CN1839333A

CN1839333A - Apparatus and method for providing fluid for immersion lithography

Info

Publication number: CN1839333A
Application number: CNA2004800238885A
Authority: CN
Inventors: A·K·T·普恩; L·W·F·霍
Original assignee: Nikon Corp
Current assignee: Nikon Corp
Priority date: 2003-09-03
Filing date: 2004-07-16
Publication date: 2006-09-27
Anticipated expiration: 2024-07-16
Also published as: CN100394244C

Abstract

Systems and methods control the fluid flow and pressure to provide stable conditions for immersion lithography. A fluid is provided in a space between a lens and a substrate during the immersion lithography process. Fluid is supplied to the space and is recovered from the space through a porous member in fluidic communication with the space. Maintaining the pressure in the porous member under the bubble point of the porous member can eliminate noise created by mixing air with the fluid during fluid recovery. The method can include drawing the fluid from the space via a recovery flow line through a porous member, and maintaining a pressure of the fluid in the porous member below a bubble point of the porous member during drawing of the fluid from the space.

Description

The apparatus and method of fluid are provided for immersion lithographic

The application is based on following U.S. Provisional Patent Application, and requires to enjoy the rights and interests of these U.S. Provisional Patent Application, and these U.S. Provisional Patent Application are: the No.60/541329 that the No.60/500312 that on September 3rd, 2003 submitted to and on February 2nd, 2004 submit to.At this full text of quoting these U.S. Provisional Patent Application as a reference.

Technical field

Present invention relates in general to a kind ofly for immersion lithographic (immersion lithography) provides the system and method for fluid, more particularly, is that a kind of fluid flow and pressure controlled is so that provide the system and method for stable condition for immersion lithographic.

Background technology

Exposure device is a kind of precision components, and during semiconductor processes, it is normally used for image is transferred on the semiconductor wafer from a graticule.A kind of typical exposure device comprises: a light source; One graduation pallet assembly is used to keeping a graticule; One optical module; One wafer station assembly is used to keeping semiconductor wafer; One measuring system; One control system.The wafer that is coated with resist is placed on from the mask radiation emitted path of a formation pattern, and by this radiant exposure.When resist was developed, mask pattern was transferred on the wafer.In microscopy, extreme ultraviolet (EUV) radiation is passed on the plate that is coated with resist by a thin sample.When resist is developed, just stay the analysis shape relevant with the composition of sample.

Immersion lithographic is a kind of like this technology, and it can utilize numerical aperture to expose greater than 1 ground, thereby can improve the resolution of projection photoetching, and this resolution is greater than the theoretical maximum of the resolution of traditional " dry type " system.By final optical element and the space between the target (that is, wafer) that is coated with resist are filled, if immersion lithographic just can utilize those otherwise will be exposed by the light that all reflect in inside at light-air interface place.Adopt the equally high numerical aperture of refractive index (index) with immersion fluid (or resist or lens material, minimum that) to be fine.Compare with the dry system with identical numerical aperture, by the refractive index of immersion fluid, the fluid submergence has also increased the depth of focus of wafer, promptly in the tolerable error of the vertical position of wafer.Therefore, immersion lithographic can improve resolution, can change 193nm into from 248nm.Yet, do not resemble the transformation in the exposure wavelength, adopt the submergence mode just to need not to research and develop new light source, optical material or overlay, and allow to adopt and traditional same or analogous resist of photoetching at identical wavelength.In having only final optical element and its bearing and wafer (and may also have brace table) and the contacted immersion system of immersion fluid, in such as the field of polluting control, developed many technology and design, be applied directly to immersion lithographic for traditional instrument.

A difficult problem of immersion lithographic is to design one and is used for carrying between final optical element and wafer and reclaims system such as the fluid of water, so that provide a stable condition for immersion lithographic.

