CN1477989A - Exhaust gas treatment device - Google Patents
Exhaust gas treatment device Download PDFInfo
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- CN1477989A CN1477989A CNA018199186A CN01819918A CN1477989A CN 1477989 A CN1477989 A CN 1477989A CN A018199186 A CNA018199186 A CN A018199186A CN 01819918 A CN01819918 A CN 01819918A CN 1477989 A CN1477989 A CN 1477989A
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- guide cylinder
- cooling fluid
- burnt gas
- coolant
- inner peripheral
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/12—Washers with plural different washing sections
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
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- Environmental & Geological Engineering (AREA)
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- Oil, Petroleum & Natural Gas (AREA)
- Treating Waste Gases (AREA)
- Incineration Of Waste (AREA)
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Abstract
An exhaust gas treatment device comprises a guide tube (21) connected to an exhaust gas discharge source and a coolant supply temporary storage part (22) provided for temporarily storing the coolant, in which the exhaust gas inlet (21a) of the guide tube (21) is opened upward, and the coolant outlet (22a) of the temporary storage part (22) is disposed so as to surround the inlet (21a) of the guide tube (21), whereby the coolant flowing out from the coolant outlet (22a) is allowed to flow down from all around the periphery (21a') of the inlet (21a) of the guide tube (21) along the inner peripheral surfaces (21c', 21d') thereof, and a coolant film covering the inner peripheral surfaces (21c', 21d') of the guide tube (21) is formed by the coolant flowing down along the inner peripheral surfaces (21c', 21d') of the guide tube (21).
Description
Technical field
The present invention relates to be suitable for the treatment of waste gas device that the burnt gas to the high temperature that contains dust and corrosive gas cools off, cleans, for example be suitable for handling handle the burnt gas that gas generated such as silane of discharging when being used for CVD (Chemical Vapor Deposition) operation that semiconductor makes by burning.
Background technology
In the film formation process of the CVD operation that is used for the semiconductor manufacturing, discharge and contain silane (SiH
4), disilane (Si
2H
6), chlorosilane (SiH
2Cl
2), diborane (B
2H
6), hydrogen phosphide (PH
3) wait the waste gas of compound metal hydroxide.In addition, in the cleaning process of the reacting furnace of this CVD operation, discharge and contain CF
4,, C
2F
6, C
3F
8Deng fluorocarbons, ClF
3Deng chlorine fluoride, NF
3Deng the waste gas of fluorine compounds such as nitrogen fluoride.Therefore, in the CVD operation, the waste gas that contains compound metal hydroxide is discharged with certain hour at interval with the waste gas that contains fluorine compounds.Because these CVD waste gas have harmfulness, so carry out exhaust after innoxious by its combustion decomposition is become.
Utilize the burnt gas that burning generated of this waste gas to be very high temperature, contain the silica (SiO that when the combustion decomposition of compound metal hydroxide, is generated
2) sour gas of the micro mist shape metal oxide that waits and the hydrogen fluoride that when the combustion decomposition of fluorine compounds, generated etc.For the high-temp combustion waste gas row that prevents to contain such metal oxide and sour gas in atmosphere, can utilize air that this burnt gas is diluted cooling and utilize and clean tower and bag filter etc. and carry out the purified treatment that alkali cleaning reaches absorption etc. only.
In addition, can consider to utilize the spraying of cooling fluid that this burnt gas is cooled off.In addition, proposition has following scheme: utilize the interior pipe of bimetallic tube that burnt gas is guided to tank for coolant from the combustion chamber, the outer tube that supplies to this bimetallic tube and the detergent remover between the interior pipe are flowed out from many openings of establishing on inner pipe, by along full week internally the wall of pipe clean and burnt gas handled (the Japan Patent spy opens clear 63-62528 number).
But necessary a large amount of air increases so handle air quantity owing to will dilute the burnt gas of cooling down high-temperature.Especially, the waste gas of fluorochemical, all highly stable on the performance of chemistry and heat, combustion decomposition is needed very high temperature, thus preferably be heated to more than 1200 ℃, even need be heated to about 1500 ℃.Therefore, it is very high that the burnt gas temperature becomes, utilize air dilution to be cooled to wash below 100 ℃, with regard to the very a large amount of air of needs.So, exist the maximization of cleaning treatment facilities such as tower and the problem that equipment cost is increased.In addition, because the metal oxide and the sour gas that utilize adsorption treatment and alkali cleaning should remove only are also diluted, so also make adsorption efficiency and clean the efficient reduction.
