CN1828318A - Magnetic or hybrid pyromagnetic drive minisize electric field sensor - Google Patents
Magnetic or hybrid pyromagnetic drive minisize electric field sensor Download PDFInfo
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- CN1828318A CN1828318A CN 200510051261 CN200510051261A CN1828318A CN 1828318 A CN1828318 A CN 1828318A CN 200510051261 CN200510051261 CN 200510051261 CN 200510051261 A CN200510051261 A CN 200510051261A CN 1828318 A CN1828318 A CN 1828318A
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Abstract
Wherein, it uses Lorentz force or hybrid thermal stress and Lorentz force to drive shielded electrode vibrating on horizontal direction. This invention reduces sensor weight, improves response speed and detection sensitivity, outputs measured current signal as difference mode, and needs small drive voltage and mA-level drive current.
Description
Technical field
The present invention relates to sensor, particularly magnetic drives or pyromagnetic combination drive micro field sensor.
Background technology
Electric field intensity is a crucial interdisciplinary characteristic parameter.The measurement of electric field intensity Aero-Space, learn with fields such as environment measuring and commercial production and all have crucial application, for example at aerospace field, the intensity level of atmospheric electric field is listed in one of essential condition that can spacecraft launch, for ensureing the safety lift-off of aircraft, space flight department attaches great importance to the real-time detection and the monitoring of the preceding thunder and lightning of aircraft emission; Learn and the environmental monitoring field on ground, electric field detects aspects such as the forecast, oil and the ore prospecting that are widely used in general circulation research, geological disaster forecasting, meteorology and sand and dust, atmospheric pollution detection; In the commercial production field, cross strong electric field and can make sophisticated electronics malfunctioning, even damage these sophisticated electronicses, thereby in the production and use of some sophisticated electronicses, need know the electric field intensity in its production environment or the working environment, in order to avoid equipment malfunction or damage.
At present existing some kinds of electric-field sensors, according to different application backgrounds, applied environment and sensing range, electric-field sensor can be divided into the electric field detection on every side of atmospheric electric field detection, seabed electric field detection, electric system or electric equipment, sophisticated electronics production and the detection of environment for use electric field etc.; According to its principle of work, can be divided into charge inductive type and optical profile type two classes.Charge inductive type electric-field sensor manufacturing technology comparative maturity, range is big, and precision is higher, but because its volume is big, complex structure involves great expense, and has been subjected to certain restriction in application.Optical profile type electric-field sensor response speed is fast, and noise is lower, but the general measure scope is narrower, and cost is higher, and is not suitable for the measurement of electrostatic field.
The inventor had once proposed vertical vibration based on Micrometer-Nanometer Processing Technology decline type electric-field sensor scheme (application for a patent for invention number 02147377.3) and parallel oscillatory type micro field sensor scheme (application for a patent for invention number 03106433.7).The present invention has proposed on the above two basis that employing magnetic drives or pyromagnetic combination drive scheme realizes that guarded electrode planar does periodic motion back and forth with respect to induction electrode, the characteristics that magnetic drives are under very little driving voltage, just can obtain very big bi-directional drive power and drive displacement, can realize very fast response speed simultaneously; The characteristics of pyromagnetic combination drive are just to realize very big bi-directional drive power and drive displacement under less driving voltage and drive current, simultaneously can realize response speed faster, and the exciting signal source of drive electrode can adopt the cmos circuit of standard, is convenient to the further integrated of device and circuit; Adopt the induction electrode of the micro field sensor of these two kinds of type of drive all to be divided into two groups of positive induction electrode and negative induction electrodes in addition, current signal on the induction electrode adopts the mode of difference to export, can significantly reduce common mode interference like this, improve the signal to noise ratio (S/N ratio) and the sensitivity of electric field detection signal.
Summary of the invention
The purpose of this invention is to provide that a kind of magnetic drives or the micro field sensor of pyromagnetic combination drive, make sensor have that volume is little, in light weight, response speed fast, be easy to integrated characteristics, and improved the signal to noise ratio (S/N ratio) and the sensitivity of electric field detection signal.
For achieving the above object, technical solution of the present invention provides the micro field sensor of a kind of magnetic driving or pyromagnetic combination drive, it adopts Lorentz force to drive or adopts thermal stress and Lorentz force to drive guarded electrode jointly, vibration in the horizontal direction makes that sensor has that volume is little, in light weight, response speed is fast, be easy to integrated characteristics; The current signal of its measurement adopts differential mode output, the signal to noise ratio (S/N ratio) and the sensitivity that have improved the electric field detection signal.
