CN1957473A - Image pick-up component - Google Patents
Image pick-up component Download PDFInfo
- Publication number
- CN1957473A CN1957473A CNA2005800164335A CN200580016433A CN1957473A CN 1957473 A CN1957473 A CN 1957473A CN A2005800164335 A CNA2005800164335 A CN A2005800164335A CN 200580016433 A CN200580016433 A CN 200580016433A CN 1957473 A CN1957473 A CN 1957473A
- Authority
- CN
- China
- Prior art keywords
- filter
- imaging apparatus
- photo detector
- component
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003384 imaging method Methods 0.000 claims description 214
- 230000003595 spectral effect Effects 0.000 claims description 139
- 239000011347 resin Substances 0.000 claims description 99
- 229920005989 resin Polymers 0.000 claims description 99
- 230000003287 optical effect Effects 0.000 claims description 32
- 239000003086 colorant Substances 0.000 claims description 30
- 230000015572 biosynthetic process Effects 0.000 claims description 20
- 230000005764 inhibitory process Effects 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 19
- 238000004040 coloring Methods 0.000 claims description 12
- 238000000926 separation method Methods 0.000 claims description 11
- 238000002156 mixing Methods 0.000 claims description 7
- 230000000630 rising effect Effects 0.000 claims description 6
- UQMRAFJOBWOFNS-UHFFFAOYSA-N butyl 2-(2,4-dichlorophenoxy)acetate Chemical compound CCCCOC(=O)COC1=CC=C(Cl)C=C1Cl UQMRAFJOBWOFNS-UHFFFAOYSA-N 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 abstract description 6
- 238000000605 extraction Methods 0.000 abstract 1
- 230000000452 restraining effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 64
- 150000001875 compounds Chemical class 0.000 description 32
- 239000000049 pigment Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 19
- 230000002745 absorbent Effects 0.000 description 18
- 239000002250 absorbent Substances 0.000 description 18
- 230000035945 sensitivity Effects 0.000 description 18
- 230000006870 function Effects 0.000 description 17
- 230000008569 process Effects 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 13
- 238000001228 spectrum Methods 0.000 description 13
- 238000002834 transmittance Methods 0.000 description 13
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 12
- 238000009877 rendering Methods 0.000 description 10
- 238000009499 grossing Methods 0.000 description 7
- 239000012860 organic pigment Substances 0.000 description 7
- 241001062009 Indigofera Species 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000004313 glare Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000000295 complement effect Effects 0.000 description 5
- 230000000007 visual effect Effects 0.000 description 5
- 244000025254 Cannabis sativa Species 0.000 description 4
- 239000011358 absorbing material Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 239000000975 dye Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 4
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 4
- QGKMIGUHVLGJBR-UHFFFAOYSA-M (4z)-1-(3-methylbutyl)-4-[[1-(3-methylbutyl)quinolin-1-ium-4-yl]methylidene]quinoline;iodide Chemical compound [I-].C12=CC=CC=C2N(CCC(C)C)C=CC1=CC1=CC=[N+](CCC(C)C)C2=CC=CC=C12 QGKMIGUHVLGJBR-UHFFFAOYSA-M 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 3
- PQMOXTJVIYEOQL-UHFFFAOYSA-N Cumarin Natural products CC(C)=CCC1=C(O)C(C(=O)C(C)CC)=C(O)C2=C1OC(=O)C=C2CCC PQMOXTJVIYEOQL-UHFFFAOYSA-N 0.000 description 3
- FSOGIJPGPZWNGO-UHFFFAOYSA-N Meomammein Natural products CCC(C)C(=O)C1=C(O)C(CC=C(C)C)=C(O)C2=C1OC(=O)C=C2CCC FSOGIJPGPZWNGO-UHFFFAOYSA-N 0.000 description 3
- GLLRIXZGBQOFLM-UHFFFAOYSA-N Xanthorin Natural products C1=C(C)C=C2C(=O)C3=C(O)C(OC)=CC(O)=C3C(=O)C2=C1O GLLRIXZGBQOFLM-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 3
- 239000012965 benzophenone Substances 0.000 description 3
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 3
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N coumarin Chemical compound C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000005011 phenolic resin Substances 0.000 description 3
- 229920001568 phenolic resin Polymers 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 2
- 150000004056 anthraquinones Chemical class 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000004438 eyesight Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000004611 light stabiliser Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- -1 polymethylene Polymers 0.000 description 2
- 239000001062 red colorant Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229960004889 salicylic acid Drugs 0.000 description 2
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- CNXZMGRWEYQCOQ-UHFFFAOYSA-N 2-methoxy-3-phenylprop-2-enoic acid Chemical compound COC(C(O)=O)=CC1=CC=CC=C1 CNXZMGRWEYQCOQ-UHFFFAOYSA-N 0.000 description 1
- GJCOSYZMQJWQCA-UHFFFAOYSA-N 9H-xanthene Chemical compound C1=CC=C2CC3=CC=CC=C3OC2=C1 GJCOSYZMQJWQCA-UHFFFAOYSA-N 0.000 description 1
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000038 blue colorant Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- ONTQJDKFANPPKK-UHFFFAOYSA-L chembl3185981 Chemical compound [Na+].[Na+].CC1=CC(C)=C(S([O-])(=O)=O)C=C1N=NC1=CC(S([O-])(=O)=O)=C(C=CC=C2)C2=C1O ONTQJDKFANPPKK-UHFFFAOYSA-L 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000040 green colorant Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- QDLAGTHXVHQKRE-UHFFFAOYSA-N lichenxanthone Natural products COC1=CC(O)=C2C(=O)C3=C(C)C=C(OC)C=C3OC2=C1 QDLAGTHXVHQKRE-UHFFFAOYSA-N 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000001054 red pigment Substances 0.000 description 1
- 229960001860 salicylate Drugs 0.000 description 1
- YGSDEFSMJLZEOE-UHFFFAOYSA-M salicylate Chemical compound OC1=CC=CC=C1C([O-])=O YGSDEFSMJLZEOE-UHFFFAOYSA-M 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0018—Reflow, i.e. characterized by the step of melting microstructures to form curved surfaces, e.g. manufacturing of moulds and surfaces for transfer etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/10—Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming different wavelengths into image signals
- H04N25/11—Arrangement of colour filter arrays [CFA]; Filter mosaics
- H04N25/13—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements
- H04N25/134—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements based on three different wavelength filter elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Signal Processing (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Multimedia (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Color Television Image Signal Generators (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Blocking Light For Cameras (AREA)
Abstract
In an embodiment example of the present invention, an image sensor comprises a filter used for an extraction of a specific color component of an incident light, a light receiving element which observes the incident light via the filter, a compensating filter having a transmission restraining characteristic in a visible light wavelength range and a transmission characteristic in a wavelength range on a longer wavelength out of the visible light wavelength range, and a compensating light receiving element which observes the incident light via the compensating filter for compensating an observation result by the light receiving element.
Description
Technical field
The present invention relates to a kind of imaging apparatus that possesses photo detector.
Background technology
Photo detector is transformed to the signal of telecommunication with light.For example, photo detector such as CMOS or CCD in people's visual sensitivity section, be also to have high sensitivity in visual optical wavelength range (for example wave band of the 400nm-700nm) zone in addition, especially the long wave band of wavelength ratio visible light wave band (below be called ' infrared portion '.The wave band of 700nm-1200nm for example) also has high sensitivity under.
At the light incident side of photo detector, configuration is used for extracting from incident light organic filter of special color component.Photo detector receives incident light via organic filter.Separate because organic filter is carried out look to incident light, observe by photo detector so constitute the colouring component of object of observation.
But,, separate so be difficult in infrared portion, carry out look because organic filter does not have the infrared ray cut function.
In order to prevent that the light in the infrared portion is observed, at the light incident side of photo detector, configuration is share in the optical system of camera by reflection-type infrared cut off filter and infrared ray absorbing type infrared cut off filter that inorganic multilayer film constitutes sometimes.
Figure 35 is in expression reflection-type infrared cut off filter and the absorption-type infrared cut off filter, the curve that concerns an example of wavelength and transmitance.
The reflection-type infrared cut off filter constitutes by form inorganic multilayer film on glass plate.
The absorption-type infrared cut off filter utilizes dyestuff or copper ion to absorb infrared ray.In addition, the type of using the glass that comprises metal ion, a plurality of kinds such as type of using the organic dyestuff class are arranged in the infrared ray absorbing type infrared cut off filter.
The reflection-type infrared cut off filter that is made of inorganic multilayer film has high infrared ray cut function to the incident light perpendicular to filter face direction, but then is difficult to realize fully by function for angled infrared rays such as oblique incidences.
Therefore, for remedy reflection-type infrared cut off filter that inorganic multilayer film constitutes by function, the influence of ultrared oblique incidence or incident is again reduced, the reflection-type infrared cut off filter of infrared ray absorbing type infrared cut off filter and inorganic multilayer film formation is share.
If compare reflection-type infrared cut off filter and absorption-type infrared cut off filter, then the price of absorption-type infrared cut off filter is lower than reflection-type infrared cut off filter.In addition, as mentioned above, the absorption-type infrared cut off filter is to the infrared ray cut performance of angled incident light, good than reflection-type infrared cut off filter.
Therefore, compare, be more prone to utilize the absorption-type infrared cut off filter usually with the reflection-type infrared cut off filter.
As existing imaging apparatus, the solid-state imager that possesses colorimetric purity correction filter is arranged, it has by optionally revising the function of colorimetric purity and end ultrared function (TOHKEMY 2000-19322 communique for example: the following patent documentation 1 that is called) by the specific band light of the boundary of the border of red light and green light and/or green light and blue light.
In addition, as existing imaging apparatus, following camera imaging apparatus is arranged, promptly cooperate the infrared absorbent that the transmitance of infrared light section is reduced significantly, make the light transmission of visible light section, give the IR-cut ability, imaging apparatus main body former configuration spectral filter (for example Japanese kokai publication sho 63-73204 communique: below be called patent documentation 2).
But under the situation of using the absorption-type infrared cut off filter, the thickness of absorption-type infrared cut off filter is about 1-3mm, so camera miniaturization sometimes etc. are very difficult.
In addition, as camera component, in lens combination, under the situation of assembling infrared cut off filter, be difficult to cutting down cost sometimes.
The imaging apparatus of above-mentioned patent documentation 1 and patent documentation 2 possesses the infrared cut off filter that covers imaging apparatus main body front integral body.Therefore, sometimes to whole photo detectors of being equipped with in the imaging apparatus by infrared ray, between visual sensitivity, produce difference based on the observation of photo detector and people.
For example, in patent documentation 2, as Fig. 2 of the document 2 and shown in Figure 10, infrared cut off filter also can absorb the light of people's visible light wave band 550nm-700nm.Like this, if the whole photo detectors that are equipped with in the imaging apparatus are ended infrared ray, then green sometimes sensitivity, especially red sensitivity descend.
Summary of the invention
The imaging apparatus of the present invention's the 1st example possesses: filter is used for extracting the specific colouring component of incident light; Photo detector is observed described incident light via described filter; Revise filter, suppress to see through characteristic, in the long side wave section of the described visible light wave band of wavelength ratio, have having under the visible light wave band through characteristic; With the correction photo detector,, observe described incident light via described correction filter in order to revise the observed result that described photo detector obtains.
Thus, can from the observed result that photo detector obtains, remove and revise the observed result that photo detector obtains, can obtain the only observed result of visible light wave band accurately.
In the 2nd example of the present invention, described filter possesses the green filter that is used to extract green component; Be used to extract the blue filter of blue component; With the red filter that is used to extract red component, described photo detector possesses the green photo detector of observing described incident light via described green filter; Observe the blue photo detector of described incident light via described blue filter; With the red photo detector of observing described incident light via described red filter.
In the 3rd example of the present invention, described correction filter for the 1st component of the light filter that will be used for extracting green component and the 2nd component of the light filter that is used to extract blue component one of at least, overlap with the 3rd component of the light filter that is used to extract red component and to constitute.
Like this, by stacked a plurality of component of the light filter, can under the visible light wave band, suppress transmitance, be implemented in the high correction filter that sees through under the infrared portion, can use the observed result of observing the correction photo detector of incident light obtain via this correction filter, revise the observed result that photo detector obtains.
In the 4th example of the present invention, overlap described the 1st component of the light filter and described the 3rd component of the light filter constitutes described correction filter.
In the 5th example of the present invention, overlap described the 2nd component of the light filter and described the 3rd component of the light filter constitutes described correction filter.
In the 4th and the 5th example, the formation of concrete specific correction filter.
In the 6th example of the present invention, adjust the transmitance of described filter and the transmitance of described correction filter, making the transmitance of the long side of wavelength ratio visible light wave band is par.
In the 7th example of the present invention, described green filter and described the 1st component of the light filter have inhibition and see through characteristic under the subband of the long side of the described visible light wave band of wavelength ratio.
In the 8th example of the present invention, described green filter and described the 1st component of the light filter have the characteristic that suppresses the transmitance rising part in the long side wave section of the described visible light wave band of wavelength ratio.
In the 9th example of the present invention, described green filter and described the 1st component of the light filter have the characteristic of the transmitance in the wave band that suppresses to comprise wavelength 780nm.
Thus, can prevent to descend based on the accuracy of observation of the green component of transmitance riser portions in the infrared portion.
In the 10th example of the present invention, described green filter, described blue filter, described red filter, described correction filter configuration ramify shape, formation face, and form the unit that look separates.
Thus, can suitably dispose filter and revise filter.
In the 11st example of the present invention, the area ratio of described green filter, described blue filter, described red filter, described correction filter is 4: 2: 2: 1.
Thus, can be by only changing existing image processing software slightly, to the suitable existing image processing software after changing of this imaging apparatus.
In the 12nd example of the present invention, described look separation unit comprises the different multiple described correction filter of spectral characteristic.
Thus, can utilize the result who observes via the different a plurality of correction filters of characteristic, revise the observed result that photo detector obtains, can carry out the observation of incident light accurately.
