CN1812011A - Solenoid micro inducer based on amorphous FeCuNbCrSiB magnetic film - Google Patents
Solenoid micro inducer based on amorphous FeCuNbCrSiB magnetic film Download PDFInfo
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- CN1812011A CN1812011A CN 200610023897 CN200610023897A CN1812011A CN 1812011 A CN1812011 A CN 1812011A CN 200610023897 CN200610023897 CN 200610023897 CN 200610023897 A CN200610023897 A CN 200610023897A CN 1812011 A CN1812011 A CN 1812011A
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Abstract
A solenoid micro-inductor apparatus based on non-crystal FeCuNbCrSiB magnetic film includes a substrate, leading pins, coils, a magnetic core material, Al2O insulation material, in which, two sets of connected 3-D solid solenoid coils are winded symmetrically on a closed rectangular magnetic material and the coils with the substrate as the base are formed by a base coil and a top coil connected by a connecting conductor, both ends of which are connected with the leading pins and the base coil, the top coil and the conductor are isolated with the core material, namely the non-crystal magnetic film of FeCuNbCrSiB by Al2O insulation material.
Description
Technical field
What the present invention relates to is a kind of device of microelectronics technology, specifically is a kind of solenoid micro inductor spare of amorphous FeCuNbCrSiB magnetic thin film.
Background technology
In recent years, along with MEMS (micro electro mechanical system) (MEMS) technology rapid development, particularly standard-LIGA the process technology based on the non-silicon materials of three-dimensional becomes the current a kind of state-of-the-art technology of developing microminiaturized sandwich construction micro element and radio frequency-MEMS (micro electro mechanical system) (RF-MEMS) device in the world.In the world, adopt MEMS technology development three-dimensional structure magnetic thin film micro-inductor device to arise at the historic moment.On the other hand, because the new development of amorphous, nano crystal soft magnetic material, adopt amorphous and nano crystal soft magnetic material to make magnetic core both at home and abroad and make large-scale power transformer, pulse transformer, magnetic switch etc. and moving towards commercialization.In view of the magnetic thin film micro-inductor device is a core structure, the selection of core material is extremely crucial to the performance that improves inductance component: (1) high magnetic permeability obtains big inductance quantity; (2) high saturated magnetic induction is to guarantee high saturation current; (3) high resistivity is to reduce eddy current loss.In addition, the magnetic thin film micro-inductor device requires to have the magnetic structure of sealing, to reduce leakage flux.Therefore, selecting for use the amorphous of high magnetic permeability, high saturated magnetic induction and high resistivity and nano crystal soft magnetic material to make magnetic core, is the key that improves magnetic thin film micro-inductor device characteristic.
Find through literature search prior art, (C.S.Kim such as Kim, S.Bae, S.E.Nam, H.J.Kim) at " IEEE TRANSACTION ON MAGNETICS " (Institute of Electrical and Electronics magnetics magazine) (VOL.37, NO.4, pp.2894-2896, JULY, 2001) delivered " Fabrication of high frequency DC-DC converter using Ti/FeTaN filminductor " (the Ti/FeTaN thin film inductor that is used for the high-frequency DC-DC converter) literary composition on, this article has been mentioned the snail type micro-inductor device that is made of double square nano-crystalline Fe TaN film, be of a size of 7.8mm * 10mm, inductance value is 1.6 μ H under 2MHz, and quality factor is 2.3.This little inductance is by glass substrate, bottom FeTaN film, SiO
2Insulating barrier, copper planar spiral winding, pin, epoxy glue and the glass substrate that has a top layer FeTaN film are formed; (J.W.Park such as Park, M.G.Allen) at " IEEETRANSACTION ON MAGNETICS " (Institute of Electrical and Electronics magnetics magazine) (VOL.39, NO.5, pp.3184-3186, SEPTMEMBER, 2003) delivered " Ultralow-profilemicromachined power inductors with highly laminated Ni/Fe cores:Application to low-Megahertz DC-DC converters " (micromechanics power inductance of the ultralow profile of employing multilayer Ni/Fe magnetic core: the literary composition DC-DC converter that is used for low frequency MHz) on, this article has been mentioned the microminiaturized DC-DC converter that is made of the little inductance of multilayer Ni/Fe film, micro-inductor device is of a size of 11.5mm * 5.7mm, inductance value is 2.3 μ H under 3MHz, and quality factor is 9.2.This little inductance is made up of glass substrate, magnetic core solenoid, pin, and magnetic core solenoid is made up of bottom coil, magnetic core, SU8 glue, top layer coil and bonding conductor, the multilayer Ni/Fe film of magnetic core for electroplating.But do not appear in the newspapers so far and the FeCuNbCrSiB film is applied to the making of micro-inductor device.
Summary of the invention
The objective of the invention is at the deficiencies in the prior art and market demand microminiaturized micro-inductor device, a kind of solenoid micro inductor spare based on amorphous FeCuNbCrSiB magnetic thin film is provided, make the micro-inductor device that obtains under high frequency 1～10MHz, have low resistance, high inductance, high-quality-factor and high efficiency, characteristics such as low-loss can be widely used in various portable type electronic products such as mobile phone CDMA, networking products ADSL, microprocessor among computer system/external equipment such as the notebook personal computer and DVD etc., digital product such as digital camera and Digital Video etc.
The present invention is achieved by the following technical solutions, solenoid micro inductor spare based on amorphous FeCuNbCrSiB magnetic thin film of the present invention, comprise: substrate, pin, coil, core material, alumina insulation material, two groups of 3 D stereo solenoid coils that link to each other of symmetrical coiling on the closed rectangle core material, coil is based on substrate, be connected to form by bonding conductor by bottom coil, top layer coil, the two ends of coil connect pin, and the bottom coil of coil, top layer coil, bonding conductor all separate by alumina insulation material and core material.Wherein, described core material is an amorphous FeCuNbCrSiB magnetic thin film.Alumina insulation material not only insulate magnetic core and upper and lower layer line circle, and play support platform.
It is little that the little inductance of magnetic thin film solenoid of the present invention has size, is to be the little inductance of solenoid of core material with amorphous FeCuNbCrSiB magnetic thin film, adopts aluminum oxide film as insulating material rather than SiO
2Film or SU-8 glue have all been filled aluminum oxide film around bottom coil, top layer coil, bonding conductor, the core material.Substrate is a glass substrate.
Inductance component is basic components and parts in the circuit, is a kind of energy-storage travelling wave tube.When inductance component passes to the electric current of variation, the electric current of variation will produce magnetic field, produce self induction electromotive force, and self induction electromotive force has the characteristic that the antagonism electric current changes, and be a kind of special resistance that electric current changes in the inductance component.In sinusoidal ac circuit, the resistance that self induction electromotive force offset of sinusoidal electric current presents is used X induction reactance
LExpression, X
L=2 π fL, L are the inductance values of inductance component, and f is a frequency.Square being directly proportional of the energy storage U of inductance component and inductance value L, electric current I, promptly
Therefore, obtain big energy storage, it is big that the inductance value of inductance component is wanted, and it is big that the bearer cap of electric current is wanted.In addition, there is resistance R inductance component in itself, consumed power, obtain big energy storage, and it is high that the quality factor q of device is wanted,
Solenoid micro inductor spare based on amorphous FeCuNbCrSiB magnetic thin film of the present invention, adopted novel FeCuNbCrSiB soft magnetic material, can obtain big inductance value, novel FeCuNbCrSiB soft magnetic material has high saturation induction density, ability with bigger loaded current adopts MEMS technology wound core solenoidal inductor, has low resistance, high quality factor can be obtained, more remnant field energy can be stored.
The present invention compared with prior art, have following useful effect: (1) the present invention is a 3-D solid structure, inductance value is greater than 1 μ H under frequency 1MHz～10MHz, quality factor is greater than 2, size can be widely used in various portable type electronic products such as mobile phone, notebook computer, digital camera, MP3 etc. less than 4mm * 4mm; (2) the present invention adopts amorphous FeCuNbCrSiB magnetic thin film as core material, helps improving the high frequency performance of device, has advantages such as the high and low resistance of operating frequency, high inductance value, high-quality-factor, high efficiency, low-loss; (3) the present invention can be integrated with prior integrated circuit process, forming circuit functional module such as oscillator, filter, DC-DC converter etc.; (4) the present invention adopts aluminum oxide film to do the insulation material and adopts precise polished technology, has improved evenness, uniformity and the rate of finished products of substrate in the device manufacturing process process; (5) the present invention can be packaged into the SMD device; (6) the present invention adopts thin film technique and the development of MEMS technology, and manufacturing technology can be compatible fully with lsi technology, is easy to production in enormous quantities and low cost etc.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is that Fig. 1 structure is along A-A directional profile schematic diagram.
Embodiment
Shown in Fig. 1-2, the present invention includes: substrate 1, pin 2, coil 3, core material 4, alumina insulation material 6, two groups of 3 D stereo solenoid coils 3 that link to each other of symmetrical coiling on the closed rectangle core material 4, coil 3 is based on substrate 1, be connected to form by bonding conductor 7 by bottom coil 5, top layer coil 8, the two ends of coil 3 connect pin 2, the bottom coil 5 of coil 3, top layer coil 8, bonding conductor 7 all separate by alumina insulation material 6 and magnetic core 4, wherein, described magnetic core 4 materials are amorphous FeCuNbCrSiB magnetic thin film.
Coil 3 be shaped as solenoid, the width of each circle conductor is 20 μ m, thickness is 5～20 μ m, is spaced apart 35 μ m between each circle.
The conductor length of bottom coil 5 and top layer coil 8 is 1580 μ m, and the number of turn is 80 circles, and the inductance value of micro-inductor device is greater than 1 μ H under high frequency 1MHz～10MHz, and the highest quality factor is 2-6.
The spatial form of bonding conductor 7 is a four prisms cylinder, highly is 19～22 μ m.
Magnetic core 4, thickness are 3～6 μ m.
Alumina insulation material 6 is an aluminum oxide film.
Claims (9)
1, a kind of solenoid micro inductor spare based on amorphous FeCuNbCrSiB magnetic thin film, comprise: substrate (1), pin (2), coil (3), core material (4), alumina insulation material (6), it is characterized in that: described core material (4) is an amorphous FeCuNbCrSiB magnetic thin film, magnetic core (4) is closed rectangle, magnetic core (4) is gone up two groups of 3 D stereo solenoid coils (3) that link to each other of symmetrical coiling, coil (3) is based on substrate (1), by bottom coil (5), top layer coil (8) is connected to form by bonding conductor (7), the two ends of coil (3) connect pin (2), the bottom coil (5) of coil (3), top layer coil (8), bonding conductor (7) all separates by alumina insulation material (6) and magnetic core (4).
2, the solenoid micro inductor spare based on amorphous FeCuNbCrSiB magnetic thin film as claimed in claim 1 is characterized in that, coil (3) be shaped as solenoid, the width of each circle conductor is 20 μ m, thickness is 5～20 μ m.
3, the solenoid micro inductor spare based on amorphous FeCuNbCrSiB magnetic thin film as claimed in claim 2 is characterized in that, is spaced apart 35 μ m between each circle of coil (3).
4, the solenoid micro inductor spare based on amorphous FeCuNbCrSiB magnetic thin film as claimed in claim 1 is characterized in that, the conductor length of bottom coil (5) and top layer coil (8) is 1580 μ m, and the number of turn is 80 circles.
5, the solenoid micro inductor spare based on amorphous FeCuNbCrSiB magnetic thin film as claimed in claim 4 is characterized in that, the inductance value under high frequency 1MHz～10MHz is greater than 1 μ H, and the highest quality factor is 2-6.
6, the solenoid micro inductor spare based on amorphous FeCuNbCrSiB magnetic thin film as claimed in claim 1 is characterized in that, the spatial form of bonding conductor (7) is a four prisms cylinder.
As claim 1 or 6 described solenoid micro inductor spares, it is characterized in that 7, the height of bonding conductor (7) is 19～22 μ m based on amorphous FeCuNbCrSiB magnetic thin film.
8, the solenoid micro inductor spare based on amorphous FeCuNbCrSiB magnetic thin film as claimed in claim 1 is characterized in that, magnetic core (4), thickness are 3～6 μ m.
9, the solenoid micro inductor spare based on amorphous FeCuNbCrSiB magnetic thin film as claimed in claim 1 is characterized in that, alumina insulation material (6) is an aluminum oxide film.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100238975A CN100536042C (en) | 2006-02-16 | 2006-02-16 | Solenoid micro inducer based on amorphous FeCuNbCrSiB magnetic film |
| KR1020060117821A KR100776406B1 (en) | 2006-02-16 | 2006-11-27 | Micro inductor and fabrication method |
| US11/706,260 US20070188920A1 (en) | 2006-02-16 | 2007-02-15 | Microinductor and fabrication method thereof |
| JP2007035789A JP2007221145A (en) | 2006-02-16 | 2007-02-16 | Micro inductor and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100238975A CN100536042C (en) | 2006-02-16 | 2006-02-16 | Solenoid micro inducer based on amorphous FeCuNbCrSiB magnetic film |
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| Publication Number | Publication Date |
|---|---|
| CN1812011A true CN1812011A (en) | 2006-08-02 |
| CN100536042C CN100536042C (en) | 2009-09-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100238975A Expired - Fee Related CN100536042C (en) | 2006-02-16 | 2006-02-16 | Solenoid micro inducer based on amorphous FeCuNbCrSiB magnetic film |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105632893A (en) * | 2015-12-23 | 2016-06-01 | 清华大学 | Three-dimensional (3D) printing based method for producing micro-inductor |
| CN105655082A (en) * | 2015-12-31 | 2016-06-08 | 苏州达方电子有限公司 | Inductor, magnetic material composition for inductor and electronic component manufacturing method |
| CN106163107A (en) * | 2015-04-09 | 2016-11-23 | 中国科学院金属研究所 | Micro-induction structure on a kind of pcb board based on ferrum ni-based amorphous alloy magnetic core |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140253279A1 (en) * | 2013-03-08 | 2014-09-11 | Qualcomm Incorporated | Coupled discrete inductor with flux concentration using high permeable material |
-
2006
- 2006-02-16 CN CNB2006100238975A patent/CN100536042C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106163107A (en) * | 2015-04-09 | 2016-11-23 | 中国科学院金属研究所 | Micro-induction structure on a kind of pcb board based on ferrum ni-based amorphous alloy magnetic core |
| CN106163107B (en) * | 2015-04-09 | 2018-10-26 | 中国科学院金属研究所 | Micro- induction structure on a kind of pcb board based on iron-nickel-based amorphous alloy magnetic core |
| CN105632893A (en) * | 2015-12-23 | 2016-06-01 | 清华大学 | Three-dimensional (3D) printing based method for producing micro-inductor |
| CN105632893B (en) * | 2015-12-23 | 2018-08-10 | 清华大学 | The method for preparing micro- inductance based on 3D printing |
| CN105655082A (en) * | 2015-12-31 | 2016-06-08 | 苏州达方电子有限公司 | Inductor, magnetic material composition for inductor and electronic component manufacturing method |
| CN105655082B (en) * | 2015-12-31 | 2019-06-04 | 苏州达方电子有限公司 | Inductance, magnetic material composition and electronic component manufacturing method for inductance |
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| Publication number | Publication date |
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| CN100536042C (en) | 2009-09-02 |
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Granted publication date: 20090902 Termination date: 20140216 |