CN1959950A - Board unloading device and board unloading method - Google Patents
Board unloading device and board unloading method Download PDFInfo
- Publication number
- CN1959950A CN1959950A CN 200610136338 CN200610136338A CN1959950A CN 1959950 A CN1959950 A CN 1959950A CN 200610136338 CN200610136338 CN 200610136338 CN 200610136338 A CN200610136338 A CN 200610136338A CN 1959950 A CN1959950 A CN 1959950A
- Authority
- CN
- China
- Prior art keywords
- substrate
- recipient
- conveyance
- suspension bracket
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Specific Conveyance Elements (AREA)
Abstract
Provides a device that can simplify unloading task and can be easily to unload and pile even if the thickness of the board is thin. The board dropper 50 unlocks clamping of the board W in fallen condition of the transport hanger 15. The board container 52 receives and houses the board W when the board W has fallen vertically. By activating the rotate cylinder 54 a, the board container 52 is rotated. The transport roller 56 carries out the board horizontally from an open area 52 a of the rotated board container 52.
Description
Be willing to 2005-300255 number and the content of special scope of being willing to 2006-254759 number claim, specification, accompanying drawing, summary is combined among the application the Japan patent application is special.
Technical field
The invention relates to the technology of following technology, that is, relate to the substrate technology that conveyance was unloaded and this substrate is carried out in employed conveyance with suspension bracket from surface processing devices such as electroplanting device.
Background technology
At first, utilize Fig. 7, Fig. 8, the structure of surface processing device with board unloading device (unloader) is carried out following explanation.Fig. 7 is a vertical view of observing surface processing device 100 from the top.Fig. 8 is a side view of observing surface processing device 100 shown in Figure 7 from the α direction.
As shown in Figure 7 and Figure 8, surface processing device 100 is so-called pusher electroplanting devices, and this device has: conveyance suspension bracket 15, and it keeps substrates such as printed base plate; Riser guide 10,12, it makes this conveyance use suspension bracket 15 with slidably state lifting; And fixed guide 11,13, it is used on one side this conveyance being kept predetermined interval with suspension bracket 15 along front and back, Yi Bian this conveyance usefulness suspension bracket 15 of conveyance in turn.
As shown in Figure 7, be provided with along these guide rails 10～13: the various pre-treatment grooves 1 that are used to carry out the pre-electroplating treatment operation; The electroplating bath 2 that is used to electroplate; Be used to electroplate the accumulator tank 3 and the rinsing bowl 4 of postprocessing working procedures; Be used to carry out unloading dismounting, that the be provided with board unloading device portion 5 of substrate; Be used for to peel off the peel groove 6 of (suspension bracket returns operation) with electroplating film on the suspension bracket 15 etc. attached to conveyance; After lift-off processing, carry out the rinsing bowl 7 of conveyance with the washing of suspension bracket 15; And the loading part 8 that carries out the installation of substrate.
Utilize Fig. 9 and Figure 10, the existing conveyance of being carried out conveyance by surface processing device shown in Figure 7 100 is carried out following explanation with the structure of suspension bracket 15.Fig. 9 is the detail drawing of expression conveyance shown in Figure 8 with the structure of suspension bracket 15.Figure 10 is the local central sectional view of conveyance with suspension bracket 15.
As shown in Figure 9, conveyance has with suspension bracket 15: object being treated holding member 90, and it has a plurality of clamps 48 that object being treated W is kept; Slide unit 35, guide rail sliding contact such as itself and fixed guide 11; And link 44, it couples together object being treated holding member 90 and slide unit 35.
As shown in Figure 9, object being treated holding member 90 is to be equipped with the parts that constitute as the lower part: horizon bar portion 46, and its connection is arranged on the link 44, and approximate horizontal ground extends on the conveyance direction; A plurality of plumbing bar portion 49, it connects the predetermined position that is arranged on this horizon bar portion 46 with sagging state; With clamp 48, it is at the lower end of this plumbing bar portion 49 clamping substrate.
As shown in figure 10, clamp 48 is made of the fixed part 48a and the movable member 48b that are installed in the plumbing bar portion 49, and movable member 48b is installed in rotation on the axle that is arranged at fixed part 48a.By means of spring, the fixed part 48a of clamp 48 and movable member 48b are in closed state usually at leading section.When the elastic force that overcomes spring, when being pressed into the upper end of movable member 48b,, between fixed part 48a and movable member 48b, form the gap, thereby can in this gap, insert substrate W at the leading section of clamp 48.
Be arranged on board unloading device 5 in the unloading portion 5 shown in Figure 7 ' as shown in figure 11, have: as the clamp opening device 50 of substrate relieving attachment; Suspension bracket supporting arrangement 51; And accept platform 53.
The front end that clamp opening device 50 is installed in the clamp pressing component by air cylinder constitutes, when the conveyance of the top that arrives unloading portion 5 shown in Figure 7 is used suspension bracket 15 as shown in figure 11, when descending with riser guide 12, clamp opening device 50 extend action by air cylinder, push the upper end of the movable member 48b of clamp 48 (Figure 10), remove clamping substrate W.Suspension bracket supporting arrangement 51 constitutes the front end that support plate is installed in the supporting cylinder, before 50 actions of clamp opening device, the supporting cylinder of suspension bracket supporting arrangement 51 extends action, this suspension bracket supporting arrangement 51 passes through support plate from the opposition side of clamp opening device 50, supports with object being treated holding member 90 butts of suspension bracket 15 and to this holding member 90 with the conveyance after the above-mentioned decline.Thereby, can prevent object being treated holding member 90 bendings of conveyance with suspension bracket 15, can prevent that the pressing force when clamp opening device 50 is pushed clamp 48 from dying down.Accept platform 53 and be provided in conveyance after riser guide 12 descends with the below of suspension bracket 15, catch and be contained in the substrate that falls after the clamping that releasing undertaken by clamp 48.
By have these clamp opening devices 50, suspension bracket supporting arrangement 51 and accept the board unloading device 5 of platform 53 ', when passing through clamp opening device 50 and suspension bracket supporting arrangement 51, during clamping that releasing is undertaken by clamp 48, conveyance after riser guide 12 descends drops to the substrate W of suspension bracket 15 clampings and accepts on the platform 53, just transports and load (with reference to patent documentation 1) by thereafter operator.
But, aforesaid existing board unloading device 5 ' in, have following problem points.
The operator loads and drops to the substrate W that accepts on the platform 53 shown in Figure 11 is numerous and diverse and operation trouble.In addition, because of the surface tension that produces attached to the treatment fluid on substrate W surface or the adhesion strength of plating, even remove the clamping of conveyance with 15 couples of substrate W of suspension bracket sometimes, substrate W can not come off from clamp 48 yet, and device is stopped.And then, be that because the surface tension of above-mentioned treatment fluid, substrate W is bonded in the way that falls and accepts on the platform 53 under the situation of such thin substrate W below the 0.1mm at thickness, be not accepted the upper end that platform 53 catches unfavorable conditions such as bending take place sometimes.