In the 13rd example of the present invention, also possess suppressing portion, this suppressing portion is disposed at the light incident side of described photo detector and described correction photo detector, the subband of the long side of the described visible light wave band of wavelength ratio is had suppress to see through characteristic.
In the 14th example of the present invention, described suppressing portion has the characteristic that suppresses the transmitance riser portions in the long side wave section of the described visible light wave band of wavelength ratio.
In the 15th example of the present invention, described suppressing portion has the characteristic of the transmitance in the wave band that suppresses to comprise wavelength 780nm.
Thus, can prevent from infrared portion, to detect green component, prevent that the accuracy of observation of green component from descending, the accuracy of observation of incident light is improved.
In the 16th example of the present invention, described suppressing portion is the lens that are provided in the plane of incidence of described incident light.
Thus, can make the thickness of lower layer part of imaging apparatus thinner, improve color rendering, the imaging apparatus of the observation that obtains to become clear than lens.
In the 17th example of the present invention, the observed result that observed result that described imaging apparatus obtains according to described photo detector and described correction photo detector obtain poor obtained the observed result of described specific colouring component.
Thus, can only observe the component under the visible light wave band in the incident light accurately.
The imaging apparatus of the present invention's the 18th example possesses filter, by optical superposition be used for extracting the 1st component of the light filter of incident light medium green component and be used to extract blue component the 2nd component of the light filter one of at least, constitute with the 3rd component of the light filter that is used to extract red component; And photo detector, observe described incident light via described filter.
This imaging apparatus for example can be used for infrared ray sensor.
In the 19th example of the present invention, also possesses operational part, from the observed data value that observes by described green photo detector, deduct the observed data value that observes by described correction photo detector, obtain revised green observed data value, from the observed data value that observes by described blue photo detector, deduct the observed data value that observes by described correction photo detector, obtain revised blue observed data value, from the observed data value that observes by described red photo detector, deduct the observed data value that observes by described correction photo detector, obtain revised red observed data value.
In the 20th example of the present invention, described correction filter forms by the optical superposition of a plurality of looks.
In the 21st example of the present invention, described correction filter forms by mixing a plurality of colorants.
In the 22nd example of the present invention, described correction filter forms by the filter of stacked a plurality of looks.
In the 23rd example of the present invention, described imaging apparatus also possesses operational part, from the observed data value that observes by described red photo detector, deduct the observed data value that observes by described correction photo detector, and obtain the data value of the visible light band strength of the described incident light of expression.
In the 24th example of the present invention, described filter possesses the yellow filter that is used to extract yellow component; Be used to extract the pinkish red filter of pinkish red component; With the blue or green filter that is used to extract blue or green component, described photo detector possesses the yellow photo detector of observing described incident light via described yellow filter; Observe the pinkish red photo detector of described incident light via described pinkish red filter; With the blue or green photo detector of observing described incident light via described blue or green filter.
In the 25th example of the present invention, described correction filter forms by blue or green component of optical superposition and red component.
In the 26th example of the present invention, described correction filter forms by purple component of optical superposition and red component.
In the 27th example of the present invention, described yellow filter, described pinkish red filter, described blue or green filter, described correction filter configuration ramify shape, formation face, and form the unit that look separates.
In the 28th example of the present invention, described imaging apparatus also possesses lens, and this lens configuration is in the light incident side of described filter and described correction filter, suppress and the visible light wave band between the infrared portion of border side in transmitance.
In the 29th example of the present invention, described imaging apparatus also possesses resin bed, this resin bed one of is disposed in the light incident side of described filter and described correction filter and the light emitting side at least, suppress and the visible light wave band between the infrared portion of border side in transmitance.
In the 30th example of the present invention, in described yellow filter and described pinkish red filter, the colorant of the transmitance in the infrared portion of the border side between adding inhibition and the visible light wave band.
In the 31st example of the present invention, described imaging apparatus also possesses photomask, is used for the reflection of light that suppresses described incident light, is not directly incident on described photo detector.
In the 32nd example of the present invention, described imaging apparatus also possesses the substrate of the described photo detector of configuration, described photomask be provided to as the incident side of the described incident light of described substrate, except that described incident light is incided in other zone the zone of described photo detector.
In the 33rd example of the present invention, described photomask has inhibition and sees through characteristic under the visible light wave band.
Description of drawings
Fig. 1 is the front elevation of 3 coloured light spectrum filter devices and configuration status one example of revising filter in the imaging apparatus of expression the present invention the 1st execution mode.
Fig. 2 is the figure of imaging apparatus cross section the 1st example of expression the 1st execution mode.
Fig. 3 is the figure of imaging apparatus cross section the 2nd example of expression the 1st execution mode.
Fig. 4 is the transmitance of spectral filter of all kinds of expression the 1st execution mode and the curve that concerns an example of wavelength.
Fig. 5 is the transmitance of correction filter of expression the 1st execution mode and the curve that concerns an example of wavelength.
Fig. 6 is the transmitance of resin bed of expression the 1st execution mode and the curve that concerns an example of wavelength.
Fig. 7 is in expression the 1st execution mode, at spectral filter and revises transmitance when having made up resin bed in the filter and the curve that concerns an example of wavelength.
Fig. 8 is the front elevation of spectral filter of all kinds and configuration status one example of revising filter in the imaging apparatus of expression the present invention the 3rd execution mode.
Fig. 9 is the figure of imaging apparatus cross section one example of expression the 3rd execution mode.
Figure 10 is the transmitance of correction filter of expression the 3rd execution mode and the curve that concerns an example of wavelength.
Figure 11 is in expression the 3rd execution mode, at spectral filter and revises transmitance when having made up resin bed in the filter and the curve that concerns an example of wavelength.
Figure 12 is that elemental area in the imaging apparatus of expression the present invention the 4th execution mode is than the front elevation of an example.
Figure 13 is the figure of imaging apparatus cross section one example of expression the present invention the 5th execution mode.
Figure 14 is the figure of imaging apparatus cross section one example of expression the present invention the 6th execution mode.
Figure 15 is the front elevation of configuration status one example of filter in the imaging apparatus of expression the present invention the 7th execution mode.
Figure 16 is the sectional view of imaging apparatus one example of expression the 7th execution mode.
Figure 17 is the sectional view of imaging apparatus one example of the expression correction filter that possesses one deck structure.
Figure 18 is the curve of spectral transmittance one example of the yellow filter of expression, pinkish red filter, blue or green filter.
Figure 19 is the curve of spectral transmittance one example of the correction filter of expression the 7th execution mode.
Figure 20 is the curve of spectral transmittance one example of the imaging apparatus of expression the 7th execution mode.
Figure 21 is the curve of spectral transmittance one example of the infrared absorbent that uses in the imaging apparatus of expression the 7th execution mode.
Figure 22 is the curve that expression makes spectral characteristic one example after the spectral transmittance of the spectral transmittance of imaging apparatus of the 7th execution mode and infrared absorbent multiplies each other.
Figure 23 is the figure of correction filter cross section the 1st example of expression the present invention the 8th execution mode.
Figure 24 is the curve of spectral characteristic one example of the purple filter of expression.
Figure 25 is the curve that expression utilizes the spectral characteristic of the purple and red formed correction filter of optical superposition.
Figure 26 is the figure of imaging apparatus cross section one example of expression the present invention the 9th execution mode.
Figure 27 is the sectional view of imaging apparatus one example of expression the present invention the 10th execution mode.
Figure 28 is the sectional view of the 1st operation example of manufacture process of the imaging apparatus of expression the 10th execution mode.
Figure 29 is the sectional view of the 2nd operation example of manufacture process of the imaging apparatus of expression the 10th execution mode.
Figure 30 is the sectional view of the 3rd operation example of manufacture process of the imaging apparatus of expression the 10th execution mode.
Figure 31 is the sectional view of the 4th operation example of manufacture process of the imaging apparatus of expression the 10th execution mode.
Figure 32 is the sectional view of the 5th operation example of manufacture process of the imaging apparatus of expression the 10th execution mode.
Figure 33 is the front elevation of configuration status the 1st example of the photomask that possesses in the imaging apparatus of expression the present invention the 11st execution mode.
Figure 34 is the sectional view of configuration status the 2nd example of the photomask that possesses in the imaging apparatus of expression the 11st execution mode.
Figure 35 is expression reflection-type infrared cut off filter and the wavelength of absorption-type infrared cut off filter and the curve that concerns an example of transmitance.
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.In addition, in the following description,, omit its explanation to the additional same-sign of identical element.
(the 1st execution mode)
In the present embodiment, the imaging apparatus that is equipped with in illustrative examples such as digital camera, portable phone, video camera, linear transducer, the scanner etc.
In the present embodiment, imaging apparatus disposes filter, the colouring component of may observe object of observation at the light incident side of photo detector.
In the present embodiment, illustrate except that in order to extract the imaging apparatus of the transmitance that incident light medium green (Green), blue (Blue), the employed spectral filter of red (Red) each colouring component, also the possesses infrared portion correction filter higher than the transmitance of visible light wave band.
The spectral characteristic of revising filter has inhibition and sees through characteristic under the visible light wave band, have through characteristic under infrared portion.
Fig. 1 is the front elevation of 3 coloured light spectrum filter devices and configuration status one example of revising filter in the imaging apparatus of expression present embodiment.In this Fig. 1, the stateful example that expression is seen from light incident side.
Fig. 2 is the figure of expression imaging apparatus cross section the 1st example.In this Fig. 2, represent the I-I cross section of above-mentioned Fig. 1.
Fig. 3 is the figure of expression imaging apparatus cross section the 2nd example.In this Fig. 3, represent the II-II cross section of above-mentioned Fig. 1.
Revising filter 2Blk is the transmitance spectral filter higher than the transmitance of visible light wave band of infrared portion.That is, revise filter 2Blk and under the visible light wave band, have inhibition, under infrared portion, have through characteristic through characteristic.In the present embodiment, the transmitance of revising filter 2Blk is the level roughly the same with the transmitance of other spectral filter 2G, 2B, 2R (identical or approximate) in the long side of wavelength ratio visible light wave band.
Revise filter 2Blk and suppress to see through characteristic (the low characteristic that sees through), so under visual, be black owing under the visible light wave band, having.
Revising filter 2Blk forms by a plurality of colorants of optical superposition (pigment, pigment etc.).
As the specific implementation method of optical superposition, method that the lit-par-lit structure of the filter that utilizes a plurality of colors realizes is arranged, utilize method that the monolayer constructions will of having mixed the pigmentary resin behind a plurality of colorants realizes etc.In order to adjust color or transmitance, also can use 2 looks above colorant.
In the present embodiment, revise filter 2Blk and constitute the stacked component of the light filter 2r that is used to extract the component of the light filter 2g of green component and is used to extract red component.In the present embodiment, component of the light filter 2g, 2r are the same with spectral filter 2G, 2R respectively.
In addition, the combination one to one of photo detector and filter is equivalent to pixel. Spectral filter 2G, 2B, 2R are equivalent to green pixel, blue pixel, red pixel respectively, revise filter 2Blk and are equivalent to black pixel.
For example, in the colorant of spectral filter 2G, can use and mix organic pigment C.I. pigment yellow 13 9, C.I. pigment green 36, C.I. pigment blue 15: 6 colorant.
For example, in the colorant of spectral filter 2B, can use and mix organic pigment C.I. pigment blue 15: 6, the colorant of C.I. pigment Violet 23.
For example, in the colorant of spectral filter 2R, can use the colorant that has mixed organic pigment C.I. pigment orange 71, C.I. pigment yellow 13 9.
Revise photo detector 3Blk in order to observe the correction data value that is used to revise photo detector 3G, 3B, green observed data value that 3R observes, blue observed data value, red observed data value, observe incident light via revising filter 2Blk, obtain the correction observed data value.
Above-mentioned Fig. 2,3 as an example, diagram photo detector 3G, 3B, 3R and correction photo detector 3Blk are the situation of CCD.But, also can use CMOS to be used as photo detector 3G, 3B, 3R and correction photo detector 3Blk.
Green operational part 17G deducts and revises the observed data value Dblk that photo detector 3Blk observes from the observed data value Dg that photo detector 3G observes, obtain revised green observed data value HDg (=Dg-Dblk).
Blue operational part 17B deducts and revises the observed data value Dblk that photo detector 3Blk observes from the observed data value Db that photo detector 3B observes, obtain revised blue observed data value HDb (=Db-Dblk).
Red operational part 17R deducts and revises the observed data value Dblk that photo detector 3Blk observes from the observed data value Dr that photo detector 3R observes, obtain revised red observed data value HDr (=Dr-Dblk).
At the light incident side of the semiconductor substrate 4 that has disposed photo detector 3G, 3B, 3R and correction photo detector 3Blk, stacked planarization layer 5.
At the light incident side of planarization layer 5, configuration corresponds respectively to spectral filter 2G, 2B, 2R and the correction filter 2Blk of photo detector 3G, 3B, 3R and correction photo detector 3Blk, forms light filter layer 6.
That is, light filter layer 6 comprises spectral filter 2G, 2B, 2R and correction filter 2Blk.Form the unit that look separates by each spectral filter 2G, a 2B, 2R and correction filter 2Blk.
At the light incident side of light filter layer 6, stacked resin bed (smoothing film) 7.
This resin bed 7 has the characteristic that suppresses transmitance under infrared portion, remove the incident light component of (absorbing or reflection) infrared portion.
In the present embodiment, resin bed 7 has the characteristic that suppresses transmitance riser portions in the infrared portion, for example be located at and have the characteristic that suppresses transmitance between the wave band that comprises wavelength 780nm or 700nm and the 800nm, have the characteristic of the component of removing the infrared portion that comprises wavelength 780nm in the incident light.Here, the riser portions of the transmitance of infrared portion is contained in the wave band of border side of the visible light wave band of infrared portion and infrared portion.
That is, resin bed 7 couples of spectral filter 2G, 2B, 2R and correction filter 2Blk have the transmitance adjustment function that the transmitance that makes infrared portion is a par.
For example, in resin bed 7, add and use phthalocyanine (Off ロ シ ア ニ Application) compounds and cyanine (シ ア ニ Application) compounds.At this moment, near the infrared ray absorbing function that resin bed 7 is had 780nm, have the infrared ray absorbing peak value.
