CN201079923Y - 用于化学机械研磨装置的研磨台间清洗装置 - Google Patents
用于化学机械研磨装置的研磨台间清洗装置 Download PDFInfo
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- CN201079923Y CN201079923Y CNU2007201441967U CN200720144196U CN201079923Y CN 201079923 Y CN201079923 Y CN 201079923Y CN U2007201441967 U CNU2007201441967 U CN U2007201441967U CN 200720144196 U CN200720144196 U CN 200720144196U CN 201079923 Y CN201079923 Y CN 201079923Y
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CNU2007201441967U CN201079923Y (zh) | 2007-09-21 | 2007-09-21 | 用于化学机械研磨装置的研磨台间清洗装置 |
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CNU2007201441967U CN201079923Y (zh) | 2007-09-21 | 2007-09-21 | 用于化学机械研磨装置的研磨台间清洗装置 |
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CN201079923Y true CN201079923Y (zh) | 2008-07-02 |
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CNU2007201441967U Expired - Fee Related CN201079923Y (zh) | 2007-09-21 | 2007-09-21 | 用于化学机械研磨装置的研磨台间清洗装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109262442A (zh) * | 2017-07-18 | 2019-01-25 | 中芯国际集成电路制造(上海)有限公司 | 一种清洗化学机械研磨设备的系统和化学机械研磨系统 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109262442A (zh) * | 2017-07-18 | 2019-01-25 | 中芯国际集成电路制造(上海)有限公司 | 一种清洗化学机械研磨设备的系统和化学机械研磨系统 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140113 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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TR01 | Transfer of patent right |
Effective date of registration: 20140113 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080702 Termination date: 20150921 |
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EXPY | Termination of patent right or utility model |