CN200975966Y - Parallel plate capacitance driven MEMS bending torsion fatigue experimental device - Google Patents
Parallel plate capacitance driven MEMS bending torsion fatigue experimental device Download PDFInfo
- Publication number
- CN200975966Y CN200975966Y CNU2006201584218U CN200620158421U CN200975966Y CN 200975966 Y CN200975966 Y CN 200975966Y CN U2006201584218 U CNU2006201584218 U CN U2006201584218U CN 200620158421 U CN200620158421 U CN 200620158421U CN 200975966 Y CN200975966 Y CN 200975966Y
- Authority
- CN
- China
- Prior art keywords
- parallel plate
- electrode
- plate capacitor
- sample
- ground
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Micromachines (AREA)
Abstract
The utility model relates to a parallel plate capacitor driven MEMS bend and torsion fatigue experimental apparatus, belonging to basic research field on material characteristic of micro-nano scale. In the utility model, the bend and torsion of a fatigue sample (5) is driven by two parallel plate capacitor drivers (3, 12) respectively. One end of fatigue sample (5) is connected with a grounded electrode (4); the other end is connected with the superior pole plate of a third parallel capacitor driver (12). One end of the vertical beam in the middle of the sample (5) is connected with the superior pole plate of the first parallel plate capacitor driver (3); the other end is connected with the superior pole plate of the parallel plate capacitor sensor; the inferior pole plate of the parallel plate capacitor is connected to the external amplitude detection circuit through a detecting electrode, and thus real-time amplitude of the sample is obtained. The utility model employs two parallel plate capacitor drivers driving bend and torsion of the sample respectively without influence on each other, overcomes the shortage that the prior art can only simulate components of MEMS in single stress environment.
Description
Technical field
The utility model relates to a kind of parallel plate capacitor driven MEMS flexion torsion fatigue test device, be used for (the Micro-Electro-Mechanical System of MEMS under the multiaxis ambient stress, MEMS (micro electro mechanical system)) research of polysilicon structure fatigue properties belongs to micro-nano-scale material behavior fundamental research field.
Background technology
MEMS (Micro Electromechanical System, i.e. microelectromechanical systems) is meant and integrates microsensor, actuator and signal Processing and control circuit, interface circuit, communicates by letter and the Micro Electro Mechanical System of power supply.Summary is got up, and MEMS has following basic characteristics, microminiaturized, intelligent, multi-functional, high integration and be suitable for producing in enormous quantities.
The technical foundation of MEMS can be divided into the following aspects: 1, design and emulation technology; 2, material and process technology; 3, encapsulation and mounting technology; 4, measurement and detection technique; 5, integrated and systems technology etc.In measurement and detection technique, the silicon that belongs to hard brittle material under the macrostate can produce fatigue properties under micro-nano-scale, also not too clear and definite at present for the mechanism that this variation takes place.Understand this mechanism and measure the fatigue properties parameter of silicon under micro-meter scale and have great significance for MEMS reliability design and life prediction.
Present some that exist are used for MEMS structured material performance detection device and have used comb actuator to carry out horizontal static driven more, therefore only can analog MEMS single-phase stress working environment simple in structure, because the horizontal binding character that drives, can't the analog MEMS structure be subjected to the true stress environment of crooked and twisting action simultaneously.
Therefore in order to satisfy the designing requirement of MEMS system architecture, must introduce the precision measurement apparatus of new miniaturization and study its flexion torsion multiaxis fatigue failure characteristic.
The utility model content
Basic goal of the present utility model is: by the parallel plate capacitor driver reasonably is set, and utilize its characteristic that can produce vertical drive, fatigue testing specimen is applied bending and distorting stress simultaneously, thereby it is under the typical multiaxis ambient stress.By the use of parallel plate capacitor sensor, obtain the Oscillation Amplitude data of sample simultaneously.
Parallel plate capacitor driven MEMS flexion torsion fatigue test device, the 3rd parallel plate capacitor 12 that step 33 is formed on second parallel plate capacitor 6 that step 35 is formed on first parallel plate capacitor 3 that mainly includes first drive electrode 1, second drive electrode 10, ground-electrode 4, detecting electrode 8, experimental sample 5, is made up of step 34 on first hearth electrode 2 and first, second hearth electrode 7 and second, the 3rd hearth electrode 9 and the 3rd.Wherein, experimental sample 5 is the semi-girder that an end is fixed in ground-electrode 4, the other end is connected with the 3rd top crown 33 of the 3rd parallel plate capacitor 12, the middle part of sample 5 is provided with perpendicular crossbeam, one end of crossbeam links to each other with first top crown 34 of first parallel plate capacitor 3, the other end of crossbeam and second parallel plate capacitor 6 second on step 35 link to each other.Step 33, experimental sample 5 and crossbeam is connected as a single entity and unsettled under the support of the fixed bed of ground-electrode 4 on the step 35, the 3rd on the step 34, second on first.First hearth electrode 2 is by first drive electrode, 1 indirect current, and the 3rd hearth electrode 9 connects alternating current by drive electrode.Second hearth electrode 7 by second detecting electrode 8 connect outside amplitude detecting circuit obtain in the experimentation experimental sample 5 Oscillation Amplitude, on first on the step 34, second on the step 35, the 3rd step 33, experimental sample 5 by ground-electrode 4 ground connection.
The last plane of described experimental sample 5 has leg-of-mutton breach makes fatigue phenomenon be easy to observe.
Described ground-electrode 4 is followed successively by metal level 24, polysilicon structure layer 25, fixed bed 26 from top to bottom.
By be provided with projection below the flat board that suspends, the part that prevents to suspend is sticked with substrate.The bottom crown of three parallel plate capacitors is fixing hearth electrode.
The characteristic that the utility model utilizes the parallel plate capacitor driver can carry out vertical drive makes experimental sample be subjected to the effect of crooked and distorting stress simultaneously, has overcome the electrostatic comb type of drive and has been merely able to realize the laterally deficiency of driving.The utility model by first parallel plate capacitor 3 and the 3rd parallel plate capacitor 12 realize to fatigue testing specimen bending and reverse driving, make it be in crooked and the distorting stress environment under.When by first drive electrode 1, second drive electrode 10 respectively to first hearth electrode 2, when the 3rd hearth electrode 9 applies alternating current, the last step of first parallel plate capacitor 3, the 3rd parallel plate capacitor 12 can be subjected to the effect of the electrostatic force of vertical direction, after this electric signal frequency reaches the natural frequency of parallel plate capacitor, parallel plate capacitor will reach resonance.Experimental sample 5 has been subjected to the bending and the distorting stress of alternation simultaneously under the drive of step 33 on the step on first 34, the 3rd, and fatigue testing specimen just is under the typical multiaxis ambient stress like this.In the experimentation, on first on the step 34, the 3rd vibration of step 33 drive on second changes in capacitance between the step 35 and second hearth electrode 7, thereby second hearth electrode 7 connects the Oscillation Amplitude of the real-time acquisition sample of outside amplitude detecting circuit by detecting electrode 8.Simultaneously Powerful Light Microscope is set above sample and the situation of carrying out that the CCD camera comes observation experiment, extrapolates the windup-degree of sample, try to achieve the suffered stress level of sample with Finite Element Method at last according to the Oscillation Amplitude that records.In order to improve the suffered stress level of sample, shorten experimental period, the breach of triangular form has been opened on the plane on the sample centre, has used the resonance characteristics of this device simultaneously in experimentation.
The beneficial effects of the utility model:
1, the utility model adopts the parallel plate capacitor structure, has realized vertical static driven, has overcome traditional pectination electrostatic actuator and can only realize the laterally deficiency of driving.
2, the utility model adopts two parallel plate capacitor drivers respectively sample to be carried out bending and reverses driving, and is independent of each other, customer service existing apparatus can only the single-phase stress working environment of analog MEMS member deficiency.
3, this device is opened surface thereon at the vertical drive characteristic of parallel plate capacitor driver with the breach of cantilever beam specimen, but not the side.
4, parallel plate capacitor electrostatic actuator can produce bigger electrostatic force, is able to carry out the requirement of fatigue experiment.
Characteristics such as 5, experimental sample and driving and pick-up unit are connected in one, have removed the trouble of clamping and centering from, have handling ease, and be easy and simple to handle.
6, it is simple that this device has processing, easy to operate, obtains true experimental data easily, the characteristics such as multiaxis ambient stress of real simulation MEMS member, and therefore the torsional fatigue The Characteristic Study to the MEMS member that is in microscale has very high value.
Description of drawings
Fig. 1 parallel plate capacitor drives the positive overall situation figure of MEMS flexion torsion fatigue properties experimental provision
Fig. 2 parallel plate capacitor drives MEMS flexion torsion fatigue properties experimental provision three-dimensional structure diagram
Fig. 3 parallel plate capacitor drives MEMS flexion torsion fatigue properties experimental provision cut-open view
The experiment wiring layout of this device of Fig. 4
Among the figure: 1, first drive electrode, 2, first hearth electrode 3, first parallel plate capacitor, 4, ground-electrode, 5, experimental sample, 6, second parallel plate capacitor, 7, second hearth electrode, 8, detecting electrode, 9, the 3rd hearth electrode, 10, second drive electrode, 11, projection, 12, the 3rd parallel plate capacitor, 21, the metal level of first drive electrode, 22, the structural sheet of first drive electrode, 23, the fixed bed of first drive electrode, 24, the metal level of ground-electrode, 25, the structural sheet of ground-electrode, 26, the fixed bed of ground-electrode, 27, the fixed bed of detecting electrode, 28, the structural sheet of detecting electrode, 29, the metal level of detecting electrode, 30, the fixed bed of second drive electrode, 31, the structural sheet of second drive electrode, 32, the metal level of second drive electrode, 33, step on the 3rd, 34, step on first, 35, step on second, 42, by 5,25,33,34, the primary structure layer of 35 these devices that constitute, 43, the breach of sample sample.
Embodiment
Describe present embodiment in detail below in conjunction with Fig. 1～4.
First parallel plate capacitor 3 among Fig. 1, second parallel plate capacitor 6, the 3rd parallel plate capacitor 12 are formed by the flat board and the end electricity level that suspends.The flat board 34,35,33 that suspends is respectively the top crown of electric capacity 3,6,12, and hearth electrode 2,7,9 is respectively the bottom crown of electric capacity 3,6,12.Suspend dull and stereotyped 34,35,33 in the experimentation by ground-electrode 4 ground connection.Hearth electrode 2,9 connects alternating current by first drive electrode 1 and second drive electrode 10 respectively.Like this at hearth electrode 2,9 with suspend and just produced the electric field that changes between dull and stereotyped 34,33, make dull and stereotyped 34, the 33 alternation electrostatic force that are subjected to vertical direction that suspend, when the frequency of this electrostatic force is suitable with the dull and stereotyped natural frequency that suspends, will resonate.Sample 5 acts on when being subjected to bending stress and distorting stress under the drive of the flat board 34,33 that suspends.
As Fig. 2, shown in Figure 3, the superiors of ground-electrode 4 are metal level 24, are polysilicon structure layer 25 below metal level, are fixed bed 26 below the polysilicon structure layer.42 is the main polysilicon structure layer of this experimental provision, experimental sample 5 and crossbeam thereof, suspend dull and stereotyped promptly on first on the step 34, second on the step 35, the 3rd structural sheet 25 of step 33, ground-electrode all be positioned at this layer and be connected as a single entity.This polysilicon structure layer is unsettled under the support of the fixed bed 25 of ground-electrode 4.Suspend dull and stereotyped 33,34,35 and fatigue experiment sample 5 all suspend.11 is convexity layer, and the part that prevents to suspend is sticked with substrate.
Detecting electrode 8 connects direct current, on first on the step 34, the 3rd vibration of step 33 drive on second changes in capacitance between the step plate 35 and second hearth electrode 7.This variation is measured by amplitude detecting circuit, the corresponding software of giving computing machine or single card microcomputer microprocessor again carries out the windup-degree that analyzing and processing just can be measured the Oscillation Amplitude of oscillating flat plate indirectly and then release cantilever beam specimen, the microscopical observed result that this measurement result can be arranged on experimental sample 5 tops compares, and checks its correctness.
As shown in Figure 4, present embodiment is to utilize above-mentioned parallel plate capacitor to drive the designed micromechanics fatigue properties testing program of MEMS flexion torsion fatigue properties research device, the structure of whole device and the size of each member all meet the technological requirement of existing surface micromachined, the structure of parallel plate capacitor driving MEMS flexion torsion fatigue properties research device 65 such as Fig. 1～and shown in Figure 3.
Present embodiment mainly drives MEMS flexion torsion fatigue properties research device operator's console 70 by parallel plate capacitor, terminal control mechanism 61, two signal generators 62 that are connected with terminal control mechanism and 73, the power amplifier 63 and 71 that amplifies with signal with signal generator, and the amplitude measurement circuit 72 that links to each other with the terminal control mechanism input end is formed.
Wherein, parallel plate capacitor drives MEMS flexion torsion fatigue properties research device operator's console 70, comprise that parallel plate capacitor drives MEMS flexion torsion fatigue properties research device 65 and coupled two driving probes 66,44 and detector probe 67, and microscope 68 and the ccd video camera 69 that is located on this microscope.On operator's console 70, its circuit connects to be provided by driving probe on the operator's console 66,44 and detector probe 67.Experimental sample 5 tops are placed with microscope 68, and ccd video camera 69 is equipped with in the microscope top, is used to observe the suspend dull and stereotyped amplitude and the situation of carrying out of test.The sinusoidal signals with fixed frequency of signal generator 62 and 73 generations are passed through power amplifier 63 and 71 respectively and are amplified the back by first drive electrode 1 and second drive electrode 10 that drive in probe 64 and the 66 access parallel plate capacitors driving MEMS flexion torsion fatigue properties research devices 65, ground-electrode 4 is by probe ground connection, detecting electrode 8 is drawn by probe 67, insert the amplitude measurement circuit, insert computing machine at last and carry out analyzing and processing.
It should be noted that at last: above embodiment only in order to the explanation the utility model and and the described technical scheme of unrestricted the utility model; Therefore, although this instructions has been described in detail the utility model with reference to each above-mentioned embodiment,, those of ordinary skill in the art should be appreciated that still and can make amendment or be equal to replacement the utility model; And all do not break away from the technical scheme and the improvement thereof of the spirit and scope of utility model, and it all should be encompassed in the middle of the claim scope of the present utility model.
Claims (2)
1, parallel plate capacitor driven MEMS flexion torsion fatigue test device is characterized in that: the 3rd parallel plate capacitor (12) that step (33) is formed on second parallel plate capacitor (6) that step (35) is formed on first parallel plate capacitor (3) that mainly includes first drive electrode (1), second drive electrode (10), ground-electrode (4), detecting electrode (8), experimental sample (5), is made up of step (34) on first hearth electrode (2) and first, second hearth electrode (7) and second, the 3rd hearth electrode (9) and the 3rd; Wherein, experimental sample (5) is the semi-girder that an end is fixed in ground-electrode (4), the other end is connected with the 3rd top crown (33) of the 3rd parallel plate capacitor (12), the middle part of sample (5) is provided with perpendicular crossbeam, one end of crossbeam links to each other with first top crown (34) of first parallel plate capacitor (3), the other end of crossbeam and second parallel plate capacitor (6) second on step (35) link to each other; Step (33), experimental sample (5) and crossbeam is connected as a single entity and unsettled under the support of the fixed bed of ground-electrode (4) on the step (35), the 3rd on the step on first (34), second, this integral body is by ground-electrode (4) ground connection; First hearth electrode (2) is by first drive electrode (1) indirect current, and the 3rd hearth electrode (9) connects alternating current by drive electrode; Second hearth electrode (7) by second detecting electrode (8) connect outside amplitude detecting circuit obtain experimental sample in the experimentation (5) Oscillation Amplitude, on first on the step (34), second on the step (35), the 3rd step (33), experimental sample (5) by ground-electrode (4) ground connection.
2, parallel plate capacitor driven MEMS flexion torsion fatigue test device according to claim 1, it is characterized in that: the last plane of experimental sample (5) has leg-of-mutton breach.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006201584218U CN200975966Y (en) | 2006-11-10 | 2006-11-10 | Parallel plate capacitance driven MEMS bending torsion fatigue experimental device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006201584218U CN200975966Y (en) | 2006-11-10 | 2006-11-10 | Parallel plate capacitance driven MEMS bending torsion fatigue experimental device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200975966Y true CN200975966Y (en) | 2007-11-14 |
Family
ID=38902250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2006201584218U Expired - Lifetime CN200975966Y (en) | 2006-11-10 | 2006-11-10 | Parallel plate capacitance driven MEMS bending torsion fatigue experimental device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200975966Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106525304A (en) * | 2016-12-12 | 2017-03-22 | 西安交通大学 | MEMS resonant torque sensor used for linear micro-nano material torsion performance measurement |
-
2006
- 2006-11-10 CN CNU2006201584218U patent/CN200975966Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106525304A (en) * | 2016-12-12 | 2017-03-22 | 西安交通大学 | MEMS resonant torque sensor used for linear micro-nano material torsion performance measurement |
| CN106525304B (en) * | 2016-12-12 | 2018-12-18 | 西安交通大学 | A kind of line style micro-nano material twisting property measurement MEMS resonant formula torque sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101441154B (en) | High precision microscopic fatigue tester | |
| CN209541987U (en) | The caliberating device of piezoelectric pressure indicator | |
| CN101249897A (en) | Space sailboard bending and turning mode vibration simulation active control device and method | |
| CN113109592B (en) | Cantilever beam type three-dimensional FBG acceleration sensor | |
| CN100541167C (en) | Three-point bending beam type apparatus for big size material damping test | |
| CN100489485C (en) | Micromechanics measurer and measuring method | |
| CN100498343C (en) | Electric tuning resonance differential frequency accelerator | |
| Avramov-Zamurovic et al. | Embedded capacitive displacement sensor for nanopositioning applications | |
| CN100520348C (en) | MEMS bending and twisting fatigue test device driven by parallel plate capacitor | |
| CN101793911B (en) | Nano indentation system based on scanning electron microscope | |
| CN108919113A (en) | A kind of piezoelectric energy harvesters test device and test method | |
| CN200975966Y (en) | Parallel plate capacitance driven MEMS bending torsion fatigue experimental device | |
| CN103954305B (en) | A kind of MEMS resonant formula charge sensor with flexible lever and method thereof | |
| CN200975967Y (en) | Parallel plate capacitance driven microstructure bending torsion fatigue experimental device | |
| CN101373156B (en) | Sub- and micro- Newton level force measuring system | |
| CN100498276C (en) | MEMS stretching twisted fatigue feature testing apparatus | |
| CN100498275C (en) | Micro-structure twist fatigue testing apparatus driven by parallel plate capacitance | |
| CN203519229U (en) | Quartz piezoelectric six-dimensional force detecting device | |
| CN101539588B (en) | Half-bridge test method for mode resonance frequency of piezoresistive acceleration sensor | |
| CN2864664Y (en) | Microstructure double direction bending pulling fatigue experimental device | |
| CN203287264U (en) | Micro-structure mechanical property piece external-bending testing device | |
| CN2878348Y (en) | Microstructure single direction bending pulling fatigue experimental device | |
| CN206618635U (en) | Micro-compression test system with 3D observation function | |
| CN1789960A (en) | Apparatus for testing one-way flexural-tensile fatigue of microstructure | |
| CN2849703Y (en) | Microstructure resonance double side bending fatique tester based on electro static force driving |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20090729 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |