CN1966203A - Femtosecond laser amorphism fine machining method for amorphous alloy - Google Patents
Femtosecond laser amorphism fine machining method for amorphous alloy Download PDFInfo
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- CN1966203A CN1966203A CN 200610125079 CN200610125079A CN1966203A CN 1966203 A CN1966203 A CN 1966203A CN 200610125079 CN200610125079 CN 200610125079 CN 200610125079 A CN200610125079 A CN 200610125079A CN 1966203 A CN1966203 A CN 1966203A
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- femtosecond laser
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Abstract
The invention relates to a non-crystal fine processing method which uses femtosecond laser to process non-crystal alloy, wherein said method uses femtosecond laser to make hole, etch, and cut the non-crystal alloy, while the impulse energy density of femtosecond laser is 50-100H/cm2 and the impulse width is 45-100fs in holing; the impulse energy density is 3-15J/cm2, the impulse width is 45-100fs, and the scanning speed is 100-200 mum/s in etching line; the impulse energy density is 75-110J/cm2, the impulse width is 45-100fs, and the scanning speed is 100-200 mum/s in cutting. The invention can realize sub-micron processing accuracy, without crystallization in etching area.
Description
Technical field
The present invention relates to a kind of ultra-short pulse laser to the amorphous alloy material fine machining method, be specifically related to utilize the no crystallization fine machining method of femtosecond laser non-crystaline amorphous metal.
Background technology
The development of non-crystaline amorphous metal: adopt the melt supercooled method to prepare Au by liquid metal first from nineteen sixty
75Si
25Since the non-crystaline amorphous metal thin slice, non-crystaline amorphous metal is extensively paid close attention to its special, good machinery, electricity, magnetics and physicochemical property.Research and development through four more than ten years, research at the aspects such as formation, structure, performance, crystallization, preparation and application of amorphous alloy has obtained remarkable progress, developed the amorphous alloy of multiple series such as Fe base, Ni base, Co base, Zr base, Ti base, Al base, Mg base, Ln base, Cu base, Pd base, Ca base, and realized the technology of preparing of the block amorphous alloy of Centimeter Level size, for the application extension of amorphous alloy material provides may.Because the special performance of non-crystaline amorphous metal, particularly this material does not have dimensional effect in the application that is prepared as finding, thereby the application prospect in MEMS and micro sensing system is huge.And the application of material all relates to process technology, in the processing of non-crystaline amorphous metal, realizes machining area and does not have the crystallization phenomenon on every side, thereby keep its intrinsic premium properties, and is very crucial to the application of this material.And to non-crystaline amorphous metal in the application of micro parts, no crystallization Micrometer-Nanometer Processing Technology seems particularly important.
The non-crystaline amorphous metal method for processing has following several usually:
(1) machining
The cutter cutting
The cutter cutting is a kind of routine processing method easily, and the shortcoming of this processing method is: machining accuracy is not high, can only guarantee in hundred micron dimensions, is difficult to use in micron order processing; Have a threshold speed, being higher than threshold velocity when cutting, easily cause scarfing to produce fuel factor, temperature is too high and oxidative phenomena and crystallization phenomenon take place.
The line cutting
The line cutting is a kind of processing method very important in the machining, with copper cash as tool-electrode, between copper cash and machined object material, apply the pulse voltage of 60～300V, and keep 5～50 μ m gaps, be full of dielectrics such as kerosene, pure water in the gap, make flashing discharge between electrode and the machined object, and be consumed each other, corrode.The shortcoming of this processing method is: the cutting surface quality is coarse, and tangible cutting lines is arranged; Machining accuracy also can only guarantee to be difficult to use in little processing more than 100 μ m.
(2) CO
2Laser and YAG Laser Processing
Because the non-crystaline amorphous metal size is limited, the processing that conventional laser is used for amorphous alloy is focusing more on welding processing.CO
2The shortcoming of laser and YAG Laser Processing is: machining accuracy is low to be the millimeter level; Process fuel factor height, bespatter, double teeming residue and the heat affected area that can produce material; The easy generating material crystallization of machining area, and need argon shield.
