CN1921166A - Method for making niobic magnesium acid lead-lead titanate single-crystal longitudinal vibration transverter - Google Patents
Method for making niobic magnesium acid lead-lead titanate single-crystal longitudinal vibration transverter Download PDFInfo
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- CN1921166A CN1921166A CN 200510093278 CN200510093278A CN1921166A CN 1921166 A CN1921166 A CN 1921166A CN 200510093278 CN200510093278 CN 200510093278 CN 200510093278 A CN200510093278 A CN 200510093278A CN 1921166 A CN1921166 A CN 1921166A
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Abstract
The invention relates to a method for preparing niobium magnesium acid lead-lead titanate single crystal longitudinal-vibration energy exchanger. Wherein, it comprises: using Ansys software to design front radiator, tail load and piezoelectric crystal pile, to be assembled; using table clamper to position the front radiator; functioning -12.0MPa prestress on the tail load; welding the positive copper electrodes via one wire, as the anode of energy exchanger; welding the passive copper electrodes via one wire as the cathode; putting it into low-temperature oven at 30-60Deg. C to be solidified for 20-72 hours; sealing and vulcanizing. The invention has low working temperature, simple stress function, to express the high electromechanical couple property of PMNT single crystal material, to control the receiving sensitivity of longitudinal vibration energy exchanger.
Description
Technical field
The present invention relates to a kind of sonar and underwater acoustic transducer; Particularly relate to a kind of method of controlling the niobic magnesium acid lead-lead titanate single-crystal longitudinal vibration transverter receiving sensitivity.
Background technology
Functional material is the critical component of transducer, and to a great extent, the raising of transducer performance depends on the appearance of new function material.20th century PZT piezoelectric ceramic that grows up of the fifties, the preferred material that becomes underwater acoustic transducer with the operating temperature range and the good electromechanical conversion efficiency of its broad.
In recent years, new function material relaxor ferroelectric monocrystal material such as PMN-PT (Pb (Mg
1/3Nb
2/3) O
3-PbTiO
3, be called for short PMN-PT or PMNT) aspect growing and preparing, make a breakthrough, its research and application become the new focus of field of transducer rapidly.Studies show that the piezoelectric strain constant d of this material
33, piezoelectric voltage constant g
33, DIELECTRIC CONSTANT
33And longitudinal electromechanical coupling factor k
33All be higher than the PZT piezoceramic material that generally use in present PZT (piezoelectric transducer) field far away etc. performance index, for example: the piezoelectric strain constant d of PMNT relaxor ferroelectric monocrystal material
33Up to 2000pC/N; Electromechanical coupling factor k
33Reach more than 90%, its dependent variable has reached 1.7%.
In recent years, underwater sound bound pair relaxor ferroelectric monocrystal PMNT has given great concern both at home and abroad, especially as a kind of novel high-performance piezoelectric, performances such as the high electromechanical coupling factor of PMNT relaxor ferroelectric monocrystal and high-tension electricity strain constant are very suitable for making highly sensitive underwater acoustic transducer.Yet, the receiving sensitivity that adopts the PMNT relaxor ferroelectric monocrystal underwater acoustic transducer that conventional method produces often and not as theory analysis obvious raising arranged like that, also descend many sometimes than piezoelectric ceramic underwater acoustic transducer with yardstick.
Studies show that the tight power of giving greatly that high-temperature technology more than 80 ℃ that adopts in the conventional method and 50Mpa are above is fit to the little conventional piezoelectric pottery of influence that material behavior is subjected to temperature and pressure.Yet novel PMNT relaxor ferroelectric monocrystal material but has obvious dependence to temperature and stress.(1) have two transformation temperature (see figure 1)s of high and low temperature in Jie's temperature characteristics curve of PMNT monocrystalline, wherein the low temperature phase change point in three parts-four directions far below about 300 ℃ phase transformation temperature points of conventional piezoelectric ceramic, has limited the technological temperature in making at 50-80 ℃.(2) compression is very sensitive to external world for the PMNT monocrystalline, and particularly the electric capacity of PMNT monocrystalline is subjected to the size of different compression and applies mode that very big variation is arranged, and capacitance size directly affects the receiving sensitivity of transducer.Therefore, must adopt brand-new idea and method and corresponding technology to bring into play the performance of PMNT relaxor ferroelectric monocrystal excellence, thereby reach the effect of optimal control transducer receiving sensitivity according to the characteristics of the novel transducer material of this class.