Summary of the invention
The present invention is in order to solve above-mentioned each problem, and purpose is to provide a kind of board unloading device that can easily carry out the field-strip of substrate.
(1) to be the conveyance that is used for substrate being arranged from clamping unload the board unloading device of infrabasal plate with suspension bracket to board unloading device of the present invention, it is characterized in that this board unloading device has:
The substrate relieving attachment, it removes conveyance with the clamping of suspension bracket to substrate;
The substrate accommodation apparatus, it has the substrate recipient, when from the peristome of described substrate recipient after vertical direction receives and accommodates the substrate that unloads with suspension bracket from conveyance by described substrate relieving attachment, rotate this substrate recipient, substrate is taken out of from described peristome.
Thereby, can make the field-strip automation of substrate, simultaneously, can easily be connected on the conveyer or loading attachment of known horizontal conveyance formula, can easily load.
(2) board unloading device of the present invention is characterised in that,
The aforesaid substrate accommodation apparatus will be housed in the substrate in the postrotational substrate recipient, take out of from the peristome of substrate recipient by base board delivery device.
Thereby, substrate can be taken out of automatically and swimmingly from the substrate recipient.
(3) board unloading device of the present invention is characterised in that,
The aforesaid substrate recipient forms on the sidewall that rotates the back downside has otch, and the aforesaid substrate carrying device supports the substrate that is housed in the postrotational substrate recipient by this otch, and from the peristome of aforesaid substrate recipient this substrate is taken out of.
Thereby,,, can prevent that substrate from bending when taking out of Yi Bian this substrate is taken out of Yi Bian support whole base plate.In addition, can take out of substrate apace, the result is even the surface processing device of the substrate block number many (productivity ratio height) that conveyance comes in the unit interval also can carry out substrate dismounting automatically smoothly.
(4) board unloading device of the present invention is characterised in that,
The aforesaid substrate accommodation apparatus has substrate supporting device, and this substrate supporting device is regulated the distance of fall of the substrate that unloads with suspension bracket from above-mentioned conveyance.
Thereby,, also can prevent to produce when substrate is on falling the substrate recipient scar even under the different situation of substrate size.
(5) board unloading device of the present invention is characterised in that,
The aforesaid substrate relieving attachment has the substrate dropping device.
Thereby, can prevent owing to substrate can not be come off and action that must arresting stop from clamp etc. attached to the surface tension of the treatment fluid of substrate surface.
(6) board unloading device of the present invention is characterised in that,
The aforesaid substrate recipient forms on the two side that rotates back downside and upside has otch,
Remove conveyance with suspension bracket during to the clamping of substrate when the aforesaid substrate relieving attachment, air jet system is by above-mentioned otch, from the both sides ejection air of substrate.
Thereby, can prevent that substrate is bonded on the sidewall of substrate recipient in the way that falls.
(7) board unloading device of the present invention is characterised in that,
Above-mentioned air jet system more sprays air by last position towards the lower end than substrate at least.
Thereby, can prevent reliably that substrate is bonded on the sidewall of substrate recipient in the way that falls.
(8) board unloading device of the present invention is characterised in that,
On the inner surface of aforesaid substrate recipient, be provided with and prevent to paste guide.
Thereby, can prevent that substrate is bonded on the sidewall of substrate recipient.
(9) to be the conveyance that is used for substrate being arranged from clamping unload the board unloading method of infrabasal plate with suspension bracket to board unloading method of the present invention, it is characterized in that,
Remove conveyance with the clamping of suspension bracket, unload infrabasal plate substrate,
When from the peristome of substrate recipient after vertical direction receives and accommodates the substrate that unloads with suspension bracket from conveyance, rotate described substrate recipient, take out of substrate from described peristome.
Thereby, can make the field-strip automation of substrate, and, can easily be connected on the conveyer or loading attachment of known horizontal conveyance formula, can easily load.
For other purpose, use, effect, if with reference to following drawings and detailed description, for it will be appreciated by those skilled in the art that.
Description of drawings
Fig. 1 is the figure of the structure of expression board unloading device of the present invention (unloader 5a).
Fig. 2 is the stereogram of the structure of expression substrate recipient 52 shown in Figure 1.
Fig. 3 A is the side view that expression makes substrate recipient 52 postrotational states, and Fig. 3 B is the upward view that expression makes substrate recipient 52 postrotational states, and Fig. 3 C is the figure that observes the peristome 52a of substrate recipient from the top.
Fig. 4 is the figure of structure that expression has the unloader 5b of substrate supporting device 60.
Fig. 5 is the figure of the structure of expression substrate supporting device 60 and substrate recipient 52.
Fig. 6 is the figure of the structure of the unloader 5c in other execution mode of expression.
Fig. 7 is a vertical view of observing electroplanting device 100 from the top.
Fig. 8 is electroplanting device 100 is observed in expression from the α direction a side view.
Fig. 9 is the detail drawing of expression conveyance with the structure of suspension bracket 15.
Figure 10 is the local central sectional view of conveyance with suspension bracket 15.
Figure 11 is the figure of the structure of the existing board unloading device of expression (unloader 5 ').
Figure 12 be the expression top that is arranged on riser guide 10 intermittence carrying device 17 structure vertical view.
Figure 13 is the figure of the structure of expression substrate dropping device 58.
Figure 14 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 15 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 16 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 17 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 18 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 19 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 20 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 21 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 22 is the figure of the control flow in the expression board unloading device.
Figure 23 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 24 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 25 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 26 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 27 is the figure of the structure of the board unloading device in other execution mode of expression.
Figure 28 is the figure of the structure of the board unloading device in other execution mode of expression.
Embodiment
1. the structure of board unloading device
Fig. 1 is the figure of the structure of expression board unloading device of the present invention (unloader 5a).And unloader 5a shown in Figure 1 is set on the position of unloading portion 5 of surface processing device shown in Figure 7 100 as described later.
To be the conveyance that is used for substrate W being arranged from clamping unload the device of infrabasal plate W with suspension bracket 15 to unloader 5a shown in Figure 1, and it is used for unloading infrabasal plate W, substrate W being loaded the unloading operation of the substrate W of (aggregation) thereafter with suspension bracket 15 from conveyance.
