CN102213920A - Carrying device and exposure machine equipped with same - Google Patents
Carrying device and exposure machine equipped with same Download PDFInfo
- Publication number
- CN102213920A CN102213920A CN2010101371424A CN201010137142A CN102213920A CN 102213920 A CN102213920 A CN 102213920A CN 2010101371424 A CN2010101371424 A CN 2010101371424A CN 201010137142 A CN201010137142 A CN 201010137142A CN 102213920 A CN102213920 A CN 102213920A
- Authority
- CN
- China
- Prior art keywords
- bogey
- pedestal
- workpiece
- carrier
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Load-Engaging Elements For Cranes (AREA)
Abstract
The invention discloses a carrying device, which is used for carrying a to-be-exposed work piece. The carrying device disclosed by the invention comprises a base and a replaceable carrying disc. The base comprises a top surface and multiple first positioning parts configured on the top surface; the replaceable carrying disc comprises a carrying surface used for carrying a to-be-exposed work piece and having a size corresponding to that of the to-be-exposed work piece, as well as a bottom surface abutting against the top surface and multiple second positioning parts that are arranged on the bottom surface and connected with the first positioning parts detachably. Therefore, when the size of the to-be-exposed work piece is changed, another replaceable carrying disc provided with a carrying surface of which the size corresponds to the size of the to-be-exposed work piece can be used to substitute the previous one.
Description
Technical field
The present invention relates to a kind of bogey and have the exposure machine of this bogey, relate to particularly that a kind of carrier is assembled on the pedestal replaceably or by the bogey of dismantling on the pedestal and have the exposure machine of this bogey.
Background technology
As shown in Figures 1 and 2, general exposure machine 1 comprises a board 11, one is arranged at the load bearing seat 13 that bogey 12, on the board 11 is locked on the board 11 and is positioned at bogey 12 tops, and one be arranged on the board 11 and be positioned at the photohead 14 of load bearing seat 13 tops, and load bearing seat 13 is in order to carry a light shield 15.Bogey 12 comprises that spiro connecting piece 122, that a motor 121, is connected in motor 121 tops is bolted in the screw rod 123 on the spiro connecting piece 122, and one is engaged in screw rod 123 tops in order to carry a carrier 124 of waiting to expose workpiece 16.
When carrying out exposure operation, the workpiece 16 of waiting to expose can be placed on the carrier 124 by the conveying of shifting apparatus (figure does not show), bogey 12 can up be passed carrier 124, make the workpiece 16 that exposes for the treatment of on the carrier 124 develop with light shield 15 on the load bearing seat 13, then, the light that is produced by photohead 14 is treated 16 exposures of exposure workpiece by light shield 15, makes predetermined pattern transferability on the light shield 15 to the workpiece 16 of waiting to expose.In order firmly to carry the workpiece 16 of waiting to expose, it is suitable with the size of the workpiece 16 of waiting to expose that the size big city of carrier 124 designs, if to carry out other different size wait to expose the exposure operation of workpiece 16 time, must be with after bogey originally 12 dismountings, replace with another and have bogey 12 with this suitable carrier 124 of workpiece 16 sizes of waiting to expose, that just can carry out different size waits to expose the exposure of workpiece 16.Yet, 14 of bogey 12 after the installation and light shield 15 and photoheads can produce error, need carry out action again to bit correction, so comparatively inconvenience when exposure operation, and can expend a large amount of man-hours, therefore, how to visualize a kind of design of being convenient to the carrier 124 of dismounting and replaceable different size size, become the present invention then and want further improved theme.
Summary of the invention
Fundamental purpose of the present invention is to provide a kind of bogey, and its carrier can be convenient and promptly be assembled on the pedestal or by dismantling on the pedestal, whereby, when the workpiece size of waiting to expose changes, just can replace and has correspondence wait the to expose carrier of workpiece size.
Another object of the present invention, be to provide a kind of exposure machine with bogey, the carrier of bogey can be convenient and promptly be assembled on the pedestal or by dismantling on the pedestal, whereby, when the workpiece size of waiting to expose changes, just can replace and have correspondence wait the to expose carrier of workpiece size.
