CN101539588B - Half-bridge test method for mode resonance frequency of piezoresistive acceleration sensor - Google Patents
Half-bridge test method for mode resonance frequency of piezoresistive acceleration sensor Download PDFInfo
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Abstract
The invention relates to and provides a test method for the mode resonance frequency of a piezoresistive acceleration sensor. The invention is characterized in that on the basis of maintaining the original full-bridge circuit connection structure of the piezoresistive acceleration sensor, the abundant frequency spectrum generated by metal collision shock is used as an excitation source, and proper external interface circuit and half-bridge output form are adopted to obtain the resonance frequency information of the acceleration sensor mode, the obtained original data is used for frequency spectrum analysis to obtain micro-structural mode resonance frequency. The resonance frequency of the acceleration sensor mode comprises different resonance frequencies of the same structure of the apparatus in the sensitive direction and non-sensitive direction. First order resonance frequency in different modes of the acceleration sensor are determined to obtain the structure parameters processed and manufactured by the microstructure, and correctness of the structure dimension design is verified to analyze the working state of the apparatus. The test method is applicable to acceleration sensors, pressure sensors and the like which have full-bridge structural high measuring piezoresistance, capacitor and the like.
Description
Technical field
The present invention relates to provide a kind of method of testing of the mode resonance frequency based on piezoresistive acceleration sensor, the half-bridge test method of mode resonance frequency of the piezoresistive acceleration sensor of little processing and manufacturing of high range in relating to or rather belongs to the mechanical test analysis field of microsensor.
Background technology
In minute mechanical and electrical system (MEMS), mode is meant the vibration mode that a kind of structure has, the eigen vibration frequency that different vibration modes is corresponding different.The model analysis of microstructure is that [Huang is defended stroll Lu Cheng 1000000 years of eastern rosy clouds for acquisition device geometry information and a kind of important analysis method of testing positive device duty, encapsulation is to the influence of the high G value of MEMS sensor performance, functional material and device journal, 2002,8 (3), pp251-258].Range is at 2000g (g=9.8m/s
2) piezoresistive acceleration sensor of above little processing and manufacturing has important application in a lot of fields, be a main aspect [V.T.Srikar who studies at present, Stephen D.Senturia, The reliability of microelectromechanical systems (MEMS) in shock environments, Journal of microelectromechanical systems, 2002, V11 (3), pp206-214].The resonant frequency of acceleration transducer sensitive direction single order mode is an important parameter weighing its bandwidth of operation.First order resonance frequency is high more, and then device just has wide more operating frequency range, and is therefore, normal in different ways to obtain the important information of this device of resonant frequency.Yet the resonant frequency information of other mode of microstructure obtain design, enforcement and application to device and the material [R.Rabe that plays an important role, K.Janser, and W.Arnold, Vibrations of free andsurface-coupled atomic force microscope cantilevers:theory and experiment, Rev.Sci.Instrum.67 (9), 1996, pp3281-3293].Because, the different modalities correspondence different motion form of device same structure, from relevant experiment and simulation test, the useful information that is ejected in the mechanical structure information that can acquisition device and the course of work.Because test and the test under real working environment of device under laboratory condition has bigger otherness.Therefore, the resonant frequency that obtains acceleration transducer is a kind of important analysis approach, to the eigenvibration of recognition means with obtain extraneous eigen vibration and impact significant.
Piezoresistive acceleration sensor generally adopts the mode of connection of Hui Sitong full-bridge or half-bridge circuit to be used for the extraction of acceleration information.As piezoresistive acceleration sensor, in the full bridge measurement circuit, be the opposite side that the pressure drag that stressed character is identical inserts electric bridge, different pressure drags inserts adjacent side, and its output sensitivity doubles than half-bridge structure, and nonlinearity erron and temperature error all improve.Therefore, sensitive resistance full-bridge circuit structure is widely used in the obtaining of multiple signal, its reason is that the structure output device of full-bridge form has many good qualities: one is to have bigger output signal, promptly has bigger sensitivity output, another one more chief reason is, full bridge structure has input signal and the noise that can eliminate the common mode composition on electricity, make that the input of useful differential signal can be exported effectively.At present, in the design and enforcement of MEMS (micro electro mechanical system), the general form that all sensitive structure or responsive mode is designed to full-bridge circuit, perhaps the micro-mechanical inertia designs is become a pair of identical micro mechanical structure, and then the sensitive resistance or the capacitance structure of processing and manufacturing full-bridge in the above, these constituted modes are used for eliminating vibration equally and impact the common mode influence that is brought.Full bridge structure also has implements characteristics such as simple, is to obtain the extraneous effectively main path of sensitive information.
Though full bridge structure is the effective way of conduct inhibition common mode composition normally,, in information extraction process, some associated dynamic information of relevant device inside are but covered.Test finds that in middle high-range acceleration transducer, the resonance wave of other mode of piezoresistive acceleration sensor generally also has been suppressed.And in half-bridge experiment, difference is subjected to the pressure drag of force direction to insert electric bridge as adjacent side, and electric bridge output has highly sensitive, non-linear characteristic such as better.But not inhibited to the common mode composition, therefore, the form that can utilize half-bridge to export is obtained the information of abundanter microstructure mode.
General simulation tool such as finite element analysis software ANSYS can analyze former rank mode of microstructure.On the implementation, can obtain the modal information of microstructure by methods such as shaking table or laser strobe tests, be activated restrictions such as mode and driving frequency equally, these methods are comparatively effective to the smaller structure of elasticity coefficient, and the mode of centering high-range acceleration transducer is obtained and had certain difficulty.Therefore, the present invention intends on the circuit structure that does not change original acceleration transducer, adopt the external half-bridge way of output, utilize the mode of metal bump resonance excitation, to the raw data extraction and analysis, obtain the modal information of acceleration transducer sensitive direction and non-sensitive directional correlation vibrational structure in conjunction with means such as gorgeous leaf transformation analyses.
Summary of the invention
In sum, the object of the present invention is to provide a kind of in the method for testing of mode resonance frequency of piezoresistive acceleration sensor of high range.The present invention is characterised in that on the basis that keeps the original full-bridge circuit syndeton of piezoresistive acceleration sensor, utilize metal bump to impact and produce abundant frequency spectrum as driving source, by suitable external circuits, adopt the form of half-bridge output, to obtain the resonant frequency information of device mode, utilize the raw data that obtains to carry out spectrum analysis then, combining theoretical analysis and test data more accordingly, the mode resonance frequency of acquisition microstructure.The resonant frequency of mode comprises the different resonant frequencies of device in the same structure of sensitive direction and non-sensitive direction.The present invention has not only provided the method for testing of middle high-range acceleration transducer device mode resonance frequency, but also can determine the first order resonance frequency of acceleration transducer different modalities, can obtain the structural parameters of microstructure processing and manufacturing thus, the correctness of checking physical dimension design, and the correctness of analysis device duty.The result of full bridge structure test is not got rid of in this test, and is suitable for having the acceleration transducer, pressure transducer etc. of the types such as high range piezoresistance, electric capacity of full bridge structure.
Different its resonant frequencies of sensitive structure have different mathematical expression forms.Fig. 1 is a kind of structural representation of the simplest beam type acceleration transducer, mode such as cantilever beam structure exists deflection, reverse.Numeral 1 expression semi-girder among Fig. 1, four sensitive resistance zones on the numeral 2 expression semi-girders, the responsive normal orientation of numeral 3 expression sensors, the non-sensitive horizontal direction of numeral 4 expression sensors.For this cantilever beam structure, the resonant frequency of the single order deflection form of sensitive direction 3, promptly the resonant frequency of mode 1 is:
Wherein, k is the normal direction elasticity coefficient of semi-girder, and m is the effective mass of semi-girder, and h is the thickness of semi-girder, and L is a length, and E and ρ are respectively the Young modulus and the density of silicon.
