CN1806164A - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
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- CN1806164A CN1806164A CN 200580000555 CN200580000555A CN1806164A CN 1806164 A CN1806164 A CN 1806164A CN 200580000555 CN200580000555 CN 200580000555 CN 200580000555 A CN200580000555 A CN 200580000555A CN 1806164 A CN1806164 A CN 1806164A
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Abstract
Two sides of a single metal plate are bent to form the structure of a spring terminal having two spring portions. In the spring terminal having such a structure, the two spring portions are different from each other in a natural frequency. For this reason, when external vibrations are applied to a pressure sensor, even if one of the two spring portions of the spring terminal resonates with the external vibrations, the other spring portion can keep the electric connection between a circuit in a substrate and a terminal.
Description
Technical field
The present invention relates to the improved pressure transducer of a kind of resistibility to external vibration.
Background technology
What propose usually is to obtain the structure (for example, the open text No.JP2003-529070 of international patent application) of miniature pressure cell by the inner structure of simplifying pressure transducer.
What represent in Fig. 8 is the schematic cross-section of traditional pressure transducer.As shown in the figure, pressure transducer is such structure, and it comprises shell J1, hexagon housing J2 and equipment connector J3.
Shell J1 is fixed to housing J2 in the mode of passing the hexagon housing.End at this shell J1 is provided with pressure introducing hole J4, and the pressure measurement cell J5 that has vibrating membrane is disposed in the terminal part that this pressure is introduced hole J4.The surface in contact J7 of the substrate J6 of this pressure measurement cell J5 by having integrated circuit is electrically connected to the integrated circuit of substrate J6.In addition, the integrated circuit in substrate J6 is connected to the connector contact J9 that places equipment connector J3 by compression spring J8 (adopting the leaf spring of alphabetical S form).In addition, connector contact J9 is electrically connected to terminal J10.
Equipment connector J3 is fixed to hexagon housing J2 in such a way, i.e. overburden pressure measuring unit J5, and substrate J6 and compression spring J8 are to constitute a plug-in unit.Herein, equipment connector J3 has aerial lug (not drawing), so be electrically connected to external unit.
In above-mentioned structure, the integrated circuit among the substrate J6 is electrically connected to connector contact J9 by the compression spring J8 that adopts alphabetical S form.Particularly, the end of compression spring J8 is directly connected to substrate J6 by electrically conducting adhesive.On the other hand, when equipment connector J3 is installed into hexagon housing J2, the other end of compression spring J8 be used to be placed on equipment connector J3 in connector contact J9 contact.In this way, integrated circuit among the setting substrate J6 and the status of electrically connecting between the connector contact J9.
Yet, in above-mentioned traditional concrete structure, there is a problem by compression spring J8 conduction, when pressure transducer bears external vibration, compression spring J8 and external vibration resonance.At this moment, the end of compression spring J8 is directly connected to substrate J6, but the other end of compression spring J8 just is compressed and is positioned on the connector contact J9.Therefore, when compression spring J8 bore external vibration and resonates with it, possible was that the other end of compression spring J8 may become the state that separates with connector contact J9, in other words with the discontiguous state of connector contact J9.When such state occurring, substrate J6 and connector contact J9 electricity disconnect.Therefore, the force value signal of detection can not be fed to the outside.
In addition, when compression spring J8 produced resonance, in some cases, the compression spring J8 that contacts with connector contact J9 vibrated in the mode of friction connector contact J9.In this case, when the other end of compression spring J8 vibrated, compression spring J8 and connector contact J9 were worn.This can cause fault, i.e. the output of substrate J6 becomes unstable and shows that the signal of force value contains noise.
Particularly the problems referred to above appear in when pressure transducer is installed in the position that is easy to vibrate (for example, in the engine region of vehicle) easily.
Summary of the invention
In view of the above problems, an object of the present invention is to provide a kind of pressure transducer of output signal reliably, even when pressure transducer has the vibration that the outside applies.
To achieve these goals, in the described invention of claim 1, pressure transducer comprises: have the shell (10) that pressure is introduced hole (13); Bar (20) with hollow cylindrical, its end at the axis of hollow cylindrical has the deformable vibrating membrane spare of pressure effect (22) that is subjected to being introduced in the shell, has with pressure at the other end of this axis and introduces the passage (23) that the hole is communicated with; Be arranged on the vibrating membrane spare and the sensing part (24) of the distortion output electric signal of respond vibration film spare; Receive electric signal and respond the substrate (30) that this electric signal produces output signal; Have the spring terminal (40) of the spring section (41,42) that a plurality of natural frequencys differ from one another, (41a 42a) is bonded to substrate to an end of wherein said spring section; (41b 42b) nestles up and output signal is exported to extraneous terminal (50) with the other end of described spring section.
As mentioned above, by having the spring terminal of the spring section that natural frequency differs from one another, realize the electrical connection between substrate and the terminal.So, when pressure transducer is subjected to external vibration, even spring section and external vibration resonance can prevent that another spring section and external vibration from resonating.Therefore, the circuit in the substrate always can be electrically connected with terminal.In this way, improve the pressure transducer anti-vibration and improve pressure transducer stably output signal be possible.
In addition, described spring terminal is in this state, and the end sections of each spring section is directly bonded to substrate.In other words, even when pressure transducer bears external vibration, can prevent that spring section is moved to the surface of substrate.Even also rubbing thus, resonance of the other end of each spring section and vibration, the other end of each spring section and the resonance of the external vibration of different frequency be in the terminal of different conditions.Therefore, each spring section is different with the degree of terminal wearing and tearing, and the degree of wearing and tearing has redundancy.Therefore, it is possible reducing each spring section and terminal abrasion.
