CN1837963A - Method and apparatus for once forming of round grating by optical linear element - Google Patents
Method and apparatus for once forming of round grating by optical linear element Download PDFInfo
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- CN1837963A CN1837963A CNA2006100135502A CN200610013550A CN1837963A CN 1837963 A CN1837963 A CN 1837963A CN A2006100135502 A CNA2006100135502 A CN A2006100135502A CN 200610013550 A CN200610013550 A CN 200610013550A CN 1837963 A CN1837963 A CN 1837963A
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Abstract
This invention relates to a method and apparatus for once forming of round grating by optical linear element. To overcome the defects in prior art of nonideal quality, bad linearity, high cost, complex process and long period, This scheme comprises: preparing linear element with transparent optical material, irradiating the carrier coated with light sensitive material with laser crossed the element to one-time form whole-circle grating; then, materializing and drying to obtain the target. Besides, the device also comprises an exposure-time controller, a beam expander, a collimating mirror, and a carrier frame all arranged on a base by turns. This invention simplifies the process, improves efficiency and reliability, and reduces cost greatly.
Description
Technical field
The present invention relates to a kind of method and device of making round grating, particularly a kind of method and device of once-forming grid stroke manufacturing circle grating.
Technical background
Well-known CD consumption is huge, and the device of making grating usually is long, circular dividing machines mostly.Operation with the photoetching process for example manufacturing circle grating is roughly as follows:
Machinery graduating with cutter list is sewn on the glass flake that scribbles light tight color layers, depicts a printing opacity list seam with " cutter ", and single width that stitches depends on round grating grid line width and singly makes factor such as fabrication technique, is generally 5-10um.Optical lithography is fan-shaped, single seam is installed on the canoe of circular dividing machines support (also being the cutter bridge), adjust centre distance (promptly round grating grid line radius) and off-centre between single seam and circular dividing machines, the glass substrate that scribbles photosensitive material is placed on (under printing opacity list seam) on the circular dividing machines worktable pallet, place a light source exposure device at (directly over printing opacity list seam) above the support, behind slewing circle dividing machine and the startup light source exposure device, just the picture of single seam can be projected on the sensitization substrate, it is fan-shaped to form one group of groove, 360 ° of ratios with the segment angle size are integer m, multiplication method photoetching garden grating, change single seam into fanning strip, adjust distance and off-centre, the round grating blank that scribbles photosensitive material is placed on the circular dividing machines pallet, start light source exposure device and slewing circle dividing machine, the picture of one group of fan-shaped grid line is projected on the round grating blank, 360 ° of circular dividing machines rotations behind m the number of expose, just obtain one and put in order the grid stroke that encloses justifying on the grating blank; Be a complete round grating after developing, removing photoresist, dry.The round grating that this classic method is made, the grid line quality is undesirable, and promptly the grid line edge is scared, steepness is little, rectilinearity is poor, can not once-forming.These will directly influence the quality of grating; And manufacturing process is many, complicated, the cycle is long.
What also have replaces circular dividing machines with laser direct-writing device, promptly with laser direct-writing device to scribbling the grating blank scan exposure of photosensitive material, though this process is finished by computer controlled automatic, but, still can not once-forming, need just can finish when adjustment forms closed loop, and the grid line quality is still not really desirable by displacement transducer, drive unit, light scanning are first-class repeatedly, device therefor is more, and manufacturing cost is higher.
Summary of the invention
One of purpose of the present invention is to overcome the deficiencies in the prior art, provides a kind of cost method lower, easy and simple to handle, that fast justify grating with the manufacturing of linear optical element once-forming.
Two of purpose of the present invention is to overcome the deficiencies in the prior art, but provide a kind of simple for production, degree of accuracy is high, the device of lower-cost once-forming manufacturing circle grating.
For reaching one of the object of the invention, the invention provides a kind of method with optics linear element once-forming manufacturing circle grating, concrete technical scheme is: utilize transparent optical material to make linear element, scribble the carrier of photosensitive material by this linear optical element irradiation by laser, one-time form whole-circle obtains the round grating of once-forming through materialization, dried.
In the method with optics linear element once-forming manufacturing circle grating of the present invention,, and scribbling the step that obtains the circle grating on the carrier of photosensitive material be with laser direct irradiation optics linear element:
(1) makes the optics linear element with transparent optical material;
(2) adjust light path:
A. open laser instrument;
B. add beam expanding lens and expand bundle;
C adds collimating mirror again, and the front and back position of adjusting collimating mirror makes it to produce directional light;
D. place the optics linear element on the directional light axis, all light that make output are the center by this optics linear element all;
E. form the position of interference pattern at the back focal plane of optics linear element, place the record carrier that scribbles photographic recording material;
F. the time shutter controller is placed in the back between laser instrument and beam expanding lens, opens the time shutter controller, but on record carrier just one-time form whole-circle;
(3) solidify record carrier: materialization, dried can obtain the round grating by the design grid line.
Method with optics linear element once-forming manufacturing circle grating of the present invention, the material that it is characterized in that making linear element is the transparent optical plastics, as organic glass, optical materials such as resin.
Method with optics linear element once-forming manufacturing circle grating of the present invention is characterized in that record carrier can be: glass, metal, plastics, machine glass, resin, timber and derivant etc.
For reaching two of the object of the invention, the invention provides a kind of device of once-forming manufacturing circle grating, the concrete technical scheme that adopts: it is to be made of laser instrument, time shutter controller, beam expanding lens, collimating mirror, the optics linear element, the carrier rack that utilize transparent optical material to make, and is installed on the base successively; Laser by laser instrument sends expands bundle through time shutter controller control, beam expanding lens, and the front and back position of adjusting collimating mirror makes it to produce directional light; The optics linear element is installed on the directional light axis, and all light that make output form the position installation carrier rack of interference pattern all by the center of optics linear element at the back focal plane of optics linear element.
For making this device that better generality be arranged, satisfy the needs that different size grating light path is adjusted, all devices of the utility model all are to be installed on the base by adjustable articulator
The device of once-forming manufacturing circle grating of the present invention, the material that it is characterized in that the optics linear element is the transparent optical plastics, as organic glass, optical materials such as resin.
The present invention compared with prior art has following advantage: adopt the method and the device of once-forming grid stroke manufacturing circle grating of the present invention, and can one-time form whole-circle.It is with laser direct irradiation optics linear element, optics linear element back focal plane form interference pattern the position, placement scribbles the record carrier of photosensitive material, laser is penetrated on record carrier, just can obtain the round grid stroke of whole circle, be one-time form whole-circle, the process of every round grating manufacturing only needs 2-4 minute.Compare with " mechanical graduating with cutter list seam, optical lithography is fan-shaped and multiplication method photoetching circle grating " in the prior art and " with laser direct-writing device to scribbling the grating blank scan exposure of photosensitive material; by computer controlled automatic manufacturing circle grid stroke ", device of the present invention is made simple, portable; Use device of the present invention and quick with method manufacturing circle grating of the present invention, its light path is easy to adjust, after light path mixes up, can use for a long time a kind of grating of specification, be convenient to produce in batches, simplified the operation of making the circle grating greatly, the time shortens dramatically, the time and labour saving, work efficiency and reliability have been improved, greatly reduce manufacturing cost, and grid line is neat, rectilinearity is good, the degree of accuracy height.
Description of drawings
Fig. 1 is the linear element structural representation.Fig. 2 is the light path synoptic diagram of laser direct irradiation linear element manufacturing circle grating, wherein: laser instrument 1, time shutter controller 2, beam expanding lens 3, collimating mirror 4, optics linear element 5, record carrier 6x; Fig. 3 is the device one-piece construction synoptic diagram of once-forming manufacturing circle grating, wherein: laser instrument 1, time shutter controller 2, beam expanding lens 3, collimating mirror 4, optics linear element 5, carrier rack 6, base 7; Fig. 4 is the grid line quality figure with laser direct irradiation linear element manufacturing circle grating.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further detail.
Embodiment 1
As shown in Figure 1, be the used key element of method manufacturing circle grating of the present invention---the linear component structure synoptic diagram of optics, its manufacture method is: the diameter that becomes with the roughing of 45mm*45mm*25mm K9 glass is 40mm, and height is a 22mm isosceles taper blank; Then with emery roughly grind to diameter be 40mm, height is a 22mm isosceles taper base, again with abrasive pastes polishings, is the transparent isosceles cone of 22mm until to make diameter be that 40mm is high.Make optics linear element transparent optical plastics, as organic glass, optical materials such as resin.Can also adopt prefabricated mould casting back polishing to make.It is high that the machining precision of linear element is wanted, if the conical surface is not straight, the interference circle of formation is not round, will influence the rectilinearity of grating, and therefore, the conical surface must be straight.This linear element striped is 0.8 μ m.According to the needs of striped, can adjust the diameter of cone and highly be processed into different linear elements, be used to make the round grating of different stripeds.
Fig. 2 is the light path synoptic diagram of laser direct irradiation linear element manufacturing circle grating, laser instrument [1] adopts the laser instrument of output 632.8nm single mode, time shutter controller [2] adopts the DSQ-II exposure timer, expand bundle through beam expanding lens [3], beam expanding lens [3] is selected 8X for use, and collimating mirror [4] is selected φ 45mm f=140mm for use, and collimating mirror [4] becomes directional light with the light beam adjustment, place optics linear element [5] on the directional light axis, record carrier 6x is placed in the back focal plane position of optics linear element [5].
Adjust light path: according to adjustment light path shown in Figure 2, at first open laser instrument [1], add beam expanding lens [3] and expand bundle, add collimating mirror [4] again, the front and back position of adjusting collimating mirror makes it to produce directional light; On the directional light axis, place optics linear element [5], all light that make output are the center by optics linear element [5] all, form the position of interference pattern at the back focal plane of linear element [5], placement scribbles the record carrier 6x of photosensitive material, place time shutter controller [2] at last between laser instrument [1] and beam expanding lens [3], light path adjustment so far finishes.This light path is easy to adjust, after light path mixes up, can use for a long time a kind of grating of specification, is convenient to produce in batches.
Manufacturing garden grating: open laser instrument [1], time shutter controller [2], the light beam that sends by laser instrument, the light beam that sends by laser instrument, by time shutter controller [2] the control time shutter, just can obtain the round grid stroke of whole circle on the record carrier 6x, be one-time form whole-circle, convenient and swift.Expose a time shutter come by the photosensitive material on the record carrier 6x fixed.Photosensitive material can be: silver salt latex, gelatin, photoresist, photochromics, thermoplastic etc.Photosensitive material after the exposure is handled through materializations such as development, photographic fixing, bleachings, washing, air dry or the air-dry manufacturing that just can finish by the whole grid line figures of round grating of design.Record carrier can be: glass, metal, plastics, machine glass, resin, timber and derivant or the like according to actual needs, as long as change record carrier, just can be produced in batches on request.
Laser direct irradiation optics linear element manufacturing circle grating, the manufacture process of every block of round grating only 2-4 minute.For amplifying the image of 630 times (630X) circle gratings, the image of b. circle grating when amplifying 900 times (900X) can find out obviously that the round grating grid line quality that the present invention makes is good as a. among Fig. 4, neatly, rectilinearity is good, the degree of accuracy height.
As shown in Figure 3, be the device one-piece construction synoptic diagram of once-forming manufacturing circle grating of the present invention, its base [7] adopts thick steel plate or the iron plate of 5mm, and size 1000mm * 400mm is used for installing each components and parts of light path.It is the single-mode He-Ne laser of 632.8nm that laser instrument [1] adopts wavelength, is installed in base [7] foremost, in the position of distance lasers [1] outlet 100mm time shutter controller [2] is installed, and time shutter controller [2] adopts the DSQ-II exposure timer; Beam expanding lens [3] is installed in position at distance time shutter controller [2] 100mm, beam expanding lens [3] is selected 8X's for use, this beam expanding lens [3] just in time is positioned on the front focal plane of the collimation lens that focal length is 150mm [4], collimating mirror [4] is selected φ 45mmf=140mm for use, and the front and back position of adjusting collimating mirror makes it to produce directional light; Optics linear element [5] is installed on the directional light axis, and all light that make output form the position installation carrier rack [6] of interference pattern all by the center of optics linear element (5) at the back focal plane of linear element [5].Light path of the present invention as shown in Figure 2, light path is easy to adjust, can use for a long time after light path mixes up.For making this device that better generality be arranged, satisfy the needs that different size grating light path is adjusted, make its device humanized, so all devices of this device all are to be installed on the base by adjustable articulator.
As long as will scribble the record carrier 6x of photosensitive material during the grating of manufacturing garden is placed on the carrier rack [6], open laser instrument [1], time shutter controller [2], the light beam that sends by laser instrument, by time shutter controller [2] the control time shutter, just can obtain the round grid stroke of whole circle on the record carrier 6x, be one-time form whole-circle, convenient and swift.All the other are with embodiment 1.
Claims (7)
1. method with optics linear element once-forming manufacturing circle grating, it is characterized in that utilizing transparent optical material to make linear element, be radiated on the carrier that scribbles photosensitive material by this linear optical element by laser, one-time form whole-circle obtains the round grating of once-forming through materialization, dried.
2. the method with optics linear element once-forming manufacturing circle grating according to claim 1 is characterized in that with laser direct irradiation optics linear element, and scribbling the step that obtains the circle grating on the carrier of photosensitive material is:
(1) makes the optics linear element with transparent optical material;
(2) adjust light path:
A. open laser instrument;
B. add beam expanding lens and expand bundle;
C adds collimating mirror again, and the front and back position of adjusting collimating mirror makes it to produce directional light;
D. place the optics linear element on the directional light axis, all light that make output are the center by the optics linear element all;
E. form the position of interference pattern at the back focal plane of optics linear element, place the record carrier that scribbles photosensitive material;
F. between laser instrument and beam expanding lens, place the time shutter controller at last, open the time shutter controller, but on record carrier just one-time form whole-circle;
(3) solidify record carrier: materialization, dried can obtain the round grating by the design grid line.
3. the method with linear optical element once-forming manufacturing circle grating according to claim 2 is characterized in that photosensitive material that record carrier is coated with: silver salt latex, gelatin, photoresist, photochromics, thermoplastic etc.
4. the method with linear optical element once-forming manufacturing circle grating according to claim 2 is characterized in that record carrier can be: glass, metal, plastics, machine glass, resin, timber and derivant etc.
5. the device of once-forming manufacturing circle grating is characterized in that it is to be made of laser instrument, time shutter controller, beam expanding lens, collimating mirror, the optics linear element, the carrier rack that utilize transparent optical material to make, and is installed on the base successively; Laser by laser instrument sends expands bundle through time shutter controller control, beam expanding lens, the directional light that the front and back position of adjustment collimating mirror makes it to produce; The optics linear element is installed on the directional light axis, and all light that make output form the position installation carrier rack of interference pattern all by the center of optics linear element at the back focal plane of optics linear element.
6. the device of once-forming manufacturing circle grating according to claim 5 is characterized in that all devices all are to be installed on the base by adjustable articulator.
7. the device of once-forming manufacturing circle grating according to claim 5, the material that it is characterized in that the optics linear element is the transparent optical plastics, as organic glass, optical materials such as resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006100135502A CN1837963A (en) | 2006-04-27 | 2006-04-27 | Method and apparatus for once forming of round grating by optical linear element |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006100135502A CN1837963A (en) | 2006-04-27 | 2006-04-27 | Method and apparatus for once forming of round grating by optical linear element |
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| CN1837963A true CN1837963A (en) | 2006-09-27 |
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| CNA2006100135502A Pending CN1837963A (en) | 2006-04-27 | 2006-04-27 | Method and apparatus for once forming of round grating by optical linear element |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103293130A (en) * | 2013-05-23 | 2013-09-11 | 山西大学 | Digital type Rayleigh interferometer |
| CN105301783A (en) * | 2014-05-28 | 2016-02-03 | 长春理工大学 | Six-beam interference system based on self-cleaning surface structure manufacture |
-
2006
- 2006-04-27 CN CNA2006100135502A patent/CN1837963A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103293130A (en) * | 2013-05-23 | 2013-09-11 | 山西大学 | Digital type Rayleigh interferometer |
| CN105301783A (en) * | 2014-05-28 | 2016-02-03 | 长春理工大学 | Six-beam interference system based on self-cleaning surface structure manufacture |
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