At the light incident side of resin bed 7, possesses lenticule (microlens) 8 corresponding to photo detector 3G, 3B, 3R and correction photo detector 3Blk.Lenticule 8 is configured to each spectral filter 2G, 2B, 2R and correction filter 2Blk paired.Lenticule 8 is formed by acrylic resin etc., improves the optically focused to the incident light of photo detector 3G, 3B, 3R and correction photo detector 3Blk incident.
In the present embodiment, the thickness of spectral filter 2G, 2B, 2R is 1.1 microns, and the spacing of spectral filter 2G, 2B, 2R is 2.6 microns, and the average thickness of planarization layer 5 is 0.6 micron, and the average thickness of resin bed 7 is 2 microns.In order to realize planarization, in planarization layer 5 and resin bed 7, have thick part and thin part.
Fig. 4 is the curve of relation (spectral characteristic) example of the transmitance of expression spectral filter 2G of all kinds, 2B, 2R and wavelength.
In this Fig. 4, the transmitance of the light of diagram under each wavelength of 400nm to 1200nm.
In above-mentioned Fig. 4, the transmitance of spectral filter 2G is elongated along with wavelength, from slowly rising near the 640nm.
Near, the infrared portion 800nm sharply rising elongated of the transmitance of spectral filter 2B along with wavelength.
General photo detector is observed under the wave band of 400nm-1200nm.Therefore, in existing imaging apparatus, in the long infrared portion of wavelength ratio visible light wave band (for example 400nm-700nm), by the infrared portion component of infrared cut off filter by incident light, in remaining visible light wave band, use spectral filter to carry out look and separate.
On the contrary, in the imaging apparatus 1 of present embodiment, except that spectral filter 2G, 2B, 2R, the correction filter 2Blk of component of the light filter 2g that also to possess stacked green and red component of the light filter 2r.
Fig. 5 is the curve of relation (spectral characteristic) example of the transmitance of correction filter 2Blk of expression present embodiment and wavelength.
The transmitance of revising filter 2Blk is the transmitance of the spectral filter 2G among above-mentioned Fig. 4 and the value of amassing of the transmitance of spectral filter 2R.
This correction filter 2Blk has following characteristic, and promptly the transmitance in the infrared portion suppresses transmitance than the height of visible light wave band under the visible light wave band, is high permeability under infrared portion.That is, revise filter 2Blk and under the visible light wave band, have inhibition, under infrared portion, have through characteristic through characteristic.In the present embodiment, the transmitance of the transmitance of the correction filter 2Blk under the infrared portion and other spectral filter 2G, 2B, 2R is roughly the same.
Therefore, in the present embodiment,, deduct the integrated value of the transmitance of the long wavelength side after the about 640nm that revises filter 2Blk, can carry out high-precision look and separate as can be known by from the integrated value of the transmitance of each spectral filter 2G, 2B, 2R.
The transmitance of the spectral filter 2G of green usefulness is described here.
The transmitance of the spectral filter 2G of green usefulness has following characteristic, promptly near 450nm, along with wavelength is elongated, near temporary transient rising the, and 650nm, along with wavelength is elongated, transmitance rises once more.
Therefore, though near the transmitance elevated areas (780) of this long wavelength side is red sector territory or infrared portion, the spectral filter 2G of green usefulness also sees through light.Therefore, former state ground like this, the photo detector 3G of green usefulness can observe the component of red zone or infrared portion as green component.
Therefore, in the present embodiment, utilize resin bed 7 to suppress green transmitance riser portions, be near the transmitance of (for example between the 700nm-800nm) 780nm with the infrared portion under the spectral filter 2G.
Fig. 6 is the transmitance of expression resin bed 7 and the curve that concerns an example of wavelength.
By overlapping this resin bed 7 and the green spectral filter 2G that use, via resin bed 7 with green with spectral filter 2G, by green photo detector 3G observation incident light, prevent to observe the red wavelength region may or the component of infrared portion by green photo detector 3G.
In the present embodiment, deduct the area (integrated value) of the transmitance when in revising filter 2Blk, having made up resin bed 7 in the area (integrated value) by the transmitance when among spectral filter 2G, 2B of all kinds, 2R, having made up resin bed 7, obtain the transmitance of observation usefulness of all kinds, but the high accuracy ground colour separates.
Below, the observation of imaging apparatus 1 execution of present embodiment is described.
Photo detector is generally observed under the optical wavelength about 400nm-1200nm.
Wherein, think that the appreciable visible light wave band of people is generally the zone about 400nm-700nm.
Therefore, by only observing the component in the light component of measuring by each photo detector, in the visible light wave band, can obtain more observed result near people's vision.
But, as above-mentioned shown in Figure 4, even if spectral filter 2G of all kinds, 2B, 2R in the long ripple zone of wavelength ratio visible light wave band, be in the infrared portion, also have high transmitance.
Therefore, if former state by photo detector observation by the light after spectral filter 2G, 2B, the 2R beam split, then photo detector also observes the not component in the infrared portion of perception of people in the incident light component sometimes, obtains and people's vision observed result devious.
Therefore, in the imaging apparatus 1 of present embodiment, use observed result, revise the observed result that photo detector obtains infrared portion.
In the present embodiment, incident light is via lenticule 8, resin bed 7, again via one of spectral filter 2G, 2B, 2R and correction filter 2Blk, by photo detector 3G, 3B, 3R and correction photo detector 3Blk observation.
Promptly, in the present embodiment, observed data value Dg, Db, Dr, Dblk that photo detector 3G, 3B, 3R and correction photo detector 3Blk obtain are subjected to the influence of the transmitance of resin bed 7, and are subjected to the influence of the transmitance of spectral filter 2G, 2B, 2R and correction filter 2Blk respectively.
Particularly, be that the transmitance of the transmitance of resin bed 7 and spectral filter 2G is long-pending via the transmitance of the incident light of resin bed 7 and spectral filter 2G.
Via the transmitance of the incident light of resin bed 7 and spectral filter 2B is that the transmitance of the transmitance of resin bed 7 and spectral filter 2B is long-pending.
Via the transmitance of the incident light of resin bed 7 and spectral filter 2R is that the transmitance of the transmitance of resin bed 7 and spectral filter 2R is long-pending.
Transmitance via resin bed 7 and the incident light of revising filter 2Blk is that the transmitance of resin bed 7 and the transmitance of revising filter 2Blk are long-pending.
Fig. 7 is illustrated in the transmitance when having made up resin bed 7 among spectral filter 2G, 2B, 2R and the correction filter 2Blk and the curve that concerns an example of wavelength.
Transmitance when having made up resin bed 7 in spectral filter 2G, 2B, 2R and correction filter 2Blk is because the effect of above-mentioned resin bed 7 shown in Figure 6 is compared step-down near the wave band 780nm with the situation of above-mentioned Fig. 4 and Fig. 5.
In addition, the spectral characteristic that has made up resin bed 7 in spectral filter 2G, 2B, 2R and correction filter 2Blk becomes approximate state in infrared portion.
Transmitance when having made up resin bed 7 in revising filter 2Blk is under the visible light wave band, transmitance is extremely low, in the long infrared portion of wavelength ratio visible light wave band, the degree that transmitance uprises the same when in each spectral filter 2G, 2B, 2R, having made up resin bed 7.
Therefore, the incident light component under the infrared portion beyond the correction photo detector 3Blk may observe visible light wave band.In addition, revising the observed result that photo detector 3G, 3B, 3R obtain, can obtain the only observed data value of all kinds under the visible light wave band by utilize revising observed result that photo detector 3Blk obtains.
Effect to the imaging apparatus 1 of the above-mentioned present embodiment of above explanation describes below.
In the present embodiment, the component that comprises the zone of the 780nm in the infrared portion in the incident light is absorbed by resin bed 7.
And, observe incident light via spectral filter 2G of all kinds, 2B, 2R, and, incident light observed at infrared portion via the correction filter 2Blk that height sees through.
In addition, from green, blue, red observed data value, deduct observed data value via resin bed 7 and correction filter 2Blk via resin bed 7 and each spectral filter 2G, 2B, 2R, carry out the correction of green, blue, red observed data value, obtain revised green, blue, red observed data value.Thus, can obtain the observed data value under the visible light wave band in the incident light accurately.
In the present embodiment, the infrared cut off filter that possesses in the optical system of existing camera module can be omitted, lens optical system and camera attenuation can be made, can be efficiently and suitably carry out observation based on photo detector.
Under the situation of using existing absorption-type infrared cut off filter, when red, green sensitivity reduced, color rendering descended sometimes.Promptly, in the integral body of the front of imaging apparatus, possess under the situation of infrared cut off filter with above-mentioned spectral characteristic shown in Figure 35, because the component of visible light wave band 550nm-700nm wave band also can be absorbed by infrared cut off filter, so green, especially red sometimes sensitivity descends.
In addition, possess under the situation of infrared cut off filter in the integral body of the front of imaging apparatus, be subjected to the influence of the spectral characteristic of above-mentioned Figure 35, each photo detector that possesses 300,000-1,000 ten thousand usually damages delicate red reproduction sometimes.
But, in the present embodiment,,, color rendering is improved so the sensitivity that does not have under the visible light wave band descends owing to also can not use the absorption-type infrared cut off filter, the reproducibility of color is improved.
In the present embodiment, possesses the resin bed 7 that suppresses transmitance near light wavelength 780nm the zone in the imaging apparatus 1.
In above-mentioned Fig. 4, the transmitance of the side that wavelength ratio light wavelength 640nm is long has deviation between the spectral filter 2B of green spectral filter 2G and indigo plant, and is maximum in the difference of 780nm left and right sides transmitance.
But, in the present embodiment, by suppress the transmitance of 780nm left and right sides wave band by resin bed 7, can be in the long side of wavelength ratio 640nm, make the transmitance that sees through resin bed 7 and the light of green spectral filter 2G, with to see through resin bed 7 roughly the same with the transmitance of the light of blue spectral filter 2B, can make it with to see through resin bed 7 in the long side of wavelength ratio 640nm approximate with the transmitance of the light of revising filter 2Blk.
Thus, by from transmitance area (integrated value), deduct based on the transmitance area (integrated value) of resin bed 7, but the high accuracy ground colour separates with the combination of revising filter 2Blk based on resin bed 7 and the combination of spectral filter 2G of all kinds, 2B, 2R.
Under the situation of using existing infrared cut off filter, because from about 550nm, light is absorbed by infrared cut off filter, so red or green sometimes sensitivity descends, but in the present embodiment, because the long side of the about 700nm of the wavelength ratio of a long side is carried out the absorption of light in the wavelength ratio viewing area, red and green color rendering is improved.
That is, in the present embodiment, owing to needn't be equipped with infrared cut off filter at the light incident side of photo detector, so can make the imaging apparatus attenuation.
In addition, in the present embodiment, owing to needn't be equipped with infrared cut off filter, so can prevent under the visible light wave band, the indigo plant of incident light, red observed result can improve color rendering because of infrared cut off filter is affected, photo detector descends to blue, red observed result.
(the 2nd execution mode)
The variation of above-mentioned the 1st execution mode is described in the present embodiment.
In above-mentioned the 1st execution mode, the difference of the transmitance of the transmitance of spectral filter 2G in the infrared portion and spectral filter 2B is descended, in order to adjust the transmitance infrared portion under, make resin bed 7 have the characteristic of transmitance that inhibition comprises the wave band of 780nm.
On the contrary, in the present embodiment, green spectral filter 2G self had suppress infrared portion, promptly comprise the characteristic of transmitance of the wave band of 780nm.Thus, can equally with above-mentioned the 1st execution mode carry out look separates.
In order to suppress infrared portion, promptly to comprise the transmitance of the wave band of wavelength 780nm, also can in green spectral filter 2G, add organic pigment.In addition, also can in green spectral filter 2G, add infrared absorbing material.And the light incident side or the emitting side that are preferably in green spectral filter 2G form the infrared absorbent layer.
As infrared absorbent, can use anthraquinone (ア Application ト ラ キ ノ Application) compounds, phthalocyanine (Off ロ シ ア ニ Application) compounds, cyanine (シ ア ニ Application) compounds, polymethylene (Port リ メ チ レ Application) compounds, aluminium (ア Le ミ ニ ウ system) based compound, diimmonium (ジ イ モ ニ ウ system) compounds, imonium (イ モ ニ ウ system) compounds, azo (ア ゾ) compounds etc.
In addition, in the present embodiment,, also can use ultra-violet absorber in order to suppress infrared portion, promptly to comprise the transmitance of the wavelength region may of wavelength 780nm.As ultra-violet absorber, can use BTA (ベ Application ゾ ト リ ア ゾ one Le) compounds, benzophenone (ベ Application ゾ Off エ ノ Application) compounds, salicylic acid (acid of サ Le チ Le) compounds, cumarin (Network マ リ Application) compounds etc.
In addition, in the present embodiment, also can in above-mentioned infrared absorbent or ultra-violet absorber, add for example light stabilizer or quencher (Network エ Application チ ヤ one) such as hindered amine (ヒ Application ダ one De ミ Application) compounds.
In order to absorb infrared ray, also can in transparent resin, add the infrared ray-absorbable compound or infrared absorbent uses, or in transparent resin, incorporate infrared ray-absorbable compound or infrared absorbent in side chain mode (incorporating mode in the molecular resin chain into) with forms such as response type infrared absorbent such as chemically-reactive dyess.
(the 3rd execution mode)
In the present embodiment, illustrate the above-mentioned the 1st and the variation of the 2nd execution mode.In the above-mentioned the 1st and the 2nd execution mode, revise filter 2Blk and constitute by green component of the light filter 2g and red component of the light filter 2r.
On the contrary, in the present embodiment, the correction filter that uses component of the light filter and red component of the light filter by indigo plant to constitute replaces revising filter 2Blk.
Fig. 8 is the front elevation of configuration status one example of 3 coloured light spectrum filter device 2G, 2B, 2R and correction filter in the imaging apparatus of expression present embodiment.In Fig. 1, the stateful example that expression is seen from light incident side.In Fig. 8, omit operational part 17.
Fig. 9 is the figure of expression imaging apparatus cross section one example.In this Fig. 9, represent the III-III cross section of above-mentioned Fig. 8.
Imaging apparatus 9 possesses the filter of correction 10Blk, replaces the correction filter 2Blk of the imaging apparatus 1 of above-mentioned the 1st execution mode.Revise filter 10Blk and under the visible light wave band, have inhibition, under infrared portion, have through characteristic through characteristic.Revise filter 10Blk and be equivalent to black pixel.
Revise filter 10Blk have the stacked component of the light filter 10b that is used to extract blue component, with the formation of the component of the light filter 10r that is used to extract red component.In the present embodiment, component of the light filter 10b, 10r are the same with spectral filter 2B, 2R respectively.
In the imaging apparatus 9, at the light incident side of planarization layer 5, stacked spectral filter 2G, 2B, 2R and the correction filter 10Blk that corresponds respectively to photo detector 3G, 3B, 3R and correction photo detector 3Blk forms light filter layer 11.
The imaging apparatus 9 of present embodiment possesses the component of the light filter 10b of stacked indigo plant and the correction filter 10Blk of red component of the light filter 10r.
Figure 10 is the curve of relation (spectral characteristic) example of the transmitance of correction filter 10Blk of expression present embodiment and wavelength.
The transmitance of revising filter 10Blk is the transmitance of the spectral filter 2B among above-mentioned Fig. 4 and the value of amassing of the transmitance of spectral filter 2R.
This correction filter 10Blk has following characteristic, and promptly the transmitance in the infrared portion suppresses transmitance than the height of visible light wave band under the visible light wave band, is high permeability under infrared portion.That is, revise filter 10Blk and under the visible light wave band, have inhibition, under infrared portion, have through characteristic through characteristic.The transmitance of revising filter 10Blk is in the long side of wavelength ratio visible light wave band, with the transmitance of other spectral filter 2G, 2B, 2R roughly the same (identical or approximate).
Therefore, in the present embodiment, can deduct the integrated value of the transmitance of long wavelength one side of the about 700nm of the ratio of revising filter 10Blk, carry out high-precision look and separate by from the integrated value of the transmitance of each spectral filter 2G, 2B, 2R.
Therefore, in the present embodiment, be configured in to have under the visible light wave band at the plane of incidence and suppress see through characteristic, under infrared portion, have correction filter 10Blk, be used for look and separate through characteristic.
Figure 11 is illustrated in the transmitance when having made up resin bed 7 among spectral filter 2G, 2B, 2R and the correction filter 10Blk and the curve that concerns an example of wavelength.
In this Figure 11, the transmitance that has the resin bed 7 that suppresses to see through characteristic in will near the zone 780nm multiply by the transmitance of spectral filter 2G of all kinds, 2B, 2R and correction filter 10Blk, reflection spectral characteristic.
Transmitance when having made up resin bed 7 in spectral filter 2G, 2B, 2R and correction filter 10Blk is because the effect of above-mentioned resin bed 7 shown in Figure 6 is compared step-down near the wave band 780nm with the situation of above-mentioned Fig. 4 and Fig. 5.
In addition, the spectral characteristic that has made up resin bed 7 in spectral filter 2G, 2B, 2R and correction filter 10Blk becomes approximate state in infrared portion.
Transmitance when having made up resin bed 7 in revising filter 10Blk is under the visible light wave band, transmitance is extremely low, under the long infrared portion of wavelength ratio visible light wave band, the degree that transmitance uprises the same when in each spectral filter 2G, 2B, 2R, having made up resin bed 7.
That is, be adjusted at the spectral characteristic behind the combination resin layer 7 among spectral filter 2G, 2B, 2R and the correction filter 10Blk, making spectral filter 2G, 2B, 2R and the transmitance of correction filter 2Blk under infrared portion is par.
Therefore, corresponding to the incident light component under the infrared portion beyond the correction photo detector 3Blk may observe visible light wave band of revising filter 10Blk.In addition, revising the observed result that photo detector 3G, 3B, 3R obtain, can obtain the only observed data value of all kinds under the visible light wave band by utilize revising observed result that photo detector 3Blk obtains.
In the above-described embodiment, by the transmitance area (integrated value) when making resin bed 7 with spectral filter 2G of all kinds, 2B, 2R combination, deduct the transmitance area (integrated value) when making resin bed 7 and revising filter 10Blk combination, can obtain the transmitance of observation usefulness of all kinds, but the high accuracy ground colour separates.
In addition, among above-mentioned Fig. 7, the transmitance when making resin bed 7 and revising filter 2Blk combination is near the 600nm as the visible light wave band, and transmitance rises.
But in above-mentioned Figure 11 of present embodiment, in whole visible light wave band, the transmitance when making resin bed 7 and revising filter 10Blk combination suppresses lowly.
Therefore, in the present embodiment, compare, can carry out near the observation of 600nm accurately, green color rendering is improved with the situation of above-mentioned the 1st execution mode.
(the 4th execution mode)
The variation of above-mentioned 1-the 3rd execution mode is described in the present embodiment.
In the present embodiment, spectral filter 2G, 2B, 2R, correction filter 2Blk are configured to one of at least mesh-shape, formation face among the filter 10Blk with revising.In addition, establish by spectral filter 2G, 2B, 2R, correction filter 2Blk and revise and form one of at least the unit that look separates among the filter 10Blk.In the present embodiment, a plurality of look separation units are configured on the plane of incidence.
The look separation unit also can comprise spectral filter 2G, 2B, 2R and correction filter 2Blk, 10Blk both sides.
In addition, the look separation unit also can comprise two green spectral filter 2G, spectral filter 2B, 2R and correction filter 2Blk, 10Blk both sides.
In addition, also can be that certain look separation unit possesses a correction filter 2Blk, other look separation unit possesses another and revises filter 10Blk.In addition, also can under this different state that comprises the look separation unit of revising filter 2Blk, 10Blk of combination, be configured on the plane of incidence.
In above-mentioned the 1st execution mode and above-mentioned the 3rd execution mode, the area size of spectral filter 2G, 2B, 2R, correction filter 2Blk, 10Blk is identical.But,, can freely change the area size of spectral filter 2G, 2B, 2R, correction filter 2Blk, 10Blk from keeping the viewpoint of essential remolding sensitivity.
For example, consistent in order to make remolding sensitivity with general Bel (Bayer) ratio, as shown in figure 12, under the look separation unit, also the area ratio of spectral filter 2G, spectral filter 2B, spectral filter 2R, correction filter 2Blk can be made as 4: 2: 2: 1.
Equally, under the look separation unit, also the area ratio of spectral filter 2G, spectral filter 2B, spectral filter 2R, correction filter 10Blk can be made as 4: 2: 2: 1.
In addition, also can be consistent with this ratio, photo detector 3G, photo detector 3B, photo detector 3R, the area ratio of revising photo detector 3Blk were made as 4: 2: 2: 1.
At this moment, the change of conventional images process software (image engine) is few, can effectively utilize imaging apparatus.
(the 5th execution mode)
The variation of above-mentioned 1-the 4th execution mode is described in the present embodiment.In addition, in the present embodiment, specify the variation of the imaging apparatus 9 of above-mentioned the 3rd execution mode, but the imaging apparatus of above-mentioned the 1st imaging apparatus the 1, the 2nd or the 4th execution mode can be out of shape equally also.
Figure 13 is the figure of imaging apparatus cross section one example of expression present embodiment.
This imaging apparatus 12 is transcribed lens 13 in the light incident side configuration of light filter layer 11, replaces the resin bed 7 and the lenticule 8 of the imaging apparatus 9 of above-mentioned the 3rd execution mode.This is transcribed lens 13 and realizes the function the same with lenticule.
It is the same with the resin bed 7 of above-mentioned the 3rd execution mode to transcribe lens 13, has to suppress infrared portion, promptly comprise the characteristic (transmitance adjustment function) of transmitance of the wave band of wavelength 780nm.Transcribing lens 13 is configured to each spectral filter 2G, 2B, 2R and correction filter 2Blk paired.
As manufacture process one example of imaging apparatus 12, at first, utilize and the same operation of above-mentioned the 3rd execution mode, configuration photo detector 3G, 3B, 3R, 3Blk on semiconductor substrate 4, stacked planarization layer 5, light filter layer 11, resin bed 7 are equipped with lenticule 8.
Afterwards, as case mold (mask), utilize dry-etching method that the light incident side of imaging apparatus 12 is carried out anisotropic etching lenticule 8.
Thus, the shape of lenticule 8 is transcribed on the resin bed 7, transcribe lens 13 in the light incident side formation of light filter layer 11.
In the present embodiment, transcribe lens 13 and have the transmitance the same with the resin bed 7 of above-mentioned the 3rd execution mode.Therefore, imaging apparatus 12 realizes that the look the same with above-mentioned the 2nd execution mode separates.
In addition, the distance of transcribing between lens 13 and photo detector 3G, 3B, 3R, the 3Blk is shorter than the distance between the lenticule 8 in above-mentioned the 3rd execution mode and photo detector 3G, 3B, 3R, the 3Blk.
Therefore, in the imaging apparatus 12 of present embodiment, can expand the angle that is taken into of light, color rendering is improved, simultaneously, the observed result that can obtain becoming clear.
In addition, in the respective embodiments described above, in the light filter layer 6,11, the thickness of revising filter 2Blk, 10Blk part is thicker than the thickness of other spectral filter 2G, 2B, 2R part, produces step sometimes.
In order to eliminate this step, in planarization layer 5, form recess (spot-facing) by the shape of revising filter 2Blk, 10Blk, the recess arrangement that makes correction filter 2Blk, the 10Blk generation in the light filter layer 6,11 is in this recess.In addition, also can use dry ecthing in the formation of the recess of planarization layer 5.
(the 6th execution mode)
In the present embodiment, illustrate possess the correction filter 10Blk that illustrates in the correction filter 2Blk that illustrates in above-mentioned the 1st execution mode or above-mentioned the 3rd execution mode, and as the imaging apparatus of infrared ray sensor.
Figure 14 is the figure of imaging apparatus cross section one example of expression present embodiment.
Imaging apparatus 14 disposes photo detector 3Blk on semiconductor substrate 4, stacked planarization layer 5, only disposed light filter layer 15, the resin bed 16 of a plurality of correction filter 10Blk and configuration lenticule 8.In resin bed 16, use and do not have the transparent resin that suppresses to see through characteristic.
The imaging apparatus 14 of present embodiment has inhibition and sees through characteristic under the visible light wave band, have through characteristic under infrared portion.Therefore, imaging apparatus 14 can be used as the good infrared ray sensor through the later long wavelength's of for example 800nm light.
In the present embodiment, use and revise filter 10Blk, revise filter 2Blk but also can use.In addition, also can be at the light incident side of light filter layer 15, lens 13 are transcribed in configuration.
In the respective embodiments described above, revising filter 2Blk, 10Blk is 2 layers of structure, but also can be to mix a plurality of have under the visible light wave band dyestuff of the section of seeing through or the spectral filters of organic pigment.In addition, revise filter 2Blk, 10Blk and also can be configured to stacked green usefulness, blue more than 3 layers with, red spectral filter 2G, 2B, the 2R that uses etc. at various looks.
That is, form correction filter 2Blk, 10Blk by the optical superposition more than 2 looks.
In the respective embodiments described above, each inscape then can freely change, or make configuration change, but independent assortment is also divisible if can realize same action.
In the respective embodiments described above, so-called to revising the characteristic that sees through of the high state that sees through of meanings such as filter 2Blk, 10Blk, can refer to that also for example transmitance is more than 65%.This is because in glass reference (glass reference), the transmitance of spectral filter is low, is 65-70%.But expectation sees through characteristic and is meant that transmitance is more than 90%.This is because transparent resin can be realized the transmitance about 90%-100%.
On the other hand, in the respective embodiments described above, what is called also can refer to that through characteristic for example transmitance is below 15% to revising the low inhibition that sees through of meanings such as filter 2Blk, 10Blk.This is because green come-up with spectral filter 2G etc. partly is the transmitance about below 15%.
The inhibition that this correction filter 2Blk, 10Blk have see through characteristic preferably for example transmitance be below 10%, 1% with inferior lower.
(the 7th execution mode)
In the present embodiment, the spectral filter of use complementary color system and the imaging apparatus that the correction filter is observed incident light are described.
Figure 15 is the front elevation of configuration status one example of filter in the imaging apparatus of expression present embodiment.In this Figure 15, the stateful example of the filter that expression is seen from light incident side.
Figure 16 is the sectional view of imaging apparatus one example of expression present embodiment.In this Figure 16, represent the IV-IV cross section of above-mentioned Figure 15.In addition, in this Figure 16, illustrating photo detector as an example is the situation of CMOS, but photo detector when being CCD too.
The imaging apparatus 18 of present embodiment possess photo detector 19Y, 19M, 19C and correction photo detector 19Blk, with this photo detector 19Y, 19M, 19C and paired optical filter 20Y, 20M, 20C and correction filter 20Blk, the operational part 25 of correction photo detector 19Blk.
Form the unit that look separates by each one yellow filter 20Y, pinkish red filter 20M, blue or green filter 20C, correction filter 20Blk.Yellow filter 20Y, pinkish red filter 20M, blue or green filter 20C, correction filter 20Blk adjacency are configured to mesh-shape, thus formation face.
Pinkish red filter 20M is the product red color filter that is used for extracting pinkish red (Magenta) component of incident light.
Blue or green filter 20C is the blue or green filter that is used for extracting blue or green (Cyan) component of incident light.
Revising filter 20Blk is to have inhibition to see through characteristic, have the filter that suppresses to see through characteristic in the long side of wavelength ratio visible light wave band under the visible light wave band, has the transmitance of the infrared portion characteristic higher than the transmitance of visible light wave band.Revise filter 20Blk and suppress to see through characteristic (the low characteristic that sees through), so be black under visual owing under the visible light wave band, having.