In the present invention as claimed in claim 2, pressure transducer comprises: have the shell (10) that pressure is introduced hole (13); Bar (20) with hollow cylindrical, its end at the axis of hollow cylindrical have the easily deformable vibrating membrane spare (22) of pressure that is subjected to being introduced in the shell, have with pressure at the other end of this axis and introduce the passage (23) that the hole is communicated with; Be arranged on the vibrating membrane spare and the sensing part (24) of the distortion output electric signal of respond vibration film spare; Receive electric signal and respond the substrate (30) that this electric signal produces output signal; Has a plurality of natural frequencys spring terminal (40) of different spring sections (41,42) mutually; With output signal is exported to extraneous terminal (50), (41a 42a) is bonded to described terminal to an end of wherein said spring section, and (41b 42b) nestles up and is arranged on on-chip electrode (33) other end of described spring section.
Even external vibration is applied in to pressure transducer, because spring terminal has the spring section that a plurality of natural frequencys differ from one another, have only a spring section to bear resonance effects, and by not bearing another spring section of resonance effects, the circuit in the substrate always can be electrically connected described terminal.Therefore, even when pressure transducer bears external vibration, the substrate of another end of each spring section and the resonance of the external vibration of different frequency and the different conditions that therefore rubs.Therefore, the degree of wear of each spring section and substrate is different, and the degree of wearing and tearing has redundancy.Therefore, the wearing and tearing that reduce each spring section and substrate are possible.
In the present invention as claimed in claim 3, pressure transducer also comprises the connector cover (60) that is bonded to shell, and described bonding location is and the position of arranging the surface opposite of described bar in shell.In addition, described substrate has electrode (33), and the other end of spring section nestles up this electrode, and each electrode (33) form the circumferencial direction of justifying (E) stretch fan-shaped, the center of circle of described circle (E) and has any radius on the central axis that connects shell and connector cover.
Because electrode is respectively with fan-shaped formation, even when the connector cover rotates around its central axis, described electrode is formalized along rotation direction.Therefore, this can enlarge the tolerance degree that is used to connect, and breaks away from electrode up to the other end of the spring section of the spring terminal that is bonded to terminal.Therefore, when shell is connected to the connector cover, because the other end of spring section breaks away from described electrode, improve pressure transducer to the resistibility of external vibration and prevent the decline of pressure transducer recovery rate, the reliability of improving pressure transducer is possible.
In the present invention as claimed in claim 4, pressure transducer comprises: have the shell (10) that pressure is introduced hole (13); Bar (20) with hollow cylindrical, it is at an end of the axis of hollow cylindrical, has the deformable vibrating membrane spare of pressure effect (22) that is subjected to being introduced in the shell, has with pressure at the other end of this axis and introduces the passage (23) that the hole is communicated with; Be arranged on the vibrating membrane spare and the sensing part (24) of the distortion output electric signal of respond vibration film spare; Receive electric signal and respond the substrate (30) that this electric signal produces output signal; (wherein an end of spring section is bonded to substrate for 43a, spring terminal 43b) (43) to have the mutually the same spring section of a plurality of natural frequencys; Abut against with the other end of spring section and to the terminal (50,53,55) of extraneous output signal output.In addition, the spring section of spring terminal differs from one another on the curve form of spring section.
In order to realize the electrical connection between substrate and the terminal, the spring terminal with the mutually the same spring section of natural frequency is placed between substrate and the terminal in such a way, and promptly each spring section curve form differs from one another.Thus, each spring section can have the resonant frequency that differs from one another.Therefore, even when pressure transducer bears external vibration and spring section and external vibration resonance, another spring section with external vibration resonance, so total energy keeps the electrical connection between substrate and the terminal.In this way, improve pressure transducer to the resistibility of vibration and thus pressure transducer reliably output signal be possible.
In addition, because an end of each spring section is fixed to substrate, even when pressure transducer bears external vibration, the other end of spring section and the resonance of the external vibration of different frequency are so the other end of spring section differs from one another on the state of friction substrate.Therefore, each spring section and substrate differ from one another on the degree of wearing and tearing and the degree of wearing and tearing has redundancy.Correspondingly, the wearing and tearing that reduce each spring section and substrate are possible.
In the present invention as claimed in claim 5, pressure transducer comprises: have the shell (10) that pressure is introduced hole (13); Bar (20) with hollow cylindrical, it is at an end of the axis of hollow cylindrical, has the easily deformable vibrating membrane spare (22) of pressure that is subjected to being introduced in the shell, has with pressure at the other end of this axis and introduces the passage (23) that the hole is communicated with; Be arranged on the vibrating membrane spare and the sensing part (24) of the distortion output electric signal of respond vibration film spare; Receive electric signal and respond the substrate (30) that this electric signal produces output signal; Have the mutually the same spring section of a plurality of natural frequencys (43a, spring terminal 43b) (43); With terminal (50) to extraneous output signal output.Herein, an end of spring section is bonded to terminal, the other end of spring section against again be arranged on on-chip electrode (33).In addition, the curve form of the spring section of spring terminal differs from one another.
In order to realize the electrical connection between substrate and the terminal, the spring terminal with the mutually the same spring section of natural frequency is placed between substrate and the terminal in such a way, and promptly each spring section curve form differs from one another.Thus, each spring section can have the resonant frequency that differs from one another.Therefore, even when external vibration is applied in to pressure transducer, has only one in each spring section and bear resonance effects.So, do not bear the spring section of resonance effects by another, total energy keeps the electrical connection between substrate and the terminal, even and when pressure transducer bears external vibration, pressure transducer total energy output signal.
In addition, because an end of each spring section is fixed to substrate, even when pressure transducer bears external vibration, the other end of spring section and the resonance of the external vibration of different frequency are so the other end of spring section differs from one another on the state of friction substrate.Therefore, each spring section and substrate differ from one another on the degree of wearing and tearing and the degree of wearing and tearing has redundancy.Correspondingly, the wearing and tearing that reduce each spring section and substrate are possible.
In the present invention as claimed in claim 6, pressure transducer also comprises the connector cover (60) that is bonded to shell, and described bonding location is and the position of arranging the surface opposite of described bar in shell.In addition, described substrate has electrode (33), and the other end of spring section nestles up this electrode, and each electrode (33) form the circumferencial direction of justifying (E) stretch fan-shaped, the center of circle of described circle (E) and has any radius on the central axis that connects shell and connector cover.
Described electrode forms fan-shaped, and described electrode is formalized along rotation direction.Therefore, this can enlarge the tolerance degree that is used to connect, and breaks away from electrode up to the other end of the spring section of the spring terminal that is bonded to terminal.Therefore, when shell is connected to the connector cover, because the other end of spring section breaks away from described electrode, improve pressure transducer to the resistibility of external vibration and prevent the decline of pressure transducer income, the reliability of improving pressure transducer is possible.
Among the present invention as claimed in claim 7, described spring section forms the shape at the alphabetical V of an end of this part and other end structure.In this way, described spring section can form the shape of alphabetical V.
The reference number of the various devices in bracket is indicated the corresponding relation between various devices and the described in the following embodiments concrete device as mentioned above.
Description of drawings
Fig. 1 is the schematic cross-section according to the pressure transducer of the first embodiment of the present invention.
Fig. 2 (a) and 2 (b) are the synoptic diagram of the spring terminal of first embodiment, and wherein Fig. 2 (a) is near the synoptic diagram the spring terminal, and Fig. 2 (b) is the view that arrow A is cut open from Fig. 2 (a).
Fig. 3 (a) and 3 (b) are the synoptic diagram of the spring terminal of second embodiment, and wherein Fig. 3 (a) is near the synoptic diagram the spring terminal, and Fig. 3 (b) is the view of the substrate when connector cover one side is seen.
Fig. 4 is near the synoptic diagram of spring terminal of the 3rd embodiment.
Fig. 5 (a), 5 (b) and 5 (c) are the spring terminal of expression among first embodiment
The view of embodiment.
Fig. 6 (a), 6 (b) and 6 (c) are the spring terminal of expression among second embodiment
The view of embodiment.
Fig. 7 (a), 7 (b), 7 (c) and 7 (d) are the views of the embodiment of the spring terminal among expression the 3rd embodiment.
Fig. 8 is the schematic cross-section of pressure transducer in the prior art.
Embodiment
The preferred embodiments of the present invention
(first embodiment)
After this, with reference to the respective drawings explanation first embodiment of the present invention.Described in this embodiment pressure transducer is used in the position that pressure transducer bears several KHz vibration, for example in the engine room of vehicle and similar position.
Fig. 1 is the schematic cross-section of pressure transducer 100 among first embodiment.As shown in the figure, pressure transducer 100 is configured to comprise shell 10, bar 20, substrate 30, spring terminal 40, terminal 50 and connector cover 60.
Shell 10 is to be made of metal and to pass through to cut, cold forging or the hollow outer cover that similarly processes, and have threaded portion 11, it can be connected to the body that will measure by threaded engagement.Described threaded portion 11 is formed on the external peripheral surface of shell 10 1 ends.Hole extends to the other end of shell 10 from the opening 12 that is formed on shell 10 1 ends, and in other words, pressure is introduced hole 13 and is formed in the shell 10, and this pressure is introduced hole 13 and is used as pressure and introduces passage.
Bar 20 is parts of the hollow circular cylinder that is made of metal, and has the male screw portion 21 on the excircle part that is formed on bar 20, introduces female screw 14 on the hole 13 to be tightened the pressure that is formed on shell 10, so held by shell 10.This bar 20 has the thin vibrating membrane 22 of the pressure distortion that is subjected to being introduced into shell 10 at its axis one end, and has the passage 23 that is communicated with vibrating membrane 22 at the other end.The pressure of described passage 23 and shell 10 is introduced hole 13 becomes connected state, is fed to vibrating membrane 22 so the pressure of body that will be measured is introduced hole 13 from pressure.
In addition, make by monocrystalline silicon and the sensing chip 24 that is used for sensed pressure is installed in the vibrating membrane 22 of bar 20.This sensing chip 24 has integrated circuit, when vibrating membrane 22 is subjected to being introduced into the pressure effect in the bar 20 and is out of shape, what sensing chip 24 served as is the effect of sensing part (strainometer), and the resistance variations that is about to the response distortion is converted into electric signal also with this electric signal output.
Particularly, the pressure in vibrating membrane 22 is subjected to leading-in pole 20 and when being out of shape,, make the strainometer distortion on the sensing chip 24 that is placed on the vibrating membrane 22 according to this distortion.At this moment, by being out of shape the piezoresistance effect that causes thus, the resistance of strainometer is changed.Therefore, by this changes in resistance of perception, energy measurement imposes on the pressure of strainometer, promptly is introduced into the pressure of bar 20.Then, response pass is given the pressure of vibrating membrane 22, and sensing chip 24 produces electric signal.This key property to pressure transducer 100 is influential.
In addition, be 3 owing to be used for the quantity of the terminal 50 of this embodiment pressure transducer 100, as hereinafter described, three spring terminals 40 are disposed on the substrate 30.Each spring terminal 40 is electrically connected to each terminal 50.
Connector cover 60 is the connectors that are used to export by pressure transducer 100 sensed pressure value signals, and is made by resin or similar material.By O shape ring 70, connector cover 60 is installed in the other end of shell 10, connector cover 60 is compressed in the mode of such state, the other end of fixed housing 10.Thus, connector cover 60 becomes integral body and constitutes a Package casing with shell 10, is used to prevent to be arranged in the mechanical force that the interior sensing chip 24 of this Package casing, substrate 30, electrical connection etc. are made moist and are subjected to the outside.