As shown in Figure 1, unloader 5a has: the substrate relieving attachment, and it is made of the clamp opening device 50 and the substrate dropping device 58 that are arranged on the suspension bracket supporting arrangement 51 on the base frame 70 and be arranged on the base frame 72; With the substrate accommodation apparatus, it is made of substrate recipient 52 (partial cut-out), whirligig 54 and base board delivery device 56.The clamping of conveyance with 15 couples of substrate W of suspension bracket removed in the aforesaid substrate relieving attachment, and substrate W is dropped in the substrate recipient 52 of substrate accommodation apparatus.In addition, the aforesaid substrate accommodation apparatus is accommodated by the substrate relieving attachment and is unloaded with suspension bracket 15 and at the substrate W that vertical direction falls from conveyance, makes this substrate W rotation then and with level this substrate W is taken out of.And base frame 70,72 is made of steel.
At first, to the substrate relieving attachment that constitutes by suspension bracket supporting arrangement 51 shown in Figure 1, clamp opening device 50 and substrate dropping device 58, carry out following explanation.
As shown in Figure 1, suspension bracket supporting arrangement 51 constitutes by being positioned at the support plate 51a and the supporting cylinder 51b of conveyance with suspension bracket 15 left sides.Drop under the state of position as shown in Figure 1 with riser guide 12 with suspension bracket 15 in conveyance, suspension bracket supporting arrangement 51 supports conveyance suspension bracket 15 from drawing left side and object being treated holding member 90 butts.
Particularly, before clamp opening device 50 described later carries out the releasing of clamp 48, supporting cylinder 51b action, support plate 51a and conveyance are with object being treated holding member 90 butts of suspension bracket 15 and support.Thereby, can prevent object being treated holding member 90 when the releasing of clamp 48 bending of conveyance with suspension bracket 15, can carry out the releasing of clamp 48 reliably.
As shown in Figure 1, clamp opening device 50 constitutes with the clamp pressing component 50a on suspension bracket 15 right sides with by air cylinder 50b by being positioned at conveyance.Drop under the state of position as shown in Figure 1 with riser guide 12 with suspension bracket 15 in conveyance, clamp opening device 50 is removed the clamping of 48 couples of substrate W of clamp.
Particularly, the supporting cylinder 51b action of above-mentioned suspension bracket supporting arrangement 51 shown in Figure 1, support plate 51a become with the state of conveyance with suspension bracket 15 butts after, under this state, press air cylinder 50b action, clamp pressing component 50a pushes the upper end of the movable member 48b (with reference to Figure 10) of clamp 48 thus, removes the clamping to substrate W.
Figure 13 A is a vertical view of observing substrate dropping device 58 from the top.As shown in FIG. 13A, the substrate of substrate dropping device 58 is released parts 58a six contact with substrate W and the protrusion member 582 that this substrate W releases is installed on the flat board member 581 that is installed on release cylinder 58b and formation.Protrusion member 582 is formed by resin (PP), and its front end carries out fillet processing.This is for when releasing substrate W, makes the protrusion member 582 can wounded substrate W.
Figure 13 B is the protrusion member 582 of expression aforesaid substrate dropping device 58 is used the position relation of suspension bracket 15 and substrate W with respect to conveyance figure.Shown in Figure 13 B, the protrusion member 582 of substrate dropping device 58 is positioned at that more () position for example, by several millimeters down is at the clamp 48 contact position 583 release substrate W more in the inner part than two ends by downside with the clamp 48 of suspension bracket 15 than conveyance.This is for the surface tension of removing the treatment fluid that produces between substrate W and clamp 48 or substrate recipient 52 madial walls or the adhesion strength of plating, is thin substrate below the 1mm to thickness particularly, also will make to be delivered on the substrate W with releasing reliable in action.And, for substrate W is fallen reliably, preferably make the contact position 583 of the protrusion member 582 shown in Figure 13 B be in as far as possible clamp 48 near, and then, to prevent that substrate W is bonded under the situation on the substrate recipient 52, for substrate W is shaken significantly, also can will leave the position (centre position of the clamp 48 of adjacency) of clamp 48 as contact position 583.
Below, utilize Fig. 2 etc., the substrate accommodation apparatus that is made of substrate recipient 52 shown in Figure 1, whirligig 54 and base board delivery device 56 is carried out following explanation.And Fig. 2 is the figure of the structure of expression substrate recipient 52, and in the present embodiment, substrate recipient 52 utilizes PVC (vinyl chloride) moulding.
The substrate accommodation apparatus has substrate recipient 52, this substrate recipient 52 is connected with whirligig 54, so that can be middle mind-set E direction rotation with rotating shaft 54c shown in Figure 1, in substrate recipient 52, as shown in Figure 2, sidewall 52e is provided with otch (52b) longitudinally.
When 52 rotations of substrate recipient become level (dotted line with Fig. 1 is represented), the carrying roller 56 as the aforesaid substrate carrying device shown in Figure 1 is directed into inside by above-mentioned otch 52b (with reference to Fig. 2).Thereby, shown in Fig. 3 A, B, carrying roller 56 as base board delivery device passes through above-mentioned otch 52b supporting substrates W, so that make substrate recipient 52 become the position of level by whirligig 54, be accommodated in substrate W in the substrate recipient 52 and can not contact sidewall 52e and described laterly prevent to paste guide (guide) 52d (with reference to Fig. 3 C).And Fig. 3 A is the side view of expression substrate recipient 52 postrotational states, and Fig. 3 B is the upward view of expression substrate recipient 52 postrotational states.
Like this, by otch 52b as shown in Figure 2 is set in substrate recipient 52, shown in Fig. 3 B, by the otch 52b of substrate recipient 52, substrate W can become the state by carrying roller 56 supportings, thereby can be with substrate W conveyance on the F of Fig. 3 A direction swimmingly.For example, by making carrying roller 56 from about the outstanding 10mm of the sidewall 52e of substrate recipient 52, come supporting substrates W.
In addition, as shown in Figure 1, substrate recipient 52 has peristome 52a, this peristome 52a receives substrate in conveyance with suspension bracket 15 when vertical direction (the D direction of Fig. 1) descends, peristome 52a is shaped as the shape of width towards the top expansion, so that this peristome 52a can be directed to substrate W the inside of substrate recipient 52 reliably.
In addition, as shown in Figure 1, substrate recipient 52 is adapted to, conveyance with the position (P) of the clamp 48 of suspension bracket 15 be positioned at than near the inner surface of the more close sidewall 52e of central authorities (M) of substrate recipient 52 (for example, apart from the inner surface 10～50mm) of sidewall 52e, thus make substrate recipient 52 form along near the inner surface of the sidewall 52e of substrate recipient 52 to the structure of substrate W channeling conduct.Thereby, when substrate recipient 52 when the E of Fig. 1 direction is rotated, can suppress to be housed in that substrate W in the substrate recipient 52 move and the substrate W that causes damages substrate recipient 52 in.
In addition, shown in Fig. 3 C, at the sidewall 52e of aforesaid substrate recipient 52, the inner surface of 52f, towards vertically, spread all over whole sidewall 52e, 52f ground bonding be provided with the PVC system that is configured as shaft-like (several mm of diameter) prevent to paste guide 52d.Fig. 3 C is a substrate recipient 52 when being in the solid line state of Fig. 1, observes the figure of the peristome 52a of substrate recipient from the top.Thereby, substrate W does not meet with the inner surface of sidewall 52e, the 52f of substrate recipient 52 and contacts, both can prevent to produce scratch on substrate W surface, and can prevent the surface tension because of the treatment fluid that adheres to again, substrate W is bonded on the inner surface of sidewall 52e, 52f of substrate recipient 52.
As shown in Figure 1, whirligig 54 is made of following part: rotary cylinder 54a, and it becomes the power that makes 52 rotations of substrate recipient; With turning arm 54b, the one end is fixed on the bottom of aforesaid substrate recipient 52, and the other end is connected to rotary cylinder 54a, is a body component that the transmission of power of rotary cylinder 54a is arrived the L type of substrate recipient.Rotary cylinder 54a shown in Figure 1 extends action, and making turning arm 54b is the center rotation with the axle 54c that is fastened on the base frame 72, and substrate recipient 52 rotates to the E of Fig. 1 direction under the state of having accommodated substrate W thus.And the end of rotary cylinder 54a rotatably is connected on the base frame 72 by axle 54e, and the other end of rotary cylinder 54a rotatably is connected on the axle 54d that is fixed in turning arm 54b, and this turning arm 54b is fastened on the substrate recipient 52.
Base board delivery device is made of carrying roller 56, and this carrying roller 56 is driven by drive motor, and this base board delivery device will rotate to the substrate W that the substrate recipient 52 behind the dotted line position of Fig. 1 is accommodated, and take out of from peristome 52a along continuous straight runs (the F direction of Fig. 1).And the diameter of carrying roller 56 for example forms 40mm.This be because, under the situation of using the too big roller of diameter, for thin substrate, the end of substrate enters between the carrying roller 56, might cause that conveyance is bad.In addition, the rotating shaft of carrying roller 56 is positioned at the position of more leaning on the below than the substrate recipient 52 under the postrotational state.
Utilize Figure 22 that the control flow among the unloader 5a is described.And the action of unloader 5a is by control part (not shown) control of the electroplanting device 100 (Fig. 7) that is made of CPU etc.
When detect by transducer (not shown) conveyance with substrate W with suspension bracket 15 from the rinsing bowl 4 of electroplanting device shown in Figure 7 100 by conveyance during to unloading portion 5, as shown in figure 22, according to the instruction from control part, riser guide 12 is in the D of Fig. 1 direction decline (step S02).
Then, after the detection of the sensor, when the instrumentation that waits by timer (timer) passes through the scheduled time, according to instruction from control part, supporting cylinder 51b action shown in Figure 1, support plate 51a and object being treated holding member 90 butts support conveyance suspension bracket 15 (step S04) thus.Then, when further passing through the scheduled time, according to the instruction from control part, press air cylinder 50b action, the upper end that clamp pressing component 50a pushes clamp 48 is removed the clamping (step S06) to substrate W thus.
When further passing through the scheduled time, release cylinder 58b action, substrate is released parts 58a contact substrate W (step S08).And when the clamping of 48 couples of substrate W of clamp is disengaged (above-mentioned steps S06), under the situation that substrate W has come off, even release cylinder 58b action, substrate is released also contact substrate W not of parts 58a.
In the time of in substrate W is accommodated substrate recipient 52 (for example, come out by the sensor that is arranged on the substrate recipient 52), rotary cylinder 54a action, substrate recipient 52 is the center with rotating shaft 54c shown in Figure 1, to the rotation of E direction, substrate W is remained level (step S10) by carrying roller 56.When substrate recipient 52 became level, carrying roller 56 began rotation, and substrate W is taken out of (step S12) along the F direction of Fig. 1.
As substrate W during by conveyance, riser guide 12 rises, and simultaneously, each cylinder (supporting cylinder 51b, by air cylinder 50b, release cylinder 58b, rotary cylinder 54a) is kept out of the way respectively and turned back to original state (step S14).
Then, the conveyance of unloading behind the infrabasal plate W is sent in the peel groove shown in Figure 76 with suspension bracket 15.On the other hand, the conveyance that will have a new substrate W from rinsing bowl 4 with suspension bracket 15 conveyances to unloading portion 5, a series of actions that just can carry out being done (from the step S02 of Figure 22 to S14) by above-mentioned unloader 5a.
And, in control flow shown in Figure 22, after the clamping to substrate W is disengaged (step S06), at step S08, when through the scheduled time, control so that release the mode of cylinder 58b action, but also can carry out following control, promptly, being arranged at sensor on the substrate recipient 52 when substrate W falls, do not make and release cylinder 58b action, but so that the mode of substrate recipient 52 rotations (step S10) control, perhaps be only limited to being arranged at transducer on the substrate recipient 52 and do not detect under the situation that substrate W falls, just make and release cylinder 58b action.
As previously discussed, unloader 5a of the present invention has the substrate relieving attachment that is made of clamp opening device 50, suspension bracket supporting arrangement 51, substrate dropping device 58, and, can realize following item thus by the substrate accommodation apparatus that substrate recipient 52, whirligig 54, base board delivery device 56 constitute.
(I) by known loading (aggregation) device is connected on the base board delivery device 56 of unloader 5a of the present invention, till the loading operation of substrate W, can realize automation thus.In addition, because substrate W is taken out of by base board delivery device 56, therefore, the operator can easily receive substrate W, thereby the loading operation transfiguration is easy.
(II), thereby can prevent from can not drop in the substrate recipient 52 because of the surface tension attached to the lip-deep treatment fluid of substrate W makes substrate W owing to have substrate dropping device 58.Thus, the danger that can avoid device to stop, and do not accommodate the bendings that cause in the substrate recipient 52 etc. swimmingly because of thin substrate W bad.
2. surface processing device and conveyance are with the structure of suspension bracket
Use the structure of the surface processing device of unloader 5a of the present invention, identical with the structure of the device shown in above-mentioned Fig. 7,8.
As shown in Figure 7 and Figure 8, surface processing device 100 is so-called pusher electroplanting devices, and this device has: conveyance suspension bracket 15, and it keeps substrate W such as printed base plate; Riser guide 10,12, it makes this conveyance use suspension bracket 15 with slidably state lifting; And fixed guide 11,13, it on one side keeps predetermined interval with this conveyance with suspension bracket 15 along front and back, Yi Bian this conveyance usefulness suspension bracket 15 of conveyance in turn.Be provided with along these guide rails 10～13: the pre-treatment groove 1 that is used to carry out the pre-electroplating treatment operation; Be used to carry out the electroplating bath 2 of electroplating work procedure; Be used to electroplate the accumulator tank 3 and the rinsing bowl 4 of postprocessing working procedures; Be used to carry out the unloading portion 5 of the dismounting of substrate W; Be used to peel off attached to the peel groove 6 of conveyance with the electroplating film on the suspension bracket 15 etc.; The rinsing bowl of after lift-off processing, conveyance being washed with suspension bracket 15 7; And the loading part 8 that carries out the installation of substrate W.As Fig. 7 or shown in Figure 8, riser guide 10,12 is off and on conveyance to be carried out conveyance with suspension bracket 15, substrate W (printed base plate etc.) is installed the guide rail of (loading) and dismounting (unloading) on suspension bracket 15 in this conveyance, is again that substrate W is immersed in the guide rail that various treatment troughs (electroplating bath 2, peel groove 6, rinsing bowl, hot water rinse bath etc.) carry out lifting when middle.
Utilize Fig. 9, Figure 10 etc., the structure of conveyance of the present invention with suspension bracket 15 described.
As shown in Figure 9, conveyance has with suspension bracket 15: object being treated holding member 90, and it has a plurality of clamps 48 that substrate W is kept; Slide unit 35, itself and fixed guide 11 sliding contacts; And link 44, it couples together object being treated holding member 90 and slide unit 35.Material as slide unit 35 and link 44 can adopt copper, brass.
In addition, as shown in figure 10, be fastened with bearing (Shaft is subjected to け) 36 on the top of slide unit 35, this bearing 36 has the gear 40 of the one-way clutch formula that meshes with chain belt 39 (constituting fixed guide carrying device 19 shown in Figure 7).Therefore, on fixed guide 11,13, when sending to, only rotate to B direction shown in Figure 9 with chain belt 39 meshed gears 40.
In addition, by push rod 16,21 (Fig. 8) and push rod bearing surface 37 butts shown in Figure 9 that make carrying device 17,22 at intermittence, thereby can carry out the conveyance of conveyance with suspension bracket 15.For example, by make shown in Figure 12 intermittence carrying device 22 push rod 21c with the conveyance of (j) position that is in Fig. 7 push rod bearing surface 37 butts with suspension bracket 15, thereby conveyance with suspension bracket 15 by the position ((k) position of Fig. 7) of conveyance to unloader 5a.Figure 12 be the expression top that is arranged on riser guide 10,12 intermittence carrying device 17,22 structure vertical view.
The pawl abutting part 32 of Figure 10 is conveyance pawl 30 (Fig. 7) the institute butt of carrying device 18 is promptly located in conveyance with the carrying device of suspension bracket 15 parts.
3. other execution mode
And, in the above-described embodiment, its basal surface position of substrate recipient 52 usefulness is caught the substrate W (with reference to Fig. 1) after falling, but also can form following structure as shown in Figure 4, promptly, in the aforesaid substrate accommodation apparatus, set up substrate supporting device 60, substrate recipient 52 ' in, catch the substrate W that falls with this substrate supporting device 60, simultaneously, can regulate the distance that substrate W falls.Unloader 5b shown in Figure 4 has the substrate supporting device 60 that is arranged on the base frame 74, and the unloader 5a with shown in Figure 1 is different in this.And base frame 74 is made of steel.
As shown in Figure 4, substrate supporting device 60 is made of following part: substrate stop component 60a, and it catches the substrate W that falls; Regulate lift 60b with stop position, it makes substrate stop component 60a move to predetermined height and position by the driving of motor or electric drive etc.
Particularly, before above-mentioned clamp opening device 50 is removed clamp 48, corresponding to conveyance shown in Figure 4 longitudinal length with the substrate W of suspension bracket 15 clampings, substrate stop component 60a regulates the driving of lift 60b by stop position, (for example move to predetermined altitude, the height and position longer than the clamping amount L10 (Fig. 9) of 48 couples of substrate W of clamp at least with the interval of the lower end of substrate W: preferably from the lower end of substrate W by the height and position of time 10～30mm), descend then, the lower end that makes substrate W by substrate recipient 52 ' the bottom surface supporting.Thereby, when substrate W is housed in substrate recipient 52 ' middle, can prevent substrate W damage effectively.
Fig. 5 represent the substrate supporting device 60 of this execution mode and substrate recipient 52 ' structure.As shown in Figure 5, substrate stop component 60a is made of a plurality of bars that extend in vertical direction, substrate recipient 52 ' be provided with the otch 52b of sidewall 52e shown in Figure 2 not only, and on sidewall 52f, also be provided with otch 52c so that these bars connect substrate recipients 52 '.
And, in the above-described embodiment, as shown in Figure 5, regulate the distance of fall of substrate W with substrate stop component 60a, this substrate stop component 60a connect substrate recipient 52 ' sidewall 52e, 52f on the otch 52b, the 52c that are provided with, but be not limited in such structure.For example, also can form following structure, promptly, as shown in figure 14, whirligig 54 is fixed on substrate accepts on the platform 55, substrate recipient 52 (identical with substrate recipient 52 shown in Figure 1, as not have otch 52c on the sidewall 52f) can be positioned in this substrate up or down accept on the platform 55, accept moving up and down of platform support unit 61a by being installed in the substrate that substrate accepts on the platform position adjustments lift 61b, the height of this substrate recipient 52 is regulated.
In addition, in execution mode shown in Figure 4, the distance of fall of substrate W when being accommodated in the substrate recipient 52 in order to regulate substrate W, regulating lift 60b by stop position moves the substrate stop component 60a that catches substrate W, regulate height, but be not limited in such structure, also can not use stop position to regulate lift 60b.
For example, also can form structure as described as follows, promptly, " be installed in and regulate on the cylinder 60d, be fixed on the stop position fixed part 60c with predetermined height in advance respectively; when substrate W is fallen; according to the size of substrate W, make substrate stop component 60a ' or 60a " as shown in figure 15, with two substrate stop component 60a ', 60a and advance, insert substrate recipient 52 ' otch 52c in.
And, under situation, omit the base frame 74 among Fig. 4 with substrate supporting device shown in Figure 15 60 ' implement as board unloading device, replace substrate supporting device 60 that substrate supporting device shown in Figure 15 60 ' get final product is set.
And, in the above-described embodiment, as shown in Figure 1, substrate W is near the inner surface of the sidewall 52e of substrate recipient 52, on vertical direction, be received, but also can (for example, around the central authorities of peristome 52a shown in Figure 1) receive substrate W in the position of leaving sidewall 52e inner surface.
And, in the above-described embodiment, as shown in Figure 1, substrate recipient 52 is set, but also can in advance substrate recipient 52 be obliquely installed as shown in Figure 6 along vertical direction, under this state, receive substrate W along vertical direction.
And, in the above-described embodiment, after making substrate recipient 52 rotate to level by whirligig shown in Figure 1 54, take out of substrate W with base board delivery device 56 with drive source, but also can be with the free roller as base board delivery device that does not have drive source.
For example, as shown in figure 16, the also free roller 56a that can be connected in the inner surface setting of substrate recipient 52 " sidewall 52e " with drive source, by whirligig 54, make peristome 52a " with respect to level for down; substrate W under the effect of gravity, the landing by free roller 56a, thus " taken out of from peristome 52a.
And, " under the situation about implementing, also can use substrate recipient 52 among Figure 14 to replace the substrate recipient 52 of Figure 16 " with substrate recipient 52 shown in Figure 16 as board unloading device.Whole as device, the substrate recipient 52 that substrate recipient 52 among Fig. 4 replaces Figure 14 can be set, and " and the substrate of Figure 16 is accepted platform 55; substrate supporting device 61 that substrate supporting device 60 among Fig. 4 replaces Figure 14 is set, simultaneously, can omits carrying roller 56.
And in the above-described embodiment, as shown in Figure 5, on the sidewall 52e of substrate recipient 52, longitudinally (along the conveyance direction) is formed with otch 52b, but is not limited in this.For example, also can be formed with in Fig. 4 along the roller channeling conduct that is set up in parallel on the paper direction inwards of each carrying roller 56 laterally (along with the direction of conveyance direction quadrature) otch.In the case, with the otch 52c of sidewall 52f along laterally being shaped, but make its pair roller channeling conduct, be provided with substrate supporting device shown in Figure 15 60 ' the execution mode of board unloading device in, also can use the substrate recipient of this cross sections that is shaped.
And, in the above-described embodiment, as shown in Figure 1, formed carrying roller 56, this carrying roller 56 is by the otch 52b supporting substrates of substrate recipient 52, and utilize and take out of by electric motor driven roller as drive source, but also can be as shown in figure 17, the left side in the bottom of postrotational substrate recipient 52 (before rotation, the part of bottom), what be provided as drive source takes out of cylinder 56b, takes out of cylinder 56b with this and releases and take out of substrate W.In addition, as shown in figure 18, also can be on the right side of postrotational substrate recipient 52 (anterior locations of peristome), has traction cylinder 56c as drive source, on this traction cylinder 56c, installation is adsorbed onto adsorbent equipment 56d on the sucker with attraction substrate W such as air and with this substrate W, action by traction cylinder 56c, adsorbent equipment 56d enters in the substrate recipient 52 from peristome 52a, attract and absorption substrate W, utilize the peristome 52a of traction cylinder 56c, substrate W is drawn and it is taken out of from substrate recipient 52.
And, in the above-described embodiment, substrate dropping device 58 shown in Figure 1 moves forward and backward in the horizontal direction, contact substrate W, substrate W is shaken, but also can shake (cylinder shock), the sidewall 52e or the conveyance of substrate recipient 52 applied impact with suspension bracket 15, substrate W is shaken by cylinder.
And in the above-described embodiment, substrate dropping device 58 only is arranged on the right side of the drawing of clamp position (P) as shown in Figure 1, but also can only be arranged on the drawing left side, can also be arranged on this two side of figure right side of face and left side.
For example, with respect to clamp shown in Figure 10 48, substrate W is bonded on movable member 48b or the fixed part 48a, therefore under situation about adhering on the movable member 48b, substrate W after release pasting from the figure right side of face, but to adhering to the substrate W on the fixed part 48a, it is effective releasing from the drawing left side.
And in the above-described embodiment, the substrate relieving attachment is made of three devices such as clamp opening device 50, suspension bracket supporting arrangement 51 and substrate dropping devices 58, but as long as has clamp opening device 50 at least.
And, in the above-described embodiment, have following structure, that is,, make carrying roller 56 supporting substrates W automatically, but also can constitute like this by making 52 rotations of substrate recipient, that is, after 52 rotations of substrate recipient, carrying device is risen, thus supporting substrates W.
And, in the above-described embodiment, shown in Fig. 3 C, inner surface setting at the sidewall 52f of substrate recipient 52 prevents to paste guide 52d, when substrate W when conveyance falls with suspension bracket 15, prevent this substrate W attached on the substrate recipient 52, but Figure 19 and the air jet system that is made of the 1st air nozzle 62 and the 2nd air nozzle 64 as shown in Figure 20 also can be set, replace being provided with and prevent to paste guide 52d.
Figure 19 and Figure 20 are the figure that represents also to be provided with in Fig. 4 and Fig. 5 respectively as the state of the 1st air nozzle 62 of air jet system and the 2nd air nozzle 64, wherein, the structure of unloader 5b when Fig. 4 represents to utilize substrate supporting device 60, Fig. 5 represents the structure of substrate recipient 52.Figure 21 be expression substrate recipient 52 shown in Figure 19 ' the detail drawing of Z part.
The substrate recipient 52 of present embodiment ' in, as shown in figure 20, not only at sidewall 52e
(becoming the sidewall of downside after the rotation) is provided with otch 52b, and also is provided with otch 52c on sidewall 52f (at the sidewall that becomes upside after the rotation).
In addition, as shown in figure 19, substrate recipient 52 ' figure in right side (base frame 72 sides), in four positions (with reference to Figure 20) the 1st air nozzle 62 is set, the outlet 62a of the 1st air nozzle 62 towards the direction that more makes progress than level (promptly, direction with respect to the substrate W inclination that descends), substrate recipient 52 ' figure in left side (base frame 74 sides), in four positions (with reference to Figure 20) the 2nd air nozzle 64 is set, the outlet 64a of the 2nd air nozzle 64 is towards horizontal direction (that is, with the vertical direction of substrate W that descends).
In addition, as shown in figure 20, the 1st air nozzle 62 is installed in fixed axis 66 (even substrate recipient 52 rotations, this axle does not rotate yet) on, this fixed axis 66 is provided with along the axle 54c that is fastened on the base frame 72 (with reference to Figure 19), the 2nd air nozzle 64 is installed on the ejection position adjustments lift 64b, and this ejection position adjustments lift 64b makes the 2nd air nozzle 64 move to predetermined height and position by the driving of motor or electric drive etc.Herein, for more effectively prevent substrate W attached to substrate recipient 52 ' on, as shown in figure 21, (I) height of adjusting the 1st air nozzle 62 and the 2nd air nozzle 64, and the ejection angle of nozzle, so that when conveyance descends with suspension bracket 15, at least spray air towards lower end Y by last position X than substrate, perhaps as shown in figure 20, (II) preferably the 1st air nozzle 62 and the 2nd air nozzle 64 are configured to, at the surface and the back side of substrate W, aim at same position X from the air of opposed locations.
Below, utilize Figure 19 and Figure 20, the action of the 1st air nozzle 62 and the 2nd air nozzle 64 is described.And, the air of the 1st air nozzle 62 and the 2nd air nozzle 64 is supplied with, utilize purifying air of in factory, flowing, to carry out with compressor, this control is programmed to the action of electromagnetically operated valve, is undertaken by control part.
As shown in figure 19, use suspension bracket 15 when vertical direction (the D direction of Figure 19) descends when conveyance, before clamp opening device 50 was opened clamp 48, perhaps when opening clamp 48, the 1st air nozzle 62 and the 2nd air nozzle 64 began to spray air.In addition, substrate W falls when clamp opening device 50 is removed the substrate clamp position of conveyance with suspension bracket 15, not under such situation perhaps, releasing parts 58a by the substrate of substrate dropping device 58 and move forward and backward in the horizontal direction and contact that this substrate W falls thus with this substrate W.At this moment, air from substrate recipient 52 ' the outside by otch 52b, 52c, balancedly be sprayed on the surface and the back side of substrate W from the two sides, therefore, substrate W just from substrate recipient 52 ' inwall leave under the state of (floating) and fall swimmingly.When transducer (not shown) perceives substrate W when having arrived the substrate stop component 60a of substrate supporting device 60, the air ejection of being undertaken by the 1st air nozzle 62 and the 2nd air nozzle 64 stops.Then, under the state of accommodating substrate W, substrate recipient 52 ' to the rotation of the E of Figure 19 direction, substrate W is just taken out of from peristome 52a along continuous straight runs (the F direction of Figure 19).And above-mentioned a series of operation is undertaken by above-mentioned control part (not shown) control.
Thereby, substrate can be housed in the substrate recipient reliably, can remove because of substrate W in the way that falls, be bonded at substrate recipient 52 ' sidewall on the problem that produced.For example, can avoid following situation, that is, the top of substrate W from substrate recipient 52 ' upper opening expose, when substrate recipient 52 ' rotation, substrate W contact substrate dropping device 58 produces bending or damage.
And, in the above-described embodiment, with the 1st air nozzle 62 be installed in substrate recipient 52 ' fixed axis 66 on, but installation site and installation method are not limited in this, for example, the 1st air nozzle 62 can be directly installed on the base frame 72, perhaps as shown in figure 23, the tubing 82 that offers air outlet 80 can be combined with sheet material 84a, 84b, 84c, with substrate recipient 52 ' integrally formed.
And, in the above-described embodiment, the 2nd air nozzle 64 is installed on the ejection position adjustments lift 64b, but installation site and installation method are not limited in this, for example, as shown in figure 24, also the 2nd air nozzle 64 can be provided on the lid 86 of covered substrate supporting arrangement 60.
In addition, as shown in figure 25, also the 1st air nozzle 62 and the 2nd air nozzle 64 all can be installed on the substrate stop component 60a (Fig. 4).For example, also can form following structure as shown in figure 25, that is, the 1st air nozzle 62 and the 2nd air nozzle 64 mode with the outside that is positioned at substrate recipient 52 (52f ', 52e ') is installed on the substrate stop component 60a.In movable range θ 1, the θ 2 of air nozzle 62,64, can regulate the aligned position of air.
And, in the above-described embodiment, make the number of the 1st air nozzle 62 and the number of the 2nd air nozzle 64 be respectively four, but the nozzle number does not limit especially.
And, in the above-described embodiment, make emission direction be direction upwards compared with level from the air of the 1st air nozzle 62, making the emission direction from the air of the 2nd air nozzle 64 is horizontal direction, but emission direction is not limited in this, for example, can make emission direction compared with horizontal direction and downwards, perhaps can make the emission direction from the air of the 1st air nozzle 62 and the 2nd air nozzle 64 all is horizontal direction, can all be direction upwards compared with horizontal direction also.
In addition, the ejection angle of air or the alignment methods of opposed air can at random be set according to the key elements such as discharge rate of the size of substrate W or thickness, weight, air.
And, in the above-described embodiment, release parts 58a by substrate shown in Figure 1 and constitute substrate dropping device 58 with release cylinder 58b, but also can utilize employed such air nozzle in the 1st air nozzle 62 shown in Figure 19, Figure 20 or the 2nd air nozzle 64, realize substrate dropping device 58, by means of the pressure of air, substrate W is come off from clamp 48.For example, also can replace substrate shown in Figure 13 to release parts 58a and release cylinder 58b, as shown in figure 26, air nozzle 58d is installed on the support unit 58c, realize substrate dropping device 58 thus.
In the case, the air nozzle that is used as substrate dropping device 58 can only be arranged on the right side of the drawing of clamp position shown in Figure 1 (P), perhaps only is arranged on the left side of drawing, also can be arranged on right side and this two side of left side of drawing.In addition, also air nozzle can be released parts 58a and released cylinder 58b with substrate, use as substrate dropping device 58.
And, as shown in Figure 2, only under the situation of the substrate recipient 52 that has otch 52b on the sidewall 52e, also can be as shown in figure 27, on another sidewall 52f, offer the air vent hole 88 that is used to make the air from the 2nd air nozzle 64 to pass through.
And, in the above-described embodiment, as shown in figure 20, the 1st air nozzle 62 is installed in fixed axis 66 (even substrate recipient 52 ' rotation, this axle does not rotate yet) on, this fixed axis 66 is provided with along an axle 54c who is fastened on the base frame 70 (with reference to Figure 19), but also can be installed in rotating shaft 66 as shown in Figure 28, that when substrate recipient 52 ' rotation, rotate together ' on.
In addition, substrate recipient 52 (Fig. 1 etc.) in the above-mentioned execution mode utilizes a body component of L type to constitute turning arm 54b, but in Figure 28, also can by separately be fixed on rotating shaft 66 ' on parts 54b ' and 54b " constitute turning arm, with the 1st air nozzle 62 be installed in rotating shaft 66 ' on.And, in Figure 28, rotating shaft 66 ' be can be with respect to the structure of base frame 72 rotations.
And for substrate dropping device 58, prevent to paste guide 52d, air jet system (62,64), be used to detect the transducer that substrate falls, use can combine them respectively.Below, to substrate dropping device 58, prevent to paste guide 52d, air jet system (62,64), be used to detect the effect that situation produced that transducer that substrate falls combines respectively, describe.
With substrate dropping device 58 with prevent to paste under the situation that guide 52d combines, compare with the situation of having only substrate dropping device 58, can prevent more reliably that substrate W is bonded on the substrate recipient 52.Under the situation that substrate dropping device 58 and air jet system (62,64) are combined, compare with the situation of having only substrate dropping device 58, substrate W is accommodated in the substrate recipient 52 more reliably.Under with substrate dropping device 58 and sensor groups situation altogether, compare with the situation of having only substrate dropping device 58, can differentiate substrate W reliably and correctly drop in the substrate recipient 52.
