CN1992453A - Sealed-off radio-frequency excited CO* waveguide laser - Google Patents
Sealed-off radio-frequency excited CO* waveguide laser Download PDFInfo
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- CN1992453A CN1992453A CN 200510136303 CN200510136303A CN1992453A CN 1992453 A CN1992453 A CN 1992453A CN 200510136303 CN200510136303 CN 200510136303 CN 200510136303 A CN200510136303 A CN 200510136303A CN 1992453 A CN1992453 A CN 1992453A
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Abstract
This invention relates to a CO2 laser. The sealed-off RF powered CO2 waveguide laser disclosed in the invention includes: RF source, cooling water pipe, waveguide pipe and the gas in the pipe, pipe shell, front cover, rear cover, RF coupling window, reflection lens, output lens, lens compress hood, in which the said waveguide is sealed by metal sealing materials; the gases in the pipe include CO2 gas and auxiliary gas; the said covers include outside column and inner column, and the outside column and inner column connect through the connecting ring, and the lens is placed in the end of the inner column, the lens compress hood pressed on the lens, and connecting with the inner column through the screw. This invention has good sealing performance, stable power output, removal conveniently, and it can adjust the laser resonator.
Description
Technical field
The present invention relates to CO
2Laser is specifically related to RF excited CO
2Waveguide laser.
Background technology
On the laser development history of nearly half a century, what laser was at full speed advances, and laser has been widely used in fields such as each packing business (coding, mark), manufacturing industry (engraving, cutting, welding), medical treatment, military affairs, communication, environmental protection at present.In order to satisfy the needs of using, various types of lasers successively are developed.RF excited CO
2Laser is a kind of in the laser, and that uses on the domestic market is main by import.For sealed-off radio-frequency excited CO
2Waveguide laser, sealing are one of its key technologies, and the quality of sealing will directly have influence on the life-span of laser.Traditional sealing means is to adopt seal with elastometic washer, or adopts welded seal, and also having a kind of is to adopt the edge of a knife to seal firmly.All there is certain deficiency in these several sealing means.Laser is that electric energy is converted to luminous energy and heat energy in the course of the work, and rubber ring can produce venting and distortion under the situation of heat, makes that gas pressure intensity and the gas componant in the laser changes, and directly has influence on the power output and the life-span of laser.The distortion of rubber ring can have influence on the variation of zlasing mode.The shortcoming of welded seal is that aluminium welding itself just exists technological difficulties, the percent defective height, and after welding got well, dismounting was inconvenient.Edge seal is a kind of hard sealing, and shortcoming is disposable use, and the success rate of sealing is low.As shown in Figure 1, taking to process on end sealing spare 511 interior angle is the blades of 60 degree, is connected with shell 1 and compresses by compressing end cap 512, and the blade of end sealing spare 511 is pressed in the body 1, finishes hard sealing.
Summary of the invention
(1) technical problem that will solve
The purpose of this invention is to provide a kind of good seal performance, stable, the convenient disassembly of power output, can adjust the sealed-off radio-frequency excited CO of resonant cavity
2Waveguide laser.
(2) technical scheme
In order to achieve the above object, the present invention takes following scheme:
Sealed-off radio-frequency excited CO of the present invention
2Waveguide laser comprises gas, shell, front end housing, rear end cap, RF-coupled window, reflecting optics, output eyeglass, eyeglass friction top in cooling water pipe, waveguide and the pipe, and wherein, the metallic seal material is adopted in the sealing of described waveguide; Gas in the described pipe comprises CO
2Gas and assist gas; Described end cap comprises urceolus and inner core, and urceolus is connected by connecting ring with inner core, and eyeglass places the end of inner core, and the eyeglass friction top is pressed on the eyeglass, and is connected with inner core by screw.
Wherein, described RF-coupled window comprises window conductor, window weld tabs, window seat, window pottery, sealing ring, RF window friction top, screw, wherein, window seat is by sealing ring and package closure, the window pottery is connected with the upper end of window seat, and the window weld tabs is connected with the window pottery, and the window conductor dbus crosses the window weld tabs and the window pottery inserts in the waveguide, the RF window friction top is pressed on the window seat, and is connected with shell by screw.
Wherein, the sealing of described waveguide comprises the sealing between sealing, reflecting optics and the rear end cap between sealing, output eyeglass and the front end housing between sealing, blast pipe and the shell between sealing, RF-coupled window and the shell between sealing, rear end cap and the shell between front end housing and the shell.
Wherein, described metallic seal material is an indium.
Wherein, described assist gas is N
2, He, Xe, wherein, CO
2Gas and N
2, He, Xe volume ratio be 1: 1.0～1.6: 0.6～0.8: 6～8.
Wherein, described cooling water pipe is realized sealing by delivery port and the water inlet place that ball is embedded in cooling water pipe.
Wherein, the space length of the inwall of described window seat and window conductor is at least 9mm, and the bottom of window seat and the space length between the top electrode are at least 9mm.
(3) beneficial effect
1) owing to adopt above scheme, the invention solves the problem that gas is rotten, air pressure increases, laser life-span shortens, pattern changes that rubber ring brings because of venting; 2) because employing screw connection between two metalworks of sealing is for convenience detach, and sealing ring can be reused the reduction maintenance cost; 3) because eyeglass places in the inner core of end cap, therefore,, thereby realize the adjustment of laser resonant cavity as long as just can adjust the angle of eyeglass by the angle of screw adjusted inner core.
Description of drawings
Fig. 1 is that prior art end cap seal and optical mirror slip are adjusted structural representation;
Fig. 2 is an overall structure schematic diagram of the present invention;
Fig. 3 is the A-A generalized section of Fig. 2;
Fig. 4 is that rear end cap sealing of the present invention and optical mirror slip are adjusted structural representation;
Fig. 5 is the RF-coupled window construction schematic diagram of the present invention;
Fig. 6 is a water route of the present invention structural representation.
Among the figure: 100, radio frequency source; 1, shell; 2, RF-coupled window; 4, blast pipe; 5, rear end cap; 6, front end housing; 503, reflecting optics; 601, output eyeglass; 7, top electrode; 8, bottom electrode; 9, pottery; 501, indium sealing ring; 502, screw; 503, reflecting optics; 504, eyeglass friction top; 505, adjustment screw; 506, indium sealing ring; 201, window conductor; 202, window weld tabs; 203, window seat; 204, window pottery; 205, indium sealing ring; 206, RF window friction top; 207, screw; 11, water inlet; 12, delivery port; 601-609, ball; 511, end sealing spare; 512, compress end cap, D, connecting ring.
Embodiment
Following examples are used to illustrate the present invention, but are not used for limiting the scope of the invention.
Sealed-off radio-frequency excited CO2 waveguide laser of the present invention consists of the following components: radio frequency source 100, shell 1, RF-coupled window 2, blast pipe 4, rear end cap 5, front end housing 6, reflecting optics 503, output eyeglass 601, see Fig. 2; Top electrode 7, bottom electrode 8, pottery 9 are seen Fig. 3; Indium sealing ring 501, screw 502, reflecting optics 503, eyeglass friction top 504, adjustment screw 505, indium sealing ring 506 are seen Fig. 4; Window conductor 201, window weld tabs 202, window seat 203, window pottery 204, indium sealing ring 205, RF window friction top 206, screw 207 are seen Fig. 5; Water inlet 11, delivery port 12, ball 601-609 sees Fig. 6.
As shown in Figure 2, the present invention always has seven places and relates to sealing problem, front end housing 6 and shell 1, rear end cap 5 and shell 1, two RF-coupled windows 2 and shell 1, blast pipe 4 and shell 1, and the sealing between output eyeglass 601 and front end housing 6, reflecting optics 503 and the rear end cap 5.Sealing between metal and the metal as shown in Figure 4, the indium sealing ring is placed in the groove of shell 1, the boss of front end housing 6 be pressed in indium sealing ring 506 in shell 1 groove above, by screw lock, front end housing and shell 1 are sealed.Sealing between metal and the optical mirror slip as shown in Figure 4, indium sealing ring 501 is placed between rear end cap 5 and the eyeglass friction top 504, be connected by screw 502 between rear end cap 5 and the eyeglass friction top 504, in the process of lock-screw, the indium sealing ring deforms, be filled on the contact-making surface between eyeglass and the rear end cap, eyeglass and rear end cap are sealed.
As shown in Figure 4, the adjustment structure of end cap seal of the present invention and optical mirror slip is an overall structure, has changed the end cap that compresses of a stainless edge seal part of original use and a carbon steel, critical piece of the present invention: 1, shell; 5, rear end cap; 6, front end housing; 7, top electrode; 8, bottom electrode; 504, eyeglass friction top; 206, selected material such as RF window friction top is an aluminium, and material itself is cheap, and is easy to process, and cost reduces.The adjustment process of eyeglass is as follows: the Thickness Design of the connecting ring D of rear end cap 5 is 1.5mm, and by adjusting screw 505, the connecting ring D of rear end cap 5 deforms, and the angle of reflecting optics 503 changes, thereby reaches the purpose that eyeglass is adjusted.
