CN1981976B - Laser machining apparatus and its running and controlling methods - Google Patents
Laser machining apparatus and its running and controlling methods Download PDFInfo
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- CN1981976B CN1981976B CN 200510131642 CN200510131642A CN1981976B CN 1981976 B CN1981976 B CN 1981976B CN 200510131642 CN200510131642 CN 200510131642 CN 200510131642 A CN200510131642 A CN 200510131642A CN 1981976 B CN1981976 B CN 1981976B
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Abstract
A laser machining apparatus has a laser machining head, which is composed of a casing, a nozzle with a central channel of laser beam for an emitting outlet and a channel of processing gas, a focusing lens set for focusing the laser beam to a working focus point, a processing gas delivering unit, a sensor electrode for measuring the distance between nozzle and workpiece, and a distance regulator. Its control method is also disclosed.
Description
Technical field
The present invention relates to a kind of being used for by the laser process equipment laser beam processing work, that have laser Machining head and a kind of method that is used to move this type of control laser process equipment.
Background technology
Using processing gas simultaneously by laser beam, be under the situation of protective gas or cutting gas or analog during processing work; In order to regulate the focal position; Usually detect the distance between workpiece and the laser Machining head with capacitive mode, in this laser Machining head, have a mirror group, a speculum or lens mirror group that is used for focussed laser beam for example.In this technology; Can on the tip of the nozzle body of the nozzle of laser Machining head, use one for example by the metal of conduction, sensor electrode that for example copper is done electrode, be used as capacitance variations so that detect the variable in distance of the workpiece that uses with respect to second electrode as this capacitor as a capacitor.At this, nozzle is used for protecting the focus lamp group to avoid polluting on the one hand, is used on the other hand processing gas is transported to the interaction zone between laser beam and the workpiece, and for this reason, this nozzle has one or more corresponding processing gas passages.
In reality, a normally problem is connected in the reliable electric shock of sensor electrode because thermic load on the laser Machining head and vibration cause between sensor electrode and the nozzle body be connected loosening.On laser Machining head, sensor electrode often only gets an electric shock with the bindiny mechanism of leading to the evaluation electronic installation and connects.Usually make sensor electrode insulate with respect to laser Machining head with ceramic component this moment.When implementing this capacitive range measurement, the remainder of laser Machining head at least for upper frequency, be in earthing potential in order to measure employed alternating voltage.If sensor electrode is interrupted with being electrically connected of evaluation electronic installation, then record a too small electric capacity by this evaluation electronic installation, so this evaluation electronic installation is attempted and increased electric capacity, its mode is that it is moving laser Machining head on the direction of workpiece.Therefore the danger that exists laser Machining head and workpiece to collide, this can cause the significant damage of laser Machining head or mechanical drive shaft.
Disclose a device by DE 42 01 640 C1, when sensor electrode was loosening, this device this state of identification also produced a caution signal.For this purpose, give original DC voltage of capacitance measurement signal stack, produce the DC current of the sensor electrode of flowing through thus.The interruption of this DC current is considered as the sign that sensor electrode is loosening or break away from.Yet in this monitoring mode, require sensor electrode to be connected with two leads, this means significant structural ancillary cost and in the certain structure form of nozzle body, is impossible in reality.
Disclose a spray nozzle device that is used for laser Machining head by JP 05-84589, in this device, a cutting nozzles is being discharged the section that side is shunk with having a taper gradually.Be provided with an outer nozzle sleeve pipe round an inner nozzle body, the outlet of this outer nozzle sleeve pipe has a big diameter of diameter than the outlet of the laser penetrating via in this inner nozzle body.Between inner nozzle body and outer nozzle body, perhaps be provided with the annulus passage of a taper, perhaps be provided with a plurality of processing or cutting gas passages that are provided with around said laser penetrating via.Not only this annulus passage but also said each passage all are passed in the outlet of outer nozzle body in this outlet outside at the inner nozzle body.
In service at laser Machining head, cutting gas is not only led in the scope of the interaction zone between laser beam and the workpiece through the laser penetrating via but also through the cutting gas passage.
