CN1910489A - Laser beam incident optical device - Google Patents
Laser beam incident optical device Download PDFInfo
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- CN1910489A CN1910489A CN 200580003029 CN200580003029A CN1910489A CN 1910489 A CN1910489 A CN 1910489A CN 200580003029 CN200580003029 CN 200580003029 CN 200580003029 A CN200580003029 A CN 200580003029A CN 1910489 A CN1910489 A CN 1910489A
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Abstract
A step-index-type optical fiber (101) made of a material containing quartz, and having a clad thickness 0.035-0.1 times the core diameter and a numerical aperture NA of 0.06-0.22 is used. A laser beam (L) from a giant-pulse-oscillation-system solid laser oscillator (111) having a peak power of over 10 MW is shone divergently to the incident end surface (102) of the optical fiber, whereby enabling a laser beam to be transmitted without damaging the optical fiber.
Description
Invention field
The present invention relates to make peak power more than or equal to the laser stabilization of the giant-pulse mode of oscillation of 10MW be injected into the laser beam incident optical device that optical fiber is used.
Background technology
In the past, lured aspects such as (Japanese: Lure rises) fluorescence analysis or laser-impact, used the laser that obtains at solid laser oscillator by peak power more than or equal to giant-pulse (GP) mode of oscillation of counting MW at laser ablation processing, laser.
On the so big laser of through-put power, for example adopt the optical fiber of the mutation index type of quartzy material.
And the optical fiber of quartzy material can transmit the energy up to number KW under the situation of continuous oscillation (CW) laser.But with the pulsewidth form pulse energy of the short-pulse laser about number nsec its peak power of laser of surpassing tens of mJ for more than or equal to number MW.
The pulse energy of known short-pulse laser is compared more than or equal to 1000 times with the pulse energy of continuous oscillation laser, and it is very high that peak power density also becomes, and reaches 10
-1～1.0GW/cm
2Grade.Therefore, optical fiber is injured to be damaged owing to reasons such as electron avalanche phenomenon or multi-photon absorption cause, and just can not transmit laser.Also have, have report to claim: quartzy (quartz glass) material because of the impaired threshold value of pulse laser is the about 5nsec of pulsewidth, then be about 100GW/cm
2About (' laser handbook ' laser optics can be shown, the オ-p463 of system publishing house, 473).
Therefore, the practical limit when being transmitted in optical fiber during the aerial laser short-pulse laser that distributes is now tried with pulsewidth 5nsec, the situation that the Nd:YAG laser of 10Hz is injected into the optical fiber of core diameter 1mm of vibrating is that example describes repeatedly, according to pulse energy is about 30～40mJ, is that (peak power density of core diameter is 0.76～1.0GW/cm to 6～8MW relatively according to peak power just
2).
From as can be known above-mentioned: present situation is when the defeated short-pulse laser more than or equal to 10MW of tendency to develop, because of inside of optical fibre impaired, so can not transmit laser in fact.The transmission that will utilize optical fiber just is as prerequisite, and the laser that solid laser oscillator produces mainly is continuous oscillation (CW) laser, and the short-pulse laser of peak power exceedance MW is the quite thing of difficulty of part by Optical Fiber Transmission.
Also have,, had laser and optical fiber spatially to obtain the report of coupling in order to make laser be injected into the example of optical fiber with the conduct of Optical Fiber Transmission laser.There is report to claim: in this case, be limited to for the incident bore that is injected into optical fiber in the numerical aperture NA of core diameter with interior and optical fiber of optical fiber, make laser convergence in the incident end face of optical fiber and inject (the clear Botong in ' laser processing technology ', river work, Nikkan Kogyo Shimbun, pp.34～37) laser.
But, known when making the high laser convergence of peak power be injected into optical fiber, produce local convergence at inside of optical fibre laser, raise in the particular portion office of optical fiber energy density, inside of optical fibre is impaired.In addition,, also know to alleviate the laser convergence degree methods, but under the situation of peak power exceedance MW, prevent fully that the convergence of inside of optical fibre laser from being quite difficult for preventing that inside of optical fibre from producing laser convergent purpose.
Also have, think that according to the report of non-patent literature 2 following consideration is appropriate, promptly at inside of optical fibre, because of laser is restrained, cause the impaired main cause of optical fiber to be: owing to also raise with high its electric field intensity of laser of peak power, the refractive index of the quartz material of optical fiber changes because of the effect part of highfield, owing to a kind of lens effect produces from convergence.
In addition, there is a kind of method to be, for can transmision peak power greater than 10MW laser, after the sectioned lens that the laser after amplifying is injected into array-like spatially is divided into dozens of, be arranged at will all cutting apart number that the collector lens of side makes laser be injected into optical fiber after the array.
Though above-mentioned method is arranged, promptly for can transmision peak power greater than 10MW laser, after the sectioned lens that laser after amplifying is injected into array-like spatially is divided into dozens of, make laser be injected into optical fiber with will all cutting apart several square afterwards collector lenses of array that are arranged at, but the size that can produce owing to the sectioned lens that is arranged in array-like is about 2mm, so for example for will cut apart the number as cut apart 81 times (9 * 9=81), just convex lens that need 2mm is square in length and breadth 9 be the sectioned lens group (fly's-eye lens) of 18mm * 18mm side by side.But the problem that exists is the sectioned lens group, be that the production cost of fly's-eye lens is very high.
In addition, to cut apart number as one group of sectioned lens group transversely that has 9 cylindrical lenss of curvature vertically to form a line along the direction of wide 2mm with wide 2mm * length 18mm, and as another group by 9 on same lens laterally form a line vertically on the sectioned lens group, by above-mentioned two groups of lens combination are combined, also can obtain the effect identical with above-mentioned fly's-eye lens.Though but the cost of lens has reduction slightly, and the problem that exists to be the part number of packages increase and increase owing to it keeps used reason resulting costs such as structural member.
In addition, using under the situation of fly's-eye lens,, the size of lens as 18mm when square, is being required the cross dimensions (beam diameter) of laser to be amplified to and is the promptly about 26mm of foursquare diagonal line of 18mm on one side even according to cutting apart several 81=9 * 9.
Have again, under the situation that adopts fly's-eye lens, except the problem that above-mentioned cost increases, also exist the influence of the reflection loss that produces because of each lens boundary place to cause transfer efficiency to reduce by 10～20% problem, and the problem that must adjust the position of fly's-eye lens.
The object of the present invention is to provide a kind of laser beam incident optical device of cheapness, be injected in the beam incident optical device of incident end face of optical fiber at this laser that peak power is sent greater than the solid laser oscillator of the giant-pulse mode of oscillation of 10MW, can make optical fiber transmit laser, transfer efficiency can not reduce, not need complicated adjustment injury-freely.
Summary of the invention
Beam incident optical device of the present invention makes peak power greater than the laser that the solid laser oscillator of the giant-pulse mode of oscillation of 10MW sends, and is injected into the incident end face of optical fiber, has: assemble the collector lens that laser that described solid laser oscillator sends is used; And the incident end face that optical fiber is set at the laser focusing point back of this collector lens assigned position, make described laser be injected into the fiber position adjusting mechanism that the incident end face of optical fiber is used as the light of diversity, described optical fiber is that 0.035～0.1 times, numerical aperture NA are the optical fiber of 0.06～0.22 mutation index type for the thickness with the covering of quartzous material, relative core diameter.
And, owing to be to adopt quartzous material, relatively the thickness of the covering of core diameter is that 0.0035～0.1 times, numerical aperture NA are the optical fiber of 0.06～0.22 mutation index type, therefore by with peak power greater than 10MW be injected into the incident end face of this optical fiber from the laser of the solid laser oscillator of giant-pulse mode of oscillation as diversity, can make optical fiber transmit laser injury-freely.
Description of drawings
Fig. 1 is the summary pie graph of an example of the embodiment of expression laser beam incident optical device of the present invention.
The summary pie graph that Fig. 2 adopts the transmission mode of the light-gathering optics of dispersing the incident mode to use for explanation.
Fig. 3 is the figure that concerns usefulness between the focal length of expression incident angle of optical fiber and collector lens.
Fig. 4 is the figure that concerns usefulness between the incident angle of divergence of expression incident angle of optical fiber and collector lens.
Fig. 5 is the incident mode of expression optical fiber and the figure that concerns usefulness between transmission of power.
Fig. 6 A is the cut-open view of shaft axis of optic fibre direction.
Fig. 6 B for the cut-open view of the direction of the shaft axis of optic fibre direction quadrature shown in Fig. 6 A.
Fig. 7 is the figure that concerns usefulness between expression cladding thickness and transmission of power.
Fig. 8 is the figure that concerns usefulness between expression core diameter and transmission of power
Fig. 9 is injected into the incident angle of optical fiber and the figure that concerns usefulness between transmission of power for expression
Figure 10 is the summary pie graph of expression other embodiment of laser beam incident optical device of the present invention.
The laser that Figure 11 is equipped with laser beam incident optical device of the present invention for expression one example has lured the summary pie graph of fluorescent analysis apparatus.
Embodiment
Below, with reference to accompanying drawing one embodiment of the present invention is described.
Utilize Fig. 1 to Fig. 9, the embodiment of laser beam incident optical device is described.
As shown in Figure 1, laser beam incident optical device 11 does not decrease optical fiber 101 for the pulse laser that peak power is produced greater than the solid laser oscillator by the giant-pulse mode of oscillation (laser aid) 111 of 10MW and is injected into the device of incident end face 102 of the optical fiber 101 of regulation core diameter and cladding thickness with less loss.
Laser beam incident optical device 11 has: the light beam cross section diameter that will be supplied with by solid laser oscillator 111 is the collector lens 13 of the laser L optically focused of prescribed level; And make distance between the incident end face 102 of collector lens 13 and optical fiber 101 remain the fiber position adjusting mechanism 15 of certain distance.
Fiber position adjusting mechanism 15 has: the collector lens maintaining part 16 that keeps collector lens 13; The optical fiber maintaining part 17 that keeps optical fiber 101; And the adjustment part 18 of adjusting the interval usefulness of the incident end face 102 of optical fiber 101 and collector lens 13 subtends that collector lens maintaining part 16 is kept.Adjust optical fiber 101 by this adjustment part 18, the position of focus point A back predetermined distance is promptly only left in the focal position that makes the incident end face 102 of optical fiber 101 be positioned at collector lens 13.Also have, travel mechanisms such as adjustment part 18 is can armrest moving, motor and gear mechanism, will and optical fiber maintaining part 17 on collector lens maintaining part 16 between distance setting in position arbitrarily.
