CN1846948A - Six-freedom micro operation robot with complete position and posture feedback - Google Patents
Six-freedom micro operation robot with complete position and posture feedback Download PDFInfo
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- CN1846948A CN1846948A CN 200610012449 CN200610012449A CN1846948A CN 1846948 A CN1846948 A CN 1846948A CN 200610012449 CN200610012449 CN 200610012449 CN 200610012449 A CN200610012449 A CN 200610012449A CN 1846948 A CN1846948 A CN 1846948A
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Abstract
The six-freedom micro operation robot with complete position a posture feedback features that the bench and the pedestal are connected through 12 kinematic link branches, including 6 feedback branches comprising a feedback branch pillar with flexible hinges on two ends and a strain gauge each, and 6 driving branches comprising a driving branch pillar with flexible hinges on two ends, parallel plate elastic shift pair and piezoelectric ceramic displacement unit each. The 12 kinematic link branches are separated into 3 groups including 2 feedback branches and 2 driving branches each. The main body of the six-freedom micro operation robot is one integral part machined through once machining. The present invention has simple structure, small size, low manufacture cost and other advantages, can realize micro complete closed-loop control with no friction, no interval and high resolution, and may be used widely.
Description
Technical field
This invention belongs to microelectromechanical systems (MEMS) field.
Background technology
Micro-manipulating robot is subjected to the great attention of Chinese scholars as the important branch of microelectromechanical systems (Micro Electro MechanicalSystem is called for short MEMS) research field.The micro-manipulating robot motion is meticulous, have sub-micron to nano level positioning resolution, in fields such as precision optical machinery engineering, Electronic Packaging, fine chemistry industry, fiber alignment, biology and genetic engineering, material science, millimicro planographic, Aero-Space, have broad application prospects.The parallel institution compact conformation, kinematic chain is short, rigidity is high and bearing capacity is big etc., and advantage makes it be suitable for the prototype as micro-manipulating robot mechanism.China classified country " 863 " plan key scientific and technological projects as with " micro-manipulating robot " in 1992, and Harbin Institute of Technology has developed a six-freedom parallel jiggle robot, and it is the variation Stewart platform of one six PSS of branch pair.The P pair all adopts flexible hinge by the piezoelectric ceramics horizontal drive, drives and detect integrated.BJ University of Aeronautics ﹠ Astronautics (BUAA) has developed the six degree of freedom connection in series-parallel jiggle robot of an intention uniqueness, two-stage decoupling zero, by Piezoelectric Ceramic, its mechanism is formed by last (3RPS mechanism), following (3RRR mechanism) two mechanisms serial connection, it has mechanism kinematic decoupling zero up and down, acceleration is big, can finish coarse adjustment, two kinds of characteristics such as function of fine tuning; University On The Mountain Of Swallows has developed six-DOF robot error compensator in parallel, and Hebei University of Technology has developed crossing decoupling structure six-freedom micro displacement robot, and Tsing-Hua University has developed the jiggle robot based on six degree of freedom Stewart platform.Though the research of parallel micromotion robot is obtained scholars' great attention, but with regard to the achievement that obtains at present, still exist many key technical problem needs further to solve and further investigation, as: how to make up the multidimensional closed-loop control system of jiggle robot etc.
Micro-manipulating robot research with full pose feedback is the new problem of microelectromechanical systems research field.In recent years, the research with micro-manipulating robot of pose feedback has received the concern of relevant scientific research institution both at home and abroad.In order to realize the pose closed-loop control of micro-manipulating robot, must the multidimensional micrometric displacement (control result) of micro-manipulating robot end be detected, that is to say that this micro-manipulating robot must have the checkout gear of multidimensional micrometric displacement, this makes this kind micro-manipulating robot complex structure, demarcates difficulty.At present, the multidimensional micro-manipulating robot mainly adopts parallel-connection structure, its pose feedback signal mostly derives from the voltage that is attached to the foil gauge in the branch of robot, this voltage is sent to single-chip microcomputer or computer through accurate operational amplification circuit and A/D change-over circuit, because micro-manipulating robot end (workbench) is not included in the backfeed loop, so the control system of micro-manipulating robot pose also is the half-closed loop control system at present.
Summary of the invention
The object of the present invention is to provide a kind of six-freedom micro operation robot with full pose feedback, this micro-manipulating robot body is the non-assembly of time processing moulding, it has simple in structure, advantages such as size is little, low cost of manufacture, can realize not having the full cut-off ring control of friction, no gap and high-resolution six-freedom degree fine motion.In fields such as precision optical machinery engineering, Electronic Packaging, fine chemistry industry, fiber alignment, biology and genetic engineering, material science, millimicro planographic, Aero-Space, have broad application prospects.
The technical solution adopted for the present invention to solve the technical problems is: linked by 12 kinematic chain branches between workbench and pedestal, wherein, 6 kinematic chains branch into feedback branch, feedback branch is made up of feedback branch pillar and foil gauge that two ends have flexible hinge, and foil gauge sticks on corresponding two sides of feedback branch pillar; All the other 6 kinematic chains branch into and drive branch, drive branch and are made up of driving branch pillar, parallel-plate resilient movement pair and piezo-ceramic micro displacement unit that two ends have flexible hinge; 12 kinematic chain branches are divided into 3 groups, 4 every group, are made up of 2 feedback branch and 2 driving branches respectively; Micro-manipulating robot provides the pose feedback signal by the voltage that sticks on the foil gauge on the feedback branch pillar, finishes the detection of the sextuple micrometric displacement of micro-manipulating robot end, thereby realizes the full cut-off ring control of jiggle robot six-freedom degree fine motion.The jiggle robot body is the non-assembly of time processing moulding.
Description of drawings
Fig. 1 is the six-freedom micro operation robot structure chart with full pose feedback;
Fig. 2 is the six-freedom micro operation robot structure partial enlarged drawing with full pose feedback.
In Fig. 1, Fig. 2,1. workbench, 2. feedback branch 3. drives branch, 4. pedestal, 5. flexible hinge, 6. feedback branch pillar, 7. foil gauge 8. drives branch's pillar, 9. flexible hinge, 10. parallel-plate resilient movement pair, 11. piezo-ceramic micro displacement units.
The specific embodiment
Fig. 1 is an embodiment disclosed by the invention, this six-freedom micro operation robot with full pose feedback, form by workbench 1, feedback branch 2, driving branch 3, pedestal 4, link by 12 kinematic chain branches between workbench 1 and the pedestal 4, wherein, 6 kinematic chains branch into feedback branch 2, and feedback branch 2 is made up of feedback branch pillar 6 and foil gauge 7 that two ends have flexible hinge 5; All the other 6 kinematic chains branch into and drive branch 3, drive branch 3 and are made up of driving branch pillar 8, parallel-plate resilient movement secondary 10 and piezo-ceramic micro displacement unit 11 that two ends have flexible hinge 9.12 kinematic chain branches are divided into 3 groups, 4 every group, are made up of two feedback branch 2 and two driving branches 3 respectively.Driving branch pillar 8 one ends that drive branch 3 are linked by flexible hinge 9 and workbench 1, and the other end is linked by flexible hinge 9 and parallel-plate resilient movement pair 10; Parallel-plate resilient movement secondary 10 is a frame structure, and corresponding two parallel-plates are parallel to each other; Piezo-ceramic micro displacement unit 11 is installed in the middle part of secondary 10 frame structures of parallel-plate resilient movement, pastes foil gauge 7 on corresponding two sides of feedback branch pillar 6.
This micro-manipulating robot drives by 6 piezo-ceramic micro displacement units 11, can realize the little moving/rotation of the six degree of freedom of micro-manipulating robot workbench; When the sextuple micrometric displacement of micro-manipulating robot workbench (end) makes feedback branch pillar 6 produce microstrain, stick on 6 foil gauges 7 on the feedback branch pillar 6 and can obtain six road voltage signals, this six road signal can be realized the detection of the sextuple micrometric displacement (control result) of micro-manipulating robot end through decoupling zero.Because the micro-manipulating robot end has been brought in the backfeed loop, historical facts or anecdotes has showed the full cut-off ring control of jiggle robot six-freedom degree fine motion.When 3 groups of kinematic chain branches respectively when three orthogonal directions are arranged, this micro-manipulating robot has best displacement decoupling.
This six-freedom micro operation robot with full pose feedback, body is the non-assembly of time processing moulding, be characterized in: simple in structure, size is little, low cost of manufacture etc., can realize that the full cut-off ring that does not have friction, no gap and high-resolution six-freedom degree fine motion controls.In fields such as precision optical machinery engineering, Electronic Packaging, fine chemistry industry, fiber alignment, biology and genetic engineering, material science, millimicro planographic, Aero-Space, have broad application prospects.
Claims (4)
1, a kind of six-freedom micro operation robot with full pose feedback, comprise workbench (1), feedback branch (2), drive branch (3) and pedestal (4), it is characterized in that: link by 12 kinematic chain branches between workbench (1) and the pedestal (4), wherein, 6 kinematic chains branch into feedback branch (2), and feedback branch (2) is made up of feedback branch pillar (6) and foil gauge (7) that two ends have flexible hinge (5); 6 kinematic chains branch into and drive branch (3), drive branch (3) and are made up of driving branch pillar (8), parallel-plate resilient movement pair (10) and piezo-ceramic micro displacement unit (11) that two ends have flexible hinge (9); 12 kinematic chain branches are divided into 3 groups, and every group is 4 kinematic chain branches, and wherein two is that (2) two of feedback branch are driving branch (3).
2, the six-freedom micro operation robot with full pose feedback according to claim 1, it is characterized in that: driving branch pillar (8) one ends that drive branch (3) are linked by flexible hinge (9) and workbench (1), and the other end is linked by flexible hinge (9) and parallel-plate resilient movement pair (10); Parallel-plate resilient movement pair (10) is a frame structure, and corresponding two parallel-plates are parallel to each other; Piezo-ceramic micro displacement unit (11) is installed in the middle part of parallel-plate resilient movement pair (10) frame structure.
3, the six-freedom micro operation robot with full pose feedback according to claim 1 and 2 is characterized in that: paste foil gauge (7) on corresponding two sides of feedback branch pillar (6).
4, the six-freedom micro operation robot with full pose feedback according to claim 3, it is characterized in that: the body with six-freedom micro operation robot of full pose feedback is the non-assembly of time processing moulding.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2006100124495A CN100363157C (en) | 2006-03-17 | 2006-03-17 | Six-freedom micro operation robot with complete position and posture feedback |
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| CNB2006100124495A CN100363157C (en) | 2006-03-17 | 2006-03-17 | Six-freedom micro operation robot with complete position and posture feedback |
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| CN1846948A true CN1846948A (en) | 2006-10-18 |
| CN100363157C CN100363157C (en) | 2008-01-23 |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102054933A (en) * | 2010-10-22 | 2011-05-11 | 宁波大学 | Parallel piezoelectric micromotion platform |
| CN101595373B (en) * | 2006-12-21 | 2011-09-14 | 六边形度量衡股份公司 | Method and device for the compensation of geometrical errors in machining machinery |
| CN103144110A (en) * | 2013-02-26 | 2013-06-12 | 中国科学院自动化研究所 | Cantilever tail end vibration analysis and error compensation method |
| CN103158147A (en) * | 2013-03-28 | 2013-06-19 | 中国科学院自动化研究所 | Vibration compensation system and method of cantilever support fast self opening-and-closing shielding case |
| CN103786151A (en) * | 2014-01-07 | 2014-05-14 | 天津理工大学 | Parallel micromanipulation robot |
| CN104308838A (en) * | 2014-09-26 | 2015-01-28 | 燕山大学 | High/low-frequency composite driving six-degree-of-freedom parallel movement platform |
| CN104458169A (en) * | 2014-09-26 | 2015-03-25 | 燕山大学 | High-and-low-frequency compound drive parallel two-dimensional rotating platform |
| CN104858892A (en) * | 2015-06-11 | 2015-08-26 | 佛山市南海区广工大数控装备协同创新研究院 | Modularized robot based on intelligent mechanical arm |
| CN104985609A (en) * | 2015-06-11 | 2015-10-21 | 佛山市南海区广工大数控装备协同创新研究院 | Intelligent vibration compensation mechanical arm, robot and vibration measurement method of intelligent vibration compensation mechanical arm |
| CN107688220A (en) * | 2017-08-24 | 2018-02-13 | 中国科学院长春光学精密机械与物理研究所 | One kind regulation platform |
| CN113219649A (en) * | 2021-04-30 | 2021-08-06 | 哈尔滨芯明天科技有限公司 | High-reliability piezoelectric deflection mirror for aerospace application |
| CN115570598A (en) * | 2022-12-08 | 2023-01-06 | 浙江大学 | Micro parallel robot and planarization design and manufacturing method |
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Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101595373B (en) * | 2006-12-21 | 2011-09-14 | 六边形度量衡股份公司 | Method and device for the compensation of geometrical errors in machining machinery |
| CN102054933B (en) * | 2010-10-22 | 2013-06-19 | 宁波大学 | Parallel piezoelectric micromotion platform |
| CN102054933A (en) * | 2010-10-22 | 2011-05-11 | 宁波大学 | Parallel piezoelectric micromotion platform |
| CN103144110B (en) * | 2013-02-26 | 2015-02-04 | 中国科学院自动化研究所 | Cantilever tail end vibration analysis and error compensation method |
| CN103144110A (en) * | 2013-02-26 | 2013-06-12 | 中国科学院自动化研究所 | Cantilever tail end vibration analysis and error compensation method |
| CN103158147B (en) * | 2013-03-28 | 2015-06-03 | 中国科学院自动化研究所 | Vibration compensation system and method of cantilever support fast self opening-and-closing shielding case |
| CN103158147A (en) * | 2013-03-28 | 2013-06-19 | 中国科学院自动化研究所 | Vibration compensation system and method of cantilever support fast self opening-and-closing shielding case |
| CN103786151A (en) * | 2014-01-07 | 2014-05-14 | 天津理工大学 | Parallel micromanipulation robot |
| CN103786151B (en) * | 2014-01-07 | 2016-06-29 | 天津理工大学 | A kind of parallel micro-manipulator |
| CN104308838A (en) * | 2014-09-26 | 2015-01-28 | 燕山大学 | High/low-frequency composite driving six-degree-of-freedom parallel movement platform |
| CN104458169A (en) * | 2014-09-26 | 2015-03-25 | 燕山大学 | High-and-low-frequency compound drive parallel two-dimensional rotating platform |
| CN104458169B (en) * | 2014-09-26 | 2017-02-15 | 燕山大学 | High-and-low-frequency compound drive parallel two-dimensional rotating platform |
| CN104308838B (en) * | 2014-09-26 | 2016-01-06 | 燕山大学 | Low-and high-frequency composite flooding six-freedom parallel sports platform |
| CN104858892A (en) * | 2015-06-11 | 2015-08-26 | 佛山市南海区广工大数控装备协同创新研究院 | Modularized robot based on intelligent mechanical arm |
| CN104985609A (en) * | 2015-06-11 | 2015-10-21 | 佛山市南海区广工大数控装备协同创新研究院 | Intelligent vibration compensation mechanical arm, robot and vibration measurement method of intelligent vibration compensation mechanical arm |
| CN107688220A (en) * | 2017-08-24 | 2018-02-13 | 中国科学院长春光学精密机械与物理研究所 | One kind regulation platform |
| CN107688220B (en) * | 2017-08-24 | 2019-08-09 | 中国科学院长春光学精密机械与物理研究所 | A kind of adjusting platform |
| CN113219649A (en) * | 2021-04-30 | 2021-08-06 | 哈尔滨芯明天科技有限公司 | High-reliability piezoelectric deflection mirror for aerospace application |
| CN113219649B (en) * | 2021-04-30 | 2022-11-22 | 哈尔滨芯明天科技有限公司 | High-reliability piezoelectric deflection mirror for aerospace application |
| CN115570598A (en) * | 2022-12-08 | 2023-01-06 | 浙江大学 | Micro parallel robot and planarization design and manufacturing method |
| CN115570598B (en) * | 2022-12-08 | 2023-03-10 | 浙江大学 | Micro parallel robot and planarization design and manufacturing method |
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| CN100363157C (en) | 2008-01-23 |
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