CN1862218A

CN1862218A - Integrated measurer for deep microhole surface topography

Info

Publication number: CN1862218A
Application number: CN 200510069433
Authority: CN
Inventors: 王中宇; 李�柱; 谢铁邦; 魏天民; 林敏�
Original assignee: Beihang University
Current assignee: Beihang University
Priority date: 2005-05-10
Filing date: 2005-05-10
Publication date: 2006-11-15
Anticipated expiration: 2025-05-10
Also published as: CN100343619C

Abstract

The invention belongs to the measurement and testing technology, and relates to the improvement of a device for measuring the surface topography of deep and small holes. It includes a base, a turntable 1, a fixture 2, and a sensor 4. It is characterized in that there is a column 12 and a support 11 on the base; there is a rolling linear guide pair composed of a motion pair 5 and a fixed pair 6. The sensor 4 is installed on the kinematic pair 5; there is a mounting cylinder 10 connecting the rolling linear guide rail pair and the support 11. The measurable minimum hole diameter of the present invention is 5mm, and the hole depth is 45mm.

Description

Integrated measurer for deep microhole surface topography

Technical field

The invention belongs to metrological testing technology, relate to improvement the deep microhole surface topography measurement mechanism.

Background technology

In the metrology and measurement field, the measurement of the especially dark little internal surface of hole of small size is one of technological difficulties in the precision measurement always.The problem that deep microhole surface topography is measured mainly contains three, and the one, when the less and hole depth in aperture is longer, the restriction in examined space and be difficult to measure; The 2nd, the requirement sensor had both had high resolving power, had bigger dynamic range simultaneously again; The 3rd, the parameter more complicated that requirement is measured may comprise macroshape sum of errors microcosmic surface roughness simultaneously, thereby has further increased the degree of difficulty of measuring.Conventional commercialization roundness measuring equipment generally only is suitable for the measurement of common parts deviation from circular from.Owing to be subjected to the restriction of sensor construction, be difficult to the especially dark aperture part of aperture class is measured.Dark little hole type parts does not generally use roundness measuring equipment at present, but measure by instrumentation.About the measurement of deep hole or micropore, though more existing patented technologies all exist certain limitation.For example " microbore automatic measuring method and device (application number: 02137742.1) ", adopt the CCD camera that the micropore on the wave carrier piece is amplified by microscope, can measure small-sized aperture, but shortcoming is to only limit to laminar part.The hole depth scope that " deep hole surface roughness contourgraph (application number: 91108717.6) " can be surveyed is a 0-10 rice, pore diameter range is 38-100mm, adopt the reducing gear of Pyatyi conical gear, not only cause the physical construction more complicated, and the minimum-value aperture that can survey is more than 38mm." portable microcomputer deep hole comprehensive tester (application number: 96238932.3) " adopt and adjust the locator meams that reference point and rolling friction combine automatically, can obtain the size and the shape error of deep hole apace, though do not provide I gaging hole footpath, but from the external diameter 55mm of its gauge head axis holder and the diameter 8mm reckoning of steel ball on every side, the minimum-value aperture should be more than 70mm.Therefore existing instrument or technology still can not solve the problems of measurement of dark aperture part inside surface well.

Summary of the invention

The objective of the invention is: propose a kind of integrated measurer for deep microhole surface topography that can solve dark aperture part inside surface measurement.

Technical scheme of the present invention is: integrated measurer for deep microhole surface topography, comprise a pedestal, and the panoramic table 1 of a horizontal positioned is installed on pedestal, the anchor clamps 2 of a clamping measured piece 3 are fixed on the panoramic table 1, also comprise a sensor 4, it is characterized in that

(1) on pedestal, fixing a columniform column [12], a bearing [11] is arranged, there is a vertical circular through hole on its right side, on the hole wall of this through hole, there is one to connect the narrow groove of hole wall and the auricle that outwards stretches, two fishbolts are through in the bolt hole of auricle, and the through hole of bearing [11] is enclosed within on the column [12]; The circular port that a level is arranged in the left side of bearing [11], one section narrow groove that connects hole wall is respectively arranged on the upper and lower hole wall in this hole, the hole wall that is positioned at narrow groove place extends respectively up and down, in hole wall one side that extends a threaded hole perpendicular to narrow groove is arranged, opposite side has the through hole coaxial with threaded hole, and fastening bolt is screwed in this threaded hole after passing this through hole; The centre of bearing [11] has a vertical squared-shaped passthrough openings, and the circular port of above-mentioned level is communicated with vertical squared-shaped passthrough openings;

(2) linear rolling guide is arranged, it is made up of kinematic pair 5 and fixed joint 6, the work top of the direction of motion of kinematic pair 5 and panoramic table 1 is perpendicular, stepper motor 9 is by being bolted on the web joint 8, the leading screw 7 of the axle head of stepper motor 9 and kinematic pair 5 is connected, and web joint 8 is connected by the upper surface of bolt with fixed joint 6;

(3) an installation tube 10 that connects linear rolling guide and bearing 11 is arranged, its right-hand member is a cylinder, inserts in the horizontal circular port of bearing 11; Its left end is the installing plate that has bolt hole, and the back side by bolt and fixed joint 6 is connected;

(4) sensor 4 is installed on the kinematic pair 5 of linear rolling guide, and this sensor is a square elbow measuring staff displacement transducer.

Advantage of the present invention is:

1, the minimum-value aperture that can survey is 5mm, and hole depth is 45mm.

2, not only can measure, but also can measure the microcosmic surface roughness to the shape error such as the bulk parameters such as circularity, right alignment and bus linearity of dark little internal surface of hole.Especially can measure circular conical surface bus linearity and surfaceness in the certain limit.

3, the key technical indexes is as follows, and the error of indication of measuring deviation from circular from is less than 0.2 μ m; The error of indication of measure surface roughness is less than 3.8%.

Description of drawings

Fig. 1 is the structural representation of integrated measurer for deep microhole surface topography of the present invention.

Fig. 2 is the structural drawing of web joint 8 among the present invention.

Fig. 3 is that the A-A of Fig. 1 is to cut-open view.

Fig. 4 is that the B-B of Fig. 1 is to part sectioned view and view.

Fig. 5 is that the C-C of Fig. 1 is to local amplification profile.

Embodiment

Below the present invention is described in further details.The present invention utilizes dark aperture measuring with square elbow measuring staff displacement transducer, is equipped with special-purpose adjusting mechanism, solves the composite measurement problem of dark aperture internal surface shape with the mode of roundness measuring equipment.Referring to Fig. 1, measurement mechanism of the present invention mainly is made up of panoramic table, sensor, guideway, adjusting mechanism and control system etc.It comprises a pedestal, the panoramic table 1 of a horizontal positioned is installed on pedestal, the anchor clamps 2 of a clamping measured piece 3 are fixed on the panoramic table 1, also comprise a sensor 4, the sensor that the present invention adopts is a square elbow measuring staff displacement transducer, referring to Chinese utility application: 200520016994.2.It has the characteristic of high resolution and wide dynamic range simultaneously.The invention is characterized in,

(1) on pedestal, fixing a columniform column 12, a bearing 11 is arranged, there is a vertical circular through hole on its right side, on the hole wall of this through hole, there is one to connect the narrow groove of hole wall and the auricle that outwards stretches, two fishbolts are through in the bolt hole of auricle, and the through hole of bearing 11 is enclosed within on the column 12; The circular port that a level is arranged in the left side of bearing 11, one section narrow groove that connects hole wall is respectively arranged on the upper and lower hole wall in this hole, the hole wall that is positioned at narrow groove place extends respectively up and down, in hole wall one side that extends a threaded hole perpendicular to narrow groove is arranged, opposite side has the through hole coaxial with threaded hole, and fastening bolt is screwed in this threaded hole after passing this through hole; The centre of bearing 11 has a vertical squared-shaped passthrough openings, and the circular port of above-mentioned level is communicated with vertical squared-shaped passthrough openings.Said structure forms the clamping device of a level.The effect of squared-shaped passthrough openings is: the one, alleviate the weight of bearing 11 from physical construction, and the 2nd, for the circular through hole on right side and the circular port in left side provide locking needed elastic force.

(2) linear rolling guide is arranged, it is made up of kinematic pair 5 and fixed joint 6, and the work top of the direction of motion of kinematic pair 5 and panoramic table 1 is perpendicular.Referring to Fig. 2, stepper motor 9 is by being bolted on the web joint 8, and the leading screw 7 of the axle head of stepper motor 9 and kinematic pair 5 is connected, and web joint 8 is connected by the upper surface of bolt with fixed joint 6.Measured piece 3 is installed in the anchor clamps 2 that are arranged on the panoramic table 1, sensor 4 is installed on the kinematic pair 5 of linear rolling guide, by leading screw 7 under the control of stepper motor 9, can move up and down along the fixed joint 6 of linear rolling guide, the work top of its direction of motion and panoramic table 1 is perpendicular.

(3) an installation tube 10 that connects linear rolling guide and bearing 11 is arranged, its right-hand member is a cylinder, inserts in the horizontal circular port of bearing 11.Its left end is the installing plate that has bolt hole, and the back side by bolt and fixed joint 6 is connected.Referring to Fig. 3, it has shown tube 10 left ends are installed at the back side of the fixed joint 6 of linear rolling guide by bolt and guide rail the situation that is connected.Referring to Fig. 4, it has shown that guide rail installs the situation in the left side circular port that the right-hand member cylinder of tube 10 inserts bearing 11.Simultaneously, shown that also the right side circular hole by bearing 11 locks its position on column 12.The effect that guide rail is installed tube 10 has two, the one, guarantee that by adjusting its stroke in bearing 11 contact pilotage of sensor 4 contacts with measured surface, the 2nd, guarantee that by adjusting its angle in bearing 11 work top of kinematic pair 5 direction of motion of linear rolling guide and panoramic table 1 is perpendicular.Referring to Fig. 5, it has shown that bearing 11 is clamped in guide rail by bolt situation on the tube 10 is installed.

Use the step of apparatus of the present invention to be: at first suitably to adjust guide rail the position of tube 10 in bearing 11 is installed, the sensor 4 and the measuring point of measured piece 3 are adapted.By suitable rotation guide rail tube 9 is installed, make linear rolling guide kinematic pair 5 to move up and down direction vertical with panoramic table 1.Panoramic table 1 drives measured piece 3 uniform rotation, the sensor 4 that is installed on the motion guide rail pair by computer control moves up and down along fixed guide pair 6, the assigned address that arrives measured surface is measured deviation from circular from, can pacify respectively according to least square method or two kinds of methods of Minimum Area method deviation from circular from is evaluated.When panoramic table 1 stopped operating, sensor 4 moved up and down, and can realize the measurement to bus linearity or surfaceness, according to different sample lengths and assessment method, can analyze and calculate the straightness error of surfaceness or bus respectively.

Claims

1. The device for comprehensive measurement of the surface topography of deep and small holes includes a base on which a horizontally placed turntable [1] is installed, and a fixture [2] for clamping the measured piece [3] is fixed on the turntable. On the stage [1], also includes a sensor [4], it is characterized in that,

(1) A cylindrical column [12] is fixed on the base, and there is a support [11], and a vertical circular through hole is arranged on its right side, and a through hole is arranged on the hole wall of the through hole. The narrow groove of the hole wall and the outwardly extending lugs, two clamping bolts pass through the bolt holes of the lugs, the through holes of the support [11] are set on the column [12]; on the support [11] There is a horizontal circular hole on the left side. There is a narrow groove through the hole wall on the upper and lower walls of the hole. The hole walls at the narrow groove extend up and down respectively. There is a The threaded hole is perpendicular to the narrow groove, and there is a through hole coaxial with the threaded hole on the other side, and the fastening bolt is screwed into the threaded hole after passing through the through hole; there is a vertical square in the middle of the support [11]. Through holes, the above-mentioned horizontal circular holes communicate with the vertical square through holes;

(2) There is a rolling linear guide pair, which is composed of a kinematic pair [5] and a fixed pair [6]. The moving direction of the kinematic pair [5] is perpendicular to the working surface of the turntable [1]. ] is fixed on the connecting plate [8] by bolts, the shaft end of the stepping motor [9] is fixedly connected with the lead screw [7] of the kinematic pair [5], and the connecting plate [8] is connected to the fixed pair [6] by bolts. top connection;

(3) There is a mounting cylinder [10] connecting the rolling linear guide pair and the support [11], its right end is a cylinder inserted into the horizontal circular hole of the support [11]; its left end is a cylinder with The mounting plate of the bolt hole is fixedly connected with the back of the fixed pair [6] through bolts;

(4) The sensor [4] is installed on the kinematic pair [5] of the rolling linear guide rail pair, and the sensor is a right-angle elbow measuring rod displacement sensor.