The spray nozzle device that another is used for the laser beam cutting is disclosed by EP 0 741 627 B1, this spray nozzle device have laser beam with line focus that be complementary, that surround this laser beam, have nozzle body reach through hole, frustum-like shape that is used for laser beam.This nozzle body is surrounded with one heart by a nozzle casing and forms an annulus with this nozzle casing.This nozzle casing have an annulus that is connected with gas source, with ejaculation hole this reach through hole concentric, that be used for the cutting gas bundle.At this, this ejaculation hole is before workpiece side is arranged on reach through hole and be provided with a diameter bigger than the diameter of this reach through hole.Not only aspect momentum but also aspect quality, should realize as far as possible little flow losses in this wise, roughly to carry out the transition to the transition cross section that penetrates the hole identical with the annulus for the ejaculation cross section that promptly penetrates the hole.
Summary of the invention
Task of the present invention is: another laser process equipment of the said type of beginning and the method that is used to move this laser process equipment of control are provided; Wherein especially can guarantee to monitor the function normality of the sensor electrode that is used for capacitive range measurement, this sensor electrode is installed on the nozzle that has the processing gas conveying mechanism simple and reliablely.
Task of the present invention through laser process equipment and the method that is used to move this laser process equipment of control solve.Preferred configuration of the present invention and further configuration obtain from following technical proposals.
Laser process equipment according to the present invention has
-one laser Machining head, this laser Machining head comprises:
-one housing, the working light path that is used for laser beam passes this housing;
-one is set at the nozzle on this housing in the ejaculation zone of laser beam; This nozzle has the penetrating via and the processing gas passage that have the central authorities of the exit wound of bullet that is used for laser beam, the exit wound of bullet concentric of the outlet of this processing gas passage and this penetrating via;
-and a focus lamp group, penetrating via and exit wound of bullet that this focus lamp group makes laser beam pass central authorities focus on the job spotlight that is arranged on outside the housing;
-this laser process equipment also has: a processing gas transport, be used for processing gas is carried through said processing gas passage to the interaction zone between laser beam and the workpiece,
-one sensor electrode that is maintained at the conduction on the housing is used for the distance between condenser type ground gaging nozzle and the workpiece,
This laser process equipment has a distance adjusting means that is connected with this sensor electrode, is used for the function normality of monitoring sensor electrode.
Comparison circuit and an instruction signal generator that is connected with the output of this comparison circuit that this distance adjusting means measured current electric capacity and electric capacity of the minimum of being stored when this preferably includes an electronic memory that is used to store the measurement electric capacity
of a desired minimum, one and is used to make processing work compare, this instruction signal generator produces a command signal during less than the electric capacity stored at this current electric capacity.
According to the present invention, be used to move the method for controlling such laser process equipment and may further comprise the steps:
-sensor electrode is installed on the laser Machining head,
-with laser Machining head with respect to workpiece with such distance location, this distance is corresponding to the measurement electric capacity of a desired minimum,
-measure this minimum electric capacity and measured value is stored in the memory,
-electric capacity of a current electric capacity measured when the processing work with the minimum of being stored is compared,
-when this current electric capacity during, produce a command signal less than the electric capacity of the minimum of being stored.
Advantageously, the device construction that is used for capacitive distance adjustment becomes electronic circuit, and this electronic circuit can be changed between a correcting travel mode and a common method of operation.
Advantageously, this electronic circuit is by structure in this wise, makes this electronic circuit
The measurement capacitance of-the minimum that one of storage can be predetermined when receiving a calibrating signal in the correcting travel mode, and
-in the common method of operation in---laser Machining head is operated with a predetermined distance with respect to workpiece in this common method of operation---, a current measured electric capacity is compared with the measurement capacitance of being stored and in this current measurement capacitance command signal of generation during less than the measurement capacitance stored.
Advantageously, this electronic circuit has a switch that is used to produce calibrating signal.
Advantageously, said penetrating via has the throttling section of a diameter less than the diameter of exit wound of bullet on the beam direction before the processing gas transfer passage feeds mouth.
Therefore; The present invention is based on such design: when the laser Machining head that has a processing gas transport portion for carries out capacitive distance adjustment, sensor electrode and stray capacitance
part between the laser Machining head are considered as the normally functioning sign that is connected between sensor electrode and the evaluation electronic installation.For this reason, laser Machining head moves on the position, in the distance that for example has maximum possible on this position between laser Machining head and the workpiece.But this distance also can be such distance, and this distance is a distance occupied when laser Machining head moves between two machining areas or greater than this distance.Be stored in the evaluation electronic installation as minimum measurement capacitance then on the current position or, and with this measured value at the electric capacity between measuring transducer electrode and the workpiece under the current distance.This minimum measurement capacitance has only when owing to the losing (Verlust) and lose its contact of sensor electrode, and is perhaps loosening and when distance between sensor electrode and the laser Machining head is increased when sensor electrode, just can be lower than.The comparison of the electric capacity through each current measured electric capacity and prior minimum of storing; Then can be the equipment control device that is arranged on the higher level and for example produce a caution signal and stop process, avoid the damage of laser Machining head thus through this caution signal.
Above-mentioned error condition can be under the situation that sensor electrode breaks away from from laser Machining head; Not only through cutting, when welding waits processing work; And when laser Machining head when under the situation of constant, bigger distance, moving two process from a machining area to another machining area, can be identified.The disengaging of sensor electrode always causes a so little current measurement electric capacity, makes this measure electric capacity always less than the measurement electric capacity of the minimum of storage in advance.In contrast to this; Yet sensor electrode on the laser Machining head loosening still and the evaluation electronic installation exist state of contact then being detected in the controlled operating area between corresponding machining area only; Because can regulate on such meaning through the evaluation electronic installation automatically in such state machining area that the distance between sensor electrode and the workpiece is very little therein, make that the distance maintenance between sensor electrode and the workpiece is constant.
The favourable further configuration of laser process equipment is characterised in that the annulus that the processing gas passage surrounds the penetrating via of said central authorities by a coaxial heart constitutes.The configuration that another meets purpose of the present invention is characterised in that; The processing gas passage constitutes by the penetrating via of the said central authorities that are used for laser beam or by the discharging area of laser beam; And in nozzle, be provided with the processing gas transfer passage that at least one is connected with the processing gas source of processing gas transport at approaching side, feed in this central penetrating via in this processing gas transfer passage zone before exit wound of bullet.A plurality of processing gas transfer passages preferably are set, and these processing gas transfer passages center on this central penetrating via setting in a circumferential direction equably and are positioned on the shell face of an awl, and the axis of this awl and the optical axis of laser optical path are superimposed.Carry in order further to simplify and improve processing gas; A throttling section can be set in penetrating via in this wise; Make the processing gas in the discharging area that is directed to penetrating via in fact only flow out, and do not reflux against beam direction through its exit wound of bullet.
Because this configuration of the nozzle of laser Machining head can be realized: processing gas, be that cutting gas or the not only available low overvoltage of protective gas but also available high overvoltage are transferred, and the range measurement that can the interference capacitors formula or the monitoring of sensor electrode.
Also can realize through the present invention: do not have to carry and detect above-mentioned error condition intrusively reliably, even because the parameter difference of parts makes electric capacity between sensor electrode and the laser Machining head exist between each fluctuates through processing gas.In addition, if current measured electric capacity is lower than fiducial value, then the signal of numeral is handled and can be each laser Machining head calibration comparison state and identification error state.
Description of drawings
With reference to the accompanying drawings the present invention is at length illustrated.Accompanying drawing is represented:
The side view of a laser Machining head of Fig. 1;
Fig. 2 is used for the sectional view of the nozzle of laser Machining head;
Fig. 3 is used for the sectional view of another configuration of the nozzle of laser Machining head;
An equivalent circuit diagram of the electric capacity of Fig. 4 laser Machining head;
Fig. 5 is used for a pierce circuit of laser Machining head;
One of Fig. 6 has the block diagram of electric part of the laser process equipment of evaluation electronic installation; And
The detailed structure of Fig. 7 evaluation electronic installation.
