the high temperature channel is filled with fragment filler; the furnace body comprises a gas inlet and a gas outlet; the waste gas enters the high temperature channel through the gas inlet, flows through the filler, and is discharged through the gas outlet; grids are arranged at the positions of the gas inlet and the gas outlet, and are used for limiting the filler and allowing the gas to flow through. The utility model can treat the waste gas generated in the production process of a plurality of types of semiconductors into harmless substances to be discharge with a low-cost, simple and reliable way; and the waste gas treatment efficiency is quite high.
Description
Technical field
The utility model relates to technical field of manufacturing semiconductors, the emission-control equipment in the particularly a kind of semiconductor manufacturing enterprise production process.
Background technology
In semiconductor fabrication, can produce a large amount of waste gas, for example, when utilizing chemical vapor deposition (CVD) process deposits polysilicon or silicon dioxide layer, will utilize a large amount of silane (SiH
4) gas or other silicon-containing gas, also need to use a large amount of silane gas during with the various non-crystalline silicons of plasma enhanced chemical vapor deposition (PECVD) process deposits, microcrystal silicon and Nano thin film, in addition, arts demands such as doping and ion injection are used borine (B
2H
6) and phosphine (PH
3) wait gas.Because silane can spontaneous combustion in air, borine and phosphine also are toxic gases, and therefore for the consideration of safety and environmental protection, these technical process finish a large amount of residue reacting gas in back and can not directly be discharged in the atmosphere.
Generally speaking, the residue reacting gas that contains silane in the depositing device must be handled through exhaust scrubber, in order to avoid atmosphere is polluted.Therefore, be indispensable pith with the supporting exhaust processor of depositing device.Gases such as silane must after filtration or change into can be by the material of safe disposal.Normally silane being burnt in the combustion chamber, generally is fuel, at this moment silane SiH with the natural gas
4Change into silica (SiO through reaction
2).But with the natural gas is fuel, if system breaks down suddenly, for example the air inlet of combustion chamber breaks down, residual SiH
4Will assemble in the combustion chamber, probably cause uncontrollable subsequently burning, the combustion chamber just might become explosive source.Wet cleaner and other treatment facility also have been applied to the processing of silicone hydride waste gas.United States Patent (USP) 6174349 provides a kind of moist washer in conjunction with combustion box.United States Patent (USP) 5955037 provides a kind of processing method of oxidation.United States Patent (USP) 5320817 uses a kind of slaine that generates the hydrogen aluminium compound to remove silane.The wet washing device of other type is based on wet chemical reaction, allows silane and such as the reaction of the spray of NaOH (NaOH), this method efficient height, and treating capacity is big, but process and equipment are very complicated, are out of order easily.Another technology of handling silane is to be applied in the exhaust-gas mixture that contains silane by so-called " dry-cure device " high-density plasma with low pressure, silane is decomposed and is deposited on above the very big multi-layered electrode of surface area, and electrode is changed termly and cleared up.Yet this method is because the existence of the synthetic of the continuous variation of gas pipeline pressure and mix waste gas often causes the disappearance of plasma.In addition, the treatment effeciency of 95%-99% can not reach safety and the environmental protection regulations and the requirement of the strictness of current government organs formulation.
Existing waste gas treatment equipment all exists cost and operating cost costliness to some extent, maintenance and maintenance require high, produce the liquid or solid pollutant, there is operational hazards, problems such as it is bigger perhaps to take up space, in addition, the performance of traditional waste gas treatment equipment depends on the type of gas in the mix waste gas to a great extent, each exhaust-gas mixture all needs a kind of specific chemical method to handle, can not dispose all waste gas simultaneously, not be suitable for needs low-cost and the production in enormous quantities semiconductor devices.
The utility model content
The purpose of this utility model is to provide a kind of emission-control equipment, can be to discharge behind the harmless material with the exhaust-gas treatment that produces in the multiple semiconductor production process in low-cost and simple and reliable mode, and have very high exhaust-gas treatment rate.
