CN1811504A - Polymer thermal-optical type optical waveguide switch based on multimode interference coupler structure - Google Patents
Polymer thermal-optical type optical waveguide switch based on multimode interference coupler structure Download PDFInfo
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- CN1811504A CN1811504A CNA2005100503374A CN200510050337A CN1811504A CN 1811504 A CN1811504 A CN 1811504A CN A2005100503374 A CNA2005100503374 A CN A2005100503374A CN 200510050337 A CN200510050337 A CN 200510050337A CN 1811504 A CN1811504 A CN 1811504A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 74
- 229920000642 polymer Polymers 0.000 title abstract description 5
- 230000005540 biological transmission Effects 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 230000000414 obstructive effect Effects 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000013047 polymeric layer Substances 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The present invention discloses a polymer thermo-optic type optical waveguide switch based on multimode interference coupler structure. It includes one monomode input optical waveguide and two monomode output optical waveguides which are respectively connected with input end and output end of multimode interference optical waveguide area, a heater which is placed on one side over the multimode interference optical waveguide area along the optical transmission direction and a 1X2 optical waveguide switch formed from input end of one monomode input optical waveguide and output end of two monomode output optical waveguides. Besides, said invention also provides a blocking type 2X2 optical waveguide switch and its concrete structure.
Description
Technical field
The present invention relates to optical component, especially relate to a kind of polymeric thermo-optic type optical waveguide switch based on the multi-mode interference coupler structure.
Background technology
Photoswitch is the important optical component in optical communication and the optical information processing.At present, the method that is used to make photoswitch has multiple, and the most basic is to adopt precision machined method, and its volume is quite big, and driving power is quite high; Utilize micro mechanical technology, adopt the planar technology means, can obtain the very little device of size, though be one of important method of making the large-scale switches array, driving voltage is still quite high.Utilizing integrated optics technique, based on the planar optical waveguide mode, is the main method of making the photoswitch of low driving voltage or driving power.Based on the numeric type photoswitch of organic polymer material and thermo-optic effect, employing Y branch device architecture, be main integrated optics type photoswitch type, but the still suitable height of its desired driving power.For the photoswitch that further improves the integrated optics type drives efficient, the present invention proposes the polymeric thermo-optic type optical waveguide switch that utilizes the low driving power of multi-mode interference coupler structure fabrication.
Summary of the invention
The object of the present invention is to provide a kind of polymeric thermo-optic type optical waveguide switch, realize that the low-power of photoswitch drives based on the multi-mode interference coupler structure.
The technical solution adopted for the present invention to solve the technical problems is:
Comprise respectively a single mode input waveguide and two single mode output optical waveguides of being connected with output terminal with the input end in multi-mode interfrence optical waveguide district, in the side above the multi-mode interfrence optical waveguide district of optical transmission direction a well heater is set, the output terminal of the input end of a single mode input waveguide and two single mode output optical waveguides constitutes one 1 * 2 optical waveguide switch.
Input end in the multi-mode interfrence optical waveguide district connects two single mode input waveguides, in the both sides above the multi-mode interfrence optical waveguide district of optical transmission direction a well heater is set respectively, the output terminal of the input end of two single mode input waveguides and two single mode output optical waveguides constitutes 2 * 2 optical waveguide switch of an obstructive type.
The length in multi-mode interfrence optical waveguide district and width satisfy the list of 2 * 2 multi-mode interfrence optical waveguide from the map condition, and be single odd-order situation from map, promptly will export by axisymmetric opposite side output terminal from it transmits from the light wave of an one input end input.
Described well heater is with the metal electrode of step mode heating work.
The useful effect that the present invention has is:
The present invention is based on the multi-mode interference coupler structure, utilized the thermo-optic effect of polymeric material, optical waveguide switch has advantages such as driving power is low, and device size is little, and manufacture craft is simple.
Description of drawings
Fig. 1 is based on polymeric thermo-optic type 1 * 2 optical waveguide switch of multi-mode interference coupler structure;
Fig. 2 is based on polymeric thermo-optic type 2 * 2 optical waveguide switches of multi-mode interference coupler structure.
Among the figure: 1, multi-mode interfrence optical waveguide district, 2, the single mode input waveguide, 3, the single mode output optical waveguide, 4, the single mode output optical waveguide, 5, well heater, 6, well heater, 7, the single mode input waveguide.
Embodiment
As shown in Figure 1, the present invention includes respectively single mode input waveguide 2 being connected with output terminal with the input end in multi-mode interfrence optical waveguide district 1 and two single mode output optical waveguides 3,4 and the input end of 5, one single mode input waveguides 2 of a well heater is set and the output terminal of two single mode output optical waveguides 3,4 constitutes one 1 * 2 optical waveguide switch in the side above the multi-mode interfrence optical waveguide district 1 of optical transmission direction.
As shown in Figure 2, input end in multi-mode interfrence optical waveguide district 1 connects two single mode input waveguides 2,7, the output terminal that the input end of 5,6, two single mode input waveguides 2,7 of a well heater and two single mode output optical waveguides 3,4 are set respectively in the both sides above the multi-mode interfrence optical waveguide district 1 of optical transmission direction constitutes 2 * 2 optical waveguide switch of an obstructive type.
The length in multi-mode interfrence optical waveguide district 1 and width satisfy the list of 2 * 2 multi-mode interfrence optical waveguide from the map condition, and be single odd-order situation from map, promptly will export by axisymmetric opposite side output terminal from it transmits from the light wave of an one input end input.
Described well heater is with the metal electrode of step mode heating work.Described optical waveguide is a polymer optical wave guide.
Embodiments of the present invention have multiple, below are an embodiment, but only limit to this embodiment by no means.
With silicon chip or glass is substrate, adopt spin coated film forming legal system to make restriction polymeric layer down, make core polymer layer again, and with photoetching and dry etching, produce the waveguide figure of multi-mode interfrence optical waveguide district 1 and single mode input waveguide 2,7 and single mode output optical waveguide 3,4.The restriction polymeric layer is gone up in coating after finishing sandwich layer.After finishing each layer of polymer optical wave guide, on polymkeric substance, steam the last layer metallic gold.Usually can between gold layer and polymeric layer, add and steam one deck thin crome metal or titanium, to strengthen the adhesiveness between gold and polymkeric substance.On this basis, carry out the corrosion of photoetching and Jin Yuge again, produce needed metallic gold electrode structure as well heater 5,6.Usually meeting be electroplated outside the heating zone of well heater, and thickening gold layer is to improve the efficient of well heater when heating.
Claims (4)
1, a kind of polymeric thermo-optic type optical waveguide switch based on the multi-mode interference coupler structure, it is characterized in that: comprise respectively the single mode input waveguide (2) and two the single mode output optical waveguides (3,4) that are connected with output terminal with the input end of multi-mode interfrence optical waveguide district (1), in the side above the multi-mode interfrence optical waveguide district (1) of optical transmission direction a well heater (5) is set, the output terminal of the input end of a single mode input waveguide (2) and two single mode output optical waveguides (3,4) constitutes one 1 * 2 optical waveguide switch.
2, a kind of polymeric thermo-optic type optical waveguide switch according to claim 1 based on the multi-mode interference coupler structure, it is characterized in that: the input end in multi-mode interfrence optical waveguide district (1) connects two single mode input waveguides (2,7), in the both sides along top, the multi-mode interfrence optical waveguide district (1) of optical transmission direction a well heater (5,6) is set respectively, the output terminal of the input end of two single mode input waveguides (2,7) and two single mode output optical waveguides (3,4) constitutes 2 * 2 optical waveguide switch of an obstructive type.
3, a kind of polymeric thermo-optic type optical waveguide switch according to claim 1 and 2 based on the multi-mode interference coupler structure, it is characterized in that: the list of the multi-mode interfrence optical waveguide of the length of multi-mode interfrence optical waveguide district (1) and width satisfied 2 * 2 is from the map condition, and be single odd-order situation from map, promptly will axisymmetric opposite side output terminal output from its transmission from the light wave of an one input end input.
4, a kind of polymeric thermo-optic type optical waveguide switch based on the multi-mode interference coupler structure according to claim 1 and 2, it is characterized in that: described well heater is with the metal electrode of step mode heating work.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2005100503374A CN1811504A (en) | 2005-05-16 | 2005-05-16 | Polymer thermal-optical type optical waveguide switch based on multimode interference coupler structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2005100503374A CN1811504A (en) | 2005-05-16 | 2005-05-16 | Polymer thermal-optical type optical waveguide switch based on multimode interference coupler structure |
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| Publication Number | Publication Date |
|---|---|
| CN1811504A true CN1811504A (en) | 2006-08-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2005100503374A Pending CN1811504A (en) | 2005-05-16 | 2005-05-16 | Polymer thermal-optical type optical waveguide switch based on multimode interference coupler structure |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108710175A (en) * | 2018-04-28 | 2018-10-26 | 北京协同创新研究院 | A kind of photoswitch, production method and opto-electronic device based on multi-mode interference coupler |
| CN110045464A (en) * | 2018-01-16 | 2019-07-23 | 上海交通大学 | The difunctional coupler of vertical-horizontal based on oval multiple-mode interfence |
| CN113253537A (en) * | 2021-05-19 | 2021-08-13 | 东南大学 | Mach-Zehnder interferometer type adjustable fractional order optical field differentiator prepared based on SOI material |
-
2005
- 2005-05-16 CN CNA2005100503374A patent/CN1811504A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110045464A (en) * | 2018-01-16 | 2019-07-23 | 上海交通大学 | The difunctional coupler of vertical-horizontal based on oval multiple-mode interfence |
| CN110045464B (en) * | 2018-01-16 | 2020-09-29 | 上海交通大学 | Vertical and horizontal dual-function coupler based on elliptical multi-mode interference |
| CN108710175A (en) * | 2018-04-28 | 2018-10-26 | 北京协同创新研究院 | A kind of photoswitch, production method and opto-electronic device based on multi-mode interference coupler |
| CN108710175B (en) * | 2018-04-28 | 2020-08-21 | 北京协同创新研究院 | Optical switch based on multimode interference coupler, manufacturing method and optoelectronic device |
| CN113253537A (en) * | 2021-05-19 | 2021-08-13 | 东南大学 | Mach-Zehnder interferometer type adjustable fractional order optical field differentiator prepared based on SOI material |
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