CN1949030A

CN1949030A - UV solidifying radiation device

Info

Publication number: CN1949030A
Application number: CN 200610053960
Authority: CN
Inventors: 郑晓东; 秦文红
Original assignee: Zhejiang University ZJU
Current assignee: Zhejiang University ZJU
Priority date: 2006-10-25
Filing date: 2006-10-25
Publication date: 2007-04-18
Anticipated expiration: 2026-10-25
Also published as: CN100403094C

Abstract

The invention relates to optics, optoelectronic and microelectronic device and ultraviolet solidifying irradiation unit. It includes high pressure discharge light source, ellipsoid light collecting reflecting mirror, light pipe, projector lens set. The luminous point high pressure discharge light source is at the first focus of the ellipsoid light collecting reflecting mirror which has same optical axis with the light pipe incidence end. Its features are that it sets light combining lens between the projection lens device and the irradiated work piece interface; the ultraviolet light incidence end of the light pipe is at the second focus of the ellipsoid light collecting reflecting mirror. The invention has the advantages of simple structure, low cost, safety, increasing efficiency for solar energy utilization, directly observing processed work piece surface to make its precise adjusting and alignment convenient.

Description

UV solidifying radiation device

Technical field

The present invention relates to the UV solidifying radiation device of optics, photoelectron and microelectronic component gummed and other processing usefulness.

Technical background

In the prior art, the technology of utilizing ultraviolet light to carry out surface treatment and light-sensitive emulsion curing has the working (machining) efficiency height, the location accurately, series of advantages such as non-volatility solvent, and be widely used in scientific research, exploitation and the production field of optics, photoelectron, microelectronic component.In these courses of work, when two parts gummed is fixed together, normally behind cemented surface place coating UV photosensitive glue, utilize instruments such as microscope, centerscope observe and adjust glue together the relative position of device, the relative position that makes parts is with after technological requirement is consistent, with the UV-irradiation cemented surface photosensitive binder is solidified rapidly, two or more parts are fixed together exactly.

In order to observe the situation on gummed surface, a kind of method is to be provided with to observe in the direction over against the gummed surface use optical system, and the ultraviolet light that solidifies usefulness is sent to the oblique upper of shadow surface by quartz or liquid core photoconductive tube, shines the workpiece face from oblique upper.The Jap.P. spy opens the disclosed device of 2006-176653 and has just adopted this method.Light can be dispersed after photoconductive tube penetrates, and the beam divergence angle of general silica fibre is about 22 degree, and the angle of divergence of liquid-core optical fibre reaches 40 degree or bigger.For less workpiece, the light after dispersing has only sub-fraction by utilization that workpiece receives, and optical energy utilization efficiency is very low, and the irradiance distribution that produces on plane of illumination is also very inhomogeneous.In order to improve the efficiency of light energy utilization and the irradiance homogeneity of improving on the plane of illumination, the Jap.P. spy open proposed in the 2001-2501409-light irradiation device a kind of utilize two ends for the rod-shaped lens of sphere with the outgoing end face projection imaging of the optical fiber method to the plane of illumination, improve the efficiency of light energy utilization greatly, and can on plane of illumination, obtain good irradiance homogeneity.Its shortcoming is because the stopping of projection lens part, can't observe plane of illumination simultaneously and the position of device is accurately adjusted when reality is shone.

Summary of the invention

The purpose of this invention is to provide a kind of reasonable in design, simple in structure, easy to use, safe, can either utilize the processed surface of visible light Direct observation workpiece, workpiece is accurately adjusted, aimed at, can high-level efficiency assemble ultraviolet light again, on plane of illumination, produce the evenly UV solidifying radiation device of illumination.

The objective of the invention is to adopt such technical solution to realize: it comprises high-pressure discharge light source, ellipsoid light harvesting catoptron, light pipe, projecting lens apparatus and the plane of illumination that sets gradually, the luminous point of described high-pressure discharge light source is positioned at the first focus place of ellipsoid light harvesting catoptron, the same optical axis of incident end of described ellipsoid light harvesting catoptron and light pipe is characterized in that being provided with between described projecting lens apparatus and the illuminated surface of the work and closes light microscopic.

Because the present invention has adopted photoconductive tube, projecting lens apparatus and has closed the structure that light microscopic matches, thereby the light that can make the photoconductive tube transmission is through projecting lens apparatus with close light microscopic and effectively assemble, and shine on the illuminated workpiece, it has overcome light and has directly dispersed deficiency after the fibre bundle outgoing, improved the efficiency of light energy utilization, reduced ultraviolet light and leaked the injury that may bring operating personnel; Closing being provided with of light microscopic can be with visible light and the photosynthetic irradiation system that becomes the axle of sharing the same light of ultra-violet curing, can realize high-level efficiency, evenly can observe directly illuminated parts by closing light microscopic in the illumination, the position and the center of accurate adjustment and aligning parts, photoconductive tube adopts polygonal bar-shaped even light microscopic, can omit expensive silica fibre, save user's use cost greatly.

Below in conjunction with the drawings and specific embodiments, the invention will be further described.

Description of drawings

Fig. 1 is a structural representation of the present invention

Fig. 2 is a photoconductive tube structural representation of the present invention

Fig. 3 is the regular hexagon hollow prism synoptic diagram of photoconductive tube of the present invention

Fig. 4 is the solid prism synoptic diagram of the regular hexagon of photoconductive tube of the present invention

Fig. 5 is a light-combining prism structural representation of the present invention

Fig. 6 is the light reflection mirror structural representation that closes of the present invention

Fig. 7 is to use the imaging and the uniform illumination distribution schematic diagram of generation of the present invention

Fig. 8 is spectral reflectivity and the wavelength relationship curve synoptic diagram that the present invention closes light microscopic

The drawing reference numeral explanation: 1-high-pressure discharge light source, 2-ellipsoid light harvesting catoptron, 3-light pipe, 4-projecting lens apparatus, 5-entrance port, 6-exit portal, 7-close light microscopic, 8-visible light entrance port, 9-light-combining prism, 10-mirror body, the synthetic optical emission exit of 11-, the illuminated surface of the work of 12-, 13-ultraviolet light entrance port, 14-exit end, 15-ultraviolet light incident side, 16-lens barrel, 17-locating ring, 18,19-right-angle prism, 20-dichromatism reflectance coating, 21-plane mirror.

Embodiment

With reference to Fig. 1: the present invention includes the high-pressure discharge light source 1, ellipsoid light harvesting catoptron 2, light pipe 3 and the projecting lens apparatus 4 that set gradually, the luminous point of described high-pressure discharge light source 1 is positioned at the first focus place of ellipsoid light harvesting catoptron 2, described ellipsoid light harvesting catoptron 2 and light pipe 3 same optical axises, described projecting lens apparatus 4 is respectively with photoconductive tube 3 with close light microscopic 7 and match, and the ultraviolet light incident side 15 of described photoconductive tube 3 is in second focus area of ellipsoid light harvesting reflective mirror 2.

In Fig. 1, Fig. 5 and Fig. 6: described high-pressure discharge light source 1 can adopt the high pressure mercury shot arc lamp; Inside surface at described ellipsoid light harvesting catoptron 2 is coated with selective reflection film, in order to reflect to solidifying and the effective ultraviolet radiant light of surface treatment, see through visible and infrared radiating light, the ultraviolet light entrance port 5 of described projecting lens apparatus 4 is corresponding with the exit end 14 of photoconductive tube 3, the exit portal 6 of described projecting lens apparatus 4 is corresponding with the ultraviolet light entrance port 13 of closing light microscopic 7, the even illumination projection imaging that described projecting lens apparatus 4 can form photoconductive tube 3 exit ends 14 projects closes light microscopic 7, the described light microscopic 7 that closes is that a kind of in light microscopic and the light-combining prism 9 closed on the plane, light microscopic is closed mainly by dichromatism reflectance coating 20 and plane mirror 21 be combined intos in described plane, and dichromatism reflective membrane 20 is plated in the surface of plane mirror 21; Described light-combining prism 9 is mainly formed by two right-angle prisms, 18,19 gummeds, is coated with dichromatism reflectance coating 20 on the inclined-plane of a right-angle prism therein; Light microscopic is closed on described plane and light-combining prism 9 can match with mirror body 10, on mirror body 10, be provided with ultraviolet light entrance port 13, visible light entrance port 8 and synthetic optical emission exit 11, the incident end 15 of described photoconductive tube 3 be positioned at ellipsoid light harvesting reflective mirror 2 second focus ± the 3mm regional extent.Described synthetic optical emission exit 11 and visible light entrance port 8 are positioned at the both sides up and down of light-combining prism 9;

The effect of described light-combining prism 9 is ultraviolet lights that reflection participates in ultra-violet curing, sees through to adjust, aim at the visible light of observing usefulness; For visible light, light-combining prism 9 is equivalent to the parallel flat of a printing opacity, and the operator can be when observing, use alignment device to see through light-combining prism 9 Direct observation and adjust irradiated gummed parts.

It is identical with the effect of light-combining prism 9 that the effect of light microscopic is closed on described plane, do not give unnecessary details at this.

With reference to Fig. 2, Fig. 3 and Fig. 4: described photoconductive tube 3 is provided with locating ring 17, and locating ring 17 matches with lens barrel 16 inwalls, and the effect of locating ring 17 is fixing light pipe 3 positions in lens barrel 16, and light pipe 3 is in the environment that medium is an air; During use, light forms total reflection on the interface of photoconductive tube 3 and air, and light can form Illumination Distribution very uniformly at the exit end 14 of light pipe 3 in light pipe 3 repeatedly after the reflection.

Described light pipe 3 is that the cross section of hollow reflecting prism 18, quartz or the glass material of a plurality of planes formation is polygonal solid even light prism 19, a kind of in fibre bundle that many optical fiber is formed or the liquid core, wherein the limit number of polygonal cross-section is a kind of in 3,4,6,8,10; Fibre bundle for many optical fiber compositions, can obtain evenly illumination by random alignment with optic fibre input end and output end position, promptly may be arranged in the edge of fibre bundle at output terminal at the optical fiber of fibre bundle input end center, and may be arranged in the center at output terminal at the optical fiber of input end marginal position, and same its position at input end and output terminal of optical fiber is corresponding at random.

The projection imaging of described projecting lens apparatus 4 is mainly determined that the exit end 14 of light pipe 3 should be similar with the shape of plane of illumination 12 in plane of illumination 12 imagings, sizableness by the sectional dimension of light pipe 3 and the ratio of illuminated surface of the work 12 areas.When illuminated surface of the work 12 is circle, should select the polygonal optical tunnel mirror of hexagonal or 8 dihedrals for use; When being rectangle, the rectangle optical tunnel mirror similar should be selected for use, the ultraviolet radiation that light source produces can be made full use of like this with illuminated surface of the work 12 as illuminated surface of the work 12.

With reference to Fig. 7: when the present invention uses hexagonal optical tunnel mirror as the leaded light mirror, in illuminated surface of the work 12 formed reflection ultraviolet radiant light uniform irradiation projection imagings.

With reference to Fig. 8: the present invention closes the spectral reflectivity and the wavelength relationship curve of light microscopic, and curve a reflects that closing light microscopic can see through visible light, light reflection ultraviolet situation; Curve b reflects the situation that light microscopic can see through ultraviolet light, reflect visible light of closing.

Claims

1, UV solidifying radiation device, comprise the high-pressure discharge light source, ellipsoid light harvesting catoptron, light pipe and the projection lens set that set gradually, the luminous point of described high-pressure discharge light source is positioned at the first focus place of ellipsoid light harvesting catoptron, described ellipsoid light harvesting catoptron and the same optical axis of light pipe incident end face is characterized in that being provided with between described projecting lens apparatus and the illuminated surface of the work and close light microscopic.

2, UV solidifying radiation device according to claim 1 is characterized in that the described light microscopic that closes by mirror body and light-combining prism and a kind of be combined into that closes in the light reflection mirror, is provided with ultraviolet light entrance port, visible light entrance port and synthetic optical emission exit on lens barrel.

3, UV solidifying radiation device according to claim 1 is characterized in that the described light microscopic that closes is that a kind of in light microscopic and the light-combining prism closed on the plane.

4, UV solidifying radiation device according to claim 3 is characterized in that described plane closes light microscopic mainly by dichromatism reflectance coating and plane mirror be combined into, and the dichromatism reflective membrane is plated in the surface of plane mirror.

5, UV solidifying radiation device according to claim 3 is characterized in that described light-combining prism is formed by two right-angle prism gummeds, is coated with the dichromatism reflectance coating on the inclined-plane of right-angle prism.

6, UV solidifying radiation device according to claim 1 is characterized in that described photoconductive tube is provided with locating ring, and locating ring matches with the lens barrel inwall.

7, UV solidifying radiation device according to claim 1 is characterized in that described light pipe is that hollow reflecting prism, cross section that a plurality of planes constitute are a kind of in the fibre bundle formed of polygonal solid even light prism, many optical fiber or the liquid core.

8, UV solidifying radiation device according to claim 5 is characterized in that described cross section is that the limit number of polygonal solid even light prism is a kind of in 3,4,6,8,10.