For achieving the above object, the utility model provides a kind of emission-control equipment, described device comprises body of heater, have the high temperature channel that defines by heater block in described body of heater inside, fill the fragment filler in the described high temperature channel, comprise air inlet and gas outlet on the described body of heater, waste gas enters high temperature channel from air inlet, discharged by the gas outlet after flowing through described filler, described air inlet and place, gas outlet have barrier, are used to limit described filler and allow gas to flow through.
Preferably, described filler is a garrulous bricks and stones, cobblestone, a kind of or combination in tile, cullet, the broken potsherd.
Preferably, described heater block comprises metal tube and the outer resistance wire that twines of metal tube.
Preferably, described metal tube is steel pipe, iron pipe or aluminum pipe.
Preferably, the temperature in the high temperature channel of described heater block definition remains on 500 ℃～700 ℃.
Preferably, described high temperature channel length is greater than 0.5 meter, and diameter is greater than 10 centimetres.
Preferably, described high temperature channel is a truncated cone-shaped.
Preferably, have the fixing dividing plate of at least one end in the described high temperature channel, be used for described high temperature channel is divided into the long and narrow gas passage of wriggling.
Preferably, when described dividing plate was odd number, described air inlet and gas outlet were positioned at the same side of described body of heater; When described dividing plate was even number, described air inlet and gas outlet laid respectively at the both sides of described body of heater.
Preferably, have the fixing dividing plate at least one two ends in the described high temperature channel, be used for described high temperature channel is divided into independently plurality of layers.
Compared with prior art, the utlity model has following advantage:
Emission-control equipment of the present utility model is provided with high temperature channel between waste gas inlet and exhaust outlet, fill fillers such as garrulous bricks and stones, tile, cullet, broken potsherd in high temperature channel, and the temperature in the high temperature channel remains on about 500 ℃～700 ℃.Silicone hydride waste gas enters high temperature channel from air inlet and flows through and discharge from exhaust outlet behind the hole between garrulous bricks and stones, tile, cullet or the broken potsherd of filler again.Waste gas is deposited on filler (garrulous bricks and stones, tile, cullet, broken potsherd) by hot activation in high temperature channel surface forms the solid silicon film, and gaseous by-product such as hydrogen are discharged by exhaust outlet.Because the surface area of fillers such as garrulous bricks and stones, tile, cullet, broken potsherd is very big, gas is heat deposition fully.By sufficiently long high temperature channel is set, wherein fill abundant fragment filler, the waste exhaust gases molecule is decomposed fully, a small amount of alloy that mixes in the waste gas such as phosphine (PH
3) and borine (B
2H
6) in this process also by pyrolytic.The filler residue that has deposited the solid silicon film is an innocuous substance, can handle as conventional solid waste, can continue to handle waste gas behind the filler that more renews after a period of time.Emission-control equipment of the present utility model can be handled multiple waste gas simultaneously, and handling rate is high.Emission-control equipment of the present utility model simple in structure, heating source adopts electrical heating, safe and reliable easy operating, operating cost and maintenance cost are all lower, are very suitable for the exhaust-gas treatment in the semiconductor enterprise batch production process.
Description of drawings
By the more specifically explanation of the preferred embodiment of the present utility model shown in the accompanying drawing, above-mentioned and other purpose, feature and advantage of the present utility model will be more clear.Reference numeral identical in whole accompanying drawings is indicated identical part.Painstakingly do not draw accompanying drawing in proportion, focus on illustrating purport of the present utility model.In the accompanying drawings, for clarity sake, amplified the thickness of layer.
Fig. 1 is the emission-control equipment structural representation according to the utility model first embodiment;
Fig. 2 is the emission-control equipment structural representation according to the utility model second embodiment;
Fig. 3 a is the emission-control equipment structural representation according to the utility model the 3rd embodiment;
Fig. 3 b is the emission-control equipment structural representation according to the utility model the 4th embodiment;
Fig. 4 is the emission-control equipment structural representation according to the utility model the 5th embodiment.
The specific embodiment
For above-mentioned purpose of the present utility model, feature and advantage can be become apparent more, the specific embodiment of the present utility model is described in detail below in conjunction with accompanying drawing.A lot of details have been set forth in the following description so that fully understand the utility model.But the utility model can be implemented much to be different from alternate manner described here, and those skilled in the art can do similar popularization under the situation of the utility model intension.Therefore the utility model is not subjected to the restriction of following public concrete enforcement.
Fig. 1 is the emission-control equipment structural representation according to the utility model first embodiment.Described diagrammatic sketch is an example, and it can not limit protection domain of the present utility model at this.As shown in Figure 1, comprise body of heater 101 according to the emission-control equipment of the utility model first embodiment, as preferred embodiment, the inwall of body of heater 101 is provided with thermal insulation layer 107, and the material of thermal insulation layer 107 can adopt exotic material, for example asbestos shingle etc.Thermal insulation layer 107 surrounds heater block 103, the heater block 103 preferred employing electrical heating of present embodiment, and heater block 103 comprises metal tube (for example steel pipe, iron pipe or aluminum pipe etc.) and the outer resistance wire that twines of metal tube.High temperature channel 105, the i.e. zone that surrounded of heater block 103, the just inner space of metal tube.The length of high temperature channel 105 and diameter be flexible design as required, and for example length is greater than 0.5 meter, and diameter is greater than 10 centimetres.The filler of filling in high temperature channel 105 is a garrulous bricks and stones, cobblestone for example, a kind of or combination in tile, cullet, the broken potsherd.The size dimension of filler need not identical, as long as can form the integral body that there is appropriate hole a centre, like this, gas can flow out filler as passing a labyrinth after entering filler.High temperature channel 105 just is equivalent to a gas passage, and different is that gas is added thermal decomposition by high temperature in this passage.One side of body of heater 101 has waste gas inlet 113, and opposite side has gas outlet 115, and waste gas inlet 113 and gas outlet 115 communicate with high temperature channel 105.113 places have barrier 109 at waste gas inlet, and 115 places have barrier 111 in the gas outlet, spill and guarantee that to prevent filler gas can flow through.Silicone hydride waste gas is transfused to air inlet 113 through pipeline and enters high temperature channel 105, the hole between the garrulous bricks and stones of the filler of flowing through, tile, cullet or the broken potsherd, and the pure qi (oxygen) after the resolution process is discharged from exhaust outlet 115.Preferably, the chimney (not shown) is installed, to increase the flowing velocity of gas along direction shown in the arrow at exhaust outlet 115.Filler in the high temperature channel 105 is heated and makes temperature remain on 500 ℃～700 ℃, waste gas is deposited on filler (garrulous bricks and stones, tile, cullet, broken potsherd) by hot activation in high temperature channel 105 surface forms the solid silicon film, and gaseous by-product such as hydrogen are discharged by exhaust outlet 115.Because the surface area of fillers such as garrulous bricks and stones, tile, cullet, broken potsherd is very big, the waste exhaust gases molecule is heat deposition fully.
Fig. 2 is the emission-control equipment structural representation according to the utility model second embodiment.Described diagrammatic sketch is an example, and it can not limit protection domain of the present utility model at this.As shown in Figure 2, comprise body of heater 201 according to the emission-control equipment of the utility model second embodiment, as preferred embodiment, body of heater 201 is a cylindrical shape, the inwall of body of heater 201 is provided with thermal insulation layer 207, and the material of thermal insulation layer 207 can adopt exotic material, for example asbestos shingle.Thermal insulation layer 207 surrounds heater block 203, and the structure of heater block 203 is the outer resistance wire that twines of metal tube (for example steel pipe, iron pipe or aluminum pipe etc.), and heater block 203 adopts electrical heating.The zone that heater block 203 is surrounded is a high temperature channel 205, just the inner space of metal tube.In the present embodiment, high temperature channel 205 is designed to the thick right thin truncated cone-shaped in a left side, and promptly the metal tube of heater block 203 adopts tubaeform metal tube.Identical among the filler of filling in the high temperature channel 205 and aforementioned first embodiment.One side of body of heater 201 has waste gas inlet 213, and opposite side has gas outlet 215, and waste gas inlet 213 and high temperature channel 205 thick ends link to each other, and gas outlet 215 and high temperature channel 205 thin ends communicate.213 places have barrier 209 at waste gas inlet, and 215 places have barrier 211 in the gas outlet, spill and guarantee that to prevent filler gas can flow through.Silicone hydride waste gas is admitted to air inlet 213 through pipeline and enters high temperature channel 205, and after the hole between the garrulous bricks and stones of the filler of flowing through, tile, cullet or the broken potsherd was decomposed and handles, pure qi (oxygen) was discharged from exhaust outlet 215.Preferably, exhaust outlet 215 places are equipped with the chimney (not shown).Filler in the high temperature channel 205 is heated and makes temperature remain on 500 ℃～700 ℃, and waste gas is deposited on filler by hot activation in high temperature channel 205 surface forms the solid silicon film, and gaseous by-product such as hydrogen are discharged by exhaust outlet 215.In the present embodiment, different with previous embodiment, high temperature channel 205 is designed to truncated cone-shaped, because the waste gas streamwise at first decomposes deposition in the filler near air inlet 213, undecomposed waste gas moves to gas outlet 215 directions and decomposes deposition again, near the decomposition reaction carried out in will be more than near the filler gas outlet of the decomposition reaction that certainly will air inlet 213, carry out in the filler so, therefore, the high temperature channel 205 of truncated cone-shaped promptly can be saved the consumption of filler, the reasonable exhaust-gas treatment effect that still can reach again.
Fig. 3 a is the emission-control equipment structural representation according to the utility model the 3rd embodiment.Described diagrammatic sketch is an example, and it can not limit protection domain of the present utility model at this.Shown in Fig. 3 a, comprise body of heater 301 according to the emission-control equipment of the utility model the 3rd embodiment, the inwall of body of heater 301 is provided with thermal insulation layer 307, and thermal insulation layer 307 surrounds heater block 303.The structure of heater block 303 is the outer resistance wire that twines of metal tube (for example steel pipe, iron pipe or aluminum pipe etc.), adopts electrical heating.The zone that heater block 303 is surrounded is a high temperature channel 305, just the inner space of metal tube.Identical among the filler of filling in the high temperature channel 305 and aforementioned first embodiment, the temperature of filler remains on 500 ℃～700 ℃.In the present embodiment, high temperature channel 305 utilizes the fixing dividing plate 317 and 319 of an end to be separated into the long and narrow path that wriggles, waste gas enters high temperature channel 305 backs along the long and narrow path flow shown in the direction of arrow from air inlet 313, the gas flow path is longer, almost is three times of previous embodiment.Therefore present embodiment can carry out resolution process to waste gas more fully.313 places have barrier 309 at waste gas inlet, and 315 places, pure qi (oxygen) gas outlet have barrier 311, spill and guarantee that to prevent filler gas can flow through.Preferably, exhaust outlet 315 places are equipped with the chimney (not shown).Also can increase the quantity of dividing plate as required in other embodiments so that the flow path of waste gas is longer.
Fig. 3 b is the emission-control equipment structural representation according to the utility model the 4th embodiment.Described diagrammatic sketch is an example, and it can not limit protection domain of the present utility model at this.Shown in Fig. 3 b, compare with the embodiment shown in Fig. 3 a, different is, in the present embodiment, dividing plate only is one 317, and gas flows along the direction of arrow, flow path has extended equally, and air inlet 313 and gas outlet 315 can be positioned at the same side of body of heater, has increased to install and the flexibility of debugging.
