CN1822096B - Method for manufacturing pole tip and controlling trackwidth and wall angle, magnetic head and disc drive - Google Patents
Method for manufacturing pole tip and controlling trackwidth and wall angle, magnetic head and disc drive Download PDFInfo
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- CN1822096B CN1822096B CN2005101316178A CN200510131617A CN1822096B CN 1822096 B CN1822096 B CN 1822096B CN 2005101316178 A CN2005101316178 A CN 2005101316178A CN 200510131617 A CN200510131617 A CN 200510131617A CN 1822096 B CN1822096 B CN 1822096B
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- chamfered portion
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
- Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching
Abstract
A method is disclosed for independently controlling track width and bevel angle of a write pole tip having a P3 pole tip for perpendicular recording. The method includes establishing the track width in a portion of the P3 layer material. A portion of this portion having the established track width is protected by providing a temporary masking material to make a protected portion. At least one unprotected portion is left exposed to be shaped. This unprotected portion is then beveled to produce at least one beveled portion having a bevel angle. The protected portion produces a rectangular portion which together with the beveled portion produce a hexagonal pole tip. Also disclosed is a magnetic head having a hexagonal pole tip, and a disk drive having a magnetic head having a hexagonal pole tip.
Description
Technical field
The present invention relates in general to the manufacturing of the magnetic head that is used for data storage device, more specifically, relate to wide and pitch angle, the road that writes pole tip that the method for making the hexagon be used for head for perpendicular recording and writing pole tip, independent control be used for perpendicular recording method, comprise that hexagon writes the magnetic head and the disk drive of pole tip.
Background technology
Traditionally, data are stored in the film dielectric layer adjacent with the hard disk drive panel surface with vertical pattern, that is, the magnetic field of the position of stored information is usually along the direction of annular data track orientation, with dish with respect to the identical or opposite direction of transducer (transducer) travel direction on.
Recently, develop perpendicular magnetic recording system and be used for computer hard disc driver.Write the utmost point (trailing write pole) after common head for perpendicular recording comprises, write with this and return before extremely magnetic-coupled or antipole (leading return or opposing pole) and write the conduction magnetizing coil of the utmost point around this.In the disk drive of this type, the magnetic field orientating of the position of canned data be the planar quadrature with dielectric film, and so perpendicular to the direction of annular data track, its title is come therefrom.
The medium that is used for perpendicular recording generally includes hard magnetic recording layer and soft magnetic underlayer, and this soft magnetic underlayer provides from writing the magnetic flux path of the utmost point to preceding antipole behind the write head.Thereby the electric current flowing through coil produces magnetic flux in writing extremely.Magnetic flux enters soft magnetic underlayer from writing pole tip through the Hard Magnetic recording channel, and arrives antipole at opposite side, thereby finishes flux circuit.
The perpendicular recording scheme has the potentiality of supporting much higher line density than the vertical scheme of tradition.Magnetization on the double record dish changes (magnetization transition) trailing edge by the back utmost point and is recorded, and the shape of back polar projection on the replicating medium plane, so the size and dimension of pole tip is aspect the density of determining storable data and important.
Because it makes the super-high density magnetic record become possibility, the perpendicular magnetic recording expection will replace longitudinal magnetic recording.The increase of surface density correspondingly requires design and production method fully to reduce the width that P3 writes pole tip, keep wide control (TWC) simultaneously and keep the trailing edge structural precision (trailing edge structuraldefinition, TED).As mentioned above, P3 writes the shape of polar projection on the ablation process replicating medium plane, so the size of the size restrictions data fields of P3 pole tip and thereby restriction surface density.Current driver makes the width of P3 pole tip less than 200nm (200 * 10
-9Rice).Making minute sized like this infallible component is a challenge to manufacturing process technology.This problem becomes and has more challenge, because the P3 pole tip preferably is not simple rectangle at ABS, but trapezoidal, have parallel top and bottom limit, but have the pitch angle of preferred about 6 to 15 degree on the side.Make the P3 pole tip be suitable for crooked concentric road if decide like this, the turning can not extend into adjacent road mistakenly.It is shown in (prior art) among Fig. 5-7.The width of data track is corresponding to the width of P3 pole tip.(prior art) do not have the P3 pole tip 60 on inclined-plane to be shown as on first data track 6 among Fig. 5, and second data track 7 is adjacent with this first data track.It is crooked that data track is actually, but under this ratio, curvature is very little so that it shows as straight.It is unrare that P3 pole tip 60 becomes a little when data track 6 is advanced.Fig. 6 (prior art) illustrates the P3 pole tip 60 that does not have the inclined-plane of inclination a little.As can be seen, although there is not the last angle of the P3 pole tip 60 on inclined-plane to stay in first road 6, inferior horn has entered phase neighboring trace 7 at this moment, and this phase neighboring trace 7 may comprise the data that before write and the angle that may be entered this moment is done distortion or partly override.Because this inclination is common, so the P3 of making pole tip in the field of business has the inclined-plane to become convention, thereby obtains trapezoidal shape, shown in Fig. 7 (prior art).This generation will be called the gains of bevelled P3 pole tip 62.Can find out that now although the angle of P3 pole tip 62 changes generally, whole bevelled P3 pole tip 62 is still in data track 6.
In the manufacturing of bevelled P3 pole tip, general custom is to use ion to grind bundle and shapes P3 pole tip 62 in the prior art, produces pitch angle 3, this ion grind bundle as Fig. 8 (prior art) intermediate ion grinding direction arrow 9 shown at angle.Yet, be difficult to not only control the angle of ion grinding bundle but also control its location, side.As a result, P3 pole tip 62 is not only bevelled, and grinding technics causes the reducing of overall width of P3 pole tip 62, as shown in the dashed region that loses in the process of making the right-hand side inclined-plane.Road wide 5 is by the overall width decision of P3 pole tip, and is as shown in arrow 5.This has the unexpected effect that changes road wide 5 when producing pitch angle 3.When the left-hand side that makes P3 pole tip 62 also has the inclined-plane, shown in Fig. 9 (prior art), thereby when losing another zone and overall width and then road wide 5 and further reducing, this problem has been exacerbated.In other words, in prior art processes, road wide 5 and pitch angle 3 are not independent controls.Final road wide 5 depends on into the control of restrainting during the ion grinding technics at angle, and keeps the good control aspect existing problems to these two variablees traditionally at the same time.The uncertainty of this control causes the productive rate of difference, and to be lower than tolerable limit too many because the wide size in road can easily be reduced to, thereby must abandon whole P3 pole tip structure.
Therefore, need a kind of manufacture method, wherein pitch angle of Chan Shenging and road are wide as the independent variable Be Controlled.Also need a kind of P3 pole tip, this P3 pole tip has at least one such part, in this part width be independent of the P3 pole tip other parts the pitch angle and determine.
Summary of the invention
The present invention discloses a kind of method that is used for controlling independently wide and pitch angle, the road that writes the utmost point with P3 pole tip that is used for perpendicular recording.This method is included in determines in the part of P3 layer material that the road is wide.Make protected part thereby the part with wide this part in definite road is protected by interim mask material is provided.Thereby stay the processed shaping that is exposed of the not protected part of the next one.Thereby make this not protected part have the inclined-plane to obtain a chamfered portion that has then with pitch angle.
The present invention also discloses the method that hexagon that a kind of manufacturing is used for head for perpendicular recording writes pole tip, comprising: depositing insulating layer; Deposition P3 layer on described insulation course; Deposition block layer on described P3 layer; On described block layer, make mask layer; Thereby described P3 layer and described block layer are shaped form excrescence with excrescence wall part by described P3 layer; Comprising aluminum oxide layer on the described P3 layer of described excrescence wall part; Described alumina layer is shaped, thereby on described excrescence wall part, produce the alumina walls part, thereby produce the protected part of partly being protected by described alumina walls of described P3 layer and the not protected part of described P3 layer, described protected portion branch comprises the described excrescence of described P3 layer, and described not protected portion branch comprises the part under described excrescence of described P3 layer; And when the described protected part of partly protecting described P3 layer by described alumina walls is with the rectangle part that forms described hexagon and write pole tip, make the described not protected partially-formed of described P3 layer material to form the chamfered portion that has that described hexagon writes pole tip.
The present invention also discloses a kind of magnetic head with hexagonal write head pole tip, comprise: have rectangle part and the P3 pole tip that chamfered portion is arranged, determine in the described rectangle part that described road is wide, described have chamfered portion to have the inclined wall part, wherein when described magnetic head in use the time, this rectangle part and this have chamfered portion relative to each other to arrange along magnetic track.
The present invention also discloses a kind of disk drive, comprising: at least one hard disk; At least one magnetic head, this magnetic head is suitable for flying on described hard disk, be used for from described hard disk reading of data, this magnetic head comprises the perpendicular write head with hexagon pole tip, comprise: the P3 pole tip, it has wherein the chamfered portion that has of determining the rectangle part that the road is wide and having the inclined wall part, and wherein when described magnetic head in use the time, this rectangle part has chamfered portion relative to each other to arrange along magnetic track with this.
There is chamfered portion to have and neighboring trace interference still less mutually thereby an advantage of perpendicular head of the present invention is the write head pole tip to be had.
Another advantage of perpendicular head of the present invention is that the pitch angle that can be independent of the wall side of write head pole tip is controlled wide.
Another advantage of perpendicular head of the present invention be make easier because needn't make great efforts to control the pitch angle simultaneously and the road is wide.
Another advantage of perpendicular head of the present invention is that product yield expection meeting is higher, because control the pitch angle independently and the road is wide.
Read following detailed with reference to accompanying drawing, undoubtedly these and other feature and advantage will become more obvious for a person skilled in the art.
Description of drawings
Accompanying drawing does not meet ratio as actual device, and it is provided to be used to illustrate the present invention described herein.
Fig. 1 illustrates the vertical view of exemplary disc drive;
Fig. 2 illustrates the skeleton view of exemplary slide block and cantilever;
Fig. 3 illustrates the vertical view of exemplary reading/write head;
Fig. 4 is the cross-sectional view of exemplary vertical write head;
Fig. 5-the 6th, the vertical view of the P3 pole tip that does not have the inclined-plane of the write head of prior art, with and with the interaction in two adjacent data roads;
Fig. 7 is the vertical view of bevelled P3 pole tip of the write head of prior art, and with the interaction in two adjacent data roads;
Fig. 8-the 9th, the vertical view of the bevelled P3 pole tip of the write head of prior art, its wall are formed the inclined-plane and the road reductions is little;
Figure 10 is the vertical view of the hexagon P3 pole tip of write head of the present invention, and its wall is formed the inclined-plane but its road is wide to be kept perfectly;
Figure 11-the 18th, the view in each stage in the manufacturing of hexagon P3 pole tip of the present invention; And
Figure 19 is the detailed top view of hexagon P3 pole tip of the present invention.
Embodiment
Fig. 1 generally illustrates exemplary magnetic disk drive 2, and it has one or more magnetic data storage diskette 4, and magnetic data storage diskette 4 has the data track 6 that writes and read by data read/writing station 8.Data read/and writing station 8 comprises actuator arm 10 and cantilever 12, and cantilever 12 supports one or more magnetic head 14 that is included in one or more slide block 16.
Fig. 2 illustrates in greater detail the slide block 16 that cantilever 12 is supporting.Magnetic head 14 is shown by dashed lines, and more detailed in Fig. 3 and Fig. 4.Magnetic head 14 comprises coil 18.
Below the slide block of discussing had the structure that is commonly referred to perpendicular head.In the disk drive of this type, the magnetic field orientating of the position of institute's canned data is the planar quadrature with dielectric film, and thereby perpendicular to the direction of annular data track, its title is come therefrom.Write the utmost point after common head for perpendicular recording comprises, write with this and return before extremely magnetic-coupled or antipole and write the conduction magnetizing coil of the utmost point around this.
Fig. 4 is the side cross-sectional view of the write head part of representative perpendicular head 30.Slide block 16 has air cushion surface (ABS) 22, and it flies on the surface of hard disk 24.Dish 24 comprises the high-coercive force magnetosphere that is also referred to as hard magnetic layer 26, and it is manufactured on the soft magnetosphere 28.
Perpendicular head 30 generally includes read head, and it is not shown here.Write head partly comprises the first magnetic pole P134, and it is manufactured on the insulation course 36.The inductive coil structure 38 that comprises coil 18 is manufactured on the P1 utmost point 34.Coil turn 18 is formed in the electric insulation layer 42 usually.Second magnetic pole layer that is commonly referred to P2 shaping layer 44 is manufactured on the inductive coil structure 38.Magnetic back of the body distance piece (magnetic back gappiece) 46 connects the back portion of the P1 utmost point 34 and P2 shaping layer 44, makes magnetic flux to flow between them.P2 be shaped layer 44 be manufactured so that it with the remainder of ABS 22 between leave gap 48, and stride across the alumina filled thing of surface deposition of wafer, this causes filling the be shaped gap 48 of layer 44 front of P2.P3 layer 50 is also referred to as probe layer, comprises P3 pole tip 52, and with P2 layer 44 flux communication that are shaped.P2 is shaped layer 44 with flux channeled and be directed in the P3 pole tip 52.
Magnetic head 30 is encapsulated then, for example adopts the deposition of alumina layer 54.Then, wafer is cut into the magnetic head of embarking on journey, and the ABS surface of magnetic head polished carefully and grind, thereby forms discrete magnetic head.
The electric current of the inductive coil structure 38 of flowing through will cause the flow through magnetic pole 34,52 of magnetic head of magnetic flux 20, and the direction of this place's magnetic flux flow depends on the sense of current through this inductive coil.On a direction, electric current will cause magnetic flux 20 flow through P2 be shaped layer 44, P3 layer 50, arrive narrow pole tip 52, enter the hard formation 26 and the soft formation 28 of hard disk 24.Magnetic flux 20 causes magnetized data bit to be recorded in the high coercivity layer hard formation 26, and the magnetic field of this place's data bit is perpendicular to the surface of dish 24.Magnetic flux flows in the soft magnetic underlayer 28 then, and disperses during towards the P1 utmost point 34 loopbacks when it.Magnetic flux is flowed through then and is carried on the back spacer shims 46 arrival P2 shaping layers 44, thereby finishes flux circuit.In such perpendicular write head, ABS 22 P1 of the place utmost points 34 are important much larger than P3 pole tip 52, thereby when the magnetic flux that high-coercive force hard magnetic layer 26 is gone out turns back to P1 utmost point layer 34 its density reduce greatly and will can magnetically not influence or the hard disk that overturns on the magnetic field of data bit, the position on for example adjacent data track with the road that just is being written into.
In order to help to understand novelty of the present invention, with the top prior art manufacturing process of discussing with reference to Fig. 8-9 relatively be useful.In the manufacturing of bevelled P3 pole tip 62, in making the bevelled process in the side that is called wall 64, common convention is to use ion to grind bundle in the prior art, and it grinds shown in the direction arrow 9 at angle as Fig. 8 intermediate ion.This is shaped P3 pole tip 62, produces pitch angle 3.Yet, be difficult to not only control the angle of ion grinding bundle but also control its location, side.As a result, the wall 64 of P3 pole tip 62 not only has the inclined-plane, and this grinding technics causes the overall width of P3 pole tip 62 to reduce, as shown in the dashed region that loses in the process of making the right-hand side inclined-plane.Road wide 5 is determined by the overall width of P3 pole tip 62, and is as shown in arrow 5.This has the unexpected effect that changes road wide 5 when producing pitch angle 3.When the left-hand side that makes P3 pole tip 62 also has the inclined-plane, shown in Fig. 9 (prior art), thereby lose another zone and overall width further reduces and then road wide 5 when further reducing, this problem has been exacerbated.
In other words, in prior art processes, road wide 5 and pitch angle 3 are not independent controls.Final road wide 5 depends on into the control of restrainting during the ion grinding technics at angle, and keeps the good control aspect existing problems to these two variablees traditionally at the same time.The uncertainty of this control causes the productive rate of difference, and to be lower than tolerable limit too many because the wide size in road can easily be reduced to, thereby must abandon whole P3 pole tip structure.
On the contrary, the P3 pole tip of write head of the present invention is shown among Figure 10 and shows in greater detail in Figure 19.Compare with the pole tip of prior art, this P3 pole tip has unique and novel shape and structure, and has 6 limits rather than trapezoidal prior art common 4, for the purpose of this discussion, is referred to as hexagon P3 pole tip 70.Although will describe the method that is used to make hexagon P3 pole tip 70 in more detail below, usually, hexagon P3 pole tip 70 has by the ion grinding technics of the wall that impinges perpendicularly on the P3 material wide by 5 with the definite road of high precision.The step of back comprises that using ion with pitch angle 3 grinds the source, but part P3 is arranged by interim mask arrangement crested or shielding.The part of this conductively-closed will be called as rectangle part 72, and it is wide that this part keeps grinding the complete road that produces by the initial ion of vertical incidence.Thereby road wide 5 and pitch angle 3 are independent control, and the higher productive rate of productive rate that allows refined control more and then produce than art methods.As mentioned above, hexagon P3 pole tip 70 of the present invention is compared with the trapezoidal P3 pole tip of prior art has different shapes and structure, and self compared with prior art is novel.
Figure 11-18 illustrates each stage of the manufacturing of hexagon P3 pole tip 70 structures of observing from ABS, and following discussion is whole with reference to these figure generally.Among Figure 11, the aluminium oxide Al of the layer 44 (see figure 4) front that are shaped
2O
3Insulation course 74 has been deposited.The P3 utmost point can comprise high magnetic moment (B for 76 layers
s) stacked layer and nonmagnetic stacked utmost point material, for example be respectively CoFe or CoFeN or NiFe, and Cr, Al
2O
3, Ru, Rh etc., its be deposited on alumina insulating layer 74 and the layer 44 that is shaped on.On this, deposit Ta/Rh, Al
2O
3Or 78 layers of the thin non magnetic retes of C, it can act as the block layer.
Then make the grinding mask layer 80 of Durimide, aluminium oxide, NiFe, photoresist or other material, as shown in figure 12.
Among Figure 13, use ion to grind and determine that final road is wide by 5, grind shown in the bundle direction arrow 9 as ion.This grinding operation is finished with the combination of the angle in the angular range, preferably in the scope of the vertical incidence 0-75 degree shown in the arrow 1, and is referred to as ion grinding angle 13.Grind the part of mask layer 80 protection P3 pole tips 76 and block layer 78.Ion grinds and also partly removes material and form excrescence 82 from the not crested of P3 layer 76, and it will become the rectangle part of final hexagon P3 pole tip, as following the discussion.
In Figure 14, the thin layer 84 of aluminium oxide is deposited on the total that exists in this stage, and this structure comprises P3 material 76, block layer 78 and mask layer 80.
Then, utilize reactive ion milling from mask 80 and the P3 layer 76 alumina layer that gets on as shown in arrow 11ly.Use RI to grind because with mask and P3 layer mutually ratio aluminum oxide have fast grinding rate, stay the wall part 86 of the aluminium oxide that serves as interim wall mask 88, as shown in figure 15.This reactive ion milling operation is also finished with the combination of the angle in the angular range, preferably in the scope of the vertical incidence 0-75 degree shown in the arrow 1, and is referred to as reactive ion milling angle 15.
Figure 16 illustrates next stage, and its intermediate ion grinds with the combination at the angle in vertical incidence 1 0-75 degree scope preferably and is used again, and is as shown in arrow 9 and will be called as the second ion grinding angle 19.Thereby do like this excision P3 layer 76 down to and enter alumina insulating layer 74 a little.Because compare with the P3 layer material, aluminium oxide has slower grinding rate under ion grinds, so it serves as interim wall mask 88 to protect the directly P3 material under it, has obtained the structure shown in the figure.Therefore alumina walls part 86 is served as interim wall mask 88 to cover the protected wall part 83 that comprises block layer 78, stays and will be ground the not protected wall part 85 that bundle shapes by ion.
Implement ion with oblique fire angle (glancing angle) then and grind to produce pitch angle 3, it is preferably in the normal 1 6-15 degree scope of material, shown in arrow among Figure 17 9.The same with the front, it is slower that alumina walls material 86 grinds ground than P3 layer material 76, thereby alumina walls part 86 is served as interim wall mask 88 once more.Therefore protected wall part 83 forms the rectangle part 72 of hexagon P3 pole tip 70, thus the laterally inclined inclined wall part 87 that chamfered portion 92 is arranged that produces hexagon P3 pole tip 70 to suitable angle of while wall.Like this, produce hexagon P3 pole tip 70, wherein in rectangle part 72, kept the road wide by 5.
Among Figure 18, carry out chemically mechanical polishing (CMP) to remove mask 80 and around wall mask aluminium oxide part 86 (the seeing Figure 17) of this mask.Block layer 78 serves as the stop layer that is used for CMP.Alumina filled thing 90 is deposited then to seal P3 pole tip 76 and to finish this manufacturing.
Figure 19 illustrates the detailed view of hexagon P3 pole tip 70.With dashed lines has the protected part 83 that becomes rectangle part 72 the not protected part 85 of chamfered portion 92 to separate with becoming, and this has chamfered portion 92 to have wall 64 as inclined wall 87.Also show remaining block layer 78.Do not make great efforts to make the relative scale of described part to meet ratio exactly, and be appreciated that aspect the relative dimensions in zone and a lot of possible variations can arranged aspect pitch angle 3 and the road wide 5.As mentioned above, thus method of the present invention allow the good of pitch angle 3 and wide 5 these key variables in road and independently control produce undiscovered structure in the prior art.
Although show and described the present invention with reference to certain preferred embodiment, what it should be understood that is, reading on the basis of the present disclosure, those skilled in the art without doubt can development form and details on modification.Therefore following claim intention covers all such substitutions and modifications of the spirit and scope that comprise inventive features of the present invention.
Claims (21)
1. the manufacturing hexagon that is used for head for perpendicular recording writes the method for pole tip, comprising:
A) depositing insulating layer;
B) deposition P3 layer on described insulation course;
C) deposition block layer on described P3 layer;
D) on described block layer, make mask layer;
E) thus described P3 layer and described block layer are shaped forms the excrescence with excrescence wall part by described P3 layer;
F) comprising aluminum oxide layer on the described P3 layer of described excrescence wall part;
G) described alumina layer is shaped, thereby on described excrescence wall part, produce the alumina walls part, thereby produce the protected part of partly being protected by described alumina walls of described P3 layer and the not protected part of described P3 layer, described protected portion branch comprises the described excrescence of described P3 layer, and described not protected portion branch comprises the part under described excrescence of described P3 layer; And
H) when the described protected part of partly protecting described P3 layer by described alumina walls is with the rectangle part that forms described hexagon and write pole tip, make the described not protected partially-formed of described P3 layer material to form the chamfered portion that has that described hexagon writes pole tip with inclined wall part.
2. the method for claim 1, wherein:
Shaping among the E is ground by the ion that carries out with the combination of angle and is implemented, and described angle is in the scope of the normal 0-75 degree on the plane of described P3 layer.
3. the method for claim 1, wherein:
Shaping among the G is implemented by the reactive ion milling that carries out with the combination of angle, and described angle is in the scope of the normal 0-75 degree on the plane of described material.
4. the method for claim 1, wherein:
Shaping among the H is ground by the ion under the oblique incidence corner condition and is implemented.
5. the method for claim 1, wherein:
Shaping among the H is ground by the ion under the condition of the incident angle in the normal 6-15 degree scope of described P3 layer and is implemented.
6. the method for claim 1 also comprises:
I) described hexagon being write pole tip is encapsulated in the insulating material.
7. the method at wide and pitch angle, the independent control road that writes pole tip that is used for perpendicular recording comprises:
A) determine that in a part that writes utmost point layer material described road is wide;
B) thus make protected part by the wide described part in described road that has that interim mask material protection said write utmost point material is provided, keep not protected part with processed shaping below this protected part; And
C) thus making a described not protected part have the inclined-plane produces with pitch angle one chamfered portion is arranged, this has chamfered portion to have the inclined wall part.
8. method as claimed in claim 7, wherein:
A comprises:
I) depositing insulating layer;
Ii) on described insulation course, deposit the P3 layer;
Iii) on described P3 layer, deposit the block layer;
Iv) on described block layer, make mask layer; And
Described P3 layer and described block layer are shaped, thereby form the excrescence with excrescence wall part by described P3 layer, it is wide that wherein said excrescence has described road.
9. method as claimed in claim 8, wherein:
B comprises:
I) comprising that aluminum oxide layer is to provide interim mask material on the described P3 layer of described excrescence wall part; And
Described alumina layer is shaped, thereby on described excrescence wall part, produces the alumina walls part, thereby produce the protected part of described P3 layer and the not protected part of described P3 layer.
10. method as claimed in claim 9, wherein:
C comprises:
I) when the described protected part of partly protecting described P3 layer by described alumina walls is with the formation rectangle part, make the described not protected partially-formed of described P3 layer material to be formed with chamfered portion.
11. method as claimed in claim 10 also comprises:
D) described P3 pole tip is encapsulated in the insulating material.
12. a magnetic head that comprises the hexagonal write head pole tip comprises:
Have rectangle part and the P3 pole tip that chamfered portion is arranged, determine in the described rectangle part that described road is wide, described have chamfered portion to have the inclined wall part,
Wherein when described magnetic head in use the time, this rectangle part and this have chamfered portion relative to each other to arrange along magnetic track.
13. magnetic head as claimed in claim 12, wherein:
Described inclined wall partly has the pitch angle in the normal 6-15 degree scope on a plane, states in this place, plane that the rectangle part contact is described a chamfered portion.
14. magnetic head as claimed in claim 12, wherein:
Described have chamfered portion to grind by ion to form.
15. magnetic head as claimed in claim 12 comprises also on the described rectangle part that is arranged on described P3 pole tip that with described the opposite block layer of chamfered portion arranged.
16. magnetic head as claimed in claim 12, wherein:
Described P3 pole tip is encapsulated in the insulating material.
17. a disk drive comprises:
At least one hard disk;
At least one magnetic head, this magnetic head are suitable for flying on described hard disk, are used for from described hard disk reading of data, and this magnetic head comprises the perpendicular write head with hexagon pole tip, comprising:
The P3 pole tip, it has the chamfered portion that has of wherein determining the rectangle part that the road is wide and having the inclined wall part,
Wherein when described magnetic head in use the time, this rectangle part and this have chamfered portion relative to each other to arrange along magnetic track.
18. disk drive as claimed in claim 17, wherein:
Described inclined wall partly has the pitch angle in the normal 6-15 degree scope on a plane, states in this place, plane that the rectangle part contact is described a chamfered portion.
19. disk drive as claimed in claim 17, wherein:
Described have chamfered portion to grind by ion to form.
20. disk drive as claimed in claim 17 comprises also on the described rectangle part that is arranged on described P3 pole tip that with described the opposite block layer of chamfered portion arranged.
21. disk drive as claimed in claim 17, wherein:
Described P3 pole tip is encapsulated in the insulating material.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/035,090 | 2005-01-12 | ||
| US11/035,090 US7549213B2 (en) | 2005-01-12 | 2005-01-12 | Method for independent trackwidth and wall angle control and hexagonal write head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1822096A CN1822096A (en) | 2006-08-23 |
| CN1822096B true CN1822096B (en) | 2010-06-02 |
Family
ID=36652983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2005101316178A Expired - Fee Related CN1822096B (en) | 2005-01-12 | 2005-12-15 | Method for manufacturing pole tip and controlling trackwidth and wall angle, magnetic head and disc drive |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US7549213B2 (en) |
| CN (1) | CN1822096B (en) |
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| US8028399B2 (en) * | 2007-12-16 | 2011-10-04 | Hitachi Global Storage Technologies Netherlands, B.V. | Magnetic write pole fabrication |
| US8179634B2 (en) * | 2007-12-27 | 2012-05-15 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic recording writer main pole having imbedded non-magnetic core and de-coupled pole tip |
| US8310782B2 (en) * | 2008-04-04 | 2012-11-13 | Seagate Technology Llc | Dedicated ID-OD writer with beveled pole tips and method of manufacture |
| US20090266790A1 (en) * | 2008-04-28 | 2009-10-29 | Hamid Balamane | Method of making a magnetoresistive reader structure |
| US7907360B2 (en) * | 2008-07-14 | 2011-03-15 | Seagate Technology Llc | Setting writer boundaries for multiple writers |
| US8196285B1 (en) | 2008-12-17 | 2012-06-12 | Western Digital (Fremont), Llc | Method and system for providing a pole for a perpendicular magnetic recording head using a multi-layer hard mask |
| US8254060B1 (en) | 2009-04-17 | 2012-08-28 | Western Digital (Fremont), Llc | Straight top main pole for PMR bevel writer |
| US8225488B1 (en) | 2009-05-22 | 2012-07-24 | Western Digital (Fremont), Llc | Method for providing a perpendicular magnetic recording (PMR) pole |
| US9346672B1 (en) | 2009-08-04 | 2016-05-24 | Western Digital (Fremont), Llc | Methods for fabricating damascene write poles using ruthenium hard masks |
| US8375564B1 (en) | 2009-12-08 | 2013-02-19 | Western Digital (Fremont), Llc | Method for fabricating a pole of a magnetic transducer |
| US8277669B1 (en) | 2009-12-21 | 2012-10-02 | Western Digital (Fremont), Llc | Method and system for providing a perpendicular magnetic recording pole having a leading edge bevel |
| US8458892B2 (en) * | 2010-05-11 | 2013-06-11 | Western Digital (Fremont), Llc | Method for providing a perpendicular magnetic recording transducer using a low energy mill |
| US8444866B1 (en) | 2010-09-21 | 2013-05-21 | Westen Digital (Fremont), LLC | Method and system for providing a perpendicular magnetic recording pole with a multi-layer side gap |
| US8705205B1 (en) | 2011-06-27 | 2014-04-22 | Western Digital (Fremont), Llc | Magnetic recording head having a dual sidewall angle |
| US8468683B2 (en) | 2011-10-31 | 2013-06-25 | HGST Netherlands B.V. | High bevel angle magnetic writer pole fabrication process |
| US8792208B1 (en) | 2012-05-25 | 2014-07-29 | Western Digital (Fremont), Llc | Method for providing side shields having non-conformal regions for a magnetic recording transducer |
| US8619509B1 (en) * | 2012-08-08 | 2013-12-31 | Seagate Technology Llc | Write pole design |
| US9478236B1 (en) | 2012-09-28 | 2016-10-25 | Western Digital (Fremont), Llc | Perpendicular magnetic recording write head |
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| US9007719B1 (en) | 2013-10-23 | 2015-04-14 | Western Digital (Fremont), Llc | Systems and methods for using double mask techniques to achieve very small features |
| US9280990B1 (en) | 2013-12-11 | 2016-03-08 | Western Digital (Fremont), Llc | Method for fabricating a magnetic writer using multiple etches |
| US9305583B1 (en) | 2014-02-18 | 2016-04-05 | Western Digital (Fremont), Llc | Method for fabricating a magnetic writer using multiple etches of damascene materials |
| US8988825B1 (en) | 2014-02-28 | 2015-03-24 | Western Digital (Fremont, LLC | Method for fabricating a magnetic writer having half-side shields |
| US9286919B1 (en) | 2014-12-17 | 2016-03-15 | Western Digital (Fremont), Llc | Magnetic writer having a dual side gap |
| US9530443B1 (en) | 2015-06-25 | 2016-12-27 | Western Digital (Fremont), Llc | Method for fabricating a magnetic recording device having a high aspect ratio structure |
| US9431038B1 (en) | 2015-06-29 | 2016-08-30 | Western Digital (Fremont), Llc | Method for fabricating a magnetic write pole having an improved sidewall angle profile |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN1822096A (en) | 2006-08-23 |
| US7549213B2 (en) | 2009-06-23 |
| US20060152850A1 (en) | 2006-07-13 |
| US20080002309A1 (en) | 2008-01-03 |
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