Longitudinal vibration transducer is mainly formed (see figure 2) by previous irradiation head, piezoelectric element heap, tail load and stress screw rod, nut, and wherein the piezoelectric element heap is a key position, and the most generally the material of Cai Yonging is a piezoelectric ceramic.When using novel piezoelectric PMNT monocrystalline to pile as piezoelectric element, if still adopt the manufacture craft of conventional piezoelectric ceramic transducer to make novel longitudinal vibration transducer, its receiving sensitivity can be very low, differs greatly with theory expectation.Studies show that the size that applies compression is crucial influencing factor.Since the electric capacity of PMNT monocrystalline and compression be applied with confidential relation.(a) electric capacity of PMNT monocrystalline has very big variation with the mode that the applies difference of compression.Therefore, when making longitudinal vibration transducer, must take suitable manner to apply prestressing force.(b) along with the increase of compression, aging phenomenon appears in the PMNT monocrystalline, and it is big that its electric capacity becomes.Especially repetitiously add, unload under the compression, irrecoverable property appears in the capacitance size of PMNT monocrystalline, makes the receptivity of PMNT single crystal transducer further to descend.
What piezoelectric ceramic transducer adopted in the conventional method is afterburning mode I (see figure 3).Earlier transducer is compressed in advance with anchor clamps, treat that the prestressing force bar is tightened after, again anchor clamps are decorporated.In vertical PZT (piezoelectric transducer), the rigidity of ceramic stack is often much bigger than the rigidity of prestressing force lever system (comprising screw rod, nut), therefore, when assembling jig clamps, negligible when the deformation quantity of the deformation quantity of ceramic stack during with prestressing force bar tightening system compared.So, behind the assembling jig of decorporating, only keep the suffered that part of pressure of ceramic stack when tightening the prestressing force bar on the ceramic stack.When usually adopting afterburning mode I, the pressure that piezoelectric ceramic bears in the loading process is often all greater than 200Mpa.Yet, this afterburning mode is inappropriate for the PMNT monocrystal material, the size that is provided with Chinese Academy of Sciences's Shanghai silicate is φ 16 * φ 7 * 3mm, (001) the PMNT single crystal wafer of cut type is an example, under situation greater than the compression of 25Mpa, the situation that the PMNT monocrystal material often just easily breaks, the performance of more crucial is PMNT monocrystal material under compression can change.Wherein, the piezoelectric constant d of PMNT monocrystalline under the compression
33Descend to some extent, but change little (under the 18Mpa compressive pre-stress, piezoelectric constant d
33Also just descended about 10%.) still, the capacitance variations of PMNT monocrystalline is bigger under the compression.Both be that the prestressing force that applies is lower than 25Mpa, the capacity ratio of the PMNT single-crystal longitudinal vibration transducer of producing usually increases 2-3 doubly when not applying prestressing force, therefore, find out that to apply prestressed suitable method and prestressed optimum value thereof be to improve the key of the vertical array transducer receiving sensitivity of PMNT monocrystalline.
Summary of the invention
The objective of the invention is to characteristics at PMNT relaxor ferroelectric monocrystal material, in making the longitudinal vibration transducer process, improve the prestressed mode that applies, and selected prestressed optimum value, thereby provide a kind of making to have the method for the high PMNT relaxor ferroelectric monocrystal longitudinal vibration transducer of receiving sensitivity, given full play to the high tension performance of this material, and the receiving sensitivity that makes it to reach this longitudinal vibration transducer has controllability.
The object of the present invention is achieved like this:
The method of making niobic magnesium acid lead-lead titanate single-crystal longitudinal vibration transverter provided by the invention may further comprise the steps:
(1) adopts Ansys software at first as required, design previous irradiation head in the PMNT single-crystal longitudinal vibration transducer, tail load and piezoelectric chip heap material, size and quantity thereof that each several part adopted, wherein the piezoelectric chip heap comprises that PMNT single-chip that 8 centers have a hole stacks and makes;
(2) array transducer is indulged in assembling: after with acetone the selected material surface of vertical array transducer being cleaned up, again the previous irradiation head is screwed in the stress screw rod, then smear last layer high-temp epoxy glue on 8 PMNT single-chip surfaces, electrical way according to parallel connection is through in the stress screw rod, and to add a slice scale copper as electrode between per two PMNT single-chips, after 8 single-chips feed into the stress screw rod entirely, again sticking entering in the stress screw rod also overlapped in the tail load, after at last nut being screwed into the stress screw rod gently, the vertical array transducer that assembling is finished;
(3) apply and give stress: the previous irradiation head of fixing the longitudinal vibration transducer that assembles with bench vice, in prestressed applying, take directly in the tail load, to add a single prestressed new afterburning mode II, when needing the institute of measurement in real time to exert pressure size, also the quartz pressure sensor with gaging pressure size usefulness is clipped between tail load and the piezoelectric chip heap (with reference to figure 4), this prestressed size can be adjusted as required, concerning the optimum value of the receiving sensitivity of vertical array transducer, institute's prestressing force size is 5-12.0Mpa, and the unnecessary high-temp epoxy rubber erasers that each several part is extruded out is clean then; Again being all each anodal copper electrode sheet with a wire bonds together, as the positive pole of transducer, and each the copper electrode sheet that is all negative pole with a wire bonds together, as the negative pole of transducer; The afterburning mode II that adopts applies prestressing force as shown in Figure 3;
(4) solidify: in order to make the epoxy glue dry solidification, vertical array transducer will be put into 30-50 ℃ low-temperature bake oven and carry out solidifying in 20-72 hour;
(5) carry out integral sealing sulfuration: the transducer that step (4) is made, vulcanize under 30-50 ℃ temperature with polyurethane rubber and to be sealed to single gust in 20-40 hour, promptly obtain niobic magnesium acid lead-lead titanate single-crystal longitudinal vibration transverter of the present invention.
In above-mentioned technical scheme, described copper sheet size as electrode is a slice φ 16 * φ 7 * 0.2mm.
In above-mentioned technical scheme, the material of described previous irradiation head and tail load is aluminium or copper respectively;
In above-mentioned technical scheme, 8 PMNT ferro-electricity single crystals that described piezoelectric element heap selects for use Shanghai silicate to be provided are formed, and the chemical constituent of this monocrystalline is positioned near the accurate homotype phase boundary (MPB), be 67/33, cut type is (001) direction, and wafer size is φ 16 * φ 7 * 3mm, piezoelectric property d
33〉=1200pC/N;
In above-mentioned technical scheme, described sealing sulfuration comprises: adopt conventional vulcanization of rubber sealing technology, or liquid polyamine fat rubber perfusion sealing.
This method is operated more easy compared with the afterburning mode of existing routine, avoided particularly that the PMNT monocrystalline is subjected to excessive prestressing force situation among the conventional afterburning mode I.Experimental study shows that under the single longitudinal prestressing, the capacitance variations curve break of PMNT monocrystal material appears at (See Figure 5) about 5.5Mpa ± 0.5Mpa.Therefore, when adopting the optimization prestressing force size of 5-6Mpa among the present invention, not only the electric capacity of PMNT single-crystal longitudinal vibration transducer does not rise, and slightly descends on the contrary.That is to say that when applying the single longitudinal prestressing of 5.5Mpa, minimum point appears in the capacitance of PMNT monocrystal material, the electric capacity of this moment has the decline scope (discreteness of monocrystal material is big, and decline scope is also not quite identical) about 10%-30%.After this, electric capacity is in continuous increase, when compression is the 18Mpa left and right sides, the PMNT monocrystalline capacitance 200% increase has been arranged.Because the receiving sensitivity and the electric capacity of longitudinal vibration transducer are closely related, therefore, according to actual needs, the receiving sensitivity height of longitudinal vibration transducer can be adjusted electric capacity by the prestressing force size and be achieved.
Major advantage of the present invention is
(1) the manufacture craft temperature of transducer is low; The present invention selects for use the PMNT single crystal wafer to pile as piezoelectric element, adopt again to be lower than 50 ℃ of technological temperatures and to be cured and to vulcanize, avoided PMNT monocrystal material performance that bigger variation (traditional piezoelectric ceramic transducer often adopt be high-temperature technology more than 80 ℃) takes place.There are some researches show that Shanghai Inst. of Silicate, Chinese Academy of Sciences provides and is of a size of φ 16 * φ 7 * 3mm, the PMNT single crystal wafer of (001) cut type, after 80 ℃ of Temperature Treatment of 6 hours, piezoelectric property descends more than 60%; In addition, if add the effect of compression simultaneously, the piezoelectric property of single-crystal element can reduce and descends a lot, produces complete depolarization phenomenon even and loses piezoelectric effect.As can be seen from Figure 5 the present invention selects for use the PMNT single crystal wafer to compare the advantage of performance with the PZT material, and T1#, T2#, D1# and D2# represent the curve of different samples among the figure.
(2) compression is lower; Avoid breaking of PMNT single-crystal element in the longitudinal vibration transducer, improved the security reliability of device.Because PMNT monocrystalline self is more crisp, intensity is low (only be piezoelectric ceramic 1/3), be easy to generate micro-crack again in growth defect, the inhomogeneous and actual processing of single-crystal element, this can cause the intensity of PMNT single-crystal element further descend (being lower than 30Mpa).
(3) to apply mode easy for stress; Can apply the compression of suitable size according to actual needs, the high mechanical-electric coupling performance of PMNT monocrystal material is brought into play, the receiving sensitivity of longitudinal vibration transducer is adjusted control.
(4) can be as required; Control making transmitting sensitivity height to applying prestressing force, receiving sensitivity also will improve the PMNT single-crystal longitudinal vibration transducer of 2-3dB than conventional method simultaneously.
Description of drawings
Fig. 1 is the dielectric property curve of PMNT monocrystalline; The dielectric property curve of two samples of expression among the figure;
Fig. 2 is the structural representation of conventional vertical array transducer
Fig. 3 is the conventional afterburning mode schematic diagram of common longitudinal vibration transducer
Fig. 4 is the structure and the afterburning mode schematic diagram of longitudinal vibration transducer of the present invention
Fig. 5 is that the capacitance variations curve break of PMNT monocrystal material appears at about 5.5Mpa ± 0.5Mpa and schemes
The drawing explanation:
-2 tail loads-3 of previous irradiation head-1 piezoelectric element heap
Nut-4 stress screw rod-5 quartz pressure sensor-6
Anchor clamps load big screw rod-7 anchor clamps locking nut-8 is bench vice-9 fixedly
Embodiment
Embodiment 1:
With reference to the structure of figure 2, having made a kind of resonance frequency is the vertical array transducer of PMNT monocrystalline of 11KHz, according to the prestressed mode of applying of Fig. 4, in detail method of the present invention is described in detail:
(1), adopt the Ansys software design to go out used material, size and the quantity thereof of the PMNT single-crystal longitudinal vibration transducer each several part that this resonance frequency is 11KHz (mainly comprising radiation head 1, tail load 3 and middle piezoelectric element heap 2) at first according to the structure of vertical array transducer shown in Figure 2.Wherein the material of previous irradiation head 1 and tail load 3 is distinguished aluminium and copper, and the face of previous irradiation head 1 is designed to square 40 * 40mm, and tail load 3 is φ 20 * φ 7 * 32mm, uses a common stress screw rod 5, and its diameter is φ 7mm.Piezoelectric element heap 2 is made up of 8 PMNT ferro-electricity single crystals that Shanghai silicate is provided, and this disk center has the hole.The chemical constituent of this PMNT monocrystalline is positioned near the accurate homotype phase boundary (MPB), is 67/33, and cut type is (001) direction, and PMNT ferro-electricity single crystal chip size is φ 16 * φ 7 * 3mm, piezoelectric property d
33〉=1200pC/N.
(2) use acetone that the surface of the selected vertical array transducer each several part of step (1) is cleaned up fully then, again the previous irradiation head 1 and the front end of stress screw rod 5 are twisted front end together, smear the very thin high-temp epoxy glue of last layer again on PMNT single-chip surface, and the scale copper that will add a slice φ 16 * φ 7 * 0.2mm between two PMNT monocrystalline is as electrode, and be stacked together and form piezoelectric element heap 2, electrical way according to parallel connection is through in the stress screw rod, and the scale copper that will add a slice φ 16 * φ 7 * 0.2mm between per two monocrystalline is as electrode, after 8 single-chips feed into the stress screw rod entirely, again sticking entering in the stress screw rod also overlapped in the tail load, after at last nut being screwed into stress screw rod tail end gently, the vertical array transducer that assembling is finished just can apply and give stress;
(2) adopt afterburning mode II to apply prestressing force (as shown in Figure 4), the prestressed mode that applies of present embodiment is different from the prestressed mode of applying of prior art, not earlier transducer to be compressed in advance with anchor clamps, after treating that prestressing force bar 5 is tightened (using anchor clamps locking nut 8 with the big screw rod 7 of anchor clamps load), again anchor clamps are decorporated; The prestressed mode (can measure the size of exerting pressure in real time) that applies of present embodiment: the previous irradiation head 1 of fixing the longitudinal vibration transducer that assembles with bench vice 9, also the quartz pressure sensor 6 with gaging pressure size usefulness is clipped between tail load and the piezoelectric chip heap 2 (with reference to figure 4), to indulge the 4 usefulness torque wrenches of the nut on the stress screw rod 5 stubborn the forcing together of each several part of array transducer then, this prestressed size that applies is controlled at 5Mpa, and the unnecessary epoxy glue that each several part is extruded out is cleaned with acetone then.Again being all each anodal copper electrode sheet with a wire bonds together, as the positive pole of transducer, and each the copper electrode sheet that is all negative pole with a wire bonds together, as the negative pole of transducer;
(3) in order to make the epoxy glue dry solidification, vertical array transducer will be put into 40 ℃ low-temperature bake oven and carry out 30 hours curing.After the PMNT single crystal transducer solidified, the capacitance size of measuring it with capacitance meter was 10.7nF.
(4) according to the transducer sample of above making sulfuration sealing: vulcanize under 40 ℃ temperature with polyurethane rubber and to be sealed to single gust in 24 hours.Pond in Acoustical Inst., Chinese Academy of Sciences acoustic metrology testing station is tested, emission maximum voltage sensibility Svmax=145.7dB (respective frequencies is 11KHz), maximum reception voltage response sensitivity is Momax=-171.1dB (respective frequencies is 13KHz); Unidimensional, isostructural piezoelectric ceramic transducer is applying 5Mpa emission maximum sensitivity S vmax=143.2dB (respective frequencies is 14.5KHz), and maximum reception voltage response sensitivity is Momax=-169.4dB (respective frequencies is 15KHz).
Embodiment 2: with reference to the structure of Fig. 2, by pressuring method and example 1 described step shown in Figure 4, make applying the prestressing force size and be the PMNT single crystal transducer of 12.0Mpa, be cured 40 hours then under 50 ℃ of low temperature.The capacitance size that records the PMNT single crystal transducer after the curing with capacitance meter is 16.5nF.Subsequently, be sealed to single battle array at 40 ℃ of following PMNT single crystal transducers in 24 hours with the polyurethane rubber sulfuration.The pond test result shows: the emission maximum voltage sensibility Svmax=147.0dB of this PMNT single crystal transducer (respective frequencies is 11KHz), maximum reception voltage response sensitivity is Momax=-172.5dB (respective frequencies is 14KHz).Compare with the PMNT single crystal transducer of example 1, its transmitting sensitivity is higher, and receiving sensitivity is then more lower slightly.
Embodiment 3: with reference to the structure of Fig. 2, by pressuring method and example 1 described step shown in Figure 4, make applying the prestressing force size and be the PMNT single crystal transducer of 6.0Mpa, be cured 70 hours then under 60 ℃ of low temperature.At 60 ℃ the PMNT single crystal transducer was sealed to single battle array in 40 hours with the vulcanization of rubber.
It should be noted last that: above embodiment is the unrestricted technical scheme of the present invention in order to explanation only, although the present invention is had been described in detail with reference to the foregoing description, those of ordinary skill in the art is to be understood that: the inventive method is made amendment or is equal to replacement, and not breaking away from any modification or partial replacement of the spirit and scope of the present invention, it all should be encompassed in the middle of the claim scope of the present invention.
Claims (5)
1. method of making niobic magnesium acid lead-lead titanate single-crystal longitudinal vibration transverter may further comprise the steps:
(1) adopts Ansys software at first as required, design previous irradiation head in the PMNT single-crystal longitudinal vibration transducer, tail load and piezoelectric chip heap material, size and quantity thereof that each several part adopted, wherein the piezoelectric chip heap comprises that PMNT single-chip that 8 centers have a hole stacks and makes;
(2) the vertical array transducer of assembling: use acetone previous irradiation head with the selected vertical array transducer of step (1), after tail load and piezoelectric chip heap each several part material surface clean up, again the previous irradiation head is screwed in the stress screw front end, smear last layer high-temp epoxy glue on 8 PMNT single-chip surfaces, and between two PMNT single-chips, to add a slice copper sheet as electrode, be stacked together according to the electrical way of parallel connection, described 8 PMNT single-chips are through on the stress screw rod, after 8 PMNT single-chips feed into the stress screw rod entirely, again the tail load is also overlapped and be bonded on the stress screw rod, after at last nut being fixed on the stress screw rod other end, vertical array transducer is finished in assembling;
(3) apply and give stress: the previous irradiation head of fixing the longitudinal vibration transducer that step (2) assembles with bench vice, take directly the single prestressing force that applies in the tail load, by the prestressing force size that the fastening nut adjustment is applied, the described prestressing force size that applies is 5-12.0Mpa; Again being all each anodal copper electrode sheet with a wire bonds together, as the positive pole of transducer, and each the copper electrode sheet that is all negative pole with a wire bonds together, as the negative pole of transducer;
(4) solidify: with the vertical array transducer that step (3) is made, the low-temperature bake oven of putting into 30-60 ℃ carries out 20-72 hour curing;
(5) carry out the integral sealing sulfuration: with the vertical array transducer that step (4) is made, sulfuration is 20-40 hour under 30-60 ℃ temperature, is sealed to single battle array, promptly obtains niobic magnesium acid lead-lead titanate single-crystal longitudinal vibration transverter of the present invention.
2. by the method for the described making niobic magnesium acid lead-lead titanate single-crystal longitudinal vibration transverter of claim 1, it is characterized in that: described copper sheet size as electrode is φ 16 * φ 7 * 0.2mm.
3. by the method for the described making niobic magnesium acid lead-lead titanate single-crystal longitudinal vibration transverter of claim 1, it is characterized in that: the material of described previous irradiation head and tail load is aluminium or steel respectively.
4. press the method for the described making niobic magnesium acid lead-lead titanate single-crystal longitudinal vibration transverter of claim 1, it is characterized in that: the chemical constituent of described PMNT ferro-electricity single crystal is positioned near the accurate homotype phase boundary (MPB), be 67/33, cut type is (001) direction, wafer size is φ 16 * φ 7 * 3mm, piezoelectric property d
33〉=1200pC/N.
5. by the method for the described making niobic magnesium acid lead-lead titanate single-crystal longitudinal vibration transverter of claim 1, it is characterized in that: the sealing sulfuration in the described step (5) comprises: adopt vulcanization of rubber sealing technology, or liquid polyamine fat rubber perfusion sealing.
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| CNB2005100932789A CN100479215C (en) | 2005-08-23 | 2005-08-23 | Method for making niobic magnesium acid lead-lead titanate single-crystal longitudinal vibration transverter |
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Cited By (7)
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| CN102534788A (en) * | 2012-03-05 | 2012-07-04 | 中国科学院福建物质结构研究所 | Ferroelectric single crystal containing Pb(Ga1/2Nb1/2)O3, Pb(Mg1/3Nb2/3)O3 and PbTiO3, as well as preparation method and application of ferroelectric single crystal |
| CN107611254A (en) * | 2017-08-03 | 2018-01-19 | 大连理工大学 | A kind of diffusion interlinked devices of PZT/Si |
| CN110012402A (en) * | 2019-03-25 | 2019-07-12 | 中国船舶重工集团公司第七一五研究所 | A kind of extensional vibration composite transducers |
| CN110580893A (en) * | 2019-09-29 | 2019-12-17 | 西北工业大学 | Cascade piezoelectric ceramic underwater acoustic transducer |
| CN113870952A (en) * | 2021-08-18 | 2021-12-31 | 哈尔滨工程大学 | Elastic modulus calculation method based on trans-scale polycrystalline aluminum material under radiation damage |
| CN115086831A (en) * | 2022-06-16 | 2022-09-20 | 上海船舶电子设备研究所(中国船舶重工集团公司第七二六研究所) | Method and system for manufacturing underwater sound longitudinal transducer based on mechanical control link |
| CN115884037A (en) * | 2022-11-16 | 2023-03-31 | 中国科学院声学研究所 | Multi-excitation low-frequency high-power broadband underwater acoustic transducer |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69031839T2 (en) * | 1989-04-07 | 1998-05-07 | Mitsui Petrochemical Ind | Layered ceramic assembly and method of making the same |
| CN1080777C (en) * | 1999-02-11 | 2002-03-13 | 中国科学院上海硅酸盐研究所 | Method for preparing relaxing ferroelectric single crystal lead magnoniobate |
| KR20010010169A (en) * | 1999-07-16 | 2001-02-05 | 윤종용 | Ferroelectric memory having a dielectric layer of SiOF and Method for fabricating the dielectric layer |
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- 2005-08-23 CN CNB2005100932789A patent/CN100479215C/en not_active Expired - Fee Related
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| CN102534788A (en) * | 2012-03-05 | 2012-07-04 | 中国科学院福建物质结构研究所 | Ferroelectric single crystal containing Pb(Ga1/2Nb1/2)O3, Pb(Mg1/3Nb2/3)O3 and PbTiO3, as well as preparation method and application of ferroelectric single crystal |
| CN107611254A (en) * | 2017-08-03 | 2018-01-19 | 大连理工大学 | A kind of diffusion interlinked devices of PZT/Si |
| CN107611254B (en) * | 2017-08-03 | 2019-08-09 | 大连理工大学 | A kind of diffusion interlinked device of PZT/Si |
| CN110012402A (en) * | 2019-03-25 | 2019-07-12 | 中国船舶重工集团公司第七一五研究所 | A kind of extensional vibration composite transducers |
| CN110580893A (en) * | 2019-09-29 | 2019-12-17 | 西北工业大学 | Cascade piezoelectric ceramic underwater acoustic transducer |
| CN110580893B (en) * | 2019-09-29 | 2023-05-09 | 西北工业大学 | Cascaded piezoelectric ceramic underwater acoustic transducer |
| CN113870952A (en) * | 2021-08-18 | 2021-12-31 | 哈尔滨工程大学 | Elastic modulus calculation method based on trans-scale polycrystalline aluminum material under radiation damage |
| CN113870952B (en) * | 2021-08-18 | 2024-04-23 | 哈尔滨工程大学 | Elastic modulus calculation method based on trans-scale polycrystalline aluminum material under radiation damage |
| CN115086831A (en) * | 2022-06-16 | 2022-09-20 | 上海船舶电子设备研究所(中国船舶重工集团公司第七二六研究所) | Method and system for manufacturing underwater sound longitudinal transducer based on mechanical control link |
| CN115884037A (en) * | 2022-11-16 | 2023-03-31 | 中国科学院声学研究所 | Multi-excitation low-frequency high-power broadband underwater acoustic transducer |
| CN115884037B (en) * | 2022-11-16 | 2023-10-13 | 中国科学院声学研究所 | Multi-excitation low-frequency high-power broadband underwater acoustic transducer |
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