Cool off this burnt gas by the spraying that utilizes cooling fluid, and can reduce such diluent air.But, since when the air of dilution more after a little while, the concentration of the silica in the burnt gas etc. is just high, so the solid content of this silica etc. is just piled up in the cooling fluid condensation after this is sprayed and on attached to the wall of cooling chamber the time.So, owing to hinder flowing of burnt gas, thus the interior pressure in the waste gas burning chamber of upstream increase, produce that efficiency of combustion reduces and obstruction waste gas to the problem of combustion chamber importing etc.In addition, the cooling fluid condensation after this spraying and on attached to the wall of cooling chamber the time, because hydrogen fluoride and fluorine gas that this condensed cooling fluid is produced when containing fluorine compounds in decomposition CVD waste gas, so become the strong fluoric acid water of corrosivity.Therefore, if when the general corrosion resistant metals such as wall employing stainless steel of this cooling chamber are made, exist the problem of acutely being corroded, in order to tackle the corrosion that such fluoric acid water causes, material as the wall of this cooling chamber, as when adopting the corrosion resistant material of high price of Monel metal or inconel etc., then material cost increases.
In addition, make the outer tube that supplies to bimetallic tube and the detergent remover between the interior pipe from the structure that many openings of establishing on inner pipe flow out because detergent remover can not flow out between this opening, so will be with the wall of interior pipe full week clean fully be difficult.Therefore, exist the problem of piling up solid content or generation corrosion on the wall top of interior pipe.
The summary of invention
The objective of the invention is to, the treating apparatus of the burnt gas that can address the above problem is provided.
The treating apparatus of burnt gas of the present invention, it is characterized in that, have: the temporary transient storing section that is connected discharge the source guide cylinder of locating and the cooling fluid of being supplied with of burnt gas, the inlet upward opening of the burnt gas in this guide cylinder, the cooling liquid outlet of this temporary transient storing section is configured on the position of the inlet that surrounds guide cylinder, so that the cooling fluid that flows out from the cooling liquid outlet of this temporary transient storing section can flow down along inner peripheral surface from the full periphery of the inlet this guide cylinder, utilization can form the cooling liquid film that covers this guide cylinder inner peripheral surface along the cooling fluid that this guide cylinder inner peripheral surface flows down.
Adopt structure of the present invention, can utilize the cooling fluid that flows down along this guide cylinder inner peripheral surface and the burnt gas by guide cylinder is cooled off, cleans.In addition, owing to utilize the formed cooling liquid film of this cooling fluid to cover the inner peripheral surface of guide cylinder, so can stop the contacting of inner peripheral surface of its burnt gas and guide cylinder.And, the inlet upward opening of this guide cylinder, the cooling fluid that flows out from the cooling liquid outlet of the temporary transient storing section that surrounds this inlet be owing to flow down along inner peripheral surface from the full periphery of inlet of this guide cylinder, so can utilize this cooling liquid film along broad scope have omit the inner peripheral surface of covering guide cylinder.Therefore, on the inner peripheral surface of this guide cylinder, can prevent to adhere to, pile up solid content contained in the burnt gas reliably or produce corrosion.
In addition, preferably this temporary transient storing section is made of the ring-type stream, and the periphery utilization of the cooling liquid outlet of this temporary transient storing section constitutes along the periphery of the inlet of the guide cylinder of this ring-type stream.
Thus, cooling fluid is overflowed from this ring-type stream, the inner peripheral surface along guide cylinder flows down by the periphery of the inlet of guide cylinder from cooling liquid outlet owing to this cooling fluid, forms the cooling liquid film that covers this inner peripheral surface reliably so can utilize simple structure.
Preferably, for this cooling fluid one side is flowed down around the inner peripheral surface of the axle rotation one edge guide cylinder of above-below direction, to make the structure of the side face of the revolving body in axle center along the vertical direction by this inner peripheral surface that cools off the guide cylinder that liquid film covers, and in this ring-type stream, make cooling fluid rotatably cooling fluid be supplied to temporary transient storing section.
Thus, the cooling fluid along this guide cylinder inner peripheral surface flows down just has the circumferential speed at the inner peripheral surface of this guide cylinder, thus can make flow velocity greater than the occasion under the spontaneous current, thus can prevent from this inner peripheral surface, to adhere to, pile up solid content more reliably.
In addition, preferably, in the centre bore of the annular wall of the bottom that constitutes this ring-type stream, can transfer to ground to insert this guide cylinder from the top, the outer peripheral face of the perisporium of this guide cylinder has the taper seat that diminishes towards the below diameter, the perisporium of this guide cylinder is by the interior Zhou Zhicheng of described annular wall.
Thus, owing to can install and remove guide cylinder simply, so can make easy to maintenance.
In addition, preferably, utilize the inner peripheral surface of this temporary transient storing section to constitute the outer peripheral face of guide cylinder, form the gap between the periphery of interior week of the annular wall of the diapire that constitutes this temporary transient storing section and guide cylinder, the cooling fluid in the temporary transient storing section of this gap outflow can flow down along the outer peripheral face of guide cylinder.
Thus, do not utilize cooling fluid that the outer peripheral face of this guide cylinder is cooled off with not making structure complicated, can improve the cooling effectiveness of burnt gas.
In addition, preferably, the inner peripheral surface of the guide cylinder that is covered by this cooling liquid film has along with downwards and the taper seat that diameter diminishes.
Thus, can utilize cooling liquid film and interruptedly the zone along this taper seat not being covered reliably.
In addition, preferably, the outlet of the burnt gas in this guide cylinder is under shed, and be provided with the tank for coolant that is connected with the outlet side of this guide cylinder, cooling fluid is stored in this tank for coolant, above the liquid level that stores the cooling fluid in this tank for coolant, leave the outlet of compartment of terrain configuration guide cylinder, and this is configured to this liquid level at interval by the past state that presses down of the pressure of the burnt gas of discharging from the outlet of guide cylinder.
Thus, can make the burnt gas of discharging from the outlet of guide cylinder reliably with store cooling fluid tank for coolant and contact and improve cooling effectiveness.And, owing between the outlet of the liquid level that stores the cooling fluid in this tank for coolant and guide cylinder, have the gap, so can not hinder mobile from the burnt gas of the outlet discharge of guide cylinder because of cooling fluid.Therefore, can not be increased in the interior pressure in the waste gas burning chamber of upstream of guide cylinder, can prevent that efficiency of combustion from reducing and hinder the phenomenon that waste gas imports to the combustion chamber.This gap preferably makes about 5mm～10mm.
In addition, preferably, this guide cylinder has downward opening, be provided with the tank for coolant that is connected with the outlet side of this guide cylinder, cooling fluid is stored in this tank for coolant, and the downward opening of this guide cylinder is submerged in the cooling fluid that stores in tank for coolant, on the perisporium of this guide cylinder, be formed with above the liquid level that stores the cooling fluid in this tank for coolant along the breach under shed of guide cylinder, utilize this breach to constitute the outlet of the burnt gas of guide cylinder.
Thus, by the burnt gas of this guide cylinder, contacting after changing flow direction, from by flowing out the outlet that breach constituted on the perisporium that is formed at guide cylinder with the liquid level that stores the cooling fluid in this tank for coolant.At this moment, owing to utilize the perisporium of guide cylinder to prolong the holdup time of burnt gas in guide cylinder, store cooling fluid in this tank for coolant for the cooling effectiveness of burnt gas so can improve utilization.
The simple declaration of accompanying drawing
Fig. 1 is the structure key diagram of the exhaust treatment system of the 1st example of the present invention.
Fig. 2 is the structure key diagram of the emission-control equipment of the 1st example of the present invention.
Fig. 3 is the part vertical view cutaway drawing of the emission-control equipment of the 1st example of the present invention.
Fig. 4 is the phantom of variation of the emission-control equipment of the 1st example of the present invention.
Fig. 5 is the structure key diagram of the emission-control equipment of the 2nd example of the present invention.
Fig. 6 is the structure key diagram of the exhaust treatment system of the 3rd example of the present invention.
The optimal morphology that carries out an invention
The exhaust treatment system 1 of the 1st example shown in Figure 1, the after-treatment device 4 of the treating apparatus 3 of the burnt gas of have the burner 2 of waste gas, discharging from this burner 2, the burnt gas of discharging from the treating apparatus 3 of this burnt gas.
The burner 2 of this waste gas uses in order to handle waste gas that for example contains compound metal hydroxide and the waste gas that contains fluorine compounds, has: fire-resistant combustion chamber 12; The fuel gas that will import from the fuel gas of fuel gas source in this combustion chamber 12 imports with pipe arrangement 13; The waste gas that will import from the waste gas that the CVD reacting furnace is discharged in this combustion chamber 12 imports with pipe arrangement 14; The combustion-supporting property gas that combustion-supporting property gas is imported in this combustion chamber 12 imports with pipe arrangement 15; Auxiliary combustion nozzle 16.As this fuel gas, for example can use liquefied petroleum gas (LPG), liquefied natural gas (LNG), hydrogen or their gaseous mixture etc.As this combustion-supporting property gas, for example can use air, in air, add oxygen-enriched air behind the oxygen etc. as required.Owing to utilize this auxiliary combustion nozzle 16 in combustion chamber 12, to form flame, the fuel gas and the waste gas that import in this combustion chamber 12 are burnt.By the burning of this waste gas, 12 lower openings is discharged burnt gas from the combustion chamber.
The cooling fluid that the treating apparatus 3 of this burnt gas has by discharge duct 18 guide cylinder 21 that is connected with burner 2 as the discharge source of burnt gas, tank for coolant 32, is connected with this tank for coolant 32 by pump P is with temporary transient storing section 22, utilizes this pump P will temporarily be stored by the cooling fluid of tank for coolant 32 supplies in temporary transient storing section 22.As this cooling fluid, for example can use alkaline detergent remover that water and acid waste gas are neutralized etc.
The upper end of this discharge duct 18 is connected with burner 2, so that from the burnt gas guiding below that the lower openings of described combustion chamber 12 is discharged, the refractory material 19 of pottery etc. is arranged building in interior week of this discharge duct 18.