Summary of the invention

Embodiments of the invention are at controlling fluid flow and pressure so that the system and method for stable condition is provided for immersion lithographic.During immersion lithography process, the space between lens and substrate provides a fluid.Fluid is fed into said space, and passes through a multihole device that is communicated with said space fluid from said space reclamation fluid.Pressure in the multihole device is remained on below the bubbling point of multihole device, just can eliminate during fluid recovery and mix the noise that is produced mutually with fluid by air.Bubbling point is a feature of multihole device, and it depends on size and the fluid and the formed contact angle of multihole device (it is based on a parameter of porosint characteristic and fluid behaviour) in the hole (largest hole) in the multihole device.Because bubbling point is a low-down pressure normally, therefore, the control of this low pressure just becomes an important problem.

One aspect of the present invention be at a kind of in immersion lithography system the method from a space reclamation fluid between lens and the substrate.This method comprises: reclaim Flow Line from said space suction fluid by a multihole device via one; During the draw fluid of said space, the pressure in the multihole device is remained on below the bubbling point of multihole device.

In certain embodiments, the step that keep-ups pressure comprises: an overflow vessel that is maintained at a predetermined pressure is provided; Being directed in the overflow vessel via reclaiming the fluid of Flow Line from said space reclamation by multihole device.The step that keep-ups pressure also comprises: fluid is siphoned in the collecting box from overflow vessel.Fluid is siphoned into downwards under action of gravity in the collecting box that is arranged on below the overflow vessel.In other embodiment, the step that keep-ups pressure comprises: a fluid bit buffering spare is provided; Via a buffer stream circuit fluid is drawn onto the fluid level bolster from said space by multihole device; The pressure or the fluid level at senses flow body fluid bit buffering spare place; According to the pressure or the fluid level at the fluid level bolster place that is sensed, to controlling from the fluid of said space absorption via reclaiming Flow Line by multihole device.The step of control fluid stream comprises: control one and be set at the vario valve that is positioned at the multihole device downstream in the recovery Flow Line.In other was implemented, the step that keep-ups pressure comprised: a fluid bit buffering spare is provided; Via a buffer stream circuit fluid is drawn into the fluid level bolster from said space by multihole device; The pressure or the fluid level at senses flow body fluid bit buffering spare place; According to the pressure or the fluid level at the fluid level bolster place that is sensed, control is by the vacuum pressure in the recovery Flow Line exit of multihole device.The step of control vacuum pressure comprises: the vacuum governor in the collecting box in control recovery Flow Line exit.

According to another aspect of the present invention, providing a kind of is used in an immersion lithography system from the device of the space reclamation fluid between lens and the substrate, this device comprises: an inner part, this inner part has a lens openings, so that hold the part of lens, and lens are arranged to open with substrate separation, it is opened by said space interval, so that receive fluid in the space between lens and substrate.One exterior part is set at around the inner part, and this exterior part has a multihole device, and this multihole device reclaims the outlet fluid with a said space and a fluid and is communicated with, so that via multihole device fluid is drawn into the fluid recovery outlet from said space.One control pressurer system is communicated with the multihole device fluid, so that during aspirating fluid via multihole device from said space, the pressure of the surface of multihole device is remained on below the bubbling point of multihole device.

In certain embodiments, control pressurer system comprises: an overflow vessel, and this overflow vessel is communicated with the multihole device fluid; One vacuum governor is used for regulating the pressure of overflow vessel.One collecting box is communicated with the overflow vessel fluid, and is positioned at the below of this overflow vessel.In further embodiments, control pressurer system comprises: a fluid bit buffering spare, and this fluid level bolster is communicated with the multihole device fluid; One sensor is used for the pressure or the fluid level at senses flow body fluid bit buffering spare place; One controller, be used for the sensor signal that senses according to sensor, adjusting is by the flow of fluid recovery outlet from the fluid of said space suction, during aspirating fluid from said space, so that the pressure of the surface of multihole device is remained on below the bubbling point of multihole device through multihole device.Control pressurer system comprises a valve, and this valve is set at the downstream of fluid recovery outlet, and controller is used to control this valve, so that regulate by the flow of fluid recovery outlet from the fluid of said space suction.In other embodiment, control pressurer system comprises: a collecting box, and this collecting box is communicated with fluid recovery outlet fluid; One controlled vacuum governor is used for regulating the pressure of collecting box.Controller is used to control controlled vacuum governor, so that regulate the flow that is drawn into the fluid of collecting box by the fluid recovery outlet from said space by the pressure of controlling in the collecting box.

In some certain embodiments, the spaced apart midfeather of inner part and exterior part.Inner part comprises an internal chamber, this internal chamber forms the part at the interval between lens and the substrate, and, inner part has some holes, these holes are set at the top of internal chamber, so that realize being incorporated in the internal chamber to fluid and at least a function during chamber aspirates out internally fluid.Inner part has some holes, and these holes are set at the opposite side of lens openings, so that fluid is incorporated into internal chamber.Inner part comprises a pair of dashpot, and this is set at the opposite side of lens openings along the direction of scanning of immersion lithography system to dashpot.Inner part has some clean-out openings, and, said this to each dashpot in the dashpot and at least one purge holes.Multihole device selects free net, porosint, has the group that element constituted of etch-hole in it.

According to another aspect of the present invention, provide a kind of device, this device comprises: an optical projection system, this optical projection system have a final optical element, and this optical projection system is used for an image projection to a workpiece; One, when image was projected onto on the workpiece, this was used to supporting near the workpiece of optical projection system.Be provided with one at interval between final optical element and workpiece, this is used to filling one immersion fluid at interval.One porosint is configured to contiguous said interval, is used to reclaim the fluid that flows out from said interval.One control system is used to keep the pressure on the porosint.This pressure is equal to or less than the bubbling point of porosint.

Description of drawings

Fig. 1 is the simplification floor map according to the immersion lithographic of the embodiment of the invention;

Fig. 2 is the stereographic map that is used for a nozzle of FLUID TRANSPORTATION and recovery according to an embodiment of the invention in immersion lithographic;

Fig. 3 is the simplification sectional view of the nozzle among Fig. 2;

Fig. 4 is the sectional view of the inner part of the nozzle among Fig. 2;

Fig. 5 is the simplification sectional view according to the nozzle of another embodiment;

Fig. 6 is the rough schematic view that is used for the control pressurer system of fluid recovery according to one embodiment of the invention in immersion lithography system;

Fig. 7 is the rough schematic view that is used for the control pressurer system of fluid recovery according to a further embodiment of the invention in immersion lithography system;

Fig. 8 is the rough schematic view that is used for the control pressurer system of fluid recovery according to a further embodiment of the invention in immersion lithography system;

Fig. 9 is the rough schematic view that is used for the control pressurer system of fluid recovery according to a further embodiment of the invention in having the immersion lithography system that prevents the water stagnation function.

Embodiment

Fig. 1 has expressed an immersion lithography system 10, and it comprises: a graduation pallet 12 has a graticule in this graduation pallet upper support; One projection lens 14; One wafer 16, this wafer are supported on the wafer station 18.Around the final optical element 22 of projection lens 14, be provided with an immersion system 20, so that between final optical element 22 and wafer 16, provide and reclaim fluid, said fluid can be the fluid such as water or gas, and said immersion system 20 also is known as shower nozzle or nozzle sometimes.In the immersion lithography system 10 of present embodiment, during scan exposure, graticule and wafer 16 are moved in synchronization on direction of scanning separately.

Fig. 2 and Fig. 3 have expressed device or the nozzle 20 that is used for carrying and reclaiming fluid in immersion lithographic between final optical element 22 and wafer 16.Fig. 2 has expressed the stereogram of bottom view of nozzle 20, and this nozzle 20 comprises an exterior part 30 and an inner part 32.Inner part 32 forms an internal chamber 34, so that receive fluid between final element 22 and wafer 16.Inner part 32 has some holes 38, so that fluid flows into and outflow internal chamber 34.As shown in Figure 2, all be provided with some holes 38 in the both sides of final optical element 22.Inner part 32 has a par 33 around internal chamber 34.This par 33 is arranged essentially parallel to wafer 16.Distance D 1 between the end face of final optical element 22 and wafer 16 is greater than the distance D 2 between par 33 and the wafer 16.Distance D 1 can be 1.0-5.0mm, and distance D 2 can be 0.5-2.0mm.In another embodiment, distance D 1 is substantially equal to distance D 2.Inner part 32 also comprises a pair of bolster or the dashpot 40 that has clean-out opening 42.Bolster 40 be set at 33 places, par or near.Bolster 40 is positioned at the opposite side of final optical element 22.Fig. 4 expressed inner part 32 along the direction of scanning 44 sectional view.

Spaced apart exterior part 30 and inner part 32 by midfeather or groove 48, said midfeather or groove 48 can be known as atmospheric groove.Exterior part 30 comprises one or more fluid recovery hole 50, and these fluid recovery holes 50 are set at the opposite side of final optical element 22.A multihole device 51 is set in a groove or the exterior chamber 53, and this groove or exterior chamber 53 are extended around inner part 32 and be communicated with these convection cell recovery holes 50 fluids.Multihole device 51 can be a net, also can be made by the porosint with hole, and the size in hole is usually in the scope of 50-200 micron.For example, multihole device 51 can be a silk screen, and this silk screen comprises by metal, plastics or similar braiding bar or the stratified material of making, porous metals, fritted glass, sponge plastics, porous ceramics, or have sheet material with the hole of chemical mode etching (for example by photoetching).Exterior part 30 comprises that also fluid buffering outlet 56 and one fluid reclaims outlet 58.As shown in Figure 5, in another embodiment of nozzle 20 ', inner part 32 does not contact with final optical element 22, does not form a sealing with final optical element 22 yet, but spaced apart with final optical element 22.Yet this interval can allow fluid to be exposed to air.

One of nozzle 20 is characterised in that it is made into two-piece type, i.e. exterior part 30 and inner part 32.Inner part 32 remains on fluid between lens and the wafer surface, and exterior part 30 is mainly used in fluid recovery.During fluid recovery, vibration can be passed to other parts of etching system by multihole device 51 from exterior part 30, comprises inner part 32, and this inner part 32 can be used to an automatic focus light beam is directed to wafer 16.Parts 30 and be equipped with on it between fabricated section of exterior part 30 damping material can be installed outside are so that reduce the vibration of transmitting from exterior part 30.In addition, the exterior part 30 with multihole device is easy to contaminated, therefore need change maintenance to it.Exterior part 30 is made a separate part, help making maintenance easier.Whole nozzle 20 is opposite with changing, and this can also reduce to change readjusting and the recalibration time after the exterior part.If nozzle 20 is manufactured into two separate parts, can also improve the manufacturability of nozzle 20 so.Should be known in that in some optional embodiment nozzle 20 can be made by one single.

Another of nozzle 20 is characterised in that the atmospheric groove 48 between inner part 32 and the exterior part 30.This atmospheric groove 48 is cut off the edge as one, if fluid recovery rate faster than the fluid delivery rate, so, this partition edge just stops fluid in the inner part 30 by 51 sucking-offs of the multihole device on the exterior part 30.Under the situation of not cutting off the edge, must keep the balance between fluid recovery rate and the fluid delivery rate so that scan period fluid can be kept in inner part 32.Be provided with this atmospheric groove 48, just can be arranged on maximal value to recovery rate, so as sweep time the chien shih fluid spill exterior part 30 and minimize.Atmospheric groove 48 so that in scan period fluid inflow and outflow, thereby makes the requirement that water is supplied with and reclaimed reduce to minimum also as a bolster.

In the process of immersion lithographic, from a drying regime, a fluid is filled between projection lens 14 and the wafer 16, At All Other Times, convection cell reclaims.For example, when a new wafer begins to expose, before beginning to expose, fluid is full of fully the internal chamber 34 of inner part 32.During this process, be for example not have bubble to exist between the automatic focus light beam ideally at projection lens 14 and wafer 16 or other optical path.Fluid in the internal chamber of inner part 32 is supplied with the peak (by hole 38) that is set in this chamber, thereby fluid is filled from the top down, so just can evict out of internal chamber to bubble during filling process.(this group hole 38 is positioned at a side) in this embodiment, fluid is supplied with since a side ideally, thus fluid is filled into opposite side from a side, so just can evict bubble from again, so that avoid being mingled with some air.Also can adopt other structural arrangement, as long as fluid is outwards filled from the inboard.

Sometimes, the internal chamber of part 32 reclaims fluid fully internally.In Fig. 1, in each bolster 40 of internal chamber, has aperture 42.When fluid must be reclaimed fully, these holes 42 were used for carrying out apace fluid recovery or fluid and clean.Utilize high vacuum, move in conjunction with in the wafer station 18 a little, from these hole 42 sucking-offs, this just makes can reclaim whole fluids in a reasonable time fluid.

Inner part 32 has two groups or two rounds 38, is used for supplying with or reclaiming fluid.Every round can both be independently controlled and make it supply with or reclaim fluid.All be selected under the situation of supplying with fluid at two rounds, all fluids all are recovered by the multihole device in the exterior part 30 51.Because two rounds all are used to supply with fluid, therefore, the pressure in internal chamber can increase, thereby causes the final optical element 22 of projection lens 14 or wafer 16 or both to produce distortion.In addition, the fluid that traverses final optical element 22 also can be limited, thereby finally makes the temperature between final optical element 22 and the wafer 16 raise, and causes bad influence.On the other hand, if a round is selected for the supply fluid, and another round is selected for the recovery fluid, and so, fluid stream just will traverse final optical element 22 and be driven, and so just the amount of elevating the temperature reduces to minimum.In addition, compare with the pressure that is produced when two rounds are supplied with fluid, this mode can also reduce pressure.In this case, reduce the fluid that need reclaim by multihole device 51, thereby weakened the recovery requirement of multihole device.In other nozzle arrangements, can adopt multiple fluid to supply with and reclaim, so that make performance optimization.

During the scanning of wafer station 18 is moved (direction of scanning 44 in Fig. 2), fluid can be pulled and be hauled out into the internal chamber of inner part 32.When fluid was hauled out, fluid just was recovered by the multihole device in the exterior part 30 51.When wafer station 18 was mobile in the opposite direction, air can pulled in the internal chamber of inner part 32.In the meantime, the fluid in the bolster 40 and internally the fluid supplied with of chamber help to recharge trailing fluid along the direction of scanning, thereby stop air to enter in the internal chamber.Bolster 40 and multihole device 51 1 work, so that during the scanning of wafer station 18 is moved, make the fluid that leaks out from exterior part 30 and the air pulled in the inner part 32 minimize.

Under situation about the pressure in the multihole device 51 being remained on below the bubbling point, reclaim fluids, just can eliminate during fluid recovery the noise that mixing produced by air and fluid by multihole device 51.Bubbling point is a feature of multihole device 51, and it depends on size and the fluid and the multihole device 51 formed contact angles (it is based on a parameter of porosint characteristic and fluid behaviour) in the hole (largest hole) in the multihole device 51.Because bubbling point is a low-down pressure (for example, about 1000 Pascals) normally, therefore, the control of this low pressure just becomes an important problem.Fig. 6-7 has expressed and during the fluid recovery pressure has been remained on three kinds of concrete modes below the bubbling point.

In the control pressurer system 100 of Fig. 6, utilize a vacuum governor 102, and, keep the pressure below bubbling point in the surface of multihole device 51 by means of an overflow vessel or a case 104 that is communicated with multihole device 51 fluids by a recovery Flow Line 106 (this reclaims Flow Line and links to each other with fluid cushion outlet 57).The pressure of the surface of multihole device 51 equals to deduct the pressure that fluid level produced by multihole device 51 tops by the pressure that vacuum governor 102 keeps.Utilize spill box 104 to come the constant altitude of the fluid of multihole device 51 tops, just can easily control the pressure of the surface of multihole device 51.Those will overflow by the fluid that multihole device 51 is recovered, and in siphon circuit 108 is drawn onto a collecting box 110 that is set at below the spill box 104 downwards.Article one, optional circulation path 112 is connected between spill box 104 and the collecting box 110, so that help the pressure between balance spill box 104 and the collecting box 110, flows along siphon circuit 108 thereby help fluid.One of this control pressurer system 100 is characterised in that it is a passive system (passive system), need not control.

In control pressurer system shown in Figure 7 120, utilize a vacuum governor 122 that the pressure of the surface of multihole device 51 is remained on below the bubbling point at water level bolster 124 places, water level bolster 124 wherein is communicated with multihole device 51 fluids by a buffer stream circuit 126 (this buffer stream circuit links to each other with fluid cushion outlet 56).Utilize a pressure converter or a level sensor 128 to measure the pressure or the fluid level (fluidlevel) at fluid level bolster 124 places.Then sensor signal is used for FEEDBACK CONTROL 130, sensor signal is fed back to a valve 132, this valve 132 is set at and reclaims in the Flow Line 134 (linking to each other with fluid recovery outlet 58) one, and this recovery Flow Line 134 is connected between a multihole device 51 and the collecting box 136.Valve 132 can adopt any suitable valve, for example proportioning valve or vario valve.Vario valve 132 can be conditioned, so that control flows to the fluid stream of collecting box 136 by fluid recovery line 134, thereby the pressure of fluid level bolster 124 or fluid level is remained on a predetermined value.Collecting box 136 is under the higher relatively vacuum that is subjected to a high vacuum regulator 138 control, so that carry out fluid recovery.In this fluid control systems 120, need not spill box, and collecting box 136 can be set in this system Anywhere, need not to be set at below the spill box.Be ideally, a close/open valve 140 is set in fluid recovery line 134, when not needing fluid recovery, just this close/open valve 140 is closed.

In Fig. 8, control pressurer system 160 is similar to system shown in Figure 7 120, and identical Reference numeral is represented identical parts.This system 160 does not adopt valve 132 to come the convection cell recovery to carry out FEEDBACK CONTROL, carries out FEEDBACK CONTROL but adopt a controllable vacuum regulator 162 to come convection cell to reclaim.Vacuum governor 162 is typically electronic controlled, so that according to the vacuum pressure of regulating from the sensor signal of pressure converter or level sensor 128 in the collecting box 136.Vacuum governor 162 can be conditioned, so that control flows to the fluid stream of collecting box 136 by fluid recovery line 134, thereby the fluid level of pressure or fluid level bolster 124 is remained on a predetermined value.When not needing to reclaim fluid, just close the close/open valve 140 in the fluid recovery line 134.

Fig. 9 has expressed according to the present invention a kind of control pressurer system that is used to reclaim fluid in immersion lithography system of an other embodiment, and this control pressurer system can prevent that sealing stagnates.This control pressurer system 180 is similar with the system 120 among Fig. 7, and identical parts adopt identical Reference numeral to represent.In addition, water level bolster 124 supplies with water or water recoverer 182 fluids are communicated with, so that to water level bolster 124 supply water or from water level bolster 124 recycle-waters, thereby prevents water stagnation.Can utilize the guiding between water level bolster 124 and water supply or recover 182 of an optional pump or a similar moving-member to flow.Water or fluid stagnation overlong time, just may be in water breed bacteria/mould.Under normal operation, the water at water level bolster 124 places is stagnated, because the water that reclaims from net 51 will flow to collecting box 136 through the tubule that is positioned at the net height degree.During normal running,, just can prevent the problem of breed bacteria/mould by fluid is introduced or drawing-off water bit buffering spare 124.

Should be known in that top description is just indicative, is not restrictive.For a person skilled in the art, in case the description above reading, many embodiment will be obviously.Therefore, scope of the present invention is not to determine with reference to foregoing description, but determine with reference to appended claim and its equivalency range.

In addition, the present invention can also be used to two desk-top etching systems.For example, in U.S. Pat 6262796 and US6341007, disclose two desk-top etching systems, as a reference at this full text of quoting these patent documents.

Claims

One kind in immersion lithography system from the method for the space reclamation fluid between lens and the substrate, this method comprises:

Reclaim Flow Line from said space suction fluid by a multihole device via one;

During said space suction fluid, the hydrodynamic pressure in the multihole device is remained on below the bubbling point of multihole device.
2. method according to claim 1, wherein, the said step that keep-ups pressure comprises:

An overflow vessel that is maintained at a predetermined pressure is provided;

Being directed in the overflow vessel via reclaiming the fluid of Flow Line from the suction of said space by multihole device.
3. method according to claim 2, wherein, the said step that keep-ups pressure also comprises fluid is siphoned in the collecting box from overflow vessel.
4. method according to claim 3, wherein, fluid is siphoned into downwards under action of gravity in the collecting box that is arranged on below the overflow vessel.
5. method according to claim 1, wherein, the said step that keep-ups pressure comprises:

One fluid bit buffering spare is provided;

Via a buffer stream circuit fluid is drawn into the fluid level bolster from said space by multihole device;

The pressure or the fluid level at senses flow body fluid bit buffering spare place;

According to the pressure or the fluid level at the fluid level bolster place that is sensed, to controlling from the fluid stream of said space suction via reclaiming Flow Line by multihole device.
6. method according to claim 5, wherein, the step of control fluid stream comprises that one of control is set at the vario valve that is positioned at the multihole device downstream in the recovery Flow Line.
7. method according to claim 1, wherein, the step that keep-ups pressure comprises:

One fluid bit buffering spare is provided;

Via a buffer stream circuit fluid is drawn into the fluid level bolster from said space by multihole device;

The pressure or the fluid level at senses flow body fluid bit buffering spare place;

According to the pressure or the fluid level at the fluid level bolster place that is sensed, control is by the vacuum pressure in the recovery Flow Line exit of multihole device.
8. method according to claim 7, wherein, the step of control vacuum pressure comprises a vacuum governor of controlling in the collecting box that reclaims the Flow Line exit.
9. one kind is used in immersion lithography system from the device of the space reclamation fluid between lens and the substrate, and this device comprises:

Inner part, this inner part has a lens openings, is used to hold the part of lens, and lens position is become by being opened with substrate separation by described separated by spaces, so that receive fluid in the said space between lens and substrate;

Exterior part, this exterior part is set at around the inner part, this exterior part has multihole device, and this multihole device reclaims the outlet fluid with a said space and a fluid and is communicated with, so that via said multihole device fluid is drawn into said fluid recovery outlet from said space; And

Control pressurer system, this control pressurer system is communicated with said multihole device fluid, so that during aspirating fluid via multihole device from said space, the pressure of the surface of said multihole device is remained on below the bubbling point of multihole device.
10. device according to claim 9, wherein, control pressurer system comprises:

Overflow vessel, this overflow vessel is communicated with said multihole device fluid;

Vacuum governor is used for regulating the pressure of overflow vessel.
11. device according to claim 10 also comprises collecting box, this collecting box is communicated with the overflow vessel fluid, and is positioned at the below of this overflow vessel.
12. device according to claim 9, wherein, control pressurer system comprises:

The fluid level bolster, this fluid level bolster is communicated with the multihole device fluid;

Sensor is used for the pressure or the fluid level at senses flow body fluid bit buffering spare place;

Controller, be used for according to sensor signal from sensor, adjusting is by the flow of fluid recovery outlet from the fluid of said space suction, thereby during aspirating fluid from said space, the pressure of the surface of said multihole device is remained on below the bubbling point of multihole device via multihole device.
13. device according to claim 12, control pressurer system comprises a valve, this valve is set at the downstream of fluid recovery outlet, and said controller is used to control this valve, so that regulate by the flow of fluid recovery outlet from the fluid of said space suction.
14. device according to claim 12, wherein, control pressurer system comprises:

Collecting box, this collecting box is communicated with fluid recovery outlet fluid;

Controlled vacuum governor is used for regulating the pressure of collecting box;

Wherein, said controller is used to control controlled vacuum governor, so that regulate the flow that is drawn into the fluid of collecting box by the fluid recovery outlet from said space by the pressure of controlling in the collecting box.
15. device according to claim 9, wherein, the spaced apart midfeather of inner part and exterior part.
16. device according to claim 9, wherein, inner part comprises an internal chamber, this internal chamber forms the part at the interval between lens and the substrate, and, inner part has some holes, and these holes are set at the top of internal chamber, so as to realize fluid is incorporated in the internal chamber and/or fluid internally chamber aspirate out.
17. device according to claim 16, inner part have some holes, these holes are set at the opposite side of lens openings, so that fluid is incorporated into internal chamber.
18. device according to claim 9, inner part comprise a pair of dashpot, this is set at the opposite side of lens openings to dashpot.
19. device according to claim 18, wherein, inner part has some clean-out openings, and said this to each dashpot in the dashpot and at least one said purge holes.
20. device according to claim 9, wherein, multihole device selects free net, porosint, has the group that element constituted of etch-hole in it.
21. a device comprises:

Optical projection system, this optical projection system have a final optical element, and this optical projection system is used for an image projection to a workpiece;

Platform, when image was projected onto on the workpiece, this was used to supporting the said workpiece of adjacent optical projection system;

At interval, this is located at interval between final optical element and the workpiece, and this is used to filling one immersion fluid at interval;

Porosint, this porosint are oriented to contiguous said interval, and this porosint is used to reclaim the fluid that flows out from said interval;

Control system is used to keep the pressure on the porosint, and this pressure is equal to or less than the bubbling point of porosint.
22. device according to claim 21, wherein, control system comprises:

Overflow vessel, this overflow vessel is communicated with the porosint fluid;

Vacuum governor is used for regulating the pressure of overflow vessel.
23. device according to claim 22 wherein, also comprises: a collecting box, this collecting box is communicated with the overflow vessel fluid, and is positioned at the below of overflow vessel.
24. device according to claim 21, wherein, control system comprises:

The fluid level bolster, this fluid level bolster is communicated with the porosint fluid;

Sensor is used for the pressure or the fluid level at senses flow body fluid bit buffering spare place;

Controller, be used for according to sensor signal from sensor, regulate by a fluid and reclaim the flow of outlet from the fluid of said interval suction, so that during aspirating fluid from said space, the pressure of the surface of porosint is remained on below the bubbling point of porosint by porosint.
25. device according to claim 24, wherein, control system comprises a valve, and this valve is set at the downstream of fluid recovery outlet, and said controller is used to control this valve, so that regulate by the flow of fluid recovery outlet from the fluid of said space suction.
26. device according to claim 24, wherein, control system comprises:

Collecting box, this collecting box is communicated with fluid recovery outlet fluid;

Controlled vacuum governor is used for regulating the pressure of collecting box;

Wherein, said controller is used to control controlled vacuum governor, so that regulate the flow that is sucked into the fluid of collecting box by the fluid recovery outlet from said space by the pressure of controlling in the collecting box.
27. a device comprises:

Optical projection system, this optical projection system have a final optical element, and this optical projection system is used for an image projection to a workpiece;

Platform, when image was projected onto on the workpiece, this was used to supporting the said workpiece of adjacent optical projection system;

Nozzle, the interval that is used between final optical element and workpiece provides an immersion fluid;

Wherein, said nozzle has: an internal chamber is used for immersion fluid is remained on said interval; One exterior chamber is used to reclaim the immersion fluid that those flow out internal chamber.
28. device according to claim 27, wherein, nozzle also comprises a groove, and this groove is between internal chamber and exterior chamber.
29. device according to claim 27, wherein, nozzle also comprises a multihole device, and this multihole device is set in the exterior chamber.
30. device according to claim 29, wherein, multihole device selects free net, porosint, have the group that the element of etch-hole is formed in it.
31. device according to claim 27, wherein, internal chamber forms the part at the said interval between final optical element and the workpiece, and nozzle has some holes, these holes are set at internal chamber top, so that realize fluid are incorporated at least a function in internal chamber or the fluid of chamber suction internally.
32. device according to claim 31, wherein, said these holes are set at the opposite side of final optical element.
33. device according to claim 27, wherein, nozzle also comprises a pair of dashpot, and this is set at the opposite side of said final optical element along said the moving direction with respect to the optical projection system to dashpot.
34. device according to claim 33, wherein, nozzle also comprises some clean-out openings, and said this to every in dashpot dashpot all with at least one said purge holes.
35. device according to claim 12 also comprises the fluid feeder or the fluid recover that are communicated with fluid level bolster fluid.
36. device according to claim 24 also comprises the fluid feeder or the fluid recover that are communicated with fluid level bolster fluid.