Then, with reference to Fig. 2 above-mentioned spring terminal 40 is described.Fig. 2 is the synoptic diagram that is used for the spring terminal 40 of this embodiment, and wherein Fig. 2 (a) is the synoptic diagram of the peripheral region of spring terminal 40, and Fig. 2 (b) is the view when the arrow A of Fig. 2 (a) is seen.
As mentioned above, spring terminal 40 is made by the single metal plate.Particularly, spring terminal 40 has such structure, and the both sides of this sheet metal are bent to form a plurality of plate spring portion, i.e. two spring sections 41,42.Each spring section 41,42 has into end 41a and another end 41b of alphabetical V-arrangement, or end 42a and another end 42b.In this embodiment, shown in Fig. 2 (a), because the sweep length at these sheet metal two ends differs from one another, one of spring section 41,42 is more flexible than another.Then, an end 41a of spring section 41,42,42a is bonded to substrate 30.
In this embodiment, the thickness of the sheet metal of formation spring terminal 40 is 0.08mm.In addition, the width of sheet metal is 1.2mm, but the width of each sweep on these sheet metal two ends is 1.0mm.As mentioned above, in sheet metal, its width of part that is bonded to substrate is made the width greater than the part that forms spring, and this is because the bond area on the substrate 30 is extended reliably spring terminal 40 is fixed on the substrate 30.
In addition, the length that one of the sweep at sheet metal two ends has is, 2.5mm for example, and the length that another part has is 5.0mm.Because the sweep length at the sheet metal two ends differs from one another, the natural frequency of each spring section 41,42 differs from one another.
In the spring terminal 40 that has shown in Fig. 2 (b) structure, when spring terminal 40, i.e. each spring section 41,42 other end 41b, 42b by terminal 50 when substrate 30 directions are compressed, each spring section 41,42 other end 41b, 42b become and nestle up terminal 50.In a word, when each spring section 41,42 is compressed by terminal 50, since the restoring force of each spring section 41,42, each spring section 41,42 other end 41b, 42b become and the tight state of contact in the bottom of terminal 50, so spring terminal 40 can be electrically connected to terminal 50.
In the pressure transducer 100 with above-mentioned structure, vibrating membrane 22 is subjected to introducing the pressure of introducing in hole 13 and being tightened up from pressure, is output to substrate 30 so respond the electric signal that its stress is shown as resistance.Then, this electric signal is converted into output signal by the circuit in the substrate 30, and this output signal is output to terminal 50 by the circuit of spring terminal 40 from substrate 30, so pressure is perceived.
Like this, when mechanical vibration were applied in to pressure transducer 100, the spring section 41,42 and the mechanical vibration of spring terminal 40 may produce resonance.When the frequency of mechanical vibration no better than during the natural frequency of spring section, resonance produces.Yet because spring terminal 40 is provided with the spring section 41,42 that two natural frequencys differ from one another, even one of spring section 41,42 produces resonance with mechanical vibration, another spring section can not resonate with mechanical vibration.Therefore, even when mechanical vibration are applied in to pressure transducer 100, also can keep being electrically connected between circuit and the terminal 50 in the substrate 30, so pressure transducer 100 can be exported stable signal.
Being electrically connected by the spring terminal with spring section 41,42 that two natural frequencys differ from one another between the circuit in the substrate 30 and the terminal 50 realizes.Therefore, when pressure transducer 100 was subjected to external vibration, even one of two spring sections 41,42 may produce resonance with external vibration, another spring section can not produce resonance with external vibration.Therefore, circuit in the substrate 30 and terminal can be electrically connected to each other reliably.Whereby, improve the resistibility of 100 pairs of vibrations of pressure transducer and to make the stable signal of pressure transducer output thus be possible.
In addition, in spring terminal 40, an end 41a of each spring section 41,42, the width of 42a are greater than other end 41b, and the width of 42b is to enlarge the bond area at substrate 30.Therefore, even when pressure transducer 100 is subjected to external vibration, spring section 41,42 and substrate 30 relevant surfaces can not vibrate.Thus, even as the other end 41b of each spring section 41,42, during the 42b vibration, the other end 41b of each spring section 41,42, the 42b terminal 50 that can not rub.Therefore, prevent that the wearing and tearing on spring section 41,42 and the terminal 50 from being possible.
(second embodiment)
In this embodiment, will the part different with first embodiment only be described.This embodiment is different from the first embodiment part and is that spring terminal 40 is bonded to terminal 50.
Fig. 3 is the synoptic diagram of this embodiment medi-spring terminal 40, and wherein Fig. 3 (a) is the synoptic diagram of the peripheral region of spring terminal 40, and Fig. 3 (b) is the view of substrate 30 when connector contact 60 1 sides are seen.
Shown in Fig. 3 (a), spring terminal 40 is in the state of the bottom 51 that is bonded to terminal 50.For example by electric resistance welding, described spring terminal 40 is bonded to the bottom of terminal 50.Herein, for the spring terminal 40 that uses in this embodiment, adopt with first embodiment in the same part.
In addition, shown in Fig. 3 (b), substrate 30 has the electrode 33 that is arranged by this way thereon, and promptly electrode 33 is electrically connected to terminal 50 by spring terminal 40.Each electrode 33 forms the shape in the circumferencial direction extension of circle E, promptly forms fan-shaped shape, and the center of circle of this circle E has any radius on the central axis of assembling shell and connector cover.The other end 41b of each spring section 41,42 of spring terminal 40,42b nestles up those and all forms fan-shaped electrode 33, so the circuit in the substrate 30 is electrically connected to terminal 50.