The micro field sensor of described a kind of pyromagnetic combination drive comprises: several parts such as substrate, guarded electrode, induction electrode and supporting construction; It also comprises drive electrode, permanent magnet and differential amplifier circuit; Wherein, the drive electrode polarity, the two poles of the earth are fixed in upper surface of substrate, and are serially connected with alternating circuit, and two interpolars are linked to each other by a straight beam, and straight beam is unsettled, and its mid point one side links to each other with an end of guarded electrode by a connecting rod;
Straight beam is a drives structure;
The guarded electrode level is fixed on the supporting construction, supporting construction is made up of mooring anchor and micro-elasticity beam, the micro-elasticity beam is the frame shape, be fixed in guarded electrode edge all around, the frame shape of micro-elasticity beam is provided with a plurality of legs, end and sheet mooring anchor below leg stretches to are affixed, and mooring anchor is fixed in upper surface of substrate;
Induction electrode is under the guarded electrode, is made up of positive induction electrode and negative induction electrode, and two arrays of electrodes is fixed in upper surface of substrate, do not connect mutually, and and guarded electrode between a gap is arranged;
Guarded electrode ground connection, positive induction electrode links to each other with the positive pole of differential amplifier circuit, and negative induction electrode links to each other with the negative pole of differential amplifier circuit;
The lower surface and the permanent magnet of substrate are affixed, and the magnetic field that makes permanent magnet is the plane by substrate vertically;
To the drive electrode indirect current, drive drives structure jointly with thermal stress and Lorentz force and do the two-way horizontal displacement, driving guarded electrode vibrates in the horizontal direction, to obtain the AC signal that is directly proportional with external electrical field intensity that induced charge forms on the positive and negative induction electrode, realize the detection of external electric field.
The micro field sensor that described a kind of magnetic drives comprises: several parts such as substrate, guarded electrode, induction electrode and supporting construction; It also comprises drive electrode, permanent magnet and differential amplifier circuit; Wherein, the drive electrode polarity, the two poles of the earth are fixed in upper surface of substrate, and are serially connected with alternating circuit, and two interpolars are linked to each other by a straight beam, and straight beam is unsettled, and its mid point one side links to each other with an end of guarded electrode by a connecting rod;
At the two poles of the earth of drive electrode and the outside surface of straight beam the layer of metal film is arranged;
Straight beam is a drives structure;
The guarded electrode level is fixed on the supporting construction, supporting construction is made up of mooring anchor and micro-elasticity beam, the micro-elasticity beam is the frame shape, be fixed in guarded electrode edge all around, the frame shape of micro-elasticity beam is provided with a plurality of legs, end and sheet mooring anchor below leg stretches to are affixed, and mooring anchor is fixed in upper surface of substrate;
Induction electrode is under the guarded electrode, is made up of positive induction electrode and negative induction electrode, and two arrays of electrodes is fixed in upper surface of substrate, do not connect mutually, and and guarded electrode between a gap is arranged;
Guarded electrode ground connection, positive induction electrode links to each other with the positive pole of differential amplifier circuit, and negative induction electrode links to each other with the negative pole of differential amplifier circuit;
The lower surface and the permanent magnet of substrate are affixed, and the magnetic field that makes permanent magnet is the plane by substrate vertically;
To the drive electrode indirect current, drive drives structure with Lorentz force and do the two-way horizontal displacement, drive guarded electrode and vibrate in the horizontal direction,, realize the detection of external electric field to obtain the AC signal that is directly proportional with external electrical field intensity that induced charge forms on the positive and negative induction electrode.
Described sensor, it is added in the driving voltage equal and opposite in direction on the drive electrode, and direction is opposite, for sinusoidal drive voltage, is exactly that amplitude equates, and phase phasic difference 180 degree guarantee that the current potential on the guarded electrode equals zero, and reach the purpose of guarded electrode ground connection.
Described sensor, the quantity of its described guarded electrode, positive induction electrode and negative induction electrode is identical.
Described sensor, its described drives structure is polysilicon or doped single crystal silicon materials.
Described sensor, its described metallic film is aluminium film or gold thin film.
Described sensor, its described permanent magnet, for the suitable small permanent magnet of device volume, employing can provide the ndfeb magnet of strong magnetic figured stone.
Principle of work of the present invention belongs to charge inductive type, it is the microminiaturization of conventional charge induction type electric-field sensor, but it realizes the driving method difference of grounded shield electrode periodic motion, and traditional charge inductive type electric-field sensor generally is to adopt micromotor to realize the swing circle motion of guarded electrode.Magnetic based on the preparation of MEMS technology of the present invention drives micro field sensor and adopts Lorentz force to drive, pyromagnetic combination drive micro field sensor adopts thermal stress and Lorentz force to drive jointly, adopt that the micro field sensor of these two kinds of type of drive has that volume is little, in light weight, response speed soon, be easy to integrated, can produce in batches, low cost and other advantages.
Description of drawings
Fig. 1 is the fundamental diagram of magnetic driving of the present invention or pyromagnetic combination drive micro field sensor;
Fig. 2 is magnetic drives structure and the pyromagnetic combination drive structure working principle figure that is used for micro field sensor;
Structure configuration map when Fig. 3 is magnetic driving and the work of pyromagnetic combination drive micro field sensor;
Fig. 4 is guarded electrode and the magnetic drives structure or the pyromagnetic combination drive structural drawing of magnetic driving and pyromagnetic combination drive micro field sensor;
Fig. 5 is the substrate and the induction electrode structural drawing of magnetic driving and pyromagnetic combination drive micro field sensor.
Embodiment
See Fig. 2, Fig. 3, Fig. 4, magnetic of the present invention drives or the basic structure of pyromagnetic combination drive micro field sensor mainly comprises induction electrode, guarded electrode and drive electrode three parts.
The micro field sensor of a kind of pyromagnetic combination drive of the present invention comprises: several parts such as substrate 9, guarded electrode 1, induction electrode and supporting construction; It also comprises drive electrode 4, permanent magnet 6 and differential amplifier circuit; Wherein, drive electrode 4 polarities, the two poles of the earth are fixed in substrate 9 upper surfaces, and are serially connected with alternating circuit, and two interpolars are linked to each other by a straight beam 5, and straight beam 5 is unsettled, and its mid point one side links to each other with an end of guarded electrode 1 by a connecting rod 10;
Guarded electrode 1 level is fixed on the supporting construction, supporting construction is made up of mooring anchor 7 and micro-elasticity beam 8, micro-elasticity beam 8 is the frame shape, be fixed in guarded electrode 1 edge all around, the frame shape of micro-elasticity beam 8 is provided with a plurality of legs, end and sheet mooring anchor 7 below leg stretches to are affixed, and mooring anchor 7 is fixed in substrate 9 upper surfaces;
Induction electrode is under the guarded electrode 1, is made up of positive induction electrode 2 and negative induction electrode 3, and two arrays of electrodes is fixed in substrate 9 upper surfaces, do not connect mutually, and and guarded electrode 1 between certain clearance is arranged;
Guarded electrode 1 ground connection, positive induction electrode 2 links to each other with the positive pole of differential amplifier circuit, and negative induction electrode 3 links to each other with the negative pole of differential amplifier circuit;
The lower surface of substrate 9 and permanent magnet 6 are affixed, and the magnetic field that makes permanent magnet 6 is the plane by substrate vertically;
To drive electrode 4 indirect currents, drive drives structure 5 jointly with thermal stress and Lorentz force and do the two-way horizontal displacement, driving guarded electrode 1 vibrates in the horizontal direction, to obtain the AC signal that is directly proportional with external electrical field intensity E that induced charge forms on the positive and negative induction electrode 2,3, realize the detection of external electric field.
The micro field sensor that a kind of magnetic of the present invention drives, basic identical with the micro field sensor of pyromagnetic combination drive, also comprise: several parts such as substrate 9, guarded electrode 1, induction electrode and supporting construction; Its annexation is the same, just at the two poles of the earth of drive electrode 4 and the outside surface of straight beam 5 layer of metal film 11 is arranged.
The principle of work of magnetic driving and pyromagnetic combination drive micro field sensor as shown in Figure 1, the guarded electrode 1 of ground connection is driven planar by magnetic drives structure among Fig. 2 or pyromagnetic combination drive structure 5 and does periodic motion back and forth with respect to the positive induction electrode 2 and the negative induction electrode 3 of its below, when guarded electrode among Fig. 11 during to left movement, the positive exposed area of induction electrode 2 under external electric field E reduces, the electric charge of responding to because of the effect of external electric field E above it is also along with minimizing, at this moment, the exposed area of negative induction electrode 3 under external electric field E increases, and the electric charge of responding to because of the effect of external electric field E above it is also along with increase; On the contrary, when the grounded shield electrode 1 among Fig. 1 moves right, the exposed area of positive induction electrode 2 under electric field increases, the electric charge of responding to because of the effect of external electric field E above it is also along with increasing, at this moment, the exposed area of negative induction electrode 3 under electric field reduces, the electric charge of responding to because of the effect of external electric field E above it is also along with minimizing, when grounded shield electrode 1 is planar done periodic motion back and forth, it descends on upright induction electrode 2 and the negative induction electrode 3 because the quantity that acts on their lip-deep induced charges of external electric field E will be done the cycle variation, on the induction electrode in time the induced charge that changes of cycle will form the AC signal that is directly proportional with external electrical field intensity E, this current signal promptly obtains a measurable electric signal that is directly proportional with external electrical field intensity E through difference amplification and subsequent conditioning circuit processing, thereby realizes measuring the purpose of space outerpace electric field intensity.Induction electrode is divided into positive and negative two groups, adopts differential mode output, helps reducing common mode interference, improves the signal to noise ratio (S/N ratio) and the sensitivity of electric field detection signal.
Fig. 2 is used to drive the fundamental diagram that guarded electrode is planar done the magnetic drives structure or the pyromagnetic combination drive structure of periodic motion back and forth, need during use the micro field sensor for preparing is fixed on the block permanent magnet 6 as shown in Figure 3, permanent magnet 6 will produce the magnetic field perpendicular to the micro field sensor in-plane.Narrate the principle of work of magnetic drives structure and pyromagnetic combination drive structure below respectively.
For the magnetic drives structure, when adding alternating voltage on the drive electrode 4 on being fixed on silicon base 9, polysilicon straight beam 5 or doped monocrystalline silicon straight beam 5 are under the acting in conjunction perpendicular to the magnetic field of in-plane and the alternating current by straight beam 5, will be subjected to the Lorentz force action that is parallel to silicon base 9 planes as shown in Figure 2, under the effect of Lorentz force, the distortion in the plane will take place in straight beam 5.In order to make the Lorentz force that on straight beam 5, produces enough big, thereby realize bigger driving force and drive displacement, need on straight beam 5, add bigger electric current, generally about hundreds of milliamperes, for prevent polysilicon straight beam 5 or doped monocrystalline silicon straight beam 5 when work temperature too high and damage, the metallic film 11 that can on straight beam 5, prepare low-resistivity, generally can adopt gold thin film or aluminium film etc., because the resistivity of metal is very low, even pass to bigger alternating current, the heat that produces owing to joule heating effect also seldom, temperature during device work raises very little, and the thermal stress of generation is also very little, can ignore, so, only need to consider the effect of Lorentz force for the magnetic drives structure.
For pyromagnetic combination drive structure, do not having under the situation in magnetic field, when adding alternating voltage on the drive electrode 4 on being fixed on silicon base 9, there is the straight beam 5 of certain interval to produce thermal stress between 9 at the bottom of that make of polysilicon or doped monocrystalline silicon and the silicon wafer-based owing to the joule heating effect expanded by heating, because polysilicon beam 5 is fixed supports at two ends, under the effect of thermal stress, straight beam 5 will take place in the plane or perpendicular to the curvature movement on plane, it is the flexing that takes place in the plane actually, also be perpendicular to the flexing on plane, the physical dimension that depends on straight beam 5, if the thickness of straight beam 5 is greater than its width, curvature movement in the plane will take place, if the width of straight beam 5 is greater than its thickness, curvature movement perpendicular to the plane will take place, if its width equates with thickness, then take place in the plane and all possible perpendicular to the curvature movement on plane, if but the micro field sensor for preparing is fixed on the block permanent magnet 6 as shown in Figure 3, permanent magnet 6 is the small permanent magnet suitable with device volume, and employing can provide the ndfeb magnet of strong magnetic figured stone etc.Permanent magnet 6 will produce the magnetic field perpendicular to the micro field sensor plane, polysilicon or doped monocrystalline silicon straight beam 5 are under the effect perpendicular to the magnetic field of in-plane and the alternating current by straight beam 5, except thermal stress, also can be subjected to being parallel to the Lorentz force action on plane, under the acting in conjunction of thermal stress and Lorentz force, even the curvature movement in the plane greater than its thickness, also takes place in the width of straight beam 5 easily.Polysilicon straight beam 5 or the curvature movement of doped monocrystalline silicon straight beam 5 in surface level can be used for driving other microstructure makes it planar do periodic motion back and forth.
From the above mentioned as can be known, magnetic drives structure and pyromagnetic combination drive structure are basic identical, their needed driving voltages are all very low, difference between them is that the driving voltage of magnetic driving is lower, but need bigger drive current in order to produce bigger Lorentz force, in order to prevent the damage of generating heat in the course of the work of polysilicon or doped monocrystalline silicon straight beam 5 drives structure, need on polysilicon or doped monocrystalline silicon straight beam 5 drives structure, plate the metallic film 11 of one deck low-resistivity.Pyromagnetic combination drive structure need not prepare metallic film on polysilicon or heavy doping monocrystalline silicon straight beam 5, its needed driving voltage and drive current are all very little, drive current is generally about several milliamperes, thereby the cmos circuit that can adopt standard is as exciting signal source, pyromagnetic combination drive mainly produces driving force and drive displacement by the curvature movement that straight beam 5 thermal stress produce, and the effect of the Lorentz force that straight beam 5 is suffered is to guide straight beam 5 drives structure that curvature movement in the plane takes place.
As shown in Figure 4, this magnetic drives structure or pyromagnetic combination drive structure 5 are coupled together with grounded shield electrode 1, grounded shield electrode 1 is fixed on by micro-elasticity beam 8 and mooring anchor 7 that (guarded electrode 1 as shown in Figure 4 is positioned at the top of positive and negative induction electrode 2,3 on the silicon base 9, and and between the positive and negative induction electrode 2,3 of below certain clearance is arranged), so just can use magnetic drives structure or pyromagnetic combination drive structure to drive guarded electrode 1 and planar do periodic motion back and forth with respect to the positive induction electrode 2 and the negative induction electrode 3 of its below.The advantage of magnetic drives structure is to obtain bigger bi-directional drive power and drive displacement under less voltage, and can realize very fast response speed, magnetic drives and also has the advantage of compact conformation in addition, the chip area that it takies seldom, thereby can improve positive and negative induction electrode 2,3 area, because the sensed current signal based on the electric-field sensor of charge inductive type is directly proportional with the frequency of operation of guarded electrode 1 and the product of induction electrode area, it is very favourable to the detection sensitivity of raising micro field sensor therefore to adopt the magnetic drive scheme to drive guarded electrode 1 motion.The characteristics of pyromagnetic combination drive structure and magnetic drives structure are basic identical, but it need not prepare metallic film 11 on straight beam 5 structures, preparation technology is simpler, can adopt the present process conditions of some foundries in the world to process, needed in addition drive current is more much smaller than magnetic drives structure, can adopt the CMOS driving circuit of standard to do exciting signal source, thereby be convenient to the further integrated of device and circuit.
Claims (8)
1. a magnetic drives or the micro field sensor of pyromagnetic combination drive, it is characterized in that, adopt the Lorentz force driving or adopt thermal stress and Lorentz force to drive guarded electrode jointly, vibration in the horizontal direction makes that sensor has that volume is little, in light weight, response speed is fast, be easy to integrated characteristics; The current signal of its measurement adopts differential mode output, the signal to noise ratio (S/N ratio) and the sensitivity that have improved the electric field detection signal.
2. the micro field sensor of a kind of pyromagnetic combination drive as claimed in claim 1 comprises: several parts such as substrate, guarded electrode, induction electrode and supporting construction; It is characterized in that, also comprise drive electrode, permanent magnet and differential amplifier circuit; Wherein, the drive electrode polarity, the two poles of the earth are fixed in upper surface of substrate, and are serially connected with alternating circuit, and two inter-stages are linked to each other by a straight beam, and straight beam is unsettled, and its mid point one side links to each other with an end of guarded electrode by a connecting rod;
Straight beam is a drives structure;
The guarded electrode level is fixed on the supporting construction, supporting construction is made up of mooring anchor and micro-elasticity beam, the micro-elasticity beam is the frame shape, be fixed in guarded electrode edge all around, the frame shape of micro-elasticity beam is provided with a plurality of legs, end and sheet mooring anchor below leg stretches to are affixed, and mooring anchor is fixed in upper surface of substrate;
Induction electrode is under the guarded electrode, is made up of positive induction electrode and negative induction electrode, and two arrays of electrodes is fixed in upper surface of substrate, do not connect mutually, and and guarded electrode between a gap is arranged;
Guarded electrode ground connection, positive induction electrode links to each other with the positive pole of differential amplifier circuit, and negative induction electrode links to each other with the negative pole of differential amplifier circuit;
The lower surface and the permanent magnet of substrate are affixed, and the magnetic field that makes permanent magnet is the plane by substrate vertically;
To the drive electrode indirect current, drive drives structure jointly with thermal stress and Lorentz force and do the two-way horizontal displacement, driving guarded electrode vibrates in the horizontal direction, to obtain the AC signal that is directly proportional with external electrical field intensity that induced charge forms on the positive and negative induction electrode, realize the detection of external electric field.
3. the micro field sensor that a kind of magnetic as claimed in claim 1 drives comprises: several parts such as substrate, guarded electrode, induction electrode and supporting construction; It is characterized in that, also comprise drive electrode, permanent magnet and differential amplifier circuit; Wherein, the drive electrode polarity, the two poles of the earth are fixed in upper surface of substrate, and are serially connected with alternating circuit, and two interpolars are linked to each other by a straight beam, and straight beam is unsettled, and its mid point one side links to each other with an end of guarded electrode by a connecting rod;
At the two poles of the earth of drive electrode and the outside surface of straight beam the layer of metal film is arranged;
Straight beam is a drives structure;
The guarded electrode level is fixed on the supporting construction, supporting construction is made up of mooring anchor and micro-elasticity beam, the micro-elasticity beam is the frame shape, be fixed in guarded electrode edge all around, the frame shape of micro-elasticity beam is provided with a plurality of legs, end and sheet mooring anchor below leg stretches to are affixed, and mooring anchor is fixed in upper surface of substrate;
Induction electrode is under the guarded electrode, is made up of positive induction electrode and negative induction electrode, and two arrays of electrodes is fixed in upper surface of substrate, do not connect mutually, and and guarded electrode between a gap is arranged;
Guarded electrode ground connection, positive induction electrode links to each other with the positive pole of differential amplifier circuit, and negative induction electrode links to each other with the negative pole of differential amplifier circuit;
The lower surface and the permanent magnet of substrate are affixed, and the magnetic field that makes permanent magnet is the plane by substrate vertically;
To the drive electrode indirect current, drive drives structure with Lorentz force and do the two-way horizontal displacement, drive guarded electrode and vibrate in the horizontal direction,, realize the detection of external electric field to obtain the AC signal that is directly proportional with external electrical field intensity that induced charge forms on the positive and negative induction electrode.
4. as claim 2 or 3 described sensors, it is characterized in that, be added in the driving voltage equal and opposite in direction on the drive electrode, direction is opposite, for sinusoidal drive voltage, be exactly that amplitude equates, phase phasic difference 180 degree, guarantee that the current potential on the guarded electrode equals zero, and reaches the purpose of guarded electrode ground connection.
5. as claim 2 or 3 described sensors, it is characterized in that the quantity of described guarded electrode, positive induction electrode and negative induction electrode is identical.
6. as claim 2 or 3 described sensors, it is characterized in that described drives structure is polysilicon or doped single crystal silicon materials.
7. sensor as claimed in claim 3 is characterized in that, described metallic film is aluminium film or gold thin film.
8. as claim 2 or 3 described sensors, it is characterized in that, described permanent magnet, for the suitable small permanent magnet of device volume, employing can provide the ndfeb magnet of strong magnetic figured stone.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111693791A (en) * | 2020-06-23 | 2020-09-22 | 国网陕西省电力公司电力科学研究院 | Integrated carbon nanotube film electromagnetic field sensor and three-dimensional electromagnetic field sensor |
| CN115524544A (en) * | 2022-11-24 | 2022-12-27 | 西安交通大学 | Piezoelectric-driven horizontal resonant micro electric field sensor and working method thereof |
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2005
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111693791A (en) * | 2020-06-23 | 2020-09-22 | 国网陕西省电力公司电力科学研究院 | Integrated carbon nanotube film electromagnetic field sensor and three-dimensional electromagnetic field sensor |
| CN111693791B (en) * | 2020-06-23 | 2023-02-28 | 国网陕西省电力公司电力科学研究院 | Integrated carbon nanotube film electromagnetic field sensor and three-dimensional electromagnetic field sensor |
| CN115524544A (en) * | 2022-11-24 | 2022-12-27 | 西安交通大学 | Piezoelectric-driven horizontal resonant micro electric field sensor and working method thereof |
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