CN1825388A - Experiment apparatus for researching DC glow plasma - Google Patents

Experiment apparatus for researching DC glow plasma Download PDF

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Publication number
CN1825388A
CN1825388A CN 200610050020 CN200610050020A CN1825388A CN 1825388 A CN1825388 A CN 1825388A CN 200610050020 CN200610050020 CN 200610050020 CN 200610050020 A CN200610050020 A CN 200610050020A CN 1825388 A CN1825388 A CN 1825388A
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China
Prior art keywords
circuit
glow
researching
discharge tube
glow plasma
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CN 200610050020
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Chinese (zh)
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马志斌
郑志荣
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HANGZHOU DAHUA INSTRUMENT Manufacturing Co Ltd
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HANGZHOU DAHUA INSTRUMENT Manufacturing Co Ltd
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Priority to CN 200610050020 priority Critical patent/CN1825388A/en
Publication of CN1825388A publication Critical patent/CN1825388A/en
Pending legal-status Critical Current

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Abstract

The invention is a test device for researching a direct current (DC) glow plasma, mainly comprising DC glow discharge mechanism and supporting circuit, where the glow discharge mechanism at least comprises a low voltage discharge tube embedded with discharge electrodes, embedded with test probe and provided with gas intake and gas charging inlet as well as charged with at least one operating gas of air, H2, CO2, and N2, the gas intake is connected to a vacuum pump and able to keep the vacuum in the low voltage discharge tube at 10Pa-400Pa, and the gas charging inlet is connected through a flowmeter to an operating gas source, two axial ends in the low voltage discharge tube are provided with discharge electrodes moving in the 50-150 mm range of the axis and two ends of the low voltage discharge tube are fixed through two brackets and provided with two water cooled seats each connected through circulating water to a circulating pump; and the invention has characters of compact structure, convenient to operating, very high cost/trade-off, suitable to make batch production, beneficial to spreading, etc.

Description

The experimental provision of researching DC glow plasma
Technical field
What the present invention relates to is a kind of experimental provision of researching DC glow plasma characteristic, belongs to DC glow plasma
Technical field.
Background technology
Plasma technique is an important technology that concerns national energy, environment, national defense safety.The DC glow plasma technology is because simple in structure; cost is lower and be subjected to using widely; but at home; lag far behind the glow plasma body technique in application in engineering about glow plasma Study on Technology and teaching; high science and engineering universities and colleges lack about plasma theory in the personnel training link and the training aspect putting into practice; cause the main cause of this phenomenon to be that plasma apparatus costs an arm and a leg; the basic need import; price is generally ten thousand yuan of 50-500; general universities and colleges and research institution can't make inquiries; common research institution and general colleges and universities have no chance to obtain the training about the plasma technique application facet basically, and this is disadvantageous to research and the application that our country carries out plasma technology.
Summary of the invention
The object of the present invention is to provide a kind of simple in structure, easy to use, cheap, the experimental provision of the researching DC glow plasma that experiment effect is good, the working gas of this device, operating air pressure, electrode distance etc. influence the parameter of plasma and all can regulate and control alone or in combination neatly; Utilize excitation principle and influence factor that this device can the systematic study glow plasma, not only can offer a plurality of replication experiments, and can offer the experiment of research property, thereby promote glow plasma Study on Technology, teaching and application.
The objective of the invention is to finish by following technical solution: it mainly is made up of the mechanism and the support circuit of direct current glow discharge, described discharge mechanism includes a low-voltage discharge tube that is built-in with sparking electrode at least, it is built-in with test probe, and offer bleeding point and inflation inlet, charged at least a working gas in air, hydrogen, carbon dioxide, the nitrogen in it.
Described bleeding point is connected to a vacuum pump, and can make the interior vacuum pressure of low-voltage discharge tube at 10Pa-400Pa; Inflation inlet is connected to the source of the gas of working gas by a flowmeter.
Described low pressure discharge inner axial tube two ends are placed with the sparking electrode that can move in axis 50-150mm scope.
The two ends of described low-voltage discharge tube are fixed by two supports, and also are provided with two water-cooled bearings that respectively are connected to water circulating pump by the recirculated water interface at its two ends.
Described support circuit includes high-tension circuit at least, aura produces circuit and glow plasma parameter measurement circuit, high-tension circuit is made up of pressure regulator, high-tension transformer and commutation diode D1-D4, aura produces circuit and is made up of capacitor C and positive and negative electrode, the spacing of two electrodes is 50-150mm, and the glow plasma parameter measurement circuit is made up of glow discharge parameter measurement circuit and electron concentration, temperature measuring circuit.
Described glow discharge parameter measurement circuit is made up of current measurement circuit and tension measuring circuit at least.
The present invention has following major advantage:
One. the working gas of this device, operating air pressure, electrode distance etc. influence the parameter of plasma all can be regulated and control neatly alone or in combination, and can measure these parameters; Utilize excitation principle and influence factor that this device can the systematic study glow plasma.
They are two years old. and whole discharge tube structure is transparent, can see each stage of low pressure gaseous discharge with removing, and the research and teaching that is particularly suitable for glow plasma uses.
They are three years old. and simple for structure, easy to operate, the ratio of performance to price is very high, is fit to produce in batches, helps promoting the use of.
They are four years old. and can measure Townsend (Townsend) first ionization constant and verify Paschen (Paschen) law.
They are five years old. by the volt-ampere characteristic of measuring probe, can calculate electron concentration and temperature.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is an inventive circuit syndeton synoptic diagram.
Embodiment
Below in conjunction with accompanying drawing invention is further described.The present invention mainly is made up of direct current glow discharge mechanism and support circuit.Described discharge mechanism includes a low-voltage discharge tube 2 that is built-in with sparking electrode 1,4 at least, and it is built-in with test probe 3, and offers bleeding point 18 and inflation inlet 19, has charged at least a working gas in air, hydrogen, carbon dioxide, the nitrogen in it.Described bleeding point 18 is connected to a vacuum pump, and can make vacuum pressure in the low-voltage discharge tube 2 at 10Pa-400Pa; Inflation inlet 19 is connected to the source of the gas of working gas by a flowmeter.Axial two ends are placed with the sparking electrode 1,4 that can move in the described low-voltage discharge tube 2 in axis 50-150mm scope.The two ends of described low-voltage discharge tube 2 are fixed by two supports, and also are provided with two water-cooled bearings that respectively are connected to water circulating pump by the recirculated water interface at its two ends.
Support circuit of the present invention includes high-tension circuit at least, aura produces circuit and glow plasma parameter measurement circuit, high-tension circuit is made up of pressure regulator 7, high-tension transformer (8) and commutation diode D1-D4, aura produces circuit and is made up of capacitor C and positive and negative electrode, the spacing of two electrodes is 50-150mm, and the glow plasma parameter measurement circuit is made up of glow discharge parameter measurement circuit and electron concentration, temperature measuring circuit.Described glow discharge parameter measurement circuit is made up of current measurement circuit and tension measuring circuit at least.
Shown in Figure 1, the present invention mainly includes low-voltage discharge tube 2, sparking electrode 1,4, test probe 3, vacuum system and water-cooling system.The two ends of low-voltage discharge tube 2 are fixing by two supports 12, be provided with bleeding point 18 and inflation inlet 19, be pumped into the vacuum that air pressure is 10Pa-400Pa by bleeding point 18 by vacuum pump 15, be connected to source of the gas 22 by inflation inlet 19, flowmeter 20, feed working gas, these gases can be multiple gases such as air, hydrogen, carbon dioxide and nitrogen, and the flow of gas is regulated by flowmeter 20, and low-pressure gas produces aura under certain conditions in discharge tube 2; Sparking electrode 1,4 is positioned at the axial two ends of low-voltage discharge tube 2, and can be along moving in the axis 50-150mm scope, in order to change the distance of gas discharge; Test probe 3 be used for the volt-ampere characteristic between measuring probe 3 and the discharge negative electrode, and volt-ampere characteristic is calculated electron concentration and temperature according to this between two sparking electrodes 1,4; Be provided with vacuum system, adopt rotary-vane vaccum pump 15 to vacuumize, adopt thermal resistance vacuum meter 16 surveying work air pressure; Be provided with water-cooling system, the water-cooled bearing 5 at the two ends of low-voltage discharge tube 2 respectively has two recirculated water interfaces 13,17,21,23, is connected to water circulating pump 14, by the recirculated water that water circulating pump 14 produces, low-voltage discharge tube 2 is implemented the water-cooled protection.
Shown in Figure 2, support circuit of the present invention comprises that mainly high-tension circuit, aura produce circuit and glow plasma parameter measurement circuit etc.
Circuit for producing high voltage is made up of pressure regulator 7, high-tension transformer 8, commutation diode D1~D4, and aura produces circuit to be made up of capacitor C and positive and negative electrode, and the spacing of two electrodes is 50-150mm.The glow plasma parameter measurement circuit is made up of glow discharge parameter measurement circuit and electron concentration, temperature measuring circuit.The glow discharge parameter measurement circuit is made up of current measurement circuit (6) and tension measuring circuit, and current measurement circuit is used to measure the size of discharge current, and measurement range is a direct current 10 -6A-0.5A is divided into 3 or 4 ranges, and the switching of range is realized by K switch 1~K3; Tension measuring circuit is made up of divider resistance R and voltage table V1, and measurement range is: direct current 100~1000V; Electron concentration, temperature measuring circuit are made up of probe 3, milliammeter 11, voltage table 10, adjustable resistance R1 and power supply E9, by the volt-ampere characteristic between measuring probe 3 and the negative electrode 4, and can be in the hope of electron concentration and temperature.
The annexation of foregoing circuit is seen shown in Figure 2: the primary coil of pressure regulator 7 connects the 220V AC power; The secondary coil of pressure regulator 7 connects the primary coil of high-tension transformer 8, two termination rectification circuits of the secondary coil of high-tension transformer 8, rectification circuit is made up of the high-voltage diode of four bridge joints, the negative output of rectification circuit connects the negative terminal of the negative electrode and the capacitor C of discharge tube 2, the positive output of rectification circuit connects the anode of current measurement circuit 6, tension measuring circuit and capacitor C, and other one of current measurement circuit 6 terminates to the positive pole 1 of low-voltage discharge tube 2.Power supply E9 forms variable voltage through adjustable resistance R1, and the output voltage of R1 is connected to voltage table V210 anode, and receives electron probe 3 by milliammeter 11, and voltage table V2 negative terminal is received the negative electrode 4 of low-voltage discharge tube 2.
The course of work of the present invention is:
1. as shown in Figure 1, 2: after the energising, pressure regulator 7 and high-tension transformer 8 rise to required voltage with the 220V alternating voltage, start vacuum pump 15, low-voltage discharge tube 2 is vacuumized, after discharge tube 2 feeds the gas of certain air pressure, according to different high pressure, measure the volt-ampere characteristic of discharge tube 2, along with the rising of voltage, discharge current is selected the range of suitable current metering circuit along with increase.Along with voltage from low to high, low pressure discharge can be divided into three phases: dark discharge, glow discharge and arc discharge.Just can try to achieve Townsend (Townsend) first ionization constant according to the volt-ampere characteristic of the discharge tube 2 that records.Under the constant condition of the product that keeps gaseous tension p and electrode distance d, get different p, d value, just can verify Paschen (Paschen) law according to the result of measurement.

Claims (6)

1, a kind of experimental provision of researching DC glow plasma, it mainly is made up of the mechanism and the support circuit of direct current glow discharge, it is characterized in that described discharge mechanism includes a low-voltage discharge tube (2) that is built-in with sparking electrode (1,4) at least, it is built-in with test probe (3), and offer bleeding point (18) and inflation inlet (19), charged at least a working gas in air, hydrogen, carbon dioxide, the nitrogen in it.
2, the experimental provision of researching DC glow plasma according to claim 1 is characterized in that described bleeding point (18) is connected to a vacuum pump, and can make the interior vacuum pressure of low-voltage discharge tube (2) at 10Pa-400Pa; Inflation inlet (19) is connected to the source of the gas of working gas by a flowmeter.
3, the experimental provision of researching DC glow plasma according to claim 1 and 2 is characterized in that axial two ends are placed with the sparking electrode (1,4) that can move in the described low-voltage discharge tube (2) in axis 50-150mm scope.
4, the experimental provision of researching DC glow plasma according to claim 3, the two ends that it is characterized in that described low-voltage discharge tube (2) are fixed by two supports, and also are provided with two water-cooled bearings that respectively are connected to water circulating pump by the recirculated water interface at its two ends.
5, the experimental provision of researching DC glow plasma according to claim 1, it is characterized in that described support circuit includes high-tension circuit at least, aura produces circuit and glow plasma parameter measurement circuit, high-tension circuit is made up of pressure regulator (7), high-tension transformer (8) and commutation diode D1-D4, aura produces circuit and is made up of capacitor C and positive and negative electrode, the spacing of two electrodes is 50-150MM, and the glow plasma parameter measurement circuit is made up of glow discharge parameter measurement circuit and electron concentration, temperature measuring circuit.
6, the experimental provision of researching DC glow plasma according to claim 5 is characterized in that described glow discharge parameter measurement circuit is made up of current measurement circuit and tension measuring circuit at least.
CN 200610050020 2006-03-27 2006-03-27 Experiment apparatus for researching DC glow plasma Pending CN1825388A (en)

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CN 200610050020 CN1825388A (en) 2006-03-27 2006-03-27 Experiment apparatus for researching DC glow plasma

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Application Number Priority Date Filing Date Title
CN 200610050020 CN1825388A (en) 2006-03-27 2006-03-27 Experiment apparatus for researching DC glow plasma

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CN1825388A true CN1825388A (en) 2006-08-30

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103247204A (en) * 2013-05-03 2013-08-14 西南大学 Demonstration platform for exploring gas discharge phenomenon
CN106531596A (en) * 2016-11-25 2017-03-22 山西大学 Apparatus and method for generating glow discharge striations
CN111145623A (en) * 2019-12-31 2020-05-12 河海大学常州校区 Device and method for experimental research on positive and negative corona and substance action of different parameters
CN111179707A (en) * 2020-02-27 2020-05-19 大连理工大学 Direct current glow discharge probe diagnostic device for teaching
CN114062876A (en) * 2021-11-19 2022-02-18 中国科学院合肥物质科学研究院 Test device and test method capable of directly observing Paschen discharge phenomenon of insulating substance
CN114062986A (en) * 2021-11-17 2022-02-18 中国科学院合肥物质科学研究院 Low-temperature superconducting insulation local Paschen test device capable of being observed in real time

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103247204A (en) * 2013-05-03 2013-08-14 西南大学 Demonstration platform for exploring gas discharge phenomenon
CN103247204B (en) * 2013-05-03 2015-04-29 西南大学 Demonstration platform for exploring gas discharge phenomenon
CN106531596A (en) * 2016-11-25 2017-03-22 山西大学 Apparatus and method for generating glow discharge striations
CN111145623A (en) * 2019-12-31 2020-05-12 河海大学常州校区 Device and method for experimental research on positive and negative corona and substance action of different parameters
CN111179707A (en) * 2020-02-27 2020-05-19 大连理工大学 Direct current glow discharge probe diagnostic device for teaching
CN114062986A (en) * 2021-11-17 2022-02-18 中国科学院合肥物质科学研究院 Low-temperature superconducting insulation local Paschen test device capable of being observed in real time
CN114062876A (en) * 2021-11-19 2022-02-18 中国科学院合肥物质科学研究院 Test device and test method capable of directly observing Paschen discharge phenomenon of insulating substance

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