CN1893088A - thin film transistor array - Google Patents
thin film transistor array Download PDFInfo
- Publication number
- CN1893088A CN1893088A CN 200510079394 CN200510079394A CN1893088A CN 1893088 A CN1893088 A CN 1893088A CN 200510079394 CN200510079394 CN 200510079394 CN 200510079394 A CN200510079394 A CN 200510079394A CN 1893088 A CN1893088 A CN 1893088A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- pixel
- film transistor
- thin film
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 102
- 230000003071 parasitic effect Effects 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000004020 conductor Substances 0.000 claims description 26
- 238000009826 distribution Methods 0.000 claims 18
- 230000004888 barrier function Effects 0.000 claims 6
- 238000009413 insulation Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000003990 capacitor Substances 0.000 abstract description 35
- 239000010410 layer Substances 0.000 description 51
- 239000004973 liquid crystal related substance Substances 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 12
- 238000006073 displacement reaction Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Landscapes
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Abstract
一种薄膜晶体管阵列,包括基板、多个薄膜晶体管、多个像素电极、多条共用配线以及多个辅助电极。这些薄膜晶体管、像素电极及辅助电极分别设置于基板上的像素区域内。薄膜晶体管的漏极与栅极之间具有第一重叠区域,以使得漏极与栅极之间形成栅极-漏极寄生电容,且薄膜晶体管的漏极从通道层上沿一方向延伸至像素电极下方,并通过接触窗电连接至此像素电极。每一辅助电极均位于像素电极下方,并从共用配线上方沿上述之方向延伸至共用配线的一侧,而与共用配线具有第二重叠区域,以使各辅助电极与其所对应之共用配线间形成存储电容。
A thin film transistor array includes a substrate, a plurality of thin film transistors, a plurality of pixel electrodes, a plurality of common wirings and a plurality of auxiliary electrodes. These thin film transistors, pixel electrodes and auxiliary electrodes are respectively arranged in the pixel area on the substrate. There is a first overlapping area between the drain and the gate of the thin film transistor, so that a gate-drain parasitic capacitor is formed between the drain and the gate, and the drain of the thin film transistor extends from the channel layer in one direction to the bottom of the pixel electrode, and is electrically connected to the pixel electrode through a contact window. Each auxiliary electrode is located below the pixel electrode, and extends from above the common wiring in the above direction to one side of the common wiring, and has a second overlapping area with the common wiring, so that a storage capacitor is formed between each auxiliary electrode and the corresponding common wiring.
Description
技术领域technical field
本发明涉及一种薄膜晶体管阵列(thin film transistor array,TFT array),且特别涉及一种能够提高显示亮度之均匀性的薄膜晶体管阵列。The present invention relates to a thin film transistor array (thin film transistor array, TFT array), and in particular to a thin film transistor array capable of improving the uniformity of display brightness.
背景技术Background technique
多媒体社会之急速进步,多半受惠于半导体元件或显示装置的飞跃性进步。就显示器而言,具有高画质、空间利用效率佳、低消耗功率、无辐射等优越特性之薄膜晶体管液晶显示器(thin film transistor liquid crystaldisplay,TFT-LCD)已逐渐成为市场之主流。The rapid progress of the multimedia society is mostly due to the rapid progress of semiconductor components or display devices. As far as displays are concerned, thin film transistor liquid crystal displays (TFT-LCDs), which have superior characteristics such as high image quality, good space utilization efficiency, low power consumption, and no radiation, have gradually become the mainstream of the market.
薄膜晶体管液晶显示器主要由薄膜晶体管阵列、彩色滤光片(colorfilter)和液晶层(liquid crystal layer)所构成。图1为公知之薄膜晶体管阵列的俯视示意图。请参照图1,薄膜晶体管阵列100主要由以阵列排列的多个像素结构110所构成。其中,各个像素结构110均由扫瞄配线(scanline)112、数据配线(date line)114、薄膜晶体管116以及与薄膜晶体管116对应设置的像素电极(pixel electrode)118所组成。TFT LCD is mainly composed of TFT array, color filter (color filter) and liquid crystal layer (liquid crystal layer). FIG. 1 is a schematic top view of a known thin film transistor array. Referring to FIG. 1 , the thin film transistor array 100 is mainly composed of a plurality of
请继续参照图1,薄膜晶体管116用来作为像素结构110的开关元件,而扫描配线112与数据配线114则用来提供其所选定之像素结构110适当的操作电压,以分别驱动各个像素结构110而显示图像。Please continue to refer to FIG. 1, the
图2为一种公知的薄膜晶体管液晶显示器之单一像素的等效电路示意图。请参照图2,在公知的薄膜晶体管液晶显示器的单一像素中,通常包含薄膜晶体管110、液晶电容CLC以及存储电容(storage capacitance)Cst。FIG. 2 is a schematic diagram of an equivalent circuit of a single pixel of a known thin film transistor liquid crystal display. Referring to FIG. 2 , a single pixel of a known TFT-LCD usually includes a
请同时参照图1及图2,液晶电容CLC由薄膜晶体管阵列100上之像素电极118与彩色滤光片上之共用电极(common electrode)(图中未表示)耦合而成。存储电容Cst位于薄膜晶体管阵列100上,且此存储电容Cst与液晶电容CLC以及扫描配线112电连接。另外,薄膜晶体管116之栅极G、源极S以及漏极D分别与扫描配线112、数据配线114以及液晶电容CLC中之像素电极118连接。而且,由于薄膜晶体管116之栅极G与漏极D之间有互相重叠的区域,因此在栅极G与漏极D之间会存有一栅极-漏极寄生电容(parasitic capacitance)Cgd。Please refer to FIG. 1 and FIG. 2 at the same time. The liquid crystal capacitor C LC is formed by coupling the
请继续参照图1及图2,由于施加在液晶电容CLC上的电压(也就施加于像素电极118与共用电极上的电压)与液晶分子的光穿透率之间具有特定关系,因此只要依据所要显示的画面来控制施加在液晶电容CLC上的电压,即可使显示器显示预定之画面。其中,当薄膜晶体管116关闭时,液晶电容CLC上的电压保持一定值(也就处于holding状态),但由于栅极-漏极寄生电容Cgd的存在,液晶电容CLC上所保持的电压将会随着数据配线114上的信号变化而有所改变(也就所谓的耦合效应),因而使得液晶电容CLC上所保持的电压偏离原先设定之值。此电压变动量称为馈通电压(feed-through voltage)ΔVp,其可表示为:Please continue to refer to FIG. 1 and FIG. 2, since there is a specific relationship between the voltage applied to the liquid crystal capacitor C LC (that is, the voltage applied to the
其中ΔVg为施加于扫瞄配线112上的脉冲电压之振幅。Wherein ΔVg is the amplitude of the pulse voltage applied to the
在目前的薄膜晶体管阵列制造工艺中,大多以步进式曝光机之拼接式光掩膜来进行薄膜晶体管阵列的曝光制造工艺,因此在曝光过程中,机台移动时的位移偏差量将导致各个曝光区域(shot)中所形成的图案之位置有所差异。特别当各个曝光区域之间,薄膜晶体管116之栅极G与漏极D(见图1)的重叠面积不同时,将使得各个曝光区域中的栅极-漏极寄生电容Cgd不同,造成各个曝光区域中的馈通电压ΔVp不相同,而在显示过程中产生显示亮度不均匀的问题。In the current thin film transistor array manufacturing process, most of the exposure manufacturing process of the thin film transistor array is carried out with the spliced photomask of the stepper exposure machine. Therefore, during the exposure process, the displacement deviation when the machine moves will cause each The position of the pattern formed in the exposure area (shot) is different. Especially when the overlapping areas of the gate G and the drain D (see FIG. 1 ) of the
为了解决上述问题,已公知的有人提出一种薄膜晶体管阵列,图3即为另一种公知的薄膜晶体管阵列的俯视示意图。请参照图3,公知技术将薄膜晶体管阵列300中薄膜晶体管316的漏极设计为T字型,以将曝光制造工艺中漏极与栅极之重叠面积R1可能产生的变动量减少为w×x,进而缩小各个栅极-漏极寄生电容之间的差异。In order to solve the above problems, a known thin film transistor array has been proposed, and FIG. 3 is a schematic top view of another known thin film transistor array. Please refer to FIG. 3 . In the known technology, the drain of the
除此之外,公知的解决上述问题的另一种方法在不同的曝光区域之间加入模糊化设计,以减少在曝光区域之边界上亮度不均匀的显示缺陷(mura)。然而,当曝光精度误差过大时,以上两种方法仍无法有效地改善因光掩膜位移误差所造成之显示亮度不均匀的问题。In addition, another known method to solve the above-mentioned problem is to add a blurring design between different exposure areas to reduce the display defect (mura) of uneven brightness at the boundary of the exposure areas. However, when the exposure accuracy error is too large, the above two methods still cannot effectively improve the problem of non-uniform display brightness caused by the photomask displacement error.
发明内容Contents of the invention
有鉴于此,本发明的目的就提供一种薄膜晶体管阵列,其各个像素的曝光精度误差不会对其馈通电压造成影响,因此薄膜晶体管阵列所构成的显示器能具有优异的显示质量。In view of this, the purpose of the present invention is to provide a thin film transistor array, the exposure accuracy error of each pixel will not affect its feed-through voltage, so the display formed by the thin film transistor array can have excellent display quality.
本发明的另一目的提供一种薄膜晶体管阵列,其所构成之显示器可同时具有良好的开口率与显示亮度均匀性。Another object of the present invention is to provide a thin film transistor array, and the display formed by it can have good aperture ratio and uniformity of display brightness at the same time.
本发明提出一种薄膜晶体管阵列,其包括基板、多个薄膜晶体管、多个像素电极、多条共用配线以及多个辅助电极。其中,基板上区分出多个像素区域,这些薄膜晶体管分别设置在各个像素区域内,且各个薄膜晶体管均包括栅极、通道层、源极及漏极。在每一薄膜晶体管中,漏极与栅极之间具有第一重叠区域,以使得漏极与栅极之间形成栅极-漏极寄生电容。这些像素电极亦设置在各个像素区域内。共用配线设置于基板上,且这些共用配线的部分区域位于像素电极下方。The invention provides a thin film transistor array, which includes a substrate, a plurality of thin film transistors, a plurality of pixel electrodes, a plurality of common wiring lines and a plurality of auxiliary electrodes. Wherein, a plurality of pixel regions are distinguished on the substrate, and these thin film transistors are respectively arranged in each pixel region, and each thin film transistor includes a gate, a channel layer, a source and a drain. In each thin film transistor, there is a first overlapping region between the drain and the gate, so that a gate-drain parasitic capacitance is formed between the drain and the gate. These pixel electrodes are also arranged in each pixel area. The common lines are arranged on the substrate, and some areas of these common lines are located under the pixel electrodes.
承上所述,这些辅助电极分别设置于各个像素区域内,且在每一像素区域内,辅助电极位于像素电极下方,并且从共用配线上方延伸至共用配线的一侧,而其延伸方向与漏极的延伸方向相同。其中,辅助电极与共用配线之间具有第二重叠区域,而这些辅助电极分别电连接至对应之像素电极,以使各辅助电极与其所对应之共用配线间形成存储电容。As mentioned above, these auxiliary electrodes are respectively arranged in each pixel area, and in each pixel area, the auxiliary electrodes are located below the pixel electrodes, and extend from above the common wiring to one side of the common wiring, and the extending direction Same direction as the extension of the drain. There is a second overlapping area between the auxiliary electrodes and the common wiring, and these auxiliary electrodes are respectively electrically connected to the corresponding pixel electrodes, so that storage capacitors are formed between each auxiliary electrode and the corresponding common wiring.
在本发明的较佳实施例中,于各像素区域中,共用配线包括第一条状图案及第二条状图案,且第一条状图案之延伸方向与第二条状图案之延伸方向不同。举例来说,第一条状图案之延伸方向与第二条状图案之延伸方向例如相互垂直。In a preferred embodiment of the present invention, in each pixel area, the common wiring includes a first strip pattern and a second strip pattern, and the extension direction of the first strip pattern is the same as the extension direction of the second strip pattern different. For example, the extending direction of the first strip pattern and the extending direction of the second strip pattern are, for example, perpendicular to each other.
在本发明的较佳实施例中,于各像素区域中,辅助电极例如部分地位于像素电极与第一条状图案及/或第二条状图案之间。In a preferred embodiment of the present invention, in each pixel area, for example, the auxiliary electrode is partially located between the pixel electrode and the first strip pattern and/or the second strip pattern.
在本发明的较佳实施例中,上述之薄膜晶体管阵列例如还包括绝缘层(insulating layer),设置于像素电极与辅助电极、源极以及漏极之间。在一实例中,此绝缘层例如具有多个第一接触窗开口,而这些像素电极分别填入这些第一接触窗开口而电连接至漏极与辅助电极。In a preferred embodiment of the present invention, the above-mentioned thin film transistor array further includes, for example, an insulating layer disposed between the pixel electrode and the auxiliary electrode, the source electrode and the drain electrode. In one example, the insulating layer has a plurality of first contact openings, and the pixel electrodes respectively fill in the first contact openings and are electrically connected to the drain and the auxiliary electrodes.
本发明另提出一种薄膜晶体管阵列,其包括基板、多个薄膜晶体管、多个像素电极、多条共用配线、多个连接导体层以及多个辅助电极。其中,基板上区分出多个像素区域,这些薄膜晶体管分别设置在各个像素区域内,且各个薄膜晶体管均包括栅极、通道层、源极及漏极。在每一薄膜晶体管中,漏极与栅极之间具有第一重叠区域,以使得漏极与栅极之间形成栅极-漏极寄生电容。这些像素电极亦设置在各个像素区域内,且每一薄膜晶体管的漏极从通道层上沿一方向延伸至对应之像素电极下方,并电连接至此像素电极。共用配线设置于基板上,且这些共用配线的部分区域位于像素电极下方。The present invention further provides a thin film transistor array, which includes a substrate, a plurality of thin film transistors, a plurality of pixel electrodes, a plurality of common lines, a plurality of connection conductor layers, and a plurality of auxiliary electrodes. Wherein, a plurality of pixel regions are distinguished on the substrate, and these thin film transistors are respectively arranged in each pixel region, and each thin film transistor includes a gate, a channel layer, a source and a drain. In each thin film transistor, there is a first overlapping region between the drain and the gate, so that a gate-drain parasitic capacitance is formed between the drain and the gate. These pixel electrodes are also arranged in each pixel region, and the drain of each thin film transistor extends from the channel layer to the bottom of the corresponding pixel electrode along a direction, and is electrically connected to the pixel electrode. The common lines are arranged on the substrate, and some areas of these common lines are located under the pixel electrodes.
承上所述,这些连接导体层分别设置在各个像素区域内,并位于共用配线上方而电连接至这些共用配线。辅助电极则分别设置于各个像素区域内,且在每一像素区域内,辅助电极位于像素电极与连接导体层下方,并且从共用配线上方延伸至共用配线的一侧,而其延伸方向与漏极的延伸方向相同。其中,辅助电极与共用配线之间具有第二重叠区域,而这些辅助电极分别电连接至对应之像素电极,以使各辅助电极与其所对应之共用配线间形成存储电容。另外,这些连接导体层与各个辅助电极之间则形成夹层电容。As mentioned above, the connecting conductor layers are respectively disposed in the respective pixel regions, and are located above the common wirings and electrically connected to the common wirings. The auxiliary electrodes are respectively arranged in each pixel area, and in each pixel area, the auxiliary electrodes are located below the pixel electrode and the connecting conductor layer, and extend from above the common wiring to one side of the common wiring, and its extending direction is the same as that of the common wiring. The drain electrodes extend in the same direction. There is a second overlapping area between the auxiliary electrodes and the common wiring, and these auxiliary electrodes are respectively electrically connected to the corresponding pixel electrodes, so that storage capacitors are formed between each auxiliary electrode and the corresponding common wiring. In addition, interlayer capacitors are formed between these connection conductor layers and each auxiliary electrode.