When with substrate dropping device 58 with prevent to paste guide 52d and air jet system (62,64) when combining, compare with the situation of having only air jet system (62,64), can prevent more reliably that substrate W is bonded on the substrate recipient 52, simultaneously, can differentiate substrate W more reliably correctly drops in the substrate recipient 52.
When preventing to paste guide 52d and air jet system (62,64) when combining, compare with the situation of having only air jet system (62,64), can prevent more reliably that substrate W is bonded on the substrate recipient 52.Paste under guide 52d and the sensor groups situation altogether will preventing, can prevent that not only substrate W from pasting, and can differentiate substrate W reliably and correctly drop in the substrate recipient 52.When air jet system (62,64) and sensor groups altogether the time, can be made substrate W drop to reliably in the substrate recipient 52, and can differentiate this reliably.
With substrate dropping device 58, prevent to paste under the situation that guide 52d, air jet system (62,64) and transducer all combine, can differentiate substrate W reliably and drop in the substrate recipient 52, substrate W very reliably and safely can be housed in the substrate recipient 52.
Claims (9)
1. board unloading device, this board unloading device is used for having the conveyance of substrate to unload infrabasal plate with suspension bracket from clamping, it is characterized in that this board unloading device has:
The substrate relieving attachment, it removes conveyance with the clamping of suspension bracket to substrate;
The substrate accommodation apparatus, it has the substrate recipient, when from the peristome of described substrate recipient after vertical direction receives and accommodates the substrate that unloads with suspension bracket from conveyance by described substrate relieving attachment, rotate this substrate recipient, substrate is taken out of from described peristome.
2. board unloading device as claimed in claim 1 is characterized in that,
Described substrate accommodation apparatus will be housed in the substrate in the postrotational substrate recipient, take out of from described peristome by base board delivery device.
3. board unloading device as claimed in claim 2 is characterized in that,
Described substrate recipient forms on the sidewall that rotates the back downside has otch, and described base board delivery device supports the substrate that is housed in the postrotational substrate recipient by this otch, and from described peristome this substrate is taken out of.
4. as each described board unloading device in the claim 1～3, it is characterized in that,
Described substrate accommodation apparatus has substrate supporting device, and this substrate supporting device is regulated the distance of fall of the substrate that unloads with suspension bracket from described conveyance.
5. as each described board unloading device in the claim 1～3, it is characterized in that,
Described substrate relieving attachment has the substrate dropping device.
6. as each described board unloading device in the claim 1～3, it is characterized in that,
Described substrate recipient forms on the two side that rotates back downside and upside has otch,
Remove conveyance with suspension bracket during to the clamping of substrate when described substrate relieving attachment, air jet system is by described otch, from the both sides ejection air of substrate.
7. board unloading device as claimed in claim 6 is characterized in that,
Described air jet system more sprays air by last position towards the lower end than substrate at least.
8. as each described board unloading device in the claim 1～3, it is characterized in that,
On the inner surface of described substrate recipient, be provided with and prevent to paste guide.
9. board unloading method, this board unloading method is used for having the conveyance of substrate to unload infrabasal plate with suspension bracket from clamping, it is characterized in that,
Remove conveyance with the clamping of suspension bracket, unload infrabasal plate substrate,
When from the peristome of substrate recipient after vertical direction receives and accommodates the substrate that unloads with suspension bracket from conveyance, rotate described substrate recipient, take out of substrate from described peristome.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005300255 | 2005-10-14 | ||
| JP2005300255 | 2005-10-14 | ||
| JP2006254759 | 2006-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1959950A true CN1959950A (en) | 2007-05-09 |
| CN100583409C CN100583409C (en) | 2010-01-20 |
Family
ID=38071553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200610136338A Active CN100583409C (en) | 2005-10-14 | 2006-10-16 | Board unloading device and board unloading method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100583409C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108221019A (en) * | 2016-12-22 | 2018-06-29 | 株式会社荏原制作所 | Substrate handler and its control device, plater, storage medium |
| CN108866504A (en) * | 2018-07-31 | 2018-11-23 | 湖南玉丰真空科学技术有限公司 | A kind of vacuum coating equipment substrate frame conveyer system |
-
2006
- 2006-10-16 CN CN200610136338A patent/CN100583409C/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108221019A (en) * | 2016-12-22 | 2018-06-29 | 株式会社荏原制作所 | Substrate handler and its control device, plater, storage medium |
| CN108221019B (en) * | 2016-12-22 | 2021-04-06 | 株式会社荏原制作所 | Substrate mounting/dismounting device, control device thereof, plating device, and storage medium |
| CN108866504A (en) * | 2018-07-31 | 2018-11-23 | 湖南玉丰真空科学技术有限公司 | A kind of vacuum coating equipment substrate frame conveyer system |
| CN108866504B (en) * | 2018-07-31 | 2024-01-30 | 湖南玉丰真空科学技术有限公司 | Substrate frame conveying system of vacuum coating machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100583409C (en) | 2010-01-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101061259A (en) | Device and method for electrolytically treating work pieces | |
| CN1202979C (en) | Method for making conveying tray cycle by using module IC to operate lifting unit and device therefor | |
| CN1828828A (en) | Substrate processing device, method and program | |
| CN1191605C (en) | Mehtod and apparatus for holding and positioing semiconductor workpieces during electropolishing and/or electroplating of the workpieces | |
| CN1780542A (en) | Panel assembling apparatus and panel assembling method | |
| CN1154407C (en) | Method and appts. for collectively changing components at component supply section and truck and transfer rack thereof | |
| CN1736831A (en) | Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility | |
| CN101079388A (en) | Substrate transfer apparatus, substrate process system, and substrate transfer method | |
| CN1506257A (en) | Overhead travelling crane system | |
| CN1286152C (en) | Liquid processing apparatus and method thereof | |
| CN1894780A (en) | Method of removing deposit from substrate and method of drying substrate, and device for removing deposit from substrate and device of drying substrate using these methods | |
| CN101035725A (en) | Board conveying device | |
| CN1737649A (en) | Optical sheet adhesive method and device | |
| CN1591816A (en) | Substrate treater and treating method | |
| CN1911762A (en) | Article transport device | |
| CN1918321A (en) | Thin film forming apparatus | |
| CN1435732A (en) | Chemical processing device | |
| CN1712333A (en) | Substrate turning over apparatus and method, substrate transporting device and method, substrate processing apparatus and method | |
| CN1763914A (en) | Protective tape separation method, and apparatus using the same | |
| JP4714118B2 (en) | Substrate unloading apparatus and substrate unloading method | |
| JP2009185307A (en) | Surface treatment apparatus | |
| CN1808704A (en) | Substrate disposing device and method | |
| CN101054714A (en) | Surface treatment device, transport hanger and transport method for transport hanger | |
| CN101052880A (en) | Device for treating microorganism sample | |
| CN1531048A (en) | Producing object connecting device and carrying system therewith |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |