CN1815295A - 激光烧蚀微区分析中的一种聚焦装置 - Google Patents
激光烧蚀微区分析中的一种聚焦装置 Download PDFInfo
- Publication number
- CN1815295A CN1815295A CN 200610057540 CN200610057540A CN1815295A CN 1815295 A CN1815295 A CN 1815295A CN 200610057540 CN200610057540 CN 200610057540 CN 200610057540 A CN200610057540 A CN 200610057540A CN 1815295 A CN1815295 A CN 1815295A
- Authority
- CN
- China
- Prior art keywords
- laser
- sample
- lens
- detector
- focalizer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000608 laser ablation Methods 0.000 title claims description 18
- 238000004458 analytical method Methods 0.000 title claims description 17
- 238000002679 ablation Methods 0.000 claims abstract description 8
- 239000004065 semiconductor Substances 0.000 claims abstract description 8
- 238000006073 displacement reaction Methods 0.000 claims description 13
- 238000005259 measurement Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 6
- 230000000052 comparative effect Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 6
- 238000009616 inductively coupled plasma Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 238000012113 quantitative test Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Laser Beam Processing (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100575409A CN100371770C (zh) | 2006-03-14 | 2006-03-14 | 激光烧蚀微区分析中的一种聚焦装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100575409A CN100371770C (zh) | 2006-03-14 | 2006-03-14 | 激光烧蚀微区分析中的一种聚焦装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1815295A true CN1815295A (zh) | 2006-08-09 |
CN100371770C CN100371770C (zh) | 2008-02-27 |
Family
ID=36907566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006100575409A Active CN100371770C (zh) | 2006-03-14 | 2006-03-14 | 激光烧蚀微区分析中的一种聚焦装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100371770C (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101413788B (zh) * | 2007-10-19 | 2010-11-24 | 财团法人工业技术研究院 | 表面形貌量测方法及其装置 |
RU2447468C2 (ru) * | 2010-04-02 | 2012-04-10 | Учреждение Российской академии наук Конструкторско-технологический институт научного приборостроения Сибирского отделения РАН | Способ автоматической фокусировки рабочего излучения на 3d оптическую поверхность |
CN103411958A (zh) * | 2013-08-08 | 2013-11-27 | 哈尔滨工业大学 | 材料烧蚀率动态测试装置及方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6486457B1 (en) * | 1999-10-07 | 2002-11-26 | Agilent Technologies, Inc. | Apparatus and method for autofocus |
JP2004513355A (ja) * | 2000-11-13 | 2004-04-30 | ミクマクモ アンパーツゼルスカブ | レーザアブレーション |
JP2003073812A (ja) * | 2001-08-28 | 2003-03-12 | Masaki Yamamoto | レーザアブレーション装置 |
JP3839762B2 (ja) * | 2002-09-03 | 2006-11-01 | 独立行政法人科学技術振興機構 | 溶液中レーザーアブレーションの制御方法および装置 |
US20050061779A1 (en) * | 2003-08-06 | 2005-03-24 | Walter Blumenfeld | Laser ablation feedback spectroscopy |
-
2006
- 2006-03-14 CN CNB2006100575409A patent/CN100371770C/zh active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101413788B (zh) * | 2007-10-19 | 2010-11-24 | 财团法人工业技术研究院 | 表面形貌量测方法及其装置 |
RU2447468C2 (ru) * | 2010-04-02 | 2012-04-10 | Учреждение Российской академии наук Конструкторско-технологический институт научного приборостроения Сибирского отделения РАН | Способ автоматической фокусировки рабочего излучения на 3d оптическую поверхность |
CN103411958A (zh) * | 2013-08-08 | 2013-11-27 | 哈尔滨工业大学 | 材料烧蚀率动态测试装置及方法 |
CN103411958B (zh) * | 2013-08-08 | 2014-06-18 | 哈尔滨工业大学 | 材料烧蚀率动态测试装置及方法 |
Also Published As
Publication number | Publication date |
---|---|
CN100371770C (zh) | 2008-02-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN109990829B (zh) | 一种元素、缺陷与残余应力同时检测的方法及装置 | |
CN106442467B (zh) | 空间自调焦激光共焦成像拉曼光谱探测方法与装置 | |
CN105259144A (zh) | 一种大动态范围全方位样品brdf测量装置 | |
CN1305582A (zh) | 用坐标测量仪测定物体几何形状的方法和装置 | |
CN102364329A (zh) | 激光诱导击穿光谱自动采集系统 | |
CN109632721B (zh) | 一种lrspr-荧光成像并行检测装置及lrspr芯片制作方法 | |
CN116577317B (zh) | 一种拉曼-激光剥蚀-质谱的联用检测装置及联用检测方法 | |
CN1815295A (zh) | 激光烧蚀微区分析中的一种聚焦装置 | |
US7342995B2 (en) | Apparatus for estimating specific polymer crystal | |
CN201000428Y (zh) | 用于纳米薄膜表面测量的变入射角度光谱椭偏成像装置 | |
CN113740316A (zh) | 基于光斑位置的激光聚焦点位置自动定位方法及系统 | |
CN106770154B (zh) | 空间自调焦激光差动共焦拉曼光谱探测方法与装置 | |
CN112432766A (zh) | 一种激光扫描振镜性能检测方法 | |
CN111579491A (zh) | 一种平面式激光诱导击穿光谱扫描仪 | |
CN100370219C (zh) | 入射角度扫描椭偏成像测量方法和装置 | |
CN1319184A (zh) | 使用染料进行表面无损检测的方法和装置 | |
US7706590B2 (en) | Method and device for interrogating samples using laser scanning cytometry and other techniques | |
CN1045492C (zh) | 一种基于散射原理对不透明固体材料内部微/纳米级体缺陷的检测方法 | |
CN209014472U (zh) | 单次多点同时测量的激光诱导击穿光谱系统 | |
CN2748898Y (zh) | 二维扫描型光学质量检测装置 | |
JPH0752155B2 (ja) | 走査型表面皮膜解析方法 | |
CN215985739U (zh) | 一种干涉滤光片全视场透过率扫描测试装置 | |
CN116989693B (zh) | 聚焦曲线的评价方法 | |
CN110095075A (zh) | 圆柱直径测量装置及方法 | |
CN112285064B (zh) | 一种spr传感器及基于spr的单细胞检测装置及方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Beijing NCS Analytical Instruments Co., Ltd. Assignor: Central Iron & Steel Research Institute Contract fulfillment period: 2007.12.15 to 2013.12.15 contract change Contract record no.: 2008990000631 Denomination of invention: Focusing device for laser ablation microarea analysis Granted publication date: 20080227 License type: Exclusive license Record date: 2008.10.8 |
|
LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2007.12.15 TO 2013.12.15; CHANGE OF CONTRACT Name of requester: BEIJING NAKE ANALYTICAL INSTRUMENT CO., LTD. Effective date: 20081008 |
|
EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Beijing NCS Analytical Instruments Co., Ltd. Assignor: Central Iron & Steel Research Institute Contract record no.: 2008990000631 Date of cancellation: 20120828 |
|
ASS | Succession or assignment of patent right |
Owner name: NCS TESTING TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: INST OF IRON + STEEL Effective date: 20121126 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20121126 Address after: 100081 Beijing Haidian District sorghum Bridge oblique Street No. 13 Patentee after: NCS Testing Technology Co., Ltd. Address before: 100081 Haidian District Institute of South Road, Beijing, No. 76 Patentee before: Central Iron & Steel Research Institute |
|
CP01 | Change in the name or title of a patent holder |
Address after: No. 13, sorghum Bridge, Beijing, Beijing, Haidian District Patentee after: The detection technology of NCS Limited by Share Ltd Address before: No. 13, sorghum Bridge, Beijing, Beijing, Haidian District Patentee before: NCS Testing Technology Co., Ltd. |
|
CP01 | Change in the name or title of a patent holder |