CN1802037B - 背极式硅基微型驻极体电容话筒 - Google Patents
背极式硅基微型驻极体电容话筒 Download PDFInfo
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- CN1802037B CN1802037B CN 200510030144 CN200510030144A CN1802037B CN 1802037 B CN1802037 B CN 1802037B CN 200510030144 CN200510030144 CN 200510030144 CN 200510030144 A CN200510030144 A CN 200510030144A CN 1802037 B CN1802037 B CN 1802037B
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- electret
- vibrating diaphragm
- pole plate
- silicon
- back pole
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
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CN 200510030144 CN1802037B (zh) | 2005-09-29 | 2005-09-29 | 背极式硅基微型驻极体电容话筒 |
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CN 200510030144 CN1802037B (zh) | 2005-09-29 | 2005-09-29 | 背极式硅基微型驻极体电容话筒 |
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CN1802037A CN1802037A (zh) | 2006-07-12 |
CN1802037B true CN1802037B (zh) | 2011-09-14 |
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CN 200510030144 Expired - Fee Related CN1802037B (zh) | 2005-09-29 | 2005-09-29 | 背极式硅基微型驻极体电容话筒 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101985348B (zh) * | 2009-07-29 | 2012-01-04 | 中国科学院微电子研究所 | 一种由单晶硅材料构成的微米尺度网格结构的制作方法 |
JP4947220B2 (ja) * | 2010-05-13 | 2012-06-06 | オムロン株式会社 | 音響センサ及びマイクロフォン |
CN101959109A (zh) * | 2010-05-25 | 2011-01-26 | 瑞声声学科技(深圳)有限公司 | 微机电系统麦克风 |
CN102333254B (zh) * | 2011-09-13 | 2013-11-06 | 华景传感科技(无锡)有限公司 | 一种与cmos电路纵向集成的mems硅麦克风及其制备方法 |
CN107421662B (zh) * | 2017-06-28 | 2020-11-13 | 重庆芯原微科技有限公司 | 一种mems电容式压力传感器的敏感结构 |
CN113980328B (zh) * | 2021-11-24 | 2023-04-18 | 莱州结力工贸有限公司 | 病毒防护用抗菌驻极体的制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1289220A (zh) * | 1999-09-16 | 2001-03-28 | 三洋电机株式会社 | 半导体装置、半导体驻极体电容话筒及其制造方法 |
CN1366785A (zh) * | 2000-04-26 | 2002-08-28 | 三菱电机株式会社 | 半导体驻极体电容器麦克风 |
CN1575041A (zh) * | 2003-05-21 | 2005-02-02 | 星电株式会社 | 驻极体电容话筒 |
CN1596035A (zh) * | 2004-06-24 | 2005-03-16 | 同济大学 | 一种硅微型驻极体声传感器储电膜的化学表面修正工艺 |
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- 2005-09-29 CN CN 200510030144 patent/CN1802037B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1289220A (zh) * | 1999-09-16 | 2001-03-28 | 三洋电机株式会社 | 半导体装置、半导体驻极体电容话筒及其制造方法 |
CN1366785A (zh) * | 2000-04-26 | 2002-08-28 | 三菱电机株式会社 | 半导体驻极体电容器麦克风 |
CN1575041A (zh) * | 2003-05-21 | 2005-02-02 | 星电株式会社 | 驻极体电容话筒 |
CN1596035A (zh) * | 2004-06-24 | 2005-03-16 | 同济大学 | 一种硅微型驻极体声传感器储电膜的化学表面修正工艺 |
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CN1802037A (zh) | 2006-07-12 |
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C56 | Change in the name or address of the patentee |
Owner name: SHENZHEN HORN AUDIO CO., LTD. Free format text: FORMER NAME: SHENZHEN HORN ELECTROACOUSTIC TECHNOLOGY CO., LTD. |
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Address after: 518109 large wave water Wai Industrial Zone, Longhua Town, Guangdong City, Shenzhen province 9 Co-patentee after: Tongji University Patentee after: Shenzhen Horn Audio Co., Ltd. Co-patentee after: Fudan University Address before: 518109 large wave water Wai Industrial Zone, Longhua Town, Guangdong City, Shenzhen province 9 Co-patentee before: Tongji University Patentee before: Shenzhen Horn Electroacoustic Technology Co., Ltd. Co-patentee before: Fudan University |
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