CN200968774Y - 用于石墨舟加热的电极引入装置 - Google Patents
用于石墨舟加热的电极引入装置 Download PDFInfo
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- CN200968774Y CN200968774Y CN 200620148208 CN200620148208U CN200968774Y CN 200968774 Y CN200968774 Y CN 200968774Y CN 200620148208 CN200620148208 CN 200620148208 CN 200620148208 U CN200620148208 U CN 200620148208U CN 200968774 Y CN200968774 Y CN 200968774Y
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Application Number | Priority Date | Filing Date | Title |
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CN 200620148208 CN200968774Y (zh) | 2006-10-31 | 2006-10-31 | 用于石墨舟加热的电极引入装置 |
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CN 200620148208 CN200968774Y (zh) | 2006-10-31 | 2006-10-31 | 用于石墨舟加热的电极引入装置 |
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CN200968774Y true CN200968774Y (zh) | 2007-10-31 |
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CN 200620148208 Expired - Fee Related CN200968774Y (zh) | 2006-10-31 | 2006-10-31 | 用于石墨舟加热的电极引入装置 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102321877A (zh) * | 2011-09-05 | 2012-01-18 | 北京七星华创电子股份有限公司 | 电极引入装置 |
CN108456874A (zh) * | 2017-12-20 | 2018-08-28 | 湖南红太阳光电科技有限公司 | 一种管式pecvd设备石墨舟电极引入装置 |
CN111223776A (zh) * | 2018-11-23 | 2020-06-02 | 隆基乐叶光伏科技有限公司 | 一种晶硅片镀膜方法方法及装置 |
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2006
- 2006-10-31 CN CN 200620148208 patent/CN200968774Y/zh not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102321877A (zh) * | 2011-09-05 | 2012-01-18 | 北京七星华创电子股份有限公司 | 电极引入装置 |
CN102321877B (zh) * | 2011-09-05 | 2013-08-07 | 北京七星华创电子股份有限公司 | 电极引入装置 |
CN108456874A (zh) * | 2017-12-20 | 2018-08-28 | 湖南红太阳光电科技有限公司 | 一种管式pecvd设备石墨舟电极引入装置 |
CN108456874B (zh) * | 2017-12-20 | 2020-04-03 | 湖南红太阳光电科技有限公司 | 一种管式pecvd设备石墨舟电极引入装置 |
CN111223776A (zh) * | 2018-11-23 | 2020-06-02 | 隆基乐叶光伏科技有限公司 | 一种晶硅片镀膜方法方法及装置 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: 718 friends of Beijing Sheng Electronics Co., Ltd. Assignor: Qixinghuachuang Electronic Co., Ltd., Beijing Contract fulfillment period: 2008.1.1 to 2013.2.1 Contract record no.: 2008110000030 Denomination of utility model: Electric pole introducing arrangement used for heating graphite boat Granted publication date: 20071031 License type: Exclusive license Record date: 20081006 |
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LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2008.1.1 TO 2013.2.1; CHANGE OF CONTRACT Name of requester: BEIJING QIYIBA YOUSHENG ELECTRONIC CO.,LTD. Effective date: 20081006 |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071031 Termination date: 20151031 |
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EXPY | Termination of patent right or utility model |