CN1983395A - Method of inspecting thin film magnetic head element and inspecting holding jig - Google Patents
Method of inspecting thin film magnetic head element and inspecting holding jig Download PDFInfo
- Publication number
- CN1983395A CN1983395A CN 200610064039 CN200610064039A CN1983395A CN 1983395 A CN1983395 A CN 1983395A CN 200610064039 CN200610064039 CN 200610064039 CN 200610064039 A CN200610064039 A CN 200610064039A CN 1983395 A CN1983395 A CN 1983395A
- Authority
- CN
- China
- Prior art keywords
- leaf spring
- mentioned
- inspection
- anchor clamps
- draw runner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
A method of inspecting thin film magnetic head element can perform efficiently inspection when the inspecting method is combined into the fabricating process in the case of measuring and inspecting the shape of the thin film magnetic head element by SEM. The method includes holding a slider bar having a plurality of the thin film magnetic head elements in a row by an inspecting holding jig made of a nonmagnetic material; loading the slider bar held by the inspecting holding jig to a sampling placing part of a scanning electron microscope; and sequentially executing shape inspection of the plurality of thin film magnetic head elements on the slider bar by the scanning electron microscope.
Description
Technical field
The present invention relates to check the method for shape of thin-film head and the maintenance anchor clamps that use when checking.
Background technology
In the past, adopted optical microscope to carry out the shape measure (the particularly measurement of track record width) of thin-film head.But the resolution of optical microscope is difficult to critically measure (observation) more and more track width of the thin-film head of miniaturization, thereby utilizes sweep electron microscope (SEM, Scanning ElectronMicroscope) to carry out linear measure longimetry.
Patent documentation 1: TOHKEMY 2002-150523 communique
Summary of the invention
The objective of the invention is to obtain a kind of inspection method, under the situation that the shape measure that utilizes SEM to carry out thin-film head is checked, it is checked that operation is combined in the manufacturing process, check efficiently.
And, the objective of the invention is to obtain a kind of inspection with keeping anchor clamps, when being used for the inspection of being undertaken by SEM, can check with high precision.
What the present invention proposed is, the wafer that forms from arranging a plurality of thin film magnetic head elements in length and breadth, when cutting out the draw runner of a plurality of thin film magnetic head elements with row, keeps the state of this draw runner constant, is checked the method for a plurality of thin film magnetic head elements successively by SEM.
That is, the 1st mode of the inspection method of thin film magnetic head element of the present invention is to comprise: the draw runner that row shape ground is had a plurality of thin film magnetic head elements remains on the inspection step that keeps on the anchor clamps that is made of nonmagnetic substance; To remain on this inspection with keeping the draw runner on the anchor clamps to put into the step of the sample mounting portion of sweep electron microscope; And the step of carrying out the shape inspection of a plurality of thin film magnetic head elements on the draw runner by above-mentioned sweep electron microscope successively.
The inspection of using in the method for the present invention with a feature that keeps anchor clamps is, owing to being used for SEM, so by not constituted by the nonmagnetic substance of the solenoid of SEM inside absorption.And, wish to comprise the blind plate of atresia and overlapping leaf spring fixing and that constitute by the list that keeps draw runner-parts on this blind plate.Owing to have blind plate, thus blind plate (checking with the maintenance anchor clamps) is adsorbed on the vacuum suction arm that transports robot, be transported to sweep electron microscope inside and outside.
More particularly, comprise the blind plate of atresia and on this blind plate the inspection of overlapping leaf spring fixing and that constitute by single part with keeping anchor clamps to constitute, the spring arm that on this leaf spring, forms the maintenance groove that inserts draw runner and keep being inserted into the draw runner in this maintenances groove and form by the through slot division of the above-mentioned leaf spring of perforation.
This spring arm can be used in combination 2 types or use separately.Wherein a kind of is that spring arm is pushed in the end with the conical surface that contacts with the end edge portion of the length direction of draw runner, and the effect that the conical surface of spring arm is pushed in this end is will be inserted on the end of draw runner by the length direction that is pressed in this maintenance groove that keeps in the groove.Another kind is, have the pars intermedia that contacts with the center section of the length direction of draw runner and push spring arm by paw, the effect by paw that this pars intermedia is pushed spring arm is to be inserted on the side of draw runner by the length direction that is pressed in this maintenance groove that keeps in the groove.
On leaf spring, can form a plurality of maintenance grooves that are parallel to each other.In this mode, the end is pushed spring arm and pars intermedia and is pushed spring arm and can be arranged in each of a plurality of maintenance grooves, respectively elastic deformation.Perhaps, can be arranged in each of a plurality of maintenance grooves, interconnect, together elastic deformation.
Blind plate and leaf spring are preferably used the gib screw combination.If bonding, in the SEM of vacuum environment, can produce the problem of exhaust, so be undesirable with for example bonding agent.
In addition, hope is, in the blind plate and leaf spring that is made of nonmagnetic substance, leaf spring is made by the nonmagnetic titanium that obtains the higher elasticity of leaf spring at least.
The same smooth when wishing as checking draw runner object, that cut out from wafer with wafer state, but produce in fact sometimes protruding to or recessed to warpage.If with checking with keeping anchor clamps to keep producing the draw runner of warpage, draw runner becomes from checking the state that floats with the maintenance anchor clamps and the conduction deterioration of leaf spring.Therefore, when checking with SEM, the back bias that is used for settling landing energy (landing energy) is difficult to be applied to draw runner, and the resolution of SEM image descends.The 2nd mode of the present invention has proposed to make draw runner and the reliable conducting of leaf spring, the method for checking accurately with SEM.And, the voltage when landing energy refers to electron beam arrival checked property.
It is the 2nd mode of the inspection method of thin film magnetic head element of the present invention, comprise: the draw runner that row shape ground is had a plurality of thin film magnetic head elements inserts the inspection that is made of nonmagnetic substance with keeping in the anchor clamps, with draw runner with by being pressed in the step that this inspections keeps with the state on the maintenance anchor clamps; To remain on this inspection with keeping the draw runner on the anchor clamps to put into the step of the sample mounting portion of sweep electron microscope; And the step of carrying out the shape inspection of a plurality of thin film magnetic head elements on the draw runner by above-mentioned sweep electron microscope successively.
Preferably, inspection comprises with the maintenance anchor clamps: the blind plate of atresia; Leaf spring, overlapping fixing on this blind plate, constitute by the single part that keeps draw runner; And push leaf spring, constitute by other parts different with this leaf spring, overlapping fixing on above-mentioned blind plate, with draw runner by being pressed on this leaf spring.Perhaps preferred, comprising: the blind plate of atresia; Be fixed on this blind plate, keep draw runner with coincidence and by being pressed in this inspections with the leaf spring that forms by single part on maintenance anchor clamps.Owing to have blind plate, blind plate (checking with the maintenance anchor clamps) is attracted on the vacuum suction arm that transports robot, be transported to sweep electron microscope inside and outside.
More particularly, blind plate with atresia, the overlapping leaf spring that is fixed on this blind plate and forms by single part, constitute and the overlapping inspection of pushing leaf spring that is fixed on blind plate maintenance anchor clamps by other parts different with leaf spring, can have following structure, maintenance groove at the bottom of being formed with the band that inserts draw runner on the above-mentioned leaf spring, with the spring arm that keeps being inserted into the draw runner in this maintenance groove and form by the through slot graduation that connects above-mentioned leaf spring, above-mentioned push be formed with on the leaf spring below by making leaf spring, stretch out on above-mentioned maintenance groove by making leaf spring this below, and the draw runner that is inserted in this maintenance groove is kept on the groove bottom by being pressed in.
Preferably push leaf spring and have below discharging, make draw runner with respect to keeping groove loading and unloading release freely and put forth effort portion by elastic deformation on the direction of the elastic force of making leaf spring.Put forth effort portion by having this release, it is easy that the loading and unloading of draw runner become.
On leaf spring, can form a plurality of maintenance grooves in parallel to each other.In this mode, preferably in each of a plurality of maintenance grooves, be provided with at least three positions of the both ends of the length direction of this maintenance groove and pars intermedia and push leaf spring.Owing at least three positions of the both ends of the length direction that keeps groove and pars intermedia, be provided with and push leaf spring, can proofread and correct draw runner protruding to recessed to any warpage.
Preferably pushing leaf spring is connected in leaf spring and the blind plate at least one with gib screw.By adopting screw, make in the SEM of vacuum environment, can not produce exhaust.
Preferably by nonmagnetic substance form push leaf spring be by non magnetic and obtain the below make by the elastomeric brass of making leaf spring.
On the other hand, more particularly, have the blind plate of atresia and overlappingly be fixed on the inspection of the leaf spring that constitutes by single part on this blind plate with keeping anchor clamps, can also have following structure, promptly on leaf spring, form to insert the maintenance groove at the bottom of the band of draw runner and keep being inserted into the draw runner that keeps in the groove and the spring arm of dividing by the through slot that connects leaf spring.Preferred this spring arm is to have from the draw runner top with the taper of the conical surface of the intersection butt of the upper surface of draw runner and side to push spring arm, and the conical surface that spring arm is pushed in this taper realizes being inserted into draw runner in the above-mentioned maintenance groove by a side of the length direction that is pressed in this maintenance groove and the effect on the bottom surface.
This taper is pushed spring arm and can perhaps be used separately also with 2 types.Wherein a kind of is that draw runner is pushed spring arm at the end position of length direction by a side that is pressed in the length direction that keeps groove and the end tapered on the bottom surface, and another kind is that draw runner is pushed spring arm at the pars intermedia of length direction by a side that is pressed in the length direction that keeps groove and the pars intermedia taper on the bottom surface.
On leaf spring, can form a plurality of maintenance grooves in parallel to each other.In this mode, preferably in each of a plurality of maintenance grooves, have taper and push spring arm.Spring arm is pushed in a plurality of tapers can distinguish elastic deformation, also can interconnect, together elastic deformation.
Having inspection that taper pushes spring arm at above-mentioned leaf spring constitutes and the overlapping leaf spring of pushing that is fixed on the blind plate with keeping in the anchor clamps, can have by other parts different with leaf spring.Preferably this push be formed with on the leaf spring below by making leaf spring, this below is keeping stretching out on the groove pushing the different position of spring arm with above-mentioned taper by making leaf spring, will be inserted into slide block in this maintenances groove by being pressed on the maintenance groove bottom.Push spring arm and push leaf spring if be used in combination taper like this, can enlarge and send out the meter degree of freedom.
Preferably push be formed with on the leaf spring discharging below by the direction of the elastic force of making leaf spring on elastic deformation and make draw runner keep in the groove loading and unloading release freely to put forth effort portion.Because having this release puts forth effort portion, it is easy that the loading and unloading of draw runner become.
On leaf spring, can form a plurality of maintenance grooves in parallel to each other.In this mode, preferably in each of this a plurality of maintenance grooves, spring arm is pushed in above-mentioned taper and the above-mentioned leaf spring of pushing is provided with more than 3 altogether, is positioned at the both ends and the pars intermedia of the length direction of this maintenance groove at least.Push spring arm and push leaf spring owing to have taper more than 3, can proofread and correct draw runner protruding to recessed warpage to both direction.
Preferred blind plate with push leaf spring and be connected with gib screw.Equally, preferably blind plate is connected with gib screw with leaf spring.By adopting screw, make in the SEM of vacuum environment, can not produce exhaust.
Push leaf spring preferably by non magnetic and obtain the below make by the elastomeric brass of making leaf spring.Equally, leaf spring is also preferably pushed the elastomeric titanium of spring arm and is made by obtaining taper.
Utilize method of the present invention, utilize the shape of SEM MEASUREMENTS OF THIN magnetic head under the state of draw runner that can be in manufacturing process.
Because inspection of the present invention forms with the multiple plate structure of maintenance anchor clamps by the leaf spring that comprises blind plate at least and be made of single part, so can make the transmission robotization of the anchor clamps (draw runner) inside and outside SEM.Spring arm by making leaf spring or spring arm and push leaf spring (portion is puted forth effort in release) elastic deformation, the loading and unloading of draw runner can be carried out at short notice, so good operability.And, owing to keep the spring arm of draw runner to form, so even elastic deformation does not worry producing fine impurity yet when loading and unloading by the through slot that is formed in the leaf spring.For example screw, adhesive tape or cured being used for are loaded and unloaded, then can produce the interior pollution of SEM and the problem of exhaust, hinder correct measurement, but in the present invention, in contrast to this, can avoid such worry.And, be inserted into draw runner in the maintenance groove of leaf spring by the below of pushing leaf spring pushing in the spring arm at least one and be pressed against and keep on the groove bottom, by making leaf spring and leaf spring so, also can check accurately by SEM even on draw runner, produce warpage.
Description of drawings
Fig. 1 (A), (B), (C), (D) are the classification enlarged drawings that adopts the draw runner of inspection method of the present invention, (B) are the B portion enlarged drawings of (A), (C) are the C portion enlarged drawings of (B), (D) are the D portion enlarged drawings of (C).
Fig. 2 is the concept map of the sweep electron microscope that uses in the inspection method of the present invention.