(3) electron beam processing
Present electron beam is used for non-crystaline amorphous metal processing and also mainly concentrates on welding processing, control electron accelerating voltage, electron beam current and sweep speed can successfully be welded large block amorphous plate, and do not find the crystallization of heat affected area and welding, the tensile strength of welded specimen is no change almost also.At present, the research that electron beam is used for fine cutting processing non-crystaline amorphous metal also seldom, and general requirement of electron beam processing carried out under vacuum environment.
Summary of the invention
The objective of the invention is to overcome above-mentioned CO
2The weak point of laser and YAG Laser Processing, the no crystallization fine machining method of a kind of femtosecond laser to non-crystaline amorphous metal is provided, this method can reach several microns to the physical dimension that non-crystaline amorphous metal carries out microfabrication, and machining accuracy can be less than 1 micron, and crystallization does not take place machining area.
For realizing purpose of the present invention, the technical solution used in the present invention is that a kind of femtosecond laser is characterized in that the no crystallization fine machining method of non-crystaline amorphous metal: non-crystaline amorphous metal is carried out the line cutting; Utilize femtosecond laser that non-crystaline amorphous metal is punched, the pulse energy density of femtosecond laser is 50～100J/cm
2, pulse width 45～100fs.
For realizing purpose of the present invention, another technical solution used in the present invention is that a kind of femtosecond laser is characterized in that the no crystallization fine machining method of non-crystaline amorphous metal: non-crystaline amorphous metal is carried out the line cutting; Utilize femtosecond laser to non-crystaline amorphous metal sample groove, the pulse energy density of femtosecond laser is 3～15J/cm
2, pulse width 45～100fs, sweep speed be 100～200 μ m/s.
For realizing purpose of the present invention, another technical scheme that the present invention adopts is that a kind of femtosecond laser is characterized in that the no crystallization fine machining method of non-crystaline amorphous metal: non-crystaline amorphous metal is carried out the line cutting; Utilize femtosecond laser to the cutting of non-crystaline amorphous metal sample, the pulse energy density of femtosecond laser is 75～110J/cm
2, pulse width 45～100fs, sweep speed be 100～200 μ m/s.
In above-mentioned three kinds of technical schemes, the thickness after the cutting of non-crystaline amorphous metal line is less than 1mm.
The present invention's advantage compared to existing technology is:
(1) result of TEM test analysis and electron diffraction analysis proves: the machining area at femtosecond pulse microfabrication non-crystaline amorphous metal is not found the crystallization phenomenon, and non crystalline structure remains intact; The surface quality of processing district also is better than tradition processing.
(2) the femtosecond pulse pulse duration is extremely short, peak power is high, when a small amount of multiple-pulse and amorphous alloy material interact, does not have oxidative phenomena to produce; During the continuous ablator of multiple-pulse,, can avoid CO well by sweep speed and the isoparametric selection of pulse energy
2The generation of oxidative phenomena when laser and YAG Laser Processing metal.
(3) under high power density, the amorphous target is peeled off by laser beam, and mainly the form with plasma sprays, thereby avoids CO
2Bespatter, double teeming residue and the heat affected area of the material that produces when laser and YAG Laser Processing metal.
(4) femtosecond pulse can carry out the structure and the part processing of micron order size to non-crystaline amorphous metal, and machining accuracy can reach submicron order.
The specific embodiment
Punching embodiment 1
A kind of femtosecond laser is to the no crystallization fine machining method of non-crystaline amorphous metal: the non-crystaline amorphous metal sample is carried out the line cutting, cut into the target that thickness is 0.5mm, can carry out surface finish again, polishing back non-crystaline amorphous metal target thickness is 0.2mm; Utilize femtosecond laser to the punching of non-crystaline amorphous metal sample, the centre wavelength of femtosecond laser is 800nm, and repetition rate is 1KHz, and pulse energy density is 50J/cm
2, pulse width is 45fs.Can carry out ultrasonic cleaning after punching is finished, remove the pollution in the femtosecond laser processing.