在本发明的较佳实施例中,于各像素区域中,共用配线包括第一条状图案及第二条状图案,且第一条状图案之延伸方向与第二条状图案之延伸方向不同。举例来说,第一条状图案之延伸方向与第二条状图案之延伸方向例如相互垂直。In a preferred embodiment of the present invention, in each pixel area, the common wiring includes a first strip pattern and a second strip pattern, and the extension direction of the first strip pattern is the same as the extension direction of the second strip pattern different. For example, the extending direction of the first strip pattern and the extending direction of the second strip pattern are, for example, perpendicular to each other.
在本发明的较佳实施例中,于各像素区域中,连接导体层例如位于共用配线之第一条状图案及/或第二条状图案的上方。In a preferred embodiment of the present invention, in each pixel region, the connection conductor layer is located above the first strip pattern and/or the second strip pattern of the common wiring, for example.
在本发明的较佳实施例中,上述之薄膜晶体管阵列例如还包括绝缘层,设置于像素电极与辅助电极、源极以及漏极之间。在一实例中,此绝缘层例如具有多个第一接触窗开口,而这些像素电极分别填入这些第一接触窗开口而电连接至漏极与辅助电极。In a preferred embodiment of the present invention, the above thin film transistor array further includes, for example, an insulating layer disposed between the pixel electrode and the auxiliary electrode, the source electrode and the drain electrode. In one example, the insulating layer has a plurality of first contact openings, and the pixel electrodes respectively fill in the first contact openings and are electrically connected to the drain and the auxiliary electrodes.
在本发明的较佳实施例中,上述之薄膜晶体管阵列例如还包括栅绝缘层,其设置于漏极、源极与栅极之间,以及辅助电极与共用配线之间。在一实例中,上述之绝缘层还具有多个第二接触窗开口,其例如贯穿绝缘层与栅绝缘层,而连接导体层分别填入这些第二接触窗开口而电连接至共用配线。In a preferred embodiment of the present invention, the above thin film transistor array further includes, for example, a gate insulating layer disposed between the drain, the source and the gate, and between the auxiliary electrode and the common wiring. In one example, the above-mentioned insulating layer further has a plurality of second contact openings, for example, penetrating through the insulating layer and the gate insulating layer, and the connecting conductor layer respectively fills these second contact openings and electrically connects to the common wiring.
本发明可解决公知的显示面板因薄膜晶体管阵列曝光制造工艺误差所导致显示质量不佳的问题,且亦不会对面板的开口率造成不良的影响。The present invention can solve the known problem of poor display quality of the display panel due to the error in the exposure manufacturing process of the thin film transistor array, and will not cause adverse effects on the aperture ratio of the panel.
为让本发明之上述和其它目的、特征和优点能更明显易懂,下文特举较佳实施例,并配合附图,作详细说明如下。In order to make the above and other objects, features and advantages of the present invention more comprehensible, preferred embodiments are specifically cited below and described in detail with accompanying drawings.
附图说明Description of drawings
图1为公知之薄膜晶体管阵列的俯视示意图。FIG. 1 is a schematic top view of a known thin film transistor array.
图2为一种公知的薄膜晶体管液晶显示器之单一像素的等效电路示意图。FIG. 2 is a schematic diagram of an equivalent circuit of a single pixel of a known thin film transistor liquid crystal display.
图3为另一种公知的薄膜晶体管阵列的俯视示意图。FIG. 3 is a schematic top view of another known thin film transistor array.
图4为本发明之第一实施例中薄膜晶体管阵列的俯视示意图。FIG. 4 is a schematic top view of the thin film transistor array in the first embodiment of the present invention.
图5为图4之薄膜晶体管阵列沿I-I’线的剖面示意图。5 is a schematic cross-sectional view of the thin film transistor array in FIG. 4 along line I-I'.
图6为本发明之第二实施例中薄膜晶体管阵列的俯视示意图。FIG. 6 is a schematic top view of the thin film transistor array in the second embodiment of the present invention.
图7为本发明之第三实施例中薄膜晶体管阵列的俯视示意图。FIG. 7 is a schematic top view of a thin film transistor array in a third embodiment of the present invention.
图8为图7之薄膜晶体管阵列沿II-II’线的剖面示意图。FIG. 8 is a schematic cross-sectional view of the thin film transistor array in FIG. 7 along the line II-II'.
图9为本发明之第四实施例中薄膜晶体管阵列的俯视示意图。FIG. 9 is a schematic top view of a thin film transistor array in a fourth embodiment of the present invention.
主要元件标记说明Description of main component marking
100、300、400、600、700:薄膜晶体管阵列100, 300, 400, 600, 700: thin film transistor array
110:像素结构110: Pixel structure
112、404:扫瞄配线112, 404: Scan wiring
114、406:数据配线114, 406: data wiring
116、316、410:薄膜晶体管116, 316, 410: thin film transistors
118、420:像素电极118, 420: pixel electrode
402:基板402: Substrate
408:像素区域408: Pixel area
412、G:栅极412, G: grid
414:通道层414: channel layer
416、S:源极416, S: source
418、D:漏极418, D: Drain
422:栅绝缘层422: Gate insulating layer
424:第一接触窗开口424: first contact window opening
425;第二接触窗开口425; second contact window opening
426:绝缘层426: insulating layer
430:共用配线430: Shared wiring
432:第一条状图案432: First bar pattern
434:第二条状图案434: Second bar pattern
440:辅助电极440: auxiliary electrode
450:连接导体层450: Connect conductor layer
A1:第一重叠区域A 1 : first overlapping area
A2:第二重叠区域A 2 : Second overlapping area
C1、C2、Cst:存储电容C 1 , C 2 , C st : storage capacitor
Cgd:栅极-漏极寄生电容C gd : Gate-drain parasitic capacitance
CLC:液晶电容C LC : Liquid crystal capacitance
具体实施方式Detailed ways
本发明在薄膜晶体管阵列中设置辅助电极,其用以使各个像素区域内的栅极-漏极寄生电容变动量与存储电容变动量成一特定比例,进而使各个曝光区域内的馈通电压彼此近似。以下将举实施例说明本发明,但其并非用以限定本发明。In the present invention, an auxiliary electrode is provided in the thin film transistor array, which is used to make the variation of the gate-drain parasitic capacitance in each pixel area and the variation of the storage capacitance in a specific ratio, and then make the feedthrough voltages in each exposure area approximate to each other . The following examples will be given to illustrate the present invention, but they are not intended to limit the present invention.
图4为本发明之第一实施例中薄膜晶体管阵列的俯视示意图。图5则为图4之薄膜晶体管阵列沿I-I’线的剖面示意图。请参照图4,薄膜晶体管阵列400主要由基板402、多个薄膜晶体管410、多个像素电极420、多条共用配线430以及多个辅助电极440所构成。其中,基板402上设置有扫瞄配线404与数据配线406,且扫瞄配线404及数据配线406在基板402上区分出多个像素区域408,而这些像素电极420即分别设置在各个像素区域408内。FIG. 4 is a schematic top view of the thin film transistor array in the first embodiment of the present invention. Fig. 5 is a schematic cross-sectional view of the thin film transistor array of Fig. 4 along the line I-I'. Referring to FIG. 4 , the thin film transistor array 400 is mainly composed of a
承上所述,每一像素区域408内均设置有一薄膜晶体管410,而每一薄膜晶体管410均包括栅极412、通道层414、源极416以及漏极418。其中,栅极412电连接至扫瞄配线404,且由于栅极412与扫瞄配线404在同一道制造工艺中完成,因此可直接以扫瞄配线404的一部份作为薄膜晶体管410的栅极412,如图4所示。源极416电连接至数据配线406,漏极418则从通道层414上沿方向p延伸至像素电极420下方,并电连接至像素电极420。值得注意的,漏极418与栅极412之间具有第一重叠区域A1,因而在栅极412与漏极418之间形成栅极-漏极寄生电容Cgd(见图5)。As mentioned above, each
请继续参照图4,共用配线430设置在基板402上,而有部分区域位于像素电极420下方,且每一条共用配线430均位于相邻之两条扫瞄配线404之间。此外,共用配线430在每一像素区域408内例如具有第一条状图案432与第二条状图案434。其中,第一条状图案432与第二条状图案434例如往不同方向延伸。在本实施例中,第一条状图案432例如与第二条状图案434相互垂直。举例来说,第一条状图案432例如与数据配线416平行,而第二条状图案434例如与扫瞄配线平行414。当然,所属技术领域的技术人员应该知道,共用配线430还可以呈现为其它图案,本发明并未对其加以限定。Please continue to refer to FIG. 4 , the
特别地,各个像素区域408内亦设置有辅助电极440,其设置于像素电极420下方,并从共用配线430上方沿着方向p而延伸至共用配线430的一侧。其中,方向p例如垂直于共用配线430之第二条状图案434的延伸方向。而辅助电极440即从共用配线430之第二条状图案434上沿方向p而延伸至其一侧。在此,辅助电极440与共用配线430之间具有第二重叠区域A2。In particular, each
请参照图5,所属技术领域的技术人员应该知道,通常在形成栅极412与共用配线430之后,会先在基板402上形成栅绝缘层422,然后才在栅绝缘层422上形成通道层414。而栅极、漏极418即与栅绝缘层422构成具有上述之栅极-漏极寄生电容Cgd的电容器。Referring to FIG. 5 , those skilled in the art should know that usually after forming the
此外,在形成源极416与漏极418之后,会先在基板402上形成层绝缘层426,以覆盖住薄膜晶体管410、共用配线430及辅助电极440,然后再于绝缘层426上形成像素电极420。其中,绝缘层426具有多个暴露出薄膜晶体管410之漏极418的第一接触窗开口424,而像素电极420即填入这些第一接触窗开口424内,以电连接至漏极418。In addition, after the
值得一提的,部分的第一接触窗开口424亦暴露出辅助电极440。换言之,填入第一接触窗开口424内的像素电极420也会电连接至辅助电极440。由此可知,本发明之辅助电极440与像素电极420等电位,而辅助电极440的第二重叠区域A2与共用配线430之间则形成存储电容Cst。It is worth mentioning that part of the first
请再参照图4,特别地,由于漏极418与辅助电极440以同一道光掩膜完成图案化制造工艺,因此在曝光制造工艺中,当光掩膜产生位移误差而使第一重叠区域A1小于默认值时,第二重叠区域A2也会小于默认值。同样地,当光掩膜产生位移误差而使第一重叠区域A1大于默认值时,第二重叠区域A2也会大于默认值。也就说,栅极-漏极寄生电容Cgd与存储电容Cst会因制造工艺误差而同时增加或减少。Please refer to FIG. 4 again. In particular, since the
而且,由馈通电压ΔVp的表示式(见式(1))可知,在电压ΔVg与液晶电容CLC均为定值的情况下,若栅极-漏极寄生电容Cgd与存储电容Cst以适当的比例同时增加或减少,则可使馈通电压ΔVp维持定值。请再参照图4,本发明即依据此原则来设计辅助电极440之形状与面积,以使得存储电容Cst的因制造工艺误差所产生的变动量与栅极-漏极寄生电容Cgd的变动量之间具有适当的比例。如此一来,即使各个像素区域408内的第一重叠区域A1及第二重叠区域A2之面积因制造工艺误差而有所不同,但各个像素区域408内仍可具有相同的馈通电压ΔVp。Moreover, from the expression of the feed-through voltage ΔVp (see formula (1)), it can be known that, when the voltage ΔVg and the liquid crystal capacitance C LC are both constant values, if the gate-drain parasitic capacitance C gd and the storage capacitance C st Simultaneously increasing or decreasing in an appropriate proportion can maintain the feedthrough voltage ΔVp at a constant value. Please refer to FIG. 4 again, the present invention designs the shape and area of the
图6为本发明之第二实施例中薄膜晶体管阵列的俯视示意图。其中,本实施例之薄膜晶体管阵列600与第一实施例之薄膜晶体管阵列400大致相同,因此下文将针对其相异处做说明。FIG. 6 is a schematic top view of the thin film transistor array in the second embodiment of the present invention. Wherein, the thin film transistor array 600 of this embodiment is substantially the same as the thin film transistor array 400 of the first embodiment, so the differences will be described below.
请参照图6,薄膜晶体管410的漏极412从通道层414上沿方向q延伸至像素电极420下方,并藉由第一接触窗开口424而与像素电极420电连接。此外,辅助电极440由共用配线430上方沿方向q而延伸至共用配线430的一侧。其中,方向q例如垂直于共用配线430之第一条状图案432的延伸方向,而辅助电极440即从共用配线430之第一条状图案432上沿方向q而延伸至其一侧。由此可知,当漏极418在曝光制造工艺中产生方向q上的位移误差时,辅助电极440在方向q上亦会产生位移误差。因此,辅助电极440与共用配线430之间的第二重叠区域A2之面积将会与漏极418与栅极412之间的第一重叠区域A1之面积成比例地同时增加或减少,进而使各个像素区域408内的馈通电压维持定值。Referring to FIG. 6 , the
值得注意的,虽然本实施例之存储电容Cst的变化量主要取决于辅助电极440与共用配线430之第一条状图案432的重叠面积变化量,但辅助电极440亦可部分地重叠于共用配线430之第二条状图案434上方,以增加各个像素区域408中的存储电容Cst。同样的,在本发明之第一实施例中,辅助电极400也可部分地重叠于共用配线430之第一条状图案432上方,所属技术领域的技术人员应该可以了解其细节,此处不再另行绘制附图来说明。It is worth noting that although the variation of the storage capacitor C st in this embodiment mainly depends on the variation of the overlapping area of the
除此之外,本发明在另一实施例中还提出一种薄膜晶体管阵列,其不但可达成上述实施例之功效,更由于其中构成存储电容之两电极间的间距小,因此可在不影响存储电容值的前提下,缩小辅助电极的面积,进而增加薄膜晶体管阵列的开口率。以下将举实施例说明之。In addition, the present invention also proposes a thin film transistor array in another embodiment, which can not only achieve the effects of the above embodiments, but also because the distance between the two electrodes forming the storage capacitor is small, it can be used without affecting Under the premise of keeping the storage capacitance value, the area of the auxiliary electrode is reduced, thereby increasing the aperture ratio of the thin film transistor array. Examples will be given below to illustrate it.
图7为本发明之第三实施例中薄膜晶体管阵列的俯视示意图。图8则为图7之薄膜晶体管阵列沿II-II’线的剖面示意图。同样地,本实施例之薄膜晶体管阵列700与第一实施例之薄膜晶体管阵列400大致相同,因此下文将针对其相异处做说明。FIG. 7 is a schematic top view of a thin film transistor array in a third embodiment of the present invention. FIG. 8 is a schematic cross-sectional view of the thin film transistor array in FIG. 7 along the line II-II'. Likewise, the thin
请同时参照图7及图8,除了图4所示之元件外,薄膜晶体管阵列700的每一像素区域408内还设置有连接导体层450,其位于辅助电极440与共用配线430的上方,并电连接至共用配线430。详细地说,本实施例之绝缘层426例如还具有多个第二接触窗开口425,且这些第二接触窗开口贯穿绝缘层426与栅绝缘层422,而暴露出每一像素区域408内的部分共用配线430,以使设置在绝缘层426上的连接导体层450可藉由填入第二接触窗开口425而电连接至共用配线430。Please refer to FIG. 7 and FIG. 8 at the same time. In addition to the elements shown in FIG. 4 , each
此外,连接导体层450可以与像素电极720以同一道光掩膜制作完成。也就说,连接导体层450例如与像素电极720同样由透明导电氧化物所构成。当然,连接导体层450与像素电极720也可以分别使用不同光掩膜来对其进行图案化,本发明并未对其加以限定。In addition, the connecting
请继续参照图8,由上述可知,连接导体层450与共用配线430等电位,而连接导体层450与辅助电极440之间则形成存储电容C1。另外,如第一实施例所述,像素电极720填入绝缘层426之第一接触窗开口424而电连接至辅助电极440,且辅助电极440与共用配线430之间则形成存储电容C2。由此可知,本实施例之存储电容Cst即为存储电容C1与存储电容C2并联而得的等效电容。Please continue to refer to FIG. 8 , it can be known from the above that the
所属技术领域的技术人员应该知道,电容器的电容值与此电容器之二电极的面积成正比,而与此电容器之二电极的间距成反比。依据此原理,在本实施例中,由于连接导体层450与辅助电极440之间以及辅助电极440与共用配线430之间的间距短,因此与同样具有存储电容Cst的薄膜晶体管阵列相较之下,本实施例之薄膜晶体管阵列700还可以进一步地缩小辅助电极440的面积,以便于增加薄膜晶体管阵列700的开口率。Those skilled in the art should know that the capacitance of a capacitor is directly proportional to the area of the two electrodes of the capacitor and inversely proportional to the distance between the two electrodes of the capacitor. According to this principle, in this embodiment, since the distance between the connecting
图9为本发明之第四实施例中薄膜晶体管阵列的俯视示意图。请参照图9,值得一提的,虽然图7所示之辅助电极440与连接导体层450位于共用配线430之第二条状图案434上方,但如同前述之说明,本实施例中辅助电极440与连接导体层450也可以设置在共用配线430之第一条状图案432上方。当然,辅助电极440与连接导体层450还可以同时设置在共用配线430之第一条状图案432与第二条状图案434上方(图中未表示),本发明并未对此加以限定。FIG. 9 is a schematic top view of a thin film transistor array in a fourth embodiment of the present invention. Please refer to FIG. 9. It is worth mentioning that although the
本发明之薄膜晶体管阵列主要在各个像素区域内设置辅助电极,并且令此辅助电极与共用配线构成存储电容。当此薄膜晶体管阵列在曝光制造工艺中因光掩膜产生位移误差,而在各个曝光区域内形成不同的栅极-漏极寄生电容时,其亦会同时在各个曝光区域内形成不同的存储电容。其中,当某一曝光区域内的栅极-漏极寄生电容大于/小于前次曝光区域内的栅极-漏极寄生电容时,此曝光区域内的存储电容亦大于/小于前次曝光区域内的存储电容,且存储电容的变化量与栅极-漏极寄生电容的变化量成一特定比例,以使各个曝光区域内的馈通电压维持相同的定值,进而使利用本发明之薄膜晶体管阵列作为显示面板的显示器能够具有优异的显示质量。In the thin film transistor array of the present invention, auxiliary electrodes are mainly arranged in each pixel area, and the auxiliary electrodes and the common wiring form storage capacitors. When the thin film transistor array forms different gate-drain parasitic capacitances in each exposure area due to displacement errors caused by the photomask in the exposure manufacturing process, it will also form different storage capacitances in each exposure area at the same time . Wherein, when the gate-drain parasitic capacitance in a certain exposure area is larger/smaller than the gate-drain parasitic capacitance in the previous exposure area, the storage capacitance in this exposure area is also larger/smaller than that in the previous exposure area storage capacitance, and the variation of the storage capacitance is in a specific ratio to the variation of the gate-drain parasitic capacitance, so that the feed-through voltage in each exposure area maintains the same constant value, and then the thin film transistor array utilizing the present invention A display as a display panel can have excellent display quality.
此外,本发明还在薄膜晶体管阵列中设置连接导体层,并且在辅助电极与共用配线之间以及连接导体层与辅助电极之间构成存储电容,也就缩短构成这些存储电容之二电极的间距,以在不改变存储电容之电性表现的前提下,缩小辅助电极的面积,进而增加薄膜晶体管的开口率。In addition, the present invention also arranges a connection conductor layer in the thin film transistor array, and forms storage capacitors between the auxiliary electrodes and the common wiring and between the connection conductor layer and the auxiliary electrodes, so that the distance between the two electrodes forming these storage capacitors is shortened. , so as to reduce the area of the auxiliary electrode without changing the electrical performance of the storage capacitor, thereby increasing the aperture ratio of the thin film transistor.
综上所述,本发明能够解决公知的显示面板因薄膜晶体管阵列曝光制造工艺误差所导致显示质量不佳的问题,且亦不会对面板的开口率造成不良的影响。To sum up, the present invention can solve the known problem of poor display quality of the display panel caused by the error in the exposure manufacturing process of the thin film transistor array, and will not cause adverse effects on the aperture ratio of the panel.
虽然本发明已以较佳实施例披露如上,然其并非用以限定本发明,任何所属技术领域的技术人员,在不脱离本发明之精神和范围内,当可作些许之更动与改进,因此本发明之保护范围当以权利要求所界定者为准。Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art may make some modifications and improvements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be defined by the claims.
Claims (14)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200510079394 CN1893088A (en) | 2005-07-04 | 2005-07-04 | thin film transistor array |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200510079394 CN1893088A (en) | 2005-07-04 | 2005-07-04 | thin film transistor array |
Publications (1)
Publication Number | Publication Date |
---|---|
CN1893088A true CN1893088A (en) | 2007-01-10 |
Family
ID=37597742
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200510079394 Pending CN1893088A (en) | 2005-07-04 | 2005-07-04 | thin film transistor array |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN1893088A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011131143A1 (en) * | 2010-04-23 | 2011-10-27 | 北京京东方光电科技有限公司 | Array substrate, manufacturing method thereof and liquid crystal display |
CN102520555A (en) * | 2011-12-02 | 2012-06-27 | 深圳市华星光电技术有限公司 | Pixel structure, array substrate and liquid crystal display device |
CN102610629A (en) * | 2011-12-23 | 2012-07-25 | 友达光电股份有限公司 | Semiconductor structure |
CN103336397A (en) * | 2013-07-01 | 2013-10-02 | 京东方科技集团股份有限公司 | Array substrate, display panel and display device |
CN105259717A (en) * | 2015-11-25 | 2016-01-20 | 深圳市华星光电技术有限公司 | Array substrate and display device |
CN112863329A (en) * | 2019-11-12 | 2021-05-28 | 群创光电股份有限公司 | Display device |
-
2005
- 2005-07-04 CN CN 200510079394 patent/CN1893088A/en active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011131143A1 (en) * | 2010-04-23 | 2011-10-27 | 北京京东方光电科技有限公司 | Array substrate, manufacturing method thereof and liquid crystal display |
US9753335B2 (en) | 2010-04-23 | 2017-09-05 | Beijing Boe Optoelectronics Technology Co., Ltd. | Array substrate with additional electrode formed above gate line, manufacturing method thereof and liquid crystal display |
CN102520555A (en) * | 2011-12-02 | 2012-06-27 | 深圳市华星光电技术有限公司 | Pixel structure, array substrate and liquid crystal display device |
CN102610629A (en) * | 2011-12-23 | 2012-07-25 | 友达光电股份有限公司 | Semiconductor structure |
CN102610629B (en) * | 2011-12-23 | 2014-04-02 | 友达光电股份有限公司 | Semiconductor structure |
CN103336397A (en) * | 2013-07-01 | 2013-10-02 | 京东方科技集团股份有限公司 | Array substrate, display panel and display device |
WO2015000273A1 (en) * | 2013-07-01 | 2015-01-08 | 京东方科技集团股份有限公司 | Array substrate, display panel and display device |
CN103336397B (en) * | 2013-07-01 | 2015-09-09 | 京东方科技集团股份有限公司 | A kind of array base palte, display panel and display device |
US9613574B2 (en) | 2013-07-01 | 2017-04-04 | Boe Technology Group Co., Ltd. | Switch circuit to control the flow of charges in the parasitic capacitance of a TFT in the pixel of a display |
CN105259717A (en) * | 2015-11-25 | 2016-01-20 | 深圳市华星光电技术有限公司 | Array substrate and display device |
CN112863329A (en) * | 2019-11-12 | 2021-05-28 | 群创光电股份有限公司 | Display device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100335957C (en) | In-plane switching mode liquid crystal display device and method for fabricating the same | |
CN2590030Y (en) | Semi-transmission-reflection type electrooptical device and electronic apparatus | |
CN1184607C (en) | Liquid crystal display device and method for manufacturing the liquid crystal display device | |
CN1667477A (en) | In-plane switching mode liquid crystal display device and fabrication method thereof | |
CN100351690C (en) | Liquid crystal display device | |
CN1912717A (en) | Liquid crystal display device | |
CN1892394A (en) | Liquid crystal display device and fabricating method thereof | |
CN1573491A (en) | Thin film transistor array panel and liquid crystal display including the panel | |
CN1492273A (en) | Liquid crystal display array substrate and manufacturing method thereof | |
CN1992293A (en) | Thin film transistor array substrate and method for manufacturing the same | |
CN1246639A (en) | Active matrix-type liquid crystal display device | |
CN1668969A (en) | LCD Monitor | |
CN1495477A (en) | Display substrate, liquid crystal display and method of manufacturing the liquid crystal display | |
CN1238756C (en) | Active matrix substrate, photoelectric device and electronic device | |
CN101075054A (en) | Array base plate for liquid-crystal display device and its production | |
CN1858640A (en) | Thin film transistor array panel and liquid crystal display including the same | |
CN1870296A (en) | Thin film transistor and liquid crystal display device using the same | |
CN1727972A (en) | Thin-film transistor display panel and comprise its display device | |
CN1892395A (en) | Thin film transistor liquid crystal display panel and method of fabricating the same | |
CN1161650C (en) | Reflective LCD | |
CN1625713A (en) | Multi-domain liquid crystal display and its thin film transistor substrate | |
CN101030583A (en) | Thin film transistor array and repair method thereof | |
CN1619397A (en) | Film panel | |
CN1485667A (en) | Substrate for liquid crystal display device and liquid crystal display device having same | |
CN1577026A (en) | Liquid crystal display and manufacturing method of display panel containing in display |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |