CN201122231Y - Floating lifting balancing device of LCD exposure machine ball seat - Google Patents
Floating lifting balancing device of LCD exposure machine ball seat Download PDFInfo
- Publication number
- CN201122231Y CN201122231Y CNU2007200542091U CN200720054209U CN201122231Y CN 201122231 Y CN201122231 Y CN 201122231Y CN U2007200542091 U CNU2007200542091 U CN U2007200542091U CN 200720054209 U CN200720054209 U CN 200720054209U CN 201122231 Y CN201122231 Y CN 201122231Y
- Authority
- CN
- China
- Prior art keywords
- ball seat
- absorption
- seat
- absorption ball
- exposure machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a floating and lifting and balancing device of an LCD photo exposure machine ball seat, which comprises an adsorption platform, a positioning pin, a positioning seat and light shade glass. The light shade glass is arranged above the adsorption platform which is movably connected with the positioning pin through the positioning seat. The device is characterized in that a first adsorption ball seat and a second adsorption ball seat are also included, the first adsorption ball seat is fixed on the bottom face of the adsorption platform, the second adsorption ball seat is positioned under the first adsorption ball seat, the first adsorption ball seat is contacted with the second adsorption ball seat in a floating way, and the second adsorption ball seat is fixedly connected with the positioning seat. Because of adopting the structure, the device has good photo exposure quality, simple structure, easy processing and easy mass production.
Description
Technical field
The utility model relates to LCD exposure machine equipment, specifically, relates to the unsteady up and down balance system device of a kind of LCD exposure machine ball seat.
Background technology
At present, traditional LCD exposure machine is because the cause of materials and parts processing and assembly error causes the two plane contact applying of its ball seat bad easily, thereby has influence on the exposure quality.
The utility model content
Technical problem to be solved in the utility model provides a kind of unsteady up and down balance system device of LCD exposure machine ball seat of the quality better that exposes.
For solving the problems of the technologies described above, the utility model has adopted following technical scheme:
The LCD exposure machine ball seat of the present utility model up and down balance system device that floats, comprise absorption platform, register pin, positioning seat, light shield glass, described light shield glass be located at absorption platform above, absorption platform and positioning seat flexibly connect by register pin, it is characterized in that: also comprise the first absorption ball seat, the second absorption ball seat, the described first absorption ball seat is fixed on the bottom surface of absorption platform, the second adsorbing sphere seat is positioned at the first absorption ball seat below, this first absorption ball seat floats with the second absorption ball seat and contacts, and described second absorption ball seat and positioning seat are connected and fixed.
The described second absorption ball seat is a concave spherical surface with the unsteady one side that contacts of the first absorption ball seat, and the face that the described first absorption ball seat and the second absorption ball seat match is a protruding sphere.
Owing to adopted said structure, the first absorption ball seat of the present utility model is fixed on the bottom surface of absorption platform, the second adsorbing sphere seat is positioned at the first absorption ball seat below, this first absorption ball seat floats with the second absorption ball seat and contacts, wherein the second absorption ball seat is a concave spherical surface with the unsteady one side that contacts of the first absorption ball seat, the first absorption ball seat is a protruding sphere with the face that the second absorption ball seat matches, be that they are by two concavo-convex spherical floating contacts, and two spheres add man-hour supporting break-in processing, thereby guaranteed crudy, thereby the utility model makes absorption platform and light shield glass can realize that better driving fit attaches, in lifting process, adopt high vacuum to fix, switching to low vacuum when absorption platform and light shield glass contact can allow the second absorption ball seat and the first absorption ball seat float, thereby absorption platform and light shield glass are well fitted, thereby improved the exposure quality of exposure machine widely; In addition, simple in structure, the handling ease of the utility model easily forms and produces in batches.
Description of drawings
Below in conjunction with the drawings and specific embodiments the utility model is described in further detail.
Fig. 1 is the structural representation of the unsteady up and down balance system device of the utility model LCD exposure machine ball seat.
Fig. 2 is the synoptic diagram of the first absorption ball seat of the unsteady up and down balance system device of the utility model LCD exposure machine ball seat.
Fig. 3 is the synoptic diagram of the second absorption ball seat of the unsteady up and down balance system device of the utility model LCD exposure machine ball seat.
Embodiment
As shown in Figure 1, 2, 3, it is the structural representation of the unsteady up and down balance system device of the utility model LCD exposure machine ball seat.A kind of LCD exposure machine ball seat up and down balance system device that floats, comprise absorption platform 1, register pin 2, positioning seat 3, light shield glass 4, wherein exposure irradiation is to be radiated on the light shield glass 4, described light shield glass 4 be located at absorption platform 1 above, absorption platform 1 flexibly connects by register pin 2 with positioning seat 3, it is characterized in that: also comprise the first absorption ball seat 5, the second absorption ball seat 6, the described first absorption ball seat 5 is fixed on the bottom surface of absorption platform 1, the second absorption ball seat 6 is positioned at the first absorption ball seat, 5 belows, this first absorption ball seat 5 floats with the second absorption ball seat 6 and contacts, and the described second absorption ball seat 6 is connected and fixed with positioning seat 3.The described second absorption ball seat 6 is a concave spherical surface 61 with the first absorption ball seat, the 5 unsteady one sides that contact, and the face that the described first absorption ball seat 5 and the second absorption ball seat 6 match is a protruding sphere 51.
As shown in Figure 2, it is the synoptic diagram of the first absorption ball seat of the unsteady up and down balance system device of the utility model LCD exposure machine ball seat.First adsorbs ball seat 5 and protruding sphere 51 as can be seen from FIG..
As shown in Figure 3, it is the synoptic diagram of the second absorption ball seat of the unsteady up and down balance system device of the utility model LCD exposure machine ball seat.Second adsorbs ball seat 6 and concave spherical surface 61 as can be seen from FIG..
When the utility model uses, the first absorption ball seat 5 floats with the second absorption ball seat 6 and contacts, wherein the second absorption ball seat 6 is a concave spherical surface 61 with the first absorption ball seat, the 5 unsteady one sides that contact, the first absorption ball seat 5 is protruding sphere 51 with the face that the second absorption ball seat 6 matches, be that they are by two concavo-convex spherical floating contacts, and two spheres add man-hour supporting break-in processing, thereby guaranteed crudy, thereby the utility model makes absorption platform 1 and light shield glass 4 can realize that better driving fit attaches, in lifting process, adopt high vacuum to fix, absorption platform 1 switches to low vacuum when contacting with light shield glass 4 can allow the second absorption ball seat 6 and the first absorption ball seat 5 float, thereby absorption platform 1 is well fitted with light shield glass 4, thereby improved the exposure quality of exposure machine widely, realized effect of the present utility model.
In a word,, should illustrate that obviously those skilled in the art can carry out various variations and remodeling though the utility model has exemplified above-mentioned preferred implementation.Therefore, unless such variation and remodeling have departed from scope of the present utility model, otherwise all should be included within the protection domain of the present utility model.
Claims (2)
1. the LCD exposure machine ball seat up and down balance system device that floats, comprise absorption platform (1), register pin (2), positioning seat (3), light shield glass (4), described light shield glass (4) be located at absorption platform (1) above, absorption platform (1) flexibly connects by register pin (2) with positioning seat (3), it is characterized in that: also comprise the first absorption ball seat (5), the second absorption ball seat (6), the described first absorption ball seat (5) is fixed on the bottom surface of absorption platform (1), the second absorption ball seat (6) is positioned at first absorption ball seat (5) below, this first absorption ball seat (5) floats with the second absorption ball seat (6) and contacts, and the described second absorption ball seat (6) is connected and fixed with positioning seat (3).
2. the LCD exposure machine ball seat according to claim 1 up and down balance system device that floats, it is characterized in that: the described second absorption ball seat (6) is a concave spherical surface (61) with the unsteady one side that contacts of the first absorption ball seat (5), and the face that the described first absorption ball seat (5) and the second absorption ball seat (6) match is a protruding sphere (51).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200542091U CN201122231Y (en) | 2007-07-17 | 2007-07-17 | Floating lifting balancing device of LCD exposure machine ball seat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200542091U CN201122231Y (en) | 2007-07-17 | 2007-07-17 | Floating lifting balancing device of LCD exposure machine ball seat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201122231Y true CN201122231Y (en) | 2008-09-24 |
Family
ID=40009465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200542091U Expired - Fee Related CN201122231Y (en) | 2007-07-17 | 2007-07-17 | Floating lifting balancing device of LCD exposure machine ball seat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201122231Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102213920A (en) * | 2010-04-01 | 2011-10-12 | 亿力鑫系统科技股份有限公司 | Carrying device and exposure machine equipped with same |
-
2007
- 2007-07-17 CN CNU2007200542091U patent/CN201122231Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102213920A (en) * | 2010-04-01 | 2011-10-12 | 亿力鑫系统科技股份有限公司 | Carrying device and exposure machine equipped with same |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080924 Termination date: 20140717 |
|
| EXPY | Termination of patent right or utility model |