CN1908723A - Optical multiplexer - Google Patents

Optical multiplexer Download PDF

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Publication number
CN1908723A
CN1908723A CNA2005101339875A CN200510133987A CN1908723A CN 1908723 A CN1908723 A CN 1908723A CN A2005101339875 A CNA2005101339875 A CN A2005101339875A CN 200510133987 A CN200510133987 A CN 200510133987A CN 1908723 A CN1908723 A CN 1908723A
Authority
CN
China
Prior art keywords
light
catoptron
optical multiplexer
optical
output part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005101339875A
Other languages
Chinese (zh)
Inventor
崔命受
朴起梁
尚兑峻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of CN1908723A publication Critical patent/CN1908723A/en
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4256—Details of housings

Abstract

The present invention relates to an optical multiplexer. The optical multiplexer of the invention includes: a plurality of light receive section using for receiving light from the exterior; a light output part, used for outputting light to the outer set; a optical guide part, used for changing the received optical direction from one light receive section of a plurality of light receive sections and guiding to the light output part. Thereby, an optical multiplexer is provided to select one item of light from multiterm light to output.

Description

Optical multiplexer
Technical field
The present invention relates to a kind of optical multiplexer, relate in particular to the optical multiplexer that can carry out selectivity output many received light.
Background technology
Optical splitter is to be used for the light of beam split from the light source input, and detects the optical devices of each optical wavelength intensity of institute's beam split.The user obtains information at light source composition or character according to the data that obtained by optical splitter.This optical splitter is connected to other chamber of being used for semiconductor technology etc. and uses, to be used to be provided at all optical informations that chamber interior produces.
Fig. 1 is the control block diagram that is used to illustrate the existing optical system that adopts optical splitter.As shown in the figure, optical system comprises: a plurality of light sources 10,20,30; Be connected in a plurality of optical splitters 40,50,60 of each light source 10,20,30; Be connected in the light data processing division 70 of optical splitter 40,50,60; External agency.
The light that each light source 10,20,30 provides as analytic target to optical splitter 40,50,60, and emit the light that comprises feature and the information different with other light sources.
40,50,60 pairs of light that receive from light source 10,20,30 of optical splitter carry out beam split, and the optical information of each Wavelength strength is outputed to light data processing division 70.Light data processing division 70 is 80 data that can use of external agency with optical information processing.
Usually, optical splitter 40,50,60 mostly is about 10msec from light source 10,20,30 receptions and processing required time of light most, but light data processing division 70 transmits data with 1～3 second interval to external agency 80 approximately.This explanation is for the All Time that the user obtains institute's light requirement data, and the time of optical splitter 40,50,60 real works is very short, and the service efficiency of hence one can see that optical splitter 40,50,60 is very low.
But, because this optical splitter 40,50,60 all has connection in each light source 10,20,30, thereby become the reason that the entire system manufacturing cost rises, and along with the increase of quantity of light source also will be provided with additional optical splitter, thereby cause the complexity of system architecture.
Summary of the invention
The object of the present invention is to provide a kind of can in many light, select any one and output optical multiplexer.
To achieve these goals, comprise according to optical multiplexer provided by the present invention: a plurality of light receivers are used for from outside reception light; Light output part is used for to external device (ED) output light; The light guide portion is used for changing from the received light direction of some light receivers of described a plurality of light receivers, and it is directed to described light output part.
Described smooth guide portion comprises: catoptron, and the light that is used for receiving from described light receiver reflexes to described light output part; Motor is used to rotate described catoptron; Control part is used to control described motor, to regulate the relative position of the some acceptance divisions among described catoptron and the described a plurality of light receiver.
The light that described catoptron preferably will receive changes about 80 °～100 ° in its path.
Described light receiver with respect to the rotating shaft of described catoptron preferably with equiangularly arranged, to be easy to rotating mirror; And described light receiver is that the center preferably is arranged on the same circumference with described light output part, to improve the optical efficiency of light harvesting.
Can further comprise the optical collector that is used for the light from described mirror reflects is focused on described light output part.
Can further comprise hold at least described catoptron, inwall is the shell of black so that other light influence minimum.
Description of drawings
Fig. 1 is the control block diagram that is used to illustrate traditional optical system;
The decomposing schematic representation of the optical multiplexer that Fig. 2 is provided for foundation one embodiment of the invention;
The control block diagram of the optical multiplexer that Fig. 3 is provided for foundation one embodiment of the invention;
The cut-away view of the optical multiplexer that Fig. 4 is provided for foundation one embodiment of the invention.
Embodiment
Below, describe embodiments of the invention in detail with reference to accompanying drawing.
The optical multiplexer that provides according to one embodiment of the invention is described with reference to Fig. 2 to Fig. 4.The decomposing schematic representation of the optical multiplexer that Fig. 2 is provided for foundation one embodiment of the invention, Fig. 3 is the control block diagram according to optical multiplexer, Fig. 4 is the part cut-away view of expression optical multiplexer.
As shown in the figure, light guide portion 160 and optical collector 170 that optical multiplexer 100 comprises a plurality of light receivers 110 (comprising 111,113,115), light output part 120, the light that is used for receiving from light receiver 110 is directed to light output part 120.And optical multiplexer 100 further comprises the shell 180 that is used to accommodate light guide portion 160 and optical collector 180, and this light guide portion 160 is made of catoptron 130, motor 140 and control part 150.
Optical multiplexer 100 can have multiple shape, but optical multiplexer 100 comprises cylinder blanket 180 and its integral body has cylindrical shape in the present embodiment.A part is accommodated among the shell 180 of cylindrical shape in the inscape of optical multiplexer 100, and remainder to the side of shell 180 or above outstanding.
Shell 180 is inner for being dark brown or black, and applies black pigment etc.This be for: make the inner environment that form as the darkroom of shell 180, and from external isolation light; And, even the light input is arranged, can not influence light guide portion 160 by absorbing this input light yet.For this reason, also special light spacer assembly can be set in shell 180 inside.
Light receiver 110 receives light from external light source, and is connected by external light source and fiber optics etc.Three light receivers 111,113,115 to be equidistantly being arranged in the side of shell 180, and preferably above being arranged in shell 180 light output part 120 of central part have same distance.
The quantity of light receiver 110 is not limited to three, can change according to quantity of light source.And light receiver 110 can be made specially, and according to the form design that detachably is attached at shell 180.
Light guide portion 160 comprises: the catoptron 130 that is used to change the light path that receives from light receiver 110; The motor 140 that is connected with catoptron 130 is to be used for rotating mirror 130; Drive and control the control part 150 of motor 140 for rotating mirror 130.
As shown in Figure 3, catoptron 130 changes about about 80 °～100 ° in order to be directed to light output part 120 from the light that light receiver 110 receives with light path, preferably changes about 90 °.Catoptron 130 is accommodated in cylinder blanket 180 inside and carries out circular motion, is used for and will be directed to light output part 120 from the received light of any one acceptance division of a plurality of light receivers 110.This has utilized the rectilinear propagation and the reflectometry of light, and for the normal of vertical reflector 130, the light that incides catoptron 130 has the reflection angle identical with incident angle, and is reflected.Therefore, the relative position of light receiver 110, light output part 120 and catoptron 130 is important for the transmission of light.In the present embodiment, top, the light output part 120 that light receiver 110 is arranged in shell 180 is arranged in the side of shell 180, incided catoptron 130 with 45 approximately and is reflected by the light of light receiver 110 inputs.
To light of 120 output of light output part, promptly light is input to a plurality of light receivers 110 by rotatablely moving for catoptron 130, and catoptron 130 does not reflect other light except reflection need be delivered to the outside light by light output part 120.In order to make catoptron 130 carry out this rotation, light receiver 111,113,115 preferably is separated by preset space length respectively and is arranged, and best with equidistant arrangement in order to be easy to control rotatablely moving of catoptron 130.In other words, as shown in Figure 4, a plurality of light receiver 111,113,115 rotating shafts with respect to catoptron 130 are promptly arranged with equal angles (α) with respect to the axle that connects shell 180 top central parts.Like this, when light receiver 111,113,115 is arranged with equal angles (α), catoptron 130 can whenever be separated by schedule time rotation equal angular and reflected light.If the spacing of light receiver 111,113,115 is inhomogeneous, then the rotating speed of catoptron 130 is also inhomogeneous, thereby makes the motor 140 that drives this catoptron be difficult to control.
And in order to be easy to concentrate the light from optical collector 170 reflections, light receiver 110 is that central row is listed on the same circumference with the rotating shaft of catoptron 130.Even light receiver 111,113,115 is arranged with equal angles (α) with respect to the rotating shaft of catoptron 130, if but be not arranged on the same circumference, then to be reflected to the position of light output part 120 different because of light, is difficult to concentrate light and the bigger problem of optical collector 170 needs thereby exist.This shows that light receiver 111,113,115 preferably is arranged to: arrange with equal angles (α) with respect to the rotating shaft of catoptron 130, and with rotating shaft for being centered close on the same circumference.In the present embodiment, the rotating shaft of catoptron 130 is identical with the position of the light output part of being given prominence to by shell 180 120.
Motor 140 is connected with catoptron 130, and with predetermined uniform angular velocity rotating mirror 130.The speed of optical multiplexer 100 reception light is decided by the travelling speed of motor 140, thereby the user can regulate the rotating speed of motor 140 by control control part 150.
Control part 150 comes the relative position of the some light receivers among accommodation reflex mirror 130 and a plurality of light receivers 111,113,115 by drive motor 140.Control part 150 can be controlled by the external device (ED) that receives light from optical multiplexer 100, and controls the rotating speed of motor 140 according to control signals such as the quantity of light receiver 110 and inbound pacings.
Optical collector 170 is used for concentrating from the light of catoptron 130 reflections and is delivered to light output part 120, and this arranges in order to realize higher optical efficiency.This optical collector 170 is disposed between catoptron 130 and the light output part 120, if the gap between catoptron 130 and the light output part 120 is very little, then can omit as inscape optionally.On the contrary, also can use a plurality of optical collectors 170 for higher optical efficiency.As mentioned above, in order to dwindle the big or small of optical collector 170 and to improve collection efficiency, a plurality of light receivers 110 preferably are arranged on the same circumference with respect to the light output part 120 as catoptron 130 rotating shafts.
Catoptron 130 is the parts that directly contact with light with optical collector 170 in the light guide portion 160, therefore these must be contained in shell 180 inside, so that it is not subjected to the influence of other light.
At last, the variation to light path can be summarized as: to many light of each light receiver 111,113,115 input; Even import many light, catoptron 130 receives and the light of reflection only is wherein one; By catoptron 130 change about about the 90 ° light of directions by the optical collector 170 that is arranged on light output part 120 fronts by light harvesting; The light of concentrating outputs to after the outside by light output part 120, and control part 150 is rotatably connected in the catoptron 130 of motor 140 by drive motor 140; Catoptron 130 moves to adjacent and another light receiver 110 that arrange, and carries out said process repeatedly.Being input to the time that all light of light receiver 110 export by light output part 120 successively is about tens of milliseconds (msec).
Though the present invention is illustrated above-mentioned several embodiment, but the technician with common knowledge who belongs to technical field of the present invention should be appreciated that, can change the present embodiment that many light is carried out selectivity output under the situation that does not break away from principle of the present invention or spirit.Protection scope of the present invention is by claims and the decision of its equivalent.
In sum, a kind ofly can in many light, select wherein a certain the optical multiplexer of exporting according to the invention provides.

Claims (7)

1, a kind of optical multiplexer is characterized in that comprising:
A plurality of light receivers are used for from outside reception light;
Light output part is used for to external device (ED) output light;
The light guide portion is used for changing from the received light direction of some light receivers of described a plurality of light receivers, and it is directed to described light output part.
2, optical multiplexer according to claim 1 is characterized in that described smooth guide portion comprises:
Catoptron, the light that is used for receiving from described light receiver reflexes to described light output part;
Motor is used to rotate described catoptron;
Control part is used to control described motor, to regulate the relative position of the some acceptance divisions among described catoptron and the described a plurality of light receiver.
3, optical multiplexer according to claim 2 is characterized in that the light that described catoptron will receive changes about 80 °～100 ° in its path.
4, optical multiplexer according to claim 1, it is characterized in that described light receiver with respect to the rotating shaft of described catoptron with equiangularly arranged.
5, optical multiplexer according to claim 4 is characterized in that described light receiver is that central row is listed on the same circumference with described light output part.
6, optical multiplexer according to claim 2 is characterized in that further comprising the optical collector that is used for the light from described mirror reflects is focused on described light output part.
7, optical multiplexer according to claim 1, it is characterized in that further comprising hold at least described catoptron, inwall is the shell of black.
CNA2005101339875A 2005-08-04 2005-12-30 Optical multiplexer Pending CN1908723A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020050071252 2005-08-04
KR1020050071252A KR100688982B1 (en) 2005-08-04 2005-08-04 Optical multiplexer

Publications (1)

Publication Number Publication Date
CN1908723A true CN1908723A (en) 2007-02-07

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Application Number Title Priority Date Filing Date
CNA2005101339875A Pending CN1908723A (en) 2005-08-04 2005-12-30 Optical multiplexer

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KR (1) KR100688982B1 (en)
CN (1) CN1908723A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112639623A (en) * 2018-08-20 2021-04-09 Asml荷兰有限公司 Apparatus and method for measuring position of alignment mark
CN112639623B (en) * 2018-08-20 2024-05-14 Asml荷兰有限公司 Apparatus and method for measuring position of alignment mark

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2318573A1 (en) * 1998-01-12 1999-07-15 Wallac Oy Confocal microscope with plural scanning beams
IL148056A0 (en) * 1999-08-11 2002-09-12 Luckoff Display Corp Direction of optical signals by a movable diffractive optical element
US6418247B1 (en) * 2000-09-08 2002-07-09 Harris Corporation Fiber optic switch and associated methods

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112639623A (en) * 2018-08-20 2021-04-09 Asml荷兰有限公司 Apparatus and method for measuring position of alignment mark
CN112639623B (en) * 2018-08-20 2024-05-14 Asml荷兰有限公司 Apparatus and method for measuring position of alignment mark

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Publication number Publication date
KR100688982B1 (en) 2007-03-08
KR20070016509A (en) 2007-02-08

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