CN1912999A - 薄膜磁头滑块的abs加工方法 - Google Patents
薄膜磁头滑块的abs加工方法 Download PDFInfo
- Publication number
- CN1912999A CN1912999A CNA200610105858XA CN200610105858A CN1912999A CN 1912999 A CN1912999 A CN 1912999A CN A200610105858X A CNA200610105858X A CN A200610105858XA CN 200610105858 A CN200610105858 A CN 200610105858A CN 1912999 A CN1912999 A CN 1912999A
- Authority
- CN
- China
- Prior art keywords
- carbon film
- abs
- mentioned
- projection
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 31
- 238000003672 processing method Methods 0.000 title abstract 2
- 239000010408 film Substances 0.000 claims abstract description 88
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 87
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 87
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 38
- 239000010703 silicon Substances 0.000 claims abstract description 38
- 238000001020 plasma etching Methods 0.000 claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 claims description 24
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 230000006978 adaptation Effects 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- VQYHBXLHGKQYOY-UHFFFAOYSA-N aluminum oxygen(2-) titanium(4+) Chemical compound [O-2].[Al+3].[Ti+4] VQYHBXLHGKQYOY-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/60—Fluid-dynamic spacing of heads from record-carriers
- G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
Description
Claims (3)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP229025/2005 | 2005-08-08 | ||
JP2005229025A JP2007048342A (ja) | 2005-08-08 | 2005-08-08 | 薄膜磁気ヘッドスライダのabs加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1912999A true CN1912999A (zh) | 2007-02-14 |
CN100416656C CN100416656C (zh) | 2008-09-03 |
Family
ID=37717406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200610105858XA Expired - Fee Related CN100416656C (zh) | 2005-08-08 | 2006-07-13 | 薄膜磁头滑块的abs加工方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7554770B2 (zh) |
JP (1) | JP2007048342A (zh) |
CN (1) | CN100416656C (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101562017B (zh) * | 2008-04-16 | 2012-09-05 | 新科实业有限公司 | 用于在磁头衬底上形成空气承载表面的过程中防止形成栅突的方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7851138B2 (en) * | 2007-07-19 | 2010-12-14 | Hitachi Global Storage Technologies, Netherlands, B.V. | Patterning a surface comprising silicon and carbon |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH103629A (ja) * | 1996-06-14 | 1998-01-06 | Asahi Komagu Kk | 薄膜磁気ヘッドスライダーの製造方法 |
US5943187A (en) * | 1997-06-18 | 1999-08-24 | International Business Machines Corporation | Carbon overcoat for a slider with improved step coverage |
CN1270293C (zh) * | 1999-12-28 | 2006-08-16 | 阿尔卑斯电气株式会社 | 在媒体相对面上设置有凸部的磁头滑动块和其制造方法 |
JP3742796B2 (ja) * | 2003-01-31 | 2006-02-08 | アルプス電気株式会社 | 磁気ヘッドスライダの製造方法 |
JP2006107607A (ja) * | 2004-10-05 | 2006-04-20 | Hitachi Global Storage Technologies Netherlands Bv | 磁気ヘッド及びその製造方法 |
-
2005
- 2005-08-08 JP JP2005229025A patent/JP2007048342A/ja not_active Withdrawn
-
2006
- 2006-07-13 CN CNB200610105858XA patent/CN100416656C/zh not_active Expired - Fee Related
- 2006-07-25 US US11/459,808 patent/US7554770B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101562017B (zh) * | 2008-04-16 | 2012-09-05 | 新科实业有限公司 | 用于在磁头衬底上形成空气承载表面的过程中防止形成栅突的方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2007048342A (ja) | 2007-02-22 |
US20070030598A1 (en) | 2007-02-08 |
CN100416656C (zh) | 2008-09-03 |
US7554770B2 (en) | 2009-06-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: TDK CORP. Free format text: FORMER OWNER: ALPS ELECTRIC CO., LTD. Effective date: 20080125 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20080125 Address after: Tokyo, Japan, Japan Applicant after: TDK Corp. Address before: Tokyo, Japan, Japan Applicant before: Alps Electric Co., Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080903 Termination date: 20190713 |