CN1796251A - Storing cabinet of storage box for chip frames - Google Patents
Storing cabinet of storage box for chip frames Download PDFInfo
- Publication number
- CN1796251A CN1796251A CN 200410060392 CN200410060392A CN1796251A CN 1796251 A CN1796251 A CN 1796251A CN 200410060392 CN200410060392 CN 200410060392 CN 200410060392 A CN200410060392 A CN 200410060392A CN 1796251 A CN1796251 A CN 1796251A
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- storage
- storage box
- cabinet
- chip flame
- module
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Abstract
The present invention relates to a storage cabinet for wafer frame storage box. Said storage cabinet is used for storing wafer frame storage box. It includes a storage cabinet self-body, a first module which is mounted in said storage cabinet self-body interior and is used for storing said wafer frame storage box and a control cabinet which is mounted in said storage cabinet self-body interior and is used for operating and controlling said first module, and used for displaying application information of said wafer frame storage box.
Description
Technical field
The present invention is the storage cabinet of a kind of chip flame storage box (Frame Storage Box), refers to especially be applied to store a chip flame storage box with the convenient storage cabinet that takes out the chip flame storage box that utilizes again at any time.
Background technology
Present semiconductor manufacturing factory merchant the wafer that generally uses have 4 inches, 8 inches or 12 inches etc. multiple haply, when this wafer does not use and when needing temporary transient the storage fully, can be placed in the chip flame storage box, wait in the future useful row taking-up utilization more then.See also Fig. 1, as seen a chip flame storage box 10, ornaments have a static bag 11 on it, and in static bag 11, be placed with a wafer 12, when a upper cover plate 13 of chip flame storage box 10 after covering, chip flame storage box 10 promptly need be done the formality of keeping properly together, in the time of need using wafer 12 again to have the true future, can access at any time and do further wafer cutting action.But owing to there is no the device that stores a large amount of chip flame storage boxes 10 at present, so that in the management of product, cause greatest puzzlement, and when going again when taking out some chip flame storage boxes 10, just need each chip flame storage box of inspecting one by one, also be a quite thing of trouble, so the mode of operation of class is very undesirable really.
Not manageable problem during the storage that solves chip flame storage box with regard to needs like this, can exempt the puzzlement that to inspect one by one in the hope of taking again of this chip flame storage box, cause after experiment, test and research through the contriver, finally obtain a kind of storage cabinet of chip flame storage box, must inspect the disappearance of each chip flame storage box one by one except effectively overcoming before, also can make the taking again of this chip flame storage box, its process will be more rapid and convenient.
Summary of the invention
Main purpose of the present invention makes the access of this chip flame storage box be able to the storage cabinet of more rapid and certain chip flame storage box for providing a kind of.
A further object of the present invention is for providing a kind of storage cabinet that is beneficial to the chip flame storage box of the use information that shows this chip flame storage box.
A kind of to respond to this chip flame storage box approaching in order to provide for another purpose of the present invention, and start the storage cabinet that scanning device scans the chip flame storage box of the bar code on this chip flame storage box.
The storage cabinet of chip flame storage box according to an aspect of the present invention (Frame Storage Box), it is applied to store a chip flame storage box, it comprises a storage cabinet body, one first module, it is installed in this storage cabinet body, in order to store this chip flame storage box, an and control housing, it is installed in this storage cabinet body, in order to control this first module, to show the use information of this chip flame storage box.
The better one, the control housing of this storage cabinet is equiped with a pair of illuminated sensor (Sensor), to respond to this chip flame storage box near a long and narrow bracing frame.
The better one, this storage cabinet to illuminated sensor in order to starting the one scan device, scanning the bar code (Bar code) on this chip flame storage box, and read a master data of this chip flame storage box.
Certainly, the control housing of this storage cabinet can be equiped with a keyboard, and this keyboard has an angle of inclination, is beneficial to a user import, and this scanner is installed on the base plate position of this keyboard.
Certainly, the control housing of this storage cabinet can be equiped with a screen, and showing this master data of this chip flame storage box, and this chip flame storage box has the groove of colluding, and is beneficial to take out in this first module.
The better one, first module of this storage cabinet is equiped with between a plurality of storage areas, and respectively all has a slotted opening between these a plurality of storage areas, for inserting between this storage area of this chip flame storage box, and this control housing is equiped with a wafer reading device or a magnetic card reading device, to read a wafer or the magnetic card on this chip flame storage box.
The better one is equipped with a terminal inductive switch between a plurality of storage areas of this storage cabinet, arrived the desired location between this storage area to determine this chip flame storage box, and started the display lamp on this first module.
Certainly, can have a sequence number between the storage area of this storage cabinet, and this sequence number sets via a main frame, to determine a storage location of this chip flame storage box.
Certainly, this storage cabinet can also comprise one second and one the 3rd module, to place the flame storage box of a plurality of 12 inches wafers.
The better one, this storage cabinet first, this second and the 3rd module is to be positioned at one to link cabinet, and this main frame is by a programmable logic controller (PLC) (Programable Logic Controller, PLC), promptly can be controlled to eight and link cabinet, and this binding cabinet is equiped with a telltale, to show a numbering of this binding cabinet.
The better one, be equiped with one in the binding cabinet of this storage cabinet surplus an oxygenation measurement device and a flow counter, in order to detect the remaining oxygen amount in this binding cabinet and to replenish nitrogen content in this binding cabinet.
Certainly, this storage cabinet also comprises one second, 1 the 3rd and 1 the 4th module, to place the flame storage box of a plurality of 8 inches wafers.
A kind of storage device according to a further aspect of the invention, it is applied to store an object, it comprises a storage cabinet body, one first storage device, it is installed in this storage cabinet body, in order to store this object, an and control setup, it is installed in this storage cabinet body, in order to control this first storage device, to show the use information of this object.
Certainly, this storage cabinet can be applied to store a chip flame storage box, and this object is this chip flame storage box, and this first storage device is one first module, and this control setup is a control housing.
The better one, the control housing of this storage cabinet is equiped with a pair of illuminated sensor, to respond to this chip flame storage box near a long and narrow bracing frame.
The better one, this storage cabinet to illuminated sensor in order to starting the one scan device, scanning the bar code on this chip flame storage box, and read a master data of this chip flame storage box.
Certainly, the control housing of this storage cabinet can be equiped with a keyboard, and this keyboard has an angle of inclination, is beneficial to a user import, and this scanner promptly is installed on the base plate position of this keyboard.
Storage cabinet according to a kind of chip flame storage box of another aspect of the invention, it is applied to store a chip flame storage box, it comprises a storage cabinet body, and one first module, be installed in this storage cabinet body, and this first module has between a plurality of storage areas, and respectively all have a slotted opening between these a plurality of storage areas, for inserting between this storage area of this chip flame storage box, in order to store this chip flame storage box.
Certainly, this storage cabinet can also comprise a control housing, and it is installed in this storage cabinet body, in order to controlling this first module, and shows the use information of this chip flame storage box.
The better one, the control housing of this storage cabinet is equiped with a pair of illuminated sensor, to respond to this chip flame storage box near a long and narrow bracing frame.
The present invention is via the explanation of above-mentioned conception, can find out the storage cabinet of the chip flame storage box that is used, fruit can utilize one first module to store this chip flame storage box, and make the access of this chip flame storage box be able to more rapid and certain, and have utilization one control housing controlling this first module, and help showing that one of this chip flame storage box uses the characteristic of information.
In order to be easy to explanation, the present invention must obtain one by following preferred embodiment and diagram and understand more.
Description of drawings
Fig. 1 is that known storing has the schematic perspective view of the chip flame storage box of unspent wafer still;
Fig. 2 is the schematic perspective view of preferred embodiment of the storage cabinet of chip flame storage box of the present invention;
Fig. 3 is keyboard among Fig. 2 and the schematic side view that is installed in the scanning device on its base plate;
Fig. 4 is the schematic perspective view between the interior a plurality of storage areas of first module among Fig. 2;
Fig. 5 is the schematic perspective view of the display lamp on first module among Fig. 2;
Fig. 6 is the interior surplus oxygenation measurement device of first module among Fig. 2 and the schematic perspective view of flow counter;
Fig. 7 is that another of chip flame storage box of the present invention reads the schematic perspective view of pattern; And.
Fig. 8 is the another schematic perspective view that reads pattern of chip flame storage box of the present invention.
The specific embodiment
See also Fig. 2, demonstrate a kind of storage cabinet 20 of chip flame storage box, be to be applied to store a chip flame storage box 21, it comprises a storage cabinet body 22, one first modules 23, it is installed in the storage cabinet body 22, in order to storage chip flame storage box 20, and a control housing 24, it is installed in the storage cabinet body 22, in order to control first module 23, with the use information of shows wafer flame storage box 21.
The control housing 24 of storage cabinet 20 is equiped with a pair of illuminated sensor 25, to respond to chip flame storage box 21 near a long and narrow bracing frame 26.Illuminated sensor 25 in order to starting one scan device 30 shown in Figure 3, scanning the bar code 27 on the chip flame storage box 21, and is read a master data of chip flame storage box 21.Control housing 24 can be equiped with a keyboard 28, and keyboard 28 has a tilt angle theta (seeing Fig. 3 for details), is beneficial to a user input, and scanner 30 promptly is installed on the base plate position 31 of keyboard 28.Control housing 24 can be equiped with a screen 29, and with this master data of shows wafer flame storage box 21, and chip flame storage box 21 has the groove of colluding 14, is beneficial to take out in first module 23.
See also Fig. 4, first module 21 is equiped with between 25 storage areas 40, and 40 all has a slotted opening 291 between each a plurality of storage area, insert between the storage area 40 for chip flame storage box 21, and control housing 24 utilizes scanning device 30 to come the mode of scanning bar code 27, can also be equiped with a wafer reading device or a magnetic card reading device (not shown), to read a wafer 71 or the magnetic card 81 on the chip flame storage box 80 as shown in Figure 8 on the chip flame storage box 70 as shown in Figure 7 instead.And 40 all have a slotted opening 291 shown in Figure 2 between each a plurality of storage area, insert between the storage area 40 for chip flame storage box 21.40 are equipped with a terminal inductive switch 41 between a plurality of storage areas, have arrived between the storage area desired location 42 of 40 to determine chip flame storage box 21, and have started the display lamp 50 (seeing Fig. 5 for details) on first module 23.40 can have a sequence number (for example: one first link between the 8th storage area of first module 23 of cabinet 293 40 with what " 1.1.1.08 " represented that one first master control cabinet 24 controlled) between the storage area, and this sequence number is set via a main frame 292, to determine a storage location of chip flame storage box 21.
A kind of storage device 20 that provides according to a further aspect of the invention, its be applied to store an object (such as: a chip flame storage box 21), it comprises a storage cabinet body 22, one first storage device 23, it is installed in the storage cabinet body 22, in order to store this object, an and control setup 24, it is installed in the storage cabinet body 22, in order to control first storage device 23, to show the use information of this object.Certainly, the storage cabinet 20 of this moment can be applied to store a chip flame storage box 21, and this object is chip flame storage box 21, and first storage device 23 is one first module 23, and control setup 24 is a control housing 24.Differing as for this object of present embodiment is decided to be other detail sections of chip flame storage box 21, is as in the previous paragraph, so repeat no more in this.
In sum, the present invention really can be with the design of a novelty, by utilizing one first module to store this chip flame storage box, promptly made the access of this chip flame storage box more rapid and certain, and a control housing that is used can help showing the use information of this chip flame storage box to control this first module.
Claims (10)
1. the storage cabinet of a chip flame storage box, it is applied to store a chip flame storage box, and it comprises:
One storage cabinet body;
One first module, it is installed in this storage cabinet body, in order to store this chip flame storage box; And
One control housing, it is installed in this storage cabinet body, in order to control this first module, to show the use information of this chip flame storage box.
2. storage cabinet as claimed in claim 1 is characterized in that:
This control housing is equiped with a pair of illuminated sensor, to respond to this chip flame storage box near a long and narrow bracing frame;
This in order to starting the one scan device, scanning the bar code on this chip flame storage box, and reads a master data of this chip flame storage box to illuminated sensor;
This control housing is equiped with a keyboard, and this keyboard has an angle of inclination, be beneficial to a user and import, and this scanner is installed on the base plate position of this keyboard; And/or
This control housing is equiped with a screen, and showing this master data of this chip flame storage box, and this chip flame storage box has the groove of colluding, and is beneficial to take out in this first module.
3. storage cabinet as claimed in claim 1, it is characterized in that this first module is equiped with between a plurality of storage areas, and respectively all has a slotted opening between these a plurality of storage areas, insert between this storage area for this chip flame storage box, and this control housing is equiped with a wafer reading device or a magnetic card reading device, to read a wafer or the magnetic card on this chip flame storage box.
4. storage cabinet as claimed in claim 3 is characterized in that respectively being equipped with between these a plurality of storage areas a terminal inductive switch, has arrived the desired location between this storage area to determine this chip flame storage box, and has started the display lamp on this first module.