Fig. 3 represents the inspection of using in the inspection method of the present invention stereographic map of first embodiment that keeps anchor clamps.
Fig. 4 is its planimetric map.
Fig. 5 is that expression remains on draw runner the planimetric map of checking with keeping the state on the anchor clamps;
Fig. 6 is the front elevation of Fig. 5.
Fig. 7 is the sectional view along the VII-VII line of Fig. 5.
Fig. 8 is the sectional view of expression as the draw runner of checking object, (A) is normal situation, (B) is the situation that has produced convexity warp, (C) is the situation that has produced concave warp.
Fig. 9 remains on the inspection of second embodiment with keeping the state on the anchor clamps to take out the planimetric map that a part is represented with draw runner.
Figure 10 is the stereographic map that the part of Fig. 9 is amplified expression.
Figure 11 is the sectional view along the XI-XI line of Fig. 9.
Figure 12 remains on the inspection of the 3rd embodiment with keeping the state on the anchor clamps to take out the planimetric map that a part is represented with draw runner.
Figure 13 is the sectional view along the XIII-XIII line of Figure 12.
Figure 14 remains on the inspection of the 4th embodiment with keeping the state in the anchor clamps to take out a part of and planimetric map that illustrate with draw runner.
Description of reference numerals
10 wafers
11 thin layers
12 thin film magnetic head elements
The 12A rendering element
The 12B recording element
W track record width
15 draw runners
20 sweep electron microscopes (SEM)
40 check with keeping anchor clamps
41 blind plates
42,64 gib screws
43 leaf springs
44 keep groove
44a one end
44b one side
The 44c bottom surface
Spring arm is pushed in 45 ends
The 45T conical surface
46 pars intermedias are pushed spring arm
46A presses paw
The 46B linking arm
The 46C elastic arm
47 through slots
50 vacuum suction arms
60 push leaf spring
60A presses making leaf spring in the below
60B discharges the portion of putting forth effort
The 60C fixed part
345 end tapered are pushed spring arm
The 345T conical surface
Spring arm is pushed in taper in the middle of 346
The 346T conical surface
The α intersection
Embodiment
With reference to Fig. 1 (A) to (D) the draw runner manufacturing process that has as a plurality of thin-film heads of object of the present invention is described.On the wafer 10 shown in the figure (A),, in this thin layer 11, form a plurality of thin film magnetic head elements 12 (the general reproduction used and the record upper and lower settings) of arranging in length and breadth simultaneously successively to stipulate the stacked various films of shape.Each thin film magnetic head element 12 has the track width of regulation and the height dimension of regulation.Border at thin layer 11 and wafer 10 schematically indicates boundary line 13.And, the division line in length and breadth 14 shown in Fig. 1 (A), the formation zone of a thin film magnetic head element 12 of expression.Amplify the thickness of expression thin layer 11 and by the zone that forms of the thin film magnetic head element 12 of division line 14 graduation.
Then, this wafer 10 is cut into the draw runner 15 with a row thin film magnetic head element 12.On the ABS of this draw runner 15 face, process guide rail 16 accordingly with each thin film magnetic head element 12.As everyone knows, thin film magnetic head element 12 comprises rendering element (for example GMR or the TMR) 12A of stacked direction below and the recording element 12B of top, and recording element 12B has the record head that is clipped nonmagnetic film 12C by thin magnetic film 12D and 12E.The width W of this nonmagnetic film 12C is the track record width, is the order of magnitude of hundred tens of nm at present.
The inspection method of present embodiment is to utilize SEM to measure the size of the track record width W of a plurality of recording element 12B that show out at ABS successively under the state of draw runner 15.Fig. 2 represents the general configuration of SEM20.Bring together by electron bunching lens 22,23 by the electron beam that electron gun 21 produces, by the magnetic core logical circuit deflection of deflection coil (scanning yoke) 24, at the XY scanning direction.By electronic objective 25 and variable light billows the electron beam (electron detector) of scanning being focused on focus on the sample X shines.On sample X,, landing energy applies the negative voltage (back bias) of regulation for being stablized.Secondary electron that sends by electron beam irradiation and reflection electronic offer CRT29 at detecting device 27 internal conversion Cheng Guang through image amplifier 28.Deflection coil 24 is relevant by sweep circuit 30 realizations with CRT29, and the point at the electronic probe place on sample X surface and the position of the electron beam on the CRT picture keep correct correlationship.Therefore, on the picture of CRT29, can access the amplification SEM picture of sample X.When measuring, 31 keep high vacuum in SEM20 by vacuum pump.
In the methods of the invention, in order in SEM20, to transport draw runner 15, adopt and check with keeping anchor clamps 40.Utilize Fig. 3 to Fig. 7 that first embodiment of this inspection with maintenance anchor clamps 40 is described.Inspection is the blind plate 41 of atresia and the fixing leaf spring 43 of gib screw 42 (Fig. 6) is also used in coincidence on this blind plate 41 dual plate structure with keeping anchor clamps 40.Blind plate 41 and leaf spring 43 are by the titanium manufacturing with high flatness.
On leaf spring 43, form a plurality of maintenance draw runners 15 and the band that is parallel to each other at the bottom of maintenance groove 44.Form with each and keep groove 44 corresponding, the end that is respectively formed at extension Shen on the direction parallel with keeping groove 44 pushes spring arm 45 and pars intermedia is pushed spring arm 46.The end is pushed spring arm 45 and pars intermedia and is pushed spring arm 46 and all formed by the through slot 47 that forms on leaf spring 43.In Fig. 4, through slot 47 is by shadow representation.So, form by utilizing through slot 47 that spring arm 45 is pushed in ends and pars intermedia is pushed spring arm 46, can constitute slipper is minimal maintenance anchor clamps.And, to push spring arm 46 with pars intermedia and do not contact (sliding contact) in order to make the end push spring arm 45 with blind plate 41, preferred between is provided with the gap.
It is independently for each maintenance groove 44 that spring arm 45 is pushed in each end, and its base portion combines with leaf spring 43, has conical surface 45T at the front end free end.Conical surface 45T keeps the end edge portion butt of the length direction of the draw runner 15 in the groove 44 with insertion under free state.That is, the end edge portion of draw runner 15 becomes flat square, and conical surface 45T becomes 45 degree ground contacts respectively with respect to rectangular two faces.Therefore, the effect of conical surface 45T is that draw runner 15 by on the end 44a who is pressed in the length direction that keeps groove 44, is also produced draw runner 15 by the power on the side 44b who is pressed in the length direction that keeps groove 44 simultaneously.