In this mode, in first embodiment, because the circuit in the substrate 30 is electrically connected to terminal 50 by the spring section 41,42 that a plurality of natural frequencys differ from one another, the resistibility that improves 100 pairs of external vibrations of pressure transducer is possible.
In addition, each electrode 33 all forms fan-shaped.Therefore, even when rotating, be bonded to the other end 41b of spring terminal 40 each spring sections 41,42 of terminal 50 relative to the central axis of assembling when connector cover 60,42b moves along electrode 33, because the shape of electrode 33 forms along rotation direction.Therefore, fabrication tolerance can be amplified to the other end 41b of each spring section 41,42, and 42b breaks away from till the electrode 33.Therefore, the other end 41b of each spring section 41,42,42b always can contact with the fan-shaped wide electrode 33 on being placed on substrate 30, and thus, pressure transducer 100 is output signal reliably.
Because each spring section 41, an end 41a of 42,42a is in the state bonding with terminal 50, even when pressure transducer 100 is subjected to external vibration, spring section 41,42 with the resonance of the external vibration of different frequency, the result is different on the degree of wearing and tearing, and the degree of wearing and tearing has redundancy.Therefore, the wearing and tearing that prevent spring terminal 40 and electrode 33 are possible.
In addition, when shell 10 is connected with connector cover 60, the other end 41b of each spring section 41,42,42b can contact with electrode 33 reliably.Therefore, prevent that pressure transducer 100 from receiving the reduction of moral rate and the reliability of raising pressure transducer 100 is possible.
(the 3rd embodiment)
In this embodiment, the part different with first and second embodiment only is described.In above-mentioned first and second embodiment, adopted the wherein different spring terminal 40 of natural frequency of each spring section.Yet in this embodiment, its each spring section of the spring terminal of use has the same natural frequency, and the arrangement states of this spring terminal is changed, so each spring section produces the frequency that resonates with external vibration, is configured to differ from one another.Afterwards, describe with reference to Fig. 4.
Fig. 4 is the synoptic diagram according to peripheral part of the spring terminal 43 of present embodiment.At first, in this embodiment, spring terminal 43 is made by the single metal plate and the structure that has is, with the both sides bending of this sheet metal to form a plurality of i.e. two spring section 43a, 43b.In addition, it is mutually the same that the sweep in these sheet metal both sides is made into length, and each spring section 43a, and 43b has the same natural frequency.Therefore, each spring section 43a, 43b is with the same natural frequency resonance.Spring terminal 43 like this is by solder S1, and S2 is soldered to substrate 30.In spring terminal 43, the thickness of sheet metal is 0.08mm for example, and the width of this sheet metal is 1.2mm for example.
As shown in Figure 4, these solders S1, the length of S2 on the longitudinal direction of spring terminal 43 differs from one another.Particularly, suppose that the intermediate point of longitudinal direction in the part relative with substrate 30 surfaces of spring terminal 43 is M1, each solder S1, S2 is asymmetric at each end of each spring section one side relative intermediate point M1 on the position.
Arrange solder S1 in this way, S2, at each spring section 43a, among the 43b, from each solder S1, the effect that S2 serves as leaf spring in the various piece that each end of each spring section one side begins.In other words, the position of serving as leaf spring is different between the 43b at each spring section 43a, each spring section 43a thus, and 43b differs from one another on curved shape.Therefore, each spring section 43a, the frequency that 43b and the vibration that imposes on pressure transducer 100 produce resonance is at each spring section 43a, and is different between the 43b.Therefore, at layout solder S1 as shown in Figure 4, on the basis of S2, by place spring terminal 43 on substrate 30, this terminal has the same each spring section 43a of natural frequency, 43b, the frequency that each spring section 43a, 43b can produce resonance can be changed respectively and is different frequencies.
As mentioned above, in the present embodiment, have the spring section 43a of the same natural frequency, the mode that 43b differs from one another with curved shape is placed between substrate 30 and the terminal 50.Thus, it is possible that the frequency that makes each spring section 43a, 43b produce resonance differs from one another.Therefore, be subjected to external vibration and each spring section 43a even work as pressure sensing 100, when one of 43b produced resonance with external vibration, another spring section can not produce resonance with external vibration, so can keep the electrical connection between substrate 30 and the terminal 50.In this way, improve 100 pairs of vibrations of pressure transducer resistibility and for pressure transducer 100 reliably output signal be possible.
In addition, because each spring section 43a, the end of 43b is fixed on substrate 30, even when pressure transducer 100 is subjected to external vibration, each spring section 43a, the other end of 43b and the external vibration of different frequency produce resonance, each spring section 43a, and the other end of 43b differs from one another on the state of friction substrate 30.Therefore, each spring section 43a, 43b and substrate 30 are that the degree that differ from one another and wear and tear have redundancy on the degree of wearing and tearing.Therefore, reduce each spring section 43a, the wearing and tearing of 43b and substrate 30 are possible.
(the 4th embodiment)
In the present embodiment, the part that is different from first to the 3rd embodiment only is described.In above-mentioned the 3rd embodiment, by solder S1, S2 spring terminal 43 is placed on the substrate 30.Yet, be similar to second embodiment, can be bonded to the bottom of terminal 50 at above-mentioned the 3rd embodiment medi-spring terminal 43.In this case, as in the 3rd embodiment, spring terminal 43 can pass through solder S1, and S2 is soldered to the bottom 51 of terminal 50.In a word, as each spring section 43a, when the end of 43b was bonded to the bottom 51 of terminal 50, they were placed between terminal 50 and the substrate 30 with different curve form.In the present embodiment, adopt and the same spring terminal 43 that in the 3rd embodiment, uses.