Also have, the assigned position of focus point A back predetermined distance is promptly only left in the focal position that the incident end face 102 of optical fiber 101 is configured in collector lens 13, and this is to be injected into the laser L of incident end face 102 of optical fiber 101 as the light of diversity.Just, making the incident end face 102 and the distance between the collector lens 13 of optical fiber 101 is the light of diversity for the best by the laser L that makes the incident end face 102 that is injected into optical fiber 101, thereby be injected into laser L certain location convergence in optical fiber 101 of optical fiber 101, its result, the peak power density of optical fiber 101 specific location raises, and prevents optical fiber 101 impaired.
In addition, incident end face 102 by making optical fiber 101 and the distance between the collector lens 13 be for best, thereby can prevent at the peak power density of laser L greater than the size of regulation 100GW/cm for example
2When, because the focus point A of collector lens 13 goes up the influence of the air breakdown that takes place, laser L can not stably transmit, and the plasma of air breakdown generation arrives the incident end face 102 of the incident end face 102 damage optical fiber 101 of optical fiber 101.
Utilizing Fig. 2～Fig. 4 to be specifically described, for example is about 1～tens mm by the distance between the incident end face 102 of the focus point A of collector lens 13 convergent laser L and optical fiber 101.
That is, the pulse energy of establishing laser L is E[Wt], the pulsewidth of laser L is t[sec], peak power density that the threshold value of air breakdown takes place is Pth[Wt/cm
2], the optically focused radius of the laser L that assembled by collector lens 13 is ω [mm], then optically focused radius ω can use formula (1) to represent.
ω＝[E/(Pth×π×t)] …(1)
In addition, establishing the laser peak power that is transmitted again is P[W], then formula (1) is rewritten as formula (2).
ω＝[P/(Pth×π)] …(2)
On the other hand, the angle of divergence of establishing the laser L that is injected into collector lens 13 is θ
1The focal length of (half-angle) [rad], collector lens 13 is f[mm], then optically focused radius ω can use formula (3) expression.
f×θ
1＝ω …(3)
In addition, as the light beam section bore of establishing laser L be that 13 distance is D to r (radius) [mm] from solid laser oscillator 111 to collector lens
1[mm] is then according to the focal distance f [mm] of collector lens 13 be injected into the angle of divergence θ of the laser L of collector lens 13
1(half-angle), condensing angle (incident angle when promptly the laser L that is assembled by collector lens 13 the is injected into optical fiber 101) θ of the laser L that assembles by collector lens 13
1The available formula of (half-angle) [rad] (4) is obtained.
θ
1＝-r/f+(1-D
1/f)×θ
1 …(4)
Therefore, from formula (2)～formula (4) as can be known: focal length of lens f, aperture of lens (light beam section bore) r, be injected into the incident angle θ of the laser L of optical fiber 101
1, solid laser oscillator 111 is to the distance D between the collector lens 13
1, laser L peak power P, and the peak power density Pth that the threshold value of air breakdown takes place have relation by formula (5) decision.
f＝[-(r-α)+{(r-α)
2-4×θ
2×α×D
1}]/(2×θ
2)
：α＝[P/(Pth×π)] …(5)
According to formula (5), can obtain on the focus point A of collector lens 13, the focal distance f of the collector lens 13 of air breakdown does not take place.That is, according to the focal distance f of the collector lens of obtaining by formula (5) 13 and formula (3) with can obtain incident angle (the being the angle of divergence) θ of the laser L that is injected into collector lens 13 according to formula (1) or formula (2)
1So, be set at θ if will be injected into the incident angle of the laser L of collector lens 13
1, air breakdown can not take place then, can make laser L be injected into optical fiber 101 efficiently.
As an example, if the bore of laser L (diameter) is 2～13mn, Fig. 3 represents to make under the situation that the distance between collector lens 13 and the solid laser oscillator 111 changes in the scope of 10～500mm, calculate the result of the focal distance f of available collector lens 13, Fig. 4 represents to calculate incident angle (angle of divergence) θ of the laser L that is injected into collector lens 13
1The result.
For example, the bore of supposing laser L is r=3mm (diameter 6mm), solid laser oscillator 111 distance D to collector lens 13
1Be D
1=100mm, the incident angle (condensing angle) that is injected into the laser L of optical fiber 101 from collector lens 13 are θ
2=0.15rad, peak power are that P=20MW, the peak power density that the threshold value of air breakdown takes place are Pth=100GW/cm
2, then ask the focal distance f of collector lens 13 and be injected into the incident angle θ of the laser of collector lens 13
1, result of calculation is f=24.9mm, θ
1=3.2mrad (full-shape is 6.4mrad).
For example, the focal distance f substitution formula (4) of the collector lens 13 that will be set by actual measurement will be to the incident angle θ of optical fiber 101
2Size in the scope of the NA that is no more than the optical fiber that is injected into laser L, set the focal length (with reference to Fig. 3) of collector lens 13.
That is to say, make condensing angle (being injected into the incident angle of optical fiber 101) θ when laser L is injected into optical fiber 101 though Fig. 3 is illustrated in
1The focal position of the collector lens 13 of air breakdown takes place when the variation, still, make the bore (light beam cross section diameter) of laser L and the result that change in location is set of collector lens 13, lower limit is 0.06rad.
Yet because the influence of the aberration of the quality (spatial model or corrugated etc.) of laser or collector lens 13 etc., Shi Ji optically focused diameter is bigger than desirable optically focused diameter sometimes.
In this case, shorten the optically focused equal diameters of the focal length of collector lens 13, the numerical aperture NA (with reference to Fig. 4) when preferably strengthening laser L and being injected into optical fiber 101 until optically focused diameter that air breakdown does not take place of trying to achieve and reality with formula (2).Also has the numerical aperture NA when preferably being injected into optical fiber 101 and be fit to disperse the incident angle θ that is injected into collector lens 13 of incident mode according to laser L
1Between relation be injected into the incident angle θ of the laser L of optical fiber 101
2Lower limit bigger than 0.06rad.
In addition, the optically focused radius of establishing focus point A place be the distance between the incident end face 102 of ω (mm), focus point A and optical fiber 101 be Lf (mm), the laser L light beam cross section diameter incident diameter when being injected into the core of optical fiber 101 be Wi (diameter) (mm), the incident angle θ when laser L is injected into optical fiber 101
2(half-angle) is (rad), then position (position of incident end face 102) the available formula (6) that is provided with of the focus point A of collector lens 13 and optical fiber 101 expression.
Lf＝(Wi-2ω)/(2×tanθ
2)…(6)
Utilize formula (6), the distance L f between the incident end face 102 of the focal position of collector lens 13 (focus point A) and optical fiber 101 for example is set at 0.25～16mm.The minimum value that is injected into bore of specifically establishing the laser of the core that is injected into optical fiber 101 for example is 420 μ m (should by the power of the laser L of optical fiber 101 transmission promptly by the minimum value of the core diameter of energy or peak power decision), in addition, establishes maximal value and for example is 90% i.e. 1350 μ m, Wi=420～1350 μ m, ω=100 μ m (peak power 30MW, the air breakdown generation threshold value 100GW/cm of the maximum core diameter 1500 μ m of the optical fiber 101 that can obtain easily
2Minimum optically focused diameter), θ
2=0.06～0.22rad (narration later on), the scope of the Lf that is fit to is calculated in examination, and the scope of Lf is 0.25～16mm as previously discussed.
In the practicality, establishing the minor increment that can set the incident end face 102 of optical fiber 101 is 1mm, and the distance of 101 incident end face 102 is decided to be the scope of 1～16mm from focus point A to optical fiber.Yet, when distance L f greater than take because the laser L that is not injected into optical fiber 101 also increases, so higher limit for example can be about 10mm.
Better is: the distance L f between the incident end face 102 of collector lens 13 and optical fiber 101 adjusts the result according to practical set, under most situation, is the scope of 1.5mm～5mm.
Below, can be injected into the intensity of the laser L of optical fiber 101 according to the core diameter of optical fiber 101 and cladding thickness explanation.
As mentioned above, knownly will utilize the peak power exceedance MW that the giant-pulse mode of oscillation obtains in desire (according to peak power density will be 10
1～1.0GW/cm
2) laser L when being injected into optical fiber 101, will make that optical fiber 101 is impaired can't to transmit laser L.
Incident angle θ when therefore, distance L f between the incident end face 102 that has only regulation collector lens 13 and optical fiber 101 that illustrated according to Fig. 1, Fig. 2 to Fig. 4 and laser L are injected into collector lens 13
1And make condensing angle theta when the laser L that is assembled by collector lens 13 is injected into the incident end face 102 of optical fiber 101
2, optical fiber 101 just damages sometimes.
Below, the transport property of suitable optical fiber 101 design features and laser L is described.
Fig. 5 represents that to core diameter 1000 μ m, cladding thickness 50 μ m, numerical aperture NA be 0.2 optical fiber 101 laser with bore (light beam cross section diameter) the 700 μ m of pulsewidth 5nsec laser L, establishes incident angle and be the experimental result that 0.02rad is injected into according to the incident mode of dispersing and the general convergence incident mode of Fig. 2 explanation.
Can confirm from Fig. 5: with convergence incident mode, with transmission of power 30mJ (peak power 6MW), optical fiber 101 can damage.In contrast, can not damage for 70mJ (peak power 14MW) optical fiber 101 even disperse incident mode transmission of power by employing yet.
In addition, as optical fiber 101 structural features, known because the core purity of optical fiber is very high difficult by the damage of the energy of laser L, the quartz material with mutation index type of structure as shown in Figure 6.Optical fiber 101 has core 103, be formed at the covering 104 around the core 103 and be formed at coating 105 around the covering 104.
Also have, thickness about covering 104, known to thickening than specific thickness is continuous that effect because of mechanical stress is easy to generate damage when optical fiber 101 is crooked, on the contrary, if the thickness attenuation of covering 104, when the laser L of the peak power that is injected into several MW grades, owing to damage from the effect optical fiber 101 of core 103 leakages to the laser L of covering 104.
In addition, the thickness of covering 104 is littler than the diameter of core 103, for example is about 0.05～0.1 times of diameter of core 103.Therefore, even leak laser L to covering 104 minute quantities, peak power density is higher 10 times than the part of core 103.Also have because in the transmission of laser L common on the border between covering 104 and the core 103 because the diffractive effect that is produced, just like there is standing wave to exist such part peak power to uprise, so on the reduced thickness of covering 104, lower limit is arranged also.
Fig. 7 represents the optical fiber 101 of core diameter 1000m, numerical aperture NA0.2 the laser L of pulsewidth 5nsec, bore (light beam cross section diameter) 700 μ m to change the experimental result of the thickness of covering 104 with the incident mode of the dispersing incident of incident angle 0.02rad according to Fig. 2 explanation.
As can be seen from Figure 7, along with the thickness increase of covering 104 can be transmitted bigger energy.Just can confirm from Fig. 7: when the thickness of covering 104 was 20 μ m, though 40mJ (peak power 8MW) is the limit, thickening by the thickness with covering 104 was 50 μ m, even then 70mJ (peak power 14MW) optical fiber 101 can not damage yet.
Therefore, can confirm from Fig. 7: be greater than and equal 35 μ m in order to transmit thickness more than or equal to the laser L covering 104 of peak power 10MW.In addition, the thickness of covering 104 equals 100m so be less than in case just become greater than 100 μ m that not only hard but also crisp, optical fiber 101 is just not flexible, bending radius becomes big.
On the other hand, about core diameter, though according to and should be by the preset lower limit that concerns between the laser power density of optical fiber 101 transmission, the higher limit of core diameter for example can be judged with the ratio form of the bore (light beam cross section diameter) of relative incident laser L according to Fig. 8 as described below.
The thickness that Fig. 8 represents to establish covering 104 is injected laser L for certain to the optical fiber 101 that core diameter changes, and changes the experimental result of the bore (light beam cross section diameter) of the laser L when being injected into optical fiber 101.
Yi Xia conclusion as can be drawn from Figure 8, although promptly between the light beam cross section diameter (bore) of the laser L of core diameter and incident, difference is arranged, if the incident bore in this scope then can both transmit the laser L of the peak power of identical 10MW as long as the thickness of covering 104 is identical.
That is to say, as shown in Figure 8, obtain equaling 420m for energy transmision peak power is greater than more than or equal to 10MW optically focused diameter.Therefore, consider that relative optically focused diameter has rich preferably core diameter about 80% more than or equal to 500m.
Again, as shown in Figure 9, thickness 50 μ m, numerical aperture NA to core diameter 1000m, covering 104 be 0.2 optical fiber 101 according to dispersing the incident mode, when injecting bore (light beam cross section diameter), change the incident angle θ of the laser L that is injected into optical fiber 101 for the laser L of 700m, pulsewidth 5nsec
2, from above-mentioned experimental result as can be known: in order to make peak power is that laser about 15MW (is 80mJ by Energy Conversion) is injected with low-loss, needs the incident angle θ about 0.06rad
2Also have along with incident angle θ
2Increase can transmit bigger energy, by making incident angle θ
2For about 0.12rad, the laser L about energy transmision peak power 20MW.
On the other hand, on optical fiber 101, there is higher limit in numerical aperture NA when laser L incident, and this higher limit depends on core 103 and 104 borderline diffraction of covering and the laser L that is injected into optical fiber 101 transmits in optical fiber 101.That is to say that the numerical aperture NA of optical fiber 101 is in a single day too small to be dispersed on the incident mode, injects the incident angle θ of optical fiber 101
2Diminish and to obtain effect of sufficient.This point as previously discussed, the laser L that injects optical fiber 101 is in optical fiber 101 inner ad-hoc location everywhere convergents, can cause optical fiber 101 damages.
In addition, the numerical aperture NA one of optical fiber 101 is big, the angle of the laser L of optical fiber 101 ejaculations is increased, for the light beam cross section diameter with regulation also will increase the used illuminating optical system of object irradiating laser L.Glass plano-convex lens about for example utilizing 1 refractive index n for n=1.5, for the laser L that optical fiber 101 penetrates being concentrated on object with imaging multiplying power smaller or equal to 1, consider that from the angle of the making limit of the relative lens curvature of aperture of lens the numerical aperture NA of optical fiber 101 is NA ≈ 0.25rad and following.
Also have, described optical fiber 101 is because the thickness of its covering 104 is thicker than the cladding thickness of general optical fiber, so consider the reduction of physical strength (anti-bending strength), the refractive index of establishing core 103 is n
1, covering 104 refractive index be n
2, then numerical aperture NA can stipulate according to following formula.
NA＝√[(n
1)
2-(n
2)
2]
In addition, optical fiber 101 extensively adopts a kind of method that makes the refractive index reduction of covering 104 in order to add large-numerical aperture NA, owing to increase the amount of the fluorine or the boron that mix covering 104, and become fragile easily, fracture.Also have, consider the thickness that utilizes the covering 104 that Fig. 7 tries to achieve, depend on that the upper limit of the numerical aperture NA of above-mentioned illuminating optical system defined reduces again, be essentially 0.22rad.
Therefore, the numerical aperture NA of optical fiber 101 on be limited to 0.22.Also have because of higher limit along with used optical fiber 101 design features of reality and physical property change, so may not be limited to 0.22 in the upper limit of dispersing the numerical aperture NA that can set optical fiber 101 on the incident mode, for according to optical fiber 101 design features and the fixed numerical value of physical property.
Also have, lower limit is according to focal position that utilizes Fig. 3 and Fig. 4 collector lens 13 and the laser L incident angle θ that is injected into optical fiber 101
2, and the affirmation result that utilizes the core diameter of the optical fiber 101 that Fig. 8 illustrates and the experimental result that is not restricted according to bore (light beam cross section diameter) core diameter of the laser L that is injected into optical fiber 101 and utilize the power transfer ability that Fig. 9 illustrates, can think and the incident angle θ of laser L
2Just can equate numerical aperture NA=0.22rad.
According to the above, the incident mode is dispersed in utilization can transmit 20MW (peak power density 100GW/cm
2) about the optical fiber 101 of laser L of giant-pulse mode of oscillation be preferably in the following scope.
The diameter of core 103 is 500～1500 μ m
The thickness of covering 104 is 35～100 μ m
The numerical aperture NA of optical fiber 101 is 0.06～0.22
The incident angle θ of laser L when also having laser l to be injected into optical fiber 101
2Big as far as possible angle in the formation allowed band of laser beam incident optical device 11 preferably.
According to the above, in order to make the peak power can stable transfer smaller or equal to 10MW short-pulse laser L more than or equal to the pulse laser L of 10MW or peak power, for example under the situation of the numerical aperture NA=0.2 of optical fiber 101, be injected into the incident angle θ of the laser L of optical fiber 101
2Be preferably below the 0.2rad (higher limit of the numerical aperture NA of optical fiber 101).
Below, laser beam incident optical device 11 1 object lessons are described.
Also have, the numerical value that below illustrates is the data of utilizing the laser L of the peak power 22MW that Fig. 9 illustrated in the past, for example utilizing the Nd:YAG laser oscillator of giant-pulse mode of oscillation is solid laser oscillator 111, the laser L that makes pulsewidth 5nsec, pulse energy 110mJ (peak power 22MW=110mJ/5nsec), diameter 6mm on the optical fiber 101 of the quartzy material of mutation index type according to the result of following condition transmission.
Be injected into incident angle (the incident angle of divergence) θ of collector lens 13
1=1.8mrad (half-angle),
Laser bore (light beam cross section diameter) r (radius)=3mm (diameter 6mm),
The interval D that collector lens 13 and solid laser oscillator are 111
1=600mm,
Focal distance f=the 31mm of collector lens 13,
The core diameter 1000 μ m of optical fiber 101,
The thickness 50 μ m of covering 104,
Numerical aperture NA=0.2rad,
Laser L is injected into the incident angle θ of optical fiber 101
1=0.13rad (half-angle),
From the focus point A of collector lens 13 to the distance L f=2mm between the incident end face 102 of optical fiber 101,
Be injected into the incident bore (light beam cross section diameter) of the laser L of optical fiber 101: 700 μ m (diameter).
Also have,, promptly be injected into incident angle (the incident angle of divergence) θ of collector lens 13 according to above-mentioned each numerical value
1The interval D that=1.8mrad, collector lens 13 and solid laser oscillator are 111
1The incident angle θ that is injected into optical fiber 101 that the focal distance f=31mm of=600mm, laser bore (light beam cross section diameter) r (radius)=3mm, collector lens 13 utilizes formula (4) to ask the front to illustrate
2The time, incident angle θ
2=0.13rad can confirm that the scope of the numerical aperture of the optical fiber 101 that the present invention can utilize is the scope of NA=0.06～0.22rad.
Also have, if according to dispersing the incident mode, then the known example that is divided into the compound lens of m * n with employing is made comparisons, then, can make from the light incident side of collector lens 13 and improve about 10% to the transfer efficiency of the exiting side transmission of optical fiber 101 because of eliminating the influence of the reflection loss that produces at each lens boundary place.
Again, with dispersing the incident mode, owing to can reduce the number of optics inscape, laser beam incident optical device 11 whole costs reduce.
Therefore, by using quartzous material, the relative core diameter of the thickness of covering is that 0.035～0.1 times, numerical aperture NA are the optical fiber 101 of 0.06～0.22 mutation index type, be injected into as the light of diversity by incident end face 102 and surpass the laser L that the solid laser oscillator 111 of the giant-pulse mode of oscillation of 10MW sends from peak power to this optical fiber 101, can not damage optical fiber 101 transmission laser, transfer efficiency can not reduce, need not complicated the adjustment, can provide at an easy rate.
Below, utilize Figure 10 that laser beam incident optical device 11 other embodiments are described.
Also have, for identical with the formation of utilizing the embodiment shown in Fig. 1 to Fig. 9 to illustrate, or similarly the same label of formation mark no longer describes in detail.
Laser beam incident optical device 11 has: be provided with between solid laser oscillator 111 and collector lens 13 and give collector lens 13 from the laser L of solid laser oscillator 111 with the optically focused of regulation, and make distance between the incident end face 102 of collector lens 13 and optical fiber 101 keep the fiber position adjusting mechanism 15 of certain distance, reflector laser (return laser light) R that will reflect at the incident end face 102 of optical fiber 101 separates the beam splitter of using as semitransparent mirror (sampling reflective mirror) 31 from solid laser oscillator 111 to the laser L that collector lens 13 sends, and accept the reflector laser R output electric signal corresponding separated by this beam splitter 31 with its intensity, for example conduct has the ccd video camera 32 of the observing unit of the components of photo-electric conversion.Also make the reflector laser R that is separated by light beam separation unit 31 image in imaging len 32 on the not shown sensitive surface of ccd video camera 32 being provided with between ccd video camera 32 and the light beam separation unit 31, the light amount adjusting devices 34 such as decay optical filter that the intensity of adjusting the reflector laser R that is injected into ccd video camera 31 is used also can be set between imaging len 32 and ccd video camera 31 in addition as required.
The information that forms because of the incoming position of the laser L of the incident end face 102 that is injected into optical fiber 101 images in ccd video camera 32.Therefore, image according to the incident end face 102 that obtains by ccd video camera 32, for example make the displacement of the optical fiber maintaining part 17 of fiber position adjusting mechanism 15, the desirable position that can become to utilize Fig. 2～Fig. 4 to illustrate the distance setting of the position of the incident end face 102 of optical fiber 101 and 13 of imaging lens by the travel mechanism that does not specify.
Also have, the focal length of establishing collector lens 13 is f
1, imaging len focal length be f
2, the distance from the incident end face 102 of optical fiber 101 to imaging len 13 be a, the position that ccd video camera 32 must be set (leaving the distance of the incident end face 102 of optical fiber 101) between b, collector lens 13 and the imaging len 33 apart from d when multiplying power is m, can be represented by the formula.
b＝(1+m)×f
2-m
2×a …(11)
m＝f
2/f
1 …(12)
d＝f
2+f
1 …(13)
Utilize formula (12), according to the focal distance f of collector lens 13
1And the focal distance f of the imaging multiplying power m decision imaging len 33 of desire observation
2, then, according to formula (13) and formula (11) position by determining mutual interval of two lens (apart from d) and ccd video camera 32 etc., the incident end face 102 of may observe optical fiber 101.
Now represent, establish the focal distance f of collector lens as an example
1=31mm, relatively from solid laser oscillator 111 send towards the primary optical axis of the laser L of collector lens 13 with miter angle degree configuration beam splitter (sampling reflective mirror) 31, make ccd video camera 32 be positioned at imaging len 33 rear assigned positions, reflector laser R from the incident end face 102 of optical fiber 101 images in ccd video camera 32, adjusts incident while observing with not shown TV Monitor.
Also have, when imaging multiplying power m was essentially 3 times, by formula (12), the focal length that is set as picture lens 33 for example was f
2=100mm, according to being approximately 131mm apart from d between formula (13) collector lens 13 and the imaging len 33.In addition, again because of being about 33mm apart from a between the incident end face 102 of collector lens 13 and optical fiber 101, so the distance between imaging len 33 and the ccd video camera 32 is about 79mm.At this moment, be about 3.2 times according to formula (11) imaging multiplying power.
By fiber position adjusting mechanism 15 adjust between the incident end face 102 of optical fiber 101 and the collector lens 13 apart from a because except adjusting when laser beam incident optical device 11 assemblings, all the other may not be essential, also can make from the light path between solid laser oscillator 111 and the collector lens 13 and save so beam splitter 31, ccd video camera 32 and imaging len 33 etc. are used for the formation of incident status surveillance.
Below, utilize Figure 11 that laser beam incident optical device 11 another other embodiments are described.
Figure 11 represents laser beam incident optical device 11 is used for the example that laser has lured fluorescent analysis apparatus (utilizing LaserInduced Breakdown Spectroscopy laser to lure the high speed analysis device of spectrum analysis method).Though laser has lured fluorescent analysis apparatus restricted slightly a bit on the kind of the sample (material for testing) that can analyze, but have prepare the pretreatnlent of sample stage simply, at a high speed, various advantages such as can intactly be suitable for when material for testing is solid, can expect to be used in wider scope.
The leaded light optical system) 11, illuminating optical system 331, fluoroscopic examination optical system 341, monochromator (photodetector or optical splitter) 351, image mechanism 361, regularly adjusting mechanism 371 and data processor 381 etc. as shown in figure 11, laser has lured fluorescent analysis apparatus 301 to have solid laser oscillator 111, the laser beam incident optical device (transmission laser system: of giant-pulse (GP) mode of oscillation.
As solid laser oscillator 111, for example be laser instruments such as Nd:YAG.Also have from the size of the laser L of solid laser oscillator 111 outputs for example about pulsewidth 5nsec, peak power 14～20MW, transmission of power 70～100mj (peak power density 80GW/cm
2).In addition, solid laser oscillator 111 is comprising oscillation control device, supply unit, cooling device etc. under the situation mostly, no longer describes in detail here.
Laser beam incident optical device 11 with utilize Fig. 1 or Figure 10 to illustrate the same, comprise collector lens 13 of the incident end face 102 that makes laser L that solid laser oscillator 111 sends be injected into optical fiber 101 as the light of diversity etc.Also have, the distance between the incident end face 102 of collector lens 13 and optical fiber 101 is set according to above-mentioned embodiment.
Illuminating optical system 331 has the outgoing end face 106 from the optical fiber 101 of laser beam incident optical device 11 is penetrated and express the collector lens 333 of specialized range that the pulse laser L of diversity for the moment is concentrated on sample S or keeps the sample maintaining part 399 of sample S.Also have, collector lens 333 is at random set with size, shape one activation of sample S.
Fluoroscopic examination optical system (detect photoconduction light optical system) 341 has and is positioned at catching collector lens 343 from the fluorescence of sample S, and the fluorescence that collector lens 343 is caught is injected into the optical fiber 345 of optical splitter (monochromator) usefulness of back level on the sample maintaining part 399.
Regularly adjusting mechanism 371 for example is the master control set that pulse producer or laser have lured fluorescent analysis apparatus 301, the output timing and the ccd video camera of the driving pulse of the not shown supply unit of control supply solid laser oscillator 111, for example control the grid control type I-CCD action regularly etc., the fluorescence that BR sample S according to the rules produces.
The image of data processing equipment 381 temporary image mechanism 361 outputs or spectrophotometric spectra etc., algorithm on the view data that provides by image mechanism 361 etc. etc. is provided according to ' the qualitative recognizer of element ' that prestore, ' element quantitative measurment program ' or with predetermined process, resolves the characteristic of sample S or in early stage as deal with data in its.
Lured at the laser shown in Figure 11 and to have utilized master control set 391 in the fluorescent analysis apparatus 301 (in example shown in Figure 11, be made of one with timing adjusting mechanism 371), regularly generate driving pulse in accordance with regulations, export the laser L of the GP mode of peak power 14～20MW according to this driving pulse from solid laser oscillator 111 with the regulation pulsewidth.
The pulse laser L of solid laser oscillator 111 outputs utilizes collector lens 13 to be transformed into the light of diversity, is injected into optical fiber 101 efficiently, transfers to the outgoing end face 106 of optical fiber 101.
From the laser L that optical fiber 101 penetrates, utilize the collector lens 333 irradiation samples of illuminating optical system 331.Also have, laser L as previously discussed, peak power is 14～20MW, utilizes collector lens 333 for example to become the diameter of hundreds of μ m by optically focused, is 80GW/cm at the moment peak power density of irradiation sample S
2By like this, sample S plasma from being present in each element of sample, is radiated intrinsic separately fluorescence (spectrum that comprises fluorescence) by these ion energies.
This luminous (spectrum that comprises fluorescence) is caught by the collector lens 343 of fluoroscopic examination optical system 341, is injected into monochromator 351 by optical fiber 345.
After, remove spectral components by monochromator 351 from sample S itself, in the contained element of sample S, take out intrinsic spectrum.
Made light-to-current inversion by the spectrum that monochromator 351 takes out by image mechanism 361, for data processing division 381, at the contained element of data processing division 381 particular sample S.For example image mechanism 361 is for example under the situation that is the fft analysis device, by operating personnel's the contained element of visual energy particular sample S.
Also have, before obtaining intrinsic fluorescence spectrum, knownly begin to postpone number μ sec～hundreds of μ sec from plasma luminescence (being irradiating laser L) from the contained element of sample S.So utilize the regularly action of adjusting mechanism 371 (master control set 391) control image mechanism 361.For example when image mechanism 361 is the ccd video camera of band grid, the delay of stipulating is additional to the instrumentation time, the fluorescence spectrum of timing in accordance with regulations simultaneously by a gate turn-on energy instrumentation is needed.
In addition, above-mentioned laser has lured needs the such sample of ICP luminesceence analysis to handle in earlier stage hardly in the fluorescent analysis apparatus 301, can measure rapidly.Also have laser to lure in the fluorescent analysis apparatus 301 when also less, so, all can analyze in the place arbitrarily to the measuring object thing in certain of measuring object thing by blocking to the restriction of space (place or size) to sample S irradiating laser L.
As previously discussed, utilize laser to lure fluorescent analysis apparatus, optical component quantity is few, cheap, efficient, does not use light beam to amplify to cut apart with collimation lens and light beam to use array lens, just can be injected into optical fiber with 1 or two collector lenses (convex lens).
In addition, can provide small-sized, cheap, adopt peak power surpass 10MW the giant-pulse mode of oscillation laser L for example be used for the laser beam incident optical device 11 that laser has lured processes such as fluorescence analysis, laser ablation processing, laser-impact.
Also have, the invention is not restricted to described each embodiment, its implementation phase in as long as in the scope that does not deviate from its main contents, can do various distortion or change.Each embodiment also can be done suitable combination and enforcement as possible in addition, in this case, can obtain the effect of combination results.
Industrial practicality
According to the present invention, then contain quartzy material by employing, relatively the thickness of the covering of core diameter be 0.035～0.1 doubly, numerical aperture NA is the optical fiber of 0.06～0.22 mutation index type; And make peak power super Crossing the laser that the solid laser oscillator of the giant-pulse mode of oscillation of 10MW sends injects as the light of diversity Incident end face to this optical fiber can provide a kind of laser beam incident optical device at an easy rate, and this device can not decrease Hinder Optical Fiber Transmission laser, efficiency of transmission can not reduce, not need complicated adjustment.
Claims (6)
1. laser beam incident optical device makes peak power greater than the laser that the solid laser oscillator of the giant-pulse mode of oscillation of 10MW sends, and is injected into the incident end face of optical fiber, it is characterized in that having
Assemble the collector lens that laser that described solid laser oscillator sends is used; And
At the laser focusing point back of this collector lens assigned position the incident end face of optical fiber is set, makes described laser be injected into the fiber position adjusting mechanism that the incident end face of optical fiber is used as the light of diversity,
Described optical fiber is that 0.035～0.1 times, numerical aperture NA are the optical fiber of 0.06～0.22 ladder refractive index type for the thickness with the covering of quartzous material, relative core diameter.
2. laser beam incident optical device as claimed in claim 1 is characterized in that,
Described optical fiber is core diameter 500～1500 μ m, cladding thickness 35～100 μ m.
3. laser beam incident optical device as claimed in claim 1 or 2 is characterized in that,
With according to any mode in the intrinsic incident extreme angles of half-angle 0.06～0.22rad and optical fiber, laser is injected into the incident end face of described optical fiber.
4. as each described laser beam incident optical device in the claim 1 to 3, it is characterized in that,
Described fiber position adjusting mechanism makes the incident end face of optical fiber be positioned at 1～16mm place, laser focusing point rear of collector lens.
5. laser beam incident optical device as claimed in claim 4 is characterized in that,
Described fiber position adjusting mechanism makes the incident end face of optical fiber be positioned at 1.5～5mm place, laser focusing point rear of collector lens.
6. as each described laser beam incident optical device in the claim 1 to 5, it is characterized in that also having
Be arranged on the semitransparent mirror between solid laser oscillator and the collector lens; And
By this semitransparent mirror, the observing unit of the image of the light of the incident end face of observation optical fiber.
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| JPH01153503U (en) * | 1988-04-15 | 1989-10-23 | ||
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