CN1817564A - Loading and unloading system and method for grinding plates - Google Patents
Loading and unloading system and method for grinding plates Download PDFInfo
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- CN1817564A CN1817564A CN 200610017492 CN200610017492A CN1817564A CN 1817564 A CN1817564 A CN 1817564A CN 200610017492 CN200610017492 CN 200610017492 CN 200610017492 A CN200610017492 A CN 200610017492A CN 1817564 A CN1817564 A CN 1817564A
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Abstract
A loading-unloading system for the plate object to be ground is composed of fixture, loading unit, unloading unit and cleaning unit. Its application includes such steps as loading the plate object onto fixture while absorbing it by an adsorption pad of fixture, stripping it from said adsorption pad, taking it by suction cup, and washing the fixture.
Description
Technical field
The present invention relates to a kind of loading and unloading device that is used for plate object at process of lapping, a kind of the 5th generation (G5) 5 and loading and unloading system and the using method of above liquid crystal glass base of the 5th generation in process of lapping of being applicable to is provided especially.
Background technology
Maximization along with liquid crystal display device (LCD), glass substrate size as carrier is bigger wideer, the glass substrate length and width size of G7 has reached 2150 * 1800 at present, because production cost is higher, in the liquid crystal glass base production technology for improving yields as far as possible, save any glass substrate that can remove defective, need the surface of the glass substrate that can remove defective is ground, the loading and unloading when large-sized like this glass substrate is just given grinding have brought difficulty.
The structure of small-sized glass substrate polishing device such as Fig. 1-1 and Fig. 1-2, lapping device is made of grinding head 10 and rotary table 11 two parts.Grinding head 10 can rotate and overturn, and is used for the loading and unloading of glass substrate and fixing when grinding; The rotary table 11 of abrasive disk is installed, drives abrasive disk by rotation glass substrate G is ground.The grinding head 10 of this lapping device is slightly big than glass substrate G, and grinding head 10 belongs to convertible, load glass substrate when grinding head 10 is turned to the upright position by reverses direction 12 shown in Fig. 1-2, be turned to horizontal level as Fig. 1-1 grinding head 10 after by vacuum suction fixing glass substrate, by glass substrate being ground with the relative motion of spin finishing dish.
Along with the increase of glass substrate area, large-size glass substrate (G5 or more than the G5) certainly will make the grinder height increase if continue to use this convertible lapping device, and the loading and unloading operation easier of glass substrate will be more with difficulty.G5 glass substrate length and width are of a size of 1300 * 1100.
Above-mentioned lapping device, the loading of its glass substrate generally need two or more operating personnel to carry out work simultaneously, roll glass substrate bit by bit it is adsorbed onto on the grinding head, and this stowage wastes time and energy, and effect is also not so good.
Above-mentioned lapping device, manual type is adopted in the unloading of its grinding head top glass substrate, 2 or several operating personnel blow on glass substrate and grinding head are pasted the edge of face, blow water in, peel off (as shown in Figure 2) from 2 bights or 4 bights of glass substrate.Because the 10mm place that thickness of glass substrate is ultra-thin, quality requirement is high again, the people can only contact glass-based edges of boards portion, when peeling off glass substrate, operating personnel must be meticulously, bit by bit peel off from grinding workbench at leisure, when peeling off, the glass substrate of little generation (below the G4) generally needs 2-3 people, time-consuming about more than 3 minutes, and the liquid crystal glass base area of big generation (G5 or more than the G5) is big, and the people who needs is more, the time is longer.This method is applied to the not only consuming time but also effort of peeling off of big generation liquid crystal glass base, is restricting the production efficiency of grinder, obviously can't satisfy big in batches demand of producing, and is difficult to realize the automation of grinding.
Therefore, present situation for the loading and unloading of improving the glass substrate grinder, raising grinder efficient, the time of saving loading and unloading, reduction labour consume, realize the automatic loading and unloading of glass, design the higher device of being convenient to the glass substrate loading and unloading that is used for grinder of a cover efficient and are necessary very much.
Summary of the invention
The object of the present invention is to provide a kind of loading and unloading system that plate object grinds that is used for, by plate object being loaded on the anchor clamps, anchor clamps and plate object are transported on the grinder as an integral body and grind, the loading and unloading of the above liquid crystal plate object of G5 or G5 on grinder have been made things convenient for, significantly reduce the time of loading and unloading plate object on grinder, improved the efficient of grinder.
