CN1939641B - Laser fusing device and method - Google Patents
Laser fusing device and method Download PDFInfo
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- CN1939641B CN1939641B CN2006101592863A CN200610159286A CN1939641B CN 1939641 B CN1939641 B CN 1939641B CN 2006101592863 A CN2006101592863 A CN 2006101592863A CN 200610159286 A CN200610159286 A CN 200610159286A CN 1939641 B CN1939641 B CN 1939641B
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Abstract
Disclosed is a laser welding equipment and a laser welding method, wherein satisfactory welding can be performed by allowing the irradiation position of a laser beam to move in a work during one pulse period. The laser welding equipment irradiates laser beam to the workpiece provided with a lid and a package to execute welding to seal the workpiece. A laser beam emitting part emits a pulse type laser beam on a prescribed cycle of pulse. An irradiation position change part receives the laser beam, and changes the position to be irradiated with the laser beam. Concretely, the irradiation position change part moves the position to be irradiated with the laser beam in the workpiece during one pulse period, so as to perform continuous welding. In this way, heating value per welding region is made low, thus weld marks can be reduced. Also, heating value applied to the whole of the work can be made low, thus influence exerted, e.g., on an electronic component in the work by the welding can be reduced. Further, the welding can be uniformly performed to welding regions without leaving a space, thus the gastightness of the work can be improved.
Description
Technical field
The present invention relates to by the workpiece illuminating laser beam being carried out the laser welding device and the laser welding method of welding.
Background technology
All the time, in the sealing of packaging of electronic parts parts such as quartzy element, semiconductor element, be by the lid illuminating laser beam being come welding (being laser welding) lid and packaging part.For example put down in writing the laser welding device that the laser beam (in other words, pulse laser) with impulse type carries out the welding of workpiece in the patent documentation 1 and 2.
Patent documentation 1: the spy opens flat 9-122956 communique
Patent documentation 2: the spy opens flat 11-245066 communique
Summary of the invention
The problem that solution is planned in invention
Yet, in above-mentioned patent documentation 1 and 2 technology of being put down in writing, carry out welding intermittently, thereby weld mark can become greatly sometimes, pays big heat to whole workpiece while the position of illuminating laser beam is moved with pulse laser.Thereby it is bad to produce welding sometimes, brings harmful effect for inner electronic unit.
The problem that the present invention plans to solve is an example with above-mentioned situation.Problem of the present invention provides and a kind ofly can the irradiation position of laser beam be moved, thereby carries out the laser welding device and the laser welding method of good welding.
Be used to solve the scheme of problem
The invention of technical scheme 1 record is a kind of by the workpiece irradiating laser that possesses lid and packaging part is carried out the laser welding device that welding seals above-mentioned workpiece, it is characterized in that possessing: by the laser beam outgoing portion of given pulse period outgoing laser beam; And the laser beam of having accepted from the outgoing of above-mentioned laser beam outgoing portion, the irradiating position changing section of the position of this laser beam of change irradiation, above-mentioned irradiating position changing section moves and contunuous wedling in above-mentioned workpiece in the position that makes the above-mentioned laser beam of irradiation during 1 pulse period.
The invention of technical scheme 8 records is a kind of by the workpiece irradiating laser that possesses lid and packaging part is carried out the laser welding method that welding seals above-mentioned workpiece, it is characterized in that possessing: by the laser beam outgoing operation of given pulse period outgoing laser beam; And accept outgoing above-mentioned laser beam, make the irradiating position changing operation of the position change of this laser beam of irradiation, in above-mentioned irradiating position changing operation, in above-mentioned workpiece, move and contunuous wedling in the position that makes the above-mentioned laser beam of irradiation during 1 pulse period.
Description of drawings
Fig. 1 is the figure that the summary of the related laser welding device of expression embodiments of the invention constitutes.
Fig. 2 is the figure of the concrete formation of expression workpiece.
The figure of state of the pallet of Fig. 3 is expression mounting workpiece.
Fig. 4 is the figure of the laser welding method that is used to illustrate that the 1st embodiment is related.
Fig. 5 is the figure of concrete example that is used to illustrate the method for control institute emitting laser bundle.
Fig. 6 is the figure of the laser welding method that is used to illustrate that the 2nd embodiment is related.
Fig. 7 is the figure that is used to illustrate pre-assembling welding process.
Fig. 8 is the figure that is used to illustrate the fixing means that adopts magnet.
Fig. 9 is the figure of the laser welding method that is used to illustrate that variation is related.
Label declaration
10 workpiece
The 10a lid
The 10b packaging part
20 pallets
30 bundle spots
35 laser beam beam emitters
36 transfer gauge head
100 laser welding devices
LB1, LB2 laser beam
The specific embodiment
In a preferred embodiment of this invention, possess by the workpiece irradiating laser that possesses lid and packaging part being carried out the laser welding device that welding seals above-mentioned workpiece: by the laser beam outgoing portion of given pulse period outgoing laser beam; And the laser beam of having accepted from the outgoing of above-mentioned laser beam outgoing portion, the irradiating position changing section of the position of this laser beam of change irradiation, above-mentioned irradiating position changing section moves and contunuous wedling in above-mentioned workpiece in the position that makes the above-mentioned laser beam of irradiation during 1 pulse period.
Above-mentioned laser welding device seals workpiece by the workpiece irradiating laser that possesses lid and packaging part is carried out welding.Laser beam outgoing portion is by the laser beam of given pulse period outgoing pulse type.Irradiating position changing section is accepted laser beam, the position of change illuminating laser beam.Specifically, irradiating position changing section makes the position of illuminating laser beam move and contunuous wedling in workpiece during 1 pulse period.That is, control and make it to export laser by per 1 pulse or a plurality of pulse.The heat in unit welding zone will diminish like this, thereby can reduce weld mark.Also have, the heat of paying to whole workpiece is reduced, thereby can reduce the influence that welding is paid the electronic unit in the workpiece etc.Also have, can to the welding zone need not the empty standard width of a room in an old-style house every and welding equably thereby can improve the air-tightness of workpiece.
In a mode of above-mentioned laser welding device, above-mentioned laser beam outgoing portion has for the necessary laser power of the above-mentioned workpiece of welding, and outgoing uniform laser beam of laser power in above-mentioned 1 pulse period.So just can make that the weld mark that forms is even effectively on lid.
In the another way of above-mentioned laser welding device, above-mentioned irradiating position changing section moves the position of the above-mentioned laser beam of irradiation during 1 pulse period, and feasible welding to 1 workpiece finishes.So just can carry out certain welding, and carry out welding then and there 1 workpiece to workpiece.
In the another way of above-mentioned laser welding device, above-mentioned irradiating position changing section moves the position of the above-mentioned laser beam of irradiation during 1 pulse period, makes at least the welding on 1 limit that should carry out the zone of welding to the formation of above-mentioned workpiece finish.
In this mode, above-mentioned irradiating position changing section moves the position of the above-mentioned laser beam of irradiation during 1 pulse period, makes that at least the welding to 1 limit constituting the zone (welding zone) that carry out welding finishes.For example, during 1 pulse period,, irradiation position is moved and carry out welding constituting 1 limit in welding zone.Change as the limit of welding object by each pulse period like this and carry out welding, thereby can suppress near the angle that heat accumulates in lid situation effectively.
In the another way of above-mentioned laser welding device, the position of the above-mentioned laser beam of above-mentioned irradiating position changing section change irradiation makes to form the related bundle spot of above-mentioned laser beam simultaneously on above-mentioned lid and above-mentioned packaging part two sides.
In this mode, formation is restrainted spot and is carried out welding on lid and packaging part two sides.Lid side will fusion like this, and since the temperature of packaging part rise can be to the lid transmission, the fusion effectively of the bottom surface of lid.Also have, because packaging part self is heated, the wetting quality of the sealing surface of packaging part will improve.Therefore, according to above-mentioned laser welding device, positively welding lid and packaging part.Have, in the occasion of having shone laser beam to the end of lid, the thermal diffusion on the lid is suppressed again, and can rise the temperature of the related lid of laser beam to be used for welding effectively, thereby can reduce the power output of laser beam.
In the another way of above-mentioned laser welding device,, be used to seal the welding of above-mentioned workpiece to being in the workpiece of the state that above-mentioned lid and above-mentioned packaging part assembled in advance.The lid that produces in the time of so just preventing to seal and the position deviation of packaging part, lid cursory, the conveyance workpiece of caused lid and packaging part such as melt the time vibration, impact the position deviation of caused lid and packaging part etc.That is,, can be used for the welding of the sealing of lid and packaging part rightly according to above-mentioned laser welding device.
In the another way of above-mentioned laser welding device, by above-mentioned lid being paid the related magnetic force of magnet, on above-mentioned packaging part, fix above-mentioned lid, and on the pallet of the above-mentioned workpiece of mounting, fix above-mentioned lid and above-mentioned packaging part.So just can be used for the welding of the sealing of lid and packaging part rightly.
In another embodiment of the present invention, possess by the workpiece irradiating laser that possesses lid and packaging part being carried out the laser welding method that welding seals above-mentioned workpiece: by the laser beam outgoing operation of the given above-mentioned laser beam of pulse period outgoing; And accept outgoing above-mentioned laser beam, make the irradiating position changing operation of the position change of this laser beam of irradiation, in above-mentioned irradiating position changing operation, in above-mentioned workpiece, move and contunuous wedling in the position that makes the above-mentioned laser beam of irradiation during 1 pulse period.
Embodiment
Followingly the preferred embodiments of the present invention are described with reference to accompanying drawing.
(formation of laser welding device)
The formation of the laser welding device that present embodiment is related at first is described.
Fig. 1 is the figure that the summary of the related laser welding device 100 of expression present embodiment constitutes.Laser welding device 100 mainly possesses laser beam beam emitter 35, transfers gauge head (ガ Le バ ノ ヘ Star De) 36 and pallet 20.Laser welding device 100 is devices that a plurality of workpiece 10 that are positioned on the pallet 20 are carried out welding.In addition, the hollow arrow among Fig. 1 is represented the direction that laser beam is advanced.
The state of the pallet 20 of the concrete formation of workpiece 10 and mounting workpiece 10 here, is described with Fig. 2 and Fig. 3.
Fig. 2 is the figure that amplifies expression workpiece 10.Particularly, the top figure of Fig. 2 (a) expression workpiece 10, the side view of Fig. 2 (b) expression workpiece 10, the cutaway view of the cutting line A1-A2 of Fig. 2 (c) expression in Fig. 2 (a).Workpiece 10 possesses the packaging part 10b and the electronic unit 10c of tabular lid 10a, case shape.Particularly, lid 10a is made of the Kovar alloy material of having implemented the Ni plating, 42 alloy materials, stainless steel, low contracted payment material (the Ag ロ one Network ラ Star De material) metal material of etc.ing, and packaging part 10b is by go up the ceramic material formation that employing Au etc. has implemented plating at the face that contact with lid 10a (hereinafter referred to as " face of weld " or " sealing surface ").Also have, the profile of lid 10a is littler than the profile of packaging part 10b.This is that lid 10a departs from packaging part 10b when being suppressed at the packaging part 10b lid 10a that gone up mounting.
Electronic unit 10c has element, piezoelectrics such as quartzy element, semiconductor element, is incorporated in the packaging part 10b.100 couples of lid 10a of above-mentioned laser welding device and packaging part 10b illuminating laser beam.So just lid 10a is fused to packaging part 10b and seals workpiece 10.
The figure of concrete example of the state of the pallet 20 of Fig. 3 is expression mounting workpiece 10.Particularly, Fig. 3 (a) expression mounting workpiece 10 pallet 20 above, the cutaway view of the cutting line B1-B2 of Fig. 3 (b) expression in Fig. 3 (a).Shown in Fig. 3 (a) and Fig. 3 (b), a plurality of workpiece were placed in a plurality of groove 20x that form on the pallet 20 in 10 years.For example, the workpiece 10 of 600 degree of mounting on pallet 20.
Get back to Fig. 1, describe for laser welding device 100.Laser beam beam emitter 35 is counted by given pulse period (promptly periodically), given returning, and outgoing laser beam LB1 exchanges gauge head 36 this laser beam of irradiation LB1.Specifically, laser beam beam emitter 35 possesses the waveform of the oscillator of the laser beam of oscillating impulse type, controlled controlling laser beam, the control device of output etc.Thereby, from 35 outgoing of laser beam beam emitter by the laser beam LB1 after the control device control.
Transfer gauge head 36 to accept laser beam LB1, the position of this laser beam of change irradiation LB1.Particularly, transfer gauge head 36 possess to the workpiece on the pallet 20 10 carry out image measurement video camera, based on the image measurement result come sweep mechanism, the reflection lasering beam of position correcting member, the scanning laser beam of the position of revisal irradiation speculum, make the collector lens of laser beam condensation etc.36 emitting laser bundle LB2 shine workpiece 10 from the accent gauge head, thereby carry out the welding of workpiece 10.Like this, laser beam beam emitter 35 works as laser beam outgoing portion, transfers gauge head 36 to work as irradiating position changing section.
In addition, in the present embodiment,, be used for the welding that lid 10a and packaging part 10b are sealed fully to being in the workpiece 10 under the state that lid 10a and packaging part 10b assembled in advance.About this pre-assembling, details aftermentioned.Have again, in the present embodiment, inserted magnetic bed for 20 times, lid 10a is paid the related magnetic force of magnet, make lid 10a be fixed in packaging part 10b, and make lid 10a and packaging part 10b be fixed in pallet 20 with magnet at pallet.That is, under the state of having fixed packaging part 10b and pallet 20 by magnet, the welding that is used to seal.In addition, about using the fixing means of magnet, details aftermentioned.
[laser welding method]
Secondly, the laser welding method that above-mentioned laser welding device 100 carries out is described.In the present embodiment, during 1 pulse period, the position (hereinafter referred to as " irradiation position ") of illuminating laser beam LB2 is moved in workpiece 10.In other words, during 1 pulse period, the bundle spot that forms on the workpiece 10 is moved.Below specify the related laser welding method of embodiments of the invention.In addition, in this manual, " pulse period " is meant during the laser beam beam emitter 35 outgoing laser beam LB1 (1 cycle).
(the 1st embodiment)
The laser welding method that the 1st embodiment is related at first is described.In the 1st embodiment, the position of illuminating laser beam LB2 is moved in workpiece 10, make that the welding to 1 workpiece 10 finishes during 1 pulse period.
Fig. 4 is the figure of the laser welding method that is used to illustrate that the 1st embodiment is related.The top figure of Fig. 4 (a) expression workpiece 10.The zone that shadow region 70 expression should be carried out welding, i.e. zone (being " welding zone ") that should illuminating laser beam LB2 during welding to call this zone in the following text.In this occasion, the welding of workpiece 10 is to be undertaken by near the illuminating laser beam LB2 periphery of lid 10a.In the 1st embodiment, during 1 pulse period, the position of illuminating laser beam LB2 is moved, feasible welding to 1 workpiece 10 finishes.Specifically, during 1 pulse period, shown in arrow 71, irradiation position is moved.In this occasion, transfer gauge head 36 that the irradiation position of laser beam LB2 is moved, make and circle near irradiation position during 1 pulse period (corresponding) periphery of lid 10a with welding zone 70.In addition, for ease of explanation, the position that the irradiation of the position of the irradiation of beginning laser beam LB1 and laser beam LB1 finishes is separately represented among Fig. 4 (a), in fact begun the position shone and the position consistency of end.
After this, transfer the workpiece 10 of gauge head 36 changes becoming welding object, carry out image measurement, position revisal the workpiece 10 that has changed.Then, transfer 36 pairs of these workpiece 10 of gauge head with same order illuminating laser beam LB2.
Fig. 4 (b) expression is from the time waveform of laser beam beam emitter 35 emitting laser bundle LB1.Fig. 4 (b) expression time on transverse axis, on the longitudinal axis, represent laser power.Also have, the pulse period of time T 1 expression laser beam LB1, between 2 indicating impulse cycles of time T and pulse period during (not outgoing laser beam LB1 during).For example, 1 pulse period T1 is 30 (msec).In addition, the laser beam LB1 of expression is by the laser beam after the control of the control device in the laser beam beam emitter 35 among Fig. 4 (b).
In the 1st embodiment, with the time-independent laser beam LB1 of the laser power in 1 pulse period T1 shown in Fig. 4 (b), promptly the uniform laser beam LB1 of laser power carries out welding.Also have, carry out welding with laser beam LB1 with appropriate laser power (being the sufficient laser power of fusion lid 10a) for welding workpiece 10.This is for welding lid 10a equably, in other words, and in order to make the weld mark that on lid 10a, forms even.
The concrete example of the control method that the control device in the laser beam beam emitter 35 carry out here, is described for from the above-mentioned laser beam LB1 of laser beam beam emitter 35 outgoing.
In 1 example, the control device in the laser beam beam emitter 35 monitor from oscillator emitting laser bundle, carry out the control of oscillator etc. based on the laser beam that is monitored.That is, control device carries out FEEDBACK CONTROL to the laser power of laser beam.Specifically, control device is controlled oscillator etc., and making finally becomes the sufficient laser power of fusion lid 10a from laser beam beam emitter 35 emitting laser bundle LB1, and makes the laser power in 1 pulse period become even.
In other examples, the control device in the laser beam beam emitter 35 are not that laser power is carried out FEEDBACK CONTROL, but control, and make the peak value part of the laser beam that vibrated from oscillator as laser beam LB1 and outgoing.With Fig. 5 this control method is described.Fig. 5 (a), Fig. 5 (b) expression time on transverse axis, on the longitudinal axis, represent laser power.Particularly, the basic laser beam that vibrated from oscillator of Fig. 5 (a) expression.As can be seen, the laser beam that has vibrated from oscillator rises with quite anxious slope thus, and laser power adds cataclysm when descending.Control device in the laser beam beam emitter 35 is controlled, the peak value part of the feasible laser beam of representing from 35 outgoing dashed region 74 of laser beam beam emitter.Particularly, control device carries out making the laser beam with the laser power more than the laser power of representing with dotted line 75 among Fig. 5 (a) from 35 outgoing of laser beam beam emitter with the control of shearings such as shutter from oscillator emitting laser bundle.Laser beam after Fig. 5 (b) expression is controlled by control device is promptly finally from laser beam beam emitter 35 emitting laser bundle LB1.In this occasion, become pulse period T1 during the laser beam LB1 outgoing.
Like this, make the control uniformly that becomes of laser power among the 1 pulse period T1 in laser beam beam emitter 35, the weld mark that forms on lid 10a will be even.
Also have, in the 1st embodiment, transfer gauge head 36 to begin the irradiation of laser beam LB1 with the position that has departed from the angle of lid 10a to a certain extent.In other words, the position of having departed from the end on the limit (hereinafter to be referred as " welded edge ") in the welding zone 70 that constitutes workpiece 10 to a certain extent, the irradiation of beginning laser beam LB1.The reason of doing like this is as follows.From experiment as can be seen, near the tendency that has heat to accumulate the angle of welding, and near the tendency that the starting position of welding, has heat to accumulate.Therefore, in the 1st embodiment, in order to suppress so hot residual rightly, begin irradiation from the position of having departed from the angle (angle of welding) of lid 10a to a certain extent.For example, begin the irradiation of laser beam LB1 from the centre position of welded edge.
Here, related welding process of above-mentioned the 1st embodiment and the welding process that generally carries out are compared.Generally be by transferring gauge head while making posetionof weld move irradiated with pulse laser step by step by specified rate.In this occasion,,, perhaps increase the umber of pulse of irradiation so, just need to strengthen the laser power of unit pulse in order positively to carry out welding because pulse laser is an irradiating laser intermittently.Thereby, there is weld mark to become possibility big, that pay big heat to workpiece 10 integral body.By contrast, in the related laser welding method of the 1st embodiment, be in workpiece 10, to move, thereby compare that the heat in welding zone diminishes, so can reduce weld mark with the method for generally carrying out in the position that makes illuminating laser beam LB2 during 1 pulse period.Also have, the heat of paying to whole workpiece also can diminish, thereby can reduce the influence (can protect electronic unit 10c) that the electronic unit 10c in workpiece 10 pays owing to welding.