Revise blue or green and red formation of filter 20Blk optical superposition.In order to realize optical superposition, in the present embodiment, filter 21C of stacked green grass or young crops and red filter 21R, but also can use the filter that mixes blue or green colorant and red colorant.
Be disposed at the opposition side of the light incident side of yellow filter 20Y, pinkish red filter 20M, blue or green filter 20C, correction filter 20Blk respectively as the yellow photo detector 19Y of photo detector, pinkish red photo detector 19M, blue or green photo detector 19M, correction photo detector 19Blk, the light that receives is transformed to the signal of telecommunication, obtains observed data value.
Yellow photo detector 19Y observes incident light corresponding to yellow filter 20Y via yellow filter 20Y.
Pinkish red photo detector 19M observes incident light corresponding to pinkish red filter 20M via pinkish red filter 20M.
Blue or green photo detector 19C observes incident light corresponding to blue or green filter 20C via blue or green filter 20C.
Revise photo detector 19Blk corresponding to revising filter 20Blk, observe incident light via revising filter 20Blk.
The combination one to one of photo detector and filter is equivalent to pixel.
In the present embodiment, between semiconductor substrate 4 and light filter layer 20, form smoothing layer 22.
In addition, at the light incident side of light filter layer 20, form resin bed 23, lenticule 24.
In smoothing layer 22, light filter layer 20, resin bed 23, the lenticule 24 have one of at least and the visible light wave band between the infrared portion of border side under suppress the function of incident light transmitance.
Therefore, for example, in smoothing layer 22, light filter layer 20, resin bed 23, lenticule 24 one of at least in add absorb infrared portion, be the ultrared infrared absorbent of wavelength 700nm-800nm.
In order to realize the ultrared function of this absorbing wavelength 700nm-800nm, for example, the light of one of at least absorbing wavelength 700nm-800nm in smoothing layer 22, light filter layer 20, resin bed 23, the lenticule 24 has between wavelength 700nm-800nm and suppresses to see through characteristic.
Operational part 25 possesses yellow operational part 25Y, pinkish red operational part 25M, blue or green operational part 25C, three primary colors operational part 25CD.This operational part 25 has following function, promptly according to yellow photo detector 19Y, pinkish red photo detector 19M, blue or green photo detector 19C, revise observed data value Dy, Dm, Dc, Dblk that photo detector 19Blk obtains, obtain revised observed data value HDy, HDm, HDc, according to this revised observed data value HDy, HDm, HDc, obtain blue observed data value CDb, green observed data value CDg, red observed data value CDr again.
Yellow operational part 25Y deducts by revising the observed data value Dblk that photo detector 19Blk observes from the observed data value Dy that yellow photo detector 19Y observes, obtain revised Huang observed data value HDy (=Dy-Dblk).
Pinkish red operational part 25M deducts by revising the observed data value Dblk that photo detector 19Blk observes from the observed data value Dm that pinkish red photo detector 19M observes, obtain revised magenta observed data value HDm (=Dm-Dblk).
Blue or green operational part 25C deducts by revising the observed data value Dblk that photo detector 19Blk observes from the observed data value Dc that blue or green photo detector 19C observes, obtain revised green grass or young crops observed data value HDc (=Dc-Dblk).
Three primary colors operational part 25CD is according to revised yellow observed data value HDy, revised pinkish red observed data value HDm, revised blue or green observed data value HDc, obtains the three primary colors of light, i.e. blue observed data value CDb, green observed data value CDg, red observed data value CDr.
Particularly, three primary colors operational part 25CD computing CDb=(HDc+HDm-HDy)/2, computing CDg=(HDc+HDy-HDm)/2, computing CDr=(HDm+HDy-HDc)/2.In addition, common green grass or young crops=indigo plant+green, magenta=indigo plant+red, yellow=green+red relation establishment.
Below, the manufacturing process of the imaging apparatus 18 of present embodiment is described.
On semiconductor substrate 4, form, dispose yellow photo detector 19Y, pinkish red photo detector 19M, blue or green photo detector 19C, revise photo detector 19Blk.
In the formation of semiconductor substrate 4 yellow photo detector 19Y, pinkish red photo detector 19M, blue or green photo detector 19C, revise in the face of light incident side of photo detector 19Blk stacked planarization layer 22.Thus, but the yellow filter 20Y of planarization, pinkish red filter 20M, blue or green filter 20C, revise the face that is provided with of filter 20Blk.
Light incident side at planarization layer 22, arranged in order corresponds respectively to blue or green photo detector 19C, yellow photo detector 19Y, pinkish red photo detector 19M, the blue or green filter 20C, the yellow filter 20Y that revise photo detector 19Blk, pinkish red filter 20M, revises filter 20Blk, forms light filter layer 20.
At the light incident side of light filter layer 20, stacked resin bed (transparent smoothing layer) 23.
At the light incident side of resin bed 23, be equipped with lenticule 24 corresponding to yellow photo detector 19Y, pinkish red photo detector 19M, blue or green photo detector 19C, correction photo detector 19Blk.Lenticule 24 is configured in each yellow filter 20Y, pinkish red filter 20M, blue or green filter 20C, revises on the filter 20Blk, so that 20Blk is paired with each yellow filter 20Y, pinkish red filter 20M, blue or green filter 20C, correction filter.Lenticule 24 is formed by acrylic resin etc., improves yellow photo detector 19Y, pinkish red photo detector 19M, blue or green photo detector 19C, revises the optically focused of photo detector 19Blk.
As mentioned above, in above-mentioned Figure 16, use the correction photo detector 19Blk of lit-par-lit structure with blue or green filter 21C and red filter 21R.
But, revise filter 2Blk and be not limited to above-mentioned structure shown in Figure 16, realize getting final product by optical superposition.Here the optical superposition of indication such as above-mentioned shown in Figure 16, can realize by the lit-par-lit structure of the not homochromy filter more than 2 looks, also can be as shown in figure 17 by mixing the filter that constitutes different a plurality of looks colorant (pigment, pigment) pigmentary resin, realize by individual layer.In addition, in order to adjust color or transmitance, also can use 2 looks above colorant.
Like this, by the filter more than optical superposition 2 looks, the transmitance of revising filter 20Blk is that the transmitance of overlapping each filter is long-pending.Therefore, shown in present embodiment, form by optical superposition and to revise filter 20Blk, can be produced on to have under the visible light wave band and suppress to see through characteristic, have correction filter 20Blk through characteristic in the long side of wavelength ratio visible light wave band.
In the present embodiment, the thickness of establishing the filter individual layer is respectively 0.7 micron, and pixel pitch (spacing of yellow filter 20Y, pinkish red filter 20M, blue or green filter 20C, correction filter 20Blk) is 2.6 microns.
If the average film thickness of planarization layer 22 is 0.1 micron.In addition, in the present embodiment, form planarization layer 22, but, also can omit planarization layer 22 in order further to make the imaging apparatus attenuation.
Below, light transmission rate is described.
Figure 18 is the curve of spectral transmittance one example of the yellow filter 20Y of expression, pinkish red filter 20M, blue or green filter 20C.Among Figure 18, represent the relationship example of light wavelength 400nm-1100nm and transmitance with curve.
As shown in figure 18, with regard to the spectral transmittance of yellow filter 20Y, pinkish red filter 20M, blue or green filter 20C, at the lower hem (suppress to see through and command troops) of the curve of spectrum, the transmitance step-down, incident light sees through about a few percent.The come-up that the value of remaining transmitance in the lower hem of this curve of spectrum is called spectrum.
The come-up of spectrum is the reason that forms noise in the look that the observed data value Dy, the Dm that obtain according to yellow photo detector 19Y, pinkish red photo detector 19M, blue or green photo detector 19C, Dc carry out separates, and color reproduction is descended, and is the reason of image quality decrease.
In addition, because yellow filter 20Y, pinkish red filter 20M, the transmitance height of blue or green filter 20C in infrared portion, so there is problem till yellow photo detector 19Y, pinkish red photo detector 19M, blue or green photo detector 19C observe the light of infrared portion.
Figure 19 is the curve of spectral transmittance one example of the correction filter 20Blk of expression present embodiment.In this Figure 19, represent the relationship example of light wavelength and transmitance with curve.
Under each wavelength, the long-pending value of the transmitance of the transmitance of blue or green filter 21C and red filter 21R is for revising the transmitance of filter 20Blk.
Figure 20 is the curve of spectral transmittance one example of the imaging apparatus 18 of expression present embodiment.
Wavelength when Figure 20 deducts the transmitance integrated value of revising filter 20Blk respectively with curve representation from the transmitance integrated value of yellow filter 20Y, pinkish red filter 20M, blue or green filter 20C and the relationship example of transmitance.
Like this, in the present embodiment,,, can alleviate of the influence of the come-up of spectrum to the observed result generation so the come-up of spectrum is also deducted owing to from yellow, pinkish red, blue or green spectral characteristic, deduct the spectral characteristic of revising filter.
With regard to revising filter 20Blk,, can further reduce the come-up of spectrum by adjusting the combination of a plurality of colorants.
In addition, owing to from yellow, pinkish red, blue or green spectral characteristic, deduct the spectral characteristic of revising filter,, can alleviate the influence of the observed result of infrared portion so the observed result of infrared portion is also deducted.
Figure 20 represents that imaging apparatus 18 can end infrared ray in the long side of wavelength ratio 700nm a long side, especially wavelength ratio 800nm.
Can adjust infrared portion, promptly and the transmitance of the correction filter 20Blk in about 700nm-800nm wavelength region may (border infrared portion) of the border side between the visible light wave band by the combination of a plurality of colorants.
Therefore, in the present embodiment, the noise that look is separated reduces greatly, and picture quality is improved.
Figure 21 is the curve of spectral transmittance one example of the infrared absorbent that uses in the imaging apparatus 18 of expression present embodiment.
Infrared absorbent is in border infrared portion absorbing light.This infrared absorbent be added in smoothing layer 22, light filter layer 20, resin bed 23, lenticule 24, the light filter layer 20 one of at least in.Thus, can prevent that observed result is subjected to the influence of the wavelength light of border infrared portion.That is, can further suppress by yellow photo detector 19Y, pinkish red photo detector 19M, blue or green photo detector 19C, revise the light that photo detector 19Blk observes at infrared portion.
For in border infrared portion absorbing light, also can be in imaging apparatus with colorant dispersing and mixing with infrared absorption character, or use the resin liquid after the dissolving to be applicable to imaging apparatus.
Figure 22 is the curve that expression makes spectral characteristic one example after the spectral transmittance of the spectral transmittance of imaging apparatus 18 of present embodiment and infrared absorbent multiplies each other.
Among Figure 22, the yellow of border infrared portion realizes with pinkish red transmitance adjustment also can be added other look in yellow filter 20Y or pinkish red filter 20M colorant, or to yellow filter 20Y or pinkish red filter 20M and establish the colorant layer of the light of absorbing boundary infrared portion.
Particularly, in the present embodiment, for the transmitance of the border infrared portion that suppresses to comprise light wavelength 780nm, also can add with phthalocyanine (Off ロ シ ア ニ Application) class organic pigment in seeing through resin be the organic pigment of representative, forms coated film and uses.Perhaps, in the material of lenticule 24, add the infrared ray absorbing material.
In addition, also can be in yellow filter 20Y, pinkish red filter 20M, in its underpart or the upper layer stacked package contain the layer of infrared ray absorbing material.
As the infrared ray absorbing material, for example can use anthraquinone (ア Application ト ラ キ ノ Application) compounds, phthalocyanine (Off ロ シ ア ニ Application) compounds, cyanine (シ ア ニ Application) compounds, polymethylene (Port リ メ チ レ Application) compounds, aluminium (ア Le ミ ニ ウ system) based compound, diimmonium (ジ イ モ ニ ウ system) compounds, imonium (イ モ ニ ウ system) compounds, azo (ア ゾ) compounds etc.
The imaging apparatus 18 of present embodiment also can add ultra-violet absorber at the light incident side of yellow filter 20Y, pinkish red filter 20M, blue or green filter 20C, correction filter 20Blk.
As ultra-violet absorber, for example can use BTA (ベ Application ゾ ト リ ア ゾ one Le) compounds, benzophenone (ベ Application ゾ Off エ ノ Application) compounds, salicylic acid (acid of サ Le チ Le) compounds, cumarin (Network マ リ Application) compounds etc.In addition, also can in these ultra-violet absorbers, for example add light stabilizer or quenchers (Network エ Application チ ヤ one) such as (hindered amine ヒ Application ダ one De ミ Application) compounds.
The infrared ray absorbing function of the imaging apparatus 18 of present embodiment also can be by adding the infrared ray-absorbable compound or infrared absorbent be realized in seeing through resin, also can realize by the side chain mode of infrared ray-absorbable compound or infrared absorbent being incorporated in the molecular resin chain with forms such as response type infrared absorbent such as chemically-reactive dyess.
Below, the imaging apparatus 18 of more existing imaging apparatus and present embodiment, description effect difference.
In recent years, follow many pixelation of imaging apparatus, advance the granular of pixel, pixel pitch breaks through 3 microns, becomes 2 microns.With regard near the pixel size 2 microns, optically focused is limited to the light quantity of a pixel, and the sensitivity of imaging apparatus descends, and becomes dark picture quality sometimes.
On the contrary, in the present embodiment,, can prevent that the sensitivity of imaging apparatus 18 from descending, realize the raising of picture quality by using yellow filter 20Y, pinkish red filter 20M, the blue or green filter 20C of complementary color system.
In the present embodiment, the subtraction of the observed data value Dblk by carry out revising filter 20Blk can be removed the spectrum come-up in the filter of spectrum come-up in the filter of Huang, magenta, blue or green complementary color system, red, green, blue primary colors.Like this, reduce, the color reproduction of imaging apparatus 18 is improved, picture quality is improved by when look separates, making the spectrum come-up that causes noise.
In the imaging apparatus 18 of present embodiment, can omit the infrared cut off filter that is equipped with in the existing imaging apparatus, needn't increase thickness through optical system, can realize slimming.That is, in existing imaging apparatus, infrared cut off filter is inserted in the optical system of camera module.On the contrary, in the imaging apparatus 18 of present embodiment, owing to can eliminate existing infrared cut off filter, so but attenuation.
In addition, in the imaging apparatus 18 of present embodiment, needn't change the basic comprising of imaging apparatus, can prevent that observed result is subjected to the influence of the light of infrared portion.
With regard to existing imaging apparatus, the plane of incidence integral body of light is absorbed the type infrared cut off filter and covers.At this moment, the reproducibility of the delicate redness of each pixel reduces with spectral characteristic sometimes.
On the contrary, in the imaging apparatus 18 of present embodiment, can improve red sensitivity, red color reproduction is improved.
The absorption-type infrared cut off filter that is equipped with in the existing imaging apparatus has the tendency that causes that Huang, magenta, red, green sensitivity descend, and color rendering descends sometimes.
On the contrary, in the present embodiment, because the visible light wave band, to be that sensitivity about 400nm-700nm wave band under descends few, so can make the color rendering raising.
In the present embodiment, pigment as Huang, can use C.I. pigment yellow 150, pigment as green grass or young crops, can use the C.I. pigment blue 15: 3, as the pigment of magenta, can use the C.I. pigment red 122, as red pigment, can use the mixing of C.I. paratonere 177 and C.I. pigment red 4 8:1 and C.I. pigment yellow 13 9.
For example, the solid-state of resist is the scope of about 15-35% than (acrylic compounds photoresist and pigment etc.), or the pigment ratio in the solid-state ratio is the scope of about 13%-14%.
(the 8th execution mode)
The variation of the correction filter 20Blk of above-mentioned the 7th execution mode is described in the present embodiment.
Figure 23 is the figure of cross section the 1st example of the correction filter 20Blk of expression present embodiment.
In the present embodiment, revise filter 20Blk by optical superposition purple (Violet) and red formation.
Among Figure 23, revise stacked purple filter 21V of filter 20Blk and red filter 21R and form.
In addition, after correction filter 20Blk also can mix purple and red colorant, form by individual layer.
Figure 24 is the curve of spectral characteristic one example of the purple filter 21V of expression.
Figure 25 is the curve of the spectral characteristic of the purple and red formed correction filter of the optical superposition 20Blk of the utilization of expression present embodiment.
Figure 25 represents that by mixing thickness behind disperse violet pigment and the red be 1.1 microns the transmitance of the formed correction filter of acrylic resin film 20Blk and the relation of wavelength.
Infrared ray cut based on the computing of the correction filter 20Blk that uses present embodiment, with different based on the infrared ray cut of above-mentioned general absorption-type infrared cut off filter shown in Figure 35, because the absorption (absorption of actual effect) of the light near the wave band about 600nm-650nm is few, so red color rendering is improved.
In addition, in the present embodiment,, can utilize the C.I. pigment Violet 23 as the pigment of purple.
(the 9th execution mode)
The variation of light filter layer of the imaging apparatus of above-mentioned the 7th execution mode is described in the present embodiment.
Figure 26 is the figure of imaging apparatus cross section one example of expression present embodiment.
In the light filter layer 20 of the imaging apparatus 18 of above-mentioned the 7th execution mode, blue or green filter 20C and blue or green filter 21C constitute separately.
On the contrary, in the light filter layer 27 of the imaging apparatus 26 of present embodiment, possesses the blue or green filter 27C that one constitutes above-mentioned blue or green filter 20C and blue or green filter 21C.
At the light incident side of revising photo detector 19Blk, dispose the laminated section of blue or green filter 27C and red filter 21R.That is, in the present embodiment, revise filter and be blue or green filter 27C in the light filter layer 27 and the laminated section of red filter 21R.
Utilize this formation, can obtain and the same effect of above-mentioned the 7th execution mode.
(the 10th execution mode)
The variation of the imaging apparatus of above-mentioned the 9th execution mode is described in the present embodiment.
The imaging apparatus of present embodiment constitutes resin bed in the imaging apparatus 26 of above-mentioned the 9th execution mode 23 and lenticule 24 one.
Figure 27 is the sectional view of imaging apparatus one example of expression present embodiment.
The imaging apparatus 28 of present embodiment possess above-mentioned the 9th execution mode of Construction integration imaging apparatus 26 resin bed 23 and lenticule 24 transcribe lens 29.Transcribe lens 29 and have the function of raising to the optically focused of yellow photo detector 19Y, pinkish red photo detector 19M, blue or green photo detector 19C, correction photo detector 19Blk.
The other parts of imaging apparatus 28 are the same with the imaging apparatus 26 of above-mentioned the 9th execution mode.
Below, the manufacture process of this imaging apparatus 28 is described.
Figure 28 is the sectional view of the 1st operation example of manufacture process of the imaging apparatus 28 of expression present embodiment.Among Figure 28-Figure 32, illustrating photo detector as an example is the situation of CMOS, but photo detector when being CCD too.
At first, form yellow photo detector 19Y, pinkish red photo detector 19M, blue or green photo detector 19C on semiconductor substrate 4, revise photo detector 19Blk, coating forms the planarization layer 22 that is made of transparent resin.
In using the forming of photolithographic filter that constitutes by photoresist, because the pattern exposure of photoresist is used ultraviolet ray, so the halation when preventing pattern exposure also can add ultra-violet absorber in planarization layer 22.
Figure 29 is the sectional view of the 2nd operation example of the manufacture process of expression imaging apparatus 28.
Utilize photoetching process, on planarization layer 22, order forms blue or green filter 27C, yellow filter 20Y, pinkish red filter 20M, afterwards, is formed for forming the red filter 21R that revises filter.
Figure 30 is the sectional view of the 3rd operation example of the manufacture process of expression imaging apparatus 28.
On the semiconductor substrate 4 that has formed light filter layer 27, form resin bed 30 with planarization function.
And in the 3rd operation, on resin bed 30, coating has the photonasty phenolic resins 31 of hot-fluid (liquidation by heat treatment becomes spherical) and alkali-developable.
Figure 31 is the sectional view of the 4th operation example of the manufacture process of the first .28 of expression shooting.
Use photoetching process, photonasty phenolic resins 31 is configured as predetermined pattern (for example rectangular patterns).
Afterwards, carry out the heating of 200 degree, the photonasty phenolic resins 31 of predetermined pattern is flowed, form hemispheric lens case mold 31a.
Figure 32 is the sectional view of the 5th operation example of the manufacture process of expression imaging apparatus 11.
In device for dry etching, resin bed 30 is carried out anisotropic etching.Utilize this etching to remove lens case mold 31a, but this lens case mold 31a become the mask to resin bed 30, and the hemispherical shape of lens case mold 31a is transcribed on the resin bed 30.
Thus, obtain possessing the imaging apparatus 28 of transcribing lens 29.
As mentioned above, in the present embodiment, in the face of the light incident side of light filter layer 27, form and transcribe lens 29.In the present embodiment, can further make imaging apparatus 28 attenuation.
As mentioned above, the halation when preventing the pattern exposure to photoresist is preferably in the planarization layer 22 and adds ultra-violet absorber.In addition, in order to prevent to produce based on ultraviolet noise, be preferably in to transcribe in the lens 29 and add ultra-violet absorber owing to photo detector has sensitivity at the ultraviolet line segment.
As ultra-violet absorber, the particulate that can use metal oxides such as cerium oxide, titanium oxide to constitute.But, as mentioned above, in transcribing lens 29, do not add under the situation of ultra-violet absorber, to transcribe in the resin of lens, inorganic material becomes optic foreign matter, blocks light sometimes.At this moment, in the image that imaging apparatus 28 obtains, produce black part.Therefore, preferably use the ultra-violet absorber of dye class.For example, as ultra-violet absorber, can use BTA (ベ Application ゾ ト リ ア ゾ one Le) class, benzophenone (ベ Application ゾ Off エ ノ Application) class, triazine (ト リ ア ジ Application) class, salicylate (サ リ シ レ one ト) class, cumarin (Network マ リ Application) class, xanthene (キ サ Application テ Application) class, methoxy cinnamic acid (acid of メ ト キ シ ケ イ skin) class organic compound etc.
In addition, will revise under the situation that filter is made as one deck structure that mixes a plurality of colorants, light filter layer preferably forms by blue or green filter 20C, yellow filter 20Y, pinkish red filter 20M, the order of revising filter.
(the 11st execution mode)
In the present embodiment, illustrate except that the light incident side of the incident light of substrate, be that incident light incides in other zone the zone of photo detector, the imaging apparatus that other light outside the light that prevents to incide in the incident light photo detector incides the photomask of photo detector is set.
Figure 33 is the front elevation of configuration status the 1st example of the photomask that possesses in the imaging apparatus of expression present embodiment.
In this photomask 34, can use the correction filter that illustrates in the respective embodiments described above.That is, photomask 34 can be formed by the form method the same with above-mentioned various correction filters, can be formed by same material.
It is effective being subjected to The noise, can improving on the picture quality at the observed result that can prevent imaging apparatus 32 at the peripheral part configuration photomask 34 of effective pixel section 33 of imaging apparatus 32.Especially by using above-mentioned various correction filters, can the veiling glare of imaging apparatus 32 peripheries be reduced by the light of visible light wave band as photomask 34.
Figure 34 is the sectional view of configuration status the 2nd example of the photomask that possesses in the imaging apparatus of expression present embodiment.
The formation of this imaging apparatus shown in Figure 34 35 is the same with the imaging apparatus 1 of above-mentioned the 1st execution mode, but be characterised in that in other zone in the light incident side face of semiconductor substrate 4, except that the zone that light is taken into red photo detector 3R, green photo detector 3G, blue photo detector 3B, correction photo detector 3Blk configuration photomask 34.
Above-mentioned imaging apparatus 34,35 is being removed the light incident side of semiconductor substrate 4, is being in other zone of the photo detector open area that is taken into incident light, is configured in to have the photomask 34 that suppresses to see through characteristic under the visible light wave band.
In existing imaging apparatus, the light that incides part beyond the photo detector sometimes is spuious, becomes veiling glare.After this this veiling glare if incide photo detector, then becomes noise.In addition, if useless light incides the peripheral part of imaging apparatus, the peripheral part of photo detector, then these light become the reason of noise.
But, in the present embodiment, because configuration photomask 34, so be absorbed into the light that is mapped to the other parts except that photo detector.
Thus, can prevent that veiling glare and unwanted light from inciding photo detector, noise is reduced, the picture quality that is obtained by imaging apparatus 34,35 is improved.Especially using under the situation of correction filter as photomask 34, can the veiling glare of the periphery generation of photo detector reduced, can alleviate from the noise of photo detector periphery generation by the light of visible light wave band.
In addition, photomask 34 is not only applicable to above-mentioned the 1st execution mode, also applicable to other each execution mode.
Using under the situation of correction filter as photomask 34 this photomask 34 of the light transmission of the light of infrared portion and ultraviolet section.Therefore, in the present embodiment, at the photo detector circumferential arrangement photomask 34 of semiconductor substrate 4, and to these photomask 34 stacked absorption infrared ray and ultraviolet films.
Absorb in infrared ray and the ultraviolet film at this,, Master Cost is alleviated by using the resin that in the transparent resin that is used to form lenticule 8, has added infrared absorbent and ultra-violet absorber.
Thus, the infrared ray that can prevent to incide the part that is not photo detector becomes veiling glare with ultraviolet spuious, produces noise.
Utilizability on the industry
The present invention can be used to possess the field of the imaging apparatus of photo detector.
Claims
(according to the modification of the 19th of treaty)
1, (after revising) a kind of imaging apparatus possesses:
Filter is used for extracting the specific colouring component of incident light;
Photo detector is observed described incident light via described filter;
Revise filter, suppress to see through characteristic, in the long side wave section of the described visible light wave band of wavelength ratio, have having under the visible light wave band through characteristic;
Revise photo detector,, observe described incident light via described correction filter in order to revise the observed result that described photo detector obtains; With
Suppressing portion, be disposed at the light incident side of described photo detector and described correction photo detector, in wavelength region may as border side infrared portion, between visible light wave band and the infrared portion, have and suppress to see through characteristic, making described filter and the transmitance of described correction filter in infrared portion is par.
2, imaging apparatus according to claim 1 is characterized in that:
Described filter possesses:
Be used to extract the green filter of green component;
Be used to extract the blue filter of blue component; With
Be used to extract the red filter of red component,
Described photo detector possesses:
Observe the green photo detector of described incident light via described green filter;
Observe the blue photo detector of described incident light via described blue filter; With
Observe the red photo detector of described incident light via described red filter.
3, imaging apparatus according to claim 2 is characterized in that:
Described correction filter be the 1st component of the light filter that will be used for extracting green component with the 2nd component of the light filter that is used to extract blue component one of at least, overlap with the 3rd component of the light filter that is used to extract red component and constitute.
4, imaging apparatus according to claim 3 is characterized in that:
Described correction filter is the structure that overlaps described the 1st component of the light filter and described the 3rd component of the light filter.
5, imaging apparatus according to claim 3 is characterized in that:
Described correction filter is the structure that overlaps described the 2nd component of the light filter and described the 3rd component of the light filter.
6, (after revising) a kind of imaging apparatus possesses
Filter is used for extracting the specific colouring component of incident light;
Photo detector is observed described incident light via described filter;
Revise filter, suppress to see through characteristic, in the long side wave section of the described visible light wave band of wavelength ratio, have having under the visible light wave band through characteristic; With
Revise photo detector,, observe described incident light via described correction filter in order to revise the observed result that described photo detector obtains,
Adjust the transmitance of described filter and the transmitance of described correction filter, making the transmitance of the long side of wavelength ratio visible light wave band is par.
7, (after revising) imaging apparatus according to claim 6 is characterized in that:
Described filter possesses:
Be used to extract the green filter of green component;
Be used to extract the blue filter of blue component; With
Be used to extract the red filter of red component,
Described photo detector possesses:
Observe the green photo detector of described incident light via described green filter;
Observe the blue photo detector of described incident light via described blue filter; With
Observe the red photo detector of described incident light via described red filter,
Described correction filter be the 1st component of the light filter that will be used for extracting green component with the 2nd component of the light filter that is used to extract blue component one of at least, overlap with the 3rd component of the light filter that is used to extract red component and constitute,
Described green filter and described the 1st component of the light filter have inhibition and see through characteristic under the subband of the long side of the described visible light wave band of wavelength ratio.