And the single order deflection resonant frequency of non-sensitive horizontal direction 4, promptly the resonant frequency of mode 2 is:
In the formula, k
TrBe semi-girder transverse elasticity coefficient, w is the width of semi-girder.Because width w will that is to say much larger than thickness h, semi-girder lateral resonance frequency f
TrHigh a lot of more than the resonant frequency f of sensitive direction, therefore, semi-girder lateral resonance frequency wave and high order of frequency ripple are not easy to eject; Especially the output form of full bridge structure is understood the appearance that suppresses high order of frequency from electricity and mechanics to a certain extent.
Piezoresistive acceleration sensor is made of four sensitive resistances, four sensitive resistances of acceleration transducer and corresponding amplifying circuit connected mode as shown in Figures 2 and 3, wherein voltage (being generally 5V) is to be added on the Wheatstone bridge of being made up of sensitive resistance.Fig. 2 is acceleration transducer and operational amplifier are connected output with full bridge signal a synoptic diagram.In full-bridge connects, output in the middle of two pairs of homonymy sensitive resistances is connected respectively to two input ends of operational amplifier.At the full-bridge sensitive structure vibratory impulse is had the common mode inhibition effect, especially high order mode is had certain inhibiting effect.Therefore, on the full bridge structure basis that keeps original acceleration transducer, on circuit, adopt the half-bridge output form to be used for obtaining the output characteristics of sensitive structure.Fig. 3 output synoptic diagram that to be sensor be connected with the half-bridge form with operational amplifier.In half-bridge output, four sensitive resistances are identical with the full-bridge form with the connection of operational amplifier, and an input end that just will be connected in two input ends of operational amplifier is connected with ground, exports with the formation half-bridge.Like this, in fact input to operational amplifier, just be equivalent to sensor and have only half bridge circuit in work with regard to the signal that has only half bridge circuit.Such result is that the signal amplitude of half-bridge output can be lost half, can demonstrate fully out because the characteristic of the output waveform of sensor sensing direction can and be impacted the response device that is brought by vibration, can not be suppressed.The method is not got rid of the approach that full bridge structure can obtain mode resonance frequency, by the easier resonant frequency of observing the intrinsic waveform character of sensor and obtaining mode of oscillation of half-bridge form, is a kind of effective method just.
In the present invention, utilize a Metallic rod to collide the excitaton source that is used for producing high acceleration and high-frequency composition ripple mutually with ground metal riveting stake when falling, the collision end end face of Metallic rod at first is decelerated, then upwards acceleration.Collision end end face generation velocity variations also produces stress wave (ACOUSTIC WAVE IN SOLIDS), and stress wave is propagated to the other end of Metallic rod.When t=L/C (L is the length of Metallic rod, and C is the velocity of sound in the Metallic rod), sound wave passes to the sensor side of Metallic rod.If sensor and Metallic rod directly are rigidly connected, sound wave just can pass to sensor fully.
Fig. 4 is that 3 kinds of device are installed signal.Be the sensitive direction of acceleration transducer along pin direction (y direction among the figure).Fig. 4 (a) is when device pin 12 directions of installing and Metallic rod 10 axial consistent, promptly along acceleration of gravity direction y direction, collides at Metallic rod free-falling and metal anvil and just to have write down the output of acceleration transducer at sensitive direction; Equally, Fig. 4 (b) is when pin one 2 directions and Metallic rod 10 are vertical, has just obtained device in non-sensitive direction, i.e. the output of horizontal direction (x direction).Fig. 4 (c) is the synoptic diagram that device is installed in the non-sensitive z direction in Metallic rod top; The coordinate of Fig. 4 (d) expression device.
Whole test device sketch is shown in 5.In the experiment, sensor is fixed in some way the tail end of Metallic rod.Produce strain wave in the metal anvil collision process, strain wave will pass to acceleration transducer along Metallic rod, and acceleration transducer writes down this collision process.Finally data are carried out gorgeous leaf transformation analysis, obtain the power spectrum of device output, promptly the relation of squared magnitude and frequency can be judged on the peak position of frequency spectrum, therefrom just can obtain required device mode and corresponding resonant frequency.
Concrete implementation step:
(1) installation of acceleration transducer, connection total arrangement:
At first, according to a kind of installation in three kinds of mounting meanss shown in Figure 4, utilize double faced adhesive tape or 502 glue degree of will speed up sensors 11 to be fixed on the tail end of metallic aluminium bar 10 of certain-length and diameter tested piezoresistive acceleration sensor.Then, degree of will speed up sensor is connected with amplifying circuit 5 then, constitutes full-bridge or half-bridge form; Just connecting according to Fig. 2 be the full-bridge output form, is the half-bridge way of output just according to the connection of Fig. 3.Be that amplifying circuit 5 is connected with computer data acquisition system 18 at last, total arrangement as schematically shown in Figure 5.The software that starts computing machine and control corresponding data acquisition system (DAS) is Topview400, opens corresponding power supply and makes device and operational amplifier and computing machine be in normal operating conditions.
(2) experimentation:
In the experiment, according to Fig. 5 fixedly the metallic aluminium bar 10 of acceleration transducer from metal anvil 17 that fixes on the ground of the free drop impact of certain altitude collision.Metallic rod and ground metal riveting stake collision impact produce higher acceleration and the abundant pumping signal of frequency, contain the frequency ripple consistent in the high frequency waves that excite with the acceleration transducer resonant frequency, so just the resonance wave of device at sensitive direction and horizontal direction different modalities can be ejected, obtain the resonant frequency information of acceleration transducer under sensitive direction and non-sensitive horizontal direction different modalities with this.Fig. 6 and Fig. 8 are respectively acceleration transducer output voltage signal amplitude and time relation under sensitive direction and side knock.
The metal riveting stake is of a size of in the test: long 29.8cm, wide 26.7cm, high 19.2cm; The metallic aluminium bar is long to be 1m, diameter 1.5cm; Sensor 13 (perhaps 14 positions) is fixed on the tail end of metallic aluminium bar, the small-signal that sensor produced is connected with operational amplifier 5 by soft cable 7, be connected with the computing machine 18 with data acquisition function by cable again through amplifying signal, the waveform that collision process produces is shown on the computer screen.
(3) data acquisition and analysis:
Produce strain wave in the metal bump process, strain wave will pass to acceleration transducer along the metallic aluminium bar, when the stress wave of mutual collision generation is higher than data acquisition system (DAS) preset threshold level, the data acquisition system (DAS) of computing machine will begin the voltage waveform of record output automatically.
Fig. 6 and Fig. 8 are respectively acceleration transducer output voltage signal amplitude and the raw data of the time relations under sensitive direction and side knock of utilizing computer data acquisition system to obtain.This raw data is output voltage signal amplitude and time relation, promptly is the corresponding relation on the time domain, wherein, and the size of the big or small direct corresponding acceleration of voltage signal amplitude.In order to obtain the relation of corresponding frequencies and output characteristics, also need data-switching.Promptly utilize the data analysis function in the data acquisition system (DAS), utilize gorgeous leaf transformation analysis mode that data are analyzed the raw data that obtains, promptly obtain the output intensity on the frequency domain and the corresponding relation of frequency, just obtain power spectrum, Fig. 7 and Fig. 9 are respectively Fig. 6 and the power spectrum of Fig. 8 through obtaining behind the gorgeous leaf transformation, can find the obviously information such as intensity of wave of the different frequency position of correspondence from power-frequency analysis, obtain the information of final acceleration transducer mode resonance frequency.
When sensitive direction is parallel with the acceleration direction, i.e. (shown in Fig. 4 (a)) during pin direction and Metallic rod axial consistent shown in Figure 6ly write down the output of acceleration transducer at sensitive direction.In order to verify output result's correct shape, this device can be carried out installation testing horizontal the placement, when the pin direction of acceleration transducer and Metallic rod are axially vertical (among the figure shown in 4 (b)), output of writing down the acceleration transducer transversely direction shown in Figure 8, then data are carried out gorgeous leaf transformation analysis, obtain the power spectrum of device output, i.e. the relation of squared magnitude and frequency gets final product the corresponding mode resonance frequency of discriminatory analysis acceleration transducer from the peak position of frequency spectrum.
In sum, the half-bridge test method of the mode resonance frequency of piezoresistive acceleration sensor of the present invention is characterized in that testing procedure is:
A. tested piezoresistive acceleration sensor is installed on the tail end of metallic aluminium bar according in following three kinds of mounting meanss any:
(1) axial consistent (sensitive direction) of the pin direction of acceleration transducer and Metallic rod;
(2) axial vertical (the non-sensitive direction) of the pin direction of acceleration transducer and Metallic rod;
(3) the acceleration transducer horizontal positioned is installed in the non-sensitive direction on Metallic rod top;
B. then, degree of will speed up sensor is connected with operational amplifier, constitutes the half-bridge output form, in the output of description half-bridge, identical when the connection of four sensitive resistances and operational amplifier and full-bridge output, an input end that just is connected to two input ends of operational amplifier is connected with ground;
C. the free drop impact of metallic aluminium bar that step a is equipped with acceleration transducer is collided the metal riveting stake that fixes on the ground, produces the abundant pumping signal of frequency;
D. the described pumping signal that produces by acceleration transducer of step c, be connected with operational amplifier by cable, be connected with computing machine by cable through amplifying signal, automatically write down the voltage waveform of output by the data acquisition system (DAS) of computing machine, by gorgeous leaf transformation analysis, the power spectrum that obtains exporting obtains required acceleration sensor mode and corresponding resonant frequency.
The range of piezoresistive acceleration sensor of the present invention is the middle high range greater than 2000g, by determining the first order resonance frequency of acceleration transducer different modalities, can also obtain the structural parameters of microstructure processing and manufacturing, the correctness of checking physical dimension design can be used to the analysis device duty.Method of testing is suitable for having acceleration transducer, pressure transducer of types such as the high range piezoresistance, electric capacity of full bridge structure etc.
Description of drawings
Fig. 1. a kind of structural representation of beam type acceleration transducer; 1 expression semi-girder, four sensitive resistance zones on the 2 expression semi-girders, external line does not draw, the responsive normal orientation of 3 expression sensors, the non-sensitive horizontal direction of 4 expression sensors.
Fig. 2. the full-bridge connected mode synoptic diagram of sensor; The 5th, operational amplifier, the 6th, signal output part, the 7th, metal wire connects, and the 8th, the metal wire tie point, 9 expression ground connection, Vdd is the supply voltage that is applied on the operational amplifier.
Fig. 3. the half-bridge connected mode synoptic diagram of sensor (each digitized representation and Fig. 2 are together).
Fig. 4. three kinds of mounting meanss of device, metallic aluminium bar 10 and acceleration transducer 11 all are signals of disproportional among the figure, and Fig. 4 a, device are installed in the Metallic rod sidewall, and the responsive y direction of device is installed, and pin one 2 directions are parallel with Metallic rod; Fig. 4 b, device are installed in the responsive non-sensitive x direction of Metallic rod sidewall, and the pin direction is vertical with Metallic rod; Fig. 4 c, device are installed in the synoptic diagram of the non-sensitive z direction in Metallic rod top; Fig. 4 d, the coordinate of expression device.
Fig. 5. bar apparatus for impact testing synoptic diagram freely falls, 13 expression device sensitive directions are installed (revolve and turn 90 degrees a kind of installation that can obtain non-sensitive direction), another installation of the non-sensitive direction of 14 expressions, 15 expression acceleration directions, difference in height between 16 expression Metallic rod and the metal anvil, 17 expression metal anvils, 18 expression computer data acquisition systems.
Fig. 6. it is that the acceleration transducer of 6000g is from the 5cm half-bridge output waveform of freely falling body highly that sensitive direction is installed in range on the metallic aluminium bar.
Fig. 7. the power spectrum of the half-bridge output wave of sensor (abbreviation power spectrum) (second figure) among Fig. 6.
Fig. 8. it is that the acceleration transducer of 6000g is from the 5cm half-bridge output waveform of freely falling body highly that non-sensitive z direction is installed in range on the metallic aluminium bar.
Fig. 9. the power spectrum of the half-bridge output wave of sensor (second figure) among Fig. 8.
Embodiment
At range is the 6000g piezoresistive acceleration sensor, carries out theoretical calculation analysis by computer software Ansys, obtains the pairing first order resonance frequency of acceleration transducer different modalities.Wherein, the first order resonance frequency of sensitive direction is 24.1KHz, and horizontal first order resonance frequency is 58.0KHz.
Mode according to Fig. 4 (a), utilize double faced adhesive tape or 502 glue that device is fixed on the Metallic rod at sensitive direction, with half-bridge form output (as shown in Figure 3), the amplifying circuit that is made of operational amplifier and corresponding resistance capacitance has the frequency band of broad to four pins of device according to the positive pole of the power supply that necessarily is linked in sequence, negative pole and two output terminals.Output cable with signal amplifier is connected to computing machine then, starts computing machine and control corresponding data acquisition software (Topview 400 data acquisition softwares), and sampling frequency is not less than 625KHz; Highly the metallic aluminium bar is freely discharged with the metal anvil from 5cm and to collide mutually; After the collision, when the stress wave of generation is higher than data acquisition system (DAS) preset threshold level, the data acquisition system (DAS) of computing machine will begin the voltage waveform of record output automatically mutually.
Fig. 6 and Fig. 7 are that this acceleration transducer is at sensitive direction output waveform synoptic diagram and corresponding power spectrum figure.Among Fig. 6, there is a tangible main ripple in the output of sensitive direction, and the repercussions behind the main ripple, has waveform output clocklike in the repercussions.Obtain power spectrum Fig. 7 by gorgeous leaf transformation, in the variation spectrogram of intensity of Fig. 7 with frequency, can find be lower than the frequency of 100KHz, there are two obvious sharp-pointed peaks, through affirmation be respectively: the first order resonance frequency of sensitive direction is 24KHz, the first order resonance frequency of non-sensitive horizontal direction is 58KHz, and the first order resonant peak intensity of sensitive direction is than the first order resonant peak intensity height of horizontal direction, and what mark among the figure is the feature peak position; And 100KHz has been to having located a plurality of peaks between the 300KHz, but is not clearly, and more the resonant frequency of high frequent vibration mode need be appraised and decided by Theoretical Calculation, does not consider here.
Step keeps the circuit connecting mode of sensor with example 1, just the non-sensitive direction of same sensor according to Fig. 4 (b) is installed on the metallic aluminium bar.Highly Metallic rod is freely discharged with the metal anvil from 5cm equally and collide mutually; The software of computing machine writes down output waveform automatically; Obtain power spectrum by gorgeous leaf transformation.
Fig. 8 and Fig. 9 be this acceleration transducer output voltage waveforms under the non-sensitive horizontal installation in time relation and through pairing power spectrum figure behind the gorgeous leaf transformation.In the pass family tree of output intensity among Fig. 9 and frequency, can find in being lower than the power spectrum chart of 100KHz, there are two obvious sharp-pointed peaks, be resonance peak, through confirming, the first order resonance frequency of sensitive direction is 24KHz, and the first order resonance frequency of non-sensitive horizontal direction is 58KHz, and the result is with example 1 unanimity.But Fig. 6 and Fig. 8 are relatively, and there is not tangible main collision ripple (semisinusoidal output waveform) in the output waveform of non-sensitive direction installation shock among Fig. 8; And the power of Fig. 7 and Fig. 9 (intensity) spectrum relatively in, the resonance peak of horizontal direction (58KHz) is higher than sensitive direction resonance peak (28KHz) intensity among Fig. 9, this has also verified the correctness of this test results of devices.Equally at 100KHz to peak value is arranged between the 300KHz but be not clearly, also need further to calibrate by Theoretical Calculation, do not consider here.
Claims (7)
1. the half-bridge test method of the mode resonance frequency of piezoresistive acceleration sensor, it is characterized in that keeping the basis of piezoresistive acceleration sensor full-bridge circuit syndeton, utilize metal bump to impact and produce abundant frequency spectrum as driving source, pass through external circuits, adopt the half-bridge output form, obtain the information of piezoresistive acceleration sensor mode resonance frequency, obtain the mode and corresponding resonant frequency of device by the computer data acquisition system analysis, testing procedure is:
A. tested piezoresistive acceleration sensor is installed on the tail end of metallic aluminium bar according in following three kinds of mounting meanss any:
(1) the pin direction of acceleration transducer and metallic aluminium bar is axial consistent;
(2) the pin direction of acceleration transducer and metallic aluminium bar is axial vertical;
(3) the acceleration transducer horizontal positioned is installed in the non-sensitive direction of metallic aluminium masthead end;
B. then, degree of will speed up sensor is connected with operational amplifier, constitutes the half-bridge output form, in the output of description half-bridge, identical when the connection of four sensitive resistances and operational amplifier and full-bridge output, an input end that just is connected to two input ends of operational amplifier is connected with ground;
C. the free drop impact of metallic aluminium bar that step a is equipped with acceleration transducer is collided the metal riveting stake that fixes on the ground, produces the abundant pumping signal of frequency;
D. the described pumping signal that produces by acceleration transducer of step c, be connected with operational amplifier by cable, be connected with computing machine by cable through amplifying signal, automatically write down the voltage waveform of output by the data acquisition system (DAS) of computing machine, by the Fourier transform analysis, the power spectrum that obtains exporting obtains required acceleration sensor mode and corresponding resonant frequency.
2. press the half-bridge test method of the mode resonance frequency of the described piezoresistive acceleration sensor of claim 1, it is characterized in that described mode resonance frequency comprises the different resonant frequencies of acceleration transducer in the same structure of sensitive direction and non-sensitive direction.
3. press the half-bridge test method of the mode resonance frequency of the described piezoresistive acceleration sensor of claim 1, it is characterized in that tested piezoresistive acceleration sensor is to be fixed on the tail end of metallic aluminium bar with double faced adhesive tape or 502 glue.
4. press the half-bridge test method of the mode resonance frequency of the described piezoresistive acceleration sensor of claim 1, it is characterized in that described metallic aluminium pole length is 1m, diameter is 1.5cm.
5. press the half-bridge test method of the mode resonance frequency of the described piezoresistive acceleration sensor of claim 1, it is characterized in that the long 29.8cm of being of described metal riveting stake size, wide is 26.7cm, and height is 19.2cm.
6. press the half-bridge test method of the mode resonance frequency of the described piezoresistive acceleration sensor of claim 1, the software that it is characterized in that described computer data acquisition system is Topview 400.
7. press the half-bridge test method of the mode resonance frequency of the described piezoresistive acceleration sensor of claim 1, the range that it is characterized in that described piezoresistive acceleration sensor is greater than 2000g.
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