CN100472276C - Optical system and control method thereof - Google Patents
Optical system and control method thereof Download PDFInfo
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- CN100472276C CN100472276C CNB2006100073084A CN200610007308A CN100472276C CN 100472276 C CN100472276 C CN 100472276C CN B2006100073084 A CNB2006100073084 A CN B2006100073084A CN 200610007308 A CN200610007308 A CN 200610007308A CN 100472276 C CN100472276 C CN 100472276C
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- 230000003287 optical effect Effects 0.000 title claims abstract description 162
- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000012545 processing Methods 0.000 claims abstract description 29
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- 238000004891 communication Methods 0.000 claims description 5
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- 238000003860 storage Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000003306 harvesting Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
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- 239000004065 semiconductor Substances 0.000 description 3
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
Abstract
The present invention relates to an optical system and control method thereof. The optical system of the invention includes: a plurality of light sources, an optical multiplexer, wherein the optical multiplexer has a plurality of light receive sections receiving the light outputting from the light source, an optical guide part for changing the optical direction of one light receive section from a plurality of light receive sections and guiding to the optical guide part of the light output part; an optical splitter, used for splitting the light from the optical multiplexer and outputting the optical splitting information; an optical data processing part, used for decoding the optical splitting information outputted from the optical splitter and processing. Thereby, an optical multiplexer is provided to select one light from multiterm lights and also a system with simple apparatus and low cost.
Description
Technical field
The present invention relates to a kind of optical system and control method thereof, relate in particular to the optical system and the control method thereof that comprise optical multiplexer.
Background technology
Optical splitter is to be used for beam split from the light of light source input and detect the optical devices of each optical wavelength intensity of institute's beam split.The user is according to the information that is obtained by the resulting data of optical splitter at light source composition or character.This optical splitter also can be connected to the uses such as compartment that are used for semiconductor technology, to be used to be provided at all optical informations that chamber interior produces.
Fig. 1 is the control block diagram that is used to illustrate the optical system that adopts existing optical splitter.As shown in the figure, optical system comprises: a plurality of light sources 10,20,30; Be connected in a plurality of optical splitters 40,50,60 of each light source 10,20,30; Be connected in the light data processing division 70 of optical splitter 40,50,60; External instrument 80.
The light that each light source 10,20,30 provides as analytic target to optical splitter 40,50,60, and emit the light that comprises feature and the information different with other light sources.
40,50,60 pairs of light that receive from light source 10,20,30 of optical splitter carry out beam split, and the optical information of each Wavelength strength is outputed to light data processing division 70.Light data processing division 70 is 80 data that can use of external instrument with optical information processing.
Usually, optical splitter 40,50,60 mostly is about 10msec from light source 10,20,30 receptions and processing required time of light most, but light data processing division 70 transmits data with 1～3 second interval to external instrument 80 approximately.This explanation is for the All Time that the user obtains institute's light requirement data, and the time of optical splitter 40,50,60 real works is very short, and the service efficiency of hence one can see that optical splitter 40,50,60 is very low.
But, owing to all connected this optical splitter 40,50,60 in each light source 10,20,30, thereby the entire system manufacturing cost is risen, and along with the increase of quantity of light source also will be provided with additional optical splitter, thereby cause the complexity of system architecture.
Summary of the invention
The object of the present invention is to provide a kind of by using described optical multiplexer to make equipment become simple and reducing the optical system and the control method thereof of manufacturing cost.
According to optical system provided by the present invention, comprise: a plurality of light sources to achieve these goals; Optical multiplexer, this optical multiplexer have a plurality of light receivers of being used for receiving from the light of described light source output, be used for to external device (ED) output light a light output part, be used to change the light direction that receives from some light receivers of described a plurality of light receivers and it be directed to the light guide portion of described light output part; Optical splitter being used for that the light from the output of described optical multiplexer is carried out beam split, and will being encoded to digital signal at the branch optical information of each optical wavelength intensity and exporting; The light data processing division is deciphered the digital signal of being exported from described optical splitter being used for.
And described smooth guide portion can comprise: catoptron, and the light that is used for receiving from described light receiver reflexes to described light output part; Motor is used to rotate described catoptron; Control part is used to control described motor, to regulate the relative position of the some acceptance divisions among described catoptron and the described a plurality of light receiver.
And described catoptron preferably changes 80 °～100 ° with received light path direction.
And, described light receiver with respect to the rotating shaft of described catoptron preferably with equiangularly arranged, to be easy to rotating mirror; And described light receiver is that central row is listed on the same circumference with described light output part preferably, to improve the optical efficiency of light harvesting.
And described optical multiplexer can further comprise the optical collector that is used for the light from described mirror reflects is focused on described light output part.
And, described optical multiplexer can further comprise hold at least described catoptron, inwall is the shell of black, so that to the minimum that influences of other light.
And, preferably further comprise the external instrument that is used to receive the light data of deciphering by described smooth data processing division, and described smooth data processing division comprises further preferably and is used to store the storage part of decoded light data and the Department of Communication Force that communicates with described external instrument.
And, to achieve these goals according to the control method that the invention provides a kind of optical system, this optical system possess comprise a plurality of light receivers of being used for receiving from the light of light source output, be used for to external device (ED) output light a light output part, be used to change the light direction that receives from some light receivers of described a plurality of light receivers and with its optical multiplexer that is directed to the light guide portion of described light output part, described control method comprises step: from a plurality of light sources to the optical multiplexer incident light; Identification is connected in the quantity of the optical multiplexer light receiver of a plurality of light sources; The light direction that the some light receiver of change from described a plurality of light receivers receives also is directed to a light output part of optical multiplexer with it; By optical splitter the light of exporting from a light output part of described optical multiplexer is carried out beam split; To be encoded to digital signal at the branch optical information of each optical wavelength intensity exports; The digital signal of being exported is deciphered; Store decoded light data; Judge the quantity of described smooth data and the quantity of described light receiver; Judged result if the quantity of the quantity of described smooth data and described light receiver is consistent, then is sent to external instrument with a plurality of described smooth data.
The light direction that the some light receiver of change from described a plurality of light receivers receives also comprises control motor rotating mirror and will reflex to the step of optical collector from the light that described light receiver receives and will be outputed to the step of light output part by the light that optical collector is concentrated with its step that is directed to a light output part of optical multiplexer.
Description of drawings
Fig. 1 is the control block diagram that is used to illustrate traditional optical system;
Fig. 2 is for being used to illustrate the control block diagram of the optical system that provides according to one embodiment of the invention;
The decomposing schematic representation of the optical multiplexer that Fig. 3 is provided for foundation one embodiment of the invention;
The control block diagram of the optical multiplexer that Fig. 4 is provided for foundation one embodiment of the invention;
The cut-away view of the optical multiplexer that Fig. 5 is provided for foundation one embodiment of the invention;
Fig. 6 is for being used to illustrate the control flow chart of the optical system control method that provides according to one embodiment of the invention.
Embodiment
Below, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
Fig. 2 is for being used to illustrate the control block diagram of the optical system that provides according to one embodiment of the invention.
As shown in the figure, optical system comprises: a plurality of light sources 10,20,30; Optical multiplexer 100; Optical splitter 200; Light data processing division 300; And, external instrument 400.Be connected by fiber optics 510 between each light source 10,20,30 and the optical multiplexer 100 and between optical multiplexer 100 and the optical splitter 200, be connected by order wire 520 between optical splitter 200 and the light data processing division 300 and between light data processing division 300 and the external instrument 400 as USB (universal serial bus) (USB) cable.
Present embodiment is different with traditional optical system, does not comprise a plurality of optical splitters 40,50,60 and only has an optical splitter 200.And the front end of optical splitter 200 connects optical multiplexer 100, only to export a certain light from the light of a plurality of light source 10,20,30 inputs.Owing to using optical multiplexer 100 to reduce the optical splitter 200 of high price device, thereby have the advantage that can reduce manufacturing cost significantly, and can reduce the loaded down with trivial details work that is used for individually connecting and controlling required equipment aspect when using a plurality of optical splitter 200.
The kind of a plurality of light sources 10,20,30 has a variety of, and the chamber that will be used for semiconductor technology in the present embodiment is that example is described.Carry out semi-conductive plasma process if suppose chamber interior, then each procedure all needs to carry out at the material that is injected and semiconductor status detection and analysis.Owing to contain this information from the light of chamber output, thereby the user analyzes by optical splitter 200.
Be input to optical splitter 200 and by beam split from the light of optical multiplexer 100 output, and measure the intensity of each wavelength.Because each material has intrinsic spectrum, thereby can know the roughly content that whether comprises its material and comprised by beam split.The branch optical information of each Wavelength strength is encoded to digital signal and outputs to light data processing division 300.
Multiplexer is learned by Mingguang City below with reference to Fig. 3 to Fig. 5.The decomposing schematic representation of the optical multiplexer that Fig. 3 is provided for foundation one embodiment of the invention, Fig. 4 is the control block diagram of optical multiplexer, Fig. 5 is the part cut-away view of expression optical multiplexer.As shown in the figure, light guide portion 160 and optical collector 170 that optical multiplexer 100 comprises a plurality of light receivers 110 (comprising 111,113,115), light output part 120, the light that is used for receiving from light receiver 110 is directed to light output part 120.And optical multiplexer 100 further comprises the shell 180 that is used to accommodate light guide portion 160 and optical collector 180, and this light guide portion 160 is made of catoptron 130, motor 140 and control part 150.
The quantity of light receiver 110 is not limited to three, can change according to quantity of light source.And light receiver 110 can be made specially, and according to detachably/be attached at the form design of shell 180.
As shown in Figure 4, catoptron 130 changes about about 80 °～100 ° in order to be directed to light output part 120 from the light that light receiver 110 receives with light path, preferably changes about 90 °.Catoptron 130 is accommodated in cylinder blanket 180 inside and carries out circular motion, is used for and will be directed to light output part 120 from the received light of any one acceptance division of a plurality of light receivers 110.This has utilized the rectilinear propagation and the reflectometry of light, and with respect to for the normal of catoptron 130, the light that incides catoptron 130 has the reflection angle identical with incident angle and is reflected.Therefore, the relative position of light receiver 110, light output part 120 and catoptron 130 is important for the transmission of light.In the present embodiment, side, the light output part 120 that light receiver 110 is arranged in shell 180 be arranged in shell 180 above, incide catoptron 130 with 45 approximately and be reflected by the light of light receiver 110 inputs.
To light output part 120 outputs light only, even light is input to a plurality of light receivers 110, catoptron 130 does not reflect other light except reflection need be delivered to the outside light by light output part 120 by rotatablely moving for catoptron 130.In order to make catoptron 130 carry out this rotation, light receiver 111,113,115 preferably is separated by preset space length respectively and is arranged, and best with equidistant arrangement in order to be easy to control rotatablely moving of catoptron 130.In other words, as shown in Figure 5, a plurality of light receiver 111,113,115 rotating shafts with respect to catoptron 130 are promptly arranged with equal angles (α) with respect to the axle that connects shell 180 top central parts.Like this, when light receiver 111,113,115 is arranged with equal angles (α), catoptron 130 can whenever be separated by schedule time rotation equal angular and reflected light.If the spacing of light receiver 111,113,115 is inhomogeneous, then the rotating speed of catoptron 130 is also inhomogeneous, thereby makes the motor 140 that drives this catoptron be difficult to control.
And in order to be easy to concentrate the light from optical collector 170 reflections, light receiver 110 is that central row is listed on the same circumference with the rotating shaft of catoptron 130.Even light receiver 111,113,115 is arranged with equal angles (α) with respect to the rotating shaft of catoptron 130, if but be not arranged on the same circumference, then to be reflected to the position of light output part 120 different because of light, thereby have the problem that is difficult to concentrate light and the increasing of optical collector 170 needs.This shows that light receiver 111,113,115 preferably is arranged to: arrange with equal angles (α) with respect to the rotating shaft of catoptron 130, and with rotating shaft for being centered close on the same circumference.In the present embodiment, the rotating shaft of catoptron 130 is identical with the position of the light output part of being given prominence to by shell 180 120.
Catoptron 130 is the parts that directly contact with light with optical collector 170 in the light guide portion 160, therefore these must be contained in shell 180 inside, so that it is not subjected to the influence of other light.
At last, the variation of light path can be summarized as: to many light of each light receiver 111,113,115 input; Even import many light, catoptron 130 receives and the light of reflection only is wherein one; The light that changes about 90 ° of left and right directions by catoptron 130 by the optical collector 170 that is arranged on light output part 120 fronts by light harvesting; The light of being concentrated outputs to by light output part 120 after the outside, and control part 150 is rotatably connected in the catoptron 130 of motor 140 by drive motor 140; Catoptron 130 moves to adjacent and another light receiver 110 that arrange, and said process repeatedly.Being input to the time that all light of light receiver 110 export by light output part 120 successively is about tens of milliseconds (msec).
Light data processing division 300 will and be handled and will be sent to external instrument 400 by the beam split decoding of information of optical splitter 200 output.Light data processing division 300 comprises the storage part 310 and the Department of Communication Force 320 that is used for communicating with external instrument 400 that is used to store handled smooth data.
The branch optical information that light data processing division 300 will be transmitted being encoded to digital signal is deciphered and is stored in each channel (channel), and promptly the light source that receives according to each light receiver 110 is respectively stored.The relevant beam split information stores of light that light data processing division 300 will receive from all light receivers 110 is after the light data, and it is delivered to external instrument 400.This data transmit instrument and are not limited to said mechanism, can be made as various ways according to user's requirement.
Department of Communication Force 320 receives the signal of external instruments 400 desired smooth data, and transmits the light data corresponding to this signal, is connected by the telecommunication cable as USB (universal serial bus) (USB) that is used to communicate by letter between external instrument 400 and the Department of Communication Force 320.
Usually, light data processing division 300 is multichannel spectrometer (spectrometer multiplex), and external instrument 400 may be for client server or is used to control the host computer of whole optical system.
Fig. 6 is for being used to illustrate the control flow chart of the optical system control method that provides according to one embodiment of the invention.
At first, optical multiplexer 100 is discerned the quantity (S10) of the light receiver 110 that is connected in light source according to the control signal of light data processing division 300.
Then, with predetermined angular velocity rotating mirror 130 (S20), the light that the some light receivers in a plurality of light receivers 110 are imported reflexes to the direction (S30) of light output part 120.A plurality of light receivers 110 are arranged with equal angles (α) with respect to the light output part 120 of catoptron 130 rotating shafts, and are arranged on the same circumference.From the light of catoptron 130 reflection by after optical collector 170 light harvestings, by light output part 120 from optical multiplexer 100 outputs (S40).
The light of being exported is delivered to optical splitter 200 by fiber optics 520 and by beam split (S50).The branch optical information that is encoded as according to each wavelength light intensity by the light of beam split is output (S60).
The branch optical information of being exported is in the processing procedure (S70) of light data processing division 300 through deciphering, and handled smooth data storage is in storage part 310 (S80).Light data processing division 300 is the quantity (S90) of light data bulk of being stored and the light receiver 110 that is connected with light source relatively.If the quantity of light data is less than the quantity of light receiver 110, then the control part 150 to optical multiplexer 100 transmits control signal, with rotating mirror 130 once more.Carrying out in this process repeatedly, if the quantity of light data equates that with the quantity of light receiver 110 then light data processing division 300 outputs to external instrument 400 (S100) with the light data of being stored.Light data processing division 300 transmits the light data with about 1～3 second interval to external instrument 400.This smooth data transfer cycles can change according to the control of external instrument 400.
Though describe and show several embodiments of the present invention, but the technical staff author with common knowledge in field should be understood that under the situation that does not break away from principle of the present invention or spirit and can change the present embodiment that many light carry out selectivity output under the present invention.Protection scope of the present invention is determined with its equivalent by claim.
In sum, a kind of according to the invention provides by using optical multiplexer to make equipment become simple and saving the optical system of manufacturing cost.
Claims (10)
1, a kind of optical system is characterized in that comprising:
A plurality of light sources;
Optical multiplexer, this optical multiplexer have a plurality of light receivers of being used for receiving from the light of described light source output, be used for to external device (ED) output light a light output part, be used to change the light direction that receives from some light receivers of described a plurality of light receivers and it be directed to the light guide portion of described light output part;
Optical splitter being used for that the light from the output of described optical multiplexer is carried out beam split, and will being encoded to digital signal at the branch optical information of each optical wavelength intensity and exporting;
The light data processing division is deciphered the digital signal of being exported from described optical splitter being used for.
2, optical system according to claim 1 is characterized in that described smooth guide portion comprises:
Catoptron, the light that is used for receiving from described light receiver reflexes to described light output part;
Motor is used to rotate described catoptron;
Control part is used to control described motor, to regulate the relative position of the some acceptance divisions among described catoptron and the described a plurality of light receiver.
3, optical system according to claim 2 is characterized in that described catoptron changes 80 °～100 ° with received light path direction.
4, optical system according to claim 1, it is characterized in that described light receiver with respect to the rotating shaft of described catoptron with equiangularly arranged.
5, optical system according to claim 4 is characterized in that described light receiver is that central row is listed on the same circumference with described light output part.
6, optical system according to claim 2 is characterized in that described optical multiplexer further comprises the optical collector that is used for the light from described mirror reflects is focused on described light output part.
7, optical system according to claim 1, it is characterized in that described optical multiplexer further comprise hold at least described catoptron, inwall is the shell of black.
8, optical system according to claim 1, it is characterized in that further comprising the external instrument that is used to receive the light data of deciphering by described smooth data processing division, and described smooth data processing division comprises further and is used to store the storage part of decoded light data and the Department of Communication Force that communicates with described external instrument.
9, a kind of control method of optical system, this optical system possess comprise a plurality of light receivers of being used for receiving from the light of light source output, be used for to external device (ED) output light a light output part, be used to change the light direction that receives from some light receivers of described a plurality of light receivers and with its optical multiplexer that is directed to the light guide portion of described light output part, described control method comprises step:
From a plurality of light sources to the optical multiplexer incident light;
Identification is connected in the quantity of the optical multiplexer light receiver of a plurality of light sources;
The light direction that the some light receiver of change from described a plurality of light receivers receives also is directed to a light output part of optical multiplexer with it;
By optical splitter the light of exporting from a light output part of described optical multiplexer is carried out beam split;
To be encoded to digital signal at the branch optical information of each optical wavelength intensity exports;
The digital signal of being exported is deciphered;
Store decoded light data;
Judge the quantity of described smooth data and the quantity of described light receiver;
Judged result if the quantity of the quantity of described smooth data and described light receiver is consistent, then is sent to external instrument with a plurality of described smooth data.
10, the control method of optical system according to claim 9 is characterized in that changing light direction that the some light receivers from described a plurality of light receivers receive and its step that is directed to a light output part of optical multiplexer comprised control motor rotating mirror and will reflex to the step of optical collector from the light that described light receiver receives and will be outputed to the step of light output part by the light that optical collector is concentrated.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050071939 | 2005-08-05 | ||
| KR1020050071939A KR100661662B1 (en) | 2005-08-05 | 2005-08-05 | Optical system and control method thereof |
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| Publication Number | Publication Date |
|---|---|
| CN1908730A CN1908730A (en) | 2007-02-07 |
| CN100472276C true CN100472276C (en) | 2009-03-25 |
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| KR (1) | KR100661662B1 (en) |
| CN (1) | CN100472276C (en) |
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|---|---|---|---|---|
| CN110857922A (en) * | 2018-08-24 | 2020-03-03 | 塞米西斯科株式会社 | Engineering system, switching module therefor, and method of controlling the engineering system |
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2005
- 2005-08-05 KR KR1020050071939A patent/KR100661662B1/en active IP Right Grant
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- 2006-02-07 CN CNB2006100073084A patent/CN100472276C/en active Active
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| KR100661662B1 (en) | 2006-12-26 |
| CN1908730A (en) | 2007-02-07 |
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