Having, in the related laser welding method of the 1st embodiment, is to move in workpiece 10 in the position that makes illuminating laser beam LB2 during 1 pulse period again, thus can to welding zone 70 need not the empty standard width of a room in an old-style house every and carry out welding equably, can improve workpiece 10 sealings.Also have, can finish welding in 1 pulse period, thereby can shorten the needed time of welding workpiece 10.
(the 2nd embodiment)
Secondly, the laser welding method that the 2nd embodiment of the present invention is related is described.In the 2nd embodiment, not that feasible welding to 1 workpiece 10 finishes during 1 pulse period, but make that towards the cycle this point is different with above-mentioned the 1st embodiment to the welding end of 1 workpiece 10 at rapid pulse.Specifically, in the 2nd embodiment, be that the position of illuminating laser beam LB2 on this welded edge is moved, make that at least the welding to 1 welded edge finishes.Particularly, in the 2nd embodiment, be the welding of during 1 pulse period, carrying out 1 welded edge, carry out welding with a plurality of pulse periods to 1 workpiece 10.
Fig. 6 is the figure of the laser welding method that is used to illustrate that the 2nd embodiment is related.Fig. 6 represents the top figure of workpiece 10,70 expression welding zones, shadow region.Also be to carry out the welding of workpiece 10 in this occasion by near the illuminating laser beam LB2 periphery of lid 10a.In the 2nd embodiment, during 1 pulse period, irradiation position is moved 1 welded edge.Specifically, in the initial pulse period, carry out welding, in the pulse period of back, carry out welding welded edge 77b to welded edge 77a.Afterwards, adopt and use the same method, carry out welding by the order of welded edge 77c, welded edge 77d.In this occasion, transfer gauge head 36 during 1 pulse period, the irradiation position that makes laser beam LB2 moves to the other end from 1 end of welded edge.Then, transfer the welded edge of gauge head 36 changes, by the pulse period of back, to the new welded edge illuminating laser beam LB2 that has changed as the welding object.Like this, 1 workpiece 10 is finished welding with 4 pulse periods.
Like this, the laser welding method related according to the 2nd embodiment also can reduce weld mark, and can reduce the heat of paying to whole workpiece.Also having, in the related laser welding method of the 2nd embodiment, is to change as the welded edge of welding object by each pulse period to carry out welding, thereby can suppress effectively near the angle that heat accumulates in lid 10a.
In addition, also the same in the 2nd embodiment with above-mentioned the 1st embodiment, control device in the laser beam beam emitter 35 is controlled, make to have to be welding workpiece 10 necessary laser powers, and make the laser power in 1 pulse period become even from laser beam beam emitter 35 emitting laser bundle LB1.
Also have, the order of carrying out the welded edge of welding reaches the direction that in 1 welded edge irradiation position is moved and is not limited to thing shown in Figure 6.That is, be not limited to the welded edge of adjacency is carried out welding in order, be not limited to make irradiation position to moving to the end position of the welding of 1 welded edge with to the adjacent direction in starting position of the welding of the welded edge of back.Also have, more than represented the example that during 1 pulse period, only 1 welded edge carried out welding but, in other examples, also can during 1 pulse period, carry out welding 2 welded edge.That is, can carry out welding with 2 pulse periods to 1 workpiece 10.
[assembling welding process in advance]
Here, the pre-assembling for lid 10a and packaging part 10b describes.In addition, in this manual, " pre-assembling " is meant carried out bonding in advance before lid 10a and packaging part 10b are sealed fully.
In the present embodiment, to being in the workpiece 10 under the state that lid 10a and packaging part 10b assembled in advance, be used for the welding (hereinafter referred to as " sealing welding ") that lid 10a and packaging part 10b are sealed fully.Specifically, before sealing welding, be used for assembling in advance the welding (hereinafter referred to as " assembling welding in advance ") of lid 10a and packaging part 10b.Particularly, assembling welding in advance is that the part in the zone on the lid 10a of sealed welding is carried out welding.
Assemble welding in advance and be the lid 10a that produces in order to prevent to seal welding and packaging part 10b position deviation, lid 10a cursory, the conveyance workpiece 10 of caused lid 10a and packaging part 10b such as melt the time vibration, impact the position deviation of caused lid 10a and packaging part 10b etc.That is, in the present embodiment, before the sealing welding, assemble welding in advance for the sealing welding of carrying out lid 10a and packaging part 10b rightly.
With Fig. 7 the pre-assembling welding process that present embodiment is related is described.The top figure of Fig. 7 (a) and Fig. 7 (b) expression workpiece 10.An example of the pre-assembling welding that Fig. 7 (a) expression laser beam or electron beam are related.In this occasion, assemble welding in advance to four jiaos point 40 illuminating laser beams or the electron beam of lid 10a.
The concrete example of the pre-assembling welding that the welding of Fig. 7 (b) expression eam welding constant resistance is related.In this occasion, on 2 limits 41 that face toward of lid 10a, carry out electric resistance welding.The pre-assembling welding on 2 limits 41 like this pushes welding by pair of rolls electrode etc. or the rolling welding forms.
In the welding of general bundle, before the sealing welding, do not carry out above-mentioned pre-assembling welding, but when sealing welding, use anchor clamps etc. to carry out the location of lid 10a and packaging part 10b and fixing, lid 10a extruding to packaging part 10b.In this occasion, be the outer peripheral portion of pinning lid 10a by anchor clamps, so need seal welding in the inboard of lid 10a.Thereby, in the method for using anchor clamps, needing the sealing-in amplitude (wall amplitude) of packaging part 10b sometimes, it is narrow that the internal volume of packaging part 10b will become, and is difficult to corresponding small-sized packaging part 10b, and perhaps the mark space of lid 10a narrows down.But also need installation exercise of anchor clamps etc.
By contrast, in the present embodiment, be that the workpiece 10 that has carried out pre-assembling welding is sealed welding, thereby the periphery (that is, not needing the part of guaranteeing that anchor clamps are pinned) of energy welding lid 10a, so the sealing-in amplitude of packaging part 10b can be narrower.Thereby, carry out internal volume that the related pre-assembling welding of present embodiment can guarantee packaging part 10b more greatly, can easily corresponding small-sized packaging part 10b, and the mark space of guaranteeing lid 10a is more greatly.Also have,, thereby do not need to carry out the installation exercise etc. of anchor clamps without anchor clamps.As mentioned above, the pre-assembling welding related according to present embodiment can seal welding rightly by easy operation.
In addition, assemble welding in advance and can be undertaken, also can assemble welding in advance by other devices by above-mentioned laser welding device 100, to laser welding device 100 supply with assembled welding in advance workpiece 10.Assemble the occasion of welding in advance at laser welding device 100, laser welding device 100 possesses the pre-assembling welding mechanism that carries out pre-assembling welding etc.
Also have, in the occasion of assembling welding with laser beam in advance, preferably, a little less than the laser power that the laser power settings of laser beam is set must be than the sealing welding time.This is in order positively to assemble welding in advance, and prevents to assemble in advance the related lid 10a of welding and dissolve too much.
[using the fixing means of magnet]
Here, describe for method with magnet fixed cover 10a on packaging part 10b.In the present embodiment, when sealing welding, by lid 10a being paid the related magnetic force of magnet on packaging part 10b fixed cover 10a, and on pallet 20 fixation workpiece 10.This is in order to make that in sealing lid 10a can not move with respect to packaging part 10b during welding, and lid 10a can not move with respect to pallet 20 because of laser beam.In addition, as mentioned above, sealing during welding workpiece 10 be in state after the pre-assembling welding, but, in the present embodiment, the fixing fixation workpiece 10 more really and on pallet 20 of lid 10a when making the sealing welding and packaging part 10b and fixing with magnet.For example, in sealing pre-assembled portion branch fusion during welding, thereby lid 10a just moves easily with respect to packaging part 10b, and fixes with magnet, just can suppress so mobile really.Also have, workpiece 10 moves with respect to pallet 20 in the time of suppressing the sealing welding.
Fig. 8 is the figure of the fixing means that is used to illustrate that magnet is related.The cutaway view (with the corresponding related cutaway view of line segment of cutting line B1-B2 among Fig. 3 (a)) of Fig. 8 (a) expression workpiece 10, pallet 20, magnetic bed 46 and stand 23.Be provided with a plurality of magnet 45 on the magnetic bed 46, be configured in pallet 20 times.A plurality of magnet 45 under pallet 20 is positioned in state on the magnetic bed 46, are arranged on the position that faces toward with lid 10a and packaging part 10b.Also have, magnet 45 has rectangular shape, and the size of magnet 45 and lid 10a and packaging part 10b's is big or small roughly the same.Have, magnet 45 is configured in and makes the center consistent location roughly of the center of workpiece 10 and magnet 45 under workpiece 10 is positioned in state on the pallet 20 again.
Fig. 8 (b) is the figure that the arrow C direction from Fig. 8 (a) is seen magnetic bed 46, is the figure of an example of expression magnetic bed 46.Shown in Fig. 8 (b), make that the horizontal direction of direction and magnetic bed 46 of the axle that the N utmost point of magnet 45 and the S utmost point form is consistent and on magnetic bed 46, disposed magnet 45.Particularly, make the N utmost point of magnet 45 and the S utmost point in abutting connection with and at transverse direction distributed magnet 45, the same with transverse direction, also be to make the N utmost point of magnet 45 and the S utmost point at longitudinal direction in abutting connection with disposing.Distributed magnet 45 like this, will be roughly even at the magnetic force that the position (being the position of mounting workpiece 10) that faces toward with magnet 45 relates to, thereby on magnetic bed 46 during loading tray 20, can suppress workpiece 10 on the pallet 20 because magnetic force and counter-rotating etc.
In the welding of general bundle, do not carry out related fixing of magnet as described above 45, mechanically pin the method that lid 10a and packaging part 10b seal welding but adopt with anchor clamps.In this occasion, need have the anchor clamps of complicated shape (promptly to the suitable shape of the shape of lid 10a and packaging part 10b), and need when welding, make up these anchor clamps.Have, except with the fixing method of anchor clamps, pushing packaging part 10b with glass plate, to go up the method for the surface of the lid 10a that carries fixing be general the employing, but, in the occasion of this method of employing, need take time and energy and remove the filth of adhering on the glass plate again.
By contrast, in the present embodiment, not to adopt anchor clamps, glass plate but adopt magnet 45, thereby do not take time and energy, and can when the sealing welding, lid 10a be fixed on the packaging part 10b, and lid 10a and packaging part 10b are fixed on the pallet 20 by easy operation.Also have, in the occasion that adopts anchor clamps to fix, inboard illuminating laser beam of the lid 10a that need not pin to anchor clamps etc., thereby be difficult to the narrow small-sized packaging part 10b of corresponding sealing-in amplitude, and according to the fixing means of the related employing magnet 45 of present embodiment, not mechanically to fix (promptly directly not contacting lid 10a and packaging part 10b), thereby can not hinder the irradiation of laser beam, so can also the narrow small-sized packaging part of corresponding sealing-in amplitude.
[variation]
More than represented the embodiment that only lid 10a illuminating laser beam LB2 is carried out welding, and in other examples, can carry out welding lid 10a and packaging part 10b two sides while illuminating laser beam LB2.Specifically, in variation, be on lid 10a and packaging part 10b two sides, to form the related bundle spot of laser beam LB2 to carry out welding.
Fig. 9 is the figure of the laser welding method that is used to illustrate that variation is related.The top figure of Fig. 9 (a) expression workpiece 10.Shown in Fig. 9 (a), in variation, to lid 10a and packaging part 10b two sides while illuminating laser beam LB2.Particularly, transfer gauge head 36 illuminating laser beam LB2, make the related bundle spot 30 of laser beam LB2 on lid 10a and packaging part 10b two sides, form.In other words, transfer gauge head 36 illuminating laser beam LB2, make bundle spot 30 expose from the end of the periphery of lid 10a.In addition, laser beam beam emitter 35 makes the focus of laser beam LB2 be located at the position of the bundle spot 30 that lid 20a go up to form and outgoing laser beam LB1.
The cutaway view of Fig. 9 (b) expression cutting line D1-D2 in Fig. 9 (a), the state before the expression lid 10a fusion.On the other hand, the cutaway view of Fig. 9 (c) expression cutting line D1-D2 in Fig. 9 (a), the state after the expression lid 10a fusion.From Fig. 9 (c) as can be seen, as shown in arrow 49, the angle that the end of the periphery of lid 10a forms is understood fusion and is become round.In this occasion, the Ni plating on the side 10aa of lid 10a can fusion.On the other hand, packaging part 10b is owing to laser beam LB2 irradiation is heated, and 10ab transmits this heat to the bottom surface of lid 10a.The occasion of lid 10a illuminating laser beam LB2 is compared the Ni plating fusion immediately on the bottom surface 10ab of lid 10a like this, with only.
Like this, lid 10a and packaging part 10b two quadratures are penetrated laser beam LB2, the side 10aa of lid 10a and the Ni plating fusion effectively on the 10ab of bottom surface.In this occasion, the area at the welding position of lid 10a and packaging part 10b will enlarge.Also have, because packaging part 10b is heated self, the wetting quality of the sealing surface of packaging part 10b will improve.As mentioned above, the laser welding method related, welding lid 10a and packaging part 10b really according to variation.Have again, the laser welding method related according to variation, can utilize temperature to the related packaging part 10b of packaging part 10b direct irradiation laser beam LB2 to rise and come the bottom surface of fusion lid 10a, thereby can reduce the power output of laser beam beam emitter 35 emitting laser bundle LB1.
Also have, the laser welding method related according to variation can suppress the thermal diffusion on the lid 10a, thereby can be used for welding to the rising of the temperature of the related lid 10a of laser beam LB2 effectively.Therefore, can reduce the power output of laser beam beam emitter 35 emitting laser bundle LB1.
In addition, in the occasion that adopts the related laser welding method of above-mentioned the 1st embodiment, preferably use the related laser welding method of variation in the lump.In the related laser welding method of the 1st embodiment, be that the irradiation position of laser beam LB2 is moved, make and circle near irradiation position during 1 pulse period (corresponding) periphery of lid 10a with the welding zone 70 among Fig. 4 (a).In this occasion, near to the angle of lid 10a during illuminating laser beam LB2 (change make direction that irradiation position moves time), owing to make the characteristic of the motor that the speculums transferred in the gauge head 36 rotate, the track of irradiation position will be crooked.On the other hand, lid 10a is because on making, it is round that the angle will become.According to the above, the laser welding method that adopts the 1st embodiment to relate to, and adopt the related laser welding method of variation to lid 10a and packaging part 10b two square bunchy spots, just can be near the illuminating laser beam LB2 rightly angle of lid 10a, thereby can carry out welding along the periphery of lid 10a effectively.
As mentioned above, the laser welding device that present embodiment relates to is that the workpiece illuminating laser beam that possesses lid and packaging part is carried out welding and seals the device of workpiece, possesses: by the laser beam outgoing portion of given pulse period outgoing laser beam; And the laser beam of having accepted from the outgoing of laser beam outgoing portion, the accent gauge head of the position of change illuminating laser beam transfers gauge head to move and contunuous wedling in above-mentioned workpiece in the position that makes illuminating laser beam during 1 pulse period.So just weld mark can be reduced, and influence that the electronic unit in the workpiece is paid can be suppressed.
Claims (7)
1. a laser welding device seals described workpiece by the workpiece irradiating laser that possesses lid and packaging part is carried out welding, it is characterized in that possessing:
Laser beam outgoing portion by given pulse period outgoing laser beam; And
Acceptance from the outgoing of described laser beam outgoing portion laser beam, the irradiating position changing section of the position of this laser beam of change irradiation,
Described irradiating position changing section moves in described workpiece and contunuous wedling in the position that makes the described laser beam of irradiation during 1 pulse period, makes at least the welding on 1 limit that should carry out the zone of welding to the formation of described workpiece finish.
2. laser welding device according to claim 1 is characterized in that, described laser beam outgoing portion has for the necessary laser power of the described workpiece of welding, and outgoing uniform laser beam of laser power in described 1 pulse period.
3. laser welding device according to claim 2 is characterized in that, described laser beam outgoing portion is to the outside peak value part of the described laser beam of outgoing only, thereby makes described laser power even.
4. according to any described laser welding device in the claim 1 to 3, it is characterized in that, the position of the described laser beam of described irradiating position changing section change irradiation makes to form the related bundle spot of described laser beam simultaneously on described lid and described packaging part two sides.
5. according to any described laser welding device in the claim 1 to 4, it is characterized in that,, be used to seal the welding of described workpiece being in the workpiece of the state that described lid and described packaging part assembled in advance.
6. according to any described laser welding device in the claim 1 to 5, it is characterized in that, by described lid being paid the related magnetic force of magnet, on described packaging part, fix described lid, and on the pallet of the described workpiece of mounting, fix described lid and described packaging part.
7. a laser welding method seals described workpiece by the workpiece irradiating laser that possesses lid and packaging part is carried out welding, it is characterized in that possessing:
Laser beam outgoing operation by given pulse period outgoing laser beam; And
Accept outgoing described laser beam, make the irradiating position changing operation of the position change of this laser beam of irradiation,
In described irradiating position changing operation, in described workpiece, move and contunuous wedling in the position that makes the described laser beam of irradiation during 1 pulse period, make at least the welding on 1 limit that should carry out the zone of welding to the formation of described workpiece finish.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005-280392 | 2005-09-27 | ||
| JP2005280392 | 2005-09-27 | ||
| JP2005280392A JP2007090370A (en) | 2005-09-27 | 2005-09-27 | Laser welding equipment and laser welding method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1939641A CN1939641A (en) | 2007-04-04 |
| CN1939641B true CN1939641B (en) | 2011-05-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006101592863A Expired - Fee Related CN1939641B (en) | 2005-09-27 | 2006-09-26 | Laser fusing device and method |
Country Status (3)
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|---|---|
| JP (1) | JP2007090370A (en) |
| CN (1) | CN1939641B (en) |
| TW (1) | TW200728012A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6022784B2 (en) * | 2011-04-07 | 2016-11-09 | 日産自動車株式会社 | Separator welding apparatus and separator welding method |
| JP6032236B2 (en) * | 2014-04-08 | 2016-11-24 | トヨタ自動車株式会社 | Laser welding method and welded structure |
| WO2017158719A1 (en) * | 2016-03-15 | 2017-09-21 | 三菱電機株式会社 | Manufacturing method for design member for elevators |
| CN110936013B (en) * | 2018-09-21 | 2021-12-10 | 大族激光科技产业集团股份有限公司 | Sealing method and sealing body of kovar alloy and dissimilar metal |
| JP2022126471A (en) * | 2021-02-18 | 2022-08-30 | 株式会社アマダ | Laser processing system and laser processing method |
| CN114918538A (en) * | 2022-05-27 | 2022-08-19 | 无锡中微高科电子有限公司 | Laser sealing welding method for high-reliability integrated circuit air tightness packaging |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1497763A (en) * | 2002-09-30 | 2004-05-19 | 日立麦克赛尔株式会社 | Lithium ion secondary battery |
| CN2684382Y (en) * | 2004-03-26 | 2005-03-09 | 深圳市比克电池有限公司 | Auxiliary device for laser welding of battery body case |
-
2005
- 2005-09-27 JP JP2005280392A patent/JP2007090370A/en not_active Withdrawn
-
2006
- 2006-09-26 CN CN2006101592863A patent/CN1939641B/en not_active Expired - Fee Related
- 2006-09-26 TW TW095135516A patent/TW200728012A/en unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1497763A (en) * | 2002-09-30 | 2004-05-19 | 日立麦克赛尔株式会社 | Lithium ion secondary battery |
| CN2684382Y (en) * | 2004-03-26 | 2005-03-09 | 深圳市比克电池有限公司 | Auxiliary device for laser welding of battery body case |
Non-Patent Citations (3)
| Title |
|---|
| JP昭62-263888A 1987.11.16 |
| JP特开2000-164095A 2000.06.16 |
| JP特开2005-116208A 2005.04.28 |
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| Publication number | Publication date |
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| CN1939641A (en) | 2007-04-04 |
| JP2007090370A (en) | 2007-04-12 |
| TW200728012A (en) | 2007-08-01 |
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