On the other hand, push the leading section of spring arm 46 being arranged at the pars intermedia that respectively keeps groove 44, be formed with can with the center section butt that insert to keep the draw runner 15 in the groove 44 by paw 46A, should mutually combine by linking arm 46B by end of the opposition side of paw 46A.Linking arm 46B with the perpendicular direction of the maintenance groove that is parallel to each other 44 on extend, its both ends with the end of a pair of elastic arm 46C parallel with keeping groove 44 in conjunction with.The other end of a pair of elastic arm 46C and leaf spring 43 combinations.All pars intermedias are pushed spring arm 46 and are provided elasticity by this a pair of elastic arm 46C, under free state, respectively will insert the center section of the draw runner 15 in the maintenance groove 44 by on the side 44b who is pressed in this maintenance groove 44 by paw 46A.On linking arm 46B, be formed with a part that keeps groove 44, the width of the maintenance groove 44 on this linking arm 46B is wideer than the maintenance groove 44 of other parts, make to be embedded under the state that keeps groove 44 that pars intermedia is pushed spring arm 46 can elastic deformation (Fig. 3, Fig. 4) at draw runner 15.
Use in the maintenance anchor clamps 40 in the inspection of said structure, push spring arm 46 under the state that leaves the direction elastic deformation that respectively keeps groove 44 pushing spring arm 45 and pars intermedia from the end, 15 embeddings of draw runner after the process finishing of guide rail 16 are respectively kept in the groove 44, spring arm 45 is pushed in the end and pars intermedia is pushed spring arm 46 if discharge, then conical surface 45T pushes draw runner 15 at one end on the 44a of portion and a side 44b, by paw 46A with draw runner 15 by being pressed on the side 44b.Can utilize this elastic force draw runner 15 to be remained on the tram of checking with keeping on the anchor clamps 40 (desired location).
The inspection that has kept a plurality of draw runners 15 like this can act on the blind plate 41 by making the vacuum suction arm 50 (Fig. 6) that transports robot with keeping anchor clamps 40, with its be transported to SEM20 inside and outside.Be transported to the draw runner 15 (inspection) of the assigned position (sample mounting portion) in the SEM20,, divide into certified products and unacceptable product by the measurement that SEM20 carries out the track record width W of each thin film magnetic head element 12 with keeping anchor clamps 40.
Then, the draw runner 15 (checking with maintenance anchor clamps 40) that finishes of the inspection of SEM20 (linear measure longimetry) and being adsorbed by the vacuum suction arm 50 that transports robot equally when moving into is taken out of.Draw runner 15 cuts off each thin film magnetic head element 12 along the cut-out line 15S shown in Fig. 1 (B), and certified products become slide block.
But, wish the sample X (inspection object) of SEM20, the draw runner 15 that promptly cuts out from wafer, be flat (Fig. 8 (A)) equally during with wafer state, but in fact, the processing by guide rail 16 sometimes etc. produce protruding to or recessed to warpage (Fig. 8 (B), (C)).If with checking that then draw runner 15 becomes the state that floats from the maintenance groove 44 of leaf spring 43 with keeping anchor clamps 40 to keep the draw runner 15 with such warpage, with the conduction deterioration of leaf spring 43.Therefore, when checking with SEM20, the back bias that is used for the settling landing energy is difficult to be applied to draw runner 15 as can be known, and the SEM picture element can descend.Below the inspection of Shuo Ming second～the 4th embodiment of the present invention is with keeping anchor clamps the 240,340, the 440th, the above-mentioned inspection improvement version that keeps anchor clamps 40, even produced the draw runner 15 of warpage, also has the function that makes this draw runner 15 and leaf spring 43 reliable conductings.
With reference to Fig. 9～Figure 11, to the inspection of second embodiment with keeping anchor clamps 240 to describe.Fig. 9 is that expression has kept the planimetric map of the state inspection down of draw runner 15 with the part of maintenance anchor clamps 240.Figure 10 partly amplifies the stereographic map that illustrates with Fig. 9, and Figure 11 is the sectional view along the XI-XI line of Fig. 9.
Check that with keeping anchor clamps 240 be that these members are by the triple plate structures that constitute with lower member: the blind plate 41 of atresia; Overlapping and with the fixing leaf spring 43 of gib screw 42 (Fig. 6) with this blind plate 41; And push leaf spring 60 (61～63), by the parts different with this leaf spring 43 constitute and blind plate 41 overlapping and fixing with gib screw 64.Pushing leaf spring 60 is made by brass (nonmagnetic substance).Push the leaf spring 60 and the inspection of first embodiment is same structures with keeping anchor clamps 40 except having.In Fig. 9～Figure 11,, adopt the Reference numeral identical to illustrate with Fig. 3～Fig. 7 for having the component parts of using each the component parts identical functions that keeps anchor clamps 40 with the inspection of first embodiment.
As amplifying expression among Figure 10, put forth effort the 60B of portion, put forth effort the fixed part 60C that extend the end of the 60B of portion from this release by the vertical release of making leaf spring 60A below pressing plate 60 has below extended on the maintenance groove 44 of leaf spring 43 by making leaf spring 60A, with this, integral body forms plane L font.
The below press making leaf spring 60A from keep groove 44 above (below of Figure 10 and Figure 11) by the application of force, realization will remain on draw runner 15 in the maintenance groove 44 by the effect (with reference to Figure 11 (A)) that is pressed on the 44c of bottom surface on the direction of bottom surface 44c.Release is puted forth effort the 60B of portion under free state and blind plate 41 and leaf spring 43 noncontacts, is held with the state that floats from blind plate 41 and leaf spring 43, can be below discharging carries out elastic deformation on the direction by the elastic force of making leaf spring 60A.Particularly, if being puted forth effort the 60B of portion, release makes its elastic deformation towards pushing near the direction (diagram is direction down) of leaf spring 43, then shown in Figure 11 (B), release is puted forth effort the point of 60B of portion and leaf spring 43 butts as fulcrum, the below keeps the direction of groove 44 (remaining on the draw runner 15 that keeps in the groove 44) to rotate by making leaf spring 60A to leaving, and the below is released by the elastic force of making leaf spring 60A.In these release conditions, draw runner 15 loads and unloads freely in keeping groove 44.Fixed part 60C is fixed on the blind plate 41 by gib screw 64.
What this pushed leaf spring 60 and leaf spring 43 respectively keeps groove 44 corresponding, is arranged on the both ends and these three positions of pars intermedia of this length direction that respectively keeps groove 44 (inserting the draw runner 15 that respectively keeps groove 44).In the present embodiment, the leaf spring 60 of pushing that will be positioned at the both ends of the length direction that keeps groove 44 is pushed leaf spring 61,63 as the end, and the leaf spring 60 of pushing that will be positioned at pars intermedia is pushed leaf spring 62 as pars intermedia.Like this; be arranged at least 3 positions of two ends, pars intermedia of the length direction that keeps groove 44 by pushing leaf spring 60; even at draw runner 15 towards convex direction warpage (Fig. 8 (B)) with under a certain situation of recessed direction warpage (Fig. 8 (C)); also can be by the below of pushing leaf spring 60 by making leaf spring 60A with draw runner 15 by being pressed on the bottom surface 44c that keeps groove 44, guarantee the conduction of draw runner 15 and leaf spring 43.
And the thickness of pushing leaf spring 60 is 0.2mm in the present embodiment, does not contact with electronic objective 25 when making in being sent to SEM20.This is because the focal length of the electronic objective 25 of SEM20 is short, in SEM20, checks with the gap that keeps anchor clamps 240 upsides little.And, about pushing the thickness of leaf spring 60, as long as checked property vibration and push leaf spring 60 electronic objectives 25 and do not contact just passablely when checking also can be below the 0.5mm.The shape of pushing leaf spring 60 is not limited to the L font of present embodiment, can design arbitrarily.
The inspection of said structure with keep anchor clamps 240 to make discharging putting forth effort the 60B of portion towards discharge respectively push leaf spring 60 below by the direction elastic deformation of the elastic force of making leaf spring 60A, and make the end push spring arm 45 and pars intermedia is pushed spring arm 46 under the state that leaves the direction elastic deformation that respectively keeps groove 44, the draw runner 15 that the processing of guide rail 16 has been finished embeds and respectively keeps in the groove 44, put forth effort the 60B of portion if discharged, the end pushes spring arm 45 and pars intermedia is pushed spring arm 46, then the below by making leaf spring 60A with draw runner 15 by being pressed on the bottom surface 44c that keeps groove 44, conical surface 45T pushes draw runner 15 at one end on the 44a of portion and a side 44b, and by paw 46A with draw runner 15 by being pressed on the side 44b.Push the application of force that spring arm 45 and pars intermedia are pushed spring arm 46 by the end, draw runner 15 can be remained on the tram of checking with keeping on the anchor clamps 40 (desired location).Then, by the application of force that making leaf spring 60A is pressed in the below, the warpage of proofreading and correct draw runner 15, whole draw runner 15 is retained as and the state that keeps the bottom surface 44c butt of groove 44.
The inspection that has kept a plurality of draw runners 15 like this acts on this blind plate 41 the vacuum suction arm that transports robot with keeping anchor clamps 240, thus can be transported to SEM20 inside and outside.Be transported to the draw runner 15 (inspection) of the assigned position (sample mounting portion) in the SEM20, utilize SEM20 to measure the track record width W of each thin film magnetic head element 12, divide into certified products and unacceptable product with keeping anchor clamps 240.Even produce under the situation of warpage at draw runner 15; check with keeping on the anchor clamps 240 as long as be maintained at; just can make the bottom surface 44c butt of integral body and maintenance groove 44 by the below by the application of force of making leaf spring 60A; guarantee the conduction of draw runner 15 and leaf spring 43; the landing energy on draw runner surface is stable when SEM checks, can utilize the SEM image of high picture element to measure the track record width W of each thin film magnetic head element 12 accurately.
Then, the draw runner 15 that the inspection (linear measure longimetry) that SEM20 carries out has finished (checking with keeping anchor clamps 240) similarly is transported the vacuum suction arm absorption of robot when sending into.Draw runner 15 cuts off each thin film magnetic head element 12 along the cut-out line 15S shown in Fig. 1 (B), and certified products become slide block.
Then, illustrate that with reference to Figure 12 and Figure 13 the inspection of the 3rd embodiment is with keeping anchor clamps 340.Figure 12 is that expression has kept the planimetric map of the state inspection down of draw runner 15 with the part of maintenance anchor clamps 340, and Figure 13 is the sectional view along the XIII-XIII line of Figure 12.This inspection is with keeping anchor clamps 340 to have that end tapered is pushed spring arm 345 and spring arm 346 is pushed in middle taper, and their effect is will be maintained at the draw runner 15 that keeps in the groove 44 by on the side 44b and bottom surface 44c that are pressed in the length direction that keeps groove 44.This end tapered is pushed spring arm 345 and middle taper and is pushed structure outside the spring arm 346, with the inspection of first embodiment with keeping anchor clamps 40 identical.In Figure 12 and Figure 13,, pay the identical Reference numeral of same Fig. 3～Fig. 7 and represent for having the member of using each the member of formation identical function that keeps anchor clamps 40 with the inspection of first embodiment.
End tapered is pushed spring arm 345 and is kept groove 44 independently to form for each, and its base portion and leaf spring 43 combinations have conical surface 345T at the front end free end.Conical surface 345T is under free state, in the end of inserting the length direction that keeps the draw runner 15 in the groove 44, upper surface 15a and the crossing intersection α butt of side 15b from draw runner 15 tops and this draw runner 15 by this butt, apply the power of three direction a1, a2, a3 (Figure 13) to draw runner 15.That is, realize that end with the length direction of draw runner 15 is by a side 44b who is pressed in the length direction that keeps groove 44 and the effect on the 44c of bottom surface.And, the conical surface 45T that spring arm 45 has and be inserted into the end edge portion butt of the length direction that keeps the draw runner 15 in the groove 44 is pushed in the end of first embodiment, but this conical surface 45T produce with draw runner 15 by the direction of the power on the end 44a who is pressed in the length direction that keeps groove 44 on the end edge butt, so do not have draw runner 15 by the effect that is pressed on the bottom surface 44c that keeps groove 44.
Middle taper is pushed spring arm 346 and is arranged on and respectively keeps on the groove 44, form and can hang down the conical surface 346T that connects with the center section that is inserted into the draw runner 15 that keeps groove 44 above draw runner 15 at free leading section, the end of a side opposite with this free leading section is mutually combining by linking arm 46B.As shown in figure 13, the effect of conical surface 346T is, under free state, be inserted into the center section that keeps the draw runner 15 in the groove 44, the intersection α butt that intersects from the upper surface 15a of draw runner 15 tops and draw runner 15 and side 15b, with the center section of draw runner 15 by being pressed on the side 44b and bottom surface 44c who keeps groove 44.And as shown in Figure 7, the bearing surface that the pars intermedia of first embodiment is pushed the center section of spring arm 46 and draw runner 15 becomes the plane, only with draw runner 15 by the direction that is pressed on the side 44b who keeps groove 44 on acting force.
Because being positioned at being inserted into towards (opposite with first, second embodiment of Fig. 3, Fig. 9 towards) of the side 44b side that keeps groove 44 with thin film magnetic head element 12, draw runner 15 keeps groove 44, so end tapered is pushed spring arm 345 and middle taper and is pushed spring arm 346 and do not cover on the thin film magnetic head element 12, does not hinder the inspection of SEM20.
Use in the maintenance anchor clamps 340 in the inspection of said structure, push spring arm 346 and leaving under the state of elastic deformation on the direction that respectively keeps groove 44 making end tapered push spring arm 345 and middle taper, the draw runner 15 that the processing of guide rail 16 has been finished is embedded into and respectively keeps in the groove 44, end tapered is pushed spring arm 345 and spring arm 346 is pushed in middle taper if discharge, then conical surface 345T, 346T with draw runner 15 by being pressed on the side 44b and bottom surface 44c who keeps groove 44.Push the application of force that spring arm 346 is pushed in spring arm 345 and pars intermedia taper by this end tapered, can check, draw runner 15 is remained state with the bottom surface 44c butt that keeps groove 44 with the tram (desired location) that keeps on the anchor clamps 340.
The inspection that has kept a plurality of draw runners 15 like this is with keeping anchor clamps 340 to act on the blind plate 41 by making the vacuum suction arm that transports robot, be transported to SEM20 inside and outside.The draw runner 15 (checking with keeping anchor clamps 340) that is transported to the assigned position (sample mounting portion) in the SEM20 by the measurement that SEM20 carries out the track record width W of each thin film magnetic head element 12, is divided into certified products and unacceptable product.Even draw runner 15 has produced under the situation of warpage because of track processing etc., if be examined with keeping anchor clamps 340 to keep, then push the application of force that spring arm 346 is pushed in spring arm 345 and middle taper by end tapered, draw runner 15 obtains the conduction with leaf spring 43 with the bottom surface 44c butt that keeps groove 44, so the landing energy on draw runner surface was stable when SEM checked, can utilize the SEM image of high picture element to measure the track record width W of each thin film magnetic head element 12 accurately.
In the same manner, the vacuum suction arm that the draw runner 15 that the inspection of SEM20 (linear measure longimetry) has finished (checking with keeping anchor clamps 340) is transported robot adsorbs then and when sending into.Draw runner 15 cuts off each thin film magnetic head element 12 along the cut-out line 15S shown in Fig. 1 (B), and certified products become slide block.
In the 3rd embodiment, realization will be inserted into the draw runner 15 that keeps groove 44 and push spring arm by the taper that is pressed in the effect on the bottom surface 44c that keeps groove 44, be formed on the end and these two positions of pars intermedia of the length direction that keeps groove 44, but can also be in the other end of the length direction that keeps groove 44, setting is pushed spring arm with the taper that end tapered is pushed spring arm 345 same structures.By at least 3 positions of the both ends of the length direction that keeps groove 44 and pars intermedia with draw runner 15 by being pressed on the bottom surface 44c that keeps groove 44, even draw runner 15 to protruding to recessed in the situation of a certain direction warpage under, also can make draw runner 15 and leaf spring 43 butts, guarantee both conductions.
Below, with reference to Figure 14, to the inspection of the 4th embodiment with keeping anchor clamps 440 to describe.Figure 14 is that expression has kept the planimetric map of the state inspection down of draw runner 15 with the part of maintenance anchor clamps 440.This inspection is in inspection formation with keeping appending the pushing leaf spring 60 of second embodiment on the anchor clamps 340 of above-mentioned the 3rd embodiment with keeping anchor clamps 440.Particularly, has following structures, promptly, the end tapered that utilization forms on leaf spring 43 pushes spring arm 345 and spring arm 346 is pushed in middle taper, push the end of the opposite side of spring arm 345 and push leaf spring 60 with being configured in by what constitute with leaf spring 43 parts inequality with the end tapered that keeps groove 44, be inserted into the draw runner 15 that keeps groove 44 on three positions of the both ends of the length direction that keeps groove 44 and pars intermedia by being pressed on the bottom surface 44c that keeps groove 44.Push spring arm 345,346 and push leaf spring 60 by so making up taper, on the leaf spring 43 that coexists each is kept comparing when spring arm is pushed in the taper more than formation 3 places in the groove 44, design freedom strengthens.In Figure 14,, adopt the Reference numeral identical to represent with Fig. 9～Figure 13 for having the component parts of using each the component parts identical functions that keeps anchor clamps 240,340 with the inspection of second and third embodiment.
According to the 4th embodiment, be inserted into the draw runner 15 that keeps in the groove 44 and also be retained as the state that is pressed against on the bottom surface 44c that keeps groove 44, so can guarantee the conduction of draw runner 15 and leaf spring 43, carry out the inspection of SEM accurately.In the 4th embodiment, adopted two tapers to push spring arm (end tapered pushes spring arm 345 and spring arm 346 is pushed in middle taper) and one and pushed leaf spring 60, but checked with keeping taper that anchor clamps had to push spring arm and can change arbitrarily with the combination of pushing leaf spring.
In the respective embodiments described above, keep groove 44 to be provided with accordingly that spring arm is pushed in the end and pars intermedia is pushed spring arm 46 (end tapered pushes spring arm 345 and spring arm 346 is pushed in middle taper) with each, but can be that some modes only are set.And, has following advantage, be that a plurality of pars intermedias are pushed spring arm 46 (spring arm 346 is pushed in middle taper) and mutually combined by linking arm 46B, can make all pars intermedias push spring arm 46 (spring arm 346 is pushed in middle taper) elastic deformation simultaneously, but also can push spring arm 45 (end tapered is pushed spring arm 345) similarly independently with the end.Perhaps opposite, also can be to push spring arm 46 (spring arm 346 is pushed in middle taper) equally with pars intermedia, make a plurality of ends push spring arm 45 (end tapered is pushed spring arm 345) combination.
And, in above embodiment, measured the track record width W of thin film magnetic head element, reproduce with the width of element or vertically use the main pole width of magnetic recording but also can measure.Method of the present invention is to check the formation of (measurement) a plurality of thin film magnetic head elements under the draw runner state, does not consider its inspection position.
Claims (29)
1. the inspection method of a thin film magnetic head element is characterized in that, comprising:
The draw runner that row shape ground is had a plurality of thin film magnetic head elements remains on the inspection step that keeps on the anchor clamps that is made of nonmagnetic substance;
To remain on this inspection with keeping the draw runner on the anchor clamps to put into the step of the sample mounting portion of sweep electron microscope; And
Carry out the step of the shape inspection of a plurality of thin film magnetic head elements on the draw runner successively by above-mentioned sweep electron microscope.
2. the inspection method of thin film magnetic head element according to claim 1, above-mentioned inspection comprises the blind plate of atresia with the maintenance anchor clamps and overlapping leaf spring fixing and that be made of the single part that keeps draw runner on this blind plate, above-mentioned blind plate is transported the vacuum suction arm absorption of robot, transports inside and outside sweep electron microscope and checks with keeping anchor clamps.
3. the inspection of a thin film magnetic head element is with keeping anchor clamps, the inspection method that is used for the described thin film magnetic head element of claim 1, it comprise the blind plate of atresia and on this blind plate the overlapping fixing leaf spring that constitutes by single part, the spring arm that on this leaf spring, forms the maintenance groove that inserts draw runner and keep being inserted into the draw runner in this maintenances groove and form by the through slot division that connects above-mentioned leaf spring.
4. the inspection of thin film magnetic head element according to claim 3 is with keeping anchor clamps, above-mentioned spring arm is that spring arm is pushed in the end with the conical surface that contacts with the end edge portion of the length direction of draw runner, and the conical surface that spring arm is pushed in this end realizes being inserted into draw runner in the above-mentioned maintenance groove by the effect of an end of the length direction that is pressed in this maintenance groove.
5. the inspection of thin film magnetic head element according to claim 3 is with keeping anchor clamps, above-mentioned spring arm is to have the pars intermedia by paw that contacts with the center section of the length direction of draw runner to push spring arm, and what this pars intermedia was pushed spring arm realizes being inserted into draw runner in the above-mentioned maintenance groove by the effect on the side of the length direction that is pressed in this maintenance groove by paw.
6. the inspection of thin film magnetic head element according to claim 3 is formed with a plurality of above-mentioned maintenance grooves in parallel to each other with keeping anchor clamps on above-mentioned leaf spring, is provided with above-mentioned spring arm in each of a plurality of maintenance grooves, can distinguish elastic deformation.
7. the inspection of thin film magnetic head element according to claim 3 is with keeping anchor clamps, on above-mentioned leaf spring, be formed with a plurality of above-mentioned maintenance grooves in parallel to each other, in each of above-mentioned a plurality of maintenance grooves, be provided with above-mentioned spring arm, and described spring arm interconnects, together elastic deformation.
8. the inspection of the described thin film magnetic head element of claim 3 usefulness keeps anchor clamps, above-mentioned blind plate and the combination of leaf spring usefulness gib screw.
9. the inspection of the described thin film magnetic head element of claim 3 is with keeping anchor clamps, and in above-mentioned blind plate and the leaf spring, leaf spring is made of titanium at least.
10. the inspection method of a thin film magnetic head element is characterized in that, comprising:
The draw runner that row shape ground is had a plurality of thin film magnetic head elements inserts the inspection that is made of nonmagnetic substance with keeping in the anchor clamps, with draw runner with by being pressed in the step that this inspections keeps with the state on the maintenance anchor clamps;
To remain on this inspection with keeping the draw runner on the anchor clamps to put into the step of the sample mounting portion of sweep electron microscope; And
Carry out the step of the shape inspection of a plurality of thin film magnetic head elements on the draw runner successively by above-mentioned sweep electron microscope.
11. the inspection method of thin film magnetic head element according to claim 10,
Above-mentioned inspection comprises with the maintenance anchor clamps: the blind plate of atresia; Leaf spring, overlapping fixing on this blind plate, constitute by the single part that keeps draw runner; And push leaf spring, constitute by other parts different with this leaf spring, overlapping fixing on above-mentioned blind plate, with draw runner by being pressed on this leaf spring;
Above-mentioned blind plate is transported the vacuum suction arm absorption of robot, transports inside and outside sweep electron microscope and checks with keeping anchor clamps.
12. the inspection method of thin film magnetic head element according to claim 10, above-mentioned inspection comprises with the maintenance anchor clamps: the blind plate of atresia; Be fixed on this blind plate, keep draw runner and by being pressed in this inspections with the leaf spring that forms by single part on maintenance anchor clamps with overlapping;
Above-mentioned blind plate is adsorbed on the vacuum suction arm that transports robot, transports inside and outside sweep electron microscope and checks with keeping anchor clamps.
13. the inspection of a thin film magnetic head element is used for the inspection method of the described thin film magnetic head element of claim 10 with keeping anchor clamps, this inspection comprises with the maintenance anchor clamps: the blind plate of atresia; Leaf spring, overlapping fixing on this blind plate, constitute by single part; And push leaf spring, and constitute by other parts different with this leaf spring, overlapping fixing on blind plate;
On above-mentioned leaf spring, be formed with maintenance groove at the bottom of the band that inserts draw runner and the spring arm that keeps being inserted into the draw runner in this maintenances groove and form by the through slot division that connects above-mentioned leaf spring, above-mentioned push be formed with on the leaf spring below by making leaf spring, stretch out on above-mentioned maintenance groove by making leaf spring this below, and the draw runner that is inserted in this maintenance groove is kept on the groove bottom by being pressed in.
14. according to the inspection of the described thin film magnetic head element of claim 13 maintenance anchor clamps, be formed with the portion of putting forth effort that discharges on the leaf spring above-mentioned pushing, this release put forth effort portion discharge above-mentioned below by the direction of the elastic force of making leaf spring on elastic deformation, make draw runner freely with respect to above-mentioned maintenance groove loading and unloading.
15. the inspection of thin film magnetic head element according to claim 13 is with keeping anchor clamps, on above-mentioned leaf spring, be formed with a plurality of above-mentioned maintenance grooves in parallel to each other, in each of a plurality of maintenance grooves, be provided with the above-mentioned leaf spring of pushing at the both ends of the length direction of this maintenance groove and at least three positions of pars intermedia.
16. the inspection of the described thin film magnetic head element of claim 13 is with keeping anchor clamps, above-mentioned blind plate and push leaf spring with gib screw in conjunction with.
17. the inspection of thin film magnetic head element according to claim 13 is with keeping anchor clamps, the above-mentioned leaf spring of pushing is made by brass.
18. the inspection of a thin film magnetic head element is with keeping anchor clamps, the inspection method that is used for the described thin film magnetic head element of claim 10, this inspection comprises the blind plate of atresia with the maintenance anchor clamps and overlapping leaf spring fixing and that be made of single part on this blind plate, maintenance groove at the bottom of being formed with the band that inserts draw runner on this leaf spring, with the spring arm that keeps being inserted into the draw runner in this maintenance groove and form by the through slot division that connects above-mentioned leaf spring, this spring arm is to have from draw runner top with the taper of the conical surface of the intersection butt of the upper surface of draw runner and side to push spring arm, and the conical surface that spring arm is pushed in this taper realizes being inserted into draw runner in the above-mentioned maintenance groove by a side of the length direction that is pressed in this maintenance groove and the effect on the bottom surface.
19. the inspection of thin film magnetic head element according to claim 18 is with keeping anchor clamps, it is that draw runner is pushed spring arm at the end position of length direction by a side of the length direction that is pressed in above-mentioned maintenance groove and the end tapered on the bottom surface that spring arm is pushed in above-mentioned taper.
20. the inspection of thin film magnetic head element according to claim 19 is with keeping anchor clamps, it is that draw runner is pushed spring arm at the pars intermedia of length direction by a side of the length direction that is pressed in above-mentioned maintenance groove and the pars intermedia taper on the bottom surface that spring arm is pushed in above-mentioned taper.
21. the inspection of thin film magnetic head element according to claim 18 is formed with a plurality of above-mentioned maintenance grooves in parallel to each other with keeping anchor clamps on above-mentioned leaf spring, above-mentioned taper is pushed spring arm and is arranged in each of a plurality of maintenance grooves, can distinguish elastic deformation.
22. the inspection of thin film magnetic head element according to claim 18 is with keeping anchor clamps, on above-mentioned leaf spring, be formed with a plurality of above-mentioned maintenance grooves in parallel to each other, above-mentioned taper is pushed spring arm and is arranged in each of a plurality of maintenance grooves, and interconnects, together elastic deformation.
23. the inspection of thin film magnetic head element according to claim 18 is with keeping anchor clamps, comprise by other parts different and constituting and the overlapping fixing leaf spring of pushing on blind plate with above-mentioned leaf spring, this push be formed with on the leaf spring below by making leaf spring, stretch out on above-mentioned maintenance groove pushing the different position of spring arm with above-mentioned taper by making leaf spring this below, and the draw runner that is inserted in this maintenance groove is kept on the groove bottom by being pressed in.
24. the inspection of thin film magnetic head element according to claim 23 is with keeping anchor clamps, be formed with the portion of putting forth effort that discharges on the leaf spring above-mentioned pushing, this release put forth effort portion discharge above-mentioned below by the direction of the elastic force of making leaf spring on elastic deformation, draw runner is loaded and unloaded freely in above-mentioned maintenance groove.
25. the inspection of thin film magnetic head element according to claim 23 is with keeping anchor clamps, on above-mentioned leaf spring, be formed with a plurality of above-mentioned maintenance grooves in parallel to each other, in each of this a plurality of maintenance grooves, spring arm is pushed in above-mentioned taper and the above-mentioned leaf spring of pushing is provided with more than 3 altogether, is positioned at the both ends and the pars intermedia of the length direction of this maintenance groove at least.
26. the inspection of thin film magnetic head element according to claim 23 is with keeping anchor clamps, above-mentioned blind plate and push leaf spring with gib screw in conjunction with.
27. the inspection of thin film magnetic head element according to claim 23 is with keeping anchor clamps, the above-mentioned leaf spring of pushing is made by brass.
28. the inspection of thin film magnetic head element according to claim 18 usefulness keeps anchor clamps, above-mentioned blind plate and the combination of leaf spring usefulness gib screw.
29. the inspection of thin film magnetic head element according to claim 18 is with keeping anchor clamps, in above-mentioned blind plate and the leaf spring, leaf spring is made of titanium at least.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005319560 | 2005-11-02 | ||
| JP319560/2005 | 2005-11-02 | ||
| JP242664/2006 | 2006-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1983395A true CN1983395A (en) | 2007-06-20 |
Family
ID=38165882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610064039 Pending CN1983395A (en) | 2005-11-02 | 2006-11-02 | Method of inspecting thin film magnetic head element and inspecting holding jig |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1983395A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102998635A (en) * | 2011-09-09 | 2013-03-27 | 株式会社日立高新技术 | Method and its apparatus for inspecting a magnetic head device |
-
2006
- 2006-11-02 CN CN 200610064039 patent/CN1983395A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102998635A (en) * | 2011-09-09 | 2013-03-27 | 株式会社日立高新技术 | Method and its apparatus for inspecting a magnetic head device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4200665B2 (en) | Processing equipment | |
| TWI585806B (en) | Sample observation method and apparatus, and inspection method and apparatus using the same | |
| TW446986B (en) | Stage for charged particle microscopy system | |
| US7476872B2 (en) | Method and apparatus for observing inside structures, and specimen holder | |
| US6755075B2 (en) | Ultra micro indentation testing apparatus | |
| US7564044B2 (en) | Method of inspecting thin film magnetic head element using scanning electron microscope, and inspecting holding jig | |
| CN111982943B (en) | EBSD test sample platform and application thereof | |
| CN102384866B (en) | Sample set for transmission electron microscope tests and fabrication method thereof | |
| Lavrik et al. | High-precision contactless optical 3D-metrology of silicon sensors | |
| KR20040093030A (en) | Failure analysis device | |
| CN1983395A (en) | Method of inspecting thin film magnetic head element and inspecting holding jig | |
| JP2014501440A (en) | Holding device for holding and mounting a wafer | |
| JP4747952B2 (en) | Sample processing apparatus and sample processing method | |
| Anderson et al. | Combined tripod polishing and FIB method for preparing semiconductor plan view specimens | |
| CN111077347B (en) | Atomic force microscopy probe clamping device | |
| CN1201141C (en) | Manufacturing method of electronic microscope fixed point test piece | |
| KR100885492B1 (en) | Clamping Device for Semiconductor Device Image Inspection | |
| JP2000156393A (en) | Board extracting method and electronic component manufacture using the same | |
| JP5024468B2 (en) | Sample processing equipment | |
| US6736361B2 (en) | Semiconductor wafer positioning system and method | |
| US11145556B2 (en) | Method and device for inspection of semiconductor samples | |
| CN111307847B (en) | Micro-nano-scale sample vacuum storage device | |
| Richter et al. | GaBiLi-A Novel Focused Ion Beam (FIB) Source for Ion Microscopy and Related Workflows for 3D Tomography with a Top-Down FIB From Liquid Metal Alloy Ion Sources (LMAIS) | |
| JP4826680B2 (en) | Beam member | |
| Lavrik et al. | The Silicon Tracking System of the CBM Experiment at FAIR |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: TDK CORP. Free format text: FORMER OWNER: ALPS ELECTRIC CO., LTD. Effective date: 20080215 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20080215 Address after: Tokyo, Japan, Japan Applicant after: TDK Corp. Address before: Tokyo, Japan, Japan Applicant before: Alps Electric Co., Ltd. |
|
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |