CN1808184A - Antireflection coating, optical element, and optical transceiver module - Google Patents
Antireflection coating, optical element, and optical transceiver module Download PDFInfo
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- CN1808184A CN1808184A CNA2006100051032A CN200610005103A CN1808184A CN 1808184 A CN1808184 A CN 1808184A CN A2006100051032 A CNA2006100051032 A CN A2006100051032A CN 200610005103 A CN200610005103 A CN 200610005103A CN 1808184 A CN1808184 A CN 1808184A
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Abstract
The invention provides an antireflection film which can not decrease the optical transmittance and improves the durability compared with the prior art. The antireflection film is an antireflection film 6 arranged on a lens 5 which can at least transmit the light with two wavelength; the antireflection film is within the wavelength range of 1300 nm to 1600 nm and comprises two high reflective index layers 60, 62, two low reflective index layers 63, 65 whose reflective index is lower than that of the high reflective index layers 60, 62 and two auxiliary layers 61, 64 which have different compositions with the high reflective index layers 60,62 and the low reflective index layers 63,65 and are adjacent to the high reflective index layers 60, 62 or the low reflective index layers 63, 65.
Description
Technical field
The present invention relates to antireflection film, have the optical element of this antireflection film and have the light transmitting receiving module of this optical element.
Background technology
In the past, as the device that communicates by optical fiber, there were 2 kinds of wavelength X utilizing 1300～1600nm
1, λ
2Light carry out the light transmitting receiving module that the transmission of signal receives.
Such light transmitting receiving module has lens between the end face of light receiving element and light-emitting component and optical fiber, on the optical surface of these lens, the film or the diffraction structure (for example, referring to Patent Document 1～3) that make optical path change according to wavelength are set.Thereby in the inside of light transmitting receiving module, in the wavelength X that penetrates from the end face of optical fiber
1Light when being injected on the light receiving element, the wavelength X that penetrates from light-emitting component
2Light be injected on the above-mentioned end face of optical fiber.
But, in the light transmissive optical element that makes the low wavelength about 650nm and 780nm,, be provided with antireflection film from improving the viewpoint of transmissivity.
[patent documentation 1] spy opens the 2000-180671 communique
[patent documentation 2] spy opens the 2004-37928 communique
[patent documentation 3] spy opens the 2003-344715 communique
Summary of the invention
But, if the simple known antireflection film of using at the light of the low wavelength about 650nm and 780nm, setting is at the antireflection film of the light of any wavelength of 1300～1600nm, though can improve transmissivity, but the wavelength as target light becomes big, compare with known antireflection film, the thickness of each layer increases more in the film.Therefore, when lens body was made by plastics, in case the shape of body changes owing to the variation of temperature and humidity, then the strain that causes of the internal stress of each layer increased, and cracks.That is, the permanance of lens has reduced.
Problem of the present invention is, provides and can not reduce the optical transmission rate and compare the antireflection film that has improved permanance in the past, and have the optical element of this antireflection film and have the light transmitting receiving module of this optical element.
The invention of claim 1 record is in the wavelength region may of 1300～1600nm, and the antireflection film that has in the optical element of the light of at least 2 kinds of wavelength of transmission is characterised in that, possesses:
At least 1 high refractive index layer,
Than low at least 1 low-index layer of the refractive index of above-mentioned high refractive index layer and
Have with respect to above-mentioned high refractive index layer or above-mentioned low-index layer differently form, with this high refractive index layer or at least 1 adjacent auxiliary layer of low-index layer.
According to the invention of claim 1 record,,, prevent that transmissivity from descending so in the wavelength region may of 1300～1600nm, can prevent the reflection of light of at least 2 kinds of wavelength because have at least 1 high refractive index layer and low-index layer.
Also have, because it is adjacent to have the auxiliary layer of the composition different with high refractive index layer or low-index layer and high refractive index layer or low-index layer, so and do not have a situation of auxiliary layer, promptly only will be applied to the wavelength of the wavelength region may of 1300～1600nm at the known antireflection film of the light of the low wavelength about 650nm or 780nm, the situation that forms antireflection film is compared, and the thickness of this high refractive index layer or low-index layer is cut apart by auxiliary layer and diminished.Therefore, even situation about changing owing to the variation of temperature and humidity in the shape of above-mentioned optical element, the strain that is caused by the internal stress of each layer does not increase yet, so do not crack.In other words, can improve the permanance of lens.
Therefore, can not reduce the optical transmission rate, improve permanance with comparing in the past.
Also have, the thickness of auxiliary layer can be bigger than adjacent low-index layer or high refractive index layer, also can be littler than them.But from the viewpoint of the bed thickness that reduces antireflection film, the thickness of preferred auxiliary layer is littler than adjacent low-index layer or high refractive index layer.
The invention of claim 2 record is in the antireflection film of claim 1 record, is characterised in that above-mentioned auxiliary layer is between 2 above-mentioned high refractive index layers.
According to the invention of claim 2 record, because auxiliary layer is between 2 high refractive index layers,, compare with the situation that does not have auxiliary layer so 1 high refractive index layer becomes the state that is divided into 2 parts by auxiliary layer, the less thick of each high refractive index layer.Therefore, can prevent from really in high refractive index layer, to crack.
The invention of claim 3 record is in the antireflection film of claim 2 record, is characterised in that, above-mentioned high refractive index layer is that high-index material below 1.8 forms by the light with respect to wavelength 1450nm.
Here, high-index material is meant that for the light of wavelength 1450nm, refractive index is at the material more than 1.55.This high-index material can be a compound, also can be potpourri.
According to the invention of claim 3 record, high refractive index layer is that high-index material 1.8 below forms by the light with respect to wavelength 1450nm, even the change of the thickness of high refractive index layer is big, also can access the identical effect of putting down in writing with claim 2 of invention.
The invention of claim 4 record is in the antireflection film of claim 2 or 3 records, be characterised in that any at least high-index material as principal ingredient forms above-mentioned high refractive index layer in aluminium oxide, cerium oxide, lanthana, magnesium oxide, praseodymium oxide, scandium oxide, silicon monoxide, thoria and the yttria by containing.
According to the invention of claim 4 record, can access the identical effect of invention with claim 2 or 3 records.
Also have, contain as principal ingredient and be meant, except that the situation that contains principal ingredient and submember, also comprise the situation that only contains principal ingredient.
The invention of claim 5 record is in the antireflection film of claim 4 record, is characterised in that above-mentioned high-index material contains cerium oxide as principal ingredient.
According to the invention of claim 5 record, can access the identical effect of invention with claim 4 record.
The invention of claim 6 record is in the antireflection film of each record of claim 2～5, is characterised in that the thickness of each high refractive index layer is 30～70nm.
According to the invention of claim 6 record, because the thickness of high refractive index layer is little of 30～70nm, so can prevent from really in high refractive index layer, to crack.
The invention of claim 7 record is in the antireflection film of each record of claim 2～6, is characterised in that the thickness of above-mentioned auxiliary layer is 5～30nm.
Here, generally speaking, in order to form each layer of antireflection film with uniform thickness, the thickness of each layer need be more than 5nm.
According to the invention of claim 7 record, because the thickness of auxiliary layer below 30nm, so compare with the thickness situation bigger than 30nm, can prevent that the optical transmission rate from descending.
The thickness of auxiliary layer also has, because more than 5nm, so compare less than the situation of 5nm with thickness, can make the thickness of auxiliary layer even.
In addition, from the viewpoint of the batch process of antireflection film, the thickness of preferred auxiliary layer is more than 10nm.
The invention of claim 8 record is in the antireflection film of each record of claim 2～7, is characterised in that above-mentioned auxiliary layer is littler than the membrane stress of above-mentioned high refractive index layer.
Here, membrane stress tensile side be on the occasion of, be negative value in compressed side.Also have, the membrane stress difference is meant, for example, and the difference of 10MPa only in two-layer of the membrane stress on glass substrate during film forming.
Ji Zai invention according to Claim 8 can access the identical effect of invention with each record of claim 2～7.Also have, preferably the membrane stress at high refractive index layer is positive situation, and the membrane stress of auxiliary layer is for negative.
The invention of claim 9 record is in the antireflection film of each record of claim 2～8, be characterised in that, optical element base side from above-mentioned optical element, have above-mentioned high refractive index layer, above-mentioned auxiliary layer, above-mentioned high refractive index layer and above-mentioned low-index layer in order, above-mentioned 2 high refractive index layers have identical composition.
According to the invention of claim 9 record, can access the identical effect of invention with each record of claim 2～8.
The invention of claim 10 record is in the antireflection film of claim 1 record, is characterised in that above-mentioned auxiliary layer is adjacent with above-mentioned low-index layer, and above-mentioned low-index layer and above-mentioned auxiliary layer are formed by low-index material.
According to the invention of claim 10 record, because auxiliary layer and low-index layer are adjacent, low-index layer and auxiliary layer are formed by low-index material, so adjacent auxiliary layer has identical reflectivity Characteristics with low-index layer.Therefore, compare with the situation that does not have auxiliary layer, the anti-reflective function of low-index layer has been shared a part by auxiliary layer, the less thick of low-index layer.Thereby can prevent from really in low-index layer, to crack.
Here, low-index material is meant that for the light of wavelength 1450nm refractive index is less than 1.55 material.This low-index material can be a compound, also can be potpourri.
The invention of claim 11 record is in the antireflection film of claim 10 record, is characterised in that above-mentioned auxiliary layer is between 2 above-mentioned low-index layers.
According to the invention of claim 11 record, because auxiliary layer is between 2 low-index layers,, compare with the situation that does not have auxiliary layer so 1 low-index layer becomes the state that is divided into 2 parts by auxiliary layer, the less thick of each low-index layer.Therefore, can prevent from really in low-index layer, to crack.
The invention of claim 12 record is in the antireflection film of claim 11 record, is characterised in that to have at least 2 above-mentioned auxiliary layers, and these auxiliary layers are in respectively between 2 above-mentioned low-index layers.
Here, 2 auxiliary layers are in respectively between 2 low-index layers and are meant, 1 pair of low-index layer that an auxiliary layer is in is different with 1 pair of low-index layer that another auxiliary layer is in, and 1 pair of low-index layer difference is meant, in 2 paired low-index layers, at least 1 inequality.
According to the invention of claim 12 record, can access the identical effect of invention with claim 11 record.
The invention of claim 13 record is in the antireflection film of claim 11 or 12 records, is characterised in that above-mentioned auxiliary layer and above-mentioned 2 low-index layers have reverse membrane stress.
Here, as the direction of membrane stress, there are the direction of compressed side and the direction of tensile side.Also have, membrane stress is meant that oppositely a membrane stress is the direction of compressed side, and another membrane stress is the direction of tensile side.
In addition, if the thickness of the layer in the antireflection film is big, then the influence of the membrane stress that produces in this layer causes adjacent layer to be stretched, and exists in the situation that generation is peeled off in the antireflection film.
Invention according to claim 13 record, because 2 low-index layers and the auxiliary layer that is between these low-index layers have reverse membrane stress, so the membrane stress that produces in 2 low-index layers of this auxiliary layer of clamping is relaxed owing to the membrane stress that produces in auxiliary layer.Therefore, the membrane stress that is subjected in low-index layer, producing at adjacent layer and situation about being stretched can reduce the degree that is stretched.Even thereby, also can prevent from antireflection film, to produce and peel off in the big situation of the gross thickness of 2 low-index layers.
The invention of claim 14 record is in the antireflection film of each record of claim 10～13, is characterised in that the gross thickness of the above-mentioned low-index layer adjacent with auxiliary layer is 2～4 with respect to the ratio of the thickness of above-mentioned auxiliary layer.
Invention according to claim 14 record, because the gross thickness of the low-index layer adjacent with auxiliary layer is 2～4 with respect to the ratio of the thickness of this auxiliary layer, so and thickness can prevent to crack in low-index layer than big situation compares less than 2 situation or than 4 really.
The invention of claim 15 record is in the antireflection film of each record of claim 10～14, is characterised in that above-mentioned high refractive index layer is by forming for the high-index material greater than 1.8 for the light of wavelength 1450nm.
According to the invention of claim 15 record, can access the identical effect of invention with each record of claim 10～14.
The invention of claim 16 record is in the antireflection film of each record of claim 10～15, be characterised in that above-mentioned high refractive index layer is formed by any at least a kind of high-index material as principal ingredient that contains in hafnium oxide, tantalum pentoxide, titania and the zirconium dioxide.
According to the invention of claim 16 record, can access the identical effect of invention with each record of claim 10～15.
The invention of claim 17 record is in the antireflection film of each record of claim 10～16, is characterised in that the thickness of each high refractive index layer is below 70nm.
According to the invention of claim 17 record, because the thickness of each high refractive index layer is below 70nm, so can prevent from really to crack in high refractive index layer.
The invention of claim 18 record is in the antireflection film of each record of claim 10～17, is characterised in that the membrane stress of above-mentioned auxiliary layer is bigger than the membrane stress of above-mentioned low-index layer.
According to the invention of claim 18 record, can access the identical effect of invention with each record of claim 10～17.
The antireflection film of claim 19 record is in the antireflection film of each record of claim 10～18, be characterised in that, optical element base side from above-mentioned optical element, have above-mentioned high refractive index layer, above-mentioned low-index layer, above-mentioned auxiliary layer and above-mentioned low-index layer in order, above-mentioned 2 low-index layers have identical composition.
According to the invention of claim 19 record, can access the identical effect of invention with each record of claim 10～18.
The antireflection film of claim 20 record is in the antireflection film of claim 1 record, be characterised in that, have at least 2 above-mentioned auxiliary layers, an above-mentioned auxiliary layer is between 2 above-mentioned high refractive index layers, another above-mentioned auxiliary layer is adjacent with above-mentioned low-index layer, and above-mentioned low-index layer and above-mentioned auxiliary layer are formed by low-index material.
Invention according to claim 20 record, because an auxiliary layer is between 2 high refractive index layers, so 1 high refractive index layer becomes the state that is divided into 2 parts by this auxiliary layer, compare with the situation of this auxiliary layer not, the less thick of each high refractive index layer.Therefore, can prevent from really in high refractive index layer, to crack.
Also have, because another auxiliary layer and low-index layer are adjacent, low-index layer and this auxiliary layer are formed by low-index material, so adjacent above-mentioned another auxiliary layer has identical reflectivity Characteristics with low-index layer.Therefore, compare with the situation that does not have another auxiliary layer, the anti-reflective function of low-index layer has been shared a part by this auxiliary layer, the less thick of low-index layer.Thereby can prevent from really in low-index layer, to crack.
The antireflection film of claim 21 record is in the antireflection film of claim 20 record, is characterised in that, above-mentioned high refractive index layer is by being that high-index material below 1.8 forms for the light of wavelength 1450nm.
Invention according to claim 21 record, because high refractive index layer is by being that high-index material below 1.8 forms for the light of wavelength 1450nm, even, also can obtain the identical effect of invention with claim 20 record so become big situation at the thickness of high refractive index layer.
The antireflection film of claim 22 record is in the antireflection film of claim 20 or 21 records, be characterised in that any at least high-index material as principal ingredient forms above-mentioned high refractive index layer in aluminium oxide, cerium oxide, lanthana, magnesium oxide, praseodymium oxide, scandium oxide, silicon monoxide, thoria and the yttria by containing.
According to the invention of claim 22 record, can access the identical effect of invention with claim 20 or 21 records.
The antireflection film of claim 23 record is in the antireflection film of claim 22 record, is characterised in that above-mentioned high-index material contains cerium oxide as principal ingredient.
According to the invention of claim 23 record, can access the identical effect of invention with claim 22 record.
The antireflection film of claim 24 record is in the antireflection film of each record of claim 20～23, is characterised in that the thickness of each high refractive index layer is 30～70nm.