The specific embodiment
Fig. 1 shows a laser Machining head 1 as in laser process equipment according to the present invention, using.This laser Machining head 1 has a housing 2, and this housing carries a nozzle 3 on its bottom.Housing 2 and nozzle 3 can for example be strained by a milled screw 4 each other.One be used for laser beam 5 ' working light path 5 pass housing 2 and nozzle 3, this laser beam focuses on by a lens devices 6 that is arranged in the housing 2.Laser beam 5 ' focus be located substantially in the outside of laser Machining head 1 on the surface of workpiece 7, this workpiece is by means of the laser beam 5 of line focus ' processed.Can implement cutting or welding process and similar process by this way.The bottom of nozzle body 3 is provided with a sensor electrode 8 that is made up of the material of conduction, and this sensor electrode is by a kind of material of conduction, particularly by metal, for example copper work.This sensor electrode 8 is kept by a ceramic component 9, and this ceramic component itself is tightened up through a milled screw
10 lower limbs with respect to nozzle 3.Make the sensor electrode 8 with respect to nozzle 3 or housing 2 electric insulations through this ceramic component 9.This sensor electrode 8 constitutes an electrode of a capacitor thus, and another electrode of this capacitor is the workpiece 7 that is in earthing potential.That be made up of the material of conduction and contacted each other housing 2 and nozzle 3 are in earthing potential equally.
Sensor electrode 8 is electrically connected with a LC oscillator 11 that is installed on the housing 2.For this reason; Sensor electrode 8 and a contact plug 12 that remains in the ceramic component 9 form and electrically contact, and this contact plug itself also continues to form connection through a coaxial cable 13 with LC oscillator 11 through a cable that extend, electric insulation, preferably conductively-closed of the inside at nozzle body 3.
Like what illustrate extremely simplifiedly among Fig. 2, nozzle 3 has at this: the penetrating via 14 of central authorities, the latter have one be used for laser beam 5 ' exit wound of bullet 15; And a processing gas passage 16, the outlet 17 that the latter constitutes and have a corresponding cyclic by an annulus, this outlet concentric is in the exit wound of bullet 15 of passage 14.Processing gas passage 16 forms with a circular passage 18 at approaching side and is connected; This circular passage can be connected through a joint 19 and the processing gas delivery conduit that only illustrates 20 same processing gas sources 21, so as with processing gas, be cutting gas or protective gas or analog flow to laser beam 5 ' and workpiece 7 between interaction zone.
Substitute a processing gas passage that separates, also can be as illustrated in fig. 3, constitute processing gas passage 16 by the output area of the penetrating via 14 of the central authorities that are used for laser beam.In this case, the exit wound of bullet 15 of the outlet of processing gas passage and penetrating via 14 is same.
Like what further illustrated among Fig. 3, one is passed into processing gas passage 16, promptly feeds in the output area of penetrating via 14 with the processing gas transfer passage 22 that the mode that is not shown specifically is connected with the processing gas source 21 of processing gas transport at approaching side.Although the penetrating via 14 of central authorities can have the cross section that a uniform columniform or taper ground shrinks gradually until its exit wound of bullet at this fully, yet still preferred penetrating via 14 has the throttling section 23 of its diameter less than the diameter of exit wound of bullet 15 before the feeding mouth at one or more processing gas transfer passages 22 on the beam direction.
Although can consider to be provided with only unique processing gas transfer passage 22 in principle; So that the discharging area of penetrating via 14 that make processing gas pass processing gas passage 16, just to pass central authorities blows in the interaction zone between workpiece and the laser beam; Yet a plurality of equally distributed processing gas transfer passages on every side at nozzle 3 still preferably are set, and these processing gas transfer passages are located in the corresponding conical shell face.
When processing work 7, must keep the distance between laser Machining head 1 or nozzle 3 and the workpiece 7 usually consistently, just must keep sensor electrode 8 and workpiece 7 consistently, be the distance between the counter electrode.For this reason, produce a distance measurement signals S (referring to Fig. 5) through applying a high frequency voltage for sensor electrode 8, its frequency depends on the electric capacity by electrode 7 and 8 formed Measurement of capacitor.Distance measurement signals S passes to an evaluation electronic installation 25 of the device that is used for capacitive distance adjustment and in fact forms an actual value through a coaxial cable 24.The set-point that this actual value and one is predetermined relatively, an adjusting device is adjusted to measured actual value on this set-point then, so as between the maintenance electrode 7 and 8, corresponding to the distance of this set-point.Be used for regulating laser Machining head 1 with respect to the corresponding adjusting device of the height and position of workpiece 7 at Fig. 1 from for the purpose of clear and be not illustrated.
Fig. 4 shows according to the electric capacity situation in the laser Machining head of Fig. 1.Can see the measurement capacitor C that is between electrode 7 and 8 on the right
Me β, and other parasitic capacitance C1, C2 and C3 are parallelly connected with this measurement electric capacity and use C
pIndicate.In fact parasitic capacitance C1 is formed by cable capacitance, and capacitor C 2 is the electric capacity between sensor electrode 8 and the nozzle 3, and wherein dielectric is formed by air and/or processing gas.Parasitic capacitance C3 is between sensor electrode 8 and the nozzle body 3 equally, and dielectric is formed by ceramic component 9 now.Contact plug 12 is between capacitor C 1 and the C2 in the circuit diagram according to Fig. 4.
The distance measurement signals S that is applied on the sensor electrode 8 is the output signal of LC oscillator 11, belongs to having of this LC oscillator: a coil 26,7,8, one of said Measurement of capacitor embody parasitic capacitance C
pCapacitor, control assembly 27,28,29, an and output amplifier 30.More precisely; Here as the output signal; People are interested to be the frequency of distance measurement signals S; This distance measurement signals is filtered through a capacitor 31, flows to a frequency counter 22 that is arranged in evaluation electronic installation 25 through the inner wire of coaxial cable 24 and through another unshowned high-pass filter as high-frequency signal.The frequency of being counted by frequency counter 22 is given a microprocessor 33 by delivery, and this microprocessor is regarded this frequency as actual value, and this frequency also can be by temperature correction.
In said control assembly, comprise a first transistor 27, a transistor seconds 28 and a resistance 29 according to the LC oscillator 11 of Fig. 5.The collector terminal ground connection of this first transistor 27, and first electrode, 8 couplings of its base lead and coil 26 and Measurement of capacitor 7,8.This base lead is also linked on the input of output amplifier 30.The joint of other of coil 26 and Measurement of capacitor is ground connection also, i.e. also ground connection of second electrode 7 and workpiece.In addition, this control assembly comprises a transistor seconds 28, the base lead ground connection of this transistor seconds, and the collector terminal of this transistor seconds also is connected with the input of output amplifier 30.These two transistors 27 and 28 emitter terminal directly are connected to each other, wherein emitter resistance 29 through a shared tie point respectively with the emitter terminal coupling of transistor 27,28.Another joint of emitter resistance 29 contains negative potential.The output of output amplifier 30 leads to a joint through capacitor 31, and coaxial cable 24 is connected with this joint.
LC oscillator shown in Fig. 5 is realized as difference amplifier.Because the collector potential homophase of the base potential of the first transistor 27 and transistor seconds 28, people can produce positive feedback (Mitkopplung) through directly connecting.Loop gain and these transistorized mutual conductances (Steilheit) are proportional.It can produce in other scope through changing emitter current.On the output of LC oscillator, obtain distance measurement signals S, the frequency of this distance measurement signals is by the capacitor C that depends on distance
Me βAnd pass through parasitic capacitance
CpConfirm.Supply with for the DC voltage of LC oscillator, a unshowned direct voltage source in evaluation electronic installation 25 can be set, this direct voltage source is given LC oscillator transmission DC voltage through coaxial cable 24.
Fig. 6 and Fig. 7 respectively show the block diagram of a laser process equipment, and Fig. 5 replenishes around an equipment control device 34 relatively, and this equipment control device is connected with evaluation electronic installation 25.This equipment control device 34 has a switch 35 under present situation, when this switch motion, this equipment control device 34 transmits a calibrating signal through a lead 36 to the microprocessor 33 of evaluation electronic installation 25.When receiving this calibrating signal can one with electronic memory 37 that microprocessor 33 is connected in the measurement capacitance (corresponding to the count value of frequency counter 32) of a minimum of storage; It is used for judging as a reference: whether sensor electrode 8 is loosening on nozzle body 3, but still is in contact plug 12 and contacts; Perhaps it has no longer contacted with contact plug 12 and has broken away from from laser Machining head 1 basically.For this reason, with a capacitance measured in the common method of operation of laser process equipment on the output of frequency counter 32 with memory 37 in the count value of being stored compare.If confirm: the minimum capacity that current measured electric capacity is stored in less than memory 37 at this; Then this is born the function of comparison circuit and carry out in this microprocessor 33 relatively and produce a command signal at one; This command signal is passed back to equipment control device 34 through a lead 38; So that signal for example stops laser process equipment by way of caution there, just close laser beam, stop the processing gas conveying and stop laser Machining head moving on in the stop position away from workpiece with respect to the motion of workpiece or with laser Machining head.
Claims (9)
1. laser process equipment, it has
-one laser Machining head (1) is used for by laser beam (5 ') processing work (7), and wherein this laser Machining head (1) comprising:
-one housing (2), the working light path (5) that is used for laser beam (5 ') passes this housing;
-one nozzle (3) that in the ejaculation zone of laser beam (5 '), is set on the housing (2); This nozzle has the penetrating via (14) and the processing gas passage (16) that have the central authorities of the exit wound of bullet (15) that is used for laser beam (5 '), exit wound of bullet (15) concentric of the outlet of this processing gas passage (17) and this penetrating via (14); The output area of said penetrating via (14) constitutes a processing gas passage (16); In nozzle (3), be provided with a plurality of processing gas transfer passages (22) that are connected with the processing gas source (21) of processing gas transport at approaching side; These processing gas transfer passages are provided with around the penetrating via (14) of central authorities in a circumferential direction equably; And said processing gas transfer passage is passed in the penetrating via (14) of said central authorities in the preceding zone of exit wound of bullet (15), makes processing gas to be transported to the interaction zone between laser beam (5 ') and the workpiece (7) through said processing gas passage (16);
-and a focus lamp group (6), penetrating via (14) and exit wound of bullet (15) that this focus lamp group makes laser beam (5 ') pass central authorities focus on the job spotlight that is arranged on outside the housing (2);
-one sensor electrode (3) that is maintained at the conduction on the housing (2) is used for the distance between condenser type ground gaging nozzle (3) and the workpiece (7), and
-one with said sensor electrode (3) device that be connected, that be used for capacitive distance adjustment (25,34).
2. according to the laser process equipment of claim 1, it is characterized in that: the device that is used for capacitive distance adjustment has:
-one electronic memory (37) is used to store the measurement electric capacity (C of a desired minimum
Min),
-one comparison circuit (33), a measured current electric capacity (C when being used for processing work
Me β) with the electric capacity (C of the minimum of being stored
Min) compare, and
-one instruction signal generator (33) that is connected with this comparison circuit (33) is used for as said current electric capacity (C
Me β) less than the electric capacity (C of the minimum of being stored
Min) time produce a command signal.
3. according to the laser process equipment of claim 1 or 2, it is characterized in that: the device construction that is used for capacitive distance adjustment becomes electronic circuit (25,34), and this electronic circuit can be changed between a correcting travel mode and a common method of operation.
4. according to the laser process equipment of claim 3, it is characterized in that: this electronic circuit (25,34) is made this electronic circuit by structure in this wise
Measurement capacitance (the C of-the minimum that one of storage can be predetermined when receiving a calibrating signal in the correcting travel mode
Min), and
-in the common method of operation, promptly laser Machining head (1) is operated with a predetermined distance with respect to workpiece (7) in this common method of operation, with a current measured electric capacity (C
Me β) with the measurement capacitance (C that stored
Min) compare and at this current measurement capacitance (C
Me β) less than the measurement capacitance (C that is stored
Min) time produce a command signal.
5. according to the laser process equipment of claim 4, it is characterized in that: electronic circuit (25,34) has a switch (35) that is used to produce calibrating signal.
6. according to the laser process equipment of claim 1, it is characterized in that: this penetrating via (14) has the throttling section (23) of a diameter less than the diameter of exit wound of bullet (15) on the beam direction before processing gas transfer passage (22) feeds mouth.
7. be used for moving the method for control, have following steps according to the laser process equipment of one of aforesaid right requirement:
-sensor electrode (8) is installed on the laser Machining head (1),
-laser Machining head (1) to be located with such distance with respect to workpiece (7), this distance is corresponding to the measurement electric capacity (C of a desired minimum
Min),
This minimum electric capacity (C of-measurement
Min) and measured value is stored in the memory (37),
-with a current electric capacity (C measured when processing work (7)
Me β) with the electric capacity (C of the minimum of being stored
Min) compare, and
-as this current electric capacity (C
Me β) less than the electric capacity (C of the minimum of being stored
Min) time, produce a command signal.
8. according to the method for claim 7, it is characterized in that: described distance is laser Machining head (1) occupied distance when between two machining areas, moving.
9. according to the method for claim 7, it is characterized in that: described distance is such distance, and this distance is greater than distance occupied when laser Machining head (1) moves between two machining areas.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510131642 CN1981976B (en) | 2005-12-12 | 2005-12-12 | Laser machining apparatus and its running and controlling methods |
| HK07113751.5A HK1105388A1 (en) | 2005-12-12 | 2007-12-18 | Laser machining apparatus and running and controlling methods for such a laser machining apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510131642 CN1981976B (en) | 2005-12-12 | 2005-12-12 | Laser machining apparatus and its running and controlling methods |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1981976A CN1981976A (en) | 2007-06-20 |
| CN1981976B true CN1981976B (en) | 2012-07-18 |
Family
ID=38164977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510131642 Expired - Fee Related CN1981976B (en) | 2005-12-12 | 2005-12-12 | Laser machining apparatus and its running and controlling methods |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN1981976B (en) |
| HK (1) | HK1105388A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104080570B (en) * | 2011-11-10 | 2016-01-13 | Ipg光子公司 | The dynamic height regulating system of laser-processing system head group part and method |
| DE102013214174B3 (en) * | 2013-07-19 | 2015-01-08 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Method for determining a state of wear of a cutting nozzle and laser processing machine for carrying out the method |
| CN106163723B (en) * | 2015-03-13 | 2018-05-29 | 三菱电机株式会社 | Laser processing device and correction data creation method |
| CN106312306B (en) * | 2016-10-20 | 2019-06-14 | 大族激光科技产业集团股份有限公司 | A kind of height adjustment system and its method for adjusting height of laser cutting head |
| JPWO2018216275A1 (en) * | 2017-05-24 | 2020-04-02 | パナソニックＩｐマネジメント株式会社 | Capacitance type height sensor, laser processing nozzle using the same, and laser processing apparatus |
| CN107572766B (en) * | 2017-08-21 | 2024-05-21 | 桂林电子科技大学 | High-pressure type automatic glass cutting machine and operation method thereof |
| CN110480163B (en) * | 2019-09-16 | 2021-02-12 | 中航宝胜电气股份有限公司 | Welding gun head |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5786561A (en) * | 1994-01-25 | 1998-07-28 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Nozzle assembly for laser beam cutting |
| CN2633495Y (en) * | 2003-06-20 | 2004-08-18 | 宝山钢铁股份有限公司 | Coaxle nozzle for laser welding |
-
2005
- 2005-12-12 CN CN 200510131642 patent/CN1981976B/en not_active Expired - Fee Related
-
2007
- 2007-12-18 HK HK07113751.5A patent/HK1105388A1/en not_active IP Right Cessation
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5786561A (en) * | 1994-01-25 | 1998-07-28 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Nozzle assembly for laser beam cutting |
| CN2633495Y (en) * | 2003-06-20 | 2004-08-18 | 宝山钢铁股份有限公司 | Coaxle nozzle for laser welding |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2003-25083A 2003.01.28 |
Also Published As
| Publication number | Publication date |
|---|---|
| HK1105388A1 (en) | 2008-02-15 |
| CN1981976A (en) | 2007-06-20 |
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