5. storage cabinet as claimed in claim 3 is characterized in that:
Have a sequence number between this storage area, and this sequence number sets via a main frame, to determine a storage location of this chip flame storage box;
This storage cabinet also comprises one second and one the 3rd module, to place the flame storage box of a plurality of 12 inches wafers;
This first, this second and the 3rd module is to be positioned at one to link cabinet, and this main frame links cabinets by a programmable logic controller (PLC) to control to eight, and this binding cabinet is equiped with a telltale, to show a numbering of this binding cabinet; And/or
An oxygenation measurement device and a flow counter surplus being equiped with one in this binding cabinet reach nitrogen content that replenishes in this binding cabinet in order to a remaining oxygen amount of detecting in this binding cabinet.
6. storage cabinet as claimed in claim 1 is characterized in that also comprising one second, 1 the 3rd and 1 the 4th module, to place the flame storage box of a plurality of 8 inches wafers.
7. storage device, it is applied to store an object, and it comprises:
One storage cabinet body;
One first storage device is installed in this storage cabinet body, in order to store this object; And
One control setup, it is installed in this storage cabinet body, in order to control this first storage device, to show the use information of this object.
8. storage cabinet as claimed in claim 7 is characterized in that:
This storage cabinet is applied to store a chip flame storage box, and this object is this chip flame storage box, and this first storage device is one first module, and this control setup is a control housing;
This control housing is equiped with a pair of illuminated sensor, to respond to this chip flame storage box near a long and narrow bracing frame;
This in order to starting the one scan device, scanning the bar code on this chip flame storage box, and reads a master data of this chip flame storage box to illuminated sensor; And/or
This control housing is equiped with a keyboard, and this keyboard has an angle of inclination, be beneficial to a user and import, and this scanner is installed on the base plate position of this keyboard.
9. the storage cabinet of a chip flame storage box, it is applied to store a chip flame storage box, and it comprises:
One storage cabinet body; And
One first module, it is installed in this storage cabinet body, and this first module has between a plurality of storage areas, and respectively all has a slotted opening between these a plurality of storage areas, for inserting between this storage area of this chip flame storage box, in order to store this chip flame storage box.
10. storage cabinet as claimed in claim 9 is characterized in that:
This storage cabinet also comprises a control housing, and it is installed in this storage cabinet body, in order to controlling this first module, and shows the use information of this chip flame storage box; And/or
This control housing is equiped with a pair of illuminated sensor, to respond to this chip flame storage box near a long and narrow bracing frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410060392 CN1796251A (en) | 2004-12-22 | 2004-12-22 | Storing cabinet of storage box for chip frames |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410060392 CN1796251A (en) | 2004-12-22 | 2004-12-22 | Storing cabinet of storage box for chip frames |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1796251A true CN1796251A (en) | 2006-07-05 |
Family
ID=36817604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410060392 Pending CN1796251A (en) | 2004-12-22 | 2004-12-22 | Storing cabinet of storage box for chip frames |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1796251A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101863362A (en) * | 2010-06-21 | 2010-10-20 | 深圳市华正联实业有限公司 | Intelligent access device |
| CN106005699A (en) * | 2016-07-29 | 2016-10-12 | 国网山东省电力公司蓬莱市供电公司 | Cleaning and containing cabinet for electric power instrument |
| CN107068600A (en) * | 2016-12-13 | 2017-08-18 | 成都绿迪科技有限公司 | It is easy to the monocrystalline silicon storage box stacked |
| CN107676349A (en) * | 2015-10-20 | 2018-02-09 | 温州市科泓机器人科技有限公司 | The Express Logistics cabinet that can quickly connect |
-
2004
- 2004-12-22 CN CN 200410060392 patent/CN1796251A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101863362A (en) * | 2010-06-21 | 2010-10-20 | 深圳市华正联实业有限公司 | Intelligent access device |
| CN101863362B (en) * | 2010-06-21 | 2012-10-17 | 艾斯特国际安全技术（深圳）有限公司 | Intelligent access device |
| CN107676349A (en) * | 2015-10-20 | 2018-02-09 | 温州市科泓机器人科技有限公司 | The Express Logistics cabinet that can quickly connect |
| CN107676349B (en) * | 2015-10-20 | 2019-07-23 | 温州市科泓机器人科技有限公司 | The Express Logistics cabinet that can quickly connect |
| CN106005699A (en) * | 2016-07-29 | 2016-10-12 | 国网山东省电力公司蓬莱市供电公司 | Cleaning and containing cabinet for electric power instrument |
| CN107068600A (en) * | 2016-12-13 | 2017-08-18 | 成都绿迪科技有限公司 | It is easy to the monocrystalline silicon storage box stacked |
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