As shown in Figure 5, the structure of the RF-coupled window of the present invention comprises window conductor 201, window weld tabs 202, window seat 203, window pottery 204, indium sealing ring 205, RF window friction top 206, screw 207 compositions.This structural design is mainly considered the key element of three aspects: the window seat 203 that 1, is positioned at shell and the space length of window conductor 201 are greater than 9mm, space length between window seat 203 and the top electrode 7 is greater than 9mm, making gas discharge in waveguide, does not all discharge in the space outside waveguide; 2, window conductor 201 conducts electricity very well, and insulation between the window seat 203; 3, sealing between window seat 203 and the shell 1, the vacuum seal of radio frequency input window assembly own.
As shown in Figure 6, cooling water pipe of the present invention forms in section bar drawing and following process, in order to form this water circulation path, select for use stainless steel ball 601,602,603,604,605,606,607,608,609 to be embedded on the position as shown, hole that forms in section bar drawing and the following process process, carry out the sealing in hole, ball diameter is than the big 0.2mm of water pipe diameter.This kind encapsulating method, convenient, fast, effective.Cooling water is advanced by water inlet 11, is flowed out by delivery port 12.
The composition of gas of the present invention and the embodiment of gas ratio are as follows:
Embodiment 1:CO2: N2: Xe: the He volume ratio is 1: 1.6: 0.8: 7; Laser output power is 27W.
Embodiment 2:CO2: N2: Xe: the He volume ratio is 1: 1.0: 0.6: 6; Laser output power is 28W.
Embodiment 3:CO2: N2: Xe: the He volume ratio is 1: 1.3: 0.7: 8; Laser output power is 32W, and gas is easy to generate glow discharge, and laser output power is stable.
The described sealed-off radio-frequency excited CO2 waveguide laser of this patent and traditional glass tube Laser instrument is compared, and has the advantage of following four aspects: 1, the glass tube laser instrument adopts straight Banish electricity, the high pressure of volts up to ten thousand is arranged on the anode, potential safety hazard is bigger. Laser instrument of the present invention is adopted Use RF excited, do not have high pressure, do not have the potential safety hazard of high pressure; 2, glass tube laser instrument Adopt continuous current excitation, the power supply modulation is difficulty comparatively, and modulating frequency is up to 1.5KHz, this Bright laser instrument is conducive to the power supply modulation, and modulating frequency is 500Hz～10KHz; 3, glass tube There is cathodic sputtering in laser instrument, and eyeglass pollutes easily, directly affects the service life of laser instrument, State's inner glass tube laser instrument is generally more than 1000 hour service life, and laser instrument of the present invention is not Have the sputter problem, eyeglass is not easy to pollute in vacuum chamber, 10,000 hours service life a left side The right side, power stability; 4, the most of patterns of glass tube laser instrument are multimode, if be adjusted into list Mould, power attenuation is big, and laser instrument of the present invention is waveguide laser, and pattern is the TEM00 mould.
Claims (7)
1, a kind of sealed-off radio-frequency excited CO
2Waveguide laser comprises gas, shell, front end housing, rear end cap, RF-coupled window, reflecting optics, output eyeglass, eyeglass friction top in cooling water pipe, waveguide and the pipe, it is characterized in that: the sealing of described waveguide, adopt the metallic seal material; Gas in the described pipe comprises CO
2Gas and assist gas; Described end cap comprises urceolus and inner core, and urceolus is connected by connecting ring with inner core, and eyeglass places the end of inner core, and the eyeglass friction top is pressed on the eyeglass, and is connected with inner core by screw.
2, a kind of sealed-off radio-frequency excited CO as claimed in claim 1
2Waveguide laser, it is characterized in that: described RF-coupled window comprises window conductor (201), window weld tabs (202), window seat (203), window pottery (204), sealing ring (205), RF window friction top (206), screw (207), wherein, window seat (203) is by sealing ring (205) and package closure, window pottery (204) is connected with the upper end of window seat (203), window weld tabs (202) is connected with window pottery (204), window conductor (201) inserts in the waveguide by window weld tabs (202) and window pottery (204), RF window friction top (206) is pressed on the window seat (203), and is connected with shell by screw.
