CN201115926Y - Dressing ring type intelligent ultraprecise polishing mahcine - Google Patents
Dressing ring type intelligent ultraprecise polishing mahcine Download PDFInfo
- Publication number
- CN201115926Y CN201115926Y CNU2007201923495U CN200720192349U CN201115926Y CN 201115926 Y CN201115926 Y CN 201115926Y CN U2007201923495 U CNU2007201923495 U CN U2007201923495U CN 200720192349 U CN200720192349 U CN 200720192349U CN 201115926 Y CN201115926 Y CN 201115926Y
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- ring
- finishing
- finishing ring
- polishing machine
- truing
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Abstract
The utility model relates to a truing-ring-type intelligent ultraprecise polishing machine which consists of a frame, a polishing disk, a drive motor, a speed-measuring mechanism and an intelligent control platform. The polishing disk is arranged on the frame through a main shaft, the output shaft of the drive motor is connected with the main shaft through transmission, the main shaft is connected with the speed-measuring mechanism through transmission, and the intelligent control platform is connected with the drive motor and the speed-measuring mechanism. The ultraprecise polishing machine still consists of a truing ring and a truing ring retainer. A basal disk used for clamping workpieces is arranged inside the truing ring, the truing ring is positioned above the polishing disk, the truing ring retainer is arranged on the frame, the truing ring retainer is provided with an arc section, the radian of the arc section is no smaller than half of the Pi value, two friction wheels are respectively arranged on both ends of the arc section, the truing ring is embedded into the arc section and leans against the two friction wheels, and a clearance is formed between the truing ring and the arc section. The truing-ring-type intelligent ultraprecise polishing machine can realize an online truing of the planimetric accuracy of a polishing disk, obtain a higher plane-processing accuracy and shorten the processing cycle.
Description
Technical field
The utility model relates to the polishing machine field, especially a kind of super precision polishing machine (or claiming grinder).
Background technology
Traditional grinding, polishing machine in the process of processing work, be can't online trimming polished dish (abrasive disk) plane precision, along with constantly carrying out of process, the plane precision of polishing disk can adopt off-line type finishing plane precision worse and worse; Present polishing machine (grinder) is right and wrong intellectuality or semi-intelligentization all, rotating speed and position to polishing disk all can't be carried out intellectuality control accurately, thereby be difficult to guarantee that workpiece obtains high plane precision in process, also be difficult in and obtain high surface quality in the short time.The shortcoming that exists: the plane precision that 1, can't realize online trimming polished dish; 2, prolonged the process-cycle
Summary of the invention
For the plane precision that can't realize online trimming polished dish, the long deficiency of process-cycle that overcomes existing Ultraprecise polished dish, the utility model provides a kind of very high planar processing precision, the short trimming ring type intelligent super precision polishing machine of process-cycle of plane precision, acquisition that can realize online trimming polished dish.
The technical scheme that its technical problem that solves the utility model adopts is:
A kind of trimming ring type intelligent super precision polishing machine, comprise support, polishing disk, drive motors, velocity measurement mechanisms and intelligent control platform, described polishing disk is installed on the support by main shaft, the output shaft of described drive motors is connected with spindle drive, described main shaft and velocity measurement mechanisms are in transmission connection, described intelligent control platform connects drive motors and velocity measurement mechanisms, described super precision polishing machine also comprises the finishing ring, finishing ring retainer, the basal disc that is used to clamp workpiece is installed in the described finishing ring, described finishing ring is positioned at the top of described polishing disk, described finishing ring retainer is installed on the support, described conditioning ring retainer is provided with segmental arc, the radian of described segmental arc is not less than pi/2, the two ends of described segmental arc are provided with friction pulley, described finishing ring embeds described segmental arc and abuts against on two friction pulleys, and gapped between described finishing ring and the described segmental arc.
As preferred a kind of scheme: described super precision polishing machine comprises at least two pairs of finishing rings and finishing ring retainer, described each finishing ring and finishing ring retainer are laid respectively at the zones of different of described polishing disk top.
Further, described finishing ring retainer is installed on the column, and described column is fixedly mounted on the support.
As preferred another kind of scheme: described velocity measurement mechanisms is the grating TT﹠C system.
Further, the output shaft of described drive motors is provided with driving gear, described driving gear by the driven gear of band connection synchronously, and described driven gear is installed on the main shaft; Described main shaft bottom connects additional gear, and described additional gear connects the power shaft of velocity measurement mechanisms by driving-belt.
Technical conceive of the present utility model is: increase the finishing ring on polishing machine, driving the finishing ring via the frictional force on the polishing disk rotates, in the friction pulley that is equipped with on the moving finishing ring of the finishing endless belt retainer of basal disc (workpiece is equipped with in this basal disc bottom surface) rotate, friction pulley reacts on to repair to encircle and makes the finishing ring make spinning motion in finishing encircles retainer simultaneously, and basal disc is made spinning motion in repairing ring.The bottom surface that has chip area by this finishing ring is carried out online finishing with the friction of polishing card to the polishing card; And adopted intelligence control system and high-accuracy grating TT﹠C system, the rotating speed of polishing disk has been carried out high-precision control, under the process matched therewith condition, can obtain the uniformity of high machining accuracy, surface quality and product quality.
Based on the planetary motion design principle, guarantee that the finishing ring equates with the linear velocity of workpiece machining surface each point with respect to polishing disk, and the polishing movement locus does not repeat.Finishing ring work in-process, its movement locus can cover whole polishing disk surface, this motion mode that strikes off the polishing disk working surface constantly, can make polishing disk keep preferable duty all the time, the material removal rate of workpiece surface to be machined can remain in the scope of fixing, can be after long-term use because of polishing disk, and the polishing disk surface is worn and torn inconsistent everywhere, and cause workpiece surface to be machined each point removal amount that notable difference is arranged, produce the injustice of workpiece surface to be machined.
The beneficial effects of the utility model mainly show: plane precision, the very high planar processing precision of acquisition that 1, can realize online trimming polished dish; 2, shorten the process-cycle of workpiece; 3, can repair the depth of parallelism: adopt the depth of parallelism of eccentric load correction workpiece, also can utilize it to process the workpiece of certain gradient; 4, adjustable-speed, speed control mode advanced person: can realize stepless speed regulation, and adopt the abrasive disk speed control mode of " low speed starting-stepless speed-raising-constant speed processing-low speed finishing-low speed stops ", can guarantee the technological requirement of ultraprecision grinding polishing processing; 5, total revolution is accurately controlled and is adopted ultraprecise grating observation and control technology, the precision of the total revolution of polishing disk is controlled at ± 1 ° in, to guarantee that the processing capacity overall error is in 1nm; 6, intelligent expert database: adopt best processing technology parameter expert database control system, and then guarantee the high-quality and the uniformity of processing, can get rid of the adverse effect of manual operation effectively to process.
Description of drawings
Fig. 1 is the structural representation of trimming ring type intelligent super precision polishing machine.
Fig. 2 is the vertical view of Fig. 1.
The specific embodiment
Below in conjunction with accompanying drawing the utility model is further described.
With reference to Fig. 1, Fig. 2, a kind of trimming ring type intelligent super precision polishing machine, comprise support 5, polishing disk 8, drive motors 1, velocity measurement mechanisms 6 and intelligent control platform 2, described polishing disk 8 is installed on the support 5 by main shaft, the output shaft of described drive motors 1 is connected with spindle drive, described main shaft and velocity measurement mechanisms 6 are in transmission connection, described intelligent control platform 2 connects drive motors 1 and velocity measurement mechanisms 6, described super precision polishing machine also comprises finishing ring 9, finishing ring retainer 11, in the described finishing ring 9 basal disc 14 that is used to clamp workpiece is installed, described finishing ring 9 is positioned at the top of described polishing disk 8, described finishing ring retainer 11 is installed on the support 5, described conditioning ring retainer 11 is provided with segmental arc, the radian of described segmental arc is not less than pi/2, the two ends of described segmental arc are provided with friction pulley 12,13, described finishing ring 9 embeds described segmental arc and abuts against two friction pulleys 12, on 13, and gapped between described finishing ring 9 and the described segmental arc.
Described super precision polishing machine comprises at least two pairs of finishing rings 9,9 ' and finishing ring retainer 11,11 ', described each finishing ring and finishing ring retainer are laid respectively at the zones of different of described polishing disk top.The logarithm of finishing ring herein and finishing ring retainer depends on actual processing needs, depends on the size between finishing ring and the polishing disk simultaneously, can be two pairs, three pairs, four pairs and how right.
Described finishing ring retainer 9,9 ' is installed on the column 10,10 ', and described column 10,10 ' is fixedly mounted on the support 5.
Described velocity measurement mechanisms 6 is the grating TT﹠C system.The output shaft of described drive motors 1 is provided with driving gear, described driving gear by the driven gear of band connection synchronously, and described driven gear is installed on the main shaft; Described main shaft bottom connects additional gear, and described additional gear connects the power shaft of velocity measurement mechanisms by driving-belt.Described drive motors 1 is a direct current generator.
The concrete course of work of present embodiment is: carry out stepless time adjustment by 2 pairs of drive motors of intelligent control platform 1, direct current generator drives main shaft II rotation by the transmission mechanism (structures such as available synchronous band, gear) on axle I and the axle II; The main shaft II of leading up to drives polishing disk 8 rotations, and polishing disk 8 rotates by the finishing ring 9 (9 ') that friction drives on the polishing disk simultaneously, and wherein finishing ring 9 ' is used for keeping basal disc 14 (workpiece is equipped with in its bottom surface) to move within it; To be main shaft II and the transmission mechanism 4 (structures such as available synchronous band, gear) of axle on the III pass to the speed of main shaft II on the grating TT﹠C system on another road, and the grating TT﹠C system is measured its motor rotational parameters, and feeds back to intelligent control platform 2.And for example shown in Figure 2, main shaft II drives polishing disk 8 and turns clockwise, drive 9 (the 9 ') rotation of finishing ring via the frictional force on the polishing disk, friction pulley 12 (12 '), 13 (13 ') that finishing 9 (9 ') of ring drive on the finishing ring retainer 11 (11 ') rotate, simultaneously friction pulley 12 (12 '), 13 (13 ') react on finishing 9 (9 ') of ring and make the finishing ring make spinning motion in finishing ring retainer 11 (11 '), and the bottom surface that has chip area by this finishing ring is carried out online finishing with the friction of polishing card to the polishing card.
Finishing ring employing corrosion-resistant material such as brass, stainless steel, pottery etc. are made.One finishing ring 9 ' stably rotates with the basal disc in the retaining ring, and on the relative position of finishing ring 9 ', adopted a same size, identical shaped finishing ring 9, finishing ring 9 (9 ') working stability ground rotation on the one hand on polishing disk like this, on the other hand two 9 (9 ') of finishing ring all can be in process constantly online trimming polished dish 8 surfaces, finishing 9 (9 ') of ring are because the surperficial each point linear velocity difference of polishing disk 8, and finishing encircles rotatablely moving of 9 (9 ') work and polishing disk 8 switched in opposite, and adopt friction pulley 12 (12 '), 13 (13 '), institute is so that rotation is more stable, and finishing effect is even more ideal.Basal disc 14 (workpiece is equipped with in its bottom surface) is placed on processing in the finishing ring 9 ', and pressurization is as long as loading can realize on workpiece.After polishing fluid adds from polishing disk 8, can 7 outflows along the polishing fluid exit.Regulate the corner of conditioning ring 11 (11 ') of retainer, can regulate the offset at finishing ring and polishing disk center and workpiece offset, to obtain high as far as possible plane precision from the polishing disk center.
Present embodiment can be applicable to quartz crystal, piezo-electric crystal, Si substrate, jewel sheet, GaAs, optical glass, magnetic material, structural ceramic material, the plane mirror ultrafinish and the polishing of hard crisp nonmetallic materials test specimen and metal material, can carry out the grinding and the polishing of following material in addition:
(1), the plane mirror ultrafinish and the polishing of high-precision metal measurer (as slip gauge) and machine components.
(2), the EPMA of mineral estimates AME, physical property test, analysis such as the metallographic plane mirror ultrafinish and the polishing of test portion.
(3), composite material interface, the not damaged angle of finished surface metamorphic layer is ground.
(4), TEM grinds with the preparation of thin slice.
Claims (5)
1, a kind of trimming ring type intelligent super precision polishing machine, comprise support, polishing disk, drive motors, velocity measurement mechanisms and intelligent control platform, described polishing disk is installed on the support by main shaft, the output shaft of described drive motors is connected with spindle drive, described main shaft and velocity measurement mechanisms are in transmission connection, described intelligent control platform connects drive motors and velocity measurement mechanisms, it is characterized in that: described super precision polishing machine also comprises the finishing ring, finishing ring retainer, the basal disc that is used to clamp workpiece is installed in the described finishing ring, described finishing ring is positioned at the top of described polishing disk, described finishing ring retainer is installed on the support, described conditioning ring retainer is provided with segmental arc, the radian of described segmental arc is not less than pi/2, the two ends of described segmental arc are provided with friction pulley, described finishing ring embeds described segmental arc and abuts against on two friction pulleys, and gapped between described finishing ring and the described segmental arc.
2, trimming ring type intelligent super precision polishing machine as claimed in claim 1, it is characterized in that: described super precision polishing machine comprises at least two pairs of finishing rings and finishing ring retainer, described each finishing ring and finishing ring retainer are laid respectively at the zones of different of described polishing disk top.
3, trimming ring type intelligent super precision polishing machine as claimed in claim 1 or 2 is characterized in that: described finishing ring retainer is installed on the column, and described column is fixedly mounted on the support.
4, trimming ring type intelligent super precision polishing machine as claimed in claim 1 or 2 is characterized in that: described velocity measurement mechanisms is the grating TT﹠C system.
5, trimming ring type intelligent super precision polishing machine as claimed in claim 4 is characterized in that: the output shaft of described drive motors is provided with driving gear, described driving gear by the driven gear of band connection synchronously, and described driven gear is installed on the main shaft; Described main shaft bottom connects additional gear, and described additional gear connects the power shaft of velocity measurement mechanisms by driving-belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201923495U CN201115926Y (en) | 2007-10-26 | 2007-10-26 | Dressing ring type intelligent ultraprecise polishing mahcine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201923495U CN201115926Y (en) | 2007-10-26 | 2007-10-26 | Dressing ring type intelligent ultraprecise polishing mahcine |
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| Publication Number | Publication Date |
|---|---|
| CN201115926Y true CN201115926Y (en) | 2008-09-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007201923495U Expired - Fee Related CN201115926Y (en) | 2007-10-26 | 2007-10-26 | Dressing ring type intelligent ultraprecise polishing mahcine |
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| CN (1) | CN201115926Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023116555A1 (en) * | 2021-12-20 | 2023-06-29 | 唐山国芯晶源电子有限公司 | Large-area quartz wafer grinding apparatus and method |
-
2007
- 2007-10-26 CN CNU2007201923495U patent/CN201115926Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023116555A1 (en) * | 2021-12-20 | 2023-06-29 | 唐山国芯晶源电子有限公司 | Large-area quartz wafer grinding apparatus and method |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080917 Termination date: 20141026 |
|
| EXPY | Termination of patent right or utility model |