Another purpose of the present invention is to provide the using method of this system, this system has designed a cover plate object loading attachment, can load and attach plate object automatically to anchor clamps by this device, has realized the automatic loading of plate object, reduce labor cost, saved the loading time of plate object.
In order to achieve the above object, technical scheme of the present invention is: adopt the carrier of anchor clamps as plate object, plate object is loaded on the anchor clamps, and plate object is done the as a whole loading and unloading of carrying out grinder together with anchor clamps; By a cover plate object loading attachment, plate object is adsorbed onto on the absorption cushion block of anchor clamps; By a cover plate object withdrawing device, make plate object peel off and take out with sucker from the absorption cushion block of anchor clamps; Anchor clamps are reusable by cleaning the back.This system comprises: anchor clamps; The plate object loading attachment; The plate object withdrawing device; The anchor clamps cleaning device.
Anchor clamps, be used to load the plate object that will grind, comprise metallic plate, framework, framework retaining mechanism and absorption cushion block, it is characterized in that: the absorption cushion block is being pasted on antirust elastic metal sheet surface, periphery has a framework, and it is detachable that framework has an end of a frame at least.Metallic plate has favorable elasticity and antirust, and its thickness is 0.1~1.0 (being preferably 0.2-0.3mm); Framework is used for supporting and the tension metal plate, is made up of fixed border and active border, and any two opposite edges of fixed border and metallic plate is fixed together, and active border and fixed border detachably link together by the framework retaining mechanism; The framework retaining mechanism is used for fixed border and active border locking; Adsorb cushion block, stick on the upper surface of metallic plate, be used to adsorb plate object, material can be selected the polyurethane rubber of class sponge shape for use.
The plate object loading attachment comprises: frame; The anchor clamps conveying mechanism is arranged on the frame, and two fixed borders with support fixture are distributed in two row's running roller and running roller driving mechanisms of frame both sides; The wetting mechanism of absorption cushion block is arranged on the frame top, is positioned at the wetting station of absorption cushion block place, has across the spray head at the anchor clamps conveying mechanism; Attach mechanism, be arranged on plate object and attach the station place, can support fixture and plate object attached on the anchor clamps.The plate object loading attachment course of work can be divided into five stations successively by function: station 1, and anchor clamps load, and manually anchor clamps are loaded on the anchor clamps conveying mechanism, by running roller anchor clamps are transported to station 2; Station 2, the absorption cushion block is wetting, in the anchor clamps traveling process absorption cushion block wetting mechanism by spray head the absorption cushion block of anchor clamps is sprayed wetting so that the absorption of plate object; Station 3, plate object is written into, and support platform holds up anchor clamps, utilizes robot or sucker to take out from the semi finished package case of plate object automatically on the absorption cushion block that plate object is put into the anchor clamps that station 2 sends; Station 4, plate object attaches, after plate object is transported to this station with anchor clamps, attach mechanism by rolling support platform and hold up anchor clamps (leaving the running roller of conveying mechanism slightly) and to behind the anchor clamps location, roll the plate object upper surface by milling roller with suitable pressure, plate object is adsorbed onto on the absorption cushion block of anchor clamps, and the anchor clamps that adsorb then behind the plate object are transported to station 5; Station 5, plate object takes out, and manually anchor clamps is taken out to be transported on the grinder as an integral body together with plate object in the lump and grinds.
The plate object withdrawing device comprises: support; The workbench conveying mechanism is arranged on the support, has the track and the driving mechanism that are used to support conveying workbench; Workbench is arranged on the workbench conveying mechanism, has work top and the anchor clamps detent mechanism of laying anchor clamps, is used to load and locate the anchor clamps that plate object is housed; Mechanism for stripping is arranged on plate object and peels off station with the absorption cushion block, and plate object and absorption cushion block are peeled off, and is made up of curved surface saddle, curved surface saddle driving mechanism, up-stripping mechanism etc.; The sucker unloading device, be arranged on plate object and peel off the top of station and plate object taking-up station, be used to draw plate object and be fetched into the air supporting positioning table, have one group of telescopic sucker, sucker link (one group of sucker is connected together, it is evenly distributed on the same horizontal plane) etc.; The air supporting positioning table is arranged on plate object and takes out station, can carry out the air supporting location to plate object.
The plate object withdrawing device, its course of work is divided three stations successively by function: station 1, anchor clamps load the location, manually the anchor clamps that plate object is housed are loaded on the workbench, the groove by the work top both sides and the alignment pin of anchor clamps detent mechanism position the fixed border of anchor clamps, can be as required behind the location simply clean air-dry (when preventing that plate object from taking out to the mill base slurry on plate object surface, foreign material such as mill base slurry cause scuffing to plate object), active border and fixed border with anchor clamps breaks away from then, by the workbench conveying mechanism workbench is transported to station 2; Station 2, plate object is peeled off, push up the metallic plate of positioning fixture on the curved surface saddle by the plate object mechanism for stripping, make metallic plate drive plate object and the bending of absorption cushion block, the elastic restoring force that produces when utilizing plate object crooked, blow at the plate object and the edge part of absorption cushion block contact-making surface by up-stripping mechanism simultaneously, add and take out the suction that sucker makes progress, the absorption cushion block of plate object and anchor clamps is peeled off, plate object after peeling off is fetched into the taking-up station by sucker, and the anchor clamps of taking plate object away turn back to station 1, after the framework retaining mechanism by anchor clamps is secured together active border and fixed border, takes out anchor clamps and deliver to the anchor clamps cleaning device and clean; Station 3, plate object takes out, before the plate object bending, the sucker of sucker unloading device holds plate object, after the absorption cushion block of plate object and anchor clamps is peeled off, locating on plate object transfer to the air supporting positioning table, be convenient to interface by balladeur train or robot with other manufacturing procedure and equipment.
Anchor clamps cleaning device, its course of work are divided into six stations, are respectively: anchor clamps are written into station, spray station, roller brush washing station, rinsing station, air-dry station and anchor clamps and take out station.Anchor clamps vertically hang to be lifted on the circular orbit and transmit, and anchor clamps are written into station at anchor clamps and vertically hang after lifting is written into, and through spray, roller brush or the cleaning of dish brush, rinsing, station such as air-dry, take out station to anchor clamps and take out.Anchor clamps are reusable after cleaning device cleans.
Description of drawings
The structural representation sketch of the small-sized glass substrate polishing device of Fig. 1-1 expression,
Fig. 1-2 represents the structural representation sketch of another kind of small-sized glass substrate polishing device,
Fig. 2 is the simplified schematic diagram of loading and unloading glass substrate on the grinding head of small-sized glass substrate polishing device,
Fig. 3 represents the front view of anchor clamps of the present invention,
Fig. 4 represents the vertical view of anchor clamps of the present invention,
Fig. 5 represents the right view of anchor clamps of the present invention,
Fig. 6 represents the framework retaining mechanism cutaway view of anchor clamps of the present invention,
Fig. 7 represents the system diagram of plate object loading attachment of the present invention,
Fig. 8 represents that plate object of the present invention attaches the sketch of mechanism,
Fig. 9 represents that anchor clamps of the present invention are loaded in the schematic diagram on the grinder,
Figure 10 represents the system diagram of plate object withdrawing device of the present invention,
Figure 11 represents the loading location front view of anchor clamps of the present invention on workbench,
Figure 12 represents the loading location vertical view of anchor clamps of the present invention on workbench,
Figure 13 represents the sketch of mechanism for stripping of the present invention and sucker unloading device,
Figure 14 represents anchor clamps cleaning device sketch of the present invention.
The specific embodiment
Below each assembly figure number of accompanying drawing is described
Anchor clamps:
100. anchor clamps, 10. pin, 20. fixed borders, 30. active border, 40. metallic plates, 41. absorption cushion blocks, 43. the grinder workbench, 44. grinding heads, 50. framework retaining mechanisms, 51. the framework release lever, 55.V type top, 60. headblocks, 65. spring, 70. the rear portion cushion block, 85. spring cappings, 90. puller bolts;
The plate object loading attachment:
I-STA I. anchor clamps load station (station 1), I-STA II. adsorbs the wetting station of cushion block (station 2), and the I-STAIII. plate object is written into station (station 3), and I-STA IV. plate object attaches station (station 4), and I-STA V. anchor clamps take out station (station 5)
1310. packing case, 1311. robots
1320. the anchor clamps conveying mechanism, 1321. frames, 1324. bearings, 1325. running rollers, 1330. sprocket wheels, 1332. chains, 1340. wetting mechanisms, 1342. water pipes, 1343. spray heads, 1344. columns, 1335. anchor clamps conveying mechanism drive motors, 1336. connecting axles
1350. fixture support mechanism, 1351. fixture support platforms, 1352. column type locating wheels, 1354. positioning cylinders, 1356. column type locating wheels
1361. the fixture support platform, 1364. positioning cylinders, 1366. locating wheels, 1380. milling rollers; The plate object withdrawing device:
O-STA I. anchor clamps load location station (station 1), and O-STA II. plate object is peeled off station (station 2),
O-STA III. plate object takes out station (station 3);
600. up-stripping mechanism, 630. gas blow pipes,
800. workbench, 810. work tops, 820. anchor clamps detent mechanisms, 822. anchor clamps alignment pins, 825. set levers, 826. connecting axles, 830. are with 840. workbench columns, 845. locating pieces synchronously;
850. the sucker unloading device, 860. scalable flexible sucker, 870. times air cylinders, 890. sucker links;
910. the curved surface saddle, 920. curved surface saddle driving mechanisms,
700. air-flotation workbench, 730. locating wheels, 710. limit portion workbench, 720. central task platforms, 740. pores
110. the workbench conveying mechanism, 111. drive motors, 115. synchronous pulleys, 120. are with 125. guide rails, 130. supports, 126. slide blocks, 116. driven pulleys, 117. driven pulley supports synchronously
The anchor clamps cleaning device:
C-STA I. anchor clamps are written into station, and C-STA II. sprays station, C-STA III. roller brush washing station, and C-STAIV. rinsing station, the air-dry station of C-STA V., C-STA VI. anchor clamps take out station.
1400. ring-shaped guide rail, 1410. spray equipments, 1415. spray heads, 1420. rollers brush, 1425. fountain heads, 1430. air-dry apparatus, 1435. hot air heads,
Below in conjunction with accompanying drawing the present invention is elaborated
First: anchor clamps (being used to load the plate object that will grind)
With reference to Fig. 3-5, anchor clamps 100 are made up of metallic plate 40, framework, framework retaining mechanism 50 and absorption cushion block 41, and absorption cushion block 41 is being pasted on antirust elastic metal sheet 40 surfaces, and periphery has a framework, and it is detachable that framework has an end of a frame at least.
Framework, form by two fixed borders 20 and two active borders 30, make active border 30 and fixed border 20 be locked together the formation framework securely by framework retaining mechanism 50, can make anchor clamps 100 maintenance certain rigid and metallic plate 40 is had tensioning and supporting role.Fixed border 20 is fixed together with two minor faces of metallic plate 40; One end of active border 30 links to each other with the two ends on one side of fixed border 20 by straight pin 10, and its other end detachably is locked together by the two ends of framework retaining mechanism 50 with the another side of fixed border 20; The both sides of active border 30 can be axle with straight pin 10 respectively, separate (referring to the O-STA II of Figure 10, dotted portion is represented the state after end of active border 30 and fixed border 20 break away from) with fixed border 20 to two sideway swivels; Active border 30 can adopt the mode of separating to both sides with separating not only of fixed border 20, also can adopt the mode of separating downwards.
With reference to Fig. 6, framework retaining mechanism 50, the end on two limits of active border 30 respectively is equipped with one, is made up of V-type top 55, headblock 60, spring 65, rear portion cushion block 70, spring capping 85, spring compression bolt 90 and release lever 51.Spring capping 85 is fixed on the active border 30 by jackscrew; Spring compression bolt 90 is used to adjust the pressure of spring 65 and makes things convenient for spring 65 to change; Headblock 60 and rear portion cushion block 70 are used for the two ends of spring 65 are positioned; Release lever 51 is used for back pressing spring 65.The locking of framework retaining mechanism 50 and release process: during locking, firmly the both sides of an end that has framework retaining mechanism 50 of active border 30 from anchor clamps 100 are advanced the groove of fixed border 20, because spring 65 produces pressure by 60 pairs of V-type tops 55 of headblock, tightly has pushed up on the groove inwall of fixed border 20 V-type top 55, and active border 30 and fixed border 20 are combined as a whole securely; When unclamping, firmly post-tensioning release lever 51 comes directly towards 55 back pressing springs 65, makes active border 30 loosening with combining of fixed border 20, thereby active border 30 is thrown off to both sides and fixed border 20.Framework retaining mechanism 50 except that this method of diagram, also mechanism such as available buckle.
Second portion: plate object loading attachment
1, structure is formed
With reference to Fig. 7, the system diagram of plate object loading attachment, this device is made up of frame 1321, anchor clamps conveying mechanism 1320, the wetting mechanism 1340 of absorption cushion block, attaching mechanism etc.
Anchor clamps conveying mechanism 1320 is arranged on the frame 1321, and two fixed borders with support fixture are distributed in two row's running rollers 1325 of frame both sides.Running roller drives and adopts the chain load mode, two row's running rollers 1325 link together by bearing 1324 grades and sprocket wheel 1330, each sprocket wheel 1330 links together step by step by chain 1332, the course of conveying of anchor clamps conveying mechanism 1320 is: drive connecting axle 1336 rotations of I-STA V station one end by conveying mechanism drive motors 1335, connecting axle 1336 drives 1330 rotations of frame 1321 both sides sprocket wheels, sprocket wheel 1330 carries out transmission step by step by chain 1332, drive running roller 1325 rotations, thereby realize anchor clamps 100 conveying from I-STA I to I-STA V on running roller 1325.The start-stop of anchor clamps conveying mechanism 1320 can be controlled by the position sensor that the program of Programmable Logic Controller PLC is installed in conjunction with each station according to technology.The kind of drive that the sprocket wheel of conveying mechanism 1320, chain transmission mode also can adopt synchronizing wheel, be with synchronously.
The wetting mechanism 1340 of absorption cushion block, be arranged on frame 1321 tops, be positioned at the wetting station of absorption cushion block place, form, make water pipe 1342 and spray head 1343 across on anchor clamps conveying mechanism 1320 by support post by support post 1344, water pipe 1342 and spray head 1343;
Attach mechanism (in conjunction with Fig. 8), be arranged on plate object and attach the station place, can support fixture and plate object G attached on the anchor clamps, form by fixture support platform 1361, locating wheel 1366, positioning cylinder 1364, milling roller 1380 etc.Attach the concise and to the point course of work of mechanism: by driving air cylinder driven fixture support platform 1361 jack-up anchor clamps 100, adopt locating wheel 1366,1364 pairs of anchor clamps of positioning cylinder, 100 location, can roll plate object G by driven by servomotor milling roller 1380 then plate object G is adsorbed onto on the anchor clamps.
With reference to Fig. 9, anchor clamps are loaded in the schematic diagram on the grinder, the figure shows out the position relation of anchor clamps 100 with grinder workbench 43, plate object G and grinding head 44.
2, the device course of work
The plate object loading attachment, its course of work is divided 5 stations successively by function, is respectively: I-STA I, anchor clamps load, by illustrated direction anchor clamps 100 are loaded on the anchor clamps conveying mechanism 1320, the fixed border 20 of anchor clamps 100 is placed on the running roller 1325, transmits to I-STA II; I-STA II, the absorption cushion block is wetting, and 1343 pairs of absorption of the spray head cushion block 41 by wetting mechanism 1340 in anchor clamps 100 traveling process sprays wetting; I-STA III, plate object is written into, after the wetting anchor clamps 100 of I-STA II are transported to this station, fixture support mechanism 1350 holds up (leaving running roller 1325 slightly) to anchor clamps 100, and by locating wheel 1356 and 1354 pairs of anchor clamps of 4 positioning cylinders, 100 location, robot 1311 takes out plate object G from packing case 1310 then, is loaded on the absorption cushion block 41 of the oriented anchor clamps 100 of this station, and transmits to I-STA IV station.Fixture support mechanism 1350 is made up of the column type locating wheel 1352 of fixture support platform 1351,1356,4 positioning cylinders 1354 of locating wheel and positioning cylinder 1354 front ends; I-STA IV, plate object attaches station, drive air cylinder driven fixture support platform 1361 jack-up anchor clamps 100 by platform, adopt locating wheel 1366,1364 pairs of anchor clamps of positioning cylinder, 100 location, can roll plate object G by driven by servomotor milling roller 1380 then, plate object G is adsorbed onto on the absorption cushion block 41 of anchor clamps; I-STA V, anchor clamps take out station, and artificial the taking-up is equipped with the anchor clamps 100 of plate object G, and are transported to grinder and grind.
Third part: plate object withdrawing device
1, structure is formed
With reference to Figure 10, the system diagram of plate object withdrawing device, this device is made up of the sucker unloading device 850 of support 130, workbench 800, workbench conveying mechanism 110, plate object mechanism for stripping, plate object, gentle floating fixed position workbench 700.
Workbench 800 is arranged on the workbench conveying mechanism 110, has work top 810 and the anchor clamps detent mechanism 820 of laying anchor clamps, is used to load and locate the anchor clamps that plate object G is housed, and describes the explanation referring to subsequent figures 11-12 in detail;
The plate object mechanism for stripping is arranged on plate object and peels off station, and plate object G and absorption cushion block are peeled off, and is made up of curved surface saddle 910, curved surface saddle driving mechanism 920 and up-stripping mechanism 600, and brief description is referring to the explanation of Figure 13;
Air supporting positioning table 700 is arranged on plate object and takes out station, can carry out the air supporting location to plate object G, is made up of limit portion workbench 710, central task platform 720 and locating wheel 730.740 couples of plate object G of pore air supporting on the workbench, 730 pairs of plate object G location of locating wheel;
Workbench conveying mechanism 110 is arranged on the support 130, has the track 125 that is used to support conveying workbench and driving mechanism etc.Workbench 800 is connected on the track 125 on chassis 130 by sliding bearing 126; Driving mechanism by be with 120 synchronously, synchronous pulley 115, servomotor 111, guide rail 125 form, drive by servomotor 111 that gear units are with 120 synchronously, synchronous pulley 115 runnings, drive driving wheel 830 rotations of workbench 800, thereby workbench 800 is slided on guide rail 125, realize the transmission of travelling table 800 between O-STA I and O-STA II.
With reference to Figure 11-12, expressed the loading location of anchor clamps 100 on workbench 800 that plate object is housed.Workbench 800 is connected on the support 130 by guide rail 125 and sliding bearing 126, is made up of the detent mechanism 820 and the workbench support post 840 of work top 810 (respectively there is a rectangular channel both sides of work top 810), work top two side; Detent mechanism 820 is installed on the two side of work top 810, comprises alignment pin 822, locating piece 845, alignment pin connecting axle 826 and set lever 825 etc.The loading position fixing process of anchor clamps 100: the artificial loading anchor clamps are to work top 810, the fixed border 20 of anchor clamps 100 is placed in the rectangular channel of both sides of work top 810, the anchor clamps detent mechanism 820 that is positioned at work top 810 two sides positions with the 845 pairs of anchor clamps 100 of locating piece that are positioned at the groove two ends of work top 810, after anchor clamps 100 load the location, simply clean as required, clean the framework set lever 51 on the back automatic or manual pulling anchor clamps 100, make active border 30 and fixed border 20 throw off (disengaged condition is shown in the dotted portion of the anchor clamps 100 of the O-STA II of Figure 10), by conveying mechanism 110 travelling table 800 is sent to O-STA II then.
With reference to Figure 13, the front view of plate object mechanism for stripping and sucker unloading device.
The plate object mechanism for stripping is arranged on plate object and peels off station, and plate object G and absorption cushion block are peeled off, and is made up of curved surface saddle 910, curved surface saddle driving mechanism 920 and up-stripping mechanism 600.Curved surface saddle 910 is arranged at the below that O-STA II peels off the removable workbench of station, and the surface is the sphere or the face of cylinder; Curved surface saddle driving mechanism 920 is arranged on the below of curved surface saddle, adopts servomotor or cylinder can drive curved surface saddle 910 and rises or descend, and locate its rise and fall height by proximity switch; Up-stripping mechanism 600 is arranged on the top that plate object is peeled off the anchor clamps of station, can drive gas blow pipe 630 by rotary cylinder and blow with the edge part of absorption cushion block contact-making surface at plate object G, and the absorption cushion block on auxiliary plate object G and the anchor clamps is peeled off.
2, the course of work
The plate object withdrawing device, its course of work is divided into three stations successively by function, be respectively: O-STAI, the loading location station of anchor clamps, manually the anchor clamps 100 that plate object G is housed are loaded on the workbench 800, anchor clamps detent mechanism 820 by work top 810 two sides, after the groove of work top 810 both sides and 845 pairs of anchor clamps of the locating piece at groove two ends position, mill base slurry to plate object G surface simply cleans air-dry as required, and the active border 30 of anchor clamps 100 and fixed border 20 are broken away from, workbench conveying mechanism 110 is transported to O-STA II station to workbench 800 then; O-STA II, plate object is peeled off station, the curved surface saddle driving mechanism 920 of plate object mechanism for stripping drives on the curved surface saddle 910 and pushes up the bottom centre of the metallic plate 40 of positioning fixture 100, make metallic plate 100 bendings, drive plate object G and 41 bendings of absorption cushion block, the elastic restoring force that makes progress that produces in when utilizing plate object G crooked, blow with the edge part of absorption cushion block 41 contact-making surfaces at plate object G by up-stripping mechanism 600 simultaneously, add and take out the suction that sucker 860 makes progress, make plate object G apace with anchor clamps on absorption cushion block 41 peel off, plate object G after peeling off is fetched into O-STA III station by sucker 860, and the anchor clamps 100 of taking plate object G away turn back to O-STA I station, after by the framework retaining mechanism 50 on the anchor clamps active border 30 and fixed border 20 being secured together, taking out anchor clamps 100 and deliver to the anchor clamps cleaning device and clean; O-STAIII, plate object takes out station, before plate object G bending, the following air cylinder 870 of sucker unloading device 850 drives sucker 860 and descends, hold plate object G, after the absorption cushion block 41 on plate object G and the anchor clamps is peeled off, by balladeur train or robot the plate object G transfer of drawing to air supporting positioning table 700, pore 740 is blown plate object G is suspended, behind 730 pairs of plate object G location of locating wheel, be convenient to plate object G and be fetched into relevant manufacturing procedure (as operations such as precision cleaning, checks), realize interface with relevant manufacturing procedure.
The 4th part: anchor clamps cleaning device
With reference to Figure 14, anchor clamps cleaning device sketch, the anchor clamps cleaning device is used to clean anchor clamps, and it is dirty to wash mill base slurry of being stained with on the anchor clamps etc.It is track that the anchor clamps cleaning device adopts ring-shaped guide rail 1400, and anchor clamps 100 vertically hang to be lifted on the guide rail 1400 and clean.The anchor clamps cleaning device is made up of six stations: C-STA I, and anchor clamps are written into station, and the vertical lifting of finishing anchor clamps is written into; C-STA II, the spray station respectively has a cover spray equipment 1410 in the anchor clamps both sides, and the spray head 1415 by spray equipment 1410 can carry out spray Cleaning for High Capacity to anchor clamps; C-STA III, roller brush washing station respectively has a cover spray head 1425 and roller brush 1425 in the anchor clamps both sides, in 1425 pairs of anchor clamps sprays of spray head, by 1425 rotations of roller brush anchor clamps are cleaned; C-STA IV, the rinsing station, identical with the spray equipment of C-STA II spray station, with pure water anchor clamps are carried out spray rinsing; C-STA V, air-dry station respectively has a cover air-dry apparatus 1430 in the anchor clamps both sides, finishes the drying of anchor clamps by hot air head 1435 blowing hot-airs of air-dry apparatus 1430; C-STA VI, anchor clamps take out station, clean the anchor clamps that finish and take out at this station.
Claims (8)
1, a kind of loading and unloading system that is used for the plate object grinding is characterized in that, comprises anchor clamps (100), plate object loading attachment, plate object withdrawing device, anchor clamps cleaning device; Adopt the carrier of anchor clamps as plate object, plate object is loaded on the anchor clamps, and plate object is done the as a whole loading and unloading of carrying out grinder together with anchor clamps; By a cover plate object loading attachment, plate object is adsorbed onto on the absorption cushion block of anchor clamps; By a cover plate object withdrawing device, make plate object peel off and take out with sucker from the absorption cushion block of anchor clamps; Anchor clamps are reusable by cleaning the back.
2, the loading and unloading system that is used for the plate object grinding according to claim 1 is characterized in that: anchor clamps (100) comprise metallic plate (40), framework, framework retaining mechanism (50) and absorption cushion block (41); Metal sheet surface is being pasted the absorption cushion block, and periphery has a framework, and it is detachable that framework has an end of a frame at least.
3, the loading and unloading system that is used for the plate object grinding according to claim 2 is characterized in that metallic plate (40) has favorable elasticity and antirust, and its thickness is 0.1~1.0mm; Framework is used for supporting and the tension metal plate, form by fixed border (20) and active border (30), fixed border (20) is fixed together with any two opposite edges of metallic plate (40), and active border (30) detachably links together by framework retaining mechanism (50) with fixed border; Framework retaining mechanism (50) is used for fixed border and active border locking are comprised V-type top (55), headblock (60), spring (65), rear portion cushion block (70), spring capping (85), puller bolt (90); Adsorb cushion block, stick on the upper surface of metallic plate, be used to adsorb plate object, material can be selected the polyurethane rubber of class sponge shape for use.
4, the loading and unloading system that is used for the plate object grinding according to claim 1 is characterized in that the plate object loading attachment comprises frame (1321); Anchor clamps conveying mechanism (1320) is arranged on the frame, is made up of running roller (1325), bearing (1324), sprocket wheel (1330), chain (1332) and drive motors (1335); The absorption wetting mechanism of cushion block (1340) is arranged on the frame top, is made up of support post (1344), water pipe (1342) and spray head (1343); Attach mechanism, be arranged on plate object and attach the station place, can support fixture and plate object attached on the anchor clamps, comprise fixture support platform (1361), locating wheel (1366), positioning cylinder (1364) and milling roller (1380) composition.
5, the loading and unloading system that is used for the plate object grinding according to claim 1, it is characterized in that the plate object withdrawing device is made up of sucker unloading device (850) the gentle floating fixed position workbench (700) of support (130), workbench (800), workbench conveying mechanism (110), plate object mechanism for stripping, plate object; Workbench (800) is arranged on the workbench conveying mechanism (110).
6, want the 5 described loading and unloading systems that are used for the plate object grinding according to right, it is characterized in that the plate object mechanism for stripping is made up of curved surface saddle (910), curved surface saddle driving mechanism (920) and up-stripping mechanism (600); Sucker unloading device (850) comprises one group of telescopic sucker (860), sucker link (890) and following air cylinder (870); Air supporting positioning table (700) is made up of limit portion workbench (710), central task platform (720) and locating wheel 730; Workbench conveying mechanism (110) is made up of synchronous band (120), synchronous pulley (115), servomotor (111), guide rail (125), drive gear unit by servomotor (111) and be with (120), synchronous pulley (115) running synchronously, drive movable workbench.
7, the loading and unloading system that is used for the plate object grinding according to claim 1, it is characterized in that, the anchor clamps cleaning device comprises ring-shaped guide rail (1400), spray head (1415), roller brush (1420), fountain head (1425) and hot air head (1435), the spray equipment (1410) that respectively has a cover to form in ring-shaped guide rail (1400) both sides by spray head (1415); One cover spray head (1425) and roller brush (1420) are respectively arranged in ring-shaped guide rail (1400) both sides; The air-dry apparatus (1430) that respectively has a cover to form in ring-shaped guide rail (1400) both sides by hot air head (1435).
8, a kind of loading and unloading method that realizes that the described plate object of claim 1 grinds is characterized in that: may further comprise the steps
A) adopt the carrier of anchor clamps as plate object, plate object is loaded on it, the loading and unloading when anchor clamps and plate object are done as a whole the grinding;
B) plate object is at the loading on the anchor clamps: anchor clamps are loaded on the plate object loading attachment, the process anchor clamps load, the absorption cushion block is wetting, plate object is written into, plate object attaches and anchor clamps take out five stations, to the absorption cushion block of chucking surface wetting and carry out anchor clamps location after, plate object is placed on the anchor clamps, utilize milling roller to roll the surface of plate object, plate object is adsorbed onto on the absorption cushion block on the anchor clamps, and the anchor clamps that are adsorbed with the shape thing can be transported on the grinder and grind;
C) taking-up of plate object from the anchor clamps: by the anchor clamps that plate object is housed after grinding are loaded on the workbench, peel off between station and move at loading location, the plate object of anchor clamps by workbench, when plate object is peeled off station, carrying out the absorption cushion block of plate object and anchor clamps peels off, utilize sucker to be fetched into the taking-up station after peeling off, convenience is connected with other manufacturing procedure;
D) cleaning of anchor clamps: the anchor clamps that take out plate object vertically hang to hang and are downloaded on the anchor clamps cleaning device, by spray, roller brush, rinsing and cleaning way such as air-dry, the mill base slurry that is stained with on the anchor clamps etc. dirty wash afterwards reusable.
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CNB2006100174920A CN100486771C (en) | 2006-03-02 | 2006-03-02 | Loading and unloading system and method for grinding plates |
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CNB2006100174920A CN100486771C (en) | 2006-03-02 | 2006-03-02 | Loading and unloading system and method for grinding plates |
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CN1817564A true CN1817564A (en) | 2006-08-16 |
CN100486771C CN100486771C (en) | 2009-05-13 |
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US9138857B2 (en) | 2010-08-05 | 2015-09-22 | Hwatsing Technology Co., Ltd. | Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same |
CN102049730A (en) * | 2010-12-29 | 2011-05-11 | 清华大学 | Wafer replacing device used in chemical mechanical polishing equipment |
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