CN201115929Y - Dressing controllable type ultraprecise polishing machine - Google Patents
Dressing controllable type ultraprecise polishing machine Download PDFInfo
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- CN201115929Y CN201115929Y CNU2007201916684U CN200720191668U CN201115929Y CN 201115929 Y CN201115929 Y CN 201115929Y CN U2007201916684 U CNU2007201916684 U CN U2007201916684U CN 200720191668 U CN200720191668 U CN 200720191668U CN 201115929 Y CN201115929 Y CN 201115929Y
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- finishing
- basal disc
- driving mechanism
- drive motor
- polishing disk
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Abstract
The utility model relates to a truing-controllable ultraprecise polishing machine which consists of a base, a polishing disk, a polishing disk drive motor, a speed-measuring mechanism, an intelligent control platform, a truing ring, linear guide rails, a reciprocating motion driving mechanism, a radial movement drive motor and a rotating drive motor. A supporting plate is arranged on the base, and a basal plate retainer is arranged on the supporting plate. The two linear guide rails are horizontally arranged below the supporting plate, the radial movement drive motor is fixed on the supporting plate, the radial movement drive motor is connected with the reciprocating driving motion mechanism through transmission, the reciprocating motion driving mechanism can be sleeved on the linear guide rails in a horizontal sliding way, the truing ring is arranged below the reciprocating motion driving mechanism, the rotating drive motor is fixed and connected with the reciprocating motion driving mechanism, and the output shaft of the rotating drive motor is connected with the truing ring in a transmitting way, the truing ring is positioned above the area beyond the area covered by the basal disk of the polishing disk. The truing device for a polishing cushion realizes an online truing of the planimetric accuracy of a polishing cushion and shortens the processing cycle. The surface of a processed workpiece is provided with an excellent evenness degree.
Description
Technical field
The utility model relates to the polishing machine field, especially a kind of super precision polishing machine (or claiming grinder).
Background technology
Traditional grinding, polishing machine in the process of processing work, plane precision that can't online trimming polished dish (abrasive disk), along with constantly carrying out of process, the plane precision of polishing disk can be worse and worse, and adopt off-line type finishing plane precision.Present polishing machine (grinder) is right and wrong intellectuality or semi-intelligentization all, all can't carry out intellectuality accurately to the load that applies on the rotating speed of polishing disk and position, workpiece and the polishing disk finishing ring controls, thereby be difficult to guarantee that workpiece obtains high plane precision in process, also be difficult in and obtain high surface quality in the short time.The shortcoming that exists: the plane precision that 1, can't realize online trimming polished dish; 2, prolonged the process-cycle; 3, can not guarantee the flatness of polishing disk fully.
Find that through experimental result polishing disk surfacing improperly will cause the deterioration on polishing disk surface, more will cause the decline of clearance, and find that by the measurement result of surface of the work surface of the work exists great non-uniformity after grinding.
The utility model content
Can't realize that in order to overcome existing polishing machine the plane precision of online trimming polished pad, process-cycle are long, the deficiency of the great non-uniformity of the surperficial existence of processed workpiece, the utility model provides a kind of plane precision of realizing online trimming polished pad, makes the finishing controlled ultraprecise polisher that the process-cycle shortens, the processed workpiece surface has the good homogeneous degree.
The technical scheme that its technical problem that solves the utility model adopts is:
A kind of finishing controlled ultraprecise polisher, comprise support, polishing disk, the polishing disk drive motors, velocity measurement mechanisms and intelligent control platform, described polishing disk is installed on the support by main shaft, the output shaft of described polishing disk drive motors is connected with spindle drive, described main shaft and velocity measurement mechanisms are in transmission connection, mounting bracket plate on the described support, described supporting plate is installed the basal disc retainer, described basal disc retainer is provided with segmental arc, the radian of described segmental arc is not less than pi/2, on the described segmental arc friction pulley is installed, the friction pulley number is at least 2, described basal disc embeds described segmental arc and abuts against on the friction pulley, and gapped between described basal disc and the described segmental arc, and described basal disc is positioned at the top of polishing disk; Described super precision polishing machine also comprises the finishing ring, line slideway, move back and forth driving mechanism, move radially drive motors and rotary drive motor, described two line slideway levels are installed in the below of supporting plate, the described drive motors that moves radially is installed on the supporting plate, the described drive motors that moves radially is in transmission connection with the reciprocating motion driving mechanism, described reciprocating motion driving mechanism can be sleeved on the line slideway horizontally slidingly, described finishing ring is installed in the below that moves back and forth driving mechanism, described rotary drive motor is fixedlyed connected with the reciprocating motion driving mechanism, and described finishing ring is positioned at the top of the basal disc covering of polishing disk with exterior domain; Described intelligent control platform connects polishing disk drive motors, velocity measurement mechanisms, moves radially drive motors and rotary drive motor.
As preferred a kind of scheme: described reciprocating motion driving mechanism below mounting sleeve, the finishing ring is installed in described sleeve pipe lower end, described polishing pad finishing mechanism also comprises the finishing charger, described finishing charger is vertically mounted on and moves back and forth on the driving mechanism, described finishing charger connects pressure adjusting screw, described pressure adjusting screw is connected with the global head of finishing, and described pressure adjusting screw is installed in the sleeve pipe, and described intelligent control platform connects the finishing charger.
Further, described basal disc retainer is installed in the below of line slideway, and the basal disc charger is installed on the basal disc retainer, and described basal disc loads transposition and connects pressure adjusting screw, described pressure adjusting screw is connected with the basal disc bulb, and described intelligent control platform connects the basal disc charger.
As preferred another kind of scheme: described reciprocating motion driving mechanism comprises and moves radially distance adjustment plate and stroke adjustment plate, the described output shaft that moves radially drive motors with move radially the distance adjustment plate and fixedly connected, a described end that moves radially the distance adjustment plate cooperates with groove on the stroke adjustment plate by roller, described stroke adjustment plate can be sleeved on the line slideway horizontally slidingly, described finishing ring is installed in the below of stroke adjustment plate, and described rotary drive motor is fixedlyed connected with the stroke adjustment plate.
Further, described groove has more than two at least, and described plural at least groove is the layout that is parallel to each other; The described distance adjustment plate that moves radially is provided with rectangular channel, and the described output shaft that moves radially drive motors is fixedly mounted on the described rectangular channel by screw.
Described finishing charger and basal disc charger are Pneumatic loading or hydraulic loading device.
Described velocity measurement mechanisms is the grating TT﹠C system.
The output shaft of described polishing disk drive motors is provided with driving gear, described driving gear by the driven gear of band connection synchronously, and described driven gear is installed on the main shaft; Described main shaft bottom connects additional gear, and described additional gear connects the power shaft of velocity measurement mechanisms by driving-belt.
Described super precision polishing machine comprises at least one finishing ring and a basal disc, and described each finishing ring, basal disc lay respectively at the zones of different of polishing disk.The finishing ring herein and the quantity of basal disc retainer depend on actual processing needs, depend on finishing ring, basal disc and the triangular size of polishing disk simultaneously, can be two pairs, three pairs, four pairs and how right.
The output shaft of described rotary drive motor is provided with driving gear, described driving gear by the driven gear of band connection synchronously, described driven gear be installed on the described reciprocating motion driving mechanism the axle on, described driven gear is socketed with dead man, the described dead man while, also above the socket finishing ring, described dead man had more than three in 2 π radian scopes at least.
Technical conceive of the present utility model is: increase the finishing ring on polishing machine, driving the finishing ring by finishing ring rotary drive motor rotates, finishing ring rotary drive motor is fixedlyed connected with the distance adjustment plate that moves radially that moves back and forth driving mechanism, the rectilinear motion track is installed on the supporting plate, be fixedly mounted on burring machine on the supporting plate and move radially motor-driven and move back and forth driving mechanism and on the rectilinear motion track, move, radially move back and forth along polishing disk thereby drive the finishing ring.Press power switch on intelligent control panel, according to different polishing disks, set corresponding program, (1) regulates the rotary speed of rotary drive motor, drives the finishing ring by belt pulley and rotates; (2) regulate the rotary speed of radial drive motor, drive the finishing ring and on the polishing disk radial direction, move, and in different zones the corresponding time of stop.According to the size of polishing pad radius, what regulate to move back and forth driving mechanism moves radially the installation of distance adjustment plate on motor shaft, can make the finishing ring do the automatic linear back and forth movement in predetermined stroke section; The velocity of rotation of change finishing ring and straight reciprocating motion speed, the combination of the time of staying, in conjunction with the size of adjusting finishing pressure, satisfied different sizes, the finishing requirement of different materials polishing pad.The finishing ring has the bottom surface of chip area and the friction of pad interface is carried out online finishing to the polishing card, and intelligence control system and high-accuracy grating TT﹠C system have been adopted, rotating speed and finishing ring to the finishing ring carry out high-precision control in the time that the polishing disk zones of different stops, and can obtain the uniformity of high machining accuracy, surface quality and product quality under the process matched therewith condition.
Under a specific finishing program, by trying to achieve the VELOCITY DISTRIBUTION on the surface of the work, and then calculate the average velocity distributions of radial direction, and in order to check the relation between average speed and the clearance, this pattern can be used for finding out the finishing program of wheel face optimum.
Pad interface is distinguished into several zones, each zone is that the distance of encircling between the central point with the central point of polishing pad and finishing is a confining spectrum, and set and repair the relative time of staying of ring in each zone, then the finishing ring will move around at the radial direction of polishing pad with the relative time of staying in each zone according to the rotating speed that sets, pressure, thereby make polishing pad reach the purpose of smooth finishing, i.e. finishing program is accompanied by the polishing program and carries out simultaneously.Finishing ring sweeps in the setting range radially of polishing disk back and forth, and then removes the abrasive particles that is deposited on the pad interface, the chip that surface of the work produces after wearing away, and strike off the aging structure of pad interface.
Based on the planetary motion design principle, guarantee that the workpiece machining surface each point equates in the linear velocity with respect to polishing disk, and the polishing movement locus does not repeat.Finishing ring work in-process is not only done spinning motion, but also move radially along polishing pad, and make finishing ring each zone time of staying difference at polishing pad by intelligence control system, and make its movement locus can cover whole polishing disk surface better, reach even finishing to polishing disk.This motion mode that strikes off the polishing pad working surface constantly, can make polishing pad keep best duty all the time, the clearance of workpiece surface to be machined can remain in the scope of fixing, can be after long-term use because of polishing pad, pad interface is worn and torn inconsistent everywhere, and cause workpiece surface to be machined each point removal amount that notable difference is arranged, produce the injustice of workpiece surface to be machined.
The beneficial effects of the utility model mainly show: plane precision, the very high planar processing precision of acquisition that 1, can realize online trimming polished dish; 2, shorten the process-cycle of workpiece; 3, can repair the depth of parallelism: adopt the depth of parallelism of eccentric load correction workpiece, also can utilize it to process the workpiece of certain gradient; 4, adjustable-speed, speed control mode advanced person: can realize stepless speed regulation, and adopt the abrasive disk speed control mode of " low speed starting-stepless speed-raising-constant speed processing-low speed finishing-low speed stops ", can guarantee the technological requirement of ultraprecision grinding polishing processing; 5, total revolution is accurately controlled: adopt ultraprecise grating observation and control technology, the precision of the total revolution of polishing disk is controlled at ± 1 ° in, to guarantee that the processing capacity overall error is in 1nm; 6, the finishing ring is accurately controlled with workpiece load: adopt intelligence sensor, medium pressure in closed-loop control finishing ring active cylinder (or hydraulic cylinder) and the basal disc active cylinder (or hydraulic cylinder), precision can reach 0.02%, can be precise and stable load on control finishing ring and the basal disc, satisfy the Precision Machining requirement; 7, intelligent expert database: adopt best processing technology parameter expert database control system, and then guarantee the high-quality and the uniformity of processing, can get rid of the adverse effect of manual operation effectively to process.
Description of drawings
Fig. 1 is the front view of trimming device for polishing cushion in polishing machine.
Vertical view when Fig. 2 is finishing ring, basal disc motion.
Fig. 3 is the schematic diagram that moves back and forth driving mechanism.
Fig. 4 is that the rotation of finishing ring drives schematic diagram
The specific embodiment
Below in conjunction with accompanying drawing the utility model is further described.
With reference to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, a kind of finishing controlled ultraprecise polisher, comprise support 5, polishing disk 8, polishing disk drive motors 1, velocity measurement mechanisms 6 and intelligent control platform 2, described polishing disk 8 is installed on the support 5 by main shaft, the output shaft of described polishing disk drive motors 1 is connected with spindle drive, described main shaft and velocity measurement mechanisms 6 are in transmission connection, mounting bracket plate 15 on the described support 5, described supporting plate 15 is installed basal disc retainer 12, described basal disc retainer 12 is provided with segmental arc, the radian of described segmental arc is not less than pi/2, friction pulley 11 is installed on the described segmental arc, and friction pulley 11 numbers are at least 2, and basal disc 10 embeds described segmental arc and abuts against on the friction pulley 11, and gapped between described basal disc 10 and the described segmental arc, described basal disc 10 is positioned at the top of polishing disk 8; Described super precision polishing machine also comprises finishing ring 25, line slideway 14, radially move back and forth driving mechanism, move radially drive motors 17 and rotary drive motor 16, described two line slideway 14 levels are installed in the below of supporting plate 15, the described drive motors 17 that moves radially is installed on the supporting plate 15, the described drive motors 17 that moves radially is in transmission connection with the reciprocating motion driving mechanism, described reciprocating motion driving mechanism can be sleeved on the line slideway 14 horizontally slidingly, described finishing ring 25 is installed in the below that moves back and forth driving mechanism, described rotary drive motor 16 is fixedlyed connected with the reciprocating motion driving mechanism, and described finishing ring 25 is positioned at the top of the basal disc covering of polishing disk with exterior domain; Described intelligent control platform connects polishing disk drive motors, velocity measurement mechanisms, moves radially drive motors and rotary drive motor.
The below mounting sleeve of described reciprocating motion driving mechanism, finishing ring 25 is installed in described sleeve pipe lower end, described polishing pad finishing mechanism also comprises the finishing charger, described finishing charger is vertically mounted on and moves back and forth on the driving mechanism, described finishing charger connects pressure adjusting screw, described pressure adjusting screw encircles 25 for bulb is connected with finishing, and described pressure adjusting screw is installed in the sleeve pipe, and described intelligent control platform connects the finishing charger.
Described basal disc retainer 12 is installed in the below of line slideway 14, the basal disc charger is installed on the basal disc retainer 12, described basal disc loads transposition and connects pressure adjusting screw, and described pressure adjusting screw is connected with basal disc 10 bulbs, and described intelligent control platform connects the basal disc charger.
Described reciprocating motion driving mechanism comprises and moves radially distance adjustment plate 19 and stroke adjustment plate 21, the described output shaft 18 that moves radially drive motors 17 with move radially distance adjustment plate 21 and fixedly connected, a described end that moves radially distance adjustment plate 21 cooperates with groove on the stroke adjustment plate 21 by roller 20, described stroke adjustment plate 21 can be sleeved on the line slideway 14 horizontally slidingly, described finishing ring 25 is installed in the below of stroke adjustment plate 21, and described rotary drive motor 16 is fixedlyed connected with stroke adjustment plate 21.
Described groove has more than two at least, and described plural at least groove is the layout that is parallel to each other; The described distance adjustment plate 19 that moves radially is provided with rectangular channel, and the described output shaft that moves radially drive motors 17 is fixedly mounted on the described rectangular channel by screw.
Described finishing charger and basal disc charger are Pneumatic loading or hydraulic loading device.Described velocity measurement mechanisms 6 is the grating TT﹠C system.The output shaft of described polishing disk drive motors 1 is provided with driving gear, described driving gear by the driven gear of band connection synchronously, and described driven gear is installed on the main shaft; Described main shaft bottom connects additional gear, and described additional gear connects the power shaft of velocity measurement mechanisms by driving-belt.
Described super precision polishing machine comprises at least one finishing ring and a basal disc, and described each finishing ring, basal disc lay respectively at the zones of different of polishing disk.The finishing ring herein and the quantity of basal disc retainer depend on actual processing needs, depend on finishing ring, basal disc and the triangular size of polishing disk simultaneously, can be two pairs, three pairs, four pairs and how right.
The output shaft of described rotary drive motor 16 is provided with driving gear, described driving gear by the driven gear of band connection synchronously, described driven gear be installed on the described reciprocating motion driving mechanism the axle IV on, described driven gear is socketed with dead man 24, described dead man 24 is simultaneously also above the socket finishing ring 25, described dead man has more than three in 2 π radian scopes at least
Described basal disc retainer 12 is installed on the rectilinear orbit 14 of supporting plate 15, and described supporting plate 15 is installed on the column 26, and described column 26 is fixedly mounted on the support 5.
