CN201002015Y - Conic tooth shaped medium-barrier discharge plasma chemical reactor - Google Patents
Conic tooth shaped medium-barrier discharge plasma chemical reactor Download PDFInfo
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- CN201002015Y CN201002015Y CNU2007200831369U CN200720083136U CN201002015Y CN 201002015 Y CN201002015 Y CN 201002015Y CN U2007200831369 U CNU2007200831369 U CN U2007200831369U CN 200720083136 U CN200720083136 U CN 200720083136U CN 201002015 Y CN201002015 Y CN 201002015Y
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Abstract
The utility model discloses a tapered-tooth media-resist electrical discharge plasma chemical reactor, which is mainly composed of the metal electrode that is provided with a plurality of rows of continuous tapered discharge teeth and the other metal electrode that is covered by a layer of dielectric medium, wherein the space between tapered discharge teeth and dielectric medium layer is dense ionization electrical discharge area. Because the tooth line of the tapered electrical discharge teeth is arranged unintermitted, the dense ionization areas are all at equal intervals and unintermitted, no matter in the direction of the tooth line or in the direction vertical to the tooth line. The utility model not only has the advantages of low beginning voltage, strong electrical discharge, unintermitted discharge areas at equal intervals, high-energy active particles generated with high density, but also is characterized by quick respond and good controllability. At the same time, the utility model is simply structured, light and small, stable and reliable in operation, which can increase the reforming rate of the liquid reagents in a vast scale. The reactor is particularly suitable for the dense ionization chemical reaction of the liquid reagents taking place with the ordinary pressure.
Description
Technical field
The utility model relates to the low temperature plasma generation technique, refers to a kind of cone gear form dielectric barrier discharge plasma chemical reactor particularly.
Background technology
At present, under atmospheric pressure, produce low temperature plasma, become two kinds of plasma chemical reaction technology that are most widely used by corona discharge assembly or dielectric barrier discharge device (DBD).Application number is after the Chinese invention patent ublic specification of application of 200510095594.X compares the characteristics separately of corona discharge and dielectric barrier discharge in analysis, has proposed a kind of low temperature plasma generation device of corona coupling medium barrier discharge.Adopted the discharging structure of pin-plate shape between two electrodes of this device, can produce stronger plasma zone, thereby can the convection cell thing have reformed chemical reaction in the zone between needle point and the dielectric layer.The sparking electrode of this structure can form plasma relatively uniformly between pin-plate, and has low, the characteristics such as active particle strong, that produced is many of discharging of discharge voltage.But when fluid reactant is regional through this plasma, because needle point is to be interrupted to arrange, between needle point and needle point, still there is a large amount of non-plasma zones, cause the segment fluid flow reactant without outside the just direct bleeder in plasma zone, will be unfavorable for the further raising of fluid reactant reformation efficient like this.Simultaneously, because the needle point area is too little, the electric current on the needle point is too concentrated, and it is ablated to make that needle point is very easy to, thus itself and be unwell to the plasma chemical reaction of fluid reactant.
Summary of the invention
The purpose of this utility model be exactly to provide a kind of region of discharge continuously, stable and reliable operation, institute's active particle concentration that produces greatly, be suitable for the cone gear form dielectric barrier discharge plasma chemical reactor that fluid reactant carries out efficient chemical reaction therein.
For achieving the above object, the cone gear form dielectric barrier discharge plasma chemical reactor that the utility model is designed comprises the reative cell cover, is arranged on the pair of metal electrodes in the reative cell cover and is applied to this to the high voltagehigh frequency power supply on the metal electrode.The surface design of described one of them metal electrode has many row's taper discharge teeth, and the surface coverage of described another metal electrode has dielectric layer.Between described taper discharge tooth and the dielectric layer is the strong ionization discharge zone, when after loading high-frequency and high-voltage power supply on two metal electrodes, can form the low-temperature plasma tagma in this strong ionization discharge zone, for fluid reactant provides special plasma chemical reaction condition.Described strong ionization discharge zone is provided with reaction-ure inlet and product outlet.
The above-mentioned preferred parameter of respectively arranging taper discharge tooth is: the spacing 0.5～4mm of tooth depth 1～5mm, 5～45 ° of cone angles, increment and dielectric layer, and each arranges taper discharge tooth is whole continous way structure, the space width of adjacent two row's taper discharge teeth is 1.5～9mm。
The preferred parameter of above-mentioned dielectric layer is: resistivity is greater than 10
14The value of Ω/cm, dielectric constant is greater than 9, and thickness is 0.5～1.5mm, and critical breakdown electric field intensity 〉=400KV/cm, water absorption rate are 0.0%.
Advantage of the present utility model is: designed plasma chemical reactor adopts taper discharge tooth dielectric barrier discharge structure, the tooth trace of its taper discharge tooth is continuously uninterrupted the arrangement, no matter formed thus plasma slab is on the trace direction or all be continuously on perpendicular to the direction of tooth trace, both overcome the defective that has the non-plasma zone in pin-plate dielectric barrier discharge, remedied the deficiency that needle electrode is ablated easily in pin-plate dielectric barrier discharge again.It has not only that starting voltage is low, discharge is strong, region of discharge continuously evenly, the active particle energy height that is produced, the advantage that concentration is big, and have the advantages that response speed is fast, controllability is good.It is simple in structure simultaneously, volume light and handy, stable and reliable operation, all fluid reactants all can be reformed by its strong ionization discharge plasma slab, can significantly improve the reformation efficient of fluid reactant, be suitable for the plasma chemical reaction of fluid reactant under normal pressure especially.
Description of drawings
Fig. 1 is a kind of sectional structure schematic diagram of cone gear form dielectric barrier discharge plasma chemical reactor of concentric circles plate structure;
Fig. 2 for having the plan structure schematic diagrames of arranging the metal electrode of taper discharge teeth more among Fig. 1;
Fig. 3 is a kind of sectional structure schematic diagram of cone gear form dielectric barrier discharge plasma chemical reactor of concentric cylinder structure;
Fig. 4 is a kind of sectional structure schematic diagram of cone gear form dielectric barrier discharge plasma chemical reactor of parallel plate structure.
The specific embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described in further detail:
The cone gear form dielectric barrier discharge plasma chemical reactor of three kinds of structures shown in Fig. 1～4, all has a reative cell cover 4, the a pair of metal electrode 6,9 that is arranged in the reative cell cover 4, and be applied to this to the high voltagehigh frequency power supply 10 on the metal electrode 6,9.The surface design of one of them metal electrode 6 has many row's taper discharge teeth 12, and the surface coverage of another metal electrode 9 has dielectric layer 8.Between taper discharge tooth 12 and the dielectric layer 8 is strong ionization discharge zone 7, and strong ionization discharge zone 7 is provided with reaction-ure inlet 5 and product outlet 11.
Above-mentioned tooth depth of respectively arranging taper discharge tooth 12 is designed to 1～5mm, cone angle is 5～45 °.The increment of taper discharge tooth 12 and the spacing of dielectric layer 8 are 0.5～4mm, and preferred distance is 1.5～3mm, and optimal spacing is 1.0～2.5mm.Each is arranged taper discharge tooth 12 and is whole continous way structure, and the space width of adjacent two row's taper discharge teeth 12 is designed to 1.5～9mm.The resistivity of above-mentioned dielectric layer 8 is greater than 10
14The value of Ω/cm, dielectric constant is greater than 9, and thickness is 0.5～1.5mm, and critical breakdown electric field intensity 〉=400KV/cm, water absorption rate are 0.0%.Design like this can be satisfied the needs that form superpower ionic discharge zone, guarantees the chemical reaction efficiency of fluid reactant.
For concentric circular plate type cone gear form dielectric barrier discharge plasma chemical reactor shown in Figure 1, its metal electrode the 6, the 9th, a pair of concentric circular plate type metal electrode, one of them circular plate type metal electrode 6 is provided with centre bore, taper discharge tooth more than 12 row's annular concentric are distributed on the surface of this circular plate type metal electrode 6 the surface coverage circular dielectric layer 8 of another circular plate type metal electrode 9.During concrete the making, adopt the circular metal plate of thickness 10～30mm, a center bore 10mm, car goes out many rows concentric annular awl tooth of tooth depth 1～5mm, 5～45 ° of cone angles, space width 1.5～9mm, another thickness is that the circular metal plate of 10～30mm is parallel with it relatively, and the dielectric layer 8 that surface coverage 1mm is thick gets final product.This is fixed in the reative cell cover 4 metal electrode 6,9, and fluid reactant conduit 13 passes reative cell cover 4 and links to each other with the centre bore of circular plate type metal electrode 6, and this centre bore promptly is a reaction-ure inlet 5.11 sides that are opened in reative cell cover 4 of product outlet communicate all around with the side in a pair of circular plate type metal electrode 6,9 formed strong ionization discharge zones 7.