Purpose of the present invention and solution background technology problem realize that by the following technical solutions the bogey according to the present invention proposes is suitable for carrying a workpiece to be exposed, and bogey comprises a pedestal and a removable carrier.
Pedestal comprises an end face, and most first keepers that are arranged at end face; Removable carrier comprises that one can carry the bottom surface that wait to expose workpiece and the loading end, suitable with its size can be connected to end face, and most second keepers that are arranged at the bottom surface and removably engage with described first keeper, whereby, when the workpiece size of waiting to expose changes, just can replace and have correspondence wait the to expose removable carrier of loading end of workpiece size.
Purpose of the present invention and solution background technology problem can also adopt following technological means further to realize.
Each first keeper be reference column or pilot hole one of them, each second keeper be reference column or pilot hole wherein another.
Pedestal also comprises one by the groove of end face to lower recess, reach and hold first through hole that is connected with groove one by one, bogey also comprises first valve that is installed on the first through hole other end, and first valve can be bled to first through hole and groove, makes carrier be adsorbed on the end face of pedestal.
Pedestal also comprises holds second through hole that is formed at end face one by one, carrier also comprises a gas flow that runs through loading end and bottom surface and be communicated with second through hole, bogey also comprises second valve that is installed on the second through hole other end, second valve can be bled to second through hole and gas flow, makes workpiece to be exposed be adsorbed on the loading end of carrier.
Carrier comprises that also one is formed at first groove on the loading end, reaching most is formed on the loading end and second groove that is connected with first groove, first groove is cruciform and the center is connected with gas flow, and described second groove is the arrangement of concentric circles ground and has different diameters respectively.
Pedestal comprises that also one is positioned at the accommodation space of this end face below, and most first perforation that are formed at this end face and are communicated with this accommodation space, this carrier comprises that also most run through this loading end and this bottom surface and second boring a hole of being communicated with described first perforation, this bogey also comprises a yoke frame that is extended through in this accommodation space, this yoke frame comprises that most roots are arranged in described first respectively, second perforation is in order to contact wait the to expose thimble of workpiece, yoke frame can pass first height and position of loading end at each thimble, and each thimble is positioned at to-and-fro movement between second height and position of loading end below.Bogey also comprises one and is arranged on the pedestal and can drives yoke frame reciprocating cylinder between first height and position and second height and position.
The exposure machine with bogey according to the present invention proposes comprises a board, a bearing part, a photohead and a bogey.
Bearing part is arranged on the board in order to carry a light shield; Photohead is arranged on the board and is positioned at the bearing part top; Bogey is suitable for carrying a workpiece to be exposed, and bogey comprises a pedestal, a driving mechanism, and a removable carrier.Pedestal is arranged at the bearing part below and comprises an end face, and most first keepers that are arranged at end face; Driving mechanism is installed on base bottom and can orders about pedestal and pumps; Removable carrier comprises that one can carry the bottom surface that wait to expose workpiece and the loading end, suitable with its size can be connected to end face, and most second keepers that are arranged at the bottom surface and removably engage with described first keeper, whereby, when the workpiece size of waiting to expose changes, just can replace the removable carrier that has the loading end of the workpiece size of should waiting to expose.
By technique scheme, the advantage and the beneficial effect of bogey of the present invention are: by removable carrier design, make operating personnel to make things convenient for and promptly carrier is assembled on the pedestal or by dismantling on the pedestal, whereby, just can replace and have correspondence wait the to expose removable carrier of loading end of workpiece size.
Description of drawings
Fig. 1 is the synoptic diagram of general exposure machine;
Fig. 2 is the synoptic diagram of similar Fig. 1, illustrates that the retractor device workpiece of will waiting to expose up passes and make its smooth light shield;
Fig. 3 is the stereographic map of a preferred embodiment of the exposure machine of the present invention with bogey;
Fig. 4 is the three-dimensional exploded view of bogey of a preferred embodiment of the exposure machine of the present invention with bogey;
Fig. 5 is the upward view of carrier of a preferred embodiment of the exposure machine of the present invention with bogey;
Fig. 6 is the partial enlarged drawing of a preferred embodiment of the exposure machine of the present invention with bogey, illustrates that carrier is assembled on second pedestal of pedestal, and first keeper is reference column, and second keeper is a pilot hole;
Fig. 7 is that another of a preferred embodiment of the exposure machine of the present invention with bogey implemented the partial enlarged drawing of aspect, illustrates that first keeper is a pilot hole, and second keeper is a reference column;
Fig. 8 is the cut-open view of a preferred embodiment of the exposure machine of the present invention with bogey;
Fig. 9 is the cut-open view of a preferred embodiment of the exposure machine of the present invention with bogey, illustrates that the yoke frame position is at first height and position;
Figure 10 is the cut-open view of a preferred embodiment of the exposure machine of the present invention with bogey, illustrates that the yoke frame position is at second height and position;
Figure 11 is the illustrative view of a preferred embodiment of the exposure machine of the present invention with bogey, pedestal, carrier are described and the workpiece of waiting to expose at an initial position;
Figure 12 is the illustrative view of a preferred embodiment of the exposure machine of the present invention with bogey, illustrates that workpiece to be exposed is pressed on the light shield bottom surface;
Figure 13 is the operation chart of a preferred embodiment of the exposure machine of the present invention with bogey, illustrates that bogey can replace and have correspondence wait the to expose carrier of loading end of workpiece size.
Among the figure: 2. exposure machine; 21. board; 22. bearing part; 23. photohead; 31. light shield; 32. workpiece; 32 '. workpiece; 4. pedestal; 400. bogey; 41. first pedestal; 410. arc groove; 42. second pedestal; 420. arcuate engagement portion; 421. end face; 422. groove; 423. cell wall; 424. first keeper; 425. first through hole; 426. first slot part; 427. second slot part; 428. second through hole; 429. accommodation space; 430. first perforation; 431. lateral openings; 5. carrier; 5 '. carrier; 51. loading end; 51 '. loading end; 52. bottom surface; 53. second keeper; 54. gas flow; 55. first groove; 56. second groove; 57. second perforation; 6. driving mechanism; 61. CD-ROM drive motor; 62. tressel; 71. first valve; 72. second valve; 8. yoke frame; 81. thimble; 9. cylinder.
Embodiment
About aforementioned and other technology contents, characteristics and effect of the present invention, in the following detailed description that cooperates with reference to a graphic preferred embodiment, can clearly present.By the explanation of embodiment, when can being to reach technological means that predetermined purpose takes and effect to obtain one more deeply and concrete understanding to the present invention, yet appended graphic provide with reference to and illustration, be not to be used for the present invention is limited.
Before the present invention is described in detail, be noted that in the following description content similarly assembly is represented with identical numbering.
As shown in Figure 3, it is a preferred embodiment of the exposure machine of the present invention with bogey, this exposure machine 2 comprises a board 21, and is arranged at the photohead 23 that bearing part 22, on the board 21 is arranged on the board 21 and is positioned at bearing part 22 tops, and one is arranged on the board 21 and is positioned at the bogey 400 of bearing part 22 belows.Bearing part 22 is in order to carry a light shield 31, and bogey 400 tops are in order to carry the workpiece 32 of waiting to expose, bogey 400 can up be passed and develop the workpiece 32 of waiting to expose in light shield 31 bottom surfaces, whereby, the light that photohead 23 is produced can be treated the exposure of exposure workpiece 32 by light shield 31, makes predetermined pattern transferability on the light shield 31 to the workpiece 32 of waiting to expose, wherein, the workpiece 32 of waiting to expose can be a substrate or a wafer, is that example explains in the present embodiment with the wafer.
As shown in Figures 3 and 4, bogey 400 comprises the carrier 5 that a pedestal 4, is arranged on the pedestal 4 replaceably, and a driving mechanism 6.Driving mechanism 6 is installed on the board 21, and it comprises a CD-ROM drive motor 61, and one driven by CD-ROM drive motor 61 and the tressel 62 that pumps.Pedestal 4 comprises one first pedestal 41, reach second pedestal 42 that is arranged on first pedestal 41 and supplies carrier 5 to assemble, first pedestal 41 of pedestal 4 can be locked in tressel 62 tops by the screw lock mode, whereby, makes pedestal 4 and carrier 5 can be subjected to the drive of tressel 62 and pumps.
As Fig. 4, Fig. 5 and shown in Figure 6, second pedestal 42 is cylindrical, its bottom surface convexes with an arcuate engagement portion 420, the arcuate engagement portion 420 of second pedestal 42 is placed in the arc groove 410 on first pedestal, 41 tops rotationally, whereby, carrier 5 can rotate with respect to first pedestal 41 by second pedestal 42, to carry out the action of angle fine setting.Second pedestal 42 comprises an end face 421, and one is defined to groove 422, the second pedestals 42 of lower recess on the cell wall 423 of groove 422 by end face 421 and to convex with most first keepers 424.Carrier 5 is in the form of annular discs, and comprise that one can carry the bottom surface 52 that wait to expose workpiece 32 and the loading end 51, suitable with its size are positioned at loading end 51 opposition sides and can be connected to end face 421, and most second keepers 53 that are arranged at bottom surface 52, the quantity of second keeper 53 is identical with first keeper, 424 quantity and the position is corresponding, each second keeper 53 removably engages with each first keeper 424, whereby, make carrier 5 assemble replaceably on second pedestal 42 that is positioned at pedestal 4.In the present embodiment, each first keeper 424 is a reference column, and each second keeper 53 is a pilot hole that can supply this reference column to wear.Certainly, in design, as shown in Figure 7, each first keeper 424 also can be a pilot hole, and each second keeper 53 also can be a reference column that is arranged in this pilot hole.
Second pedestal 42 of pedestal 4 also comprises one first through hole 425, one end of first through hole 425 is formed on the cell wall 423 and with groove 422 and is connected, and one first valve 71 installations of first through hole, 425 other ends for bogey 400, first valve 71 can be connected with a pneumatic shuttle (figure does not show), by the start of pneumatic shuttle, the valve 71 of winning can be bled to first through hole 425 and groove 422.When carrier 5 is positioned at the end face 421 of second pedestal 42, bleed by 71 pairs first through holes 425 of first valve and groove 422, make carrier 5 by the end face 421 of downward suction adsorption in second pedestal 42, whereby, carrier 5 can firmly be positioned at the end face 421 of second pedestal 42, and can up not lifted because of false touch and cause second keeper 53 to separate with first keeper 424.Preferably, in the present embodiment, groove 422 has first a curved slot part 426, and one be positioned at that first slot part 426 encloses and coupled logical criss-cross second slot part 427 that is, the design of first, second slot part 426,427 by groove 422, the bottom surface 52 of carrier 5 all can firmly be adsorbed near peripheral region and middle part, make that the bottom surface 52 of carrier 5 can be evenly and entirely be connected to the end face 421 of second pedestal 42, can avoid causing carrier 5 to produce crooked phenomenon because of suction is uneven.
As Fig. 4, Fig. 6 and shown in Figure 8, carrier 5 comprises that also one runs through the gas flow 54 of loading end 51 and bottom surface 52, second pedestal 42 of pedestal 4 also comprises one second through hole 428, one end of second through hole 428 is formed at end face 421 and is connected with gas flow 54, and one second valve 72 installations of the other end of second through hole 428 for bogey 400, second valve 72 is connected with this pneumatic shuttle equally, by the start of pneumatic shuttle, make second valve 72 to bleed to second through hole 428 and gas flow 54.When the workpiece 32 of waiting to expose is seated in the loading end 51 of carrier 5, bleed by 72 pairs second through holes 428 of second valve and gas flow 54, make and wait to expose workpiece 32 by the loading end 51 of downward suction adsorption in carrier 5, whereby, the workpiece 32 of waiting to expose can be positioned at the loading end 51 of carrier 5.Preferably, carrier 5 comprises that also one is formed at first groove 55 on the loading end 51, and most second grooves 56 that are formed on the loading end 51, first groove 55 is cruciform and the center is connected with gas flow 54, and described second groove 56 is the arrangement of concentric circles ground and has different diameters respectively, described second groove 56 is connected with first groove 55 respectively, whereby, second valve 72 can be by 54 pairs first of second through hole 428 and gas flows, second groove 55,56 bleed, the feasible workpiece 32 of waiting to expose can firmly be adsorbed, and the while can be evenly and entirely is connected on the loading end 51.
As Fig. 4, Fig. 8 and shown in Figure 9, second pedestal 42 of pedestal 4 comprises that also one is positioned at the accommodation space 429 of end face 421 belows, and most first perforation 430 that are formed at end face 421 and are connected with accommodation space 429, and carrier 5 also comprises most second perforation 57 that run through loading end 51 and bottom surface 52, the quantity of second perforation, 57 quantity and first perforation 430 is identical and the position is corresponding, and each second perforation 57 first is bored a hole and 430 is connected with each.Bogey 400 also comprises a yoke frame 8, reach one and be arranged at the cylinder 9 that also can drive yoke frame 8 starts on first pedestal 41, yoke frame 8 is extended through in the accommodation space 429 via a lateral openings 431, yoke frame 8 comprises that most roots are in order to contact wait the to expose thimble 81 of workpiece 32, but each thimble 81 is arranged in each first perforation 430 and each second perforation 57 and the pushing tow workpiece 32 of waiting to expose, driving by cylinder 9, make yoke frame 8 to pass second perforation 57 and first height and position (as shown in Figure 9) of loading end 51, and a thimble 81 is positioned at to-and-fro movement between second height and position (as shown in figure 10) of loading end 51 belows at a thimble 81.
As Fig. 6 and shown in Figure 8, desire assembling carrier 5 is on second pedestal 42 of pedestal 4 time, earlier carrier 5 is placed in the end face 421 of second pedestal 42, and each first keeper 424 is arranged in each second keeper 53, make carrier 5 be positioned on second pedestal 42 and can not rock with respect to second pedestal 42.Then, bleed, make carrier 5 can be adsorbed and make bottom surface 52 evenly and entirely to be connected to the end face 421 of second pedestal 42, at this moment, promptly finish the assembling of carrier 5 by controlling 71 pairs first through holes 425 of first valve and groove 422.
As Fig. 4, Fig. 8, Fig. 9 and shown in Figure 10, exposure machine 2 is when carrying out exposure operation, yoke frame 8 is positioned at first height and position, shifting apparatus (figure do not show) can will wait to expose workpiece 32 be delivered to thimble 81 directly over, then, shifting apparatus can drive the workpiece 32 of waiting to expose and descend, and when the workpiece 32 of waiting to expose during by thimble 81 contacts, the workpiece 32 of waiting to expose promptly no longer continues to move down.Afterwards, driving yoke frame 8 by cylinder 9 is moved down along arrow I direction by first height and position, when yoke frame 8 moves down into as shown in figure 10 second height and position, the workpiece 32 of waiting to expose was seated on the loading end 51 because of stopping of loading end 51, by controlling pneumatic shuttle 72 pairs second through holes 428 of second valve, gas flow 54 and first, second groove 55,56 are bled, the feasible workpiece 32 of waiting to expose can firmly be adsorbed on the loading end 51.
As Figure 11 and shown in Figure 12, then, by CD-ROM drive motor 61 starts of controlling driving mechanism 6, the tressel 62 of driving mechanism 6 can drive pedestal 4, carrier 5 and the workpiece 32 of waiting to expose is moved up along arrow II direction by an initial position (as shown in figure 11).The treating on the section 51 of entertaining exposed workpiece 32 when being pressed on light shield 31 bottom surfaces, be placed in the design of the arc groove 410 of first pedestal 41 rotationally by the arcuate engagement portion 420 of second pedestal 42, make carrier 5 can carry out the action of angle fine setting by second pedestal 42, whereby, make the workpiece 32 of waiting to expose entirely to paste in light shield 31 bottom surfaces.In addition, be pressed on pressure on the light shield 31 when arriving a default value by a sensing component (figure do not show) the sensing workpiece 32 of waiting to expose, sensing component can order about CD-ROM drive motor 61 and stop start, the feasible workpiece 32 of waiting to expose can not be continued upwards to pass, at this moment, can treat 32 exposures of exposure workpiece by photohead 23 (as Fig. 3) and light shield 31.After treating that exposure operation is finished, CD-ROM drive motor 61 meeting driving tressels 62 drive pedestals 4, carrier 5 and workpiece 32 are directed downwards along arrow I and move to initial position shown in Figure 11, and workpiece 32 is separated with light shield 31.
Stop second through hole 428, gas flow 54 and first, second groove 55,56 are bled by second valve 72, can remove workpiece 32 and be attracted to state on the loading end 51.Afterwards, by cylinder 9 drive yoke frames 8 by second height and position shown in Figure 10 along moving on to first height and position shown in Figure 9 on the arrow II direction, the thimble 81 of yoke frame 8 can be with the workpiece top from loading end 51, thimble 81 make transfer mechanism to move apart thimble 81 by the workpiece 32 that exposure is good, so that can continue to accept next one workpiece to be exposed.
As Fig. 3, Fig. 4, Fig. 6 and shown in Figure 13, bogey 400 is by the design of removable carrier 5, make operating personnel desire to carry out different size wait to expose the exposure of workpiece 32 ' (as Figure 13) time, make it stop first through hole 425 and groove 422 are bled by controlling first valve 71, then, with carrier 5 up lift make second keeper 53 and first keeper 424 separate after, can make things convenient for and promptly carrier 5 be separated second pedestal 42 of pedestal 4, at this moment, just can replace and have correspondence wait the to expose removable carrier 5 ' of loading end 51 ' of workpiece 32 ' size.Because bogey 400 is when pedestal 4 and driving mechanism 6 are assembled in board 21, and light shield 31 and 23 actions of finishing bit correction of photohead, therefore, after by aforesaid number of assembling steps carrier 5 ' promptly being assembled in second pedestal 42 of pedestal 4, can carry out exposure operation, do not need to carry out again the action of contraposition and correction, can effectively reduce the man-hour of operation.
Conclude above-mentioned, exposure machine 2 of the present invention, design by removable carrier 5, make operating personnel to make things convenient for and promptly carrier 5 is assembled on second pedestal 42 of pedestal 4 or by dismounting on second pedestal 42, whereby, just can replace and have correspondence wait the to expose removable carrier 5 ' of loading end 51 ' of workpiece 32 ' size, can reach purpose of the present invention really.
Claims (10)
1. a bogey is suitable for carrying a workpiece to be exposed; It is characterized in that: this bogey comprises a pedestal, an and removable carrier, this pedestal comprises an end face, and most first keepers that are arranged at this end face, this removable carrier comprises that one can carry this wait to expose workpiece and loading end suitable with its size, one can be connected to the bottom surface of this end face, and most second keepers that are arranged at this bottom surface and removably engage with described first keeper, whereby, when this workpiece size of waiting to expose changes, just can replace this removable carrier that has the loading end of the workpiece size of should waiting to expose.
2. bogey according to claim 1 is characterized in that: respectively this first keeper be reference column or pilot hole one of them, respectively this second keeper be reference column or pilot hole wherein another.
3. bogey according to claim 1, it is characterized in that: described pedestal also comprises one by the groove of this end face to lower recess, reach and hold first through hole that is connected with this groove one by one, this bogey also comprises first valve that is installed on this first through hole other end, this first valve can be bled to this first through hole and this groove, makes this carrier be adsorbed on the end face of this pedestal.
4. bogey according to claim 1, it is characterized in that: described pedestal also comprises holds second through hole that is formed at this end face one by one, this carrier also comprises a gas flow that runs through this loading end and this bottom surface and be communicated with this second through hole, this bogey also comprises second valve that is installed on this second through hole other end, this second valve can be bled to this second through hole and this gas flow, makes workpiece to be exposed be adsorbed on the loading end of this carrier.
5. bogey according to claim 4, it is characterized in that: described carrier comprises that also one is formed at first groove on this loading end, reaching most is formed on this loading end and second groove that is connected with this first groove, this first groove is cruciform and the center is connected with this gas flow, and described second groove is the arrangement of concentric circles ground and has different diameters respectively.
6. bogey according to claim 3, it is characterized in that: described pedestal also comprises holds second through hole that is formed at this end face one by one, described carrier also comprises a gas flow that runs through this loading end and this bottom surface and be communicated with this second through hole, this bogey also comprises second valve that is installed on this second through hole other end, this second valve can be bled to this second through hole and this gas flow, makes this workpiece to be exposed be adsorbed on the loading end of this carrier.
7. bogey according to claim 6, it is characterized in that: described carrier comprises that also one is formed at first groove on this loading end, reaching most is formed on this loading end and second groove that is connected with this first groove, this first groove is cruciform and the center is connected with this gas flow, and described second groove is the arrangement of concentric circles ground and has different diameters respectively.
8. bogey according to claim 6, it is characterized in that: described pedestal comprises that also one is positioned at the accommodation space of this end face below, and most first perforation that are formed at this end face and are communicated with this accommodation space, described carrier comprises that also most run through this loading end and this bottom surface and second boring a hole of being communicated with described first perforation, this bogey also comprises a yoke frame that is extended through in this accommodation space, this yoke frame comprises that most roots are arranged in described first respectively, the thimble of second perforation this workpiece of waiting to expose in order to contact, this yoke frame can pass first height and position of this loading end at each thimble, and each thimble is positioned at to-and-fro movement between second height and position of this loading end below.
9. bogey according to claim 8 is characterized in that: also comprise one and be arranged on this pedestal and can drive this yoke frame reciprocating cylinder between this first height and position and this second height and position.
10. exposure machine with bogey comprises that a board, is arranged at the photohead that is arranged on this board in order to the bearing part, that carries a light shield on this board and is positioned at this bearing part top, and one is suitable for carrying a bogey of waiting to expose workpiece; It is characterized in that: this bogey comprises a pedestal, one driving mechanism, an and removable carrier, this pedestal is arranged at this bearing part below and comprises an end face, and most first keepers that are arranged at this end face, this driving mechanism is installed on this base bottom and can orders about this pedestal and pumps, this removable carrier comprises that one can carry this wait to expose workpiece and loading end suitable with its size, one can be connected to the bottom surface of this end face, and most second keepers that are arranged at this bottom surface and removably engage with described first keeper, whereby, when this workpiece size of waiting to expose changes, just can replace this removable carrier that has the loading end of the workpiece size of should waiting to expose.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101371424A CN102213920A (en) | 2010-04-01 | 2010-04-01 | Carrying device and exposure machine equipped with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101371424A CN102213920A (en) | 2010-04-01 | 2010-04-01 | Carrying device and exposure machine equipped with same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102213920A true CN102213920A (en) | 2011-10-12 |
Family
ID=44745284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101371424A Pending CN102213920A (en) | 2010-04-01 | 2010-04-01 | Carrying device and exposure machine equipped with same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102213920A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104914679A (en) * | 2015-05-18 | 2015-09-16 | 合肥芯硕半导体有限公司 | Multi-functional high-capacity chuck for semiconductor photoetching |
| CN106560914A (en) * | 2015-10-05 | 2017-04-12 | 亿力鑫系统科技股份有限公司 | Bearing device |
| CN110837211A (en) * | 2019-10-15 | 2020-02-25 | 大族激光科技产业集团股份有限公司 | Leveling device of proximity lithography machine |
| CN111103772A (en) * | 2020-01-15 | 2020-05-05 | 江西沃格光电股份有限公司 | Exposure system |
| WO2022088668A1 (en) * | 2020-11-02 | 2022-05-05 | 长鑫存储技术有限公司 | Carrier assembly and glue coating and developing machine |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10121225A (en) * | 1996-10-09 | 1998-05-12 | Shibaura Eng Works Co Ltd | Loading/unloading device for mask |
| CN1313633A (en) * | 2000-03-13 | 2001-09-19 | 株式会社尼康 | Substrate protecting device and exposoure device therewith |
| US20020146841A1 (en) * | 1999-06-30 | 2002-10-10 | Dahm Sueann C. | Testing multiple fluid samples with multiple biopolymer arrays |
| US20040223132A1 (en) * | 2001-08-20 | 2004-11-11 | Nikon Corporation | Mask exchanging method and exposure apparatus |
| CN201122231Y (en) * | 2007-07-17 | 2008-09-24 | 志圣科技（广州）有限公司 | Floating lifting balancing device of LCD exposure machine ball seat |
-
2010
- 2010-04-01 CN CN2010101371424A patent/CN102213920A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10121225A (en) * | 1996-10-09 | 1998-05-12 | Shibaura Eng Works Co Ltd | Loading/unloading device for mask |
| US20020146841A1 (en) * | 1999-06-30 | 2002-10-10 | Dahm Sueann C. | Testing multiple fluid samples with multiple biopolymer arrays |
| CN1313633A (en) * | 2000-03-13 | 2001-09-19 | 株式会社尼康 | Substrate protecting device and exposoure device therewith |
| US20040223132A1 (en) * | 2001-08-20 | 2004-11-11 | Nikon Corporation | Mask exchanging method and exposure apparatus |
| CN201122231Y (en) * | 2007-07-17 | 2008-09-24 | 志圣科技（广州）有限公司 | Floating lifting balancing device of LCD exposure machine ball seat |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104914679A (en) * | 2015-05-18 | 2015-09-16 | 合肥芯硕半导体有限公司 | Multi-functional high-capacity chuck for semiconductor photoetching |
| CN106560914A (en) * | 2015-10-05 | 2017-04-12 | 亿力鑫系统科技股份有限公司 | Bearing device |
| CN110837211A (en) * | 2019-10-15 | 2020-02-25 | 大族激光科技产业集团股份有限公司 | Leveling device of proximity lithography machine |
| CN110837211B (en) * | 2019-10-15 | 2022-02-18 | 大族激光科技产业集团股份有限公司 | Leveling device of proximity lithography machine |
| CN111103772A (en) * | 2020-01-15 | 2020-05-05 | 江西沃格光电股份有限公司 | Exposure system |
| WO2022088668A1 (en) * | 2020-11-02 | 2022-05-05 | 长鑫存储技术有限公司 | Carrier assembly and glue coating and developing machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102213920A (en) | Carrying device and exposure machine equipped with same | |
| EP2998088A1 (en) | Machining workstation for plates of stone, marble, synthetic material, or the like, with a sacrificial working plane | |
| CN101218067A (en) | Enhanced end effector arm arrangement for CMP pad conditioning | |
| CN204262952U (en) | A kind of iron pan polishing system | |
| CN108176902A (en) | Gearburr removing technique | |
| CN201140349Y (en) | Tile shaped magnet automatic chamfer angle grinder | |
| CN103447952B (en) | A kind of card fast polishing device of disc type workpiece and method of work thereof | |
| CN102601613A (en) | Assembly tooling for diesel engine valve collet | |
| CN105923390A (en) | Automatic oil edge machine and positioning device thereof | |
| CN102390089B (en) | Natural stone multi-line full-hydraulic cutting machine tool | |
| KR101973941B1 (en) | Cutting apparatus for furniture panel | |
| CN201833166U (en) | Automatic screw-locking machine | |
| CN114226909B (en) | Profiling device and method for cylindrical steel structure | |
| CN112894515B (en) | Semiconductor wafer surface treatment device and treatment method | |
| CN209793307U (en) | Shock-proof type flat grinder | |
| CN201669606U (en) | Water drill end surface grinding and polishing machine | |
| JP2007118355A (en) | Scribing device | |
| CN101811330B (en) | A kind of stone bush-hammered surface hammering machine | |
| CN107214616A (en) | A kind of compressor piston processes Special Automatic honing machine | |
| JP4890104B2 (en) | Scribing method and apparatus | |
| CN207290543U (en) | Intelligent spider formula robot ambulation machining center | |
| CN112611528A (en) | Vibration driving device for experiment table | |
| CN204036215U (en) | Sanding apparatus in a kind of sander of lock | |
| CN101934475B (en) | Horizontal rotary continuous processing equipment for milling, grinding and polishing | |
| US3058267A (en) | Automatic bit grinder |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20111012 |