As shown in Figure 2, be provided with the periphery wall 23 that extends from the lower ends downward side of this discharge duct 18, the annular wall 24 of extending from inside side, the lower end of this periphery wall 23.The interior periphery of this periphery wall 23 and annular wall 24 is overlooked and is seen the structure that is made to along circular.In the centre bore of this annular wall 24 can from above be inserted with guide cylinder 21 with extracting.Thus, owing to can install and remove guide cylinder 21 simply, can realize the facilitation of maintenance.
This guide cylinder 21 has the hollow revolution shape in above-below direction axle center, have the inlet 21a of the burnt gas of upward opening, to the outlet 21b of the burnt gas of under shed, inner and outer circumferential surfaces 21c ', the 21c of this top perisporium 21c " along becoming the taper seat that diameter diminishes towards the below, inner and outer circumferential surfaces 21d ', the 21d of this bottom perisporium 21d " along barrel surface.The periphery 21a ' of its inlet 21a is configured to along horizontal.The top perisporium 21c of the guide cylinder 21 that is disposed in the centre bore of described annular wall 24 is supported by interior all 24a of annular wall 24.
Described temporary transient storing section 22, the ring-type stream R that is surrounded by the top perisporium 21c that utilizes described periphery wall 23 and annular wall 24 with guide cylinder 21 and constituting.The cooling fluid that stores in tank for coolant 32 utilizes pump P to supply to this ring-type stream R by pipe arrangement 31.The liquid level T of cooling fluid among the ring-type stream R is represented in double dot dash line among the figure, make this liquid level T be higher than guide cylinder 21 inlet 21a periphery 21a ' supply with cooling fluid.The periphery of the cooling liquid outlet 22a of this temporary transient storing section 22 is made of the periphery 21a ' along the inlet 21a of the guide cylinder 21 in interior week of this ring-type stream R.Thus, the cooling liquid outlet 22a of this temporary transient storing section 22 is configured on the inlet 21a position that surrounds guide cylinder 21, cooling fluid from the cooling liquid outlet 22a of this temporary transient storing section 22 flows out can flow down along inner peripheral surface 21c ', 21d ' from the full periphery 21a ' of the inlet 21a this guide cylinder 21.Utilization forms the cooling liquid film of the inner peripheral surface 21c ', the 21d ' that cover this guide cylinder 21 along the inner peripheral surface 21c ' of this guide cylinder 21, the cooling fluid that 21d ' flows down.
This guide cylinder 21, owing to have the revolution shape at above-below direction axle center, so by inner peripheral surface 21c ', the 21d ' of the guide cylinder 21 of this cooling liquid film covering side face along the revolving body in above-below direction axle center.In addition, as shown in Figure 3, by importing direction towards the pipe arrangement 31 of this temporary transient storing section 22, be made to the tangential direction of the circle of the interior periphery of the ring-type stream R of the temporary transient storing section 22 of edge formation shown in arrow among the figure, supply with cooling fluids and make cooling fluid in this ring-type stream R, be the rotation shape to temporary transient storing section 22.Thus, the axle around above-below direction is rotated shown in arrow among the figure on one side, inner peripheral surface 21c ', the 21d ' of an edge guide cylinder 21 flow down for this cooling fluid.
Thus, the cooling fluid that utilization flows down along the inner peripheral surface 21c ' 21d ' of this guide cylinder 21 is discharged and the burnt gas of the high temperature of silica by guide cylinder 21 and hydrogen fluoride etc. cools off and cleans containing from this combustion chamber 12, in cooling fluid, absorb the compound of hydrogen fluoride etc., in cooling fluid, small solid contents such as silica are collected into the mud state.In addition, cover inner peripheral surface 21c ', the 21d ' of guide cylinder 21 by the formed cooling liquid film of this cooling fluid, so can stop the contacting of inner peripheral surface 21c ', 21d ' of this burnt gas and guide cylinder 21 owing to utilize.Thus, also can use the acid resistance nickel alloy of hastelloy C etc. as the material of guide cylinder 21 and be coated with the general corrosion resistant materials such as stainless steel of fluororesin.In addition, owing to utilize the cooling liquid film to make the border of cooling segment and non-cooling segment clear and definite, so can utilize the refractory material 19 of pottery etc. to protect the dry high-temperature portion of the inner peripheral surface etc. of the discharge duct 18 that cools off the liquid film upstream reliably.And, because the inlet 21a upward opening of this guide cylinder 21, the cooling fluid that flows out with the cooling liquid outlet 22a of temporary transient storing section 22 from the cooling fluid that surrounds this inlet 21a, the periphery 21a ' of inlet 21a from this guide cylinder 21 flows down along inner peripheral surface 21c ', 21d ', omits inner peripheral surface 21c ', the 21d ' that ground covers guide cylinder 21 so can utilize this cooling liquid film not have in broad range.Therefore, at inner peripheral surface 21c ', the 21d ' of this guide cylinder 21, can prevent to adhere to, pile up the contained solid content of burnt gas reliably or produce corrosion.In addition, owing to only cooling fluid is overflowed from this ring-type stream R, inner peripheral surface 21c ', the 21d ' along guide cylinder 21 flows down by the periphery 21a ' of the inlet 21a of guide cylinder 21 from cooling liquid outlet 22a to make this cooling fluid, so can form the cooling liquid film that covers this inner peripheral surface 21c ', 21d ' with simple structure reliably.