Therefore, be similar to second embodiment.Spring terminal 43 shown in Figure 4 can be bonded to the bottom 51 of terminal 50.In this case, use the terminal 50 that uses in a second embodiment.
In addition, in a second embodiment, substrate 30 has the sector electrode 33 (seeing Fig. 3 (b)) that is arranged in above it, and the spring section 43a of spring terminal 43, the other end of 43b nestle up these sector electrodes 33 to be electrically connected circuit and the terminal 50 in the substrate 30.
As mentioned above, up to the present, the spring terminal 43 with the same natural frequency characteristic is by solder S1, and S2 is soldered to the bottom 51 of terminal 50, and makes spring section 43a, 43b curved shape difference each other.Thus, each spring section 43a, the frequency that 43b produces resonance differs from one another.Therefore, even exist when imposing on its vibration when pressure transducer 100, by the spring section 43a that not influenced by resonance effects, one of 43b can keep circuit in the substrate 30 and the electrical connection between the terminal 50.Therefore, the resistibility of 100 pairs of external vibrations of raising pressure transducer is possible.
In addition, because spring section 43a, the end of 43b is fixed on terminal 50, even when pressure transducer 100 bears external vibration, and spring section 43a, the other end of 43b and the external vibration of different frequency produce resonance.Therefore, spring section 43a, the other end of 43b differs from one another at the state aspect of they friction substrates 30, and spring section 43a thus, and 43b and substrate 30 differ from one another on the degree of wearing and tearing, and the degree of wearing and tearing has redundancy.Therefore, reduce spring section 43a, the wearing and tearing of 43b and substrate 30 are possible.
(other embodiment)
In first and second embodiment, the spring section 41,42 that is positioned at the sheet metal both sides in spring terminal 40 is bent with different length, so that their natural frequency differs from one another, but this is an embodiment.In other words, also can make the natural frequency of each spring section 41,42 differ from one another by other method.Therefore, in Fig. 5 and Fig. 6, express the various embodiment of spring terminal.Herein, Fig. 6 (a) to 6 (c) be view when spring terminal 82,83 when terminal 50 1 sides are seen.
Fig. 5 (a) is the view of spring terminal 45, each spring section 45a wherein, and the thickness of 45b differs from one another.In this mode, by making each spring section 45a, 45b thickness differs from one another, and makes each spring section 45a, and the natural frequency of 45b differs from one another.
Fig. 5 (b) is the view of spring terminal 46, each spring section 46a wherein, and the width of 46b differs from one another.In this mode, each spring section 46a that provides width to differ from one another, 46b also is recommendable.
In addition, Fig. 5 (c) is that explanation has two spring section 47a, the view of the spring terminal 47 of 47b, and wherein spring section 47a has the hole H that forms in the middle of it.In this mode,, form hole H among one of 47b by at two spring section 47a, make each spring section 47a, therefore it is possible that 47b differs from one another on weight, and makes each spring section 47a, and it is possible that 47b differs from one another on natural frequency.
Also have, Fig. 6 (a) is the view of spring terminal 82, and the shape of one of them spring section 82b is different with the shape of another spring section 82a.Shown in Fig. 6 (a), spring section 82b has the deep trouth CU that forms therein.This groove CU can make each spring section 82a, and the natural frequency of 82b differs from one another.Herein, groove CU is not limited to the form shown in Fig. 6 (a).For example, sheet metal can differ from one another at the width of groove CU left and right sides, and groove CU can make more shallowly.
Fig. 6 (b) is the view of explanation spring terminal 83, each spring section 83a wherein, and 83b is made by the sheet metal of different materials.Usually, by changing elasticity (elasticity coefficient) and density, change the natural frequency of sheet metal.Embodiment shown in Fig. 6 (b) has used this specific character.That is, each spring section 83a, the part of 83b is for example made by phosphor bronze, and another part is for example made by beryllium copper.Then, these parts are connected to the end of sheet metal to make spring terminal 83.In this mode, by each spring section 83a that is made by different materials, 83b makes spring section 83a, and the natural frequency of 83b differs from one another.
Each spring section 83a of the spring terminal 83 shown in Fig. 6 (b), 83b can be made by the same material.In this case, by each spring section of the made 83a by different brackets, 83b makes each spring section 83a, and the natural frequency of 83b differs from one another.
Fig. 6 (c) is the view of explanation spring terminal 84, each spring section 84a wherein, and the curvature of 84b differs from one another.Shown in Fig. 6 (c), the radius of curvature R 1 of a spring section 84a is different with the radius of curvature R 2 of another spring section 84b.Thus, make each spring section 84a, the natural frequency of 84b differs from one another.
Also have, at Fig. 2, Fig. 3 (a), the structure that Fig. 5 and spring terminal 40,45 to 47,82 to 84 shown in Figure 6 adopt the both sides of a sheet metal to be bent, but the structure of spring terminal 40,45 to 47,82 to 84 is not limited to this structure.That is, the spring section that differs from one another of two (perhaps a plurality of) natural frequencys of preparation is possible.For example, the single spring section 41,42 of spring terminal 40 independent of each other can be bonded to substrate 30 respectively.When in this manner, when the spring section that the circuit in the substrate 30 differs from one another by natural frequency is electrically connected to terminal 50, even pressure transducer 100 bears the vibration from the outside, can not keep being electrically connected between substrate 30 and the terminal 50 with the spring section that resonance is born in vibration.Similarly, in spring terminal shown in Figure 4 43, can use each spring section 43a independent of each other, 43b.
In each above-mentioned spring terminal 40,45 to 47, provide a kind of both sides of sheet metal the to be bent structure of (bent), but spring terminal can form the shape that the both sides of sheet metal are bent to arc (curved).Even spring section forms with the of this sort arc that bends to, if the natural frequency of two arch sections differs from one another, they can produce the effect the same with above-mentioned spring terminal.
In the 3rd embodiment, change the solder S1 in spring terminal 43, be bonded to substrate 30, the length of S2 changes each spring section 43a thus, the curved shape of 43b, so make each spring section 43a, the resonant frequency of 43b differs from one another.Yet this is an embodiment.In other words, also can make each spring section 43a by other method, the resonant frequency of 43b differs from one another.After this, the embodiment of spring terminal is illustrated among Fig. 7.
Fig. 7 (a) is each spring section 43a of explanation spring terminal 43, and 43b nestles up the Status view that has the terminal 53 of step ST in its bottom.Shown in Fig. 7 (a), step ST is formed on the bottom of terminal 53.As each spring section 43a of spring terminal 43, when 43b nestles up the bottom of terminal 53, since this step ST, each spring section 43a, and 43b contacts with the bottom with different height.Thus, it is possible making each spring section 43a, 43b that different curved shapes be arranged each other and make their resonant frequency differ from one another thus.The height of this step ST for example is, from 0.1mm to 1.0mm.
Fig. 7 (b) is each spring section 43a that explanation groove CL is formed on terminal 43, the Status view of spring section 43b one side among the 43b.Shown in Fig. 7 (b), by forming groove CL at spring section 43b one side cutting substrate 30, spring section 43b becomes floating state.Thus, make each spring section 43a, 43b that different curved shapes be arranged each other and make each spring section 43a thus that it is possible that 43b resonates with different resonant frequency.Here, this groove CL can be formed on the side of spring section 43a.In addition, this groove CL is formed on each spring section 43a, the side of 43b, but it can form Any shape.
Fig. 7 (c) is each spring section 43a of explanation spring terminal 43, and 43b nestles up the Status view of the bottom of terminal 55.It is what tilt that the bottom of this terminal 55 is bent to respect to substrate 30 surfaces.As shown in the figure, the bottom of terminal 55 is not parallel to the surface of substrate 32, but crooked and inclination.That is, each spring section 43a of spring terminal 43,43b nestles up the bottom of terminal 55 with different height.Thus, make each spring section 43a, 43b be in different curved shapes each other and make each spring section 43a thus that 43b differs from one another on resonant frequency.When the bottom of terminal 55 is bent to relative substrate 30 and tilts, make at each spring section 43a between the contact portion of 43b difference in height is arranged, for example be about 0.05mm.
Fig. 7 (d) is explanation is soldered to substrate 30 by solder S3 spring terminal 43 a Status view.Shown in Fig. 7 (d), the two ends of solder S3 are in asymmetric position with regard to the intermediate point MI of spring terminal 43.Thus, make each spring section 43a, 43b is the curved shape difference each other, and makes each spring section 43a thus, and the resonant frequency of 43b differs from one another.
Here, the situation after the situation of the solder S3 shown in Fig. 7 (d) and at the solder S1 shown in Fig. 4, the part between the S2 are filled is identical.In a word, shown in Fig. 4 or Fig. 7 (d), it is possible making the solder conduction according to the circuit design of substrate 30.
As Fig. 5 to the embodiment shown in Figure 7, needless to say, similar second embodiment, spring terminal 43,45 to 47,82 to 84 can be bonded to the bottom 51 of terminal 50.
As mentioned above, in the embodiment that has illustrated, spring terminal 43,45 to 47,82 to 84 is used to pressure transducer 100.Yet spring terminal 43,45 to 47,82 to 84 not only can be used for above-mentioned pressure transducer 100, and can also be used to comprise any occasion of bearing vibration.
Claims (7)
1. pressure transducer comprises:
Shell (10), it has pressure and introduces hole (13);
Bar (20), it has hollow cylindrical, end at the axis of hollow cylindrical has vibrating membrane spare (22), deformable under the pressure effect of this vibrating membrane spare (22) in being introduced into shell, and this bar (20) has with pressure at the other end of this axis introduces the passage (23) that the hole is communicated with;
Sensing part (24), it is arranged on the vibrating membrane spare and exports the electric signal of the distortion of respond vibration film spare;
Substrate (30), it receives electric signal and responds this electric signal and produces output signal;
Spring terminal (40), it has the spring section (41,42) that a plurality of natural frequencys differ from one another, and (41a 42a) is bonded to substrate to an end of wherein said spring section; With
Terminal (50), (41b 42b) nestles up and output signal is exported to the external world other end of itself and described spring section.
2. pressure transducer comprises:
Shell (10), it has pressure and introduces hole (13);
Bar (20), it has hollow cylindrical, end at the axis of hollow cylindrical has vibrating membrane spare (22), deformable under the pressure effect of this vibrating membrane spare (22) in being introduced into shell, and this bar (20) has with pressure at the other end of this axis introduces the passage (23) that the hole is communicated with;
Sensing part (24), it is arranged on the vibrating membrane spare and exports the electric signal of the distortion of respond vibration film spare;
Substrate (30), it receives electric signal and responds this electric signal and produces output signal;
Spring terminal (40), it has the spring section (41,42) that a plurality of natural frequencys differ from one another; With
Terminal (50), it exports to the external world with output signal, and (41a 42a) is bonded to described terminal to an end of wherein said spring section, and (41b 42b) nestles up and is arranged on on-chip electrode (33) other end of described spring section.
3. pressure transducer as claimed in claim 2, also comprise the connector cover (60) that is bonded to shell, described bonding location is and the position of arranging the surface opposite of described bar in shell, wherein said substrate has described electrode (33), the other end of spring section nestles up this electrode, and each electrode (33) forms fan-shaped that circumferencial direction at a circle (E) extends, and the center of circle of described circle (E) and has any radius on the central axis that connects shell and connector cover.
4. pressure transducer comprises:
Shell (10), it has pressure and introduces hole (13);
Bar (20), it has hollow cylindrical, has deformable vibrating membrane spare (22) under the pressure effect that is being introduced in the shell at an end of the axis of hollow cylindrical, has with pressure at the other end of this axis and introduces the passage (23) that the hole is communicated with;
Sensing part (24), it is arranged on the vibrating membrane spare and electric signal is exported in the distortion of respond vibration film spare;
Substrate (30), it receives electric signal and responds this electric signal and produces output signal;
Spring terminal (43), its have the mutually the same spring section of a plurality of natural frequencys (43a, 43b), wherein an end of spring section is bonded to substrate; With
Terminal (50,53,55), the other end of itself and spring section nestles up and exports described output signal to the external world,
Wherein the spring section of spring terminal differs from one another on the curve form of spring section.
5. pressure transducer comprises:
Shell (10), it has pressure and introduces hole (13);
Bar (20), it has hollow cylindrical, has deformable vibrating membrane spare (22) under the pressure effect that is being introduced in the shell at an end of the axis of hollow cylindrical, has with pressure at the other end of this axis and introduces the passage (23) that the hole is communicated with;
Sensing part (24), it is arranged on the vibrating membrane spare and electric signal is exported in the distortion of respond vibration film spare;
Substrate (30), it receives electric signal and responds this electric signal and produces output signal;
Spring terminal (43), its have the mutually the same spring section of a plurality of natural frequencys (43a, 43b); With
Terminal (50), it is exported described output signal to the external world, and wherein, an end of spring section is bonded to terminal, and the other end of spring section abuts against and is arranged on on-chip electrode (33),
Wherein the curve form of the spring section of spring terminal differs from one another.
6. pressure transducer as claimed in claim 5, also comprise the connector cover (60) that is bonded to shell, described bonding location is and the position of arranging the surface opposite of described bar in shell, wherein said substrate has described electrode (33), the other end of spring section nestles up this electrode, and each electrode (33) forms fan-shaped that circumferencial direction at a circle (E) extends, and the center of circle of described circle (E) and has any radius on the central axis that connects shell and connector cover.
7. as arbitrary described pressure transducer among the claim 1-6, wherein said spring section forms the shape at the alphabetical V of an end of this part and other end structure.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP099800/2004 | 2004-03-30 | ||
| JP2004099800 | 2004-03-30 | ||
| JP287268/2004 | 2004-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1806164A true CN1806164A (en) | 2006-07-19 |
| CN100541157C CN100541157C (en) | 2009-09-16 |
Family
ID=36867504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005800005555A Expired - Fee Related CN100541157C (en) | 2004-03-30 | 2005-03-25 | Pressure transducer |
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| Country | Link |
|---|---|
| CN (1) | CN100541157C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102656434A (en) * | 2009-12-15 | 2012-09-05 | 罗伯特·博世有限公司 | Method for producing a pressure sensor assembly and pressure sensor assembly |
| CN106062527A (en) * | 2013-12-31 | 2016-10-26 | 法雷奥电机控制系统公司 | Pressure measuring device |
| CN108474706A (en) * | 2015-12-29 | 2018-08-31 | 安普泰科电子韩国有限公司 | Pressure sensor and manufacturing method for it |
| US10845264B2 (en) | 2015-12-29 | 2020-11-24 | Tyco Electronics Amp Korea Co., Ltd. | Pressure sensor and manufacturing method therefor |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2504737B2 (en) * | 1985-07-19 | 1996-06-05 | シチズン時計株式会社 | Pressure sensor unit |
| CN1004376B (en) * | 1985-07-23 | 1989-05-31 | 株式会社日立制作所 | Pressure sensor and its fixing method |
| CN2064053U (en) * | 1989-11-05 | 1990-10-17 | 金太来 | Grid type pressure transducer |
| DE19637763A1 (en) * | 1996-09-16 | 1998-03-19 | Trw Fahrzeugelektrik | Pressure sensor unit, especially for automotive engineering |
| JP4014653B2 (en) * | 1997-12-09 | 2007-11-28 | 北陸電気工業株式会社 | Capacitance type pressure sensor unit |
| DE10014992C2 (en) * | 2000-03-25 | 2002-01-31 | Bosch Gmbh Robert | sensor arrangement |
| CN2463815Y (en) * | 2000-12-27 | 2001-12-05 | 韩悦东 | Fluid pressure transducer |
| US6575791B1 (en) * | 2002-03-11 | 2003-06-10 | Hon Hai Precision Ind. Co., Ltd. | Electrical connector providing reliable electrical interconnection with mated devices |
-
2005
- 2005-03-25 CN CNB2005800005555A patent/CN100541157C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102656434A (en) * | 2009-12-15 | 2012-09-05 | 罗伯特·博世有限公司 | Method for producing a pressure sensor assembly and pressure sensor assembly |
| US8763465B2 (en) | 2009-12-15 | 2014-07-01 | Robert Bosch Gmbh | Method for producing a pressure sensor assembly and pressure sensor assembly |
| CN102656434B (en) * | 2009-12-15 | 2015-08-12 | 罗伯特·博世有限公司 | For the manufacture of method and the pressure sensor apparatus of pressure sensor apparatus |
| CN106062527A (en) * | 2013-12-31 | 2016-10-26 | 法雷奥电机控制系统公司 | Pressure measuring device |
| CN108474706A (en) * | 2015-12-29 | 2018-08-31 | 安普泰科电子韩国有限公司 | Pressure sensor and manufacturing method for it |
| US10845264B2 (en) | 2015-12-29 | 2020-11-24 | Tyco Electronics Amp Korea Co., Ltd. | Pressure sensor and manufacturing method therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100541157C (en) | 2009-09-16 |
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