8, imaging apparatus according to claim 7 is characterized in that:
Described green filter and described the 1st component of the light filter have the characteristic that suppresses the transmitance rising part in the long side wave section of the described visible light wave band of wavelength ratio.
9, imaging apparatus according to claim 7 is characterized in that:
Described green filter and described the 1st component of the light filter have the characteristic of the transmitance in the wave band that suppresses to comprise wavelength 780nm.
10, imaging apparatus according to claim 2 is characterized in that:
Described green filter, described blue filter, described red filter, described correction filter configuration ramify shape, formation face, and form the unit that look separates.
11, imaging apparatus according to claim 10 is characterized in that:
The area ratio of described green filter, described blue filter, described red filter, described correction filter is 4: 2: 2: 1.
12, imaging apparatus according to claim 10 is characterized in that:
Described look separation unit comprises the different multiple described correction filter of spectral characteristic.
13, (after revising) imaging apparatus according to claim 1 is characterized in that:
Described suppressing portion also has inhibition and sees through characteristic in red wavelength region may.
14, (after revising) imaging apparatus according to claim 1 is characterized in that:
Described suppressing portion has the characteristic that suppresses the transmitance riser portions in the long side wave section of the described visible light wave band of wavelength ratio.
15, (after revising) imaging apparatus according to claim 1 is characterized in that:
Described suppressing portion has the characteristic of the transmitance in the wave band that suppresses to comprise wavelength 780nm.
16, (after revising) imaging apparatus according to claim 1 is characterized in that:
Described suppressing portion is the lens that are provided in the plane of incidence of described incident light.
17, imaging apparatus according to claim 1 is characterized in that:
The observed result that observed result that obtains according to described photo detector and described correction photo detector obtain poor obtained the observed result of described specific colouring component.
18, (after revising) imaging apparatus according to claim 2 is characterized in that:
Described filter be used for extracting the 1st component of the light filter of incident light medium green component by optical superposition and be used to extract blue component the 2nd component of the light filter one of at least, constitute with the 3rd component of the light filter that is used to extract red component.
19, imaging apparatus according to claim 2 is characterized in that:
Also possesses operational part, from the observed data value that observes by described green photo detector, deduct the observed data value that observes by described correction photo detector, obtain revised green observed data value, from the observed data value that observes by described blue photo detector, deduct the observed data value that observes by described correction photo detector, obtain revised blue observed data value, from the observed data value that observes by described red photo detector, deduct the observed data value that observes by described correction photo detector, obtain revised red observed data value.
20, imaging apparatus according to claim 1 is characterized in that:
Described correction filter forms by the optical superposition of a plurality of looks.
21, imaging apparatus according to claim 1 is characterized in that:
Described correction filter forms by mixing a plurality of colorants.
22, imaging apparatus according to claim 1 is characterized in that:
Described correction filter forms by the filter of stacked a plurality of looks.
23, imaging apparatus according to claim 2 is characterized in that:
Also possess operational part, from the observed data value that observes by described red photo detector, deduct the observed data value that observes by described correction photo detector, and obtain the data value of the visible light band strength of the described incident light of expression.
24, (after revising) a kind of imaging apparatus is characterized in that,
Possess:
Filter is used for extracting the specific colouring component of incident light;
Photo detector is observed described incident light via described filter;
Revise filter, suppress to see through characteristic, in the long side wave section of the described visible light wave band of wavelength ratio, have having under the visible light wave band through characteristic; With
Revise photo detector,, observe described incident light via described correction filter in order to revise the observed result that described photo detector obtains,
Described filter possesses:
Be used to extract the yellow filter of yellow component;
Be used to extract the pinkish red filter of pinkish red component; With
Be used to extract the blue or green filter of blue or green component,
Described photo detector possesses:
Observe the yellow photo detector of described incident light via described yellow filter;
Observe the pinkish red photo detector of described incident light via described pinkish red filter; With
Observe the blue or green photo detector of described incident light via described blue or green filter,
Described correction filter forms by blue or green component of optical superposition and red component.
25, (after revising) imaging apparatus according to claim 24 is characterized in that:
Also possess:
Yellow operational part from the observed data value that is observed by described yellow photo detector, deducts the observed data value that is observed by described correction photo detector, obtains revised yellow observed data value;
Pinkish red operational part from the observed data value that is observed by described pinkish red photo detector, deducts the observed data value that is observed by described correction photo detector, obtains revised pinkish red observed data value;
Blue or green operational part from the observed data value that is observed by described blue or green photo detector, deducts the observed data value that is observed by described correction photo detector, obtains revised blue or green observed data value; With
The three primary colors operational part according to described revised yellow observed data value, described revised pinkish red observed data value, described revised blue or green observed data value, is obtained the trichromatic blue observed data value as light, green observed data value, red observed data value.
26, (after revising) a kind of imaging apparatus is characterized in that,
Possess:
Filter is used for extracting the specific colouring component of incident light;
Photo detector is observed described incident light via described filter;
Revise filter, suppress to see through characteristic, in the long side wave section of the described visible light wave band of wavelength ratio, have having under the visible light wave band through characteristic; With
Revise photo detector,, observe described incident light via described correction filter in order to revise the observed result that described photo detector obtains,
Described filter possesses:
Be used to extract the yellow filter of yellow component;
Be used to extract the pinkish red filter of pinkish red component; With
Be used to extract the blue or green filter of blue or green component,
Described photo detector possesses:
Observe the yellow photo detector of described incident light via described yellow filter;
Observe the pinkish red photo detector of described incident light via described pinkish red filter; With
Observe the blue or green photo detector of described incident light via described blue or green filter,
Described correction filter forms by purple component of optical superposition and red component.
27, imaging apparatus according to claim 24 is characterized in that:
Described yellow filter, described pinkish red filter, described blue or green filter, described correction filter configuration ramify shape, formation face, and form the unit that look separates.
28, imaging apparatus according to claim 24 is characterized in that:
Also possess lens, this lens configuration is in the light incident side of described filter and described correction filter, suppress and the visible light wave band between the infrared portion of border side in transmitance.
29, imaging apparatus according to claim 24 is characterized in that:
Also possess resin bed, this resin bed one of is disposed in the light incident side of described filter and described correction filter and the light emitting side at least, suppress and the visible light wave band between the infrared portion of border side in transmitance.
30, imaging apparatus according to claim 24 is characterized in that:
In described yellow filter and described pinkish red filter, the colorant of the transmitance in the infrared portion of the border side between adding inhibition and the visible light wave band.
31, imaging apparatus according to claim 1 is characterized in that:
Also possess photomask, be used for the reflection of light that suppresses described incident light, is not directly incident on described photo detector.
32, imaging apparatus according to claim 31 is characterized in that:
The substrate that also possesses the described photo detector of configuration,
Described photomask be provided to as the incident side of the described incident light of described substrate, except that described incident light is incided in other zone the zone of described photo detector.
33, imaging apparatus according to claim 31 is characterized in that:
Described photomask has inhibition and sees through characteristic under the visible light wave band.
Claims (33)
1, a kind of imaging apparatus possesses:
Filter is used for extracting the specific colouring component of incident light;
Photo detector is observed described incident light via described filter;
Revise filter, suppress to see through characteristic, in the long side wave section of the described visible light wave band of wavelength ratio, have having under the visible light wave band through characteristic; With
Revise photo detector,, observe described incident light via described correction filter in order to revise the observed result that described photo detector obtains.
2, imaging apparatus according to claim 1 is characterized in that:
Described filter possesses:
Be used to extract the green filter of green component;
Be used to extract the blue filter of blue component; With
Be used to extract the red filter of red component,
Described photo detector possesses:
Observe the green photo detector of described incident light via described green filter;
Observe the blue photo detector of described incident light via described blue filter; With
Observe the red photo detector of described incident light via described red filter.
3, imaging apparatus according to claim 2 is characterized in that:
Described correction filter be the 1st component of the light filter that will be used for extracting green component with the 2nd component of the light filter that is used to extract blue component one of at least, overlap with the 3rd component of the light filter that is used to extract red component and constitute.
4, imaging apparatus according to claim 3 is characterized in that:
Described correction filter is the structure that overlaps described the 1st component of the light filter and described the 3rd component of the light filter.
5, imaging apparatus according to claim 3 is characterized in that:
Described correction filter is the structure that overlaps described the 2nd component of the light filter and described the 3rd component of the light filter.
6, imaging apparatus according to claim 1 is characterized in that:
Adjust the transmitance of described filter and the transmitance of described correction filter, making the transmitance of the long side of wavelength ratio visible light wave band is par.
7, imaging apparatus according to claim 3 is characterized in that:
Described green filter and described the 1st component of the light filter have inhibition and see through characteristic under the subband of the long side of the described visible light wave band of wavelength ratio.
8, imaging apparatus according to claim 7 is characterized in that:
Described green filter and described the 1st component of the light filter have the characteristic that suppresses the transmitance rising part in the long side wave section of the described visible light wave band of wavelength ratio.
9, imaging apparatus according to claim 7 is characterized in that:
Described green filter and described the 1st component of the light filter have the characteristic of the transmitance in the wave band that suppresses to comprise wavelength 780nm.
10, imaging apparatus according to claim 2 is characterized in that:
Described green filter, described blue filter, described red filter, described correction filter configuration ramify shape, formation face, and form the unit that look separates.
11, imaging apparatus according to claim 10 is characterized in that:
The area ratio of described green filter, described blue filter, described red filter, described correction filter is 4: 2: 2: 1.
12, imaging apparatus according to claim 10 is characterized in that:
Described look separation unit comprises the different multiple described correction filter of spectral characteristic.
13, imaging apparatus according to claim 1 is characterized in that:
Also possess suppressing portion, this suppressing portion is disposed at the light incident side of described photo detector and described correction photo detector, the subband of the long side of the described visible light wave band of wavelength ratio is had suppress to see through characteristic.
14, imaging apparatus according to claim 13 is characterized in that:
Described suppressing portion has the characteristic that suppresses the transmitance riser portions in the long side wave section of the described visible light wave band of wavelength ratio.
15, imaging apparatus according to claim 13 is characterized in that:
Described suppressing portion has the characteristic of the transmitance in the wave band that suppresses to comprise wavelength 780nm.
16, imaging apparatus according to claim 13 is characterized in that:
Described suppressing portion is the lens that are provided in the plane of incidence of described incident light.
17, imaging apparatus according to claim 1 is characterized in that:
The observed result that observed result that obtains according to described photo detector and described correction photo detector obtain poor obtained the observed result of described specific colouring component.
18, a kind of imaging apparatus possesses
Filter, by optical superposition be used for extracting the 1st component of the light filter of incident light medium green component and be used to extract blue component the 2nd component of the light filter one of at least, constitute with the 3rd component of the light filter that is used to extract red component; With
Photo detector is observed described incident light via described filter.
19, imaging apparatus according to claim 2 is characterized in that:
Also possesses operational part, from the observed data value that observes by described green photo detector, deduct the observed data value that observes by described correction photo detector, obtain revised green observed data value, from the observed data value that observes by described blue photo detector, deduct the observed data value that observes by described correction photo detector, obtain revised blue observed data value, from the observed data value that observes by described red photo detector, deduct the observed data value that observes by described correction photo detector, obtain revised red observed data value.
20, imaging apparatus according to claim 1 is characterized in that:
Described correction filter forms by the optical superposition of a plurality of looks.
21, imaging apparatus according to claim 1 is characterized in that:
Described correction filter forms by mixing a plurality of colorants.
22, imaging apparatus according to claim 1 is characterized in that:
Described correction filter forms by the filter of stacked a plurality of looks.
23, imaging apparatus according to claim 2 is characterized in that:
Also possess operational part, from the observed data value that observes by described red photo detector, deduct the observed data value that observes by described correction photo detector, and obtain the data value of the visible light band strength of the described incident light of expression.
24, imaging apparatus according to claim 1 is characterized in that:
Described filter possesses:
Be used to extract the yellow filter of yellow component;
Be used to extract the pinkish red filter of pinkish red component; With
Be used to extract the blue or green filter of blue or green component,
Described photo detector possesses:
Observe the yellow photo detector of described incident light via described yellow filter;
Observe the pinkish red photo detector of described incident light via described pinkish red filter; With
Observe the blue or green photo detector of described incident light via described blue or green filter.
25, imaging apparatus according to claim 24 is characterized in that:
Described correction filter forms by blue or green component of optical superposition and red component.
26, imaging apparatus according to claim 24 is characterized in that:
Described correction filter forms by purple component of optical superposition and red component.
27, imaging apparatus according to claim 24 is characterized in that:
Described yellow filter, described pinkish red filter, described blue or green filter, described correction filter configuration ramify shape, formation face, and form the unit that look separates.
28, imaging apparatus according to claim 24 is characterized in that:
Also possess lens, this lens configuration is in the light incident side of described filter and described correction filter, suppress and the visible light wave band between the infrared portion of border side in transmitance.
29, imaging apparatus according to claim 24 is characterized in that:
Also possess resin bed, this resin bed one of is disposed in the light incident side of described filter and described correction filter and the light emitting side at least, suppress and the visible light wave band between the infrared portion of border side in transmitance.
30, imaging apparatus according to claim 24 is characterized in that:
In described yellow filter and described pinkish red filter, the colorant of the transmitance in the infrared portion of the border side between adding inhibition and the visible light wave band.
31, imaging apparatus according to claim 1 is characterized in that:
Also possess photomask, be used for the reflection of light that suppresses described incident light, is not directly incident on described photo detector.
32, imaging apparatus according to claim 31 is characterized in that:
The substrate that also possesses the described photo detector of configuration,
Described photomask be provided to as the incident side of the described incident light of described substrate, except that described incident light is incided in other zone the zone of described photo detector.
33, imaging apparatus according to claim 31 is characterized in that:
Described photomask has inhibition and sees through characteristic under the visible light wave band.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004193151 | 2004-06-30 | ||
| JP193151/2004 | 2004-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1957473A true CN1957473A (en) | 2007-05-02 |
| CN100505277C CN100505277C (en) | 2009-06-24 |
Family
ID=35782618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005800164335A Expired - Fee Related CN100505277C (en) | 2004-06-30 | 2005-06-20 | Image pick-up component |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7394059B2 (en) |
| EP (1) | EP1788627A1 (en) |
| JP (1) | JP5012019B2 (en) |
| KR (1) | KR100825550B1 (en) |
| CN (1) | CN100505277C (en) |
| TW (1) | TWI387789B (en) |
| WO (1) | WO2006003807A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102623468A (en) * | 2011-01-26 | 2012-08-01 | 美士美积体产品公司 | Light sensor having transparent substrate and through-substrate vias |
| CN105359517A (en) * | 2013-06-26 | 2016-02-24 | 奥林巴斯株式会社 | Image processing apparatus and image processing method |
| CN105628190A (en) * | 2014-10-30 | 2016-06-01 | 杭州远方光电信息股份有限公司 | Method and device for measuring optical radiation on the basis of light-filtering units |
| CN105826335A (en) * | 2015-01-26 | 2016-08-03 | 株式会社东芝 | Solid-state image pickup device |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4984634B2 (en) | 2005-07-21 | 2012-07-25 | ソニー株式会社 | Physical information acquisition method and physical information acquisition device |
| JP2007141876A (en) * | 2005-11-14 | 2007-06-07 | Sony Corp | Semiconductor imaging device and its fabrication process |
| JP5194363B2 (en) * | 2006-01-20 | 2013-05-08 | 凸版印刷株式会社 | Optical sensor |
| KR101281888B1 (en) * | 2006-06-30 | 2013-07-03 | 엘지디스플레이 주식회사 | organic electro-luminescence display device and method for fabricating the same |
| DE102006032047A1 (en) * | 2006-07-10 | 2008-01-24 | Schott Ag | Optoelectronic component e.g. image signal-detecting component, manufacturing method for e.g. digital fixed image camera, involves positioning components either one by one or in groups relative to position of associated components of wafer |
| JP5261892B2 (en) * | 2006-07-11 | 2013-08-14 | 凸版印刷株式会社 | Infrared region optical sensor, filter, and filter manufacturing method |
| JP4396684B2 (en) * | 2006-10-04 | 2010-01-13 | ソニー株式会社 | Method for manufacturing solid-state imaging device |
| US8013289B2 (en) | 2006-11-15 | 2011-09-06 | Ether Precision, Inc. | Lens array block for image capturing unit and methods of fabrication |
| US7960807B2 (en) * | 2007-02-09 | 2011-06-14 | Intersil Americas Inc. | Ambient light detectors using conventional CMOS image sensor process |
| WO2008100909A2 (en) * | 2007-02-12 | 2008-08-21 | Iskoot, Inc. | Methods and systems for performing authentication and authorization in a user-device environment |
| JP2008203544A (en) * | 2007-02-20 | 2008-09-04 | Toppan Printing Co Ltd | Filter for optical sensor and optical sensor |
| JP2008288629A (en) | 2007-05-15 | 2008-11-27 | Sony Corp | Image signal processing apparatus, imaging device, image signal processing method, and computer program |
| FR2929477B1 (en) * | 2008-03-25 | 2010-04-09 | E2V Semiconductors | COLOR AND INFRARED SIMULTANEOUS CAMERA |
| US7813043B2 (en) | 2008-08-15 | 2010-10-12 | Ether Precision, Inc. | Lens assembly and method of manufacture |
| WO2010050297A1 (en) * | 2008-10-31 | 2010-05-06 | コニカミノルタオプト株式会社 | Imaging lens, imaging lens unit, and imaging device |
| US8090250B2 (en) * | 2009-06-23 | 2012-01-03 | Ether Precision, Inc. | Imaging device with focus offset compensation |
| JP2011065133A (en) | 2009-08-20 | 2011-03-31 | Toppan Printing Co Ltd | Liquid crystal display device, black matrix substrate and color filter substrate |
| US8492699B2 (en) | 2009-09-22 | 2013-07-23 | Intersil Americas Inc. | Photodetectors useful as ambient light sensors having an optical filter rejecting a portion of infrared light |
| KR101648201B1 (en) * | 2009-11-04 | 2016-08-12 | 삼성전자주식회사 | Image sensor and for manufacturing the same |
| KR20110061677A (en) * | 2009-12-02 | 2011-06-10 | 삼성전자주식회사 | Image sensor and for manufacturing the same |
| KR20110140010A (en) * | 2010-06-24 | 2011-12-30 | 삼성전자주식회사 | Image sensor using near infrared signal |
| JP5655441B2 (en) * | 2010-09-02 | 2015-01-21 | 株式会社リコー | Image sensor, imaging device using the image sensor, and in-vehicle monitoring device using the imaging device |
| US9591275B2 (en) * | 2010-09-28 | 2017-03-07 | BAE Systems Imaging Solutions Inc. | Hybrid camera sensor for night vision and day color vision |
| JP5672989B2 (en) * | 2010-11-05 | 2015-02-18 | ソニー株式会社 | Imaging device |
| US8637907B2 (en) | 2011-06-13 | 2014-01-28 | Intersil Americas LLC | Optical sensors for detecting relative motion and/or position and methods and systems for using such optical sensors |
| US8836064B2 (en) | 2012-03-20 | 2014-09-16 | Intersil Americas LLC | Enhanced lift-off techniques for use with dielectric optical coatings and light sensors produced therefrom |
| US8779542B2 (en) | 2012-11-21 | 2014-07-15 | Intersil Americas LLC | Photodetectors useful as ambient light sensors and methods for use in manufacturing the same |
| KR102071325B1 (en) * | 2013-09-27 | 2020-04-02 | 매그나칩 반도체 유한회사 | Optical sensor sensing illuminance and proximity |
| WO2015166779A1 (en) | 2014-05-01 | 2015-11-05 | 富士フイルム株式会社 | Coloring composition, film, color filter, method for forming pattern, method for producing color filter, solid-state imaging device, and infrared sensor |
| JP6344967B2 (en) * | 2014-05-08 | 2018-06-20 | 東洋インキＳｃホールディングス株式会社 | Photosensitive coloring composition, brightness adjusting layer, color filter, and color display device |
| JP2015228394A (en) * | 2014-05-30 | 2015-12-17 | ソニー株式会社 | Solid-state image pickup device, electronic apparatus, and method for manufacturing solid-state image pickup device |
| US9992469B2 (en) | 2014-06-24 | 2018-06-05 | Hitachi Maxell, Ltd. | Imaging processing device and imaging processing method |
| JP2016096423A (en) * | 2014-11-13 | 2016-05-26 | ジェコー株式会社 | Imaging apparatus |
| JP6616571B2 (en) * | 2014-12-12 | 2019-12-04 | ローム株式会社 | Photodetector and electronic device |
| JP6563243B2 (en) * | 2015-04-28 | 2019-08-21 | マクセル株式会社 | Imaging apparatus and camera system |
| TWI723994B (en) | 2015-05-22 | 2021-04-11 | 日商富士軟片股份有限公司 | Colored composition, film, color filter, pattern forming method, method of manufacturing color filter, solid-state imaging element, and infrared sensor |
| CN107438148B (en) * | 2016-05-27 | 2021-08-24 | 松下知识产权经营株式会社 | Image pickup system |
| US20180210997A1 (en) * | 2017-01-26 | 2018-07-26 | Wieden + Kennedy, Inc. | Object tracking for design image projection |
| JP7011662B2 (en) | 2017-08-22 | 2022-01-26 | 富士フイルム株式会社 | Structure, manufacturing method of structure, composition for forming absorption layer, solid-state image sensor and image display device |
| JP7331490B2 (en) | 2019-06-25 | 2023-08-23 | 株式会社リコー | Solid-state imaging device, image reading device, and image forming device |
| JP2020024228A (en) * | 2019-11-08 | 2020-02-13 | ローム株式会社 | Light detecting device and electronic apparatus |
| CN110970479A (en) * | 2019-12-12 | 2020-04-07 | 捷开通讯(深圳)有限公司 | Display screen and terminal |
| US20240162261A1 (en) * | 2021-03-10 | 2024-05-16 | Sony Semiconductor Solutions Corporation | Light detection element |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6373204A (en) | 1986-09-17 | 1988-04-02 | Mitsubishi Electric Corp | Color image pickup element |
| US4878113A (en) * | 1987-08-11 | 1989-10-31 | Olympus Optical Co., Ltd. | Endoscope apparatus |
| JP3227249B2 (en) * | 1993-01-01 | 2001-11-12 | キヤノン株式会社 | Image sensor |
| JP3083013B2 (en) * | 1993-01-19 | 2000-09-04 | キヤノン株式会社 | Image sensor and image information processing device |
| JPH1065135A (en) * | 1996-05-30 | 1998-03-06 | Toshiba Corp | Solid-state image pick-up device and image reader using the same |
| JP2000019322A (en) | 1998-07-07 | 2000-01-21 | Kureha Chem Ind Co Ltd | Color purity correction filter, solid-state image pickup element, color image pickup device, camera and scanner |
| TW423252B (en) * | 1998-07-30 | 2001-02-21 | Intel Corp | Infrared correction system |
| US6759646B1 (en) * | 1998-11-24 | 2004-07-06 | Intel Corporation | Color interpolation for a four color mosaic pattern |
| JP4279403B2 (en) * | 1999-06-15 | 2009-06-17 | 富士フイルム株式会社 | Solid-state imaging device and method for manufacturing the same |
| WO2002060185A1 (en) * | 2001-01-23 | 2002-08-01 | Seiko Epson Corporation | Image input device and image input method |
| KR100748344B1 (en) | 2001-11-29 | 2007-08-09 | 매그나칩 반도체 유한회사 | Test pattern of image sensor, manufacturing the same and test method |
| JP4286123B2 (en) * | 2003-12-22 | 2009-06-24 | 三洋電機株式会社 | Color image sensor and color signal processing circuit |
-
2005
- 2005-06-20 CN CNB2005800164335A patent/CN100505277C/en not_active Expired - Fee Related
- 2005-06-20 EP EP05751395A patent/EP1788627A1/en not_active Withdrawn
- 2005-06-20 WO PCT/JP2005/011275 patent/WO2006003807A1/en not_active Application Discontinuation
- 2005-06-20 JP JP2006519608A patent/JP5012019B2/en active Active
- 2005-06-20 KR KR1020067024382A patent/KR100825550B1/en active IP Right Grant
- 2005-06-28 TW TW094121549A patent/TWI387789B/en active
-
2006
- 2006-11-01 US US11/590,824 patent/US7394059B2/en not_active Expired - Fee Related
-
2007
- 2007-11-29 US US11/987,324 patent/US7498562B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102623468A (en) * | 2011-01-26 | 2012-08-01 | 美士美积体产品公司 | Light sensor having transparent substrate and through-substrate vias |
| CN105359517A (en) * | 2013-06-26 | 2016-02-24 | 奥林巴斯株式会社 | Image processing apparatus and image processing method |
| CN105359517B (en) * | 2013-06-26 | 2017-04-26 | 奥林巴斯株式会社 | Image processing apparatus and image processing method |
| CN105628190A (en) * | 2014-10-30 | 2016-06-01 | 杭州远方光电信息股份有限公司 | Method and device for measuring optical radiation on the basis of light-filtering units |
| CN105826335A (en) * | 2015-01-26 | 2016-08-03 | 株式会社东芝 | Solid-state image pickup device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2006003807A1 (en) | 2006-01-12 |
| US7394059B2 (en) | 2008-07-01 |
| CN100505277C (en) | 2009-06-24 |
| US20070045517A1 (en) | 2007-03-01 |
| US7498562B2 (en) | 2009-03-03 |
| KR100825550B1 (en) | 2008-04-25 |
| TW200608061A (en) | 2006-03-01 |
| JPWO2006003807A1 (en) | 2008-04-17 |
| US20080087804A1 (en) | 2008-04-17 |
| TWI387789B (en) | 2013-03-01 |
| KR20070029710A (en) | 2007-03-14 |
| EP1788627A1 (en) | 2007-05-23 |
| JP5012019B2 (en) | 2012-08-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1957473A (en) | Image pick-up component | |
| CN1189773C (en) | Photographical lens system | |
| CN1877867A (en) | Solid-state image sensor and manufacturing method thereof | |
| CN1834717A (en) | Image pickup lens, image pickup apparatus, and mobile terminal provided with image pickup apparatus | |
| CN1957281A (en) | Image pick-up lens, image pick-up unit and portable terminal | |
| CN1475828A (en) | Picture pickup lens, picture pickup device and portable terminal apparatus | |
| CN1579022A (en) | Solid-state imaging device and manufacturing method therefor | |
| CN1538528A (en) | Solid-state imaging device, signal processing device, camera and spectral device | |
| CN1215135C (en) | Ink set and ink jet recording method | |
| CN1265227C (en) | Optical imaging system and reader therewith | |
| CN1451987A (en) | Small camera lens, camera unit and portable terminal provided with them | |
| CN1285943C (en) | Optical systems with wavelength selective devices | |
| CN1122864C (en) | Projecting lenses and projector therewith | |
| CN101043046A (en) | Solid-state image pickup device | |
| CN101044622A (en) | Imaging element | |
| CN1576941A (en) | Imaging lens and imaging device | |
| CN101076126A (en) | Imaging apparatus and method, and imaging device | |
| CN1573407A (en) | Small imaging lens and imaging device | |
| CN1851519A (en) | Image pickup lens, image pickup apparatus and mobile terminal | |
| CN1576939A (en) | Image pick-up lens, image pick-up unit, and mobile terminal provided with this image pick-up unit | |
| CN1265745A (en) | Objective of endoscope | |
| CN1638136A (en) | Photodetector | |
| CN1942803A (en) | Zoom lens and imaging device | |
| CN1690757A (en) | Imaging lens | |
| CN1900755A (en) | Zoom lens and image pickup apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090624 Termination date: 20100620 |