In addition, owing to flow down on one side around the axle rotation of above-below direction on one side along the inner peripheral surface 21c ' of this guide cylinder 21, the cooling fluid that 21d ' flows down, just have the inner peripheral surface 21c ' of this guide cylinder 21, the circumferential speed of 21d ', compare flow velocity with the occasion under the spontaneous current and increase, so can prevent from more reliably on this inner peripheral surface 21c ', 21d ', to adhere to, pile up solid content.
In addition, because the inner peripheral surface 21c ' of the top perisporium 21c of guide cylinder 21 along along with becoming the taper seat that diameter diminishes downwards, can interruptedly not cover this inner peripheral surface 21c ' reliably so can utilize the cooling liquid film.
Owing to utilize the described periphery wall 23 and the top perisporium 21c of annular wall 24 and guide cylinder 21 to surround this ring-type stream R, constitute the outer peripheral face 21c of the top perisporium 21c of guide cylinder 21 so can utilize the inner peripheral surface of temporary transient storing section 22 ".Between the periphery of interior all 24a of the annular wall 24 of the diapire that constitutes this temporary transient storing section 22 and guide cylinder 21, form the gap.Thus, cooling fluid in the temporary transient storing section 22 that flows out from this gap can be along the outer peripheral face 21c of guide cylinder 21 ", 21d " flow down, can not make structure complicated ground can not utilize the outer peripheral face 21c of cooling fluid to this guide cylinder 21 ", 21d " cool off, can improve the cooling effectiveness of burnt gas.This gap, the outer peripheral face 21c of the interior all 24a that both can be by having reduced annular wall 24 and the top perisporium 21c of guide cylinder 21 " forming accuracy be provided with; also can shown in the variation of Fig. 4, form by on interior all 24a of annular wall 24, breach 24a ' being set.
Owing to utilize described annular wall 24 to constitute the part of the upper wall of described tank for coolant 32, so tank for coolant 32 can be connected with the outlet 21b side of this guide cylinder 21.The cooling fluid of supplying with by cooling fluid supply source W and flow down the cooling fluid that circulates by guide cylinder 21 from temporary transient storing section 22 and stored in this tank for coolant 32.Cooling fluid in this tank for coolant 32 when its liquid level L surpasses predetermined setting height, then as shown in Figure 1, is overflowed to the outside from the discharge outlet 32b that is located on the tank for coolant 32.Thus, the height of the cooling-liquid level L in this tank for coolant 32 is remained in certain scope.In addition, the sensor that detects this liquid level L also can be set.According to the output of this sensor, the coolant rate of supplying with to tank for coolant 32 by control keeps within the specific limits the height of liquid level L.
Leave the outlet 21b of δ ground configuration guide cylinder 21 at interval above the cooling-liquid level L in this tank for coolant 32.This interval δ is configured to: liquid level L is because of the pressure of the burnt gas of discharging from the outlet 21b of guide cylinder 21, and as among Fig. 2 with past like that pressing down shown in the double dot dash line, for example be configured to about 5mm.Thus, can make the burnt gas of discharging from the outlet 21b of guide cylinder 21 contact and improve cooling effectiveness with storing cooling fluid tank for coolant 32 reliably, can also absorb, the compound in the clean burnt gas.And, owing to have δ at interval between the outlet of the liquid level of cooling fluid in this tank for coolant 32 and guide cylinder 21, so can not hinder mobile from the burnt gas of the outlet discharge of guide cylinder 21 because of cooling fluid.Thus, can not be increased in the interior pressure in the waste gas burning chamber 12 of upstream of guide cylinder 21, can prevent that efficiency of combustion from reducing and hinder the phenomenon that waste gas imports to combustion chamber 12.
Utilize cooling in the treating apparatus 3 of this burnt gas, clean, for example burnt gas can be cooled to fully below 100 ℃, this burnt gas is discharged to after-treatment device 4 from the 32a of gas phase portion of tank for coolant 32.As shown in Figure 1, this after-treatment device 4 has filling tower 34, is configured in the nozzle 38,39 on this filling tower 34, by each nozzle 38,39 spraying cooling fluid.This filling tower 34 is communicated with the 32a of gas phase portion of tank for coolant 32, and the cylindrical shell 34a and the absorbing material 34b of filling in this cylindrical shell 34a that are extended upward by the opening periphery from the upper wall of this tank for coolant 32 constitute, and from burnt gas hydrogen fluoride and silica etc. removed again.
Fig. 5 represents the 2nd example, represents with same-sign with the part that described the 1st example is same.In the 2nd example, the downward opening of this guide cylinder 21 is submerged in and stores in the cooling fluid of tank for coolant 32.On the perisporium 21d of the bottom of this guide cylinder 21, form a plurality of breach 21e circumferentially leaving the compartment of terrain, this breach utilizes this breach 21e to constitute the outlet 21b of the burnt gas in the guide cylinder 21 from the opening of top to the below of guide cylinder 21 of the liquid level L that stores the cooling fluid in described tank for coolant 32.Thus, by the burnt gas of this guide cylinder 21, after contacting with the liquid level L that stores the cooling fluid in this tank for coolant 32 and changing flow direction, flow out from the outlet that constitutes by breach 21e.At this moment, owing to utilize this breach 21e circumferentially between bottom perisporium 21d prolong the holdup time in guide cylinder 21 of burnt gas, so can improve the cooling fluid that stores in this tank for coolant 32 cooling effectiveness to burnt gas.It is identical with described the 1st example that other structure makes.
In addition, in the 2nd example,, circumferentially leave the compartment of terrain and form a plurality of breach 21f along inlet 21a at the top of guide cylinder 21 perisporium 21c.Thus, even the cooling fluid of supplying with to temporary transient storing section 22 temporarily reduces, enter to the inside of guide cylinder 21 by cooling fluid from this breach 21f, thereby can guarantee that cooling fluid flows down along inner peripheral surface 21c ', the 21d ' of guide cylinder 21.Other is identical with described the 1st example.
Fig. 6 represents the 3rd example, and the part identical with described the 1st example represented with same-sign.In the 3rd example, cooling fluid spray nozzle 51,52 is arranged on guide cylinder 21 and the tank for coolant 32, will be sprayed to the inside of this guide cylinder 21 and the inside of tank for coolant 32 by the cooling fluid that pump P supplies with.Thus, can improve the cooling effect of burnt gas.Because being located at spray nozzle 51 on this guiding tower 21 liquid film that is cooled cools off, so can not be corroded because of high-temperature gas, in addition owing to can not get wet the interior week of discharge duct 18 from the cooling water of spray nozzle 51 spraying, so can prevent refractory material 19 separate out in the burnt gas solid content to.Be located at the cooling fluid nozzle of the spray nozzle 51 on this guiding tower 21, preferably be configured in the interior position of the guide cylinder 21 of described cooling liquid film, the cooling fluid of spraying reliably.In addition, utilize, also can be to the outer peripheral face 21c of guide cylinder 21 by the cooling fluid that is located at cooling fluid spray nozzle 52 sprayings on this tank for coolant 32 ", 21d " cool off.
Adopt the present invention, can be with low-cost, easy and efficiently the high-temp waste gas of discharging with the pernicious gas combustion decomposition of discharges such as CVD operation the time is cooled off, cleans, in addition, can prevent the inaccessible and corrosion of the waste gas stream that causes because of solid content that pair is given birth to, the emission-control equipment that can realize reducing equipment cost can be provided.
The invention is not restricted to described example.For example, the waste gas of processing is not limited to the burnt gas of discharging when the CVD operation, also can be suitable for other high-temp waste gas is handled.
Embodiment 1
Utilize the exhaust treatment system of described the 1st example to carry out treatment of waste gas.
In combustion chamber 12, the gas that acts as a fuel uses propane 10L/min, uses air 250L/min and to containing 1% C as combustion-supporting property gas
2F
6Nitrogen base waste gas 200L/min in 1200 ℃, carry out combustion decomposition, burnt gas is discharged.Utilize this pump P to make 20L/min from the coolant rate that tank for coolant 32 is supplied with to temporary transient storing section 22, inner peripheral surface 21c ' that will be from this temporary transient storing section 22 along guide cylinder 21, the coolant rate that 21d ' flows down are done into about 15L/min, outer peripheral face 21c that will be from this temporary transient storing section 22 along guide cylinder 21 ", 21d " coolant rate that flows down does into about 5L/min, in addition, cooling fluid is sprayed to filling tower 34 with 10L/min by nozzle 38,39.
Under above-mentioned operating condition, amount to and carry out running in 200 hours, and in guide cylinder 21 and tank for coolant 32, do not see corrosion.
This burnt gas, to be cooled in the porch of filling tower 34 be 80 ℃, be 25 ℃ in the exit.In addition, with the result of gc analysis burnt gas, C
2F
6In the exit of filling tower 34 is below the 10ppm, obtains the decomposition efficiency more than 99%.
Embodiment 2
In combustion chamber 12, make and contain 1% SiH
4With 1% C
2F
6The waste gas 200L/min of nitrogen base under the condition identical, carry out combustion decomposition and discharge burnt gas with embodiment 1, other is handled under the condition identical with embodiment 1.
Under above-mentioned operating condition, amount to and carry out running in 150 hours, and in guide cylinder 21 and tank for coolant 32, do not see corrosion.
This burnt gas, being cooled in the porch of filling tower 34 is 82 ℃, is 25 ℃ in the exit.In addition, with the result of gc analysis burnt gas, at the exit of filling tower 34 C
2F
6Below 10ppm, SiH
4Below 0.5ppm, all obtain the decomposition efficiency more than 99%.
Claims (9)
1, a kind for the treatment of apparatus of burnt gas is characterized in that,
Temporary transient storing section (22) with the guide cylinder (21) that is connected with the discharge source of burnt gas and the cooling fluid of being supplied with,
Inlet (21a) upward opening of the burnt gas of this guide cylinder (21),
The cooling fluid that flows out from the cooling liquid outlet (22a) of this temporary transient storing section (22), can be from the full periphery of the inlet (21a) of this guide cylinder (21) (21a ') along inner peripheral surface (21c ' 21d ') flow down, the cooling liquid outlet (22a) of this temporary transient storing section (22) is configured on the position that surrounds guide cylinder (21) inlet (21a)
Utilization is along the cooling fluid that guide cylinder (21) inner peripheral surface (21c ', 21d ') flows down, and can form the cooling liquid film that covers this guide cylinder (21) inner peripheral surface (21c ', 21d ').
2, the treating apparatus of burnt gas as claimed in claim 1, it is characterized in that, this temporary transient storing section (22) is made of the ring-type stream, and the periphery utilization of the cooling liquid outlet (22a) of this temporary transient storing section (22) constitutes along the periphery of the inlet (21a) of the guide cylinder (21) of this ring-type stream (21a ').
3, the treating apparatus of burnt gas as claimed in claim 2, it is characterized in that, this cooling fluid flows down around the inner peripheral surface of the axle rotation one edge guide cylinder (21) of above-below direction (21c ', 21d ') on one side, guide cylinder (21) inner peripheral surface that is covered by this cooling liquid film (21c ', 21d ') is made to the side face of the revolving body in axle center along the vertical direction, and makes cooling fluid rotatably cooling fluid be supplied to temporary transient storing section (22) in this ring-type stream.
4, the treating apparatus of burnt gas as claimed in claim 2 is characterized in that, in the centre bore of the annular wall (24) of the bottom that constitutes this ring-type stream, can be inserted with this guide cylinder (21) from the top with transfering to,
The outer peripheral face of the perisporium of this guide cylinder (21) (21c ") has along with towards the below and the taper seat that diameter diminishes,
The perisporium of this guide cylinder (21) was supported by the interior week (24a) of described annular wall (24).
5, the treating apparatus of burnt gas as claimed in claim 3 is characterized in that, in the centre bore of the annular wall (24) of the bottom that constitutes this ring-type stream, can be inserted with this guide cylinder (21) from the top with transfering to,
The outer peripheral face of the perisporium of this guide cylinder (21) (21c ") has along with towards the below and the taper seat that diameter diminishes,
The perisporium of this guide cylinder (21) was supported by the interior week (24a) of described annular wall (24).
6, the treating apparatus of burnt gas as claimed in claim 1 is characterized in that,
Constitute the outer peripheral face (21c ") of guide cylinder (21) by the inner peripheral surface of this temporary transient storing section (22),
Between the periphery of interior week (24a) of the annular wall (24) of the diapire that constitutes this temporary transient storing section (22) and guide cylinder (21), form the gap,
Cooling fluid in the temporary transient storing section (22) that flows out from this gap can flow down along the outer peripheral face of guide cylinder (21) (21c ", 21d ").
7, the treating apparatus of burnt gas as claimed in claim 1 is characterized in that, guide cylinder (21) inner peripheral surface that is covered by this cooling liquid film (21c ') has along with towards the below and the taper seat that diameter diminishes.
8, the treating apparatus of burnt gas as claimed in claim 1 is characterized in that,
The outlet (21b) of the burnt gas in this guide cylinder (21) is under shed,
Be provided with the tank for coolant (32) that is connected with outlet (21b) side of this guide cylinder (21),
Cooling fluid is stored in this tank for coolant (32),
Leave the outlet (21b) that the compartment of terrain is disposing guide cylinder (21) in the top of the liquid level that stores the cooling fluid in this tank for coolant (32), and this is configured at interval, this liquid level by the pressure of the burnt gas of discharging from the outlet (21b) of guide cylinder (21) toward pressing down.
9, the treating apparatus of burnt gas as claimed in claim 1 is characterized in that,
This guide cylinder (21) has downward opening,
Be provided with the tank for coolant (32) that is connected with outlet (21b) side of this guide cylinder (21),
Cooling fluid is stored in this tank for coolant (32),
The downward opening of this guide cylinder (21) is submerged in the cooling fluid that stores in tank for coolant (32),
On the perisporium of this guide cylinder (21), be formed with from the liquid level top that stores the cooling fluid this tank for coolant (32) to the breach (21e) of the downward opening of guide cylinder (21),
Constitute the outlet (21b) of the burnt gas in the guide cylinder (21) by this breach (21e).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP368446/2000 | 2000-12-04 | ||
| JP2000368446A JP2002166126A (en) | 2000-12-04 | 2000-12-04 | Combustion exhaust gas treatment apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1477989A true CN1477989A (en) | 2004-02-25 |
Family
ID=18838677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA018199186A Pending CN1477989A (en) | 2000-12-04 | 2001-11-14 | Exhaust gas treatment device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2002166126A (en) |
| KR (1) | KR20030074638A (en) |
| CN (1) | CN1477989A (en) |
| TW (1) | TW505766B (en) |
| WO (1) | WO2002045823A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1923342B (en) * | 2005-09-02 | 2011-08-24 | 清洁系统韩国股份有限公司 | Scrubber for processing semiconductor waste gas |
| CN110195694A (en) * | 2018-02-26 | 2019-09-03 | 株式会社荏原制作所 | Wet-type pest eliminating device |
| CN110461437A (en) * | 2017-01-06 | 2019-11-15 | 阿尔泽塔公司 | System and method for improving emission abatement |
| CN111905492A (en) * | 2020-07-30 | 2020-11-10 | 安徽国能亿盛环保科技有限公司 | Flue gas dust removal system |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100795385B1 (en) * | 2004-03-05 | 2008-01-17 | 가부시키가이샤 야스카와 | Attaching device for cooling and cleaning process of exhaust gas generated from reflow furnace |
| DE102004047440B4 (en) * | 2004-09-28 | 2007-11-08 | Centrotherm Clean Solutions Gmbh & Co.Kg | Arrangement for the purification of toxic gases from production processes |
| KR101303918B1 (en) | 2011-03-09 | 2013-09-05 | 주식회사 포스코건설 | Scrubbing apparatus for exhaust gas |
| JP6322502B2 (en) * | 2014-07-08 | 2018-05-09 | 大陽日酸株式会社 | Exhaust gas treatment equipment |
| CN104879767A (en) * | 2015-05-12 | 2015-09-02 | 靖江格兰石化设备有限公司 | Flue gas quench cooler |
| KR101720086B1 (en) * | 2015-09-04 | 2017-03-27 | 주식회사 글로벌스탠다드테크놀로지 | Integrated Semiconductor Waste Gas Purification Apparatus |
| JP6659471B2 (en) * | 2016-06-08 | 2020-03-04 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
| JP6836351B2 (en) * | 2016-08-18 | 2021-02-24 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
| JP7285167B2 (en) * | 2019-08-22 | 2023-06-01 | 株式会社荏原製作所 | Exhaust gas treatment device |
| CN110523188B (en) * | 2019-08-22 | 2021-09-17 | 青岛明华电子仪器有限公司 | Smoke and dust gas treatment facility |
| CN115350577B (en) * | 2022-07-29 | 2024-02-02 | 北京京仪自动化装备技术股份有限公司 | Exhaust gas treatment reaction device and semiconductor exhaust gas treatment system |
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| JPS5079970A (en) * | 1973-11-16 | 1975-06-28 | ||
| JPS52129673A (en) * | 1976-04-23 | 1977-10-31 | Mitsui Mining & Smelting Co | Gassliquid contact apparatus |
| JPS5915688B2 (en) * | 1976-08-10 | 1984-04-11 | 千代田化工建設株式会社 | Gas-liquid contact device |
| JPS6336817A (en) * | 1986-07-31 | 1988-02-17 | Chiyoda Chem Eng & Constr Co Ltd | Wet flue gas purifying method and device therefor |
| JPS6362528A (en) * | 1986-09-03 | 1988-03-18 | Shindengen Electric Mfg Co Ltd | Discharge gas treating device |
| DE4320044A1 (en) * | 1993-06-17 | 1994-12-22 | Das Duennschicht Anlagen Sys | Process and device for cleaning exhaust gases |
-
2000
- 2000-12-04 JP JP2000368446A patent/JP2002166126A/en active Pending
-
2001
- 2001-11-14 WO PCT/JP2001/009933 patent/WO2002045823A1/en active Application Filing
- 2001-11-14 CN CNA018199186A patent/CN1477989A/en active Pending
- 2001-11-14 KR KR10-2003-7007366A patent/KR20030074638A/en not_active Application Discontinuation
- 2001-11-27 TW TW090129296A patent/TW505766B/en not_active IP Right Cessation
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1923342B (en) * | 2005-09-02 | 2011-08-24 | 清洁系统韩国股份有限公司 | Scrubber for processing semiconductor waste gas |
| CN110461437A (en) * | 2017-01-06 | 2019-11-15 | 阿尔泽塔公司 | System and method for improving emission abatement |
| CN110195694A (en) * | 2018-02-26 | 2019-09-03 | 株式会社荏原制作所 | Wet-type pest eliminating device |
| CN111905492A (en) * | 2020-07-30 | 2020-11-10 | 安徽国能亿盛环保科技有限公司 | Flue gas dust removal system |
Also Published As
| Publication number | Publication date |
|---|---|
| TW505766B (en) | 2002-10-11 |
| WO2002045823A1 (en) | 2002-06-13 |
| KR20030074638A (en) | 2003-09-19 |
| JP2002166126A (en) | 2002-06-11 |
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