3, a kind of sealed-off radio-frequency excited CO as claimed in claim 1
2Waveguide laser is characterized in that: the sealing of described waveguide comprises the sealing between sealing, reflecting optics (503) and the rear end cap (5) between sealing, output eyeglass (601) and the front end housing (6) between sealing, blast pipe (4) and the shell (1) between sealing, RF-coupled window (2) and the shell (1) between sealing, rear end cap (5) and the shell (1) between front end housing (6) and the shell (1).
4, a kind of sealed-off radio-frequency excited CO as claimed in claim 1
2Waveguide laser is characterized in that: described metallic seal material is an indium.
5, a kind of sealed-off radio-frequency excited CO as claimed in claim 1
2Waveguide laser is characterized in that: described assist gas is N
2, He, Xe, wherein, CO
2Gas and N
2, He, Xe volume ratio be 1: 1.0～1.6: 0.6～0.8: 6～8.
6, a kind of sealed-off radio-frequency excited CO as claimed in claim 1
2Waveguide laser is characterized in that: the aperture that described cooling water pipe work in-process forms is inlayed sealing by ball.
7, a kind of sealed-off radio-frequency excited CO as claimed in claim 2
2Waveguide laser is characterized in that: the space length of the inwall of described window seat (203) and window conductor (201) is at least 9mm, and the space length between the bottom of window seat (203) and the top electrode (7) is at least 9mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101363037A CN100438233C (en) | 2005-12-30 | 2005-12-30 | Sealed-off radio-frequency excited CO* waveguide laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101363037A CN100438233C (en) | 2005-12-30 | 2005-12-30 | Sealed-off radio-frequency excited CO* waveguide laser |
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| Publication Number | Publication Date |
|---|---|
| CN1992453A true CN1992453A (en) | 2007-07-04 |
| CN100438233C CN100438233C (en) | 2008-11-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101363037A Active CN100438233C (en) | 2005-12-30 | 2005-12-30 | Sealed-off radio-frequency excited CO* waveguide laser |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102340095A (en) * | 2011-10-11 | 2012-02-01 | 哈尔滨工业大学（威海） | Double-sealed radio frequency-excited 'Z'-folded CO2 waveguide laser |
| CN104779512A (en) * | 2015-03-26 | 2015-07-15 | 大族激光科技产业集团股份有限公司 | Preparation method of laser 9.3 microns in wavelength |
| CN105071199A (en) * | 2015-09-24 | 2015-11-18 | 江苏卓远激光科技有限公司 | Locking latch structure of laser end cap |
| CN106073893A (en) * | 2016-07-20 | 2016-11-09 | 合肥安博罗医疗器械有限公司 | A kind of CO2laser therapeutic apparatus |
| CN111370498A (en) * | 2020-03-23 | 2020-07-03 | 中国科学院长春光学精密机械与物理研究所 | Small permanent high-vacuum cavity of detector and preparation method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1079341A (en) * | 1992-05-28 | 1993-12-08 | 国防科技大学 | High-power frequency stabilized laser tube |
| CN2507166Y (en) * | 2001-09-25 | 2002-08-21 | 中国科学院长春光学精密机械与物理研究所 | Regulating lens holder for vacuum sealed resonant cavity |
-
2005
- 2005-12-30 CN CNB2005101363037A patent/CN100438233C/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102340095A (en) * | 2011-10-11 | 2012-02-01 | 哈尔滨工业大学（威海） | Double-sealed radio frequency-excited 'Z'-folded CO2 waveguide laser |
| CN102340095B (en) * | 2011-10-11 | 2012-09-05 | 哈尔滨工业大学（威海） | Double-sealed radio frequency-excited 'Z'-folded waveguide CO2 laser |
| CN104779512A (en) * | 2015-03-26 | 2015-07-15 | 大族激光科技产业集团股份有限公司 | Preparation method of laser 9.3 microns in wavelength |
| CN105071199A (en) * | 2015-09-24 | 2015-11-18 | 江苏卓远激光科技有限公司 | Locking latch structure of laser end cap |
| CN105071199B (en) * | 2015-09-24 | 2018-03-02 | 江苏卓远激光科技有限公司 | A kind of locking latch structure of laser end cap |
| CN106073893A (en) * | 2016-07-20 | 2016-11-09 | 合肥安博罗医疗器械有限公司 | A kind of CO2laser therapeutic apparatus |
| CN111370498A (en) * | 2020-03-23 | 2020-07-03 | 中国科学院长春光学精密机械与物理研究所 | Small permanent high-vacuum cavity of detector and preparation method |
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| Publication number | Publication date |
|---|---|
| CN100438233C (en) | 2008-11-26 |
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