CN200972565Y - Film vertical sticking device of exposure machine - Google Patents
Film vertical sticking device of exposure machine Download PDFInfo
- Publication number
- CN200972565Y CN200972565Y CN 200620027654 CN200620027654U CN200972565Y CN 200972565 Y CN200972565 Y CN 200972565Y CN 200620027654 CN200620027654 CN 200620027654 CN 200620027654 U CN200620027654 U CN 200620027654U CN 200972565 Y CN200972565 Y CN 200972565Y
- Authority
- CN
- China
- Prior art keywords
- pipeline
- air
- exposure
- egative film
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007664 blowing Methods 0.000 claims abstract description 15
- 239000011521 glass Substances 0.000 claims abstract description 12
- 230000000740 bleeding effect Effects 0.000 claims description 13
- 238000009530 blood pressure measurement Methods 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 6
- 239000002390 adhesive tape Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 4
- 238000005086 pumping Methods 0.000 abstract 11
- 230000008030 elimination Effects 0.000 abstract 1
- 238000003379 elimination reaction Methods 0.000 abstract 1
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Images
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- Lining Or Joining Of Plastics Or The Like (AREA)
Abstract
A film vertically-affixing device of exposure machine comprises an air-guiding solenoid valve which is connected at the air pumping pipeline of a pumping device through an air-guiding pipeline; an affixing attachment by which the operation film is positioned peripherally. The affixing attachment is a tape, wherein the air pumping device comprises a vacuum generator which is used to generate vacuum suction; a plurality of pumping nozzles which are arranged at the exposure glass of exposure frame and is connected with the vacuum generator by the air pumping pipeline via a check valve; a vacuum solenoid valve which is connected with the vacuum generator by an air-closing pipeline; an air-blowing solenoid valve which is connected at the air pumping pipeline between a plurality of air pumping nozzles and the check valve by an air-blowing pipeline; a pressure meter which is connected at the air pumping pipeline between a plurality of air pumping nozzles and the check valve by a pressure-measuring pipeline. The air-guiding pipeline, a plurality of air pumping nozzles, air blowing pipeline and pressure-measuring pipeline are connected at the air pumping pipeline through a three-way connector, the utility model has the effect of exposure clearance elimination.
Description
Technical field
The utility model relates to a kind of exposure machine, relates in particular to a kind of vertical label apparatus of egative film with exposure machine of eliminating exposing clearance.
Background technology
As shown in Figure 1, exposure machine borrows air extractor with egative film absorption location, and general air extractor 100 includes:
One vacuum generator 10 is in order to produce pull of vacuum;
One vacuum solenoid 60 borrows the pipeline 42 of holding one's breath to form annexation with this vacuum generator 10, and in order to control the generation state of these vacuum generator 10 pulls of vacuum;
One air blowing solenoid valve 70, borrowing air blowing pipeline 43 is 44 through three-way connection II, and be connected in the exhaust pipe 40 of several bleed 11 of mouth 20 and reverse checkvalves, whether import the high pressure gas of pneumatic supply with control, the borrow that blows off mouth 20 absorption be positioned the to expose work egative film 50 of glass 30 of bleeding, this is the program of changing before the absorption work egative film 50;
One tensimeter 80 borrows pressure measurement pipeline 45 through three-way connection III promptly 46, and is connected in the exhaust pipe 40 of several bleed 11 of mouth 20 and reverse checkvalves.
So, treat the exposure base (not shown) because of what be positioned over exposure frame inside, be and mouth 20 absorption of being bled by several be positioned to expose work egative film 50 of glass 30, leave for treating that exposure base carries out the gap of contraposition work, and this contraposition gap can be retained to carrying out exposure work, and become exposing clearance, but this exposing clearance has negative influence for exposure accuracy.
The utility model content
Technical problem underlying to be solved in the utility model is that the retention that overcomes the prior art existence has the defective of exposing clearance, and a kind of vertical label apparatus of egative film of exposure machine is provided, and it has the effect of eliminating exposing clearance.
The technical scheme that its technical matters that solves the utility model adopts is:
A kind of egative film of exposure machine label apparatus that hangs down is characterized in that comprise: one leads the atmospheric electricity magnet valve, borrows and leads the exhaust pipe that the atmosphere pipeline is connected in an air extractor; Paste attachment, the egative film periphery of will working attaches the location.
The egative film of the aforesaid exposure machine label apparatus that hangs down, wherein paste attachment is an adhesive tape.
The egative film of the aforesaid exposure machine label apparatus that hangs down, wherein air extractor includes: a vacuum generator, in order to produce pull of vacuum; Several mouths of bleeding are arranged at the exposure glass of exposure frame, borrow described exhaust pipe through a reverse checkvalve, and form annexation with this vacuum generator; One vacuum solenoid is borrowed hold one's breath pipeline and this vacuum generator formation annexation; One air blowing solenoid valve borrows the air blowing pipeline to be connected in several exhaust pipes between mouth and reverse checkvalve of bleeding; One tensimeter borrows the pressure measurement pipeline to be connected in several exhaust pipes between mouth and reverse checkvalve of bleeding.
The egative film of the aforesaid exposure machine label apparatus that hangs down is wherein led atmosphere pipeline, several mouths of bleeding, air blowing pipeline and pressure measurement pipeline and is connected in described exhaust pipe through three-way connection.
The beneficial effects of the utility model are that it has the effect of eliminating exposing clearance.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is the structural representation of general air extractor
Fig. 2 is a structural representation of the present utility model
The number in the figure explanation:
100 air extractors, 45 pressure measurement pipelines
10 vacuum generators, 46 three-way connection III
11 reverse checkvalves 47 are led the atmosphere pipeline
The 20 mouth 48 three-way connection IV that bleed
30 exposure glass, 50 work egative films
40 exhaust pipes, 51 paste attachments
41 three-way connection I, 60 vacuum solenoids
The 42 pipeline 70 air blowing solenoid valves of holding one's breath
43 air blowing pipelines, 80 tensimeters
44 three-way connection II 90 lead the atmospheric electricity magnet valve
Embodiment
At first, see also shown in Figure 2ly, the utility model includes:
One leads atmospheric electricity magnet valve 90, and borrowing and leading atmosphere pipeline 47 is 48 through three-way connection IV, and is connected in the exhaust pipe 40 of an air extractor 100;
Such as the paste attachment 51 of adhesive tape, work egative film 50 peripheries are attached the exposure glass 30 that is positioned exposure frame.
Again, this air extractor 100 includes:
One vacuum generator 10 is in order to produce pull of vacuum;
One vacuum solenoid 60 borrows the pipeline 42 of holding one's breath to form annexation with this vacuum generator 10;
One air blowing solenoid valve 70 borrows air blowing pipeline 43 through three-way connection II promptly 44, and is connected in the exhaust pipe 40 of several bleed 11 of mouth 20 and reverse checkvalves;
One tensimeter 80 borrows pressure measurement pipeline 45 through three-way connection III promptly 46, and is connected in the exhaust pipe 40 of several bleed 11 of mouth 20 and reverse checkvalves.
Based on said structure, the utility model order is attached the location with paste attachment 51 with its periphery again by several mouths 20 absorption of bleeding be positioned to expose work egative film 50 of glass 30; Therefore, when finishing contraposition work when will being converted to exposure work, then allow and lead atmosphere pipeline 91 and present the state of opening, atmosphere is guided to several mouths 20 of bleeding through exhaust pipe 40, remove the absorption affinity that puts on work egative film 50 by leading atmospheric electricity magnet valve 90; And because of work egative film 50 peripheries are attached the location by paste attachment 51, and make the image-region of work egative film 50 hang naturally, to eliminate exposing clearance, promote exposure accuracy.
In addition, after finishing exposure work, only need allow and lead atmospheric electricity magnet valve 90 and will lead 91 sealings of atmosphere pipeline, can produce pull of vacuum by the vacuum generator 10 of air extractor 100, the egative film 50 of will working once again adsorbs the glass 30 that is positioned to expose, carry out contraposition work next time, and because of this work egative film 50 by paste attachment 51 location that attaches, can't allow its working position that is adsorbed the location once again be offset to some extent, keep carrying out smoothly of contraposition work, so, the utlity model has the effect of eliminating exposing clearance.
The above, it only is preferred embodiment of the present utility model, be not that the utility model is done any pro forma restriction, every foundation technical spirit of the present utility model all still belongs in the scope of technical solutions of the utility model any simple modification, equivalent variations and modification that above embodiment did.
In sum, the utility model is on structural design, use practicality and cost benefit, it is required to meet industry development fully, and the structure that is disclosed also is to have unprecedented innovation structure, have novelty, creativeness, practicality, the regulation that meets relevant novel patent requirement is so mention application in accordance with the law.
Claims (4)
1, the vertical label apparatus of a kind of egative film of exposure machine is characterized in that bag is picked up:
One leads the atmospheric electricity magnet valve, borrows and leads the exhaust pipe that the atmosphere pipeline is connected in an air extractor;
Paste attachment, the egative film periphery of will working attaches the location.
2, the vertical label apparatus of the egative film of exposure machine according to claim 1 is characterized in that described paste attachment is an adhesive tape.
3, the vertical label apparatus of the egative film of exposure machine according to claim 1 is characterized in that described air extractor includes:
One vacuum generator is in order to produce pull of vacuum;
Several mouths of bleeding are arranged at the exposure glass of exposure frame, borrow described exhaust pipe through a reverse checkvalve, and form annexation with this vacuum generator;
One vacuum solenoid is borrowed hold one's breath pipeline and this vacuum generator formation annexation;
One air blowing solenoid valve borrows the air blowing pipeline to be connected in several exhaust pipes between mouth and reverse checkvalve of bleeding;
One tensimeter borrows the pressure measurement pipeline to be connected in several exhaust pipes between mouth and reverse checkvalve of bleeding.
4, the vertical label apparatus of the egative film of exposure machine according to claim 3 is characterized in that described atmosphere pipeline, several mouths of bleeding, air blowing pipeline and the pressure measurement pipeline of leading is connected in described exhaust pipe through three-way connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620027654 CN200972565Y (en) | 2006-10-19 | 2006-10-19 | Film vertical sticking device of exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620027654 CN200972565Y (en) | 2006-10-19 | 2006-10-19 | Film vertical sticking device of exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200972565Y true CN200972565Y (en) | 2007-11-07 |
Family
ID=38883820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620027654 Expired - Fee Related CN200972565Y (en) | 2006-10-19 | 2006-10-19 | Film vertical sticking device of exposure machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200972565Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102129954B (en) * | 2010-01-18 | 2012-12-12 | 和舰科技(苏州)有限公司 | Wafer back cleaning device for decreasing defocusing probability during exposure |
-
2006
- 2006-10-19 CN CN 200620027654 patent/CN200972565Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102129954B (en) * | 2010-01-18 | 2012-12-12 | 和舰科技(苏州)有限公司 | Wafer back cleaning device for decreasing defocusing probability during exposure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: CHUANBAO SCIENCE AND TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: ZHANG HONGMING Effective date: 20071214 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20071214 Address after: Postcode of Taiwan, china: Patentee after: Chime Ball Technology Co., Ltd. Address before: Postcode of Taiwan, china: Patentee before: Zhang Hongming |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071107 Termination date: 20151019 |
|
| EXPY | Termination of patent right or utility model |