Described velocity measurement mechanisms 6 is the grating TT﹠C system.The output shaft of described polishing disk drive motors 1 is provided with driving gear, described driving gear by the driven gear of band connection synchronously, and described driven gear is installed on the main shaft; Described main shaft bottom connects additional gear, and described additional gear connects the power shaft of velocity measurement mechanisms by driving-belt.Described polishing disk drive motors 1 is a direct current generator.
The concrete course of work of present embodiment is: carry out stepless time adjustment by 2 pairs of polishing disk drive motors of intelligent control platform 1, the polishing disk drive motors drives main shaft II rotation by the transmission mechanism (structures such as available synchronous band, gear) on axle I and the axle II; The main shaft II of leading up to drives polishing disk 8 rotations, and polishing disk 8 rotates by the basal disc 10 that friction drives on the polishing disk simultaneously, and workpiece 9 is equipped with in basal disc 10 bottom surfaces; To be main shaft II and the transmission mechanism 4 (structures such as available synchronous band, gear) of axle on the III pass to the speed of main shaft II on the grating TT﹠C system on another road, and the grating TT﹠C system is measured its motor rotational parameters, and feeds back to intelligent control platform 2.In addition, intelligent control platform 2 control burring machines move radially drive motors 17 rotations, the output shaft 18 that burring machine moves radially drive motors drives to install and moves radially 19 rotations of distance adjustment plate on the motor shaft, and the roller 20 that moves radially distance adjustment plate 19 1 ends also rotates around the axle center of drive motors 17 output shafts 18.Roller 20 matches with the groove of stroke adjustment plate 21, because stroke adjustment plate 21 is slidably mounted on the line slideway 14, so when roller 20 rotates with motor shaft 18, roller 20 promotes stroke adjustment plate 21 and does linear reciprocating motion along line slideway 14 in the groove of stroke adjustable plate 21, rotary drive motor 16 is fixed together with the stroke adjustment plate 21 that moves back and forth driving mechanism, be slidingly mounted on the line slideway 14, they all can be free to slide on line slideway 14, thereby drive finishing ring 25 and move radially along polishing disk 8.Intelligent control platform 2 control finishing ring rotary drive motors 16 rotate, transmission mechanism 23 (structures such as available synchronous band, gear) on finishing ring rotary drive motor 16 driving shaft V and the axle IV is socketed in drive dead man 24 rotations of the driven gear on the IV, dead man 24 lower ends are socketed in above the finishing ring 25, thereby drive 25 rotations of finishing ring.Intelligent control platform 2 is by pressure sensor, open and close the pressure that medium channel is controlled finishing ring active cylinder (or hydraulic cylinder 22) and basal disc active cylinder (or hydraulic cylinder) 13 medium by the control magnetic valve, and then accurate control is applied to the load on finishing ring 25 and the basal disc 10.And for example shown in Figure 2, main shaft II drives polishing disk 8 and rotates, drive basal disc 10 via the frictional force on the polishing disk and rotate, the friction pulley 11 that basal disc 10 drives on the basal disc retainer 12 rotates, and while friction pulley 11 reacts on basal disc 10 makes basal disc make spinning motion in basal disc retainer 12.Finishing ring 25 drives by moving back and forth driving mechanism, and the bottom surface that has chip area by finishing ring 25 is carried out online finishing with the friction of polishing card to the polishing card.
Finishing ring employing corrosion-resistant material such as brass, stainless steel, pottery etc. are made.Basal disc 10 stably rotates in the ring of basal disc retainer 12, and has adopted a bottom to have the finishing ring 25 of chip area on relative position, and finishing ring 25 drives and can move radially along polishing disk moving back and forth driving mechanism.Basal disc 10 working stability ground are rotated, on the other hand finishing ring 25 can be in process constantly online trimming polished dish 8 surfaces, finishing ring 25 is because the surperficial each point linear velocity difference of polishing disk 8, and can move radially on polishing disk 8 surfaces, be implemented in the finishing ring by finishing ring active cylinder (or hydraulic cylinder) 22 and go up imposed load, the better ideal of finishing effect like this.Basal disc 10 (workpiece 9 is equipped with in its bottom surface) is placed in the basal disc retainer, is implemented in loading on the workpiece by the basal disc active cylinder (or hydraulic cylinder) 13 on the basal disc.After polishing fluid adds from polishing disk 8, can 7 outflows along the polishing fluid exit.Regulate basal disc retainer 12 in the position of rectilinear orbit, can make basal disc retainer 12 drive basal disc 10 and move radially, can regulate the distance at basal disc 10 centers and polishing disk 8 centers, to obtain high as far as possible plane precision along polishing disk 8.
Present embodiment can be applicable to quartz crystal, piezo-electric crystal, Si substrate, jewel sheet, GaAs, optical glass, magnetic material, structural ceramic material, the plane mirror ultrafinish and the polishing of hard crisp nonmetallic materials test specimen and metal material, can carry out the grinding and the polishing of following material in addition:
(1), the plane mirror ultrafinish and the polishing of high-precision metal measurer (as slip gauge) and machine components.
(2), the EPMA of mineral estimates AME, physical property test, analysis such as the metallographic plane mirror ultrafinish and the polishing of test portion.
(3), composite material interface, the not damaged angle of finished surface metamorphic layer is ground.
(4), TEM grinds with the preparation of thin slice.
Claims (10)
1, a kind of finishing controlled ultraprecise polisher, comprise support, polishing disk, the polishing disk drive motors, velocity measurement mechanisms and intelligent control platform, described polishing disk is installed on the support by main shaft, the output shaft of described polishing disk drive motors is connected with spindle drive, described main shaft and velocity measurement mechanisms are in transmission connection, mounting bracket plate on the described support, described supporting plate is installed the basal disc retainer, described basal disc retainer is provided with segmental arc, the radian of described segmental arc is not less than pi/2, on the described segmental arc friction pulley is installed, the friction pulley number is at least 2, basal disc embeds described segmental arc and abuts against on the friction pulley, and gapped between described basal disc and the described segmental arc, and described basal disc is positioned at the top of polishing disk; It is characterized in that:
Described super precision polishing machine also comprises the finishing ring, line slideway, move back and forth driving mechanism, move radially drive motors and rotary drive motor, described two line slideway levels are installed in the below of supporting plate, the described drive motors that moves radially is installed on the supporting plate, the described drive motors that moves radially is in transmission connection with the reciprocating motion driving mechanism, described reciprocating motion driving mechanism can be sleeved on the line slideway horizontally slidingly, described finishing ring is installed in the below that moves back and forth driving mechanism, described rotary drive motor is fixedlyed connected with the reciprocating motion driving mechanism, the output shaft of described rotary drive motor is in transmission connection with the finishing ring, and described finishing ring is positioned at the top of the basal disc covering of polishing disk with exterior domain;
Described intelligent control platform connects polishing disk drive motors, velocity measurement mechanisms, moves radially drive motors and rotary drive motor.
2, finishing controlled ultraprecise polisher as claimed in claim 1, it is characterized in that: described reciprocating motion driving mechanism below mounting sleeve, the finishing ring is installed in described sleeve pipe lower end, described polishing pad finishing mechanism also comprises the finishing charger, described finishing charger is vertically mounted on and moves back and forth on the driving mechanism, described finishing charger connects pressure adjusting screw, described pressure adjusting screw is connected with the global head of finishing, described pressure adjusting screw is installed in the sleeve pipe, and described intelligent control platform connects the finishing charger.
3, finishing controlled ultraprecise polisher as claimed in claim 2, it is characterized in that: described basal disc retainer is installed in the below of line slideway, the basal disc charger is installed on the basal disc retainer, described basal disc loads transposition and connects pressure adjusting screw, described pressure adjusting screw is connected with the basal disc bulb, and described intelligent control platform connects the basal disc charger.
4, as the described finishing controlled ultraprecise polisher of one of claim 1-3, it is characterized in that: described reciprocating motion driving mechanism comprises and moves radially distance adjustment plate and stroke adjustment plate,
The described output shaft that moves radially drive motors with move radially the distance adjustment plate and fixedly connected, a described end that moves radially the distance adjustment plate cooperates with groove on the stroke adjustment plate by roller, described stroke adjustment plate can be sleeved on the line slideway horizontally slidingly, described finishing ring is installed in the below of stroke adjustment plate, and described rotary drive motor is fixedlyed connected with the stroke adjustment plate.
5, finishing controlled ultraprecise polisher as claimed in claim 4 is characterized in that: described groove has more than two at least, and described plural at least groove is the layout that is parallel to each other; The described distance adjustment plate that moves radially is provided with rectangular channel, and the described output shaft that moves radially drive motors is fixedly mounted on the described rectangular channel by screw.
6, finishing controlled ultraprecise polisher as claimed in claim 3 is characterized in that: described finishing charger and basal disc charger are Pneumatic loading or hydraulic loading device.
7, finishing controlled ultraprecise polisher as claimed in claim 4 is characterized in that: described velocity measurement mechanisms is the grating TT﹠C system.
8, as the described finishing controlled ultraprecise polisher of one of claim 1-3, it is characterized in that: the output shaft of described polishing disk drive motors is provided with driving gear, described driving gear by the driven gear of band connection synchronously, and described driven gear is installed on the main shaft; Described main shaft bottom connects additional gear, and described additional gear connects the power shaft of velocity measurement mechanisms by driving-belt.
9, finishing controlled ultraprecise polisher as claimed in claim 8 is characterized in that: described super precision polishing machine comprises at least one finishing ring and a basal disc, and described each finishing ring, basal disc lay respectively at the zones of different of polishing disk.
10, finishing controlled ultraprecise polisher as claimed in claim 4, it is characterized in that: the output shaft of described rotary drive motor is provided with driving gear, described driving gear by the driven gear of band connection synchronously, described driven gear be installed on the described reciprocating motion driving mechanism the axle on, described driven gear is socketed with dead man, the described dead man while, also above the socket finishing ring, described dead man had more than three in 2 π radian scopes at least.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201916684U CN201115929Y (en) | 2007-11-20 | 2007-11-20 | Dressing controllable type ultraprecise polishing machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201916684U CN201115929Y (en) | 2007-11-20 | 2007-11-20 | Dressing controllable type ultraprecise polishing machine |
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| CN201115929Y true CN201115929Y (en) | 2008-09-17 |
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| CNU2007201916684U Expired - Lifetime CN201115929Y (en) | 2007-11-20 | 2007-11-20 | Dressing controllable type ultraprecise polishing machine |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100493846C (en) * | 2007-11-20 | 2009-06-03 | 浙江工业大学 | Finishing controlled ultra-precise polisher |
| CN102729134A (en) * | 2012-07-21 | 2012-10-17 | 深圳市华测检测技术股份有限公司 | Portable automatic grinding and polishing equipment |
| CN106954979A (en) * | 2017-04-28 | 2017-07-18 | 叶凯荣 | A kind of pendulous device in baby's electric swing |
| CN107139051A (en) * | 2017-06-09 | 2017-09-08 | 赵咪咪 | A kind of timber processing sanding apparatus |
| CN109664179A (en) * | 2019-01-02 | 2019-04-23 | 中国科学院上海光学精密机械研究所 | Annular polishing machine |
| CN110712091A (en) * | 2019-10-29 | 2020-01-21 | 安徽坤源铝业有限公司 | Aluminum flat plate blank deburring device |
-
2007
- 2007-11-20 CN CNU2007201916684U patent/CN201115929Y/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100493846C (en) * | 2007-11-20 | 2009-06-03 | 浙江工业大学 | Finishing controlled ultra-precise polisher |
| CN102729134A (en) * | 2012-07-21 | 2012-10-17 | 深圳市华测检测技术股份有限公司 | Portable automatic grinding and polishing equipment |
| CN106954979A (en) * | 2017-04-28 | 2017-07-18 | 叶凯荣 | A kind of pendulous device in baby's electric swing |
| CN107139051A (en) * | 2017-06-09 | 2017-09-08 | 赵咪咪 | A kind of timber processing sanding apparatus |
| CN109664179A (en) * | 2019-01-02 | 2019-04-23 | 中国科学院上海光学精密机械研究所 | Annular polishing machine |
| CN110712091A (en) * | 2019-10-29 | 2020-01-21 | 安徽坤源铝业有限公司 | Aluminum flat plate blank deburring device |
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