For coaxial cylindrical cone gear form dielectric barrier discharge plasma chemical reactor shown in Figure 2, its metal electrode the 6, the 9th, a pair of coaxial cylindrical metal electrode, taper discharge tooth more than 12 row's coaxial annulars are distributed on the surface of inboard cylindrical metal electrode 6, cover cylindrical shape dielectric layer 8 on the surface of outside cylindrical metal electrode 9.During concrete the making, adopt the round metal bars of diameter 50～300mm, go out the coaxial ring-type awl of the many rows tooth of tooth depth 1～5mm, 5～45 ° of cone angles, space width 1.5～9mm at its surperficial car, the metal circular tube of another wall thickness 5～20mm is coaxial with it relatively, and the cylindrical shape dielectric layer 8 that surface coverage 1.5mm is thick gets final product.Reactant advances 5 and is arranged on this reative cell cover 4 to cylindrical metal electrode 6,9 formed tubular strong ionization discharge zones 7 one ends.Product outlet 11 is arranged on this reative cell cover 4 to cylindrical metal electrode 6,9 formed tubular strong ionization discharge zones 7 other ends.
For parallel flat shape cone gear form dielectric barrier discharge plasma chemical reactor shown in Figure 3, its metal electrode the 6, the 9th, the plate shaped metal electrode of pair of parallel, taper discharge tooth more than 12 is arranged on the parallel surface that is distributed in one of them plate shaped metal electrode 6, the plate shaped dielectric 8 of the surface coverage of another plate shaped metal electrode 9.During concrete the making, adopt the metal plate of thickness 10～30mm, mill out the parallel awl tooth of many rows of tooth depth 1～5mm, 5～45 ° of cone angles, space width 1.5～9mm thereon, another thickness is that the metal plate of 10～30mm is parallel with it relatively, and the dielectric layer 8 that surface coverage 0.5 mm is thick gets final product.Reaction-ure inlet 5 is arranged on this reative cell cover 4 to parallel flat shape metal electrode 6,9 formed seam shape strong ionization discharge zones 7 one sides, and perpendicular with the trace direction of taper discharge tooth 12.Product outlet 11 is arranged on this reative cell cover 4 to parallel flat shape metal electrode 6,9 formed seam shape strong ionization discharge zones 7 opposite sides.
When above-mentioned any cone gear form dielectric barrier discharge plasma chemical reactor was worked, the high-frequency and high-voltage power supply 10 that is carried on the pair of metal electrodes 6,9 made formation low temperature strong ionization discharge zone 7 between taper discharge tooth 12 and the dielectric layer 8.The running parameter of high voltagehigh frequency power supply 10 is generally: voltage 5～20KV, frequency 7～15KHz, electrode discharge spacing 0.5～4mm.Import fluid reactant this moment from reaction-ure inlet 5, make it that strong reformation chemical reaction take place in strong ionization discharge zone 7, then derives from product outlet 11 through the product after reforming.
Claims (6)
1. cone gear form dielectric barrier discharge plasma chemical reactor, comprise reative cell cover (4), be arranged on the pair of metal electrodes (6 in the reative cell cover (4), 9) and be applied to this to metal electrode (6,9) the high voltagehigh frequency power supply (10) on, it is characterized in that: the surface design of described one of them metal electrode (6) has many row's taper discharge teeth (12), the surface coverage of described another metal electrode (9) has dielectric layer (8), between described taper discharge tooth (12) and the dielectric layer (8) is strong ionization discharge zone (7), and described strong ionization discharge zone (7) is provided with reaction-ure inlet (5) and product outlet (11).
2. cone gear form dielectric barrier discharge plasma chemical reactor according to claim 1, it is characterized in that: described tooth depth of respectively arranging taper discharge tooth (12) is that 1～5mm, cone angle are that the spacing of 5～45 °, increment and dielectric layer (8) is 0.5～4mm, each is arranged taper discharge tooth (12) and is whole continous way structure, and the space width of adjacent two row's taper discharge teeth (12) is 1.5～9mm.
3. cone gear form dielectric barrier discharge plasma chemical reactor according to claim 1 and 2, it is characterized in that: described pair of metal electrodes (6,9) is a pair of concentric circular plate type metal electrode, one of them circular plate type metal electrode (6) is provided with centre bore, the many rows of described taper discharge tooth (12) annular concentric is distributed on the surface of this circular plate type metal electrode (6) the surface coverage circular dielectric layer (8) of another circular plate type metal electrode (9); Described reaction-ure inlet (5) links to each other with the centre bore of this circular plate type metal electrode (6); Described product outlet (11) communicates all around with the side of a pair of circular plate type metal electrode (6,9).
4. cone gear form dielectric barrier discharge plasma chemical reactor according to claim 1 and 2, it is characterized in that: described pair of metal electrodes (6,9) is a pair of coaxial cylindrical metal electrode, the many rows of described taper discharge tooth (12) coaxial annular is distributed on the surface of inboard cylindrical metal electrode (6), covers cylindrical shape dielectric layer (8) on the surface of outside cylindrical metal electrode (9); Described reaction-ure inlet (5) is arranged on an axial end of pair of cylindrical metal electrode (6,9); Described product outlet (11) is arranged on the axial other end of a pair of circular plate type metal electrode (6,9).
5. cone gear form dielectric barrier discharge plasma chemical reactor according to claim 1 and 2, it is characterized in that: described pair of metal electrodes (6,9) is the plate shaped metal electrode of pair of parallel, the many rows of described taper discharge tooth (12) are parallel to be distributed on the surface of one of them plate shaped metal electrode (6) the plate shaped dielectric layer of surface coverage (8) of another plate shaped metal electrode (9); Described reaction-ure inlet (5) is arranged on a side of the plate shaped metal electrode of pair of parallel (6,9), and perpendicular with the trace direction of taper discharge tooth (12); Described product outlet (11) is arranged on the corresponding opposite side of the plate shaped metal electrode of pair of parallel (6,9).
6. cone gear form dielectric barrier discharge plasma chemical reactor according to claim 1 and 2 is characterized in that: the resistivity of described dielectric layer (8) is greater than 10
14The value of Ω/cm, dielectric constant is greater than 9, and thickness is 0.5～1.5mm, and critical breakdown electric field intensity 〉=400KV/cm, water absorption rate are 0.0%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200831369U CN201002015Y (en) | 2007-01-11 | 2007-01-11 | Conic tooth shaped medium-barrier discharge plasma chemical reactor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200831369U CN201002015Y (en) | 2007-01-11 | 2007-01-11 | Conic tooth shaped medium-barrier discharge plasma chemical reactor |
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| CN201002015Y true CN201002015Y (en) | 2008-01-09 |
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| CNU2007200831369U Expired - Lifetime CN201002015Y (en) | 2007-01-11 | 2007-01-11 | Conic tooth shaped medium-barrier discharge plasma chemical reactor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012171235A1 (en) * | 2011-06-17 | 2012-12-20 | 深圳市华星光电技术有限公司 | Atmospheric pressure plasma device and process for manufacturing same |
| CN103269556A (en) * | 2013-05-14 | 2013-08-28 | 哈尔滨工业大学 | Large-area atmosphere plasma even discharge electrode |
| CN105934064A (en) * | 2016-06-12 | 2016-09-07 | 上海大学 | Single-dielectric barrier low-temperature plasma reactor |
| CN106686872A (en) * | 2017-02-09 | 2017-05-17 | 江苏升元菲尔科技发展有限公司 | Panel tip discharge type plasma generator |
-
2007
- 2007-01-11 CN CNU2007200831369U patent/CN201002015Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012171235A1 (en) * | 2011-06-17 | 2012-12-20 | 深圳市华星光电技术有限公司 | Atmospheric pressure plasma device and process for manufacturing same |
| CN103269556A (en) * | 2013-05-14 | 2013-08-28 | 哈尔滨工业大学 | Large-area atmosphere plasma even discharge electrode |
| CN105934064A (en) * | 2016-06-12 | 2016-09-07 | 上海大学 | Single-dielectric barrier low-temperature plasma reactor |
| CN106686872A (en) * | 2017-02-09 | 2017-05-17 | 江苏升元菲尔科技发展有限公司 | Panel tip discharge type plasma generator |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20070111 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |