CN1821789B

CN1821789B - Vertical probe carb

Info

Publication number: CN1821789B
Application number: CN 200510051673
Authority: CN
Inventors: 洪文兴
Original assignee: MJC Probe Inc
Current assignee: MJC Probe Inc
Priority date: 2005-02-16
Filing date: 2005-02-16
Publication date: 2010-05-26
Anticipated expiration: 2025-02-16
Also published as: CN1821789A

Abstract

This invention relates to a vertical probe card including a CB and a needle group, in which, the needle group has a base part and several probes set on the base part and connected with the CB, each probe has a middle part and a pinpoint part, the middle part is set between the base part and the pinpoint and the elastic coefficient of which is smaller than that of the base part, when the pinpoint part leans against a being tested subject, the middle part is in the bending state against the base part.

Description

Vertical probe carb

Technical field

The present invention is that the probe of using with integrated circuit is relevant, is meant a kind of probe with vertical probe especially.

Background technology

Generally be used to test the probe of integrated circuit, have some probes that are vertical configuration usually, probe mainly is to utilize each probe to electrically connect the weld pad and a tester table of a determinand, makes each probe can be in order to transmit test signal; And each probe is to make via the machining mode with metal wire rod, make probe be bending, when each probe was connected to determinand in the mode that applies predetermined external force, the elasticity that can utilize sweeping structure to produce absorbed external force, makes each probe be connected to determinand really.

Yet, because above-mentioned sweeping probe is to utilize as machining modes such as forging or punching presses to make, pass through in the made same a collection of probe of machining, the size of each probe can produce bigger variation along with manufacture process, make each probe have different structural strengths, and then cause each probe can't be with average external force butt determinand; In addition, probe must be fixed in a base portion according to bending direction respectively seriatim after manufacturing is finished, and not only manufacture method is comparatively complicated, makes cost comparatively expensive, and each probe also comparatively is difficult for the location; If the weld pad quantity of determinand is more, spacing is less, or the arrangement position of weld pad is when changing, and probe just is not easy the accurately position of corresponding weld pad, and location and be fixed in base portion, makes probe can't be applicable to high pin number and high-frequency test.

Summary of the invention

Therefore, fundamental purpose of the present invention is to be to provide a kind of vertical probe carb, and its probe has elastic construction, and can need and the corresponding elasticity coefficient of adjusting according to test, and the deformation direction after stressed.

Another object of the present invention is the method for making that is to provide a kind of vertical probe, can need in response to the test of different determinands, and the corresponding position that changes probe, and mode that can batch production produces probe, and manufacture process is comparatively simple, and cost is lower.

Take off purpose for before reaching, a kind of vertical probe carb of the present invention is characterized in that, includes:

One circuit board; And

One pin group has a base portion and some probes, and respectively this probe is to be located at this base portion and to be electrically connected at this circuit board; Respectively this probe has a pars intermedia and a needle tip, this pars intermedia is to be located between this base portion and this needle tip, the elasticity coefficient of this pars intermedia is less than the elasticity coefficient of this base portion, the sectional area of this pars intermedia is the sectional area less than this base portion, the pars intermedia of this probe is to be a sidewall, pars intermedia is that the mode with skew pedestal and the axial preset distance of needle tip is provided with, so that this needle tip is when being connected to a determinand, this pars intermedia is to be bending with respect to this base portion.

A kind of vertical probe of the present invention is characterized in that, includes:

One base portion;

One needle tip is in order to butt one determinand; And

One pars intermedia, be to be located between this base portion and this needle tip, the elasticity coefficient of this pars intermedia is less than the elasticity coefficient of this base portion, the sectional area of this pars intermedia is the sectional area less than this base portion, the pars intermedia of this probe is to be a sidewall, and pars intermedia is to be provided with in the mode that is offset pedestal and the axial preset distance of needle tip;

Thus, when this needle tip was connected to this determinand, this pars intermedia promptly was bending with respect to this base portion.

Thus, probe structure of the present invention has elasticity, and can need and corresponding elasticity coefficient, the position adjusted according to test, and the deformation direction after stressed.

Description of drawings

Below, conjunction with figs. is enumerated some preferred embodiments, and structure of the present invention, method for making and effect are elaborated, and wherein used the description of the drawings is as follows, wherein:

Fig. 1 is the schematic perspective view of the present invention's first preferred embodiment;

Fig. 2 is the front elevation of the present invention's first preferred embodiment, only shows the wherein structure of a probe;

Fig. 3 is the cut-open view of 3-3 hatching line among Fig. 2;

Fig. 4 is analogous to Fig. 2, is to be application synoptic diagram of the present invention:

Fig. 5 is the method for making synoptic diagram of the present invention's first preferred embodiment, and wherein sacrifice layer is laid in a plane:

Fig. 6 is the method for making synoptic diagram of the present invention's first preferred embodiment, and wherein structural sheet is to cover in the plane and sacrifice layer;

Fig. 7 is the method for making synoptic diagram of the present invention's first preferred embodiment, mainly is to form a synthetic layer on the expression plane;

Fig. 8 is the method for making synoptic diagram of the present invention's first preferred embodiment, and a sacrifice layer is laid in wherein synthetic layer top;

Fig. 9 is the method for making synoptic diagram of the present invention's first preferred embodiment, and wherein structural sheet is end face and the sacrifice layer that covers in synthetic layer;

Figure 10 is the method for making synoptic diagram of the present invention's first preferred embodiment, mainly is that expression two synthetic layers are and pile up shape;

Figure 11 is the method for making synoptic diagram of the present invention's first preferred embodiment, mainly represents the stacked state of some synthetic layers;

Figure 12 is the method for making synoptic diagram of the present invention's first preferred embodiment, mainly represents the stacked state of some synthetic layers;

Figure 13 is the method for making synoptic diagram of the present invention's first preferred embodiment, the state after the expression sacrifice layer is removed;

Figure 14 is the front elevation of the present invention's second preferred embodiment;

Figure 15 is the front elevation of the present invention's the 3rd preferred embodiment:

Figure 16 is the front elevation of the present invention's the 4th preferred embodiment;

Figure 17 is the front elevation of the present invention's the 5th preferred embodiment;

Figure 18 is the front elevation of the present invention's the 6th preferred embodiment;

Figure 19 is the front elevation of the present invention's the 7th preferred embodiment: and

Figure 20 is the front elevation of the present invention's the 8th preferred embodiment.

Embodiment

Seeing also shown in Figure 1ly, is the vertical probe carb 10 that is provided for the present invention's first preferred embodiment, includes a circuit board 12 and a pin group 14, and pin group 14 has one and is tabular base portion 16, and somely is the probe 18 that array-like stands on base portion 16; To shown in Figure 4, each probe 18 is to make with conductive material (for example nickel, plane, copper, beryllium, cobalt, or the alloy of above-mentioned element etc.), includes a cylinder 20, a needle tip 22 and a pars intermedia 24 as Fig. 2; The cross section of cylinder 20 can be rounded, square, or polygon, cylinder 20 is the end faces that are integrally formed in base portion 16, the top of needle tip 22 is vertically the taper towards the end face convergent, pars intermedia 24 can be round bar or platy structure, and the sectional area of pars intermedia 24 is respectively less than the sectional area of cylinder 20 and needle tip 22 bottoms, pars intermedia 24 is the end faces that are integrally formed in cylinder 20 in coaxial upright mode, needle tip 22 then is integrally formed in the top of pars intermedia 24, can utilize end face butt one determinand 26 that is taper.

Via said structure, as shown in Figure 4, because the sectional area of pars intermedia 24 is the sectional areas less than cylinder 20, and the height of pars intermedia 24 is greater than the height of cylinder 20, frustrate Qu Yuanli (Buckling Theory) according to mechanical material, make the elasticity coefficient of pars intermedia 24 less than the elasticity coefficient of cylinder 20, when the needle tip 22 of probe 18 is connected to determinand 26, pars intermedia 24 all can afford pressure via needle tip 22 with cylinder 20, pars intermedia 24 after being under pressure immediately with respect to cylinder 20 flexural deformations, make each probe 18 have elasticity, the flatness on plane is not good even determinand 26 and probe 18 connect, still can utilize each probe 18, make each needle tip 22 all can be connected to determinand 26 with elastic force; If in the time of must adjusting the butt power between determinand 26 and the probe 18, can directly change the material of pars intermedia 24, can reach the purpose of the elasticity coefficient that changes probe 18.

To shown in Figure 13, is the manufacture method for each probe 18 in the probe 10 of the present invention's first preferred embodiment as Fig. 5, and probe 18 is mainly piled up mutually by 30 on some synthetic layers and forms, and the method for making of each synthetic layer 30 has three basic steps, is respectively:

Step 1: as shown in Figure 5, establish a sacrifice layer 31 with predetermined profile in a plane 40.

Step 2: as shown in Figure 6,40 lay a structural sheet 33 in the plane, make structural sheet 33 be covered in plane 40 and sacrifice layer 31 tops fully.

Step 3: as shown in Figure 7, process and make the surface of structural sheet 33 be flat condition, sacrifice layer (3 " flush in structural sheet 33; and the end face of sacrifice layer 31 is revealed in the end face of structural sheet 33; form the wherein synthetic layer 30 in this method for making; this moment, the shape of structural sheet 33 was that cross section for each probe 18 is the shape that array-like is located at plane 40, and the position of each probe 18 can need and the corresponding position of adjusting according to the test of determinand 26.

Extremely shown in Figure 10 as Fig. 8, utilize above-mentioned three basic steps, pile up another synthetic layer 30 ' at the end face of synthetic layer 30, make two sacrifice layers 31,31 ' and structural sheet 33,33 ' link together, use the cylinder 20, the pars intermedia 24 that form probe 18 gradually, and needle tip 22 structures; And as Figure 11 and shown in Figure 12, continue to carry out piling up of each synthetic layer 30, after all complete shaping in the cross section at probe 18 each position, as shown in figure 13, utilize etching mode that the sacrifice layer 31 of each synthetic layer 30 is removed again, can form probe 18 structures of array-like, reach batch purpose of production probe 18.

Because the method for making of above-mentioned probe 18 is to belong to little shadow mode of production, mismachining tolerance can reach time micron (Submicron) level, can make same inferior each probe 18 of producing have unanimity and the preferable quality of precision; And, when making probe 18, only need obtain the distributing position of the weld pad of determinand 26 and each probe 18 mutual butt in advance, the shape of then corresponding each structural sheet 33 of design, the probe 18 that can be shaped and to meet the test needs, reach elasticity and adjust the purpose of probe location, and then can be applicable to high frequency or the test of the integrated circuit of high pin number.

Thus, vertical probe carb provided by the present invention can need and corresponding elasticity coefficient and the position of adjusting probe according to test, and the deformation direction of probe after stressed, and can utilize the mode of batch production to produce probe, manufacture process is comparatively simple, and cost is lower.

In addition, the present invention can be shaped in circuit board with base portion, makes each probe directly be located at circuit board; And the structure of probe also can be designed to different forms, in order to change the elasticity coefficient of probe, as shown in figure 14, be probe 50 structures for the present invention's second vertical probe carb that preferred embodiment provides, probe 50 has a base portion 51, a needle tip 52 equally, an and pars intermedia 53 that is connected in base portion 51 and needle tip 52, characteristics are that pars intermedia 53 includes two interval preset distances, and the microscler sidewall 54 that is parallel to each other makes pars intermedia 53 have the elasticity that is different from first preferred embodiment; As shown in figure 15, be probe 55 for the present invention's the 3rd vertical probe carb that preferred embodiment provides, characteristics are that pars intermedia 56 has three sidewalls 57, in order to provide strength ratio second preferred embodiment high probe structure; And as shown in figure 16, the probe 60 of the present invention's the 4th vertical probe carb that preferred embodiment provides, intermediate portion 61 has three sidewalls 62, and the linking part 63 of a connection three sidewalls 62, and the intensity of strength ratio second preferred embodiment of probe 60 is more improved.

The present invention also can utilize the structure that changes probe, reaches the purpose of control probe deformations direction; Please consult shown in Figure 17 again, it is probe 65 for the present invention's the 5th vertical probe carb that preferred embodiment provides, intermediate portion 66 has three sidewalls 67, the sectional area of each sidewall 67 is neither identical, when needle tip 69 is stressed, can utilize each sidewall 67 structure of pars intermedia 66, the bending direction of control probe 65; Same principle also is applied to probe 70 structures of the present invention's the 6th vertical probe carb that preferred embodiment provides, as shown in figure 18, the pars intermedia 71 of probe 70 is to be a sidewall, pars intermedia 71 is to be provided with in the mode that is offset pedestal 72 and needle tip 73 axial preset distances, with the bending direction of control probe 70; Again as shown in figure 19, the probe 75 of the present invention's the 7th vertical probe carb that preferred embodiment provides because pars intermedia 76 is to be the shape that folds, makes pars intermedia 76 have elasticity simultaneously and also can design deformation direction after stressed in advance; In addition, as shown in figure 20, be probe 80 for the present invention's the 8th vertical probe carb that preferred embodiment provides, characteristics are that then the top of needle tip 81 is and the desaxe preset distance of probe 80, uses the purpose that reaches change probe 80 deformation directions equally.

Claims

1. a vertical probe carb is characterized in that, includes:

One circuit board; And

2. a vertical probe is characterized in that, includes:

One base portion;

One needle tip is in order to butt one determinand; And