CN1862218A - Integrated measurer for deep microhole surface topography - Google Patents
Integrated measurer for deep microhole surface topography Download PDFInfo
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- CN1862218A CN1862218A CN 200510069433 CN200510069433A CN1862218A CN 1862218 A CN1862218 A CN 1862218A CN 200510069433 CN200510069433 CN 200510069433 CN 200510069433 A CN200510069433 A CN 200510069433A CN 1862218 A CN1862218 A CN 1862218A
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Abstract
The present invention belongs to the field of metering measurement technology. In particular, it relates to an improvement of deep-small hole surface form measuring apparatus. It includes base seat, rotary table, clamp and sensor. It is characterized by that on the base seat it contains the following several portions: an upright column, a supporting seat, a rolling linear guideway pair formed from movement pair and fixed pair, sensor is mounted on the movement pair, and a mounting cylinder connected with rolling linear guideway pair and supporting seat. The minimum hole diameter which can be measured by said invention is 5 mm, and its hole depth is 45 mm.
Description
Technical field
The invention belongs to metrological testing technology, relate to improvement the deep microhole surface topography measurement mechanism.
Background technology
In the metrology and measurement field, the measurement of the especially dark little internal surface of hole of small size is one of technological difficulties in the precision measurement always.The problem that deep microhole surface topography is measured mainly contains three, and the one, when the less and hole depth in aperture is longer, the restriction in examined space and be difficult to measure; The 2nd, the requirement sensor had both had high resolving power, had bigger dynamic range simultaneously again; The 3rd, the parameter more complicated that requirement is measured may comprise macroshape sum of errors microcosmic surface roughness simultaneously, thereby has further increased the degree of difficulty of measuring.Conventional commercialization roundness measuring equipment generally only is suitable for the measurement of common parts deviation from circular from.Owing to be subjected to the restriction of sensor construction, be difficult to the especially dark aperture part of aperture class is measured.Dark little hole type parts does not generally use roundness measuring equipment at present, but measure by instrumentation.About the measurement of deep hole or micropore, though more existing patented technologies all exist certain limitation.For example " microbore automatic measuring method and device (application number: 02137742.1) ", adopt the CCD camera that the micropore on the wave carrier piece is amplified by microscope, can measure small-sized aperture, but shortcoming is to only limit to laminar part.The hole depth scope that " deep hole surface roughness contourgraph (application number: 91108717.6) " can be surveyed is a 0-10 rice, pore diameter range is 38-100mm, adopt the reducing gear of Pyatyi conical gear, not only cause the physical construction more complicated, and the minimum-value aperture that can survey is more than 38mm." portable microcomputer deep hole comprehensive tester (application number: 96238932.3) " adopt and adjust the locator meams that reference point and rolling friction combine automatically, can obtain the size and the shape error of deep hole apace, though do not provide I gaging hole footpath, but from the external diameter 55mm of its gauge head axis holder and the diameter 8mm reckoning of steel ball on every side, the minimum-value aperture should be more than 70mm.Therefore existing instrument or technology still can not solve the problems of measurement of dark aperture part inside surface well.
Summary of the invention
The objective of the invention is: propose a kind of integrated measurer for deep microhole surface topography that can solve dark aperture part inside surface measurement.
Technical scheme of the present invention is: integrated measurer for deep microhole surface topography, comprise a pedestal, and the panoramic table 1 of a horizontal positioned is installed on pedestal, the anchor clamps 2 of a clamping measured piece 3 are fixed on the panoramic table 1, also comprise a sensor 4, it is characterized in that
(1) on pedestal, fixing a columniform column [12], a bearing [11] is arranged, there is a vertical circular through hole on its right side, on the hole wall of this through hole, there is one to connect the narrow groove of hole wall and the auricle that outwards stretches, two fishbolts are through in the bolt hole of auricle, and the through hole of bearing [11] is enclosed within on the column [12]; The circular port that a level is arranged in the left side of bearing [11], one section narrow groove that connects hole wall is respectively arranged on the upper and lower hole wall in this hole, the hole wall that is positioned at narrow groove place extends respectively up and down, in hole wall one side that extends a threaded hole perpendicular to narrow groove is arranged, opposite side has the through hole coaxial with threaded hole, and fastening bolt is screwed in this threaded hole after passing this through hole; The centre of bearing [11] has a vertical squared-shaped passthrough openings, and the circular port of above-mentioned level is communicated with vertical squared-shaped passthrough openings;
(2) linear rolling guide is arranged, it is made up of kinematic pair 5 and fixed joint 6, the work top of the direction of motion of kinematic pair 5 and panoramic table 1 is perpendicular, stepper motor 9 is by being bolted on the web joint 8, the leading screw 7 of the axle head of stepper motor 9 and kinematic pair 5 is connected, and web joint 8 is connected by the upper surface of bolt with fixed joint 6;
(3) an installation tube 10 that connects linear rolling guide and bearing 11 is arranged, its right-hand member is a cylinder, inserts in the horizontal circular port of bearing 11; Its left end is the installing plate that has bolt hole, and the back side by bolt and fixed joint 6 is connected;
(4) sensor 4 is installed on the kinematic pair 5 of linear rolling guide, and this sensor is a square elbow measuring staff displacement transducer.
Advantage of the present invention is:
1, the minimum-value aperture that can survey is 5mm, and hole depth is 45mm.
2, not only can measure, but also can measure the microcosmic surface roughness to the shape error such as the bulk parameters such as circularity, right alignment and bus linearity of dark little internal surface of hole.Especially can measure circular conical surface bus linearity and surfaceness in the certain limit.
3, the key technical indexes is as follows, and the error of indication of measuring deviation from circular from is less than 0.2 μ m; The error of indication of measure surface roughness is less than 3.8%.
Description of drawings
Fig. 1 is the structural representation of integrated measurer for deep microhole surface topography of the present invention.
Fig. 2 is the structural drawing of web joint 8 among the present invention.
Fig. 3 is that the A-A of Fig. 1 is to cut-open view.
Fig. 4 is that the B-B of Fig. 1 is to part sectioned view and view.
Fig. 5 is that the C-C of Fig. 1 is to local amplification profile.
Embodiment
Below the present invention is described in further details.The present invention utilizes dark aperture measuring with square elbow measuring staff displacement transducer, is equipped with special-purpose adjusting mechanism, solves the composite measurement problem of dark aperture internal surface shape with the mode of roundness measuring equipment.Referring to Fig. 1, measurement mechanism of the present invention mainly is made up of panoramic table, sensor, guideway, adjusting mechanism and control system etc.It comprises a pedestal, the panoramic table 1 of a horizontal positioned is installed on pedestal, the anchor clamps 2 of a clamping measured piece 3 are fixed on the panoramic table 1, also comprise a sensor 4, the sensor that the present invention adopts is a square elbow measuring staff displacement transducer, referring to Chinese utility application: 200520016994.2.It has the characteristic of high resolution and wide dynamic range simultaneously.The invention is characterized in,
(1) on pedestal, fixing a columniform column 12, a bearing 11 is arranged, there is a vertical circular through hole on its right side, on the hole wall of this through hole, there is one to connect the narrow groove of hole wall and the auricle that outwards stretches, two fishbolts are through in the bolt hole of auricle, and the through hole of bearing 11 is enclosed within on the column 12; The circular port that a level is arranged in the left side of bearing 11, one section narrow groove that connects hole wall is respectively arranged on the upper and lower hole wall in this hole, the hole wall that is positioned at narrow groove place extends respectively up and down, in hole wall one side that extends a threaded hole perpendicular to narrow groove is arranged, opposite side has the through hole coaxial with threaded hole, and fastening bolt is screwed in this threaded hole after passing this through hole; The centre of bearing 11 has a vertical squared-shaped passthrough openings, and the circular port of above-mentioned level is communicated with vertical squared-shaped passthrough openings.Said structure forms the clamping device of a level.The effect of squared-shaped passthrough openings is: the one, alleviate the weight of bearing 11 from physical construction, and the 2nd, for the circular through hole on right side and the circular port in left side provide locking needed elastic force.
(2) linear rolling guide is arranged, it is made up of kinematic pair 5 and fixed joint 6, and the work top of the direction of motion of kinematic pair 5 and panoramic table 1 is perpendicular.Referring to Fig. 2, stepper motor 9 is by being bolted on the web joint 8, and the leading screw 7 of the axle head of stepper motor 9 and kinematic pair 5 is connected, and web joint 8 is connected by the upper surface of bolt with fixed joint 6.Measured piece 3 is installed in the anchor clamps 2 that are arranged on the panoramic table 1, sensor 4 is installed on the kinematic pair 5 of linear rolling guide, by leading screw 7 under the control of stepper motor 9, can move up and down along the fixed joint 6 of linear rolling guide, the work top of its direction of motion and panoramic table 1 is perpendicular.
(3) an installation tube 10 that connects linear rolling guide and bearing 11 is arranged, its right-hand member is a cylinder, inserts in the horizontal circular port of bearing 11.Its left end is the installing plate that has bolt hole, and the back side by bolt and fixed joint 6 is connected.Referring to Fig. 3, it has shown tube 10 left ends are installed at the back side of the fixed joint 6 of linear rolling guide by bolt and guide rail the situation that is connected.Referring to Fig. 4, it has shown that guide rail installs the situation in the left side circular port that the right-hand member cylinder of tube 10 inserts bearing 11.Simultaneously, shown that also the right side circular hole by bearing 11 locks its position on column 12.The effect that guide rail is installed tube 10 has two, the one, guarantee that by adjusting its stroke in bearing 11 contact pilotage of sensor 4 contacts with measured surface, the 2nd, guarantee that by adjusting its angle in bearing 11 work top of kinematic pair 5 direction of motion of linear rolling guide and panoramic table 1 is perpendicular.Referring to Fig. 5, it has shown that bearing 11 is clamped in guide rail by bolt situation on the tube 10 is installed.
(4) sensor 4 is installed on the kinematic pair 5 of linear rolling guide, and this sensor is a square elbow measuring staff displacement transducer.
Use the step of apparatus of the present invention to be: at first suitably to adjust guide rail the position of tube 10 in bearing 11 is installed, the sensor 4 and the measuring point of measured piece 3 are adapted.By suitable rotation guide rail tube 9 is installed, make linear rolling guide kinematic pair 5 to move up and down direction vertical with panoramic table 1.Panoramic table 1 drives measured piece 3 uniform rotation, the sensor 4 that is installed on the motion guide rail pair by computer control moves up and down along fixed guide pair 6, the assigned address that arrives measured surface is measured deviation from circular from, can pacify respectively according to least square method or two kinds of methods of Minimum Area method deviation from circular from is evaluated.When panoramic table 1 stopped operating, sensor 4 moved up and down, and can realize the measurement to bus linearity or surfaceness, according to different sample lengths and assessment method, can analyze and calculate the straightness error of surfaceness or bus respectively.
Claims (1)
1, integrated measurer for deep microhole surface topography comprises a pedestal, and the panoramic table [1] of a horizontal positioned is installed on pedestal, and the anchor clamps [2] of a clamping measured piece [3] are fixed on the panoramic table [1], also comprise a sensor [4], it is characterized in that,
(1) on pedestal, fixing a columniform column [12], a bearing [11] is arranged, there is a vertical circular through hole on its right side, on the hole wall of this through hole, there is one to connect the narrow groove of hole wall and the auricle that outwards stretches, two fishbolts are through in the bolt hole of auricle, and the through hole of bearing [11] is enclosed within on the column [12]; The circular port that a level is arranged in the left side of bearing [11], one section narrow groove that connects hole wall is respectively arranged on the upper and lower hole wall in this hole, the hole wall that is positioned at narrow groove place extends respectively up and down, in hole wall one side that extends a threaded hole perpendicular to narrow groove is arranged, opposite side has the through hole coaxial with threaded hole, and fastening bolt is screwed in this threaded hole after passing this through hole; The centre of bearing [11] has a vertical squared-shaped passthrough openings, and the circular port of above-mentioned level is communicated with vertical squared-shaped passthrough openings;
(2) linear rolling guide is arranged, it is made up of kinematic pair [5] and fixed joint [6], the work top of the direction of motion of kinematic pair [5] and panoramic table [1] is perpendicular, stepper motor [9] is by being bolted on the web joint [8], the leading screw [7] of the axle head of stepper motor [9] and kinematic pair [5] is connected, and web joint [8] is connected by the upper surface of bolt with fixed joint [6];
(3) an installation tube [10] that connects linear rolling guide and bearing [11] is arranged, its right-hand member is a cylinder, inserts in the horizontal circular port of bearing [11]; Its left end is the installing plate that has bolt hole, and the back side by bolt and fixed joint [6] is connected;
(4) sensor [4] is installed on the kinematic pair [5] of linear rolling guide, and this sensor is a square elbow measuring staff displacement transducer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100694333A CN100343619C (en) | 2005-05-10 | 2005-05-10 | Integrated measurer for deep microhole surface topography |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005100694333A CN100343619C (en) | 2005-05-10 | 2005-05-10 | Integrated measurer for deep microhole surface topography |
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| CN1862218A true CN1862218A (en) | 2006-11-15 |
| CN100343619C CN100343619C (en) | 2007-10-17 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100470186C (en) * | 2007-09-28 | 2009-03-18 | 淮阴工学院 | Three-dimensional working table contact pin type three-dimensional roughness measurement instrument |
| CN102162768A (en) * | 2010-12-29 | 2011-08-24 | 中国计量学院 | Device for detecting performance of static pressure air flotation guide rail and using method of device |
| CN102192721A (en) * | 2010-03-16 | 2011-09-21 | 机械科学研究总院先进制造技术研究中心 | On -line detection equipment for automobile engine cylinder body |
| CN102506793A (en) * | 2011-09-30 | 2012-06-20 | 中北大学 | Measurement head deep-hole female connection type stepping movement device |
| CN103743321A (en) * | 2013-11-21 | 2014-04-23 | 江苏太平洋液压机械制造有限公司 | Improved nut closing-up groove depth dimension detection apparatus |
| CN105043262A (en) * | 2015-09-02 | 2015-11-11 | 哈尔滨工业大学 | Threaded hole component measuring and sorting device based on embedded and machine vision |
| CN106483451A (en) * | 2016-10-11 | 2017-03-08 | 广东核电合营有限公司 | Million kilowatt nuclear power station radioactivity monitoring system processing unit test platform |
| CN107014333A (en) * | 2017-05-31 | 2017-08-04 | 西安交通大学 | In small-bore cartridge by diffusion of volatile treating agent micro hole precision measurement apparatus in place and method |
| CN107238362A (en) * | 2017-07-03 | 2017-10-10 | 中国电建集团贵阳勘测设计研究院有限公司 | Vertical intelligent detector for displacement sensor and detection method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI426230B (en) * | 2009-06-26 | 2014-02-11 | Hon Hai Prec Ind Co Ltd | Device for measuring roughness of internal surface of workpiece |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1070471A (en) * | 1991-09-10 | 1993-03-31 | 中国人民解放军装甲兵工程学院 | Deep hole surface roughness contourgraph |
| FR2743626B1 (en) * | 1996-01-17 | 1998-03-20 | Essilor Int | CONTOUR READING APPARATUS, PARTICULARLY FOR GLASSES |
| CN1172165C (en) * | 2001-12-27 | 2004-10-20 | 中国测试技术研究院 | Portable orifice-plate automatic measuring instrument |
| CN1200250C (en) * | 2002-10-31 | 2005-05-04 | 上海理工大学 | Microbore automatic measuring method and device |
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2005
- 2005-05-10 CN CNB2005100694333A patent/CN100343619C/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100470186C (en) * | 2007-09-28 | 2009-03-18 | 淮阴工学院 | Three-dimensional working table contact pin type three-dimensional roughness measurement instrument |
| CN102192721B (en) * | 2010-03-16 | 2015-08-12 | 机械科学研究总院先进制造技术研究中心 | A kind of automobile engine cylinder-body online detection instrument |
| CN102192721A (en) * | 2010-03-16 | 2011-09-21 | 机械科学研究总院先进制造技术研究中心 | On -line detection equipment for automobile engine cylinder body |
| CN102162768A (en) * | 2010-12-29 | 2011-08-24 | 中国计量学院 | Device for detecting performance of static pressure air flotation guide rail and using method of device |
| CN102162768B (en) * | 2010-12-29 | 2012-09-05 | 中国计量学院 | Device for detecting performance of static pressure air flotation guide rail and using method of device |
| CN102506793A (en) * | 2011-09-30 | 2012-06-20 | 中北大学 | Measurement head deep-hole female connection type stepping movement device |
| CN102506793B (en) * | 2011-09-30 | 2013-09-18 | 中北大学 | Measurement head deep-hole female connection type stepping movement device |
| CN103743321A (en) * | 2013-11-21 | 2014-04-23 | 江苏太平洋液压机械制造有限公司 | Improved nut closing-up groove depth dimension detection apparatus |
| CN105043262A (en) * | 2015-09-02 | 2015-11-11 | 哈尔滨工业大学 | Threaded hole component measuring and sorting device based on embedded and machine vision |
| CN106483451A (en) * | 2016-10-11 | 2017-03-08 | 广东核电合营有限公司 | Million kilowatt nuclear power station radioactivity monitoring system processing unit test platform |
| CN106483451B (en) * | 2016-10-11 | 2019-04-09 | 广东核电合营有限公司 | Million kilowatt nuclear power station radioactivity monitoring system processing unit test platform |
| CN107014333A (en) * | 2017-05-31 | 2017-08-04 | 西安交通大学 | In small-bore cartridge by diffusion of volatile treating agent micro hole precision measurement apparatus in place and method |
| CN107014333B (en) * | 2017-05-31 | 2019-04-12 | 西安交通大学 | In small-bore cartridge by diffusion of volatile treating agent micro hole precision measurement apparatus in place and method |
| CN107238362A (en) * | 2017-07-03 | 2017-10-10 | 中国电建集团贵阳勘测设计研究院有限公司 | Vertical intelligent detector for displacement sensor and detection method |
| CN107238362B (en) * | 2017-07-03 | 2023-06-27 | 中国电建集团贵阳勘测设计研究院有限公司 | Vertical intelligent detector for displacement sensor and detection method |
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| CN100343619C (en) | 2007-10-17 |
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