In the same way, when described dividing plate was odd number, air inlet and gas outlet can be positioned at the same side of body of heater; When described dividing plate was even number, air inlet and gas outlet laid respectively at the both sides of body of heater.
Fig. 4 is the emission-control equipment structural representation according to the utility model the 5th embodiment.Described diagrammatic sketch is an example, and it can not limit protection domain of the present utility model at this.As shown in Figure 4, comprise body of heater 401 according to the emission-control equipment of the utility model the 5th embodiment, the inwall of body of heater 401 is provided with thermal insulation layer 407, and thermal insulation layer 407 surrounds heater block 403.The structure of heater block 403 is the outer resistance wire that twines of metal tube (for example steel pipe, iron pipe or aluminum pipe etc.), adopts electrical heating.The zone that heater block 403 is surrounded is a high temperature channel 405, just the inner space of metal tube.Identical among the filler of filling in the high temperature channel 405 and aforementioned first embodiment, the temperature of filler remains on 500 ℃～700 ℃.In the present embodiment, utilize the fixing dividing plate 417 and 419 in two ends that high temperature channel 405 is separated into three layers.Every layer is an independently high temperature channel, all fills the filler identical with first embodiment in every layer, and every layer all has waste gas inlet 413 and gas outlet 415.413 places have barrier 309 at waste gas inlet, and 415 places, pure qi (oxygen) gas outlet have barrier 311, spill and guarantee that to prevent filler gas can flow through.Preferably, exhaust outlet 415 places are equipped with the chimney (not shown).In the present embodiment, different layer conducts independently high temperature channel can be handled respectively waste gas or different types of waste gas of separate sources, increased the flexibility and the treatment effeciency of exhaust-gas treatment.
In waste gas is flowed through the process of high temperature channel, a small amount of alloy that mixes in the waste gas such as phosphine (PH
3) and borine (B
2H
6) also by pyrolytic.The filler residue that has deposited the solid silicon film is an innocuous substance, can handle as conventional solid waste, and after a period of time, the filler that more renews in the high temperature channel can continue waste gas is handled.Because it is nontoxic that silicide is stablized, and do not produce other solid or liquid wastes in this process, so the processing of used filler does not need special anti-pollution program.Required unique raw material is exactly suitable filler and electric energy, in addition without any need for auxiliary equipment.Therefore emission-control equipment of the present utility model has advantages such as function is many, compact conformation, efficient height, cost is low, maintenance is easy.Exhaust-gas treatment treating apparatus of the present utility model can also be handled other silicon-containing gas, for example Si
2H
6, SiF
4, SiH
3Cl and SiH
2Cl
2Deng.In addition, for example all kinds of hydride of other gas and organic gas etc. also can utilize exhaust-gas treatment treating apparatus of the present utility model to handle.
The above only is preferred embodiment of the present utility model, is not the utility model is done any pro forma restriction.Though the utility model discloses as above with preferred embodiment, yet be not in order to limit the utility model.Any those of ordinary skill in the art, do not breaking away under the technical solutions of the utility model scope situation, all can utilize the method and the technology contents of above-mentioned announcement that technical solutions of the utility model are made many possible changes and modification, or be revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not break away from technical solutions of the utility model, all still belongs in the protection domain of technical solutions of the utility model any simple modification, equivalent variations and modification that above embodiment did according to technical spirit of the present utility model.
Claims (10)
1, a kind of emission-control equipment, described device comprises body of heater, has the high temperature channel that defines by heater block in described body of heater inside, fill the fragment filler in the described high temperature channel, comprise air inlet and gas outlet on the described body of heater, waste gas enters high temperature channel from air inlet, is discharged by the gas outlet after flowing through described filler, described air inlet and place, gas outlet have barrier, are used to limit described filler and allow gas to flow through.
2, emission-control equipment as claimed in claim 1 is characterized in that: described filler is a garrulous bricks and stones, cobblestone, a kind of or combination in tile, cullet, the broken potsherd.
3, emission-control equipment as claimed in claim 1 is characterized in that: described heater block comprises metal tube and the outer resistance wire that twines of metal tube.
4, emission-control equipment as claimed in claim 3 is characterized in that: described metal tube is steel pipe, iron pipe or aluminum pipe.
5, as claim 1 or 3 described emission-control equipments, it is characterized in that: the temperature in the high temperature channel of described heater block definition remains on 500 ℃～700 ℃.
6, emission-control equipment as claimed in claim 5 is characterized in that: described high temperature channel length is greater than 0.5 meter, and diameter is greater than 10 centimetres.
7, emission-control equipment as claimed in claim 1 is characterized in that: described high temperature channel is a truncated cone-shaped.
8, emission-control equipment as claimed in claim 1 is characterized in that: have the fixing dividing plate of at least one end in the described high temperature channel, be used for described high temperature channel is divided into the long and narrow gas passage of wriggling.
9, emission-control equipment as claimed in claim 8 is characterized in that: when described dividing plate was odd number, described air inlet and gas outlet were positioned at the same side of described body of heater; When described dividing plate was even number, described air inlet and gas outlet laid respectively at the both sides of described body of heater.
10, emission-control equipment as claimed in claim 1 is characterized in that: have the fixing dividing plate at least one two ends in the described high temperature channel, be used for described high temperature channel is divided into independently plurality of layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201141651U CN201205488Y (en) | 2008-05-26 | 2008-05-26 | Waste gas treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201141651U CN201205488Y (en) | 2008-05-26 | 2008-05-26 | Waste gas treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201205488Y true CN201205488Y (en) | 2009-03-11 |
Family
ID=40464557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201141651U Expired - Fee Related CN201205488Y (en) | 2008-05-26 | 2008-05-26 | Waste gas treatment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201205488Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114908336A (en) * | 2022-01-26 | 2022-08-16 | 贵州理工学院 | Preparation method of tubular PECVD enhanced vapor deposition microcrystalline silicon |
-
2008
- 2008-05-26 CN CNU2008201141651U patent/CN201205488Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114908336A (en) * | 2022-01-26 | 2022-08-16 | 贵州理工学院 | Preparation method of tubular PECVD enhanced vapor deposition microcrystalline silicon |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Apollo Precision (Fujian) Limited Assignor: Fujian Golden Sun Solar Technic Co., Ltd. Contract fulfillment period: 2009.6.1 to 2017.5.31 Contract record no.: 2009350000199 Denomination of utility model: Treating apparatus for exhaust gas of oil smoke Granted publication date: 20090311 License type: General permission Record date: 20090826 |
|
| LIC | Patent licence contract for exploitation submitted for record |
Free format text: COMMON LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2009.6.1 TO 2017.5.31; CHANGE OF CONTRACT Name of requester: FUJIAN APOLLO PRECISION EQUIPMENT CO., LTD. Effective date: 20090826 |
|
| ASS | Succession or assignment of patent right |
Owner name: BEIJING JINGCHENG APOLLO OPTOELECTRONIC EQUIPMENT |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20110823 Address after: 362000 Jiangnan hi tech Zone, South Ring Road, Licheng District, Fujian, Quanzhou Co-patentee after: Beijing Jingcheng Boyang Optoelectronic Equipment Co.,Ltd. Patentee after: Fujian Golden Sun Solar Technic Co., Ltd. Address before: 362000 Jiangnan hi tech Zone, South Ring Road, Licheng District, Fujian, Quanzhou Patentee before: Fujian Golden Sun Solar Technic Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090311 Termination date: 20160526 |