According to the invention of claim 24 record, because the thickness of high refractive index layer is little of 30～70nm, so can prevent from really in high refractive index layer, to crack.
The antireflection film of claim 25 record is in the antireflection film of each record of claim 20～24, is characterised in that the thickness of an above-mentioned auxiliary layer is 5～30nm.
According to the invention of claim 25 record, because the thickness of an auxiliary layer below 30nm, so compare with the thickness situation bigger than 30nm, can prevent that the optical transmission rate from descending.
The thickness of an auxiliary layer also has, because more than 5nm, so compare less than the situation of 5nm with thickness, can make the thickness of auxiliary layer even.
The antireflection film of claim 26 record is in the antireflection film of each record of claim 20～25, is characterised in that an above-mentioned auxiliary layer is littler than the membrane stress of above-mentioned high refractive index layer.
According to the invention of claim 26 record, can access the identical effect of invention with each record of claim 20～25.
The antireflection film of claim 27 record is in the antireflection film of each record of claim 20～26, is characterised in that above-mentioned another auxiliary layer is between 2 above-mentioned low-index layers.
Invention according to claim 27 record, because another auxiliary layer is between 2 low-index layers, so 1 low-index layer becomes the state that is divided into 2 parts by this auxiliary layer, compare with the situation of this auxiliary layer not, the less thick of each low-index layer.Therefore, can prevent from really in low-index layer, to crack.
The invention of claim 28 record is in the antireflection film of claim 27 record, is characterised in that to have at least 2 above-mentioned another auxiliary layers, and these another auxiliary layers are in respectively between 2 above-mentioned low-index layers.
According to the invention of claim 28 record, can access the identical effect of invention with claim 27 record.
The invention of claim 29 record is in the antireflection film of claim 27 or 28 records, is characterised in that above-mentioned another auxiliary layer and above-mentioned 2 low-index layers have reverse membrane stress.
Invention according to claim 29 record, because 2 low-index layers and the auxiliary layer that is between these low-index layers have reverse membrane stress, so the membrane stress that produces in 2 low-index layers of this auxiliary layer of clamping is relaxed owing to the membrane stress that produces in auxiliary layer.Therefore, the membrane stress that is subjected in low-index layer, producing at adjacent layer and situation about being stretched can reduce the degree that this is stretched.Even thereby, also can prevent from antireflection film, to produce and peel off in the big situation of the gross thickness of 2 low-index layers.
The antireflection film of claim 30 record is in the antireflection film of each record of claim 20～29, is characterised in that the gross thickness of the above-mentioned low-index layer adjacent with above-mentioned another auxiliary layer is 2～4 with respect to the ratio of the thickness of this auxiliary layer.
Invention according to claim 30 record, because the gross thickness of the low-index layer adjacent with another auxiliary layer is 2～4 with respect to the ratio of the thickness of this auxiliary layer, so with thickness than big situation compares less than 2 situation or than 4, can prevent from really in low-index layer, to crack.
The antireflection film of claim 31 record is in the antireflection film of each record of claim 20～30, is characterised in that the membrane stress of above-mentioned another auxiliary layer is bigger than the membrane stress of above-mentioned low-index layer.
According to the invention of claim 31 record, can access the identical effect of invention with each record of claim 20～30.
The invention of claim 32 record is in the antireflection film of each record of claim 20～31, be characterised in that, optical element base side from above-mentioned optical element, have above-mentioned high refractive index layer, an above-mentioned auxiliary layer, above-mentioned high refractive index layer, above-mentioned low-index layer and above-mentioned another auxiliary layer in order, above-mentioned 2 high refractive index layers have identical composition.
According to the invention of claim 32 record, can access the identical effect of invention with each record of claim 20～31.
The invention of claim 33 record is in the antireflection film of each record of claim 20～31, be characterised in that, optical element base side from above-mentioned optical element, have above-mentioned high refractive index layer, an above-mentioned auxiliary layer, above-mentioned high refractive index layer, above-mentioned another auxiliary layer and above-mentioned low-index layer in order, above-mentioned 2 high refractive index layers have identical composition.
According to the invention of claim 33 record, can access the identical effect of invention with each record of claim 20～31.
The invention of claim 34 record is in the antireflection film of each record of claim 20～31, be characterised in that, optical element base side from above-mentioned optical element, have above-mentioned high refractive index layer, an above-mentioned auxiliary layer, above-mentioned high refractive index layer, above-mentioned low-index layer, above-mentioned another auxiliary layer and above-mentioned low-index layer in order, above-mentioned 2 high refractive index layers have identical composition respectively with above-mentioned 2 low-index layers.
According to the invention of claim 34 record, can access the identical effect of invention with each record of claim 20～31.
The invention of claim 35 record is in the antireflection film of each record of claim 1～34, is characterised in that, by forming above-mentioned auxiliary layer with above-mentioned low-index layer identical materials with different forming.
According to the invention of claim 35 record, can access the identical effect of invention with each record of claim 1～34.
The invention of claim 36 record is in the antireflection film of each record of claim 1～35, is characterised in that above-mentioned high refractive index layer is formed by high-index material, and above-mentioned low-index layer and above-mentioned auxiliary layer are formed by low-index material.
According to the invention of claim 36 record, can access the identical effect of invention with each record of claim 1～35.
Also have, as high-index material, exist and contain compound and the potpourri as principal ingredient such as aluminium oxide, cerium oxide, lanthana, magnesium oxide, praseodymium oxide, scandium oxide, silicon monoxide, thoria, yttria, hafnium oxide, tantalum pentoxide, titania and zirconium dioxide.Also have,, exist and contain compound and the potpourri of silicon dioxide as principal ingredient as low-index material.
The invention of claim 37 record is in the antireflection film of claim 36 record, is characterised in that above-mentioned low-index material contains silicon dioxide as principal ingredient.
According to the invention of claim 37 record, can access the identical effect of invention with claim 36 record.
The invention of claim 38 record is an optical element, is characterised in that to have: in the wavelength region may of 1300～1600nm, and the optical element body of the light of at least 2 kinds of wavelength of transmission; Antireflection film with each record of the claim 1～37 that on the optical surface of above-mentioned optical element body, forms.
According to the invention of claim 38 record, can access the identical effect of invention with each record of claim 1～37.
The invention of claim 39 record is in the optical element of claim 38 record, is characterised in that, on the optical surface of above-mentioned optical element body diffraction structure is set.
According to the invention of claim 39 record, because diffraction structure is set on optical surface, so can correctly carry out the communication of the signal of the light that utilizes the multi-wavelength.Also have, compare, can make cheapization of optical element with the situation of the multilayer film that the wavelength separated type is set.
The invention of claim 40 record is in the optical element of claim 38 or 39 records, is characterised in that above-mentioned optical element body is by the plastics manufacturing.
According to the invention of claim 40 record, the optical element body in the situation that expands or shrink easily owing to the influence of heat, also can access the identical effect of invention with claim 38 or 39 records by the plastics manufacturing.
The invention of claim 41 record is a light transmitting receiving module, is characterised in that to have: light-emitting component and light receiving element that optical fiber one end of close two-way transmission light signal is provided with; And the optical element of each record of the claim 38～40 that between above-mentioned light-emitting component and above-mentioned light receiving element and above-mentioned optical fiber, is provided with.
According to the invention of claim 41 record, can access the identical effect of invention with each record of claim 38～40.
In the present invention, the ply stress (layer stress) of each material of formation antireflection film is to be taken at thin flexible monox substrate by deposition (depositing) each material independently to measure when deforming.Then, measure distortion and calculate the stress value that causes by distortion, be can be according to the method for following bibliographical information: R.W.Hoffman (1966), The mechanicalproperties of thin condensed films in " physics of Thin Films " edG.Hass and R.E.Thun
3, 211-73; R.W.Hoffman (1976), Stress in thinfilm:the relevance of grain boundaries and impurities, ThinSodlid Films,
34, 185-90; And A.E.Ennos (1966), Stress developed inoptical coating film coatings, Appl.Opt.
5, 51-61.