After cleaning was finished, by the pattern of scanning electron microscopic observation punching, the bore dia of punching only was 23 μ m; Observe non-crystaline amorphous metal target perforated area by transmission electron microscope and electronic diffraction and do not have the generation of crystallization phenomenon.
Punching embodiment 2
A kind of femtosecond laser is to the no crystallization fine machining method of non-crystaline amorphous metal: the non-crystaline amorphous metal sample is carried out the line cutting, cut into the target that thickness is 1mm; Utilize femtosecond laser to the punching of non-crystaline amorphous metal target, the centre wavelength of femtosecond laser is 800nm, and repetition rate is 1KHz, and pulse energy density is 75J/cm
2, pulse width is 70fs.Can carry out ultrasonic cleaning after punching is finished, remove the pollution in the femtosecond laser processing.
The bore dia of punching only is 28 μ m, and the sample perforated area does not have the crystallization phenomenon and takes place.
Punching embodiment 3
A kind of femtosecond laser is to the no crystallization fine machining method of non-crystaline amorphous metal: the non-crystaline amorphous metal sample is carried out the line cutting, cut into the target that thickness is 0.5mm, can carry out surface finish again, polishing back non-crystaline amorphous metal thickness of sample is 0.2mm; Utilize femtosecond laser to the punching of non-crystaline amorphous metal sample, the centre wavelength of femtosecond laser is 800nm, and repetition rate is 1KHz, and pulse energy density is 100J/cm
2, pulse width is 100fs.
The bore dia of punching only is 30 μ m, and the sample perforated area does not have the crystallization phenomenon and takes place.
Groove embodiment 1
A kind of femtosecond laser is to the no crystallization fine machining method of non-crystaline amorphous metal: the non-crystaline amorphous metal target is carried out the line cutting, cut into the sample that thickness is 1mm; Utilize femtosecond laser to non-crystaline amorphous metal sample groove, the centre wavelength of femtosecond laser is 800nm, and repetition rate is 1KHz, and pulse energy density is 3J/cm
2, pulse width is 45fs, sweep speed is 100 μ m/s.Can carry out ultrasonic cleaning after groove is finished, remove the pollution in the femtosecond laser processing.
The live width of groove only is 10 μ m, and the no crystallization phenomenon in sample groove zone takes place.
Groove embodiment 2
A kind of femtosecond laser is to the no crystallization fine machining method of non-crystaline amorphous metal: the non-crystaline amorphous metal target is carried out the line cutting, cut into the sample that thickness is 0.5mm, can carry out surface finish again; Utilize femtosecond laser to non-crystaline amorphous metal target groove, the centre wavelength of femtosecond laser is 800nm, and repetition rate is 1KHz, and pulse energy density is 8J/cm
2, pulse width is 70fs, sweep speed is 150 μ m/s.Can carry out ultrasonic cleaning after groove is finished, remove the pollution in the femtosecond laser processing.
The live width of groove only is 15 μ m, and the no crystallization phenomenon in sample groove zone takes place.
Groove embodiment 3
A kind of femtosecond laser is to the no crystallization fine machining method of non-crystaline amorphous metal: the non-crystaline amorphous metal target is carried out the line cutting, cut into the sample that thickness is 0.5mm, can carry out surface finish again; Utilize femtosecond laser to non-crystaline amorphous metal sample groove, the centre wavelength of femtosecond laser is 800nm, and repetition rate is 1KHz, and pulse energy density is 15J/cm
2, pulse width is 100fs, sweep speed is 200 μ m/s.
The live width of groove only is 18 μ m, and the no crystallization phenomenon in sample groove zone takes place.
Cutting embodiment 1
A kind of femtosecond laser is to the no crystallization fine machining method of non-crystaline amorphous metal: the non-crystaline amorphous metal target is carried out the line cutting, cut into the sample that thickness is 0.5mm, can carry out surface finish again, the thickness of sample after the polishing is 0.2mm; Utilize femtosecond laser to the cutting of non-crystaline amorphous metal sample, the centre wavelength of femtosecond laser is 800nm, and repetition rate is 1KHz, and pulse energy density is 75J/cm
2, pulse width is 45fs, sweep speed is 100 μ m/s.Can carry out ultrasonic cleaning after cutting is finished, remove the pollution in the femtosecond laser processing.
The seam of cutting is wide only to be 27 μ m, and the no crystallization phenomenon in sample slot zone takes place.
Cutting embodiment 2
A kind of femtosecond laser is to the no crystallization fine machining method of non-crystaline amorphous metal: the non-crystaline amorphous metal target is carried out the line cutting, cut into the sample that thickness is 1mm; Utilize femtosecond laser to the cutting of non-crystaline amorphous metal target, the centre wavelength of femtosecond laser is 800nm, and repetition rate is 1KHz, and pulse energy density is 100J/cm
2, pulse width is 70fs, sweep speed is 150 μ m/s.Can carry out ultrasonic cleaning after cutting is finished, remove the pollution in the femtosecond laser processing.
The seam of slot is wide only to be 30 μ m, and the no crystallization phenomenon in sample slot zone takes place.
Cutting embodiment 3
A kind of femtosecond laser is to the no crystallization fine machining method of non-crystaline amorphous metal: the non-crystaline amorphous metal target is carried out the line cutting, cut into the target that thickness is 0.5mm, can carry out surface finish again, the target thickness after the polishing is 0.2mm; Utilize femtosecond laser to the cutting of non-crystaline amorphous metal target, the centre wavelength of femtosecond laser is 800nm, and repetition rate is 1KHz, and pulse energy density is 110J/cm
2, pulse width is 100fs, sweep speed is 200 μ m/s.
The seam of cutting is wide only to be 33 μ m, and the no crystallization phenomenon in sample slot zone takes place.
Claims (4)
1. a femtosecond laser is characterized in that the no crystallization fine machining method of non-crystaline amorphous metal: non-crystaline amorphous metal is carried out the line cutting; Utilize femtosecond laser that non-crystaline amorphous metal is punched, the pulse energy density of femtosecond laser is 50～100J/cm
2, pulse width 45～100fs.
2. a femtosecond laser is characterized in that the no crystallization fine machining method of non-crystaline amorphous metal: non-crystaline amorphous metal is carried out the line cutting; Utilize femtosecond laser to non-crystaline amorphous metal sample groove, the pulse energy density of femtosecond laser is 3～15J/cm
2, pulse width 45～100fs, sweep speed be 100～200 μ m/s.
3. a femtosecond laser is characterized in that the no crystallization fine machining method of non-crystaline amorphous metal: non-crystaline amorphous metal is carried out the line cutting; Utilize femtosecond laser to the cutting of non-crystaline amorphous metal sample, the pulse energy density of femtosecond laser is 75～110J/cm
2, pulse width 45～100fs, sweep speed be 100～200 μ m/s.
4. according to the no crystallization fine machining method of the described femtosecond laser of claim 1～3 to non-crystaline amorphous metal, it is characterized in that: the thickness after the cutting of non-crystaline amorphous metal line is less than 1mm.
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| CN 200610125079 CN100475433C (en) | 2006-11-20 | 2006-11-20 | Femtosecond laser amorphism fine machining method for amorphous alloy |
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| CN 200610125079 CN100475433C (en) | 2006-11-20 | 2006-11-20 | Femtosecond laser amorphism fine machining method for amorphous alloy |
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| CN100475433C CN100475433C (en) | 2009-04-08 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102218607A (en) * | 2010-04-15 | 2011-10-19 | 鸿富锦精密工业（深圳）有限公司 | Pulse laser cutting method of bulk amorphous alloy |
| CN101462205B (en) * | 2009-01-13 | 2011-12-07 | 包头高源激光科技发展有限公司 | Laser cutting method of amorphous alloy strip steel rolled stock |
| CN104625416A (en) * | 2014-12-29 | 2015-05-20 | 北京理工大学 | Method for electronic dynamic control of crystal silicon surface periodic micro-nano structures based on square hole assistance |
| CN106271108A (en) * | 2016-09-14 | 2017-01-04 | 东莞市逸昊金属材料科技有限公司 | A kind of laser cutting method of non-crystaline amorphous metal part |
| CN110052725A (en) * | 2019-04-30 | 2019-07-26 | 常州世竟液态金属有限公司 | A kind of amorphous alloy quasi-continuous lasing punch-cuts technique |
| WO2020010792A1 (en) * | 2018-07-10 | 2020-01-16 | 青岛云路先进材料技术股份有限公司 | Laser cutting method for amorphous strip |
| CN110707878A (en) * | 2018-07-10 | 2020-01-17 | 青岛云路先进材料技术股份有限公司 | Preparation method of motor magnetic core and motor magnetic core |
| CN111230298A (en) * | 2020-01-21 | 2020-06-05 | 中国科学院物理研究所 | Application of nanosecond laser and welding method of amorphous alloy material |
| CN115041926A (en) * | 2022-06-29 | 2022-09-13 | 中国工程物理研究院激光聚变研究中心 | Method for manufacturing capacitor coil target |
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| FR3124752A1 (en) * | 2021-06-30 | 2023-01-06 | Vulkam | Process for cutting an amorphous metal alloy sample |
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2006
- 2006-11-20 CN CN 200610125079 patent/CN100475433C/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101462205B (en) * | 2009-01-13 | 2011-12-07 | 包头高源激光科技发展有限公司 | Laser cutting method of amorphous alloy strip steel rolled stock |
| CN102218607A (en) * | 2010-04-15 | 2011-10-19 | 鸿富锦精密工业（深圳）有限公司 | Pulse laser cutting method of bulk amorphous alloy |
| CN102218607B (en) * | 2010-04-15 | 2014-11-05 | 鸿富锦精密工业（深圳）有限公司 | Pulse laser cutting method of bulk amorphous alloy |
| CN104625416A (en) * | 2014-12-29 | 2015-05-20 | 北京理工大学 | Method for electronic dynamic control of crystal silicon surface periodic micro-nano structures based on square hole assistance |
| CN104625416B (en) * | 2014-12-29 | 2016-06-22 | 北京理工大学 | Based on square hole auxiliary electron dynamic regulation crystal silicon surface periodic micro-nano structure method |
| CN106271108A (en) * | 2016-09-14 | 2017-01-04 | 东莞市逸昊金属材料科技有限公司 | A kind of laser cutting method of non-crystaline amorphous metal part |
| CN110695540A (en) * | 2018-07-10 | 2020-01-17 | 青岛云路先进材料技术股份有限公司 | Laser cutting method of amorphous strip |
| WO2020010792A1 (en) * | 2018-07-10 | 2020-01-16 | 青岛云路先进材料技术股份有限公司 | Laser cutting method for amorphous strip |
| CN110707878A (en) * | 2018-07-10 | 2020-01-17 | 青岛云路先进材料技术股份有限公司 | Preparation method of motor magnetic core and motor magnetic core |
| CN110052725A (en) * | 2019-04-30 | 2019-07-26 | 常州世竟液态金属有限公司 | A kind of amorphous alloy quasi-continuous lasing punch-cuts technique |
| CN111230298A (en) * | 2020-01-21 | 2020-06-05 | 中国科学院物理研究所 | Application of nanosecond laser and welding method of amorphous alloy material |
| CN111230298B (en) * | 2020-01-21 | 2023-03-21 | 中国科学院物理研究所 | Application of nanosecond laser and welding method of amorphous alloy material |
| CN115041926A (en) * | 2022-06-29 | 2022-09-13 | 中国工程物理研究院激光聚变研究中心 | Method for manufacturing capacitor coil target |
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| CN100475433C (en) | 2009-04-08 |
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