CN1796944A - 位移检测装置、位移测量装置和固定点检测装置 - Google Patents
位移检测装置、位移测量装置和固定点检测装置 Download PDFInfo
- Publication number
- CN1796944A CN1796944A CNA200510003494XA CN200510003494A CN1796944A CN 1796944 A CN1796944 A CN 1796944A CN A200510003494X A CNA200510003494X A CN A200510003494XA CN 200510003494 A CN200510003494 A CN 200510003494A CN 1796944 A CN1796944 A CN 1796944A
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- light
- extinction ratio
- polarization
- optical fiber
- light beam
- Prior art date
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Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 86
- 238000001514 detection method Methods 0.000 title abstract description 19
- 230000010287 polarization Effects 0.000 claims abstract description 242
- 239000013307 optical fiber Substances 0.000 claims abstract description 198
- 230000008033 biological extinction Effects 0.000 claims abstract description 163
- 230000003287 optical effect Effects 0.000 claims abstract description 81
- 238000005259 measurement Methods 0.000 claims abstract description 32
- 238000006243 chemical reaction Methods 0.000 claims description 48
- 238000012423 maintenance Methods 0.000 claims description 43
- 239000004065 semiconductor Substances 0.000 claims description 26
- 230000008859 change Effects 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 7
- 230000005855 radiation Effects 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 5
- 230000000052 comparative effect Effects 0.000 claims description 5
- 230000002452 interceptive effect Effects 0.000 claims description 5
- 239000005357 flat glass Substances 0.000 claims description 4
- 230000000712 assembly Effects 0.000 claims 1
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- 238000005452 bending Methods 0.000 description 29
- 238000012360 testing method Methods 0.000 description 16
- 230000016507 interphase Effects 0.000 description 10
- 239000011295 pitch Substances 0.000 description 9
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 230000001427 coherent effect Effects 0.000 description 6
- 230000008595 infiltration Effects 0.000 description 6
- 238000001764 infiltration Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000012856 packing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000009466 transformation Effects 0.000 description 4
- 239000003365 glass fiber Substances 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
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- 230000003321 amplification Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
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- 230000004304 visual acuity Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 244000145841 kine Species 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/30—Grating as beam-splitter
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004360609 | 2004-12-13 | ||
JP360609/04 | 2004-12-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1796944A true CN1796944A (zh) | 2006-07-05 |
CN100462687C CN100462687C (zh) | 2009-02-18 |
Family
ID=36118225
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200510003494XA Active CN100462687C (zh) | 2004-12-13 | 2005-12-13 | 位移检测装置、位移测量装置和固定点检测装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20060145066A1 (zh) |
EP (2) | EP1669725A1 (zh) |
KR (1) | KR101275935B1 (zh) |
CN (1) | CN100462687C (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103075964A (zh) * | 2011-10-26 | 2013-05-01 | 株式会社森精机制作所 | 位移检测装置 |
CN104949616A (zh) * | 2014-03-25 | 2015-09-30 | 上海微电子装备有限公司 | 回射式光栅尺测量系统及其应用 |
CN109520428A (zh) * | 2018-11-09 | 2019-03-26 | 中国科学院长春光学精密机械与物理研究所 | 一种位移测量光学系统 |
CN110017783A (zh) * | 2019-05-20 | 2019-07-16 | 广东理工学院 | 板件位移在线检测装置及传送系统 |
CN114577242A (zh) * | 2020-11-30 | 2022-06-03 | 株式会社三丰 | 光电旋转编码器 |
CN114761305A (zh) * | 2019-12-12 | 2022-07-15 | 泰雷兹管理与服务德国股份有限公司 | 轨道接触元件和脱落检测单元 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5066401B2 (ja) * | 2007-07-24 | 2012-11-07 | 株式会社森精機製作所 | 定点検出装置及び変位測定装置 |
DE102009027266A1 (de) * | 2009-06-29 | 2010-12-30 | Robert Bosch Gmbh | Interferometrische Weg- und/oder Drehmessvorrichtung |
JP5415376B2 (ja) | 2010-08-06 | 2014-02-12 | 株式会社フジクラ | センサヘッド、および光学式センサ |
EP2972218B1 (en) | 2013-03-15 | 2020-08-26 | United Technologies Corporation | Focused optical configuration for nsms probes |
JP6427399B2 (ja) * | 2014-04-14 | 2018-11-21 | Dmg森精機株式会社 | 変位検出装置 |
JP6643199B2 (ja) | 2016-07-15 | 2020-02-12 | Dmg森精機株式会社 | 変位検出装置 |
US11982521B2 (en) * | 2017-02-23 | 2024-05-14 | Nikon Corporation | Measurement of a change in a geometrical characteristic and/or position of a workpiece |
CN113048890A (zh) * | 2021-03-17 | 2021-06-29 | 成都凯天电子股份有限公司 | 一种非接触式位移测量系统 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694314A (en) * | 1979-12-28 | 1981-07-30 | Fujitsu Ltd | Photocoupler |
US4447117A (en) * | 1982-07-06 | 1984-05-08 | The United States Of America As Represented By The Secretary Of The Navy | Gated fiber optic transmission |
JPH0781884B2 (ja) * | 1984-10-01 | 1995-09-06 | ソニーマグネスケール株式会社 | 光学式変位測定装置 |
JPS62118592A (ja) * | 1985-11-19 | 1987-05-29 | Matsushita Electric Ind Co Ltd | 半導体レ−ザ装置 |
JPS62204126A (ja) * | 1986-03-04 | 1987-09-08 | Canon Inc | エンコ−ダ− |
JPH01167607U (zh) * | 1988-05-16 | 1989-11-24 | ||
JP2629948B2 (ja) * | 1989-03-03 | 1997-07-16 | キヤノン株式会社 | エンコーダー |
JP3030905B2 (ja) * | 1991-04-24 | 2000-04-10 | ソニー・プレシジョン・テクノロジー株式会社 | 定点検出装置 |
WO1992019930A1 (en) * | 1991-04-29 | 1992-11-12 | Massachusetts Institute Of Technology | Method and apparatus for optical imaging and measurement |
DE69223916T2 (de) * | 1991-10-03 | 1998-05-28 | Canon Kk | Optische Kodiereinrichtung |
EP0543061B1 (en) * | 1991-11-20 | 1998-07-15 | Hamamatsu Photonics K.K. | Light amplifying polarizer |
US5734765A (en) * | 1994-07-26 | 1998-03-31 | Ceramoptec Industries Inc. | Damage resistant infrared fiber delivery device and system |
JP4862108B2 (ja) * | 2001-02-02 | 2012-01-25 | 株式会社森精機製作所 | 受発光複合ユニット及びこれを用いた変位検出装置 |
JP4381671B2 (ja) * | 2002-10-23 | 2009-12-09 | ソニーマニュファクチュアリングシステムズ株式会社 | 変位検出装置 |
DE102006023687B4 (de) * | 2005-05-23 | 2023-01-19 | Mori Seiki Co., Ltd. | Versatzdetektor und Einrichtung zur Detektion eines Fixpunktes |
-
2005
- 2005-12-09 US US11/298,049 patent/US20060145066A1/en not_active Abandoned
- 2005-12-12 EP EP20050027122 patent/EP1669725A1/en not_active Ceased
- 2005-12-12 EP EP16151727.1A patent/EP3029428B1/en active Active
- 2005-12-13 CN CNB200510003494XA patent/CN100462687C/zh active Active
- 2005-12-13 KR KR1020050122211A patent/KR101275935B1/ko active IP Right Grant
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103075964A (zh) * | 2011-10-26 | 2013-05-01 | 株式会社森精机制作所 | 位移检测装置 |
CN104949616A (zh) * | 2014-03-25 | 2015-09-30 | 上海微电子装备有限公司 | 回射式光栅尺测量系统及其应用 |
CN109520428A (zh) * | 2018-11-09 | 2019-03-26 | 中国科学院长春光学精密机械与物理研究所 | 一种位移测量光学系统 |
CN110017783A (zh) * | 2019-05-20 | 2019-07-16 | 广东理工学院 | 板件位移在线检测装置及传送系统 |
CN110017783B (zh) * | 2019-05-20 | 2023-09-29 | 广东理工学院 | 板件位移在线检测装置及传送系统 |
CN114761305A (zh) * | 2019-12-12 | 2022-07-15 | 泰雷兹管理与服务德国股份有限公司 | 轨道接触元件和脱落检测单元 |
CN114761305B (zh) * | 2019-12-12 | 2023-10-13 | 泰雷兹管理与服务德国股份有限公司 | 轨道接触元件和脱落检测单元 |
CN114577242A (zh) * | 2020-11-30 | 2022-06-03 | 株式会社三丰 | 光电旋转编码器 |
CN114577242B (zh) * | 2020-11-30 | 2024-03-08 | 株式会社三丰 | 光电旋转编码器 |
Also Published As
Publication number | Publication date |
---|---|
US20060145066A1 (en) | 2006-07-06 |
CN100462687C (zh) | 2009-02-18 |
EP3029428A1 (en) | 2016-06-08 |
EP3029428B1 (en) | 2018-01-31 |
KR20060066657A (ko) | 2006-06-16 |
EP1669725A1 (en) | 2006-06-14 |
KR101275935B1 (ko) | 2013-06-14 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: GEMGES CO., LTD. Free format text: FORMER OWNER: SONY CORP. Effective date: 20101008 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20101008 Address after: Tokyo, Japan, Japan Patentee after: Ltd. Mei roots lattice Address before: Tokyo, Japan, Japan Patentee before: Sony Corporation |
|
ASS | Succession or assignment of patent right |
Owner name: K. K. MORI SEIKI SEISAKUSHO Free format text: FORMER OWNER: MEIGEN SIGE CO., LTD. Effective date: 20140108 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20140108 Address after: Nara Japan Patentee after: Mori Seiki Seisakusho K. K. Address before: Tokyo, Japan, Japan Patentee before: Ltd. Mei roots lattice |