The invention effect
Invention according to claim 1 record can not reduce the optical transmission rate, has improved permanance with comparing in the past.
According to the invention of claim 2 record, much less can access the identical effect of putting down in writing with claim 1 of invention, can also prevent from really in high refractive index layer, to crack.
According to the invention of claim 3 record,, also can access the identical effect of invention with claim 2 record even become big situation at the thickness of high refractive index layer.
According to the invention of claim 4,5 records, can access the identical effect of invention with claim 2 or 3 records.
According to the invention of claim 6 record, much less can access the identical effect of invention with each record of claim 2～5, can also prevent from really in high refractive index layer, to crack.
According to the invention of claim 7 record, much less can access the identical effect of invention with each record of claim 2～6, can also prevent the decline of light transmission.And can make the thickness of auxiliary layer even.
According to Claim 8, the inventions of 9 records, can access the identical effect of invention with each record of claim 2～7.
According to the invention of claim 10 record, much less can access the identical effect of putting down in writing with claim 1 of invention, can also prevent from really in low-index layer, to crack.
According to the invention of claim 11 record, much less can access the identical effect of putting down in writing with claim 10 of invention, can also prevent from really in low-index layer, to crack.
According to the invention of claim 12 record, can access the identical effect of invention with claim 11 record.
According to the invention of claim 13 record, much less can access and claim 11 or the 12 identical effects of putting down in writing of invention, in the big situation of the gross thickness of 2 low-index layers, also can prevent from antireflection film, to produce and peel off.
According to the invention of claim 14 record, much less can access the identical effect of invention with each record of claim 10～13, with thickness than comparing less than 2 situation or greater than 4 situation, also can prevent from really in low-index layer, to crack.
Inventions according to claim 15,16 records can access the identical effect of invention with each record of claim 10～14.
According to the invention of claim 17 record, much less can access the identical effect of invention with each record of claim 10～16, can also prevent from really in high refractive index layer, to crack.
Inventions according to claim 18,19 records can access the identical effect of invention with each record of claim 10～17.
According to the invention of claim 20 record, much less can access the identical effect of putting down in writing with claim 1 of invention, can also prevent from really in high refractive index layer, to crack.And can prevent from really in low-index layer, to crack.
According to the invention of claim 21 record,, also can access the identical effect of invention with claim 20 record even become big situation at the thickness of high refractive index layer.
According to the invention of claim 22,23 records, can access the identical effect of invention with claim 20 or 21 records.
According to the invention of claim 24 record, much less can access the identical effect of invention with each record of claim 20～23, can also prevent from really in high refractive index layer, to crack.
According to the invention of claim 25 record, much less can access the identical effect of invention with each record of claim 20～24, can also prevent the decline of light transmission.And can make the thickness of auxiliary layer even.
According to the invention of claim 26 record, can access the identical effect of invention with each record of claim 20～25.
According to the invention of claim 27 record, much less can access the identical effect of invention with each record of claim 20～26, can also prevent from really in low-index layer, to crack.
According to the invention of claim 28 record, can access the identical effect of invention with claim 27 record.
According to the invention of claim 29 record, much less can access and claim 27 or the 28 identical effects of putting down in writing of invention, in the big situation of the gross thickness of 2 low-index layers, also can prevent from antireflection film, to produce and peel off.
According to the invention of claim 30 record, much less can access the identical effect of invention with each record of claim 20～29, with thickness than comparing less than 2 situation or greater than 4 situation, also can prevent from really in low-index layer, to crack.
According to the invention of claim 31～34 record, can access the identical effect of invention with each record of claim 20～30.
According to the invention of claim 35～38 record, can access the identical effect of invention with each record of claim 1～34.
According to the invention of claim 39 record, much less can access the identical effect of putting down in writing with claim 38 of invention, can also correctly carry out the communication of the signal of the light that utilizes the multi-wavelength.
According to the invention of claim 40 record, can access the identical effect of invention with claim 38 or 39 records.
According to the invention of claim 41 record, can access the identical effect of invention with each record of claim 38～40.
Description of drawings
Fig. 1 is the roughly pie graph of the light transmitting receiving module that the present invention relates to.
Fig. 2 (a) is the front elevation that is provided with the optical surface of diffraction structure, (b) is the sectional view along arrow B-B of the arrow directions X of Fig. 1.
Fig. 3 is the sectional view of expression antireflection film of the present invention.
Fig. 4 is the figure of reflectivity Characteristics of the lens of expression embodiment 1.
Fig. 5 is the figure of reflectivity Characteristics of the lens of expression embodiment 2.
Fig. 6 is the figure of reflectivity Characteristics of the lens of expression embodiment 3.
Fig. 7 is the figure of reflectivity Characteristics of the lens of expression embodiment 4.
Fig. 8 is the figure of reflectivity Characteristics of the lens of expression embodiment 5.
Fig. 9 is the figure of reflectivity Characteristics of the lens of expression embodiment 6.
Figure 10 is the figure of reflectivity Characteristics of the lens of expression embodiment 7.
Figure 11 is the figure of reflectivity Characteristics of the lens of expression embodiment 8.
Figure 12 is the figure of reflectivity Characteristics of the lens of expression embodiment 9.
Figure 13 is the figure of reflectivity Characteristics of the lens of expression embodiment 10.
Figure 14 is the figure of reflectivity Characteristics of the lens of expression embodiment 11.
Figure 15 is the figure of reflectivity Characteristics of the lens of expression embodiment 12.
Figure 16 is the figure of reflectivity Characteristics of the lens of expression embodiment 13.
Figure 17 is the figure of reflectivity Characteristics of the lens of expression comparative example 1.
Figure 18 is the figure of reflectivity Characteristics of the lens of expression comparative example 2.
Figure 19 is the figure of permanance of the lens of expression embodiment 1～13 and comparative example 1,2.
Figure 20 is the figure of reflectivity Characteristics of the lens of expression embodiment 14.
Figure 21 is the figure of reflectivity Characteristics of the lens of expression embodiment 15.
Figure 22 is the figure of reflectivity Characteristics of the lens of expression embodiment 16.
Figure 23 is the figure of permanance of the lens of expression embodiment 11,14～16.
Symbol description
1 light transmitting receiving module
4 optical fiber
One end of 4a optical fiber
5 lens (optical element)
6 antireflection films
30 light receiving elements
31 light-emitting components
50 lens body (optical element body)
The 50c diffraction structure
60,62 high refractive index layers
63,65 low-index layers
61,64 auxiliary layers
Embodiment
Below, with reference to the accompanying drawings, embodiments of the present invention are described.
Fig. 1 is the figure that roughly constitutes of expression light transmitting receiving module 1 of the present invention.
As shown in this Fig, light transmitting receiving module 1 has shell 10 cylindraceous, in these shell 10 inside, with toward each other state optical fiber is set and keeps body (below, be called and keep body) 2 and substrate 3.
Keeping body 2 is parts of hollow cylindrical, keeps an end 4a of optical fiber 4 in inside.
The end face 4b of one end 4a of optical fiber 4 and substrate 3 in opposite directions, the other end (not shown) is connected with optical communication system (not shown).Thus, optical fiber 4 can be by propagating optical signal between above-mentioned optical communication system and other light transmitting receiving module.
Substrate 3 has light receiving element 30 of the present invention and light-emitting component 31 in a side that keeps body 2.
In the present embodiment, utilize photodiode, utilize semiconductor laser as light-emitting component 31 as light receiving element 30.The light emergence face of light-emitting component 31 and the lens of glass 32 are installed light-emitting component 31 and lens 32 in opposite directions integratedly, constitute light-emitting device unit 33.
These light receiving elements 30 and light-emitting component 31 can transmit electric signal between the end device (not shown) by connector 34 and outside.Also has the use wavelength X of light receiving element 30, light-emitting component 31
1, λ
2Respectively in the wavelength region may of 1300～1600nm, in the present embodiment, λ
1=1490nm, λ
2=1310nm.
Between above-mentioned maintenance body 2 and substrate 3, lens 5 are set as optical element of the present invention.
Shown in Fig. 2 (a) and (b), optical surface 50a has diffraction structure 50c.Diffraction structure 50c by a plurality of echelon grating 50d ... form.These a few echelon grating 50d ... when extending in the horizontal direction, repeatedly mode is configured on the optical surface 50a periodically in vertical direction.Also have, in the present embodiment, each echelon grating 50d ... progression be 4.Shown in Fig. 2 (b), for example the whole height H of 1 echelon grating 50d is 15 μ m, and integral width W is 38 μ m.Also have, in the present embodiment, with form from the outstanding state of the reference field of optical surface 50a echelon grating 50d ..., but also can form recessed state.
Here, the plastics that use as lens body 50 are preferably by the cyclic olefin copolymer of following chemical formula (1) expression.As copoly type, can adopt known various copoly types such as atactic polymers, block polymer, alternating copolymer, preferred atactic polymers.
In the above-mentioned chemical formula (1), R
1Be from carbon number 2～20, at least a kind of bivalent radical selecting in the alkyl group of preferred carbon number 2～12, the further bivalent radical of preferably representing by following chemical formula (2).Also has R
1Structure can also can be used in combination more than 2 kinds only with a kind.In the chemical formula (2), p is 0～2 integer, is preferably 0 or 1.
R
2It is at least a kind of monad radical from the alkyl group of hydrogen and carbon number 1～5, selecting.As such R
2, can enumerate hydrogen, methyl, ethyl, n-pro-pyl, 1-propyl group, normal-butyl, 2-methyl-propyl etc., preferred hydrogen and/or methyl are preferably hydrogen.
In addition, x and y represent copolymerization ratio, and x/y is the real number more than 5/95, below 95/5.
As such plastics, in the present embodiment, the plastics APEL (ProductName) that adopts Mitsui Chemicals, Inc to make.
On the optical surface 50b of said lens body 50, antireflection film 6 is set.
As shown in Figure 3, this antireflection film 6 has 6 layers: high refractive index layer 60, auxiliary layer 61, high refractive index layer 62, low-index layer 63, auxiliary layer 64, low-index layer 65 successively from from the near side of lens body 50.
Form high refractive index layer 60,62 with high-index material with the thickness of 30～70nm, the refractive index of this high-index material for the light of 1450nm below 1.8.As high-index material, exist and contain any at least compound and potpourri in aluminium oxide, cerium oxide, lanthana, magnesium oxide, praseodymium oxide, scandium oxide, silicon monoxide, thoria and the yttria as principal ingredient, in the present embodiment, use contains the compound of cerium oxide as principal ingredient.
Form low-index layer 63,65 with low-index material, make that promptly the ratio of the summation of the thickness of the thickness of low-index layer 63 and low-index layer 65 is 2～4 with respect to the gross thickness ratio of auxiliary layer 64.The refractive index ratio high-index material of low-index material is little, so low-index layer 63,65 is compared with high refractive index layer 60,62 and had low-refraction.As the low-index material of the low-index layer 63,65 of present embodiment, adopt and contain compound or the potpourri of silicon dioxide as principal ingredient.Also have, the thickness of low-index layer 65 of face side that is positioned at antireflection film 6 is preferably below 145nm.
Auxiliary layer 61,64 has different compositions with respect to high refractive index layer 60,62 with low-index layer 63,65, thereby has different membrane stresses.In more detail, the membrane stress of auxiliary layer 61 is littler than high refractive index layer 60,62, and the membrane stress of auxiliary layer 64 is bigger than low-index layer 63,65.Also have, membrane stress the stretching side-draw on the occasion of, in compression side-draw negative value.
Form these auxiliary layer 61,64 as low-index materials such as the compound of principal ingredient or potpourris with the thickness of 5～30nm with containing silicon dioxide etc.Also have, also can form these auxiliary layers 61,64 as high-index materials such as the compound of principal ingredient or potpourris with containing cerium oxide.
Can adopt for example vacuum deposition method, quantity delivered and deposition speed, the heating-up temperature of adjusting gases such as oxygen when film forming form these auxiliary layers 61,64.For example, adopting principal ingredient and low-index layer 63,65 identical materials, forming the situation of the membrane stress auxiliary layer 64 bigger than low-index layer 63,65, perhaps, perhaps pass through to reduce deposition speed by increasing the oxygen quantity delivered, perhaps can by reducing heating-up temperature.Also can make the membrane stress of auxiliary layer 64 bigger by utilizing the different material of principal ingredient and low-index layer 63,65 than low-index layer 63,65.In addition, in the situation that forms the membrane stress auxiliary layer 61 littler, utilize the different material of principal ingredient and high refractive index layer 60,62, perhaps by increasing the oxygen quantity delivered than high refractive index layer 60,62, perhaps pass through to reduce deposition speed, perhaps can by reducing heating-up temperature.
The film build method of auxiliary layer 61,64 is not limited to vacuum deposition method, also can adopt ion assisted deposition method, ion plating etc.
Next, the reception operation of above-mentioned light transmitting receiving module 1 is described.
At first, if wavelength X
1Light penetrate from the above-mentioned end face 4b of optical fiber 4, then the optical surface 50a of lens 5 makes this light refraction, and is directed in the light receiving element 30.
At this moment, on the optical surface 50b of lens 5, because be provided with antireflection film 6, so prevented wavelength X with high refractive index layer 60,62 and low-index layer 63,65
1Reflection of light.
On the other hand, because it is adjacent with low-index layer 63,65 to have the auxiliary layer 61,64 and the high refractive index layer 60,62 of the membrane stress different with high refractive index layer 60,62 or low-index layer 63,65, so and do not have a situation of auxiliary layer 61,64, promptly will be applied to the wavelength of 1300～1600nm at the known antireflection film of the light of the low wavelength about 650nm or 780nm merely, form antireflection film (below, be called 2 layers of conversion film) situation compare the less thick of high refractive index layer 60,62 and low-index layer 63,65.Also have, because auxiliary layer 61,64 is between high refractive index layer 60,62 or the low-index layer 63,65, so 1 high refractive index layer, low-index layer become the state that is divided into 2 parts by auxiliary layer 61,64 respectively, compare with the situation that does not have auxiliary layer 61,64, the thickness of each high refractive index layer 60,62 and each low-index layer 63,65 becomes littler, particularly for high refractive index layer 60,62, thickness is little of 30～70nm.In addition, because the auxiliary layer that adjoins each other 64 and low-index layer 63,65 are formed by low-index material, so auxiliary layer 64 has identical reflectivity Characteristics with low-index layer 63,65, consequently, compare with the situation that does not have auxiliary layer 64, the anti-reflective function of low-index layer 63,65 has been shared a part by auxiliary layer 64, and the thickness of low-index layer 63,65 becomes littler.From foregoing as can be known, even situation about changing owing to the variation of temperature and humidity in the shape of lens 5 is big because the strain that the internal stress of high refractive index layer 60,62 and low-index layer 63,65 causes does not become, so prevented the generation of crackle.In addition, with respect to the thickness of auxiliary layer 64, the gross thickness ratio of the low-index layer 63,65 adjacent with this auxiliary layer 64 is 2～4, thus with thickness than comparing less than 2 situation or greater than 4 situation, prevented from really in low-index layer 63,65, to crack.
Then, light receiving element 30 will send to outside above-mentioned end device with the electric signal of light-receiving amount correspondence by connector 34, and signal receives EO.
Next, the signal transmit operation to above-mentioned light transmitting receiving module 1 describes.
At first, by the above-mentioned end device transmission electric signal of connector 34, if penetrate wavelength X from light-emitting device unit 33 from the outside
2Light, then lens 5 make this light refraction, are directed on the end face 4b of optical fiber 4.At this moment, same as above, prevented wavelength X
2Reflection of light.
Then, optical fiber 4 will be injected light by above-mentioned optical communication system and send to other light transmitting receiving module, and the signal transmit operation finishes.
