CN201083701Y

CN201083701Y - High resolutions X ray image intensifier vision system

Info

Publication number: CN201083701Y
Application number: CNU2007200328558U
Authority: CN
Inventors: 曹捷; 张国琦; 麻树波
Original assignee: Xian Zhongke Maite Electronic Technology Equipment Co Ltd
Current assignee: Xian Zhongke Maite Electronic Technology Equipment Co Ltd
Priority date: 2007-09-28
Filing date: 2007-09-28
Publication date: 2008-07-09
Anticipated expiration: 2017-09-28

Abstract

The utility model provides a high resolution X-ray image intensifier video system, which comprises a rotary X-ray sending and receiving component and a three-dimensional movable object stage component. The rotary X-ray transmitting and receiving component comprises an X-ray image intensifier, an X-ray rotation arm, an X-ray source, and the object stage can perform the X-Y-Z dimension movement. The X-rays emitted by the X-ray source penetrates BGA to be imaged on the X-ray image intensifier, the image is transferred into a video signal by CCD to be displayed on a display screen for observing the welding points of the BGA; the object stage is driven to do X-Y dimension movement by a drive motor along X-dimension and a drive motor along Y-dimension, so users can see the other welding points of BGA; the object stage is driven to do Z-dimension movement by a motor along Z-dimension, so users can adjust the BGA amplifying rate and image view field, by driving the X-ray rotation arm to rotate by a rotation arm drive motor, users can see the different angles of the welding points of BGA, and thus the qualitative and quantitative quality detection of welding points of BGA components can be achieved.

Description

The high-resolution X-ray image enhancer vision system

Technical field

The utility model relates to a kind of detection system, is specifically related to a kind of high-resolution X-ray image enhancer vision system that the quality of welding spot that is welded on the devices such as BGA, CSP on the PCB is carried out qualitative and quantitative analysis.

Background technology

Develop rapidly along with electronic technology, the miniaturization of encapsulation and the densification of assembling impel various novel encapsulated technology to continue to bring out, BGA (Ball Grid Array) is exactly that a kind of integrated level that developed in recent years is higher, the integrated circuit (IC) chip that volume is littler, because its pin forms little ball array one by one below the plate face, after the SMT surface mount, the quality that range estimation and automated optical detect (AOI) instrument butt welding point can't detect, so X ray detection technique (AXI) is arisen at the historic moment automatically.Mainly contain Agilent, day island proper Tianjin of the U.S., external famous producer such as Japanese Toshiba.

Widely used automatic X ray detection technique (AXI) all adopts intensifying screen or medical X-ray image intensifier technology to obtain image at present, because resolution is lower, volume is bigger, cost is higher, can not satisfy the requirement of detection technique, under the promotion of demand, developed high resolving power micron X-ray check technology.High resolving power micron X-ray technology is mainly used in process control and the defect analysis in the electronics industry.At first the detection of hiding solder joint in element assembling, as what of: scolder, the displacement of solder joint etc.In semi-conductor industry, the X-ray system is applied to the inner harmless detection that connects in the integrated circuit encapsulation as stable instrument.High resolving power micron X-ray technology constitutes New X ray image intensifier vision system in conjunction with high-resolution image intensifier.

Summary of the invention

The purpose of this utility model provides a kind of high-resolution X-ray image enhancer vision system that can carry out qualitative and quantitative analysis to the quality of welding spot of devices such as the BGA on the PCB, CSP.

For achieving the above object, the technical scheme of employing of the present utility model is: comprise support and be arranged on support interior rotatable X ray emission receiving-member and the three-dimensional objective table that moves, be characterized in, rotatable X ray emission receiving-member comprises the X ray pivot arm that is connected with support by the pivot arm rotating shaft, on support, also be provided with and drive the pivot arm drive motor that the X ray pivot arm rotates, be fixed with X ray image intensifier and x-ray source respectively in the top and bottom of X ray pivot arm;

The objective table assembly that said three-dimensional moves comprises the directions X moving base that is arranged on the support, the directions X moving base is provided with the directions X drive motor, directions X leading screw and directions X line slide rail, on the directions X line slide rail, be fixed with Z direction moving base, this directions X drive motor drives Z direction moving base by the directions X leading screw and moves along the directions X line slide rail, on Z direction moving base, be fixed with the Z direction drive motor, the Z direction drives leading screw and Z direction slip feed rod, on Z direction slip feed rod, be fixed with Y direction moving base, driving leading screw driving Y direction moving base by the Z direction drive motor by the Z direction moves along Z direction slip feed rod, Y direction moving base is provided with Y direction line slide rail, Y direction drive motor and Y direction drive leading screw, and on Y direction line slide rail, be fixed with objective table, drive the leading screw driving objective table by the Y direction drive motor by the Y direction and move along Y direction line slide rail.

The utility model is imaged on the X ray image intensifier through BGA by the X ray of x-ray source emission, become vision signal to observe the solder joint situation of BGA with display image conversion with CCD, do the X-Y motion by directions X drive motor and Y direction drive motor driving objective table, can see other solder joints of BGA, do the motion of Z direction by Z direction drive motor driving objective table, can adjust BGA solder joint magnification and visual visual field, drive the rotation of X ray pivot arm by the pivot arm drive motor, can observe the different angles of BGA solder joint, thereby realize the BGA on the PCB, the quality of welding spot of devices such as CSP carries out qualitative, detection by quantitative.

Description of drawings

Fig. 1 is a front view of the present utility model;

Fig. 2 is the vertical view of the utility model Fig. 1;

Fig. 3 is the utility model three-dimensional adjusting structure synoptic diagram.

Embodiment

Below in conjunction with accompanying drawing structural principle of the present utility model and principle of work are described in further detail.

Referring to Fig. 1,2,3, the utility model comprises support 19 and is arranged on support 19 interior rotatable X ray launches receiving-member and the three-dimensional objective table that moves, and said rotatable X ray is launched receiving-member and comprised X ray image intensifier 1, X ray pivot arm 2, pivot arm rotating shaft 3, x-ray source 4, pivot arm drive motor 5; The X ray pivot arm 2 that pivot arm rotating shaft 3 is connected with support 19, on support 19, also be provided with and drive the pivot arm drive motor 5 that X ray pivot arm 2 rotates, X ray pivot arm 2 is rotated around pivot arm rotating shaft 3 under the driving of pivot arm drive motor 5, is fixed with X ray image intensifier 1 and x-ray source 4 respectively in the top and bottom of X ray pivot arm 2; Wherein x-ray source 4 is launched X ray, and X ray image intensifier 1 receives and also strengthens radioscopic image,

The three-dimensional objective table assembly that moves is made up of objective table 8, directions X drive motor 6, directions X driving leading screw 7, Y direction driving leading screw 9, Y direction drive motor 10, Y direction line slide rail 11, directions X line slide rail 12, Z direction drive motor 13, Z direction driving leading screw 14, Z direction slip feed rod 15, Y direction moving base 16, Z direction moving base 17, directions X moving base 18.

Above-mentioned objective table 8 is fixed on two Y direction line slide rails 11, drives leading screw 9 driving objective tables 8 by Y direction drive motor 10 by the Y direction and moves along the Y direction.Two Y direction line slide rails 11, Y direction drive motor 10 and Y directions drive leading screw 9 and are fixed on the Y direction moving base 16;

Above-mentioned Y direction moving base 16 is fixed on the Z direction slip feed rod 15, drives leading screw 14 by Z direction drive motor 13 by the Z direction and drives Y direction moving base 16 and move along the Z direction.Two Z direction slip feed rods 15, Z direction drive motor 13 and Z directions drive leading screw 14 and are fixed on the Z direction moving base 17.

Above-mentioned Z direction moving base 17 is fixed on two directions X line slide rails 12, drives leading screw 7Z direction moving base 17 by directions X drive motor 6 by directions X and moves along directions X.Two directions X line slide rails 12, X. direction drive motor 6 and directions Xs drive leading screw 7 and are fixed on the directions X moving base 18.

The utility model course of work is as follows: PCB is placed on the objective table 8, the X ray of x-ray source 4 emissions sees through BGA and is imaged on the X ray image intensifier 1, become vision signal to observe the solder joint situation of BGA with display image conversion with CCD, by directions X drive motor 6, Y direction drive motor 10 driving objective tables 8 are done the X-Y motion, can see other solder joints of BGA, do the motion of Z direction by Z direction drive motor 13 driving objective tables 8, can adjust BGA solder joint magnification and visual visual field, drive 2 rotations of X ray pivot arm, the different angles that can observe the BGA solder joint by pivot arm drive motor 5.

Claims

1. high-resolution X-ray image enhancer vision system, the rotatable X ray that comprises support (19) and be arranged in the support (19) is launched receiving-member and the three-dimensional objective table that moves, it is characterized in that: said rotatable X ray emission receiving-member comprises the X ray pivot arm (2) that is connected with support (19) by pivot arm rotating shaft (3), on support (19), also be provided with and drive the pivot arm drive motor (5) that X ray pivot arm (2) rotates, be fixed with X ray image intensifier (1) and x-ray source (4) in the top and bottom of X ray pivot arm (2) respectively;

The objective table that said three-dimensional moves comprises the directions X moving base (18) that is arranged on the support (19), directions X moving base (18) is provided with directions X drive motor (6), directions X leading screw (7) and directions X line slide rail (12), on directions X line slide rail (12), be fixed with Z direction moving base (17), this directions X drive motor (6) drives Z direction moving base (17) by directions X leading screw (7) and moves along directions X line slide rail (12), on Z direction moving base (17), be fixed with Z direction drive motor (13), the Z direction drives leading screw (14) and Z direction slip feed rod (15), on Z direction slip feed rod (15), be fixed with Y direction moving base (16), driving leading screw (14) driving Y direction moving base (16) by Z direction drive motor (13) by the Z direction moves along Z direction slip feed rod (15), Y direction moving base (16) is provided with Y direction line slide rail (11), Y direction drive motor (10) and Y direction drive leading screw (9), and on Y direction line slide rail (11), be fixed with objective table (8), drive leading screw (9) driving objective table (8) by Y direction drive motor (10) by the Y direction and move along Y direction line slide rail (11).