CN201066273Y - A measuring header for nano measurer based on optical fiber interference principle - Google Patents
A measuring header for nano measurer based on optical fiber interference principle Download PDFInfo
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- CN201066273Y CN201066273Y CNU2007200962524U CN200720096252U CN201066273Y CN 201066273 Y CN201066273 Y CN 201066273Y CN U2007200962524 U CNU2007200962524 U CN U2007200962524U CN 200720096252 U CN200720096252 U CN 200720096252U CN 201066273 Y CN201066273 Y CN 201066273Y
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- optical fiber
- probe
- measuring machine
- nano
- beam splitter
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Abstract
The utility model relates to a nano measuring machine gauge head based on the optical fiber interference principle. The gauge head includes a cantilever beam probe, a probe clamp and a Fizeau interferometer based on optical fiber and a beam splitter. As the sensor of the nano measuring machine, the system senses the appearance of the sample surface, can realize the positioning function for the scan of the nano measuring machine in a large range and transmit the displacement signal to the nano measuring machine. Compared with other current probes, the utility model differs in selecting optical fiber to transmit light, so as to simplify the structure of the interferometer; the special probe clamp is applicable to the current probes in labs; amplifier chips newly produced by Maxim are selected in an amplification circuit, which are specially used for amplifying the current output by the photodiode and then converting the current into voltage, which improves the performance of the circuit. The nano measuring machine gauge head applying the optical fiber interference principle is used for researching the scan of nano measuring machines of different samples, which is characterized in large range of scan, high precision, etc.
Description
Technical field
The utility model relates to the nano-measuring machine gauge head based on the fiber optic interferometric principle, belongs to nano-measuring machine research and application.Be mainly used in the sensor as the nano-measuring machine of large area scanning, this system can also realize the expose thoroughly positioning action of scope of nano-measuring machine.
Background technology
Along with the development of nanometer technology, people more and more need to measure and handle very little parts.With scanning tunnel microscope (STM) and atomic force microscope (AFM) is that the appearance of the scan-probe technology of representative has adapted to this requirement.But because the restriction of piezoelectric ceramics self-characteristic, it is very big to make that the sweep limit of instrument can not be done, and maximum is hundreds of μ m only, and this has limited scan-probe The Application of Technology scope greatly.The process measurement of Germany Ilmenau technology university and Research on Sensing institute utilize the miniature laser interferometer to realize a kind of location survey instrument of high-precision large-range with SIOS company---nano-measuring machine (NMM), by cooperating dissimilar sensing probes, realize the measurement of different modes.
At present, abroad all walking in domestic front aspect the exploitation of nano measurement method, instrument and system and the calibration.Existing commercialization atomic force gauge head be external all, not only be difficult to combine and directly demarcate the gauge head of finishing, and the expense of detection calibration also is very expensive with existing nano-measuring machine from external import.Therefore, need exploitation to possess the gauge head test and the calibration system of independent intellectual property right.
The utility model content
The purpose of this utility model be to provide a kind of have the probe clamper the nano-measuring machine gauge head, for the research nano-measuring machine realizes on a large scale that scanning provides transducing signal and positioning signal when beginning to scan.
The purpose of this utility model is achieved in that a kind of nano-measuring machine gauge head based on the fiber optic interferometric principle, comprise the piezoelectric scanning pipe, the probe clamper, socle beam probe and the fizeau interferometer that constitutes by beam splitter and optical fiber, the probe clamper is fixed on the bottom of piezoelectric scanning pipe, it is provided with spring clamp, groove, threaded hole and window, probe places in the groove, one end of spring clamp is fixed on the probe clamper by threaded hole, other end clamping probe, beam splitter is fixed on the window, optical fiber, beam splitter, detecting probe surface is located at successively a light path, the LASER Light Source emitted laser is through Optical Fiber Transmission, beat behind beam splitter, be divided into folded light beam and transmitted light beam, transmitted light beam beat the light beam of back reflection on the reflecting surface at the micro-cantilever back side through behind the beam splitter with previous folded light beam interference, interference signal passes through photodiode converts after exporting through optical fiber, enter subsequent process circuit and carry out signals collecting, thus the pattern information of acquisition sample surfaces.
Adopt nano-measuring machine of the present utility model system, because gauge head is only as zero point sensor, the characteristics that the light signal precision is high provide high-precision sample surfaces shape characteristic signal for nano-measuring machine, thereby make that nano-measuring machine has been realized on a large scale, high-precision scanning, thereby and select for use optical fiber to pass the structure that light is simplified interferometer; Distinctive probe clamper can use the existing probe in laboratory; The amplification chip of having selected for use U.S. letter newly to produce in the amplifying circuit is specifically designed to the electric current that amplifies photodiode output, and is converted into voltage, has improved the performance of circuit.
Description of drawings
Fig. 1 is the probe clamper structure of the utility model based on the nano-measuring machine gauge head of the method for fiber optic interferometric;
Fig. 2 is the system architecture diagram of the utility model based on the nano-measuring machine gauge head of the method for fiber optic interferometric;
Fig. 3 is the index path of the utility model based on the gauge head of the nano-measuring machine of the method for fiber optic interferometric.
Embodiment
Below in conjunction with accompanying drawing the utility model is further described.
Referring to figure, as shown in Figure 1 based on the structure of the probe clamper 4 of the nano-measuring machine gauge head of the method for fiber optic interferometric.1 threaded hole among Fig. 1 for the fixing spring folder, 2 places are a groove, are used to place probe; One end of spring clamp nut stuck-at-place, the other end is at 2 places clamping probe; 3 places offer a window, are used for placing beam splitter.The structure of whole gauge head as shown in Figure 2.Probe clamper 4 is fixed on the bottom of the piezoelectric scanning pipe 5 in the gauge head.Optical fiber 7 is arranged in the piezoelectric scanning pipe 5.Constitute fizeau interferometer by optical fiber 7 and beam splitter 3.
Because the angle of the socle beam probe that stressed variation causes changes, i.e. displacement changes the AFM probe in scanning process.Adopt the fiber optic interferometric method that this displacement signal is detected (as shown in Figure 3), its process is to be transmitted through optical fiber 7 by the laser beam a that laser instrument sends, and beats on beam splitter 3, is divided into folded light beam a ' and transmitted light beam b.Light beam b beats on the reflecting surface of detecting probe surface (also can be described as the micro-cantilever back side) 6, and folded light beam b ' is through beam splitter 3 backs and previous folded light beam a ' interference.Micro-cantilever departs from along with the concavo-convex of sample surfaces, detects the variation of interference signal, and the interference signal that characterizes the probe displacement is output optical fiber 7 receptions and converts light signal to current signal by photodiode,
The current signal of photodiode output is very faint, is subjected to the influence of surrounding environment easily, therefore, needs the signal acquisition circuit of design specialized, mainly comprises signal condition, and signals collecting, processing are with part such as upper machine communication.Amplification circuits has mainly adopted amplifies chip OPA380 and photocurrent is amplified is converted to the voltage signal that can be handled by subsequent conditioning circuit.The entire circuit disposal system is core with DSP, and the current signal that amplifies after changing can enter analog to digital conversion or the output voltage under a certain fixed displacement is fed back to the nano-measuring machine control module; Data after the conversion can leave in the external RAM, and system passes the data that collect toward computing machine by the RS232 serial ports, can handle automatically and preserve data by computing machine calibration and Survey Software.
Claims (1)
1. nano-measuring machine gauge head based on the fiber optic interferometric principle, comprise the piezoelectric scanning pipe, the probe clamper, socle beam probe, the fizeau interferometer and the subsequent process circuit that constitute by beam splitter and optical fiber, it is characterized in that, the probe clamper is fixed on the bottom of piezoelectric scanning pipe, it is provided with spring clamp, groove, threaded hole and window, probe places in the groove, one end of spring clamp is fixed on the probe clamper by threaded hole, other end clamping probe, beam splitter is fixed on the window, optical fiber, beam splitter, detecting probe surface is located at successively a light path, the LASER Light Source emitted laser is through Optical Fiber Transmission, beat behind beam splitter, be divided into folded light beam and transmitted light beam, transmitted light beam beat the light beam of back reflection on the reflecting surface at the micro-cantilever back side through behind the beam splitter with previous folded light beam interference, interference signal enters subsequent process circuit through optical fiber output after photodiode converts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200962524U CN201066273Y (en) | 2007-06-05 | 2007-06-05 | A measuring header for nano measurer based on optical fiber interference principle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200962524U CN201066273Y (en) | 2007-06-05 | 2007-06-05 | A measuring header for nano measurer based on optical fiber interference principle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201066273Y true CN201066273Y (en) | 2008-05-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200962524U Expired - Fee Related CN201066273Y (en) | 2007-06-05 | 2007-06-05 | A measuring header for nano measurer based on optical fiber interference principle |
Country Status (1)
| Country | Link |
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| CN (1) | CN201066273Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102272610A (en) * | 2008-12-11 | 2011-12-07 | 因菲尼泰西马有限公司 | Dynamic probe detection system |
-
2007
- 2007-06-05 CN CNU2007200962524U patent/CN201066273Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102272610A (en) * | 2008-12-11 | 2011-12-07 | 因菲尼泰西马有限公司 | Dynamic probe detection system |
| CN102272610B (en) * | 2008-12-11 | 2015-02-25 | 因菲尼泰西马有限公司 | Dynamic probe detection system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080528 |