Utilize above-mentioned light transmitting receiving module 1, because can prevent wavelength X
1, λ
2Reflection of light, so prevented the decline of transmissivity, the result is to prevent to produce in signal mistake.Also have, even because also can prevent the generation of crackle, so can descend by the permanance that antireflection film 6 prevents lens 5 is set in the situation of the change of shape of lens 5.Therefore, can not reduce the optical transmission rate, compare, permanance is improved with former above-mentioned 2 layers of conversion film.
In addition, because on optical surface 50a, be provided with diffraction structure 50c, utilize wavelength X so can correctly carry out
1, λ
2The communication of signal of light.
Also have, in the above-described embodiment, the antireflection film 6 of 6 layers of structure has been described, but has been in between 2 high refractive index layers, perhaps under the prerequisite that auxiliary layer 64 is adjacent with low-index layer, also can be for example structure of 4 layers of other numbers of plies such as structure at auxiliary layer 61.In addition, illustrated that antireflection film 6 has the situation of auxiliary layer 61,64, but also can have in these auxiliary layers 61,64 either party.Here, in the situation that only has auxiliary layer 64, preferably use with respect to the light of wavelength 1450nm and form high refractive index layer with the thickness below the 70nm for high-index material greater than 1.8 refractive index.As such high-index material, can adopt any at least a kind of the high-index material that contains in hafnium oxide, tantalum pentoxide, titania and the zirconium dioxide as principal ingredient, the preferred potpourri " OA600 " (ProductName, オ プ ト ロ Application Co., Ltd. system) that adopts tantalum oxide and titanium dioxide.
In addition, illustrated in antireflection film 6, only to have 1 situation that is in the auxiliary layer between the low-index layer, but also can have the auxiliary layer more than 2 that is in respectively between 2 low-index layers.
In addition, the situation that the membrane stress that is in the auxiliary layer 64 between 2 low-index layers 63,65 is bigger than low-index layer 63,65 has been described, but in the membrane stress of low-index layer 63,65 situation in compressed side (negative value), the membrane stress of auxiliary layer 64 also can tensile side (on the occasion of), promptly reverse with low-index layer 63,65.At this moment, the membrane stress that produces in 2 low-index layers 63,65 of clamping auxiliary layer 64 is relaxed owing to the membrane stress that produces in auxiliary layer 64, so the situation that the membrane stress that produces in by low-index layer 63,65 at high refractive index layer 62 adjacent layers such as grade stretches can reduce this level of stretch.Therefore, in the big situation of gross thickness of 2 low-index layers 63,65, also can prevent from antireflection film 6, to produce and peel off.
In addition, as the plastics that lens body 50 is used, illustrated that the spy opens disclosed material in the 2003-321518 communique but for example also can adopt with the material of above-mentioned chemical formula (1) expression.
In addition, illustrated that antireflection film 6 is arranged on the situation on the optical surface 50b, but also can be arranged on the optical surface 50a, can also on optical surface 50a, 50b, be provided with simultaneously.
In addition, illustrated the situation of optical element of the present invention as lens 5, but also can be with other optical elements such as spectroscopes as lens 5.
[embodiment 1]
Below, by enumerating embodiment and comparative example, further the present invention is specifically described.
The structure of＜optical element 〉
As the embodiment 1～13 of the lens of above-mentioned embodiment, the optical surface 50b that the antireflection film of the structure of layer shown in following table 1～table 13 is arranged on lens body 50 goes up and forms.Also have, 1,2 optical element as a comparative example, the optical surface 50b that the antireflection film of the structure of layer shown in following table 14, the table 15 is arranged on lens body 50 goes up and forms.In addition, in embodiment 1～9, the 3rd layer is auxiliary layer, in embodiment 10, the 2nd layer and the 5th layer is auxiliary layer, and in embodiment 11, the 2nd layer is auxiliary layer, in embodiment 12, the 2nd layer and the 4th layer is auxiliary layer, and in embodiment 13, the 1st layer and the 4th layer is auxiliary layer.Antireflection film shown in the table 14 is above-mentioned 2 layers of conversion film.
[table 1]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 1234 substrates | Air SiO 2 CeO 2 SiO 2 CeO 2 APEL | 1.00 1.46 1.75 1.46 1.75 1.53 | 255 62.2 15 50 | -100 40 -100 40 |
[table 2]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 1234 substrates | Air SiO 2 CeO 2 SiO 2 CeO 2 APEL | 1.00 1.46 1.75 1.46 1.75 1.53 | 255 62.2 5 50 | -100 40 -100 40 |
[table 3]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 1234 substrates | Air SiO 2 CeO 2 SiO 2 CeO 2 APEL | 1.00 1.46 1.75 1.46 1.75 1.53 | 255 62.2 10 50 | -100 40 -100 40 |
[table 4]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 1234 substrates | Air SiO 2 CeO 2 SiO 2 CeO 2 APEL | 1.00 1.46 1.75 1.46 1.75 1.53 | 255 62.2 20 50 | -100 40 -100 40 |
[table 5]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 1234 substrates | Air SiO 2 CeO 2 SiO 2 CeO 2 APEL | 1.00 1.46 1.75 1.46 1.75 1.53 | 255 62.2 25 50 | -100 40 -100 40 |
[table 6]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 1234 substrates | Air SiO 2 CeO 2 SiO 2 CeO 2 APEL | 1.00 1.46 1.75 1.46 1.75 1.53 | 255 62.2 30 50 | -100 40 -100 40 |
[table 7]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 1234 substrates | Air SiO 2 CeO 2 SiO 2 CeO 2 APEL | 1.00 1.46 1.75 1.46 1.75 1.53 | 266 70 15 30 | -100 40 -100 40 |
[table 8]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 1234 substrates | Air SiO 2 CeO 2 SiO 2 CeO 2 APEL | 1.00 1.46 1.75 1.46 1.75 1.53 | 255 30 15 70 | -100 40 -100 40 |
[table 9]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 1234 substrates | Air SiO 2 CeO 2 SiO 2 CeO 2 APEL | 1.00 1.46 1.75 1.46 1.75 1.53 | 255 50 15 30 | -100 40 -100 40 |
[table 10]
Reference wavelength 1450nm
| Layer | Material | Import gas flow | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 123456 substrates | Air SiO 2 SiO 2 SiO 2 CeO 2 SiO 2 CeO 2 APEL | O 2A small amount of O 2Volume O 2A small amount of O 2On a small quantity | 1.00 1.46 1.44 1.46 1.75 1.46 1.75 1.53 | 100 60 110 55 15 50 | -100 -10 -100 40 -100 40 |
[table 11]
Reference wavelength 1450nm
| Layer | Material | Import gas flow | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 1234 substrates | Air SiO 2 SiO 2 SiO 2 OA600 APEL | O 2A small amount of O 2Volume O 2On a small quantity | 1.00 1.46 1.44 1.46 1.99 1.53 | 110 75 110 66 | -100 -10 -100 +10 |
[table 12]
Reference wavelength 1450nm
| Layer | Material | Import gas flow | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 12345 substrates | Air SiO 2 SiO 2 CeO 2 SiO 2 CeO 2 APEL | O 2A small amount of O 2Volume O 2On a small quantity | 1.00 1.46 1.44 1.75 1.46 1.75 1.53 | 210 70 55 15 50 | -100 -10 40 -100 40 |
[table 13]
Reference wavelength 1450nm
| Layer | Material | Import gas flow | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 12345 substrates | Air SiO 2 SiO 2 CeO 2 SiO 2 CeO 2 APEL | O 2Volume O 2A small amount of O 2On a small quantity | 1.00 1.44 1.46 1.75 1.46 1.75 1.53 | 60 220 55 15 50 | -10 -100 40 -100 40 |
[table 14]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| | Air SiO 2 CeO 2 APEL | 1.00 1.46 1.75 1.53 | 265 126.56 | -100 40 |
[table 15]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| | Air SiO 2 OA600 APEL | 1.00 1.46 1.99 1.53 | 300 66 | -100 +10 |
The evaluation of＜reflectivity Characteristics 〉
The reflectivity Characteristics of the embodiment 1～13 that mensuration forms in a manner described, the lens of comparative example 1,2 obtains the such result of Fig. 4～Figure 18.Hence one can see that, and in any lens, the light for the wavelength region may of 1300～1600nm obtains good transmissivity.
＜Evaluation of Durability 〉
In addition, research exposes the lens of embodiment 1～13, comparative example 1,2 2000 hours situation under 85 ℃, 95 ℃, 100 ℃ hot conditions, with the situation that under 85 ℃ 85% hot and humid condition, exposes 2000 hours, and the having or not of crackle that is exposed to the situation under the thermal cycle conditions, obtain result shown in Figure 19.Hence one can see that, in the lens of embodiment 1～13, compares the permanance height with the lens of comparative example 1,2.Here, as thermal cycle conditions, be to utilize in order to make-40 ℃ of following 1 hours, following 5 minutes, 85 ℃ following 1 hour 800 round-robin conditions that move in circles of room temperature.Also have, among Figure 19, " zero " expression does not crack, and that " zero △ " expression only produces is extremely slight, no problem crackle is gone up in practicality, and " crackle " represents to have produced practical in-problem crackle.
＜comprehensive evaluation 〉
In summary, the lens of embodiment 1～13 can not reduce the optical transmission rate, compare with former above-mentioned 2 layers of conversion film, and permanance has improved, and are suitable for using as the lens of light transmitting receiving module 1.
On the other hand, the lens permanance of comparative example 1,2 descends as can be known, and the lens that are not suitable as light transmitting receiving module 1 use.
[embodiment 2]
Below, by enumerating embodiment, further the present invention is specifically described.
The structure of＜optical element 〉
As the embodiment 14～16 of the lens of above-mentioned embodiment, the optical surface 50b that the antireflection film of the structure of layer shown in following table 16～table 18 is arranged on lens body 50 goes up and forms.Also have, in embodiment 14, the 2nd layer is auxiliary layer, and in embodiment 15, the 2nd layer and the 5th layer is auxiliary layer, and in embodiment 16, the 2nd layer, the 4th layer and the 7th layer is auxiliary layer.
[table 16]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 1245 substrates | Air SiO 2 CeO 2 SiO 2 OA600 APEL | 1.00 1.46 1.44 1.46 1.99 1.53 | 110 75 110 66 | -100 40 -100 10 |
[table 17]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 123456 substrates | Air SiO 2 CeO 2 SiO 2 CeO 2 SiO 2 CeO 2 APEL | 1.00 1.46 1.75 1.46 1.75 1.46 1.75 1.53 | 205 15 90 62.5 15 50 | -100 40 -100 40 -100 40 |
[table 18]
Reference wavelength 1450nm
| Layer | Material | Refractive index | Thickness (nm) | Membrane stress (MPa) |
| Medium 12345678 substrates | Air SiO 2 CeO 2 SiO 2 CeO 2 SiO 2 CeO 2 SiO 2 CeO 2 APEL | 1.00 1.46 1.75 1.46 1.75 1.46 1.75 1.46 1.75 1.53 | 55 15 100 15 80 100 15 80 | -100 40 -100 40 -100 40 -100 40 |
The evaluation of＜reflectivity Characteristics 〉
Measure the reflectivity Characteristics of the lens of the embodiment 14～16 that forms in a manner described, obtain the such result of Figure 20～Figure 22.Hence one can see that, and in any lens, the light for the wavelength region may of 1300～1600nm obtains good transmissivity.
＜Evaluation of Durability (1) 〉
Also have, research exposes the lens of the foregoing description 11 and embodiment 14～16 the having or not of crackle of 2000 hours situation under 100 ℃ hot conditions, obtain result shown in Figure 23.Hence one can see that, in the lens of embodiment 11,14～16, do not produce practical in-problem crackle, the permanance height.Also have, among Figure 23, " zero " expression does not crack, and that " zero △ " expression only produces is extremely slight, no problem crackle in the practicality.
＜Evaluation of Durability (2) 〉
Also have, whether research produces film with 1 minute situation of tap water cooling and peels off after the lens of the foregoing description 11, embodiment 14～16 are boiled 1 minute in antireflection film, obtain result shown in Figure 23.Hence one can see that, in the lens of embodiment 11,14～16, produces practical in-problem film and peel off the permanance height.Also have, learn particularly and in the lens of embodiment 14～16, to compare that permanance is higher with the lens of embodiment 11.Among Figure 23, " zero " expression does not produce film and peels off, and " zero △ " expression only produces in atomic little, the practicality no problem film and peels off.
＜comprehensive evaluation 〉
In summary, the lens of embodiment 11,14～16 can not reduce the optical transmission rate, compare with former above-mentioned 2 layers of conversion film, can further improve permanance, are suitable for using as the lens of light transmitting receiving module 1.
Claims (41)
1. an antireflection film is in the wavelength region may of 1300～1600nm, and the antireflection film that has in the optical element of the light of at least 2 kinds of wavelength of transmission is characterised in that, possesses:
At least 1 high refractive index layer,
Than low at least 1 low-index layer of the refractive index of above-mentioned high refractive index layer and
Have with respect to above-mentioned high refractive index layer or above-mentioned low-index layer differently form, with this high refractive index layer or at least 1 adjacent auxiliary layer of low-index layer.
2. the antireflection film of claim 1 record is characterised in that above-mentioned auxiliary layer is between 2 above-mentioned high refractive index layers.
3. the antireflection film of claim 2 record is characterised in that, above-mentioned high refractive index layer is that high-index material below 1.8 forms by the light with respect to wavelength 1450nm.
4. the antireflection film of claim 2 or 3 records is characterised in that above-mentioned high refractive index layer is by containing aluminium oxide (Al
2O
3), cerium oxide (CeO
2), lanthana (La
2O
3), magnesium oxide (MgO), praseodymium oxide (Pr
2O
3), scandium oxide (Sc
2O
3), silicon monoxide (SiO), thoria (ThO
2) and yttria (Y
2O
3) in any at least high-index material form.
5. the antireflection film of claim 4 record is characterised in that one deck at least of above-mentioned high refractive index layer contains cerium oxide.
6. the antireflection film of each record of claim 2～5 is characterised in that, the thickness of each high refractive index layer is 30～70nm.
7. the antireflection film of each record of claim 2～6 is characterised in that, the thickness of above-mentioned auxiliary layer is 5～30nm.
8. the antireflection film of each record of claim 2～7 is characterised in that, above-mentioned auxiliary layer is littler than the membrane stress of above-mentioned high refractive index layer.
9. the antireflection film of each record of claim 2～8, be characterised in that, optical element base side from above-mentioned optical element, have above-mentioned high refractive index layer, above-mentioned auxiliary layer, above-mentioned high refractive index layer and above-mentioned low-index layer in order, above-mentioned 2 high refractive index layers have identical composition.
10. the antireflection film of claim 1 record is characterised in that above-mentioned auxiliary layer is adjacent with above-mentioned low-index layer, and above-mentioned low-index layer and above-mentioned auxiliary layer are formed by low-index material.
11. the antireflection film of claim 10 record is characterised in that above-mentioned auxiliary layer is between 2 above-mentioned low-index layers.
12. the antireflection film of claim 11 record is characterised in that to have at least 2 above-mentioned auxiliary layers, these auxiliary layers are between 2 above-mentioned low-index layers respectively mutually non-conterminously.
13. the antireflection film of claim 11 or 12 records is characterised in that above-mentioned auxiliary layer and above-mentioned 2 low-index layers have reverse membrane stress.
14. the antireflection film of each record of claim 10～13 is characterised in that, the gross thickness of the above-mentioned low-index layer adjacent with auxiliary layer is 2～4 with respect to the ratio of the thickness of above-mentioned auxiliary layer.
15. the antireflection film of each record of claim 10～14 is characterised in that, above-mentioned high refractive index layer is to form greater than 1.8 high-index material by the light with respect to wavelength 1450nm.
16. the antireflection film of each record of claim 10～15 is characterised in that, above-mentioned high refractive index layer is formed by any at least a kind high-index material that contains in hafnium oxide, tantalum pentoxide, titania and the zirconium dioxide.
17. the antireflection film of each record of claim 10～16 is characterised in that, the thickness of each high refractive index layer is below 70nm.
18. the antireflection film of each record of claim 10～17 is characterised in that, the membrane stress of above-mentioned auxiliary layer is bigger than the membrane stress of above-mentioned low-index layer.
19. the antireflection film of each record of claim 10～18, be characterised in that, optical element base side from above-mentioned optical element, have above-mentioned high refractive index layer, above-mentioned low-index layer, above-mentioned auxiliary layer and above-mentioned low-index layer in order, above-mentioned 2 low-index layers have identical composition.
20. the antireflection film of claim 1 record, be characterised in that, have at least 2 above-mentioned auxiliary layers, an above-mentioned auxiliary layer is between 2 above-mentioned high refractive index layers, another above-mentioned auxiliary layer is adjacent with above-mentioned low-index layer, and above-mentioned low-index layer and above-mentioned auxiliary layer are formed by low-index material.
21. the antireflection film of claim 20 record is characterised in that, above-mentioned high refractive index layer is that high-index material below 1.8 forms by the light with respect to wavelength 1450nm.
22. the antireflection film of claim 20 or 21 records is characterised in that above-mentioned high refractive index layer is by containing aluminium oxide (Al
2O
3), cerium oxide (CeO
2), lanthana (La
2O
3), magnesium oxide (MgO), praseodymium oxide (Pr
2O
3), scandium oxide (Sc
2O
3), silicon monoxide (SiO), thoria (ThO
2) and yttria (Y
2O
3) in any at least high-index material form.
23. the antireflection film of claim 22 record is characterised in that one deck at least of above-mentioned high refractive index layer contains cerium oxide.
24. the antireflection film of each record of claim 20～23 is characterised in that, the thickness of each high refractive index layer is 30～70nm.
25. the antireflection film of each record of claim 20～24 is characterised in that, the thickness of an above-mentioned auxiliary layer is 5～30nm.
26. the antireflection film of each record of claim 20～25 is characterised in that, an above-mentioned auxiliary layer is littler than the membrane stress of above-mentioned high refractive index layer.
27. the antireflection film of each record of claim 20～26 is characterised in that, above-mentioned another auxiliary layer is between 2 above-mentioned low-index layers.
28. the antireflection film of claim 27 record is characterised in that to have at least 2 above-mentioned another auxiliary layers, these auxiliary layers are between 2 above-mentioned low-index layers respectively mutually non-conterminously.
29. in the antireflection film of claim 27 or 28 records, be characterised in that above-mentioned another auxiliary layer and above-mentioned 2 low-index layers have reverse membrane stress.
30. in the antireflection film of each record of claim 20～29, be characterised in that the gross thickness of the above-mentioned low-index layer adjacent with above-mentioned another auxiliary layer is 2～4 with respect to the ratio of the thickness of this auxiliary layer.
31. the antireflection film of each record of claim 20～30 is characterised in that, the membrane stress of above-mentioned another auxiliary layer is bigger than the membrane stress of above-mentioned low-index layer.
32. the antireflection film of each record of claim 20～31, be characterised in that, optical element base side from above-mentioned optical element, have above-mentioned high refractive index layer, an above-mentioned auxiliary layer, above-mentioned high refractive index layer, above-mentioned low-index layer and above-mentioned another auxiliary layer in order, above-mentioned 2 high refractive index layers have identical composition.
33. the antireflection film of each record of claim 20～31, be characterised in that, optical element base side from above-mentioned optical element, have above-mentioned high refractive index layer, an above-mentioned auxiliary layer, above-mentioned high refractive index layer, above-mentioned another auxiliary layer and above-mentioned low-index layer in order, above-mentioned 2 high refractive index layers have identical composition.
34. the antireflection film of each record of claim 20～31, be characterised in that, optical element base side from above-mentioned optical element, have above-mentioned high refractive index layer, an above-mentioned auxiliary layer, above-mentioned high refractive index layer, above-mentioned low-index layer, above-mentioned another auxiliary layer and above-mentioned low-index layer in order, above-mentioned 2 high refractive index layers have identical composition respectively with above-mentioned 2 low-index layers.
35. the antireflection film of each record of claim 1～34 is characterised in that, by forming above-mentioned auxiliary layer with above-mentioned low-index layer identical materials with different forming.
36. the antireflection film of each record of claim 1～35 is characterised in that, above-mentioned high refractive index layer is formed by high-index material, and above-mentioned low-index layer and above-mentioned auxiliary layer are formed by low-index material.
37. the antireflection film of claim 36 record is characterised in that above-mentioned low-index material contains silicon dioxide.
38. an optical element is characterised in that to have: in the wavelength region may of 1300～1600nm, the optical element body of the light of at least 2 kinds of wavelength of transmission; With
The antireflection film of each record of the claim 1～37 that on the optical surface of above-mentioned optical element body, forms.
39. the optical element of claim 38 record is characterised in that, on the optical surface of above-mentioned optical element body diffraction structure is set.
40. the optical element of claim 38 or 39 records is characterised in that above-mentioned optical element body is the plastics manufacturing.
41. a light transmitting receiving module is characterised in that to have: light-emitting component and light receiving element that optical fiber one end of close two-way transmission light signal is provided with; With
The optical element of each record of the claim 38～40 that between above-mentioned light-emitting component and above-mentioned light receiving element and above-mentioned optical fiber, is provided with.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005011727 | 2005-01-19 | ||
| JP2005011727 | 2005-01-19 | ||
| JP2005212585 | 2005-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1808184A true CN1808184A (en) | 2006-07-26 |
Family
ID=36840180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006100051032A Pending CN1808184A (en) | 2005-01-19 | 2006-01-12 | Antireflection coating, optical element, and optical transceiver module |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1808184A (en) |
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| CN102584027A (en) * | 2012-01-09 | 2012-07-18 | 宁波永新光学股份有限公司 | Method for plating antireflection film on surface of optical glass tempered by chemical method |
| CN103814326A (en) * | 2011-09-20 | 2014-05-21 | 业纳光学系统有限公司 | Optical component for the IR range with stress-compensated coating |
| CN105814003A (en) * | 2013-12-16 | 2016-07-27 | 旭硝子株式会社 | Glass with anti-reflection film and method for manufacturing same |
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| CN107710025A (en) * | 2015-06-19 | 2018-02-16 | 三菱电机株式会社 | Optical component and laser machine |
| CN108911526A (en) * | 2010-10-08 | 2018-11-30 | 葛迪恩实业公司 | Temperable triple layer anti reflective coating, the coated article including temperable triple layer anti reflective coating and/or the method for making it |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108911526A (en) * | 2010-10-08 | 2018-11-30 | 葛迪恩实业公司 | Temperable triple layer anti reflective coating, the coated article including temperable triple layer anti reflective coating and/or the method for making it |
| CN103814326A (en) * | 2011-09-20 | 2014-05-21 | 业纳光学系统有限公司 | Optical component for the IR range with stress-compensated coating |
| CN103814326B (en) * | 2011-09-20 | 2016-08-17 | 业纳光学系统有限公司 | The optical structural element for infra-red range with the coating of stress compensation |
| CN102584027A (en) * | 2012-01-09 | 2012-07-18 | 宁波永新光学股份有限公司 | Method for plating antireflection film on surface of optical glass tempered by chemical method |
| CN102584027B (en) * | 2012-01-09 | 2014-10-29 | 宁波永新光学股份有限公司 | Method for plating antireflection film on surface of optical glass tempered by chemical method |
| CN105814003A (en) * | 2013-12-16 | 2016-07-27 | 旭硝子株式会社 | Glass with anti-reflection film and method for manufacturing same |
| CN105814003B (en) * | 2013-12-16 | 2018-11-30 | Ａｇｃ株式会社 | Band antireflection film glass and its manufacturing method |
| CN106415330A (en) * | 2014-02-04 | 2017-02-15 | 东海光学株式